CN114683425A - Scriber adjusting device and scribing machine - Google Patents
Scriber adjusting device and scribing machine Download PDFInfo
- Publication number
- CN114683425A CN114683425A CN202210363250.6A CN202210363250A CN114683425A CN 114683425 A CN114683425 A CN 114683425A CN 202210363250 A CN202210363250 A CN 202210363250A CN 114683425 A CN114683425 A CN 114683425A
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- China
- Prior art keywords
- sliding
- groove
- scribe
- sliding block
- sliding plate
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- 230000005540 biological transmission Effects 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 description 7
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Dicing (AREA)
Abstract
The invention provides a scribing knife adjusting device and a scribing machine, belonging to the technical field of wafer scribing, wherein the scribing knife adjusting device comprises: the sliding plate is fixedly connected with the mounting seat; the sliding plate is provided with an arc sliding surface; one end of the sliding block is connected with the paddle; the sliding block is provided with an arc-shaped matching surface in sliding connection with the sliding surface; according to the scribing knife adjusting device, the angle formed by the scribing knife and the wafer is adjusted through the relative sliding between the sliding plate and the sliding block; the adjusting device is simple in structure and convenient in adjusting mode.
Description
Technical Field
The invention relates to the technical field of wafer dicing, in particular to a dicing blade adjusting device and a dicing saw.
Background
Mainly aims at the cutting of optical communication chip wafers made of gallium arsenide and indium phosphide before use.
In the dicing process, the wafer needs to be diced by using a dicing saw, and in the dicing process, the angle formed by the dicing saw and the wafer needs to be adjusted.
In the prior art, the adjusting structure is complex, and the adjusting mode is complex.
Disclosure of Invention
Therefore, the technical problem to be solved by the invention is to overcome the defects of complex adjusting structure and complicated adjusting mode in the prior art, thereby providing an adjusting device of a scriber.
The invention also provides a dicing saw.
In order to solve the above technical problem, the invention provides a scribe adjusting device, comprising:
the sliding plate is fixedly connected with the mounting seat; the sliding plate is provided with an arc-shaped sliding surface;
one end of the sliding block is connected with the paddle; the sliding block is provided with an arc-shaped matching surface in sliding connection with the sliding surface.
Preferably, a limiting structure is arranged between the sliding plate and the sliding block.
As preferred scheme, limit structure includes:
the first groove is formed in the matching surface of the sliding block; the first groove is a dovetail groove;
the first limiting bulge is arranged on the sliding surface of the sliding plate; the first limiting protrusion is in sliding fit with the first groove.
As preferred scheme, limit structure still includes:
the second groove is formed in the side face, facing the sliding block, of the first limiting protrusion;
the second limiting bulge is arranged in the first groove; the second limiting protrusion is matched with the second groove.
Preferably, the method further comprises the following steps:
and the driving structure is arranged between the sliding plate and the sliding block.
Preferably, the driving structure includes:
the driving rod is rotatably arranged on the sliding plate; the driving rod is provided with a first thread structure; a second thread structure is arranged on the matching surface of the sliding plate; the first thread structure is in transmission connection with the second thread structure.
Preferably, the first thread structure is arranged in the second groove; the second thread structure is arranged on the second limiting protrusion.
Preferably, the first thread structure is arranged at the bottom of the second groove.
The invention also provides a scribing machine, which comprises the scribing knife adjusting device.
The technical scheme of the invention has the following advantages:
1. the invention provides a scribing knife adjusting device, which comprises: a slide plate and a slide block; the angle formed by the scribing knife and the wafer is adjusted through the relative sliding between the sliding plate and the sliding block; the adjusting device is simple in structure and convenient in adjusting mode.
2. According to the utility model, a limiting structure is arranged between the sliding plate and the sliding block; the limiting structure can limit the moving position between the sliding plate and the sliding block.
3. The invention provides a scribing knife adjusting device, wherein the driving structure comprises: a drive rod; the driving rod is provided with a first thread structure, and the matching surface of the sliding plate is provided with a second thread structure matched with the first thread structure; this mode only needs the rotation actuating lever, can realize rotation between slide and the sliding block and fix, and the regulative mode is simple.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a schematic structural diagram of a first state of the scribing knife adjusting device of the present invention.
Fig. 2 is a schematic structural diagram of a second state of the scribing knife adjusting device of the present invention.
Fig. 3 is a schematic cross-sectional structure diagram of the scribing knife adjusting device of the present invention.
Description of reference numerals:
1. a slide plate; 2. a slider; 3. a cutter; 4. a drive rod; 5. a first limit protrusion; 6. a second limit bulge; 7. and (7) mounting a seat.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Example 1
The utility model provides an adjusting device of a utility knife, including the slide 1 fixedly connected with mount pad 7; the sliding plate 1 is provided with an arc-shaped sliding surface; sliding connection has sliding block 2 on the glide plane of slide 1, have on the sliding block 2 with glide plane sliding connection arc fitting surface.
Through the relative slip between slide 1 and the sliding block 2, realize the regulation of the angle that scriber 3 and wafer become, this adjusting device simple structure, the regulative mode is convenient.
As shown in fig. 2, a first groove is formed on the mating surface of the sliding block 2; a first limiting bulge 5 which is in sliding fit with the first groove is arranged on the sliding surface of the sliding plate 1; the first groove is a dovetail groove, and the shape of the first limiting bulge 5 is matched with that of the first groove.
A second groove is formed in the first limiting bulge 5; a second limiting bulge 6 matched with the second groove is arranged in the first groove;
as shown in fig. 3, a driving rod 4 is rotatably disposed in the sliding plate 1, a first thread structure is disposed on the driving rod 4, a connecting hole is disposed in the second groove, and the first thread structure of the driving rod 4 extends out of the connecting hole; a second thread structure is arranged on the second limiting bulge 6, and the first thread structure is in transmission connection with the second thread structure;
the driving rod 4 is rotated, the sliding block 2 moves on the sliding plate 1 through transmission of the first threaded structure and the second threaded structure, and the adjustment of the angle formed by the scribing knife 3 and the wafer is realized.
Furthermore, the connecting hole is formed in the bottom of the second groove, the first threaded structure extends out of the connecting hole, and the second threaded structure is arranged along the extending direction of the second limiting protrusion 6.
Method of use and principles
Through rotating the actuating lever 4, first helicitic texture with the transmission of second helicitic texture is connected, drives sliding block 2 and removes along the glide plane of slide 1, and then drives the gliding glide plane of row sword 3 along slide 1 and removes.
Example 2
This embodiment provides a dicing saw including the dicing blade adjustment apparatus described in embodiment 1.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. This need not be, nor should it be exhaustive of all embodiments. And obvious variations or modifications therefrom are within the scope of the invention.
Claims (9)
1. A scribe adjustment device, comprising:
the sliding plate (1) is fixedly connected with the mounting seat (7); the sliding plate (1) is provided with an arc-shaped sliding surface;
one end of the sliding block (2) is connected with the paddle (3); the sliding block (2) is provided with an arc-shaped matching surface in sliding connection with the sliding surface.
2. A scribe adjustment device according to claim 1, characterized in that a limit structure is provided between the slide plate (1) and the slide block (2).
3. The scribe adjustment apparatus of claim 2, wherein the limit structure comprises:
the first groove is formed in the matching surface of the sliding block (2); the first groove is a dovetail groove;
the first limiting bulge (5) is arranged on the sliding surface of the sliding plate (1); the first limiting protrusion (5) is in sliding fit with the first groove.
4. The scribe adjustment apparatus of claim 3, wherein the limit structure further comprises:
the second groove is formed in the side face, facing the sliding block (2), of the first limiting protrusion (5);
the second limiting bulge (6) is arranged in the first groove; the second limiting bulge (6) is matched with the second groove.
5. The scribe adjustment apparatus of claim 4, further comprising:
the driving structure is arranged between the sliding plate (1) and the sliding block (2).
6. The scribe knife adjustment apparatus of claim 5, wherein the drive structure comprises:
the driving rod (4) is rotatably arranged on the sliding plate (1); the driving rod (4) is provided with a first thread structure; a second thread structure is arranged on the matching surface of the sliding plate (1); the first thread structure is in transmission connection with the second thread structure.
7. The scribe adjustment device of claim 6, wherein the first thread structure is disposed within the second groove; the second thread structure is arranged on the second limiting bulge (6).
8. The scribe adjustment apparatus of claim 7, wherein the first thread feature is disposed at a groove bottom location of the second groove.
9. A dicing saw comprising the scribe knife adjustment apparatus of any one of claims 1 to 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210363250.6A CN114683425A (en) | 2022-04-07 | 2022-04-07 | Scriber adjusting device and scribing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210363250.6A CN114683425A (en) | 2022-04-07 | 2022-04-07 | Scriber adjusting device and scribing machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114683425A true CN114683425A (en) | 2022-07-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210363250.6A Pending CN114683425A (en) | 2022-04-07 | 2022-04-07 | Scriber adjusting device and scribing machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114683425A (en) |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103395090A (en) * | 2013-07-19 | 2013-11-20 | 长春理工大学 | Testing apparatus for mechanical grating ruling process |
| CN108343814A (en) * | 2018-02-27 | 2018-07-31 | 攀枝花市旭鼎机械制造有限公司 | Angle regulator |
| CN207900670U (en) * | 2017-12-27 | 2018-09-25 | 际华三五零二职业装有限公司 | A kind of multi-functional adjustment base device |
| CN208010885U (en) * | 2017-11-07 | 2018-10-26 | 烟台飞马瓦特热交换技术有限公司 | A kind of inclination-angle regulating device of accurate adjustable inclination |
| JP2019188583A (en) * | 2018-04-28 | 2019-10-31 | 福建省通通発科技発展有限公司 | Modernized new type jig component for work-piece clamping |
| CN110539010A (en) * | 2019-09-29 | 2019-12-06 | 广州德志金属制品有限公司 | Portable adjustable angle bore hole device |
| CN210335925U (en) * | 2019-07-15 | 2020-04-17 | 郑州旭飞光电科技有限公司 | Marking device |
| CN212095571U (en) * | 2020-01-09 | 2020-12-08 | 东莞市盛鸣鸿精密机械有限公司 | Lower positioning grinding jig for numerical control blade |
| CN113183342A (en) * | 2021-05-19 | 2021-07-30 | 精良(北京)电子科技有限公司 | Cutting head device and chip cleavage equipment with same |
| CN214066538U (en) * | 2020-09-25 | 2021-08-27 | 上海桦康医疗器械有限公司 | Knife rest mechanism for slicer |
| CN215004339U (en) * | 2021-06-18 | 2021-12-03 | 武汉大学 | Virtual position-free angle adjustment sample seat based on vibration slicing machine |
-
2022
- 2022-04-07 CN CN202210363250.6A patent/CN114683425A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103395090A (en) * | 2013-07-19 | 2013-11-20 | 长春理工大学 | Testing apparatus for mechanical grating ruling process |
| CN208010885U (en) * | 2017-11-07 | 2018-10-26 | 烟台飞马瓦特热交换技术有限公司 | A kind of inclination-angle regulating device of accurate adjustable inclination |
| CN207900670U (en) * | 2017-12-27 | 2018-09-25 | 际华三五零二职业装有限公司 | A kind of multi-functional adjustment base device |
| CN108343814A (en) * | 2018-02-27 | 2018-07-31 | 攀枝花市旭鼎机械制造有限公司 | Angle regulator |
| JP2019188583A (en) * | 2018-04-28 | 2019-10-31 | 福建省通通発科技発展有限公司 | Modernized new type jig component for work-piece clamping |
| CN210335925U (en) * | 2019-07-15 | 2020-04-17 | 郑州旭飞光电科技有限公司 | Marking device |
| CN110539010A (en) * | 2019-09-29 | 2019-12-06 | 广州德志金属制品有限公司 | Portable adjustable angle bore hole device |
| CN212095571U (en) * | 2020-01-09 | 2020-12-08 | 东莞市盛鸣鸿精密机械有限公司 | Lower positioning grinding jig for numerical control blade |
| CN214066538U (en) * | 2020-09-25 | 2021-08-27 | 上海桦康医疗器械有限公司 | Knife rest mechanism for slicer |
| CN113183342A (en) * | 2021-05-19 | 2021-07-30 | 精良(北京)电子科技有限公司 | Cutting head device and chip cleavage equipment with same |
| CN215004339U (en) * | 2021-06-18 | 2021-12-03 | 武汉大学 | Virtual position-free angle adjustment sample seat based on vibration slicing machine |
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