CN114683423A - Microscope structure of scribing machine - Google Patents
Microscope structure of scribing machine Download PDFInfo
- Publication number
- CN114683423A CN114683423A CN202210610947.9A CN202210610947A CN114683423A CN 114683423 A CN114683423 A CN 114683423A CN 202210610947 A CN202210610947 A CN 202210610947A CN 114683423 A CN114683423 A CN 114683423A
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- microscope
- plate
- clamping
- clamping plate
- dicing saw
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N2021/8411—Application to online plant, process monitoring
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- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
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- General Health & Medical Sciences (AREA)
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Microscoopes, Condenser (AREA)
Abstract
The invention discloses a microscope structure of a scribing machine, belonging to the technical field of accessories of precision machine tool equipment, and comprising a slide carriage, a motor lead screw assembly, a guide rail assembly and a fixing piece, wherein the fixing piece is used for clamping and mounting a microscope body; the mounting includes the mirror body holder, the mirror body support, the mirror body holder is all connected at the both ends of mirror body support, the mirror body holder includes the connecting plate, first splint, the second splint, the end connection of connecting plate and mirror body support, first splint link to each other with the second splint, first splint are installed on the connecting plate with the second splint, centre gripping installation microscope body between first splint and the second splint, all set up the centre gripping arc wall with microscope body surface looks adaptation on first splint and the second splint. The invention improves the working efficiency, reduces the transverse moving stroke, avoids adopting a large-lead screw rod, and improves the resolution and the positioning precision.
Description
Technical Field
The invention belongs to the technical field of accessories of precision machine tool equipment, and particularly relates to a microscope structure of a dicing saw.
Background
A dicing saw belongs to precision machine tool equipment, and when the dicing saw is used for cutting a wafer workpiece, a microscope is required to be used for observing the cut workpiece; the existing microscope structure is a single microscope structure which is arranged on one side of a dicing saw, the microscope is moved to the position above a station for positioning before cutting, and the microscope is moved to the position above the station for observation after cutting. Install the shortcoming of current microscope structure in wafer cutter one side and lie in: the use is inconvenient, the double-station switching use cannot be well met, and when the double stations are switched, the moving distance of a microscope is long, the time is wasted, and the cutting efficiency is influenced; in addition, the existing microscope structure usually adopts a large-lead screw to realize movement, which affects positioning accuracy and moving axis resolution. Therefore, a microscope structure of a dicing saw which can be well used by switching double stations needs to be developed.
Disclosure of Invention
Aiming at the problems, the invention makes up the defects of the prior art and provides a microscope structure of a scribing machine.
In order to achieve the purpose, the invention adopts the following technical scheme.
The invention provides a microscope structure of a scribing machine, which comprises a slide carriage, a motor lead screw assembly, a guide rail assembly and a fixing piece, wherein the fixing piece is used for clamping and mounting a microscope body; the fixing piece comprises a mirror body clamping piece and a mirror body bracket, the mirror body bracket is connected to the motor screw rod assembly and the guide rail assembly, and the two ends of the mirror body bracket are connected with the mirror body clamping piece; the microscope body clamping piece comprises a connecting plate, a first clamping plate and a second clamping plate, the connecting plate is connected with the end of the microscope body support, the first clamping plate is connected with the second clamping plate, the first clamping plate and the second clamping plate which are connected together are installed on the connecting plate, the microscope body is clamped and installed between the first clamping plate and the second clamping plate, and clamping arc-shaped grooves matched with the outer surface of the microscope body are formed in the first clamping plate and the second clamping plate.
As a preferred scheme of the invention, the slide carriage comprises a first plate body and a second plate body which are integrally formed, and a transverse sliding groove is formed in the first plate body; the slide carriage is connected with a driving mechanism on the dicing saw and is connected with a transverse sliding track on the dicing saw through a transverse sliding chute, and the slide carriage is driven by the driving mechanism on the dicing saw and can reciprocate on the transverse sliding track of the dicing saw.
As another preferable scheme of the invention, a motor screw assembly is installed on the left side of the second plate body of the slide carriage, an installation groove is formed in the lower portion of the front side surface of the second plate body of the slide carriage, and the guide rail assembly is connected in the installation groove.
As another preferable scheme of the invention, the lower part of the front side surface of the second plate body of the slide carriage is further provided with a limiting block, and the limiting block is arranged at a position close to the motor screw assembly.
As another preferable scheme of the present invention, the guide rail assembly includes a slide rail and a slide block, the slide rail is fixedly connected to the mounting groove, and the slide block is slidably connected to the slide rail.
As another preferable scheme of the present invention, the mirror body bracket includes a first mounting plate and a second mounting plate, the first mounting plate is vertically connected to a rear side of the second mounting plate, the first mounting plate is fixedly connected to the motor screw assembly, and the second mounting plate is fixedly connected to the guide rail assembly.
As another preferable scheme of the invention, the clamping arc-shaped groove of the first clamping plate is buckled on one half side surface of the microscope body, the clamping arc-shaped groove of the second clamping plate is buckled on the other half side surface of the microscope body, the first clamping plate and the second clamping plate are connected through a screw, the screw penetrates through the first clamping plate and then is connected with the second clamping plate, and the second clamping plate and the connecting plate are connected through a screw.
As another preferred scheme of the present invention, the motor screw assembly includes a motor, a screw, an outer fixed sliding frame and a moving block, the outer fixed sliding frame is fixedly connected in front of a power output end of the motor, one end of the screw is connected to the power output end of the motor, the other end of the screw is connected to the outer fixed sliding frame, the screw is connected to the moving block, and two sides of the moving block are slidably connected to the outer fixed sliding frame.
The invention has the beneficial effects that:
the invention provides a scribing machine microscope structure, which combines a fixing piece for clamping and installing a microscope body with a slide carriage, a motor lead screw assembly and a guide rail assembly, installs the microscope body at two ends of a microscope body bracket forming the fixing piece, and clamps and fixes the microscope body by a set microscope body clamping piece; before cutting or when observing after the cutting, can adopt suitable microscope body nearby to observe, make lateral shifting distance shorten, shortened the travel time, improve work efficiency, reduce lateral shifting's stroke, avoided adopting big helical pitch lead screw, improve resolution ratio and positioning accuracy.
Drawings
FIG. 1 is a schematic plan view of a microscope structure of a dicing saw according to the present invention.
FIG. 2 is an exploded view of a lens holder of a microscope structure of a dicing saw according to the present invention.
FIG. 3 is an exploded view of the present invention with the scope clamps at both ends of the scope support removed.
FIG. 4 is a view showing the mounting state between the lens holder and the connecting plate of the microscope structure of the dicing saw of the present invention.
FIG. 5 is a diagram of a dicing saw microscope structure incorporating two stations in accordance with the present invention.
The labels in the figure are: the microscope comprises a slide carriage 1, a motor lead screw component 2, a mirror body support 3, a connecting plate 4, a mounting groove 5, a microscope body 6, a first clamping plate 7, a second clamping plate 8, a guide rail component 9, a limiting block 10, a transverse sliding groove 11, a clamping arc-shaped groove 12 and a screw 13, wherein the slide carriage is arranged on the slide carriage; 101 is a first plate body, 102 is a second plate body, 201 is an external fixed sliding frame, 202 is a lead screw, 203 is a moving block, 204 is a motor, 301 is a first mounting plate, 302 is a second mounting plate, 901 is a sliding rail, and 902 is a sliding block.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects solved by the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and the detailed description. It should be understood that the detailed description and specific examples, while indicating the invention, are intended for purposes of illustration only and are not intended to limit the scope of the invention.
Referring to fig. 1 to 3, a microscope structure of a dicing saw comprises a slide carriage 1, a motor screw assembly 2, a guide rail assembly 9 and a fixing member, wherein the fixing member clamps and mounts a microscope body 6, the motor screw assembly 2 and the guide rail assembly 9 are both connected to the slide carriage 1, and the fixing member is respectively connected with the motor screw assembly 2 and the guide rail assembly 9; the mounting includes mirror body holder, mirror body support 3 connects on motor screw subassembly 2, guide rail set spare 9, mirror body support 3's both ends all are connected with mirror body holder, mirror body holder includes connecting plate 4, first splint 7, second splint 8, connecting plate 4 and mirror body support 3's end connection, first splint 7 links to each other with second splint 8, and first splint 7 and second splint 8 that link to each other are installed on connecting plate 4, centre gripping installation microscope body 6 between first splint 7 and the second splint 8, all be provided with the centre gripping arc wall 12 with the outer surface looks adaptation of microscope body 6 on first splint 7 and the second splint 8.
The slide carriage 1 comprises a first plate body 101 and a second plate body 102, the first plate body 101 and the second plate body 102 are integrally formed, and a transverse sliding groove 11 is formed in the first plate body 101; the slide carriage 1 is provided with mounting holes, the slide carriage 1 is fixedly connected with a driving mechanism on the dicing saw through the mounting holes and is connected with a transverse sliding track on the dicing saw through a transverse sliding chute 11, the slide carriage 1 is driven by the driving mechanism on the dicing saw and can reciprocate on the transverse sliding track of the dicing saw, and the driving of the whole microscope structure of the invention to transversely reciprocate above a station can be realized.
The mirror body bracket 3 comprises a first mounting plate 301 and a second mounting plate 302, the first mounting plate 301 is vertically connected to the rear side of the second mounting plate 302, the first mounting plate 301 is fixedly connected with the motor screw assembly 2, and the second mounting plate 302 is fixedly connected with the guide rail assembly 9; the guide rail assembly 9 has the functions of: the slide carriage can play a role in guiding, and can reinforce the stability of the fixing piece which clamps and installs the microscope body 6 and moves up and down relative to the slide carriage 1, thereby improving the overall stability of the microscope structure.
The motor lead screw component 2 is fixedly arranged on the slide carriage 1 through four screws 13, the motor lead screw component 2 comprises a motor 204, a lead screw 202, an external fixed sliding frame 201 and a moving block 203, the external fixed sliding frame 201 is fixedly connected in front of a power output end of the motor 204, one end of the lead screw 202 is connected to the power output end of the motor 204, the other end of the lead screw 202 is connected to the external fixed sliding frame 201, the lead screw 202 is connected with the moving block 203, and two sides of the moving block 203 are slidably connected with the external fixed sliding frame 201; under the rotation drive of the motor 204, the moving block 203 can move up and down on the screw 202, and the first mounting plate 301 of the mirror body bracket 3 is mounted on the moving block 203 of the motor screw assembly 2 through four screws 13, so that the fixing piece clamped and mounted with the microscope body 6 can be driven by the motor screw assembly 2 to move up and down on the slide carriage 1.
A motor screw rod assembly 2 is arranged on the left side of a second plate body 102 of the slide carriage 1, an installation groove 5 is formed in the lower portion of the front side face of the second plate body 102 of the slide carriage 1, and a guide rail assembly 9 is connected into the installation groove 5; the guide rail assembly 9 comprises a slide rail 901 and a slide block 902, the slide rail 901 is fixedly connected to the mounting groove 5 through four screws 13, the slide block 902 is slidably connected to the slide rail 901, and the slide block 902 is fixedly connected to the second mounting plate 302 of the mirror bracket 3 through four screws 13.
The lower part of the front side surface of the second plate body 102 of the slide carriage 1 is also provided with a limiting block 10, and the limiting block 10 is arranged at a position close to the motor screw assembly 2; the lens bracket 3 moving downwards can be blocked by the arranged limiting block 10, and the function of limiting the stroke of the lens bracket is achieved.
As shown in fig. 2, which is a schematic exploded view of the lens holder, the holding arc-shaped groove 12 of the first clamping plate 7 is fastened to one half side of the microscope body 6, the holding arc-shaped groove 12 of the second clamping plate 8 is fastened to the other half side of the microscope body 6, the first clamping plate 7 is connected to the second clamping plate 8 through three screws 13, the three screws 13 pass through the first clamping plate 7 and then are connected to the second clamping plate 8, and the second clamping plate 8 is connected to the connecting plate 4 through three screws 13; the lens clamping pieces connected with the two ends of the lens support 3 have the same structure and are symmetrically connected with the two ends of the lens support 3.
As shown in fig. 4, the connecting plates 4 at the two ends of the mirror body bracket 3 are fixedly connected with the end part of the mirror body bracket 3 through two screws 13; the mirror body bracket 3 and the connecting plate 4 can be connected by a screw 13, or the mirror body bracket 3 and the connecting plate 4 can be integrally connected as an alternative.
The working process of the microscope structure of the dicing saw comprises the following steps: the lateral shifting by carriage 1 drives the whole microscope structure and removes, realizes the horizontal motion of microscope body 6, and motor lead screw subassembly 2 is connected with mirror body support 3, thereby drives microscope body 6 upper and lower motion through motor drive mirror body support 3 upper and lower motion, and two microscope body 6 simultaneous movement, and the during operation selects suitable microscope body 6 to observe. As shown in fig. 5, the present invention combines the use state diagrams of two stations, in the observation station, the microscope body 6 on the left side is used for observation, and the microscope body 6 on the right side moves along with the observation station; and when the second station is observed, the microscope body 6 on the right side is used for observation, and the microscope body 6 on the left side moves along with the observation. Compared with the existing single microscope structure, the double-station switching device shortens the transverse movement distance during double-station switching, avoids the use of the original large-lead screw and can well meet the requirement of double-station switching. As shown in fig. 5, by using the microscope structure of the present invention, when the work station is switched, the right microscope body 6 can observe the work piece at the work station two, that is, the right microscope body 6 moves transversely by the distance of X1, which greatly shortens the moving distance and improves the working efficiency compared with the conventional single microscope structure which needs to move by the distance of X2.
According to the microscope structure, the microscope bodies 6 are arranged at two ends of the microscope body bracket 3, so that a certain distance is reserved between the two microscope bodies 6; as shown in fig. 5, when the workpiece at the first station is observed, the microscope body 6 at the left side can be used, when the workpiece at the second station is observed, the microscope body 6 at the right side can be used, the workpiece is observed nearby, and when the first station and the second station are switched, the microscope body 6 can be moved to the right for observation by moving a short distance.
It should be understood that the detailed description of the present invention is only for illustrating the present invention and is not limited by the technical solutions described in the embodiments of the present invention, and those skilled in the art should understand that the present invention can be modified or substituted equally to achieve the same technical effects; as long as the use requirements are met, the method is within the protection scope of the invention.
Claims (8)
1. A scribing machine microscope structure which is characterized in that: the microscope comprises a slide carriage, a motor lead screw assembly, a guide rail assembly and a fixing piece, wherein the fixing piece is used for clamping and mounting a microscope body, the motor lead screw assembly and the guide rail assembly are both connected to the slide carriage, and the fixing piece is respectively connected with the motor lead screw assembly and the guide rail assembly; the fixing piece comprises a mirror body clamping piece and a mirror body bracket, the mirror body bracket is connected to the motor screw rod assembly and the guide rail assembly, and the two ends of the mirror body bracket are connected with the mirror body clamping piece; the microscope body clamping piece comprises a connecting plate, a first clamping plate and a second clamping plate, the connecting plate is connected with the end of the microscope body support, the first clamping plate is connected with the second clamping plate, the first clamping plate and the second clamping plate which are connected together are installed on the connecting plate, the microscope body is clamped and installed between the first clamping plate and the second clamping plate, and clamping arc-shaped grooves matched with the outer surface of the microscope body are formed in the first clamping plate and the second clamping plate.
2. A dicing saw microscope structure according to claim 1, characterized in that: the slide carriage comprises a first plate body and a second plate body, the first plate body and the second plate body are integrally formed, and a transverse sliding groove is formed in the first plate body; the slide carriage is connected with a driving mechanism on the dicing saw and is connected with a transverse sliding track on the dicing saw through a transverse sliding chute, and the slide carriage is driven by the driving mechanism on the dicing saw and can reciprocate on the transverse sliding track of the dicing saw.
3. A dicing saw microscope structure according to claim 2, characterized in that: the motor lead screw assembly is installed on the left side of the second plate body of the slide carriage, a mounting groove is formed in the lower portion of the front side face of the second plate body of the slide carriage, and the guide rail assembly is connected in the mounting groove.
4. A dicing saw microscope structure according to claim 3, characterized in that: the lower part of the front side face of the second plate body of the slide carriage is also provided with a limiting block, and the limiting block is arranged at a position close to the motor screw rod assembly.
5. A dicing saw microscope structure according to claim 3, characterized in that: the guide rail assembly comprises a slide rail and a slide block, the slide rail is fixedly connected in the mounting groove, and the slide block can be slidably connected on the slide rail.
6. A dicing saw microscope structure according to claim 1, characterized in that: the mirror body support comprises a first mounting plate and a second mounting plate, the first mounting plate is perpendicularly connected to the rear side of the second mounting plate, the first mounting plate is fixedly connected with the motor screw component, and the second mounting plate is fixedly connected with the guide rail component.
7. A dicing saw microscope structure according to claim 1, characterized in that: the clamping arc-shaped groove of the first clamping plate is buckled on one half side surface of the microscope body, the clamping arc-shaped groove of the second clamping plate is buckled on the other half side surface of the microscope body, the first clamping plate and the second clamping plate are connected through screws, the screws penetrate through the first clamping plate and then are connected with the second clamping plate, and the second clamping plate and the connecting plate are connected through screws.
8. A dicing saw microscope structure according to claim 1, characterized in that: the motor lead screw assembly comprises a motor, a lead screw, an outer fixed sliding frame and a moving block, the outer fixed sliding frame is fixedly connected in front of a power output end of the motor, one end of the lead screw is connected to the power output end of the motor, the other end of the lead screw is connected to the outer fixed sliding frame, the moving block is connected to the lead screw, and two sides of the moving block are slidably connected with the outer fixed sliding frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210610947.9A CN114683423A (en) | 2022-06-01 | 2022-06-01 | Microscope structure of scribing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210610947.9A CN114683423A (en) | 2022-06-01 | 2022-06-01 | Microscope structure of scribing machine |
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| Publication Number | Publication Date |
|---|---|
| CN114683423A true CN114683423A (en) | 2022-07-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210610947.9A Pending CN114683423A (en) | 2022-06-01 | 2022-06-01 | Microscope structure of scribing machine |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1781684A (en) * | 2004-11-30 | 2006-06-07 | 株式会社迪斯科 | Cutting machine |
| CN108747754A (en) * | 2018-05-29 | 2018-11-06 | 碳星智能装备（深圳）有限公司 | A kind of multistation 5-shaft linkage numerical control polissoir |
| JP2018181931A (en) * | 2017-04-05 | 2018-11-15 | 株式会社ディスコ | Cutting device |
| US20190033568A1 (en) * | 2017-06-07 | 2019-01-31 | Xinyu Li | Fully Automatic Microscopic Scanner |
| CN210787984U (en) * | 2019-09-20 | 2020-06-19 | 广东锐军智能设备有限公司 | Multi-station automatic dispenser |
| US20210402635A1 (en) * | 2020-06-29 | 2021-12-30 | Disco Corporation | Processing apparatus |
-
2022
- 2022-06-01 CN CN202210610947.9A patent/CN114683423A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1781684A (en) * | 2004-11-30 | 2006-06-07 | 株式会社迪斯科 | Cutting machine |
| JP2018181931A (en) * | 2017-04-05 | 2018-11-15 | 株式会社ディスコ | Cutting device |
| US20190033568A1 (en) * | 2017-06-07 | 2019-01-31 | Xinyu Li | Fully Automatic Microscopic Scanner |
| CN108747754A (en) * | 2018-05-29 | 2018-11-06 | 碳星智能装备（深圳）有限公司 | A kind of multistation 5-shaft linkage numerical control polissoir |
| CN210787984U (en) * | 2019-09-20 | 2020-06-19 | 广东锐军智能设备有限公司 | Multi-station automatic dispenser |
| US20210402635A1 (en) * | 2020-06-29 | 2021-12-30 | Disco Corporation | Processing apparatus |
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Address after: 110 000 No. 53 Buyunshan Road, Huanggu District, Shenyang City, Liaoning Province Applicant after: Shenyang Heyan Technology Co.,Ltd. Address before: 110 000 No. 53 Buyunshan Road, Huanggu District, Shenyang City, Liaoning Province Applicant before: SHENYANG HEYAN TECHNOLOGY CO.,LTD. |
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Application publication date: 20220701 |