CN114682541A

CN114682541A - Multi-specification substrate brushing device

Info

Publication number: CN114682541A
Application number: CN202210453230.8A
Authority: CN
Inventors: 边晓东; 蒋成刚; 安稳鹏; 付佳维; 王峥
Original assignee: Beijing Semiconductor Equipment Institute
Current assignee: Beijing Semiconductor Equipment Institute
Priority date: 2022-04-27
Filing date: 2022-04-27
Publication date: 2022-07-01
Anticipated expiration: 2042-04-27
Also published as: CN114682541B

Abstract

The invention provides a multi-specification substrate brushing device, which comprises: a carrier plate; the moving mechanism is arranged on the support plate; the washing mechanism is arranged on the support plate in a sliding manner through the moving mechanism; and the substrate bearing disc is matched with the washing mechanism to brush the semiconductor substrate. This many specifications substrate brushing device bears the cooperation of dish through moving mechanism and washing mechanism and substrate, can realize carrying out the operation of clearing up many specifications, multiple type of semiconductor substrate automatically, has improved the efficiency of production, has promoted the commonality of clearing up the semiconductor substrate, has reduced manufacturing cost.

Description

Multi-specification substrate brushing device

Technical Field

The application relates to the technical field of semiconductor substrates, in particular to a multi-specification substrate brushing device.

Background

In the process of brushing and manufacturing the semiconductor substrate, in order to improve the production efficiency, improve the consistency of products and save the labor cost, an automatic device is gradually adopted. In order to improve the production efficiency and the consistency of products, a substrate is brushed by using a brushing device in the substrate brushing process.

However, the conventional brushing apparatus is poor in universality and can only brush semiconductor substrates with a single structure, but with the increasing maturity of semiconductor substrate technology, the specifications and the types of the semiconductor substrates are more and more diversified, and therefore, in order to improve the production efficiency and the universality of the brushing apparatus, the design of the multi-specification substrate brushing apparatus is carried out.

Disclosure of Invention

In view of the above, in order to overcome the defects in the prior art, the invention provides a multi-specification substrate brushing device, which effectively solves the problem of poor universality of the conventional brushing device.

According to the multi-specification substrate brushing device provided by the invention, the multi-specification substrate brushing device comprises a support plate; the moving mechanism is arranged on the support plate; the washing mechanism is arranged on the support plate in a sliding manner through the moving mechanism; and the substrate bearing disc is matched with the washing mechanism to brush the semiconductor substrate.

Preferably, the moving mechanism comprises a rail arranged on the carrier plate; a slider; and a sliding plate slidably disposed on the rail through the slider.

Preferably, the washing mechanism includes a rotating motor provided to the sliding plate; a cantilever, a first end of the cantilever being connected to one end of the sliding plate; one end of the supporting plate is connected with the second end of the cantilever; a first end of the rolling brush is connected with the rotating motor, and a second end of the rolling brush is connected with the supporting plate; and the first end of the gas-liquid pipe is connected with the sliding plate, the second end of the gas-liquid pipe is connected with the supporting plate, and the gas-liquid pipe is arranged on the side part of the rolling brush.

Preferably, many specifications substrate brushing device still includes waterproof mechanism, waterproof mechanism set up in brushing mechanism, waterproof mechanism include a plurality of with rotating electrical machines, the round brush with the gas-liquid tube complex waterproof board.

Preferably, the moving mechanism comprises a moving motor arranged on one side of the carrier plate; the belt wheel is connected with the output end of the mobile motor; one end of the synchronous belt is connected with the belt wheel, and the other end of the synchronous belt is arranged at one end of the carrier plate far away from the moving motor; and the washing mechanism is connected with the synchronous belt through the synchronous belt connecting plate.

Preferably, the moving mechanism comprises a detecting mechanism arranged on the carrier plate; the detection mechanism comprises a position detector fixing piece and a position detector, the position detector fixing piece is arranged on the support plate, and the position detector is arranged on the position detector fixing piece.

Preferably, the washing mechanism further comprises a first rolling brush adjusting plate connected with the sliding plate, and the rotating motor is connected with the first end of the rolling brush through the first rolling brush adjusting plate; and the second end of the rolling brush is connected with the supporting plate through the second rolling brush adjusting plate.

Preferably, the washing mechanism further comprises a first gas-liquid pipe supporting plate connected with the first rolling brush adjusting plate; the second gas-liquid pipe supporting plate is connected with the second rolling brush adjusting plate; the number of the gas-liquid pipes is two, the two gas-liquid pipes are respectively arranged on two sides of the rolling brush, the first ends of the two gas-liquid pipes are connected with the first gas-liquid pipe supporting plate, and the second ends of the two gas-liquid pipes are connected with the second gas-liquid pipe supporting plate.

Preferably, moving mechanism still includes tow chain and tow chain backup pad, the tow chain backup pad set up in the side of one side of hold-in range, the power connecting wire of moving motor arrange in the inside of tow chain, the tow chain set up in the tow chain backup pad.

Preferably, the length of the substrate bearing disc is consistent with that of the carrier plate, and the width of the substrate bearing disc is consistent with that of the rolling brush and the gas-liquid pipe.

According to the multi-specification substrate brushing device, the moving mechanism, the washing mechanism and the substrate bearing disc are matched, so that the operation of automatically cleaning multi-specification and multi-type semiconductor substrates can be realized, the production efficiency is improved, the universality of cleaning the semiconductor substrates is improved, and the production cost is reduced.

In order to make the aforementioned objects, features and advantages of the present application more comprehensible, preferred embodiments accompanied with figures are described in detail below.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained from the drawings without inventive effort.

FIG. 1 shows a schematic structural diagram of a multi-specification substrate brushing arrangement according to an embodiment of the invention;

fig. 2 is an enlarged schematic view illustrating a structure of a first end of a carrier plate according to an embodiment of the present invention;

FIG. 3 illustrates a further schematic diagram of a multi-format substrate brushing apparatus according to an embodiment of the invention;

FIG. 4 is an enlarged schematic view of the construction of a washing mechanism according to an embodiment of the present invention;

fig. 5 is an enlarged schematic view illustrating a structure of a second end of the carrier board according to an embodiment of the present invention.

Reference numerals: 1-a carrier plate; 101-a first end of a carrier plate; 102-a carrier second end; 2-a moving mechanism; 201-a moving motor; 202-a pulley; 203-a synchronous belt; 204-synchronous belt connecting plate; 205-a first track; 206-a second track; 207-a first slider; 208-a second slider; 209-sliding plate; 210-moving motor fixing plate; 211-track fixing blocks; 212-drag chain guard; 213-a drag chain; 214-tow chain support plate; 215-pulley seat; 3-a washing mechanism; 301-a rotating electrical machine; 302-rolling brush; 303-a first gas-liquid tube; 3031-liquid inlet pipe orifice; 3032-liquid outlet pipe mouth; 304-a second gas-liquid line; 305-a cantilever; 3051-a reinforcing plate; 3052-reinforcing plate; 306-a support plate; 307-a first rolling brush adjustment plate; 3071-first kidney-shaped hole; 308-a second rolling brush adjusting plate; 309-first gas-liquid tube support plate; 310-a second gas-liquid tube support plate; 311-a third gas-liquid tube support plate; 312-a fourth gas-liquid tube support plate; 313-an adjustment plate; 314-first connection board; 315-a second connection plate; 316-shaft seat; 317-second kidney shaped hole; 4-a substrate carrier tray; 5-a waterproof mechanism; 501-a first waterproof housing; 502-a second waterproof housing; 503-a first waterproof sheet; 504-a second waterproof sheet; 6-a detection mechanism; 601-a first position sensor mount; 602-position sensor catch; 603-second position sensor mount.

Detailed Description

The following detailed description is provided to assist the reader in obtaining a thorough understanding of the methods, devices, and/or systems described herein. However, various changes, modifications, and equivalents of the methods, apparatus, and/or systems described herein will be apparent to those skilled in the art upon review of the disclosure of the present application. For example, the order of operations described herein is merely an example, which is not limited to the order set forth herein, but rather, variations may be made in addition to operations which must occur in a particular order, which will be apparent upon understanding the disclosure of the present application. Moreover, descriptions of features known in the art may be omitted for the sake of clarity and conciseness.

The features described herein may be embodied in different forms and should not be construed as limited to the examples described herein. Rather, the examples described herein have been provided merely to illustrate some of the many possible ways to implement the methods, devices, and/or systems described herein that will be apparent after understanding the disclosure of the present application.

Throughout the specification, when an element (such as a layer, region, or substrate) is described as being "on," "connected to," coupled to, "over," or "overlying" another element, it may be directly "on," "connected to," coupled to, "over," or "overlying" the other element, or one or more other elements may be present therebetween. In contrast, when an element is referred to as being "directly on," "directly connected to," directly coupled to, "directly over" or "directly overlying" another element, there may be no intervening elements present.

As used herein, the term "and/or" includes any one of the associated listed items and any combination of any two or more of the items.

Although terms such as "first", "second", and "third" may be used herein to describe various elements, components, regions, layers or sections, these elements, components, regions, layers or sections should not be limited by these terms. Rather, these terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a first element, component, region, layer or section referred to in the examples described herein may be termed a second element, component, region, layer or section without departing from the teachings of the examples.

For ease of description, spatial relationship terms such as "above … …," "upper," "below … …," and "lower" may be used herein to describe one element's relationship to another element as illustrated in the figures. Such spatial relationship terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "above" or "upper" relative to other elements would then be oriented "below" or "lower" relative to the other elements. Thus, the term "above … …" includes both an orientation of "above … …" and "below … …" depending on the spatial orientation of the device. The device may also be otherwise oriented (e.g., rotated 90 degrees or at other orientations) and the spatially relative terms used herein should be interpreted accordingly.

The terminology used herein is for the purpose of describing various examples only and is not intended to be limiting of the disclosure. The singular forms also are intended to include the plural forms as well, unless the context clearly indicates otherwise. The terms "comprises," "comprising," and "having" specify the presence of stated features, quantities, operations, elements, components, and/or combinations thereof, but do not preclude the presence or addition of one or more other features, quantities, operations, components, elements, and/or combinations thereof.

Variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, may be expected. Thus, the examples described herein are not limited to the particular shapes shown in the drawings, but include changes in shape that occur during manufacturing.

The features of the examples described herein may be combined in various ways that will be apparent after understanding the disclosure of the present application. Further, while the examples described herein have a variety of configurations, other configurations are possible, as will be apparent after understanding the disclosure of the present application.

According to the multi-specification substrate brushing device provided by the invention, as shown in fig. 1 to 5, the multi-specification substrate brushing device is used for brushing a semiconductor substrate, and the multi-specification substrate brushing device is connected with an external controller (not shown) and realizes automatic cleaning of the semiconductor substrate through the control of the external controller. The multi-specification substrate brushing device comprises a support plate 1, a moving mechanism 2, a brushing mechanism 3 and a substrate bearing plate 4.

In the following description, detailed structures of the carrier plate 1, the moving mechanism 2, the washing mechanism 3, and the substrate carrier tray 4 of the multi-specification substrate brushing apparatus will be described in detail with reference to fig. 1 to 5.

As shown in fig. 1, the carrier plate 1 may be a rectangular plate made of a metal material such as aluminum or steel, and in an embodiment, the carrier plate 1 may be formed by splicing two rectangular aluminum plates, and the aluminum plates are provided with a plurality of threaded holes and connecting holes for connecting the moving mechanism 2 and the washing mechanism 3, which are described below, and installing the multi-specification substrate brushing apparatus at a position required by a production operation. The use of the metal material can ensure that the multi-specification substrate brushing device has high overall rigidity and strength and good corrosion resistance and abrasion resistance. It should be noted that the shape of the carrier plate 1 is not limited to a rectangle, and can be flexibly selected according to the actual production and processing requirements, for example: square or round, etc. For convenience of the following description, one end of the carrier 1 is defined as a first carrier end 101, and the other end of the carrier 1 is defined as a second carrier end 102.

As shown in fig. 1 to 5, in the embodiment, the moving mechanism 2 includes two tracks arranged correspondingly: a first track 205 and a second track 206. The moving mechanism 2 further includes a first slider 207, a second slider 208, and a sliding plate 209. Specifically, as shown in fig. 3, in the embodiment, a first rail 205 and a second rail 206 are correspondingly disposed at the top and the bottom of one side of the carrier plate 1, and both the first rail 205 and the second rail 206 may be fixedly connected to the carrier plate 1 by a rail fixing block 211. The rail fixing block 211 may be a rectangular parallelepiped block made of a metal material such as aluminum or steel, and the length of the rectangular parallelepiped block may be matched with the support plate 1 to facilitate the movement of the washing mechanism 3 described below. The first rail 205 and the second rail 206 may be, for example, i-shaped rails made of a metal material such as aluminum material or steel material, the i-shaped rails are fixedly connected with the rail fixing blocks 211 by screws, and the lengths of the first rail 205 and the second rail 206 are matched with the rail fixing blocks 211 correspondingly. The first and

second sliders

207 and 208 may be, for example, structural members made of metal material such as aluminum material or steel material and having grooves corresponding to the i-shaped rails, and the first and

second sliders

207 and 208 may slide along the first and

second rails

205 and 206, respectively. The sliding plate 209 may be, for example, a rectangular parallelepiped structural plate made of a metal material such as an aluminum material or a steel material, the length of the rectangular parallelepiped structural plate corresponds to the interval between the first rail 205 and the second rail 206, and both ends of the rectangular parallelepiped structural plate may be fixedly connected to the first slider 207 and the second slider 208, respectively, by using fixing screws. Thus, the washing mechanism 3 is fixedly connected to the sliding plate 209, so that the washing mechanism 3 can perform a reciprocating motion on the carrier plate 1 from the first end 101 of the carrier plate to the second end 102 of the carrier plate or from the second end 102 of the carrier plate to the first end 101 of the carrier plate. Here, the metal material is selected to improve strength, wear resistance and corrosion resistance.

As shown in fig. 1 to 5, in the embodiment, in order to realize the function of the automatic work, the moving mechanism 2 further includes: a moving motor 201, a pulley 202, a timing belt 203, and a timing belt connecting plate 204. Specifically, the moving motor 201 may be an existing device such as a servo motor or a hydraulic motor, and the moving motor 201 is connected to an external controller through a power connection line, and the start and stop of the moving motor 201 and the adjustment of the rotation speed are controlled by the external controller. The moving motor 201 is fixedly connected to the carrier plate 1 through a moving motor fixing plate 210, and the connection manner between the three parts may be, for example, fixing screws. The moving motor fixing plate 210 may be formed as an L-shaped structural plate, for example, one side of the L-shaped structural plate is connected to the carrier plate 1, and the other side is fixedly connected to the moving motor 201.

As shown in fig. 1 and 5, in an embodiment, two corresponding pulleys 202 may be provided, and the pulleys 202 may be, for example, grooves formed on the surface thereof for mounting a timing belt 203, and the shaft center is provided with a pulley shaft. One pulley 202 is mounted at the carrier plate first end 101 and the other pulley 202 is mounted at the carrier plate second end 102. As shown in fig. 3, in the embodiment, the pulley 202 mounted at the first end 101 of the carrier plate is connected to the output end of the moving motor 201, for example, by directly connecting the output end of the moving motor 201 to the pulley shaft. As shown in fig. 5, in the embodiment, the pulley 202 mounted at the second end 102 of the carrier plate can be fixed by a pulley seat 215 mounted on the carrier plate 1, the pulley seat 215 can be formed into a U-shaped structure, for example, two sides of the U-shaped structure are provided with bearings, the bottom side is fixedly connected with the carrier plate 1 by screws or the like, and the pulley 202 is clamped on the pulley seat 215. The two pulleys 202 are connected by a timing belt 203.

As shown in fig. 3, in the embodiment, a timing belt connecting plate 204 is disposed on the timing belt 203, the timing belt connecting plate 204 may be, for example, two connecting plates which are formed with a groove in the middle for matching with the timing belt 203 and can be fastened to each other, and the connecting plates are formed with threaded holes through which they are fixedly connected to the sliding plate 209. In this way, when the moving motor 201 is energized to rotate, the pulley 202 at the first end 101 of the carrier plate is driven, and the pulley 202 drives the sliding plate 209 through the synchronous belt 203 and the synchronous belt connecting plate 204 to realize an automatic reciprocating motion from the first end 101 of the carrier plate to the second end 102 of the carrier plate or from the second end 102 of the carrier plate to the first end 101 of the carrier plate.

Preferably, as shown in fig. 1, 3 and 5, in an embodiment, the moving mechanism 2 further comprises: a drag chain baffle 212, a drag chain 213, and a drag chain support plate 214. The drag chain guard 212 is installed at a lower side of the timing belt 203 and has a length corresponding to the first and

second rails

205 and 206. The drag chain guard 212 may be, for example, a plate made of a metal material such as aluminum or steel, and formed into a Z-shaped structure, one side of the Z-shaped structure is fixedly connected to the carrier plate 1 by using a fixing bolt, and the other side of the Z-shaped structure extends from the first rail 205 to the second rail 206 for protecting and separating the drag chain 213. The drag chain support plate 214 may be a plate made of aluminum or a metal material such as steel, for example, and formed into an L-shaped structure, one side of the L-shaped structure is fixedly connected with the carrier plate 1 by using a fixing bolt, and the other side is perpendicular to the carrier plate 1 for supporting the drag chain 213. The tow chain 213, which may be, for example, a device of the prior art, is installed between the tow chain guard 212 and the tow chain support plate 214 for arrangement of the power connection line of the moving motor 201 and the power connection lines of the remaining devices described below, avoiding damage to the power connection lines due to the reciprocating motion of the devices. Here, the metal material is selected to improve strength, wear resistance, and corrosion resistance.

Preferably, as shown in fig. 1-3 and 5, in an embodiment, the multi-format substrate brushing apparatus further comprises a detection mechanism 6. Specifically, in an embodiment, the detection mechanism 6 may include: a first position sensor holder 601, a position sensor flap 602, a second position sensor holder 603, a first position sensor (not shown), and a second position sensor (not shown). The first and second position sensors may be, for example, capacitive position sensors. The first position sensor holder 601 is mounted at the first end 101 of the carrier plate, and specifically may be, for example, the farthest end of the carrier plate from the first end 101 of the washing mechanism 3, and the second position sensor holder 603 is mounted at the second end 102 of the carrier plate, and specifically may be, for example, the farthest end of the carrier plate from the second end 102 of the washing mechanism 3, and both the first position sensor holder 601 and the second position sensor holder 603 are mounted at the upper side of the timing belt 203 for facilitating detection while avoiding interference. The position sensor shutter 602 may, for example, be mounted on the sliding plate 209. As such, when the first position sensor detects the position sensor flap 602, the washing mechanism 3 is located at one of the farthest ends of the first rail 205 and the second rail 206, and when the second position sensor holder 603 detects the position sensor flap 602, the washing mechanism 3 is located at the other one of the farthest ends of the first rail 205 and the second rail 206. In this way, the movement of the washing mechanism 3 can be detected by the detection mechanism 6. However, the type, installation position and detection mode of the sensor are not limited to those given in the embodiments, and may be, for example, a photoelectric sensor, a magnetic position sensor, a proximity switch, or the like, and the installation position may be specifically selected according to actual needs and types of sensors.

As shown in fig. 1 to 5, the washing mechanism 3 includes: a rotating motor 301, a cantilever 305, a support plate 306, a roller brush 302, and a gas-liquid pipe. Specifically, in the embodiment, the cantilever 305 and the support plate 306 may be, for example, a plate member formed into a rectangular parallelepiped structure made of a metal material such as an aluminum material or a steel material, one end of the cantilever 305 is connected to one end of the sliding plate 209 near the first rail 205, and the other end of the cantilever 305 is connected to one end of the support plate 306, so that the sliding plate 209, the cantilever 305 and the support plate 306 are formed into a U-shaped structure, and the U-shaped structure sandwiches the roller brush 302 and the gas liquid pipe. The rotating motor 301 is arranged on the sliding plate 209 and reciprocates along with the sliding plate 209, and a power supply connecting wire of the rotating motor 301 is arranged in the drag chain 213, so that interference is avoided, and the power supply connecting wire is protected. The rotating motor 301 is connected to an external controller through a power connection line for controlling the start and stop of the motor and the adjustment of the rotating speed. The output end of the rotating electrical machine 301 may be connected to the shaft of the roll brush 302 by, for example, using a coupling or the like. Here, the metal material is selected to improve strength, wear resistance, and corrosion resistance.

Preferably, as shown in fig. 1 to 4, in the embodiment, the connection portion of the sliding plate 209, the cantilever 305 and the support plate 306 is provided with the reinforcing plate 3051 and the reinforcing rib plate 3052 made of a metal material such as an aluminum material or a steel material, and the reinforcing plate 3051 and the reinforcing rib plate 3052 are provided to improve the strength and stability of the entire structure due to the long length of the cantilever 305.

In an embodiment, as shown in fig. 2 and 4, the number of gas-liquid tubes is two, and may be, for example, a first gas-liquid tube 303 and a second gas-liquid tube 304, which are respectively disposed on both sides of the roller brush 302, the first gas-liquid tube 303 being disposed on a side of the roller brush 302 adjacent to the second end 102 of the carrier plate, and the second gas-liquid tube 304 being disposed on a side of the roller brush 302 adjacent to the first end 101 of the carrier plate. First gas-liquid line 303 and second gas-liquid line 304 each include: a liquid inlet pipe orifice 3031 and a plurality of liquid outlet pipe orifices 3032. It should be noted that in the embodiment, the first gas-liquid pipe 303 may be used for spraying a scrubbing liquid medicine, and the second gas-liquid pipe 304 may be used for spraying a cleaning gas, and the scrubbing liquid medicine and the cleaning gas are both introduced into the inside of the gas-liquid pipe through the liquid inlet pipe orifice 3031 and are ejected from the plurality of liquid outlet pipe orifices 3032. The liquid scrubbing agent or the cleaning gas sprayed out from the first gas-liquid pipe 303 and the second gas-liquid pipe 304 can be selected according to actual operation requirements.

As shown in fig. 1 to 4, in the embodiment, the washing mechanism 3 further includes: first rolling brush adjusting plate 307, second rolling brush adjusting plate 308, first gas-liquid pipe support plate 309, second gas-liquid pipe support plate 310, third gas-liquid pipe support plate 311, fourth gas-liquid pipe support plate 312, adjusting plate 313, first connecting plate 314, second connecting plate 315.

Specifically, as shown in fig. 3, in the embodiment, the first rolling brush adjustment plate 307 may be, for example, a rectangular parallelepiped structural member made of a metal material such as an aluminum material or a steel material, the rectangular parallelepiped structural member is provided with a bearing at a center in the horizontal direction, and four corners are respectively provided with four first kidney-shaped holes 3071; first screw hole has been seted up to cuboid structure spare top surface in vertical direction. The adjusting plate 313 may be, for example, a rectangular parallelepiped structural member made of a metal material such as an aluminum material or a steel material, a second threaded hole penetrating through the top surface and the bottom surface is opened at a center of a top surface of the adjusting plate 313 in the vertical direction, and the second threaded hole is matched with the first threaded hole and connected by a bolt, so that the first rolling brush adjusting plate 307 and the bolt may be formed in a matching relationship similar to a lead screw nut. In this way, the first rolling brush adjustment plate 307 can be adjusted in the vertical direction (i.e., adjust the height of the rolling brush 302) by the cooperation of the first kidney-shaped hole 3071 with the slide plate 209 and the cooperation of the first rolling brush adjustment plate 307 with the adjustment plate 313. The rotary motor 301 is connected to the rolling brush 302 through a bearing of the first rolling brush adjusting plate 307 and a coupling. Here, the metal material is selected to improve strength, wear resistance, and corrosion resistance.

The bottom of the first rolling brush adjusting plate 307 is fixedly connected to one end of a first connecting plate 314, the other end of the first connecting plate 314 is fixedly connected to a second connecting plate 315, and the first connecting plate 314 and the second connecting plate 315 are formed in an L-shaped structure. First gas-liquid tube support plate 309 and third gas-liquid tube support plate 311 are fixedly connected to the end portions of second connection plate 315, respectively, for supporting one ends of first gas-liquid tube 303 and second gas-liquid tube 304.

As shown in fig. 4, in the embodiment, two second kidney-shaped holes 317 are opened at the bottom end of the supporting plate 306, and the second rolling brush adjusting plate 308 is adjusted in the vertical direction (i.e., the height of the rolling brush 302 is adjusted) by the second kidney-shaped holes 317 and the supporting plate 306. The second rolling brush adjusting plate 308 is fixedly connected with a shaft seat 316 for connecting the other end of the rolling brush 302. Second brush adjustment plate 308 and fourth gas-liquid pipe support plate 312 are also fixedly connected to second brush adjustment plate 308, and are used for supporting the other ends of first gas-liquid pipe 303 and second gas-liquid pipe 304. Thus, the height of the rolling brush 302 can be adjusted by adjusting the first rolling brush adjusting plate 307 and the second rolling brush adjusting plate 308, and the contact density of the rolling brush 302 with the substrate carrier tray 4 described below can be adjusted, and the brushing force can be adjusted. It should be noted here that in the embodiment, the first rolling brush adjustment plate 307 and the second rolling brush adjustment plate 308 are manually adjusted by an operator, but not limited thereto, an adjustment motor may be mounted on the adjustment plate 313, the adjustment motor is fixedly connected to a bolt through a coupling or the like, and is connected to an external controller through a power connection, and thus, the height is automatically adjusted.

As shown in fig. 1 to 4, in the embodiment, the substrate carrier tray 4 is formed in a rectangular parallelepiped structure and has a plurality of substrate carrier holes. However, without being limited thereto, the substrate carrier tray 4 may be specifically selected according to the specifications and number of substrates, the length of the carrier plate 1, the length of the cantilever 305, the length of the roller brush 302 and the gas-liquid tube, for example: the length of the substrate bearing disc 4 can be consistent with that of the carrier plate 1, and can also be one half of that of the carrier plate 1; the width of the substrate carrier plate 4 may correspond to the length of the roller brush 302 or may be one-half of the length of the roller brush 302.

In addition, the multi-specification substrate brushing apparatus further includes a waterproof mechanism 5, as shown in fig. 1, in an embodiment, the waterproof mechanism 5 includes: the first waterproof case 501, the second waterproof case 502, the first waterproof board 503, and the second waterproof board 504 are made of stainless steel, which is corrosion resistant and has good waterproofness. The first waterproof board 503 and the second waterproof board 504 are matched with each other in structure, and are matched with the rolling brush 302, the first gas-liquid pipe 303 and the second gas-liquid pipe 304, and are fixedly connected to the first rolling brush adjusting plate 307, so that the rotating motor 301 is isolated. The structures of the first waterproof housing 501 and the second waterproof housing 502 are matched with each other, and are matched with the cantilever 305, the rolling brush 302, the first gas-liquid pipe 303 and the second gas-liquid pipe 304, and are fixedly connected on the cantilever 305, and the first waterproof plate 503 and the second waterproof plate 504 are arranged in the housing, so that the waterproof effect is improved. Thus, when the first gas-liquid pipe 303 and the second gas-liquid pipe 304 spray out liquid medicine or gas, the stop or even damage caused by interference of the rotating motor 301 can be avoided.

The assembly process of the multi-specification substrate brushing device is as follows: firstly, a support plate 1 is welded to a working area through a fixing screw, and two rails are installed through a rail fixing block 211: the first rail 205 and the second rail 206, and the first rail 205 and the second rail 206 can be selected according to actual needs to be specifically mounted on the carrier board 1. The first slider 207 and the second slider 208 are mounted to the first rail 205 and the second rail 206, respectively. Then, a moving motor fixing plate 210 is installed, the moving motor 201 is fixedly connected to the moving motor fixing plate 210, two belt wheels 202 are respectively installed at the first end 101 and the second end 102 of the carrier plate, the belt wheel 202 located at the first end 101 of the carrier plate is installed at the moving motor fixing plate 210 and is connected with the output end of the moving motor 201, the belt wheel 202 located at the second end 102 of the carrier plate is fixedly connected to the carrier plate 1 through a belt wheel seat 215, a synchronous belt 203 is installed between the two belt wheels 202, and a synchronous belt connecting plate 204 is installed on the synchronous belt 203. The slide plate 209 is fixedly connected to the first slider 207, the second slider 208, and the timing belt connecting plate 204. Then, a drag chain guard 212 is attached to a lower side of the timing belt 203, a drag chain 213 is attached to a lower side of the drag chain guard 212, and a drag chain support plate 214 is attached to a lower side of the drag chain 213. Next, a first position sensor holder 601 and a second position sensor holder 603 are mounted at the carrier plate first end 101 and the carrier plate second end 102, respectively, and a first position sensor and a second position sensor are mounted, respectively, and a position sensor stopper 602 is mounted on the sliding plate 209. Thereafter, the cantilever 305 and the support plate 306 are mounted on the slide plate 209, and the reinforcing plate 3051 and the reinforcing plate 3052 are mounted therebetween. Adjustable first and second

brush adjusting plates

307 and 308 are installed at corresponding positions of the sliding plate 209 and the support plate 306, respectively. The rotating motor 301 is disposed between the sliding plate 209 and the carrier plate 1 and is connected to the rolling brush 302 by a first rolling brush adjusting plate 307, and the rotating motor 301 and the rolling brush 302 may be connected by using a coupling. One end of the roll brush 302 is connected to a first roll brush adjusting plate 307, and the other end is connected to a second roll brush adjusting plate 308. An adjusting plate 313 is arranged at the top of the first rolling brush adjusting plate 307, and the first rolling brush adjusting plate and the adjusting plate are connected through an adjusting bolt; the first roll brush adjusting plate 307 has a first connecting plate 314 and a second connecting plate 315 mounted at the bottom thereof. First gas-liquid tube support plate 309 and third gas-liquid tube support plate 311 are installed on second connection plate 315, and second gas-liquid tube support plate 310 and fourth gas-liquid tube support plate 312 are installed on the top of second rolling brush adjustment plate 308. First gas-liquid tube 303 and second gas-liquid tube 304 are respectively installed between first gas-liquid tube support plate 309 and second gas-liquid tube support plate 310 and between third gas-liquid tube support plate 311 and fourth gas-liquid tube support plate 312, and are communicated with external gas source and liquid medicine source. The substrate carrier tray 4 is disposed on one side of the roll brush 302, for example, the lower side as viewed in fig. 4. Then, the first waterproof sheet 503, the second waterproof sheet 504, the first waterproof case 501, and the second waterproof case 502 are installed. Finally, a power connection line, a liquid medicine line, and a gas line, which arrange the moving motor 201, the rotating motor 301, the first position detector (not shown), the second position detector (not shown), are laid inside the drag chain 213, and an external controller (not shown) is connected.

The multi-specification substrate brushing device comprises the following working processes: the height of the roll brush 302 (the degree of contact with the substrate carrier tray 4) is first adjusted by an operator. Start the power master switch, through external controller, control start of moving motor 201 and stop and the rotational speed, through band pulley 202, hold-in range 203 and hold-in range connecting plate 204 drive sliding plate 209, drive washing mechanism 3 through sliding plate 209 along first track 205 and second track 206 by support plate first end 101 to support plate second end 102 or by support plate second end 102 to support plate first end 101 carry out reciprocating motion, simultaneously through external controller, control opening of rotating motor 301 stops and the rotational speed, it rotates to drive round brush 302, and control first gas-liquid pipe 303 and second gas-liquid pipe 304 carry out the operation of spary wash liquid medicine and spout the clearance gas.

According to the multi-specification substrate brushing device, the moving mechanism 2, the washing mechanism 3 and the substrate bearing plate 4 are matched, so that the operation of automatically cleaning multi-specification and multi-type semiconductor substrates can be realized, the production efficiency is improved, the universality of cleaning the semiconductor substrates is improved, and the production cost is reduced.

Finally, it should be noted that: the above-mentioned embodiments are only specific embodiments of the present application, and are used for illustrating the technical solutions of the present application, but not limiting the same, and the scope of the present application is not limited thereto, and although the present application is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: any person skilled in the art can modify or easily conceive the technical solutions described in the foregoing embodiments or equivalent substitutes for some technical features within the technical scope disclosed in the present application; such modifications, changes or substitutions do not depart from the spirit and scope of the exemplary embodiments of the present application, and are intended to be covered by the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. A multi-format substrate brushing apparatus for brushing semiconductor substrates, the multi-format substrate brushing apparatus comprising:

a carrier plate;

the moving mechanism is arranged on the support plate;

the washing mechanism is arranged on the support plate in a sliding manner through the moving mechanism; and

a substrate carrying tray cooperating with the scrubbing mechanism to scrub the semiconductor substrate.

2. The multi-format substrate scrubbing apparatus of claim 1, wherein said moving mechanism comprises:

the track is arranged on the carrier plate;

a slider; and

a sliding plate slidably disposed on the rail through the slider.

3. The multi-format substrate scrubbing apparatus of claim 2, wherein said scrubbing mechanism comprises:

a rotating motor provided to the sliding plate;

a cantilever, a first end of the cantilever being connected to one end of the sliding plate;

one end of the supporting plate is connected with the second end of the cantilever;

a first end of the rolling brush is connected with the rotating motor, and a second end of the rolling brush is connected with the supporting plate; and

and the first end of the gas-liquid pipe is connected with the sliding plate, the second end of the gas-liquid pipe is connected with the supporting plate, and the gas-liquid pipe is arranged on the side part of the rolling brush.

4. The multi-format substrate scrubbing apparatus of claim 3, further comprising a water-resistant mechanism disposed in said scrubbing mechanism, said water-resistant mechanism comprising a plurality of water-resistant plates cooperating with said rotary motor, said roller brush, and said gas-liquid line.

5. The multi-format substrate scrubbing apparatus of claim 1, wherein said moving mechanism comprises:

the moving motor is arranged on one side of the carrier plate;

the belt wheel is connected with the output end of the mobile motor;

one end of the synchronous belt is connected with the belt wheel, and the other end of the synchronous belt is arranged at one end of the carrier plate far away from the moving motor; and

the synchronous belt connecting plate, the mechanism of washing passes through the synchronous belt connecting plate with the hold-in range is connected.

6. The multi-format substrate scrubbing apparatus of claim 1, wherein said moving mechanism comprises:

the detection mechanism is arranged on the carrier plate; the detection mechanism comprises a position detector fixing piece and a position detector, the position detector fixing piece is arranged on the support plate, and the position detector is arranged on the position detector fixing piece.

7. The multi-format substrate scrubbing apparatus of claim 3, wherein said scrubbing mechanism further comprises:

the first rolling brush adjusting plate is connected with the sliding plate, and the rotating motor is connected with the first end of the rolling brush through the first rolling brush adjusting plate; and

and the second end of the rolling brush is connected with the supporting plate through the second rolling brush adjusting plate.

8. The multi-format substrate scrubbing apparatus of claim 7, wherein said scrubbing mechanism further comprises:

the first gas-liquid pipe supporting plate is connected with the first rolling brush adjusting plate;

the second gas-liquid pipe supporting plate is connected with the second rolling brush adjusting plate;

the number of the gas-liquid pipes is two, the two gas-liquid pipes are respectively arranged on two sides of the rolling brush, the first ends of the two gas-liquid pipes are connected with the first gas-liquid pipe supporting plate, and the second ends of the two gas-liquid pipes are connected with the second gas-liquid pipe supporting plate.

9. The multi-format substrate brushing apparatus according to claim 5, wherein the moving mechanism further comprises a tow chain and a tow chain support plate, the tow chain support plate is provided on one side of the synchronous belt, a power connection line of the moving motor is arranged inside the tow chain, and the tow chain is provided in the tow chain support plate.

10. The multi-format substrate scrubbing apparatus of claim 3, wherein said substrate carrier tray has a length corresponding to said carrier plate and a width corresponding to said roller brush and said gas-liquid line.