CN114660948B - High-precision control method for piezoelectric impact type micro-spraying valve - Google Patents
High-precision control method for piezoelectric impact type micro-spraying valve Download PDFInfo
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Abstract
The application provides a piezoelectric impact type micro-spraying valve high-precision control method, which considers the piezoelectric ceramic hysteresis effect, respectively establishes a first dynamic model and a second dynamic model corresponding to a first micro-spraying valve and a second micro-spraying valve firing pin, respectively obtains the motion speed simulation curve of the first micro-spraying valve and the second micro-spraying valve firing pin under the same descending stroke and actual working frequency according to the first dynamic model and the second dynamic model, optimizes the loading voltage frequency of the second micro-spraying valve by adopting a least square method with the aim of minimizing the error of the motion speed simulation curve of the second micro-spraying valve firing pin and the motion speed simulation curve of the first micro-spraying valve firing pin, obtains the optimal loading voltage frequency of the second micro-spraying valve, and enables the motion speed simulation curve of the first micro-spraying valve firing pin and the motion speed simulation curve of the second micro-spraying valve firing pin to have higher consistency, finally, high-precision dispensing of different piezoelectric impact micro-jet valves and high consistency of dispensing quality are achieved.
Description
Technical Field
The invention relates to the technical field of integrated circuit dispensing, in particular to a high-precision control method for a piezoelectric impact type micro-spraying valve.
Background
The glue dispensing technology is one of the key technologies in the production of large-scale integrated circuits, and precisely dispenses glue solution to a specified position, so that the functions of fixing, encapsulating, welding and the like of electronic elements including chips are realized. With the development of the technology in these fields, the dispensing technology is urgently required to be faster, more micro-scale and more preciseThe development is certainly in the direction of stronger practicability, and particularly, the distribution of high-viscosity glue solution becomes the key research direction. Among them, the piezoelectric impact jetting technology has attracted much attention because of its advantages of convenient control, high jetting frequency, and being applicable to jetting high viscosity glue solution. Generally, the piezoelectric impact micro-spraying valve basically realizes the spraying distribution of glue solution through the impact of a firing pin, wherein the impact speed, the impact stroke and other dynamic characteristic parameters of the firing pin play a main role in the influence of the spraying effect. The dynamics of the striker are directly determined by the dynamics of the piezoelectric ceramic in the control state. At present, in order to ensure enough speed of a firing pin, a piezoelectric impact type micro-spraying valve reciprocates at high frequency under the action of a trapezoidal electric field controlled and output by a piezoelectric controller, and a driving waveform of a corresponding loading voltage is a trapezoidal wave, as shown in fig. 1, wherein the time of the loading voltage is timet 1 Time to unload voltaget 3 Extremely short to ensure rapid movement of the striker and high force. The piezoelectric controller can apply voltage for a certain timet 1 Holding time of voltaget 2 Time to unload voltaget 3 And valve opening waiting timet 4 The four time periods are set to control the working states of different piezoelectric impact type micro-spraying valves, so that the piezoelectric ceramics drive the firing pin to realize four different actions of firing pin descending, valve closing pause, firing pin ascending and valve opening pause.
On one hand, due to the fact that uncertain factors such as manufacturing precision errors and assembling precision errors exist in all parts of the piezoelectric impact micro-spraying valve. On the other hand, the manufacturing difference of the electric impact type micro-spraying valve driving element, namely piezoelectric ceramics, is inconsistent, and the dynamic characteristics of the piezoelectric ceramics are seriously influenced by the inherent hysteresis, the non-linearity of creep and the structural vibration characteristics of the piezoelectric ceramics. Therefore, the motion characteristics of different piezoelectric impact micro-spraying valves are different, and as shown in fig. 2, the test result of the motion speed of the firing pins of a batch of piezoelectric impact micro-spraying valves of the same model under the same control condition by using a laser vibration meter shows that, even if the piezoelectric impact micro-spraying valves of the same model are under the same loading voltage driving wave, the whole motion speed curves of the firing pins of different piezoelectric impact micro-spraying valves have obvious difference, and the difference of the maximum value of the motion speed of the firing pins reaches more than 10%, which shows that the manufacturing accuracy and the inherent characteristic difference also exist between the piezoelectric impact micro-spraying valves of the same model. Therefore, under the condition that different piezoelectric impact micro-spraying valves are simply controlled by trapezoidal waves, it is very difficult to control the piezoelectric ceramic driving firing pins to perform dispensing distribution with consistent height, for example, the same glue spraying amount is needed for multi-point dispensing on a certain large-scale integrated circuit at the same time, but due to the difference between the manufacturing precision and the characteristics of the different micro-spraying valves, the glue spraying amount and the impact force are low in consistency, and the quality difference and the instability of integrated circuit products are caused.
In summary, for the piezoelectric impact micro-jet valve, it is very necessary to research how to improve the consistency of the movement speeds of the firing pins of different piezoelectric impact micro-jet valves, and to achieve the consistency of dispensing quality and height.
Disclosure of Invention
In view of the above problems, the present application aims to provide a high-precision control method for a piezoelectric impact micro-spray valve, which includes establishing a dynamic model of a firing pin of the piezoelectric impact micro-spray valve by considering a piezoelectric ceramic hysteresis effect, and then optimizing loading voltage frequencies of different micro-spray valves by using a least square method, so that the different piezoelectric impact micro-spray valves obtain highly consistent firing pin movement speeds, and high-precision and high-consistency dispensing is realized.
The application provides a piezoelectric impact type micro-spraying valve high-precision control method, which comprises the following steps:
s1: taking a first micro-spraying valve and a second micro-spraying valve;
s2: presetting actual descending stroke and actual working frequency of a firing pin, wherein the actual working frequency is actual loading voltage frequency;
s3: respectively constructing nonlinear hysteresis kinetic models of the first micro-injection valve and the second micro-injection valve firing pin to obtain a first kinetic model and a second kinetic model, wherein the first kinetic model corresponds to the first micro-injection valve, and the second kinetic model corresponds to the second micro-injection valve;
s4: under the actual descending stroke and the actual working frequency, respectively obtaining a motion speed simulation curve of a first micro-injection valve firing pin and a motion speed simulation curve of a second micro-injection valve firing pin by using the first dynamic model and the second dynamic model;
s5: and acquiring the optimal loading voltage frequency of the second micro-spray valve by adopting a least square method by taking the motion speed simulation curve of the first micro-spray valve striker as a striker standard motion speed simulation curve and taking the motion speed simulation curve of the second micro-spray valve striker and the striker standard motion speed simulation curve as a target of minimum error.
According to the technical scheme provided by the embodiment of the application, the construction of the first dynamic model and the second dynamic model comprises the following steps:
s301: constructing a dynamic structure model of the piezoelectric impact type micro-spraying valve according to the component structures of the first micro-spraying valve and the second micro-spraying valve;
s302: constructing a nonlinear hysteresis kinetic model of the striker according to the kinetic structure model; the dynamic model is used for acquiring the simulated motion speed of the striker;
s303: identifying the parameters to be identified in the dynamic model to form a parameter vector, wherein the parameter vector comprises model coefficientsy、Model coefficientsp、Model coefficientsqAnd a damping coefficient mu;
s304: constructing an evaluation function by taking the minimum sum of the error of the actually measured motion speed and the simulated motion speed of the striker as a target;
s305: presetting test loading voltage frequencies, wherein the test loading voltage frequencies comprise a first loading voltage frequency, a second loading voltage frequency, a third loading voltage frequency, a fourth loading voltage frequency and a fifth loading voltage frequency;
s306: under the actual descending stroke and the first loading voltage frequency, acquiring actual measurement motion data of a first micro-injection valve firing pin to obtain first actual measurement motion data, wherein the actual measurement motion data comprises an actual measurement motion speed and corresponding motion time;
s307: performing iterative computation by adopting a particle swarm algorithm and taking an evaluation function as a target function to obtain an optimal parameter vector of the dynamic model of the first micro-spraying valve under the first loading voltage frequency, and setting the optimal parameter vector as a first parameter vector;
s308: referring to steps S306 to S307, under the actual descending stroke condition, respectively obtaining optimal parameter vectors of the first micro-spray valve under the second loading voltage frequency, the third loading voltage frequency, the fourth loading voltage frequency, and the fifth loading voltage frequency of the dynamic model, which are respectively a second parameter vector, a third parameter vector, a fourth parameter vector, and a fifth parameter vector;
s309: respectively taking model coefficients from the first parameter vector, the second parameter vector, the third parameter vector, the fourth parameter vector and the fifth parameter vectoryValue of (a), establishing model coefficientsyObtaining a first polynomial by using a relational expression between the frequency of the loading voltage and the frequency of the loading voltage;
s310: referring to step S309, model coefficients are respectively establishedp、Model coefficientsqObtaining a second polynomial, a third polynomial and a fourth polynomial by using a relational expression between the damping coefficient mu and the loading voltage frequency, wherein the second polynomial is a model coefficientpAnd the frequency of the loading voltage, and the third polynomial is a model coefficientqAnd the loading voltage frequency, wherein the fourth polynomial is a relation between the damping coefficient mu and the loading voltage frequency;
s311: substituting the first polynomial, the second polynomial, the third polynomial and the fourth polynomial into the kinetic model to obtain a nonlinear hysteresis kinetic model of the first micro-injection valve striker, and setting the nonlinear hysteresis kinetic model as a first kinetic model;
s312: referring to the steps S306-S311, a nonlinear hysteresis kinetic model of the second micro-injection valve firing pin is obtained and set as a second kinetic model.
According to the technical scheme provided by the embodiment of the application, the evaluation function is,
in the formula (I), the compound is shown in the specification,δthe error between the actually measured motion speed and the simulated motion speed of the firing pin is obtained;θis a parameter vector composed of the parameters to be identified (y、p、q、μ）；NRepresenting the number of sampling points of actually measured motion data of the firing pin;v 2 indicating the measured speed of motion of the striker;v 21 representing the simulated speed of motion of the striker;T i is shown asiThe movement time corresponding to each sampling point is less than or equal to 1i≤NAnd is a natural number.
According to the technical scheme provided by the embodiment of the application, the method for acquiring the optimal loading voltage frequency of the second micro-spraying valve by adopting the least square method comprises the following steps:
s501: determining a frequency optimization range of a loading voltage of a second micro-jet valve;
s502: randomly acquiring an optimized loading voltage frequency within the optimized loading voltage frequency range;
s503: substituting the optimized loading voltage frequency into the second dynamic model under the actual descending stroke to obtain an optimized simulation curve;
s504: setting a least square method termination condition, and calculating an error between an optimized simulation curve and the firing pin standard motion speed simulation curve to obtain a third error;
s505: repeating the steps S502-S504 to obtain a fourth error;
s506: comparing the third error with the fourth error, keeping the minimum value of the third error and the fourth error and the corresponding optimized loading voltage frequency, and taking the minimum value as a third error to continuously participate in the next comparison;
s507: and repeating the steps S505 to S506 until the calculation is stopped when the termination condition is met, and then outputting the optimized loading voltage frequency corresponding to the minimum value to obtain the optimal loading voltage frequency.
According to the technical scheme provided by the embodiment of the application, the optimal descending stroke of the striker is obtained according to the standard motion speed simulation curve of the striker, and the method comprises the following steps of:
s6: obtaining the standard movement speed of the firing pinMotion time corresponding to maximum motion speed on simulation curveT v-max ；
S7: for 0 toT v-max The simulated velocity of the striker during the time period is integrated to obtain the optimum down stroke of the striker.
According to the technical scheme provided by the embodiment of the application, iterative computation is performed by adopting a particle swarm algorithm and taking an evaluation function as a target function to obtain the optimal parameter vector of the dynamic model of the first micro-spray valve under the first loading voltage frequency, and the method comprises the following steps:
s3071: setting initial conditions, wherein the initial conditions comprise particle swarm size, iteration times, maximum particle moving speed,yThe value range of,pThe value range of,qThe value range of (a) and the value range of [ mu ];
s3072: are respectively atyThe value range of,pThe value range of,qValue range of (d) and random acquisition within the value range of [ mu ]yValue (c),pValue (c),qValues, mu values, forming a group of random parameter vectors;
s3073: substituting the random parameter vector into the dynamic model to obtain a random dynamic model of the first micro-spraying valve under the first loading voltage frequency;
s3074: according to the random dynamics model, under the actual descending stroke and the first loading voltage frequency, obtaining a motion speed random simulation curve of the striker;
s3075: obtaining the motion time on the random simulation curve of the motion speed of the firing pinT i Corresponding simulation movement speed of 1-1i≤NAnd is a natural number, and first analog motion data is obtained;
s3076: inputting the first measured motion data and the first simulated motion data into the evaluation function, and calculating an errorδObtaining a first error;
s3077: repeating the steps S3072-S3076 to obtain a second error;
s3078: comparing the first error with the second error, keeping the minimum value of the first error and the second error and the corresponding random parameter vector, and taking the minimum value as the first error to continuously participate in the next comparison;
s3079: and repeatedly executing the steps S3077-S3078 until the iteration times are reached, and then outputting a random parameter vector corresponding to the minimum value to obtain a first parameter vector, wherein the first parameter vector is the optimal parameter vector of the dynamic model of the first micro-spraying valve under the actual descending stroke and the first loading voltage frequency.
According to the technical scheme provided by the embodiment of the application, the first polynomial, the second polynomial, the third polynomial and the fourth polynomial are all 4-degree polynomials.
In summary, the present application discloses a piezoelectric impact micro-injection valve high-precision control method, which has the beneficial effects that, based on the above scheme, a piezoelectric ceramic hysteresis effect is considered, and a nonlinear hysteresis dynamics model of firing pins of a first micro-injection valve and a second micro-injection valve is established, wherein the first micro-injection valve corresponds to the first dynamics model, and the second micro-injection valve corresponds to the second dynamics model; acquiring a motion speed simulation curve of a first micro-injection valve firing pin under an actual descending stroke and an actual working frequency according to the first dynamic model, setting the motion speed simulation curve as a firing pin standard motion speed simulation curve, and acquiring a motion speed simulation curve of a second micro-injection valve firing pin under the actual descending stroke and the actual working frequency according to the second dynamic model; due to the piezoelectric ceramic hysteresis effect, in the same actual working frequency and actual descending stroke, the motion speed simulation curve of the first micro-spraying valve striker and the motion speed simulation curve of the second micro-spraying valve striker are inconsistent, so that the dispensing quality is inconsistent, the motion speed simulation curve of the first micro-spraying valve striker is taken as the standard motion speed simulation curve of the striker, the error between the motion speed simulation curve of the second micro-spraying valve striker and the standard motion speed simulation curve of the striker is the minimum, the least square method is adopted to optimize the actual working frequency of the second micro-spraying valve, the optimal loading voltage frequency of the second micro-spraying valve is obtained, so that in the same actual descending stroke, the motion speed simulation curve of the first micro-spraying valve striker and the motion speed simulation curve of the second micro-spraying valve striker have higher consistency, finally, high-precision dispensing of different piezoelectric impact micro-jet valves and high consistency of dispensing quality are achieved.
According to an optimization scheme of the application, for high-viscosity glue liquid, motion time corresponding to maximum motion speed on a standard motion speed simulation curve of the firing pin is obtainedT v-max And for 0 to 0T v-max The simulation motion speed of the striker in a time period is integrated to obtain the optimal descending stroke of the striker, so that the motion speed of the striker in the optimal descending stroke is gradually increased and reaches the maximum motion speed, the striker can extrude the high-viscosity glue solution with the maximum impact force, and the jetting stability of the high-viscosity glue solution and the high consistency of the glue dispensing quality are ensured.
Drawings
Other features, objects and advantages of the present application will become more apparent upon reading of the following detailed description of non-limiting embodiments thereof, made with reference to the accompanying drawings.
Fig. 1 shows a driving waveform of a piezoelectric ceramic piezoelectric controller for controlling an applied voltage.
Fig. 2 is a test result of the movement speed of the striker of the same type and different piezoelectric impact micro-spraying valves under the same loading voltage frequency by using a laser vibration meter.
Fig. 3 is a graph of the movement speed of the striker of the same piezoelectric impact micro-spray valve under different loading voltage frequencies.
Fig. 4 is a dynamic structure model of the piezoelectric impact micro-spray valve of the present application.
Fig. 5 is a graph comparing a simulation curve of the movement speed of the striker with an actual measurement curve of the piezoelectric impact micro-spray valve at loading voltage frequencies of 0.1ms, 0.15ms, 0.2ms, 0.25ms and 0.3 ms.
Fig. 6 is a simulation curve of the standard movement speed of the striker and the movement speed of the striker before and after the frequency optimization of the second micro-injection valve loading voltage.
Detailed Description
The present application will be described in further detail with reference to the following drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant invention and not restrictive of the invention. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings. The present application will now be described in detail with reference to the drawings, in conjunction with the following examples.
The hysteresis characteristic of the piezoelectric ceramic is a complex nonlinear characteristic, and is characterized in that an output curve of loading voltage-displacement of the piezoelectric ceramic when the loading voltage rises and an output curve of unloading voltage-displacement of the piezoelectric ceramic when the unloading voltage falls are not overlapped. In the actual control of the piezoelectric impact micro-spraying valve, the hysteresis characteristic of the piezoelectric ceramic not only shows multivaluence, but also is closely related to the input value history and the input frequency of the loading voltage.
The influence of the loading voltage frequency on the piezoelectric ceramic hysteresis characteristic is considered, the dynamic hysteresis characteristic of the piezoelectric ceramic is characterized based on a dynamic hysteresis model-Duhem model, and an accurate nonlinear hysteresis dynamic model of the piezoelectric impact micro-spraying valve is established.
The Duhem model is a physical model described by differential equations, in which different changes of parameters can be used to reflect the non-linear characteristics of different hysteresis systems, and is expressed as,
dx 1 /dt=α｜dV/dt｜[f(V)-x 1 ]+g(V)dV/dt (1)
in the formula: x is the number of 1 Is the hysteresis output displacement of the piezoelectric stack;dx 1 /dtis x 1 For is totA derivative of (a);ttime to apply voltage;αis a weight coefficient, andα＞0；Vto apply a voltage;dV/dtis composed ofVTo pairtA derivative of (a);f(V)is an odd function with smooth sections and monotone increasing;g(V)is a piecewise continuous even function.
The voltage frequency loading of the present application refers to the time from zero to the rated voltage controlled by the piezoelectric controller, i.e. the voltage loading time in fig. 1t 1 Reflecting how fast the loading voltage reaches the rated voltage from zero.
To simplify the formula(1) Get itf(V)=cV，g(V)=c 1 The hysteresis output displacement x of the piezoelectric stack 1 And a loading voltageVThe relationship between can be simplified as:
dx 1 /dt=α｜dV/dt｜(cV-x 1 )+c 1 dV/dt (2)
wherein the parameterscAndc 1 is constant, and in the present applicationc=3、c 1 =1000。
The stacked piezoelectric ceramic has the characteristics of fast response frequency, small displacement, large output force, high precision and the like, is commonly used for piezoelectric impact micro-spray valves, and the output force of the stacked piezoelectric ceramic is nonlinear force. Because the output force of the piezoelectric ceramic is affected by the loading voltage, the loading voltage frequency, the hysteresis output displacement of the piezoelectric stack and the movement speed of the piezoelectric stack, the expression of the output force of the piezoelectric stack with the nonlinear hysteresis characteristic is as follows:
F=y(f)V(t)+p(f)v 1 +q(f)x 1 (3)
in the formula, F is the output force of the piezoelectric stack; f is the loading voltage frequency;Vto apply a voltage; x is the number of 1 Is the hysteresis output displacement of the piezoelectric stack;tthe value range of the time for loading the voltage is 0-f;v 1 the movement speed of the piezoelectric stack is shown;y(f)、p(f)、q(f) are all model coefficients, in particular functions related to the frequency f of the applied voltage.
The piezoelectric impact type micro-spraying valve is mainly structurally characterized in that the delayed output displacement of a piezoelectric stack is amplified by adopting a lever principle, so that a firing pin moves up and down under the common acting force of the piezoelectric stack and large and small springs, and the high-speed large-displacement output of the firing pin is realized. In order to establish an accurate nonlinear hysteresis dynamic model of the piezoelectric impact micro-spraying valve, a dynamic structure model of the piezoelectric impact micro-spraying valve shown in fig. 4 is established according to a piezoelectric impact micro-spraying valve member structure.
Referring to the dynamic structure model of the piezoelectric impact micro-spray valve shown in fig. 4, during the voltage loading process, the equation of motion of the piezoelectric stack can be established according to newton's second law as follows:
M pe v 1 ´+K p x 1 =F-F 1 (4)
in the formula, M pe Is the equivalent mass of the piezoelectric stack;v 1 ´is the acceleration of the movement of the piezoelectric stack; k p The rigidity of the piezoelectric stack itself; x is the number of 1 Is the hysteresis output displacement of the piezoelectric stack; f is the output force of the piezoelectric stack; f 1 The force acting on the lever by the piezoelectric stack.
When the lever is rotated by the output force F to generate the moment of inertia I, the motion equation of the lever is as follows according to the dynamic structure model shown in FIG. 4:
Ix 2 /b-F 1 a+F 2 b+K B bx 2 -mgd=0 (5)
in the formula, I is the moment of inertia of the lever; f 2 Force acting on the striker for leverage; x is the number of 2 Is the movement displacement of the firing pin; k B The rigidity of a large spring; a is the distance from the action point of the piezoelectric stack to the fulcrum of the lever; b is the distance from the lever fulcrum to the action point of the lever on the firing pin; d is the distance from the mass center of the lever to the fulcrum of the lever; mg is the weight of the lever, wherein m is the equivalent mass of the lever and g is the gravitational acceleration.
Referring to a dynamic structure model of the piezoelectric impact micro-spraying valve shown in fig. 4, in the process of descending of the striker under the loading voltage, the motion equation of the striker is established according to the newton's second law as follows:
M b v 2 ´+μv 2 +k b x 2 =F 2 (6)
in the formula, M b Is the equivalent mass of the striker; k b Is the stiffness of the small spring; mu is the damping coefficient of the micro-spraying valve;v 2 is the speed of movement of the striker;v 2 ´is the acceleration of the motion of the striker.
Referring to the geometric relationship between the parts in the dynamic structural model of the piezoelectric impact micro-spray valve as shown in fig. 4, the piezoelectric stack can be knownHysteresis output displacement x 1 Speed of movement of piezoelectric stackv 1 Acceleration of movement of piezoelectric stackv 1 ´The movement displacement x of the striker 2 Speed of movement of the strikerv 2 Acceleration of motion of strikerv 2 ´There is a relationship between them as follows,
x 1 /x 2 =v 1 /v 2 =v 1 ´/v 2 ´=a/b (7)。
according to the formulas (2) - (7), a nonlinear hysteresis dynamic model of the piezoelectric impact type micro-spraying valve striker can be established through derivation,
Mv 2 ´+Dv 2 +Kx 2 =W (8)
in the formula (I), the compound is shown in the specification,
m is the equivalent mass of the micro-injection valve system, and is specifically M = I + M pe a 2 /b+M b b；
D is the equivalent damping of the micro-jet valve system, and is D = μ b;
k is the equivalent rigidity of the micro-injection valve system, and is specifically K = K b b+K B b+2K p a 2 /b；
W is the equivalent external force of the micro-jet valve system, and particularly W = mgd + (W)y(f)V(t)-p(f)v 1 -q(f)x 1 )a。
According to the formula (8), the nonlinear hysteresis kinetic model of the piezoelectric impact type micro-spray valve firing pin is a kinetic model with a non-display relation, and in order to be capable of practically applying the kinetic model formula (8), firstly, parameters to be identified are identified and determined, and the parameters to be identified comprise model coefficienty(f)、p(f)、q(f) And damping coefficient mu, respectively recorded as the parameter to be identifiedy、p、q、μ。
Taking 2 piezoelectric micro-spraying valves with the same model as an example, the maximum descending stroke of the firing pin is 0.25mm, and specifically explaining how to adopt the piezoelectric micro-spraying valve to realize high-precision control, the method specifically comprises the following steps:
s1: taking a first micro-spraying valve and a second micro-spraying valve;
s2: presetting actual descending stroke and actual working frequency of firing pin, wherein the actual descending stroke is [0,0.2]]mm, i.e. the movement displacement of the striker is x 2 =[0,0.2]mm, wherein the actual working frequency is 0.2ms, namely the actual loading voltage frequency is 0.2 ms;
s3: respectively constructing nonlinear hysteresis kinetic models of the first micro-injection valve and the second micro-injection valve firing pin to obtain a first kinetic model and a second kinetic model, wherein the first kinetic model corresponds to the first micro-injection valve, and the second kinetic model corresponds to the second micro-injection valve, and the method comprises the following steps:
s301: constructing a dynamic structure model of a piezoelectric impact type micro-spraying valve according to the component structures of the first micro-spraying valve and the second micro-spraying valve, wherein the dynamic structure model is shown in FIG. 4;
s302: constructing a nonlinear hysteresis kinetic model formula (8) of the striker according to the kinetic structure model; the dynamic model formula (8) is used for acquiring the simulated motion speed of the firing pin;
s303: identifying the parameters to be identified in the dynamic model to form a parameter vector, wherein the parameter vector comprises model coefficientsy、Model coefficientsp、Model coefficientsqAnd a damping coefficient mu;
s304: constructing an evaluation function (9) by taking the minimum sum of the error of the measured motion speed and the simulated motion speed of the firing pin as a target,
in the formula (I), the compound is shown in the specification,δthe error between the actually measured motion speed and the simulated motion speed of the firing pin is obtained;θis a parameter vector composed of the parameters to be identified (y、p、q、μ）；NRepresenting the number of sampling points of actually measured motion data of the firing pin;v 2 indicating the measured speed of motion of the striker;v 21 representing the simulated speed of motion of the striker;T i is shown asiThe movement time of the firing pin corresponding to each sampling point is less than or equal to 1i≤NAnd is a natural number;
s305: presetting test loading voltage frequencies, wherein the test loading voltage frequencies comprise a first loading voltage frequency of 0.1ms, a second loading voltage frequency of 0.15ms, a third loading voltage frequency of 0.2ms, a fourth loading voltage frequency of 0.25ms and a fifth loading voltage frequency of 0.3 ms; wherein the third loading voltage frequency is equal to the actual loading voltage frequency;
s306: under the actual descending stroke and the first loading voltage frequency, acquiring actual measurement motion data of the first micro-injection valve firing pin to obtain first actual measurement motion data, wherein the actual measurement motion data comprises an actual measurement motion speed and corresponding motion time, and specifically, 10000 actual measurement motion data sampling points are averagely taken in the whole actual descending stroke range by adopting a laser vibration meter;
s307: performing iterative computation by adopting a particle swarm algorithm and taking an evaluation function (9) as a target function to obtain an optimal parameter vector of the dynamic model of the first micro-spray valve under the first loading voltage frequency, and setting the optimal parameter vector as a first parameter vector, wherein the iterative computation comprises the following steps:
s3071: setting initial conditions, wherein the initial conditions comprise that the particle swarm size is 100, the iteration times is 100, the maximum moving speed of the particles is 10,yHas a value range of (100000, 1000000),pA value range of (0, 1),qThe value ranges of (0.0001, 0.0005) and (50, 150) of μ;
s3072: randomly acquiring within (100000, 1000000), (0, 1), (0.0001, 0.0005), (50, 150), respectivelyyValue (c),pValue (c),qValues, mu values, forming a group of random parameter vectors;
s3073: substituting the random parameter vector into the kinetic model formula (8) to obtain a random kinetic model of the first micro-spraying valve under the first loading voltage frequency;
s3074: according to the random dynamics model, under the actual descending stroke and the first loading voltage frequency, obtaining a motion speed random simulation curve of the striker;
s3075: obtaining the motion time on the random simulation curve of the motion speed of the firing pinT i The corresponding simulation movement speed is less than or equal to 1iThe number is not more than 10000 and is a natural number, and first simulated motion data are obtained;
s3076: inputting the first measured motion data and the first simulated motion data into the evaluation function (9), calculating the errorδObtaining a first error;
s3077: repeating the steps S3072-S3076 to obtain a second error;
s3078: comparing the first error with the second error, keeping the minimum value of the first error and the second error and the corresponding random parameter vector, and taking the minimum value as the first error to continuously participate in the next comparison;
s3079: and repeatedly executing the steps S3077-S3078 until iteration is stopped for 100 times, and then outputting random parameter vectors (9.055 e5, 0.1761, 1.1358e-4 and 73.3188) corresponding to the minimum value to obtain a first parameter vector, wherein the first parameter vector is the optimal parameter vector of the dynamic model of the first micro-spraying valve under the actual descending stroke and the first loading voltage frequency.
S308: referring to steps S306 to S307, under the actual descending stroke and the same initial condition, the optimal parameter vectors of the dynamic model of the first micro-spray valve under the second loading voltage frequency, the third loading voltage frequency, the fourth loading voltage frequency, and the fifth loading voltage frequency are respectively obtained as a second parameter vector, a third parameter vector, a fourth parameter vector, and a fifth parameter vector, specifically,
a second parameter vector (7.2766 e5, 0.1213, 1.6491e-4, 78.8782),
A third parameter vector (6.0120 e5, 0.1002, 1.9960e-4, 88.6022),
A fourth parameter vector (4.4766 e5, 0.0794, 2.5180e-4, 110.5052),
A fifth parameter vector (3.0341 e5, 0.0632, 2.9746e-4, 131.8424).
The second parameter vector is an optimal parameter vector of a dynamic model of the first micro-spraying valve under the actual descending stroke and the second loading voltage frequency; the third parameter vector is an optimal parameter vector of a dynamic model of the first micro-spraying valve under the actual descending stroke and the third loading voltage frequency; the fourth parameter vector is the optimal parameter vector of a dynamic model of the first micro-spraying valve under the actual descending stroke and the fourth loading voltage frequency; the fifth parameter vector is the optimal parameter vector of a dynamic model of the first micro-spraying valve under the actual descending stroke and the fifth loading voltage frequency;
s309: respectively taking model coefficients from the first parameter vector, the second parameter vector, the third parameter vector, the fourth parameter vector and the fifth parameter vectoryThe values of (A) are 9.055e5, 7.2766e5, 6.0120e5, 4.4766e5 and 3.0341e5 respectively, and model coefficients are establishedyObtaining a first polynomial by using a relational expression between the frequency of the loading voltage and the frequency of the loading voltage; in order to ensure the fitting precision, a 4 th-order polynomial is adopted to match model coefficientsyFitting along with the variation relation of the loading voltage frequency f to obtain a first polynomial,
y=2.99e+04f 4 -1.386e+04f 3 -4.581e+04f 2 -2.158e+05f+6.012e+05 (10)
s310: referring to step S309, model coefficients are respectively establishedp、Model coefficientsqObtaining a second polynomial, a third polynomial and a fourth polynomial by using a relational expression between the damping coefficient mu and the loading voltage frequency, wherein the second polynomial is a model coefficientpAnd the frequency of the loading voltage, and the third polynomial is a model coefficientqAnd the frequency of the loading voltage, the fourth polynomial being the relation between the damping coefficient mu and the frequency of the loading voltage,
p=0.009818f 4 -0.009586f 3 -0.003552f 2 -0.02929f+0.1002 (11)
q=-1.516e-05f 4 +3.327e-06f 3 +2.795e-05f 2 +6.736e-05f+0.0001996 (12)
μ=-4.524f 4 -1.353f 3 +15.46f 2 + 25.51f+88.58 (13)；
s311: substituting the first polynomial (10), the second polynomial (11), the third polynomial (12) and the fourth polynomial (13) into the kinetic model equation (8) to obtain a nonlinear hysteresis kinetic model of the first micro-injection valve firing pin, and setting the nonlinear hysteresis kinetic model as a first kinetic model;
the first dynamic model is a dynamic model which shows a relationship between the loading voltage frequency of the first micro-jet valve and the speed of the striker, so that after the loading voltage frequency is determined, a change curve of the movement speed of the striker along with the movement time within the descending stroke [0,0.2] mm can be solved according to the first dynamic model, as shown in fig. 5, a movement speed simulation curve and a movement speed measured curve of the striker within the descending stroke [0,0.2] mm are obtained under the loading voltage frequencies of 0.1ms, 0.15ms, 0.2ms, 0.25ms and 0.3ms, and it can be seen that the simulation curve and the measured curve of the movement speed of the striker within the actual descending stroke of the striker have better consistency under different loading voltage frequencies of the first micro-jet valve, the accuracy and the feasibility of the dynamic formula (8) are also verified, that is the movement speed simulation curve of the striker can be obtained by replacing a laser vibrometer with the dynamic formula (8), reflecting the change in the speed of movement of the striker during the actual downward stroke.
S312: referring to steps S306 to S311, a nonlinear hysteresis dynamic model of the second micro-injection valve striker can be obtained and set as the second dynamic model.
S4: under the actual descending stroke [0,0.2] mm and the actual working frequency of 0.2ms, respectively acquiring a motion speed simulation curve of a first micro-injection valve firing pin and a motion speed simulation curve of a second micro-injection valve firing pin by using the first dynamic model and the second dynamic model;
s5: the method comprises the following steps of taking a motion speed simulation curve of a first micro-injection valve firing pin as a firing pin standard motion speed simulation curve, taking the motion speed simulation curve of a second micro-injection valve firing pin and the error of the firing pin standard motion speed simulation curve as a target, and obtaining the optimal loading voltage frequency of the second micro-injection valve by adopting a least square method, wherein the method comprises the following steps:
s501: determining the frequency optimization range of the loading voltage of the second micro-injection valve, wherein the actual working frequency is +/-0.1 ms, namely 0.1-0.3 ms;
s502: randomly acquiring an optimized loading voltage frequency within the optimized loading voltage frequency range;
s503: substituting the optimized loading voltage frequency into the second dynamic model under the actual descending stroke [0,0.2] mm to obtain an optimized simulation curve, wherein correspondingly, the total movement time of the striker is 0.281 ms;
s504: setting a least square method termination condition, taking the initial time as 0ms, the termination time as 0.281ms and the time interval as 0.001ms to extract the corresponding motion speed of the striker as a sample point, and calculating the error between the optimized simulation curve and the standard motion speed simulation curve of the striker to obtain a third error, wherein the least square method termination condition is the maximum iteration number of 1600 times or an error threshold value 1e-6, namely when the iteration number reaches 1600 times, stopping iterative computation, or when the error is less than the threshold value 1e-6, stopping iterative computation;
s505: repeating the steps S502-S504 to obtain a fourth error;
s506: comparing the third error with the fourth error, keeping the minimum value of the third error and the fourth error and the corresponding optimized loading voltage frequency, and taking the minimum value as a third error to continuously participate in the next comparison;
s507: and (4) repeatedly executing the steps S505 to S506, when the error is minimum and is stabilized at 0.0026 after 1600 times of iterative computation, stopping computation at the moment, and outputting 0.1912ms of optimized loading voltage frequency corresponding to the minimum value of the iterative convergence error of 0.0026 to obtain 0.1912ms of optimized loading voltage frequency.
As shown in fig. 6, the first curve is a striker standard movement speed simulation curve, that is, a movement speed simulation curve of the striker at an actual loading voltage frequency of 0.2ms for the first micro-spray valve, the second curve is a movement speed simulation curve of the striker of the second micro-spray valve at an actual loading voltage frequency of 0.2ms, that is, a movement speed simulation curve of the striker of the second micro-spray valve before optimization, and the third curve is a movement speed simulation curve of the striker at an optimal loading voltage frequency of 0.1912ms for the second micro-spray valve, that is, a movement speed simulation curve of the striker of the second micro-spray valve after optimization. It can be seen that the motion speed simulation curve of the striker under the optimal loading voltage frequency of 0.1912ms of the second micro-spray valve has higher consistency with the standard motion speed curve of the striker, so that when the loading voltage frequency of the first micro-spray valve is 0.2ms and the loading voltage frequency of the second micro-spray valve is 0.1912ms, the motion speeds of the striker have higher consistency within the actual descending stroke [0,0.2] mm of the first micro-spray valve and the second micro-spray valve, thereby realizing high-precision dispensing among different micro-spray valves and high consistency of dispensing quality.
Further, as shown in fig. 3, the movement speed curve of the firing pin of the same piezoelectric impact micro-jet valve under different loading voltage frequencies is shown, the detection device is a laser vibration meter, it can be seen that the movement speeds of the firing pin under different loading voltage frequencies are different, and the difference shows that the dispensing quality consistency is different when the difference is reflected in practical application, even under the same loading voltage frequency, the variation trend of the striking speed of the firing pin is complex, and within the whole descending stroke of the firing pin, along with the increase of the stroke of the firing pin, the speed before the striking of the firing pin shows a descending trend, i.e. the striking force before the striking of the firing pin drops, which is inconsistent with the requirement of high impact force for high viscosity glue solution. Therefore, when the viscosity of the glue solution is high, in order to obtain the optimal glue spraying speed and quality, that is, the optimal glue spraying force, the speed of the firing pin of the micro-spray valve is required to be monotonically increased in the actual descending stroke, and the movement speed of the firing pin reaches the maximum when the entire actual descending stroke is completed, so as to obtain the optimal glue dispensing quality, and the optimal descending stroke of the firing pin of the first micro-spray valve is obtained according to the firing pin standard movement speed simulation curve shown in fig. 6, and the method comprises the following steps:
s6: obtaining the motion time corresponding to the maximum motion speed on the firing pin standard motion speed simulation curveT v-max ；
Wherein, the maximum value of the motion speed of the firing pin on the simulation curve of the operation speed of the standard firing pinv 21-max =1.29987m/s, corresponding movement timeT v-max =0.312ms；
S7: integrating the simulated motion speed of the striker in a time period of 0-0.312 ms to obtain the motion displacement of the striker of 0.1845mm, namely the optimal descending stroke of the striker of 0.1845 mm;
wherein, the motion displacement calculation formula of the firing pin is,
in the formula, x 2-max Is the optimal descending stroke of the firing pin;T v-max the movement time is the movement time corresponding to the maximum value of the movement speed of the firing pin;v 21 representing the simulated speed of motion of the striker;Tis the movement time of the striker.
After the frequency of the loading voltage of the second micro-spray valve is optimized, because the motion speed simulation curves of the first micro-spray valve and the second micro-spray valve in the actual descending stroke have higher consistency, as shown in fig. 6, in the actual application, the optimal descending stroke of the first micro-spray valve can also be used as the optimal descending stroke of the second micro-spray valve for parameter setting, so that the motion speeds of the striker in the optimal descending stroke of the first micro-spray valve and the second micro-spray valve can be regarded as being gradually increased, the striker impacts the high-viscosity glue solution at the maximum motion speed, the glue dispensing operation is completed, and the optimal glue dispensing quality and the stability of the sprayed glue solution can be realized by the high-viscosity glue solution.
In view of the above embodiments, the present application provides a high-precision control method for a piezoelectric impact micro-spray valve, where under a condition that a piezoelectric ceramic hysteresis effect is considered, a nonlinear hysteresis kinetic model of a first micro-spray valve and a second micro-spray valve firing pin is established, the nonlinear hysteresis kinetic model of the first micro-spray valve corresponds to the first kinetic model, and the nonlinear hysteresis kinetic model of the second micro-spray valve corresponds to the second kinetic model, where band identification parameters in the first kinetic model and the second kinetic model are determined by a particle swarm algorithm and polynomial fitting; respectively acquiring a first dynamic model and a second dynamic model according to the first dynamic model and the second dynamic model under the actual descending stroke and the actual working frequencyA motion speed simulation curve of a micro-jet valve firing pin and a motion speed simulation curve of a second micro-jet valve firing pin; due to the piezoelectric ceramic hysteresis effect, in the same actual working frequency and actual descending stroke, the motion speed simulation curve of the first micro-spraying valve striker and the motion speed simulation curve of the second micro-spraying valve striker are inconsistent, so that the dispensing quality is inconsistent, the motion speed simulation curve of the first micro-spraying valve striker is taken as the standard motion speed simulation curve of the striker, the error between the motion speed simulation curve of the second micro-spraying valve striker and the standard motion speed simulation curve of the striker is the minimum, the least square method is adopted to optimize the actual working frequency of the second micro-spraying valve, the optimal loading voltage frequency of the second micro-spraying valve is obtained, so that in the same actual descending stroke, the motion speed simulation curve of the first micro-spraying valve striker and the motion speed simulation curve of the second micro-spraying valve striker have higher consistency, the high-precision dispensing of different piezoelectric impact micro-jet valves and the high consistency of dispensing quality are realized. For high-viscosity glue solution, the motion time corresponding to the maximum motion speed on the standard motion speed simulation curve of the firing pin is obtainedT v-max And for 0 toT v-max The simulated movement speed of the striker in the time period is integrated to obtain the optimal descending stroke of the striker, so that the movement speed of the striker in the optimal descending stroke is gradually increased and reaches the maximum movement speed, the striker can extrude the high-viscosity glue solution with the maximum impact force, and the injection stability of the high-viscosity glue solution and the high consistency of the glue dispensing quality are ensured.
The above examples are given for the purpose of illustrating the present invention clearly and not for the purpose of limiting the same, and it will be apparent to those skilled in the art that various changes and modifications can be made in the above examples without departing from the scope of the invention.
Claims (6)
1. A high-precision control method for a piezoelectric impact micro-spraying valve is characterized by comprising the following steps:
s1: taking a first micro-spraying valve and a second micro-spraying valve;
s2: presetting actual descending stroke and actual working frequency of a firing pin, wherein the actual working frequency is actual loading voltage frequency;
s3: respectively constructing nonlinear hysteresis kinetic models of the first micro-injection valve and the second micro-injection valve firing pin to obtain a first kinetic model and a second kinetic model, wherein the first kinetic model corresponds to the first micro-injection valve, and the second kinetic model corresponds to the second micro-injection valve;
-constructing the first and second kinetic models, comprising the steps of:
s301: constructing a dynamic structure model of the piezoelectric impact type micro-spraying valve according to the component structures of the first micro-spraying valve and the second micro-spraying valve;
s302: constructing a nonlinear hysteresis kinetic model of the striker according to the kinetic structure model; the dynamic model is used for acquiring the simulated motion speed of the striker;
s303: identifying parameters to be identified in the dynamic model to form a parameter vector, wherein the parameter vector comprises a model coefficient y, a model coefficient p, a model coefficient q and a damping coefficient mu;
s304: constructing an evaluation function by taking the minimum sum of the error of the actually measured motion speed and the simulated motion speed of the striker as a target;
s305: presetting test loading voltage frequencies, wherein the test loading voltage frequencies comprise a first loading voltage frequency, a second loading voltage frequency, a third loading voltage frequency, a fourth loading voltage frequency and a fifth loading voltage frequency;
s306: under the actual descending stroke and the first loading voltage frequency, acquiring actual measurement motion data of a first micro-injection valve firing pin to obtain first actual measurement motion data, wherein the actual measurement motion data comprises an actual measurement motion speed and corresponding motion time;
s307: performing iterative computation by adopting a particle swarm algorithm and taking an evaluation function as a target function to obtain an optimal parameter vector of the dynamic model of the first micro-spraying valve under the first loading voltage frequency, and setting the optimal parameter vector as a first parameter vector;
s308: referring to steps S306 to S307, under the actual descending stroke condition, respectively obtaining optimal parameter vectors of the first micro-spray valve under the second loading voltage frequency, the third loading voltage frequency, the fourth loading voltage frequency, and the fifth loading voltage frequency of the dynamic model, which are respectively a second parameter vector, a third parameter vector, a fourth parameter vector, and a fifth parameter vector;
s309: respectively taking the value of a model coefficient y from the first parameter vector, the second parameter vector, the third parameter vector, the fourth parameter vector and the fifth parameter vector, and establishing a relational expression between the model coefficient y and the loading voltage frequency to obtain a first polynomial;
s310: referring to step S309, respectively establishing a model coefficient p, a model coefficient q, a relational expression between a damping coefficient μ and a loading voltage frequency to obtain a second polynomial, a third polynomial, and a fourth polynomial, where the second polynomial is a relational expression between the model coefficient p and the loading voltage frequency, the third polynomial is a relational expression between the model coefficient q and the loading voltage frequency, and the fourth polynomial is a relational expression between the damping coefficient μ and the loading voltage frequency;
s311: substituting the first polynomial, the second polynomial, the third polynomial and the fourth polynomial into the kinetic model to obtain a nonlinear hysteresis kinetic model of the first micro-injection valve striker, and setting the nonlinear hysteresis kinetic model as a first kinetic model;
s312: referring to the steps S306 to S311, obtaining a nonlinear hysteresis kinetic model of the second micro-injection valve firing pin, and setting the model as a second kinetic model;
s4: under the actual descending stroke and the actual working frequency, respectively obtaining a motion speed simulation curve of a first micro-injection valve firing pin and a motion speed simulation curve of a second micro-injection valve firing pin by using the first dynamic model and the second dynamic model;
s5: and acquiring the optimal loading voltage frequency of the second micro-spray valve by adopting a least square method by taking the motion speed simulation curve of the first micro-spray valve striker as a striker standard motion speed simulation curve and taking the motion speed simulation curve of the second micro-spray valve striker and the striker standard motion speed simulation curve as a target of minimum error.
2. The method for controlling the piezoelectric impact micro-spraying valve with high precision according to claim 1, wherein the evaluation function is,
in the formula, delta is the error between the actually measured motion speed and the simulated motion speed of the firing pin; theta is a parameter vector (y, p, q, mu) composed of parameters to be identified; n represents the number of sampling points of actually measured motion data of the firing pins; v. of 2 Indicating the measured speed of motion of the striker; v. of 21 Representing the simulated speed of motion of the striker; t is i And the motion time corresponding to the ith sampling point is represented, i is more than or equal to 1 and less than or equal to N, and the motion time is a natural number.
3. The piezoelectric impact type micro-spraying valve high-precision control method as claimed in claim 1, wherein the optimal loading voltage frequency of the second micro-spraying valve is obtained by adopting a least square method, and the method comprises the following steps:
s501: determining a frequency optimization range of a loading voltage of a second micro-jet valve;
s502: randomly acquiring an optimized loading voltage frequency within the optimized loading voltage frequency range;
s503: substituting the optimized loading voltage frequency into the second dynamic model under the actual descending stroke to obtain an optimized simulation curve;
s504: setting a least square method termination condition, and calculating an error between an optimized simulation curve and the firing pin standard motion speed simulation curve to obtain a third error;
s505: repeating the steps S502 to S504 to obtain a fourth error;
s506: comparing the third error with the fourth error, keeping the minimum value of the third error and the fourth error and the corresponding optimized loading voltage frequency, and taking the minimum value as a third error to continuously participate in the next comparison;
s507: and repeating the steps S505 to S506 until the calculation is stopped when the termination condition is reached, and then outputting the optimized loading voltage frequency corresponding to the minimum value to obtain the optimized loading voltage frequency.
4. The method for controlling the piezoelectric impact micro-spraying valve with high precision as claimed in claim 1, wherein the step of obtaining the optimal descending stroke of the striker according to the standard motion speed simulation curve of the striker comprises the following steps:
s6: obtaining the motion time T corresponding to the maximum motion speed on the firing pin standard motion speed simulation curve v-max ；
S7: for 0 to T v-max The simulated velocity of the striker during the time period is integrated to obtain the optimum down stroke of the striker.
5. The piezoelectric impact type micro-spraying valve high-precision control method according to claim 2, wherein iterative computation is performed by using a particle swarm algorithm and taking an evaluation function as an objective function, so as to obtain an optimal parameter vector of the dynamic model of the first micro-spraying valve under the first loading voltage frequency, and the method comprises the following steps:
s3071: setting initial conditions, wherein the initial conditions comprise particle swarm scale, iteration times, particle maximum moving speed, y value range, p value range, q value range and mu value range;
s3072: respectively randomly obtaining a y value, a p value, a q value and a mu value in a value range of y, a value range of p, a value range of q and a value range of mu to form a group of random parameter vectors;
s3073: substituting the random parameter vector into the dynamic model to obtain a random dynamic model of the first micro-spraying valve under the first loading voltage frequency;
s3074: according to the random dynamics model, under the actual descending stroke and the first loading voltage frequency, obtaining a motion speed random simulation curve of the striker;
s3075: obtaining the motion time T on the random simulation curve of the motion speed of the firing pin i Corresponding simulation motion speed, i is more than or equal to 1 and less than or equal to N, and is a natural number, and first simulation motion data are obtained;
s3076: inputting the first actually measured motion data and the first simulated motion data into the evaluation function, and calculating an error delta to obtain a first error;
s3077: repeating the steps S3072-S3076 to obtain a second error;
s3078: comparing the first error with the second error, and keeping the minimum value and the corresponding random parameter vector in the first error and the second error, wherein the minimum value is used as the first error to continuously participate in the next comparison;
s3079: and repeatedly executing the steps S3077-S3078 until the iteration times are reached, and then outputting a random parameter vector corresponding to the minimum value to obtain a first parameter vector, wherein the first parameter vector is the optimal parameter vector of the dynamic model of the first micro-spraying valve under the actual descending stroke and the first loading voltage frequency.
6. The method as claimed in claim 1, wherein the first, second, third and fourth polynomials are all polynomials of degree 4.
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