CN114675512A - Pre-alignment device and method - Google Patents
Pre-alignment device and method Download PDFInfo
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- CN114675512A CN114675512A CN202011566862.2A CN202011566862A CN114675512A CN 114675512 A CN114675512 A CN 114675512A CN 202011566862 A CN202011566862 A CN 202011566862A CN 114675512 A CN114675512 A CN 114675512A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
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Abstract
The invention relates to the technical field of photoetching equipment, in particular to a pre-alignment device and a pre-alignment method. The pre-alignment device comprises a substrate table, a first edge detection assembly, a second edge detection assembly and a controller. The substrate table is used for bearing and adsorbing a substrate; the first edge detection assembly is used for detecting the position information of the first edge of the substrate and calculating the deflection value of the first edge; the second edge detection assembly is used for detecting the position information of a second edge of the substrate and calculating a deviation value of the second edge; the controller controls and drives the substrate table to adjust the alignment according to the deviation value of the first side and the deviation value of the second side. At least one of the first edge detection assembly and the second edge detection assembly is movably arranged on the substrate table to be suitable for detecting substrates with different sizes, so that the edge information of the substrates with different sizes is detected, and then the controller controls and drives the substrate table to be calibrated and adjusted, thereby improving the universality and the pre-alignment efficiency of the device and reducing the equipment cost.
Description
Technical Field
The invention relates to the technical field of photoetching equipment, in particular to a pre-alignment device and a pre-alignment method.
Background
If the substrate loading accuracy does not meet the requirement of the lithography machine, the next process cannot be performed, and therefore, before the substrate is subjected to the lithography process, a pre-alignment device is usually required to pre-align the substrate so as to ensure the substrate loading accuracy.
The prior substrate pre-alignment device is mostly provided with a detector on a substrate table, then the detector receives and collects the edge data of the substrate, and the adjustment of the RZ direction of the substrate is realized by adjusting the position of the substrate table through calculation according to the measured data. However, since the position of the detector in the conventional substrate pre-alignment apparatus is fixed, pre-alignment of only a single size substrate can be achieved. For substrates of different sizes, different substrate pre-alignment devices are required, which increases the equipment cost and is inconvenient to operate.
Therefore, a pre-alignment apparatus is needed to solve the above problems.
Disclosure of Invention
An object of the present invention is to provide a pre-alignment apparatus, which can pre-align a multi-sized substrate, improve pre-alignment efficiency, and reduce equipment cost.
Another objective of the present invention is to provide a pre-alignment method compatible with multi-size substrates, which achieves pre-alignment of the multi-size substrates, improves pre-alignment efficiency, and reduces equipment cost.
In order to realize the purpose, the following technical scheme is provided:
in one aspect, a pre-alignment apparatus is provided, including:
a substrate table for carrying and adsorbing a substrate;
a first edge detection unit for detecting position information of a first edge of the substrate and calculating a deviation value of the first edge;
the second edge detection assembly is used for detecting the position information of a second edge of the substrate and calculating a deviation value of the second edge;
at least one of the first edge detection assembly and the second edge detection assembly is movably arranged on the substrate table so as to be suitable for detecting the substrates with different sizes;
and the controller controls and drives the substrate table to calibrate and adjust according to the deviation value of the first side and the deviation value of the second side.
As an alternative to the pre-alignment means, the number of the first edge detection assemblies is at least two, and at least one of the first edge detection assemblies is movably disposed on the substrate table; and/or
The number of the second edge detection assemblies is at least two, and at least one of the second edge detection assemblies is movably arranged on the substrate table.
As an alternative to the pre-alignment means, two of the first edge detector assemblies may be movably disposed on the substrate table, and the two first edge detector assemblies may be kept moving by the same amount, and a connecting line of the two first edge detector assemblies may be parallel to an edge of the substrate table.
As an alternative to the pre-alignment means, at least one of the second edge detector assemblies is movably disposed on the substrate table; and/or two the second limit detection assembly is fixed to be set up on the base plate platform, and two the connecting wire of second limit detection assembly with the edge of base plate platform is parallel.
As an alternative of the pre-alignment apparatus, the two first edge inspection units are symmetrically fixed on two sides of the substrate table, and a connecting line of the two fixedly arranged first edge inspection units is perpendicular to a connecting line of the two movably arranged first edge inspection units.
As an alternative to the pre-alignment means, at least one of the first edge detector assemblies is fixed to the substrate table at an edge position of the substrate table; and/or at least one second edge detection assembly is fixed on the substrate table and is positioned at the edge position of the substrate table.
As an alternative to the pre-alignment apparatus, the first edge detection assembly and the second edge detection assembly each include a mirror and a pre-alignment lens, and the relative positions of the mirror and the pre-alignment lens engaged therewith are kept unchanged.
As an alternative of the pre-alignment apparatus, a through groove is provided on the substrate stage, the mirror is disposed below the substrate stage, the pre-alignment lens is disposed above the substrate stage, and the mirror located at the middle position of the substrate stage feeds back information to the pre-alignment lens matched therewith through the through groove.
As an alternative to the pre-alignment means, the mirror at the edge of the substrate table extends at least partially beyond the substrate table to feed back information to the pre-alignment lens with which it is fitted.
In another aspect, a method for pre-aligning a substrate compatible with multiple sizes is provided, which includes the following steps:
placing a substrate on a substrate table, and adjusting the position of a first edge detection assembly and/or a second edge detection assembly according to the size information of the substrate;
detecting position information of a first edge of the substrate by using a first edge detection assembly, and calculating a deviation value of the first edge; detecting the position information of a second edge of the substrate by using a second edge detection assembly, and calculating a deviation value of the second edge;
calculating a required compensation deviation value according to the deviation value of the first edge and the deviation value of the second edge;
Adjusting a rotation deviation value of the substrate table perpendicular to the horizontal direction;
and adjusting the horizontal deviation value of the substrate table.
Compared with the prior art, the invention has the following beneficial effects:
the pre-alignment device provided by the invention comprises a substrate table, a first edge detection assembly, a second edge detection assembly and a controller. The substrate table is used for bearing and adsorbing a substrate; the first edge detection assembly is used for detecting the position information of the first edge of the substrate and calculating the deflection value of the first edge; the second edge detection assembly is used for detecting the position information of a second edge of the substrate and calculating a deviation value of the second edge; the controller controls and drives the substrate table to adjust the alignment according to the deviation value of the first side and the deviation value of the second side. The pre-alignment device can adapt to the detection of the edge information of the substrates with different sizes by arranging the first edge detection assembly and/or the second edge detection assembly to be movable, and then the controller controls and drives the calibration adjustment of the substrate table, so that the universality and the pre-alignment efficiency of the device can be improved, and the equipment cost is reduced.
The pre-alignment method compatible with the multi-size substrate provided by the invention realizes the pre-alignment of the multi-size substrate, improves the pre-alignment efficiency and reduces the equipment cost.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required to be used in the description of the embodiments of the present invention will be briefly described below, and it is obvious that the drawings in the description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings may be obtained according to the contents of the embodiments of the present invention and the drawings without creative efforts.
FIG. 1 is a schematic diagram of a full substrate, a half substrate and a small substrate provided by an embodiment of the present invention;
fig. 2 is a top perspective view of a pre-alignment apparatus provided by an embodiment of the present invention.
Reference numerals are as follows:
100 a-full substrate; 100 b-half substrate; 100 c-small substrate; 101-first side; 102-a second edge;
1-a substrate table;
2. 2a, 2 b-a first edge detection assembly;
3. 3a, 3 b-a second edge detection component;
4-a mirror;
5-mirror linear drive;
6-pre-alignment of the lens.
Detailed Description
In order to make the technical solutions of the present invention better understood by those skilled in the art, the technical solutions of the present invention are further described below by way of specific embodiments with reference to the accompanying drawings.
In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, removably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the present invention, unless expressly stated or limited otherwise, the recitation of a first feature "on" or "under" a second feature may include the recitation of the first and second features being in direct contact, and may also include the recitation that the first and second features are not in direct contact, but are in contact via another feature between them. Also, the first feature "on," "above" and "over" the second feature may include the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is at a higher level than the second feature. "beneath," "under" and "beneath" a first feature includes the first feature being directly beneath and obliquely beneath the second feature, or simply indicating that the first feature is at a lesser elevation than the second feature.
In the description of the present embodiment, the terms "upper", "lower", "left", "right", and the like are used based on the orientations and positional relationships shown in the drawings only for convenience of description and simplification of operation, and do not indicate or imply that the referred device or element must have a specific orientation, be configured and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to have a special meaning.
As shown in fig. 1, the substrate is largely divided into a full substrate 100a, a half substrate 100b and a small substrate 100c according to the size of the substrate, wherein the size of the full substrate 100a is the same as that of the substrate stage 1; the Y-direction length of the half substrate 100b is equal to that of the substrate stage 1, and the X-direction length of the half substrate 100b is smaller than that of the substrate stage 1; the Y-direction length of the small substrate 100c is smaller than the Y-direction length of the substrate stage 1, and the X-direction length of the small substrate 100c is smaller than the X-direction length of the substrate stage 1. In addition, the pre-alignment apparatus provided in this embodiment is mainly used for the secondary alignment of the substrate, and the position error of the substrate placed on the substrate table 1 is generally small.
As shown in fig. 2, the pre-alignment apparatus provided in this embodiment includes a substrate stage 1, a first edge inspection module 2, a second edge inspection module 3, and a controller (not shown). The substrate table 1 is used for bearing and adsorbing a substrate; the first edge detection assembly 2 is used for detecting the position information of the first edge 101 of the substrate and calculating the deviation value of the first edge 101; the second edge detection assembly 3 is used for detecting the position information of the second edge 102 of the substrate and calculating the deviation value of the second edge 102; at least one of the first edge detection assembly 2 and the second edge detection assembly 3 is movably arranged on the substrate table 1 so as to be suitable for detecting substrates with different sizes; the controller controls and drives the substrate table 1 to perform alignment adjustment based on the deflection value of the first side 101 and the deflection value of the second side 102.
The pre-alignment device can adapt to the detection of the edge information of the substrates with different sizes by arranging the first edge detection assembly 2 and/or the second edge detection assembly 3 to be movable, and then the controller controls and drives the calibration adjustment of the substrate table 1, so that the universality and the pre-alignment efficiency of the device can be improved, and the equipment cost is reduced.
As shown in fig. 1, the number of the first edge detecting units 2 is at least two, and the at least two first edge detecting units 2 include a movable first edge detecting unit 2a and a fixed first edge detecting unit 2 b. The number of the second edge detection assemblies 3 is at least two, and the at least two second edge detection assemblies 3 comprise a movable second edge detection assembly 3a and a fixed second edge detection assembly 3 b.
Alternatively, two first edge detection assemblies 2a are movably disposed on the substrate stage 1, and the two first edge detection assemblies 2a are kept moving by the same amount, and a connecting line of the two first edge detection assemblies 2a is parallel to the edge of the substrate stage 1.
Optionally, at least one second edge detection assembly 3a is movably arranged on the substrate table 1; and/or two second edge detection components 3b are fixedly arranged on the substrate table 1, and the connecting line of the two second edge detection components 3b is parallel to the edge of the substrate table 1.
Alternatively, two first edge inspection units 2b are symmetrically fixed on both sides of the substrate stage 1, and a connecting line of the two fixedly disposed first edge inspection units 2b is perpendicular to a connecting line of the two movably disposed first edge inspection units 2 a.
Optionally, at least one first edge detection assembly 2b is fixed on the substrate table 1 and located at an edge position of the substrate table 1; and/or at least one second edge detection assembly 3b is fixed on the substrate table 1 and located at an edge position of the substrate table 1.
From the above description, at least the following four pre-alignment apparatus examples are available, as follows:
1) in one example of the pre-alignment apparatus, two first edge inspection assemblies 2a are movably disposed on the substrate stage 1, and the two first edge inspection assemblies 2a are kept moving by the same amount, and a connecting line of the two first edge inspection assemblies 2a is parallel to an edge of the substrate stage 1. A second edge detection unit 3a is movably disposed on the substrate table 1. When two first edge detection modules 2a are located near the middle of the substrate table 1 and one second edge detection module 3a is also located near the middle of the substrate table 1, the combination can be used for pre-alignment detection of a plurality of small-sized substrates 100 c.
2) In one example of the pre-alignment apparatus, two first edge inspection assemblies 2a are movably disposed on the substrate stage 1, and the two first edge inspection assemblies 2a are kept moving by the same amount, and a connecting line of the two first edge inspection assemblies 2a is parallel to an edge of the substrate stage 1. The two second edge detection components 3b are fixedly arranged on the substrate table 1, and the connecting line of the two second edge detection components 3b is parallel to the edge of the substrate table 1. This combination can be used for pre-alignment detection of the half-substrate 100b when two first edge detection assemblies 2a are located near the middle of the substrate table 1 and two second edge detection assemblies 3b are located at the edges of the substrate table 1.
3) In one example of the pre-alignment apparatus, two first edge inspection assemblies 2b are symmetrically fixed on both sides of the substrate stage 1, and a connection line of the two fixedly arranged first edge inspection assemblies 2b is parallel to an edge of the substrate stage 1. A second edge detection unit 3a is movably disposed on the substrate table 1. This combination can be used for pre-alignment detection of a substrate having the same X-direction length as the substrate table 1 when two first edge detection assemblies 2a are located at the edge of the substrate table 1 and one second edge detection assembly 3a is located near the middle of the substrate table 1.
4) In one example of the prealignment apparatus, the first edge inspection unit 2 includes two fixed first edge inspection units 2b and two moving first edge inspection units 2a, the two fixed first edge inspection units 2b are symmetrically disposed at both side edge positions of the substrate stage 1, the two moving first edge inspection units 2a are disposed at positions near the middle of the substrate stage 1, and a connection line of the two moving first edge inspection units 2a is perpendicular to a connection line of the two fixed first edge inspection units 2 b. The second limit detection assembly 3 includes two fixed second limit detection assemblies 3b and a second limit detection assembly 3a that removes, and wherein, two fixed second limit detection assemblies 3b fix the edge at base plate platform 1, and two fixed second limit detection assemblies 3 b's connecting wire is parallel with two fixed first limit detection assemblies 2 b's connecting wire, and a second limit detection assembly 3a that removes sets up and is close to the position in the middle at base plate platform 1. Through the arrangement mode, four combinations can be realized, and corresponding combinations are selected according to the sizes of the substrates, so that the substrates with different sizes are pre-aligned and detected, and the universality of the device is improved. Wherein the combination can be used for pre-alignment detection of a full substrate 100a when two first edge detection assemblies 2a are fixed to the edge of the substrate table 1 and two second edge detection assemblies 3b are fixed to the edge of the substrate table 1.
Optionally, each of the first edge detection assembly 2 and the second edge detection assembly 3 includes a reflector 4 and a pre-alignment lens 6, and the relative positions of the reflector 4 and the pre-alignment lens 6 matched therewith are kept unchanged. The substrate is placed above the mirror 4, and the relative position of the substrate and the mirror 4 is photographed by the pre-alignment lens 6 to calculate the deflection value of the substrate. On this basis, in order to reduce the influence of the substrate stage 1 itself on the detection result, the reflectance of the substrate stage 1 must be less than 7%. Further, the non-working mirror 4 must be retracted below the substrate stage 1 and shielded by the substrate stage 1, thereby reducing the influence of the non-working mirror 4 on the detection result.
The detection principle is illustrated by taking a fourth pre-alignment device as an example: the size of the incoming substrate is one of a plurality of known sizes, the first edge detection assembly 2 and the second edge detection assembly 3 are provided with a plurality of preset positions, and each preset position corresponds to a substrate of one size. After the substrate is placed on the substrate stage 1, if the substrate is a half substrate 100b, the two moving first edge detection assemblies 2a move to a preset position for detecting the half substrate 100b, and the deviation value of the first edge 101 and the deviation value of the second edge 102 of the half substrate 100b are calculated according to the position of the first edge 101 of the half substrate 100b shielding the reflecting mirror 4 of the first edge detection assembly 2a and the position of the second edge 102 of the half substrate 100b shielding the reflecting mirror 4 of the second edge detection assembly 3b, so as to finally obtain the rotation deviation value and the horizontal deviation value of the half substrate 100b, and the controller controls and drives the substrate stage 1 to drive the half substrate 100b to move and adjust according to the detection result.
Alternatively, the reflecting mirror 4 may be attached on the upper surface of the substrate stage 1 by previously setting a preset value position mark point on the substrate stage 1 and then manually adjusting the position of the reflecting mirror 4 manually.
In this embodiment, the reflecting mirror 4 is disposed below the substrate stage 1, the pre-alignment lens 6 is disposed above the substrate stage 1, a through groove is disposed on the substrate stage 1, and the reflecting mirror 4 located at the middle position of the substrate stage 1 feeds back information to the pre-alignment lens 6 engaged therewith through the through groove. The through groove is used for reflecting the substrate position information to the pre-alignment lens 6 by the reflector 4.
Preferably, when the substrate stage 1 is provided with the through groove, in order to prevent vacuum leakage at the through groove of the substrate stage 1, a boss is added to the peripheral side of the through groove of the substrate stage 1.
In order to reduce the influence of the through groove on the static deformation of the substrate table 1, the optimal size of the through groove is obtained through finite element analysis simulation, in this embodiment, the length of the through groove is 150mm, and the width of the through groove is 12mm, which can cover the preset position adjustment of the moving first edge detection assembly 2a and the moving second edge detection assembly 3a, and can reduce the influence of the through groove on the substrate table 1. Further, the thickness of the boss penetrating the periphery of the groove is 0.5 mm.
Optionally, a mirror 4 located at the edge of the substrate table 1 extends at least partially beyond the substrate table 1 to feed information back to a pre-alignment lens 6 fitted thereto. In this embodiment, the mirror 4 at the edge of the substrate table 1 extends at least half way beyond the substrate table 1.
In order to realize automatic control, the pre-alignment device further comprises a reflector linear driver 5 and a lens linear driver, wherein the reflector linear driver 5 and the lens linear driver are both in communication and electric connection with a controller, and the controller can control the reflector linear driver 5 and the lens linear driver to synchronously move in the same amount. Illustratively, the mirror linear drive 5 is a thrust cylinder.
The end at thrust cylinder's ejector pin is installed to speculum 4, and this structure is cantilever structure, and through finite element static deformation simulation analysis, the contained angle of speculum 4 and base plate platform 1 is about 0.2urad, is less than required value 1urad far away. Therefore, the structure is shown to be capable of meeting the equipment precision requirement.
The embodiment also provides a pre-alignment method compatible with the multi-size substrate, which comprises the following steps:
s1, placing the substrate on the substrate table 1, and adjusting the position of the first side detection assembly 2a and/or the second side detection assembly 3a according to the size information of the substrate;
S2, detecting the position information of the first side 101 of the substrate by the first side detection assembly 2, and calculating the deflection value of the first side 101; detecting the position information of the second edge 102 of the substrate by using the second edge detection assembly 3, and calculating the deviation value of the second edge 102;
s3, calculating a required compensation deviation value according to the deviation value of the first edge 101 and the deviation value of the second edge 102;
s4, adjusting the rotation deviation value of the substrate table 1 vertical to the horizontal direction;
s5, adjusting the horizontal deviation value of the substrate table 1.
The pre-alignment method compatible with the multi-size substrate can realize the pre-alignment of the multi-size substrate, improve the pre-alignment efficiency and reduce the equipment cost.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in some detail by the above embodiments, the invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the invention, and the scope of the invention is determined by the scope of the appended claims.
Claims (10)
1. A pre-alignment apparatus, comprising:
a substrate stage (1) for carrying and adsorbing a substrate;
a first edge detection means (2) for detecting positional information of a first edge (101) of the substrate and calculating a deviation value of the first edge (101);
a second edge detection assembly (3) for detecting position information of a second edge (102) of the substrate and calculating a deviation value of the second edge (102);
at least one of the first edge detection assembly (2) and the second edge detection assembly (3) is movably arranged on the substrate table (1) so as to be suitable for detecting the substrates with different sizes;
and a controller for controlling and driving the substrate table (1) to perform calibration adjustment according to the deflection value of the first side (101) and the deflection value of the second side (102).
2. The pre-alignment apparatus according to claim 1, wherein the number of the first edge detection assemblies (2) is at least two, and at least one of the first edge detection assemblies (2) is movably disposed on the substrate stage (1); and/or
The number of the second edge detection assemblies (3) is at least two, and at least one second edge detection assembly (3) is movably arranged on the substrate table (1).
3. The pre-alignment apparatus according to claim 2, wherein two first edge detector assemblies (2) are movably arranged on the substrate table (1) and the two first edge detector assemblies (2) are kept moving by the same amount, and a connecting line of the two first edge detector assemblies (2) is parallel to an edge of the substrate table (1).
4. A pre-alignment apparatus according to claim 3, wherein at least one of the second edge detection assemblies (3) is movably arranged on the substrate table (1); and/or two the second side detection component (3) is fixedly arranged on the substrate table (1), and the connecting line of the second side detection component (3) is parallel to the edge of the substrate table (1).
5. The prealignment device according to claim 4, characterized in that two first edge inspection modules (2) are symmetrically fixed on both sides of the substrate table (1), and the connecting line of the two fixedly arranged first edge inspection modules (2) is perpendicular to the connecting line of the two movably arranged first edge inspection modules (2).
6. The pre-alignment apparatus according to claim 2, wherein at least one of the first edge detection assemblies (2) is fixed on the substrate table (1) at an edge position of the substrate table (1); and/or at least one second edge detection assembly (3) is fixed on the substrate table (1) and is positioned at the edge position of the substrate table (1).
7. A pre-alignment arrangement according to any of claims 1-6, wherein the first edge detector assembly (2) and the second edge detector assembly (3) each comprise a mirror (4) and a pre-alignment lens (6), the relative positions of the mirror (4) and the pre-alignment lens (6) with which it is fitted remaining unchanged.
8. The pre-alignment apparatus according to claim 7, wherein a through-slot is provided on the substrate stage (1), the mirror (4) is provided below the substrate stage (1), the pre-alignment lens (6) is provided above the substrate stage (1), and the mirror (4) located at a middle position of the substrate stage (1) feeds back information to the pre-alignment lens (6) fitted thereto through the through-slot.
9. The pre-alignment apparatus according to claim 8, wherein the mirror (4) at the edge of the substrate table (1) extends at least partially beyond the substrate table (1) to feed back information to the pre-alignment lens (6) fitted therewith.
10. A pre-alignment method compatible with multi-size substrates is characterized by comprising the following steps:
placing a substrate on a substrate table (1), and adjusting the position of a first edge detection assembly (2) and/or a second edge detection assembly (3) according to the size information of the substrate;
Detecting position information of a first side (101) of the substrate by using a first side detection assembly (2), and calculating a deviation value of the first side (101); detecting the position information of a second side (102) of the substrate by using a second side detection assembly (3), and calculating a deviation value of the second side (102);
calculating a required compensation deviation value according to the deviation value of the first edge (101) and the deviation value of the second edge (102);
adjusting a rotation deviation value of the substrate table (1) perpendicular to the horizontal direction;
and adjusting the horizontal deviation value of the substrate table (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011566862.2A CN114675512A (en) | 2020-12-25 | 2020-12-25 | Pre-alignment device and method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011566862.2A CN114675512A (en) | 2020-12-25 | 2020-12-25 | Pre-alignment device and method |
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| CN114675512A true CN114675512A (en) | 2022-06-28 |
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