CN114660091B - Imaging system and method for optical component of bundling device terminal - Google Patents
Imaging system and method for optical component of bundling device terminal Download PDFInfo
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- CN114660091B CN114660091B CN202210277608.3A CN202210277608A CN114660091B CN 114660091 B CN114660091 B CN 114660091B CN 202210277608 A CN202210277608 A CN 202210277608A CN 114660091 B CN114660091 B CN 114660091B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/106—Beam splitting or combining systems for splitting or combining a plurality of identical beams or images, e.g. image replication
Abstract
The invention discloses an imaging system and an imaging method for a terminal optical component of a bundling device, relates to the field of online imaging system design of large-caliber optical elements, and aims to solve the problem that the imaging detection speed of a single-beam terminal optical component is low at present. The optical assembly is formed by arranging 8 sub-beams according to a shape of a mouth, the imaging objective lens collects images of the optical assembly, the collected images are output to the beam splitting prism, the images of the first group of sub-beams are transmitted to the corresponding 4 detection chips through the beam splitting prism, meanwhile, the images of the second group of sub-beams or the images of the third group of sub-beams are reflected to the other 2 detection chips through the beam splitting prism, after the imaging objective lens, the beam splitting prism and the image detector are rotated by 90 degrees around the optical axis clockwise together, the images of the third group of sub-beams or the images of the second group of sub-beams are reflected to the other 2 detection chips through the beam splitting prism, and the image detector completes all collection of 8 sub-beam images. It is used for acquisition of imaging of optical components.
Description
Technical Field
The invention relates to the field of design of online imaging systems of large-caliber optical elements.
Background
When the large-scale laser device performs an inertial confinement nuclear fusion (Inertial Confinement Fusion, ICF) experiment, a plurality of seed lasers reach a peak value at the tail end of a light path after energy pre-amplification, shaping and multi-pass amplification, and are focused on a target point of a vacuum target room to complete a targeting experiment. The terminal optical assembly (Final Optics Assembly, FOA) is located at the end of the entire optical path and consists of 8 optical elements, which are highly susceptible to laser induced damage due to the very high laser energy. This can lead to poor performance of the element itself, resulting in laser power and energy levels that do not meet targeting requirements, directly resulting in ignition failure; meanwhile, the existence of damage increases the near field modulation degree of the light beam, the near field quality is deteriorated, and the damage risk of downstream elements is increased; the optical element damage is too severe to burst in the experiment and the splatter of the burst contaminates the entire target chamber environment. Serious experimental accidents are caused, and huge economic loss is caused; finally, the final optics are extremely expensive and the crystal processing cycle is lengthy. In conclusion, the detection of the terminal optical element has important significance for guaranteeing the loading capacity of the device, ensuring the safe operation of the system, improving the success rate of laser targeting and reducing the operation cost of ICF experiments.
And a certain engineering bundling device is started, and the engineering bundling device becomes a high-energy laser device with the maximum world standard after construction is completed. The bundling device has been modified considerably in the terminal assembly part than some laser host device. In order to improve single-beam laser energy, the single-beam terminal optical component consists of 8 sub-beams which are arranged in a shape of a Chinese character 'kou', and the distance between optical elements is very small and only 2mm. If the number of optical elements to be detected is increased by 8 times as much as that of the host device, and the host device is still adopted to sequentially image each optical element, the detection of the terminal element of the bundling device can be completed within more than 10 hours even if each link moves at the fastest speed, and the detection time is too long. If 8 sub-beams are imaged in full aperture, the practical imaging range is about 2.2m, 1.83 thousands of pixels are needed for 1.83 thousands of pixels by 1.83 thousands of pixels under the condition of ensuring resolution, no CCD image surface of order of magnitude can be met at present, and the customization cost is too high. If the mode that 8 array CCD corresponds to 8 optical elements and images are formed on the same plane is adopted, because the space between 8 optical elements is too small, the space occupied by CCD package and peripheral circuit board is larger, CCD can not be arranged on the same image plane, and 8 images can not be collected on the same plane.
Disclosure of Invention
The invention aims to solve the problem of low imaging detection speed of a single-beam terminal optical component at present, and provides a system and a method for imaging the terminal optical component of a bundling device.
The beam concentrating device terminal optical component imaging system comprises an imaging objective lens 1, a beam splitting prism 2 and an image detector 3,
the optical component is formed by arranging 8 sub-beams according to a Chinese character 'kou' shape, wherein the 8 sub-beams are respectively arranged at 4 vertex positions of the Chinese character 'kou' shape, the upper and lower edges of the Chinese character 'kou' shape and the left and right edges of the Chinese character 'kou' shape; wherein 4 sub-beams arranged at 4 vertex positions of the mouth shape are a first group of sub-beams; the 2 sub-beams arranged on the upper and lower edges of the square shape are a second group of sub-beams; the 2 sub-beams arranged on the left and right sides of the square are a third group of sub-beams;
the optical component, the imaging objective lens 1, the beam splitting prism 2 and the image detector 3 are coaxially arranged in sequence;
the image detector 3 comprises 6 detection chips 3-1;
the 4 detection chips 3-1 are opposite to the 4 sub-beams in the first group of sub-beams in position, the other 2 detection chips 3-1 are perpendicular to the 4 detection chips 3-1, and the other 2 detection chips 3-1 are oppositely arranged,
the imaging objective lens 1 collects the image of the optical component, outputs the collected image to the beam splitting prism 2, the image of the first group of sub-beams is transmitted to the corresponding 4 detection chips 3-1 through the beam splitting prism 2, and the image of the second group of sub-beams or the image of the third group of sub-beams is reflected to the other 2 detection chips 3-1 through the beam splitting prism 2,
after the imaging objective lens 1, the beam splitting prism 2 and the image detector 3 are rotated by 90 degrees along the clockwise line around the optical axis, the image of the third group of sub-beams or the image of the second group of sub-beams is reflected to the other 2 detection chips 3-1 through the beam splitting prism 2, and the image detector 3 completes the whole collection of 8 sub-beam images.
Preferably, the beam-splitting prism 2 includes 2 triangular prisms 2-1 and 1 trapezoidal stage 2-2;
the 2 triangular prisms 2-1 have the same structure, the 2 triangular prisms 2-1 are respectively stuck on two sides of the trapezoid table 2-2, and the 2 triangular prisms 2-1 and the 1 trapezoid table 2-2 are stuck into a cuboid structure;
a half reflection film and a half transmission film are respectively plated at the pasting position of each triangular prism 2-1 and the trapezoid table 2-2;
when the two pasting positions are opposite to the positions of the 2 sub-beams in the second group of sub-beams, the image of the first group of sub-beams is transmitted to the corresponding 4 detection chips 3-1 through the transmission film on the beam splitting prism 2, meanwhile, the image of the 2 sub-beams in the second group of sub-beams is reflected to the other 2 detection chips 3-1 through the 1 reflection film on the beam splitting prism 2, after the imaging objective lens 1, the beam splitting prism 2 and the image detector 3 are rotated by 90 degrees around the optical axis clockwise together, the two pasting positions are opposite to the positions of the 2 sub-beams in the third group of sub-beams, the image of the 2 sub-beams in the third group of sub-beams is reflected to the other 2 detection chips 3-1 through the 1 reflection film on the beam splitting prism 2, and the image detector 3 completes the whole collection of the 8 mouth-shaped sub-beam images;
when the two pasting positions are opposite to the positions of the 2 sub-beams in the third group of sub-beams, the image of the first group of sub-beams is transmitted to the corresponding 4 detection chips 3-1 through the transmission film on the beam splitting prism 2, meanwhile, the image of the 2 sub-beams in the third group of sub-beams is reflected to the other 2 detection chips 3-1 through the 1 reflection film on the beam splitting prism 2, after the imaging objective lens 1, the beam splitting prism 2 and the image detector 3 are rotated by 90 degrees around the optical axis clockwise together, the two pasting positions are opposite to the positions of the 2 sub-beams in the second group of sub-beams, the image of the 2 sub-beams in the second group of sub-beams is reflected to the other 2 detection chips 3-1 through the 1 reflection film on the beam splitting prism 2, and the image detector 3 completes the whole collection of the 8 sub-beam images.
Preferably, the image detector 3 further comprises a cylindrical housing,
the system further comprises an annular coupling member,
the bottom of the cylindrical shell is provided with 4 holes, the 4 holes are uniformly formed by taking the axis of the cylindrical shell as the center, the side wall of the cylindrical shell is symmetrically provided with 2 holes, each hole is embedded with a detection chip 3-1,
the ring surface of the annular connecting piece is connected with the cylindrical shell, the imaging objective lens 1 extends into the cylindrical shell from the inner ring of the annular connecting piece and is connected with the splitting prism 2 in the cylindrical shell, and the outer wall of the imaging objective lens 1 is connected with the inner annular wall of the annular connecting piece.
Preferably, the image detector 3 is implemented by a stereo array CCD camera, and the 6 detection chips 3-1 are 6 CCD chips.
An imaging method implemented according to a cluster tool terminal optical assembly imaging system, the method comprising the steps of:
and 7, judging whether detection of all the optical components is finished, if so, controlling the six-degree-of-freedom mechanical arm to grasp and adjust the imaging objective lens 1, the image detector 3 and the beam splitting prism 2 to exit the vacuum target chamber by using the control module, and if not, controlling the six-degree-of-freedom mechanical arm to grasp and adjust the imaging objective lens 1, the image detector 3 and the beam splitting prism 2 to align with the next group of optical components by using the control module, and repeatedly executing the steps 2 to 7 until image acquisition of all the optical components is finished.
The beneficial effects of the invention are as follows:
aiming at the problems that the sub-beams of the terminal optical component 8 of a certain engineering bundling device are tightly distributed in a mouth shape and have huge quantity, and the current single-beam full-caliber detection mode is low in speed, the application provides an imaging system for the terminal optical component of the XX engineering bundling device.
According to the three-dimensional array CCD camera and beam splitting prism integrated design, the three-dimensional array CCD camera is designed in an array mode according to 8 sub-beam arrangement modes of the optical assembly, and the 8 sub-beams can be imaged by rotating an imaging objective lens (1), a beam splitting prism (2) and the three-dimensional array CCD camera around an optical axis by 90 degrees. The imaging system overcomes various constraints of practical situations, and achieves the fastest imaging mode for an optical assembly (bundling terminal assembly). The speed is improved by 5 times compared with the previous single-beam full-caliber imaging mode. Meanwhile, the optimized acquisition strategy reduces the number of CCD, and greatly saves the manufacturing cost.
In view of the above limitations, currently, there is a need for an imaging system designed according to the arrangement of its own terminal components for an engineering beam focusing device to complete the task of detecting 8 sub-beams of full-aperture optical elements in a short time.
For the imaging problem of a terminal optical component of an engineering bundling device, a special rapid imaging method is not available, and the application fills a technical gap in the field.
Drawings
FIG. 1 is an overall block diagram of an imaging system for a terminal optical assembly of a cluster tool;
FIG. 2 is a cross-sectional view of FIG. 1;
FIG. 3 is a schematic diagram of a three-dimensional array CCD camera;
FIG. 4 is a schematic view of a view angle of a beam-splitting prism;
FIG. 5 is a schematic view of another view of a beam-splitting prism;
fig. 6 is a view of a spectroscopic prism along the optical axis direction;
FIG. 7 is a right side view of FIG. 6;
FIG. 8 is an imaging three-dimensional schematic of an imaging system of a terminal optical assembly of the cluster tool;
FIG. 9 is a three-dimensional schematic view of an imaging objective lens, a beam splitter prism and a stereo array CCD camera rotated 90 degrees clockwise around an optical axis;
FIG. 10 is a schematic diagram illustrating the operation of an imaging objective and a beam splitting prism;
FIG. 11 is a schematic diagram of an optical assembly consisting of 8 beamlets;
fig. 12 is a flow chart of a cluster tool terminal optics assembly imaging system.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It should be noted that, without conflict, the embodiments of the present invention and features of the embodiments may be combined with each other.
The invention is further described below with reference to the drawings and specific examples, which are not intended to be limiting.
The first embodiment is as follows: the present embodiment is described with reference to fig. 8 to 11, which illustrate an imaging system of a terminal optical assembly of a bundling device according to the present embodiment, the system comprising an imaging objective lens 1, a beam-splitting prism 2 and an image detector 3,
the optical component is formed by arranging 8 sub-beams according to a Chinese character 'kou' shape, wherein the 8 sub-beams are respectively arranged at 4 vertex positions of the Chinese character 'kou' shape, the upper and lower edges of the Chinese character 'kou' shape and the left and right edges of the Chinese character 'kou' shape; wherein 4 sub-beams arranged at 4 vertex positions of the mouth shape are a first group of sub-beams; the 2 sub-beams arranged on the upper and lower edges of the square shape are a second group of sub-beams; the 2 sub-beams arranged on the left and right sides of the square are a third group of sub-beams;
the optical component, the imaging objective lens 1, the beam splitting prism 2 and the image detector 3 are coaxially arranged in sequence;
the image detector 3 comprises 6 detection chips 3-1;
the 4 detection chips 3-1 are opposite to the 4 sub-beams in the first group of sub-beams in position, the other 2 detection chips 3-1 are perpendicular to the 4 detection chips 3-1, and the other 2 detection chips 3-1 are oppositely arranged,
the imaging objective lens 1 collects the image of the optical component, outputs the collected image to the beam splitting prism 2, the image of the first group of sub-beams is transmitted to the corresponding 4 detection chips 3-1 through the beam splitting prism 2, and the image of the second group of sub-beams or the image of the third group of sub-beams is reflected to the other 2 detection chips 3-1 through the beam splitting prism 2,
after the imaging objective lens 1, the beam splitting prism 2 and the image detector 3 are rotated by 90 degrees along the clockwise line around the optical axis, the image of the third group of sub-beams or the image of the second group of sub-beams is reflected to the other 2 detection chips 3-1 through the beam splitting prism 2, and the image detector 3 completes the whole collection of 8 sub-beam images.
In this embodiment, the optical component in the present application is also referred to as a terminal optical component, and the optical component includes 8 sub-beams, and the optical component structure is shown in fig. 11, and numerals 1 to 8 denote the 8 sub-beams. In order to shorten the imaging time, as many beamlets in one optical assembly as possible have to be imaged simultaneously. According to the calculation, the sub-beams (5, 6, 7, 8) located at the 4 corners of the optical assembly are spaced apart a large distance, and the image can be received by 4 CCDs arranged in a plane a parallel to the optical assembly. For the remaining 4 sub-beams (1, 2, 3, 4), wherein the 1,2 sub-beam imaging is received by a CCD mounted on the B, C face via two reflective surfaces of the splitting prism, changing the optical path direction, reflecting the imaging of the element onto two side surfaces B, C perpendicular to plane A. The imaging objective lens 1, the beam splitting prism 2 and the stereo array CCD camera 3 are simultaneously rotated by 90 DEG, and the left and right sub-beams 3,4 are respectively received by the two CCDs of the side B, C in the same manner. The 8 optics images were all received by the CCD.
The imaging objective 1 in the present application serves to image the optical assembly and the stereo array CCD camera 3 serves to record this phase.
The second embodiment is as follows: the present embodiment is further limited to the imaging system for a terminal optical component of a bundling device according to the first embodiment, and in the present embodiment, the beam-splitting prism 2 includes 2 triangular prisms 2-1 and 1 trapezoidal stage 2-2;
the 2 triangular prisms 2-1 have the same structure, the 2 triangular prisms 2-1 are respectively stuck on two sides of the trapezoid table 2-2, and the 2 triangular prisms 2-1 and the 1 trapezoid table 2-2 are stuck into a cuboid structure;
a half reflection film and a half transmission film are respectively plated at the pasting position of each triangular prism 2-1 and the trapezoid table 2-2;
when the two pasting positions are opposite to the positions of the 2 sub-beams in the second group of sub-beams, the image of the first group of sub-beams is transmitted to the corresponding 4 detection chips 3-1 through the transmission film on the beam splitting prism 2, meanwhile, the image of the 2 sub-beams in the second group of sub-beams is reflected to the other 2 detection chips 3-1 through the 1 reflection film on the beam splitting prism 2, after the imaging objective lens 1, the beam splitting prism 2 and the image detector 3 are rotated by 90 degrees around the optical axis clockwise together, the two pasting positions are opposite to the positions of the 2 sub-beams in the third group of sub-beams, the image of the 2 sub-beams in the third group of sub-beams is reflected to the other 2 detection chips 3-1 through the 1 reflection film on the beam splitting prism 2, and the image detector 3 completes the whole collection of the 8 sub-beam images;
when the two pasting positions are opposite to the positions of the 2 sub-beams in the third group of sub-beams, the image of the first group of sub-beams is transmitted to the corresponding 4 detection chips 3-1 through the transmission film on the beam splitting prism 2, meanwhile, the image of the 2 sub-beams in the third group of sub-beams is reflected to the other 2 detection chips 3-1 through the 1 reflection film on the beam splitting prism 2, after the imaging objective lens 1, the beam splitting prism 2 and the image detector 3 are rotated by 90 degrees around the optical axis clockwise together, the two pasting positions are opposite to the positions of the 2 sub-beams in the second group of sub-beams, the image of the 2 sub-beams in the second group of sub-beams is reflected to the other 2 detection chips 3-1 through the 1 reflection film on the beam splitting prism 2, and the image detector 3 completes the whole collection of the 8 sub-beam images.
In the present embodiment, as shown in fig. 8, the optical elements (5, 6, 7, 8) are respectively opposed to the CCD chip 3-1 (8, 7, 6, 5), the image of the optical element 5 in the upper left is recorded by the CCD chip 5 in the lower right, the image of the optical element 6 in the upper right is recorded by the CCD chip 6 in the lower left, the image of the optical element 7 in the lower left is recorded by the CCD chip 7 in the upper right, and the image of the optical element 8 in the lower right is recorded by the CCD chip 8 in the upper left, because the image is inverted, the optical component image is acquired in such a manner as in fig. 8.
When 2 pasting positions in the beam splitting prism 2 are opposite to the optical elements 1 and 2 in fig. 8, the CCD chip at the 1 position can acquire the image of the optical element 1, and the CCD chip at the 2 position can acquire the image of the optical element 2; when the imaging objective lens 1, the beam splitter prism 2 and the stereo array CCD camera 3 are rotated together by 90 ° about the optical axis clockwise, as shown in fig. 9, 2 pasting positions in the beam splitter prism 2 are opposite to the optical elements 3 and 4, at this time, the 4-position CCD chip can collect an image of the optical element 4, and the 3-position CCD chip can collect an image of the optical element 3.
And a third specific embodiment: the present embodiment is further limited to the imaging system for a terminal optical assembly of a bundling device according to the second embodiment, and in the present embodiment, the image detector 3 further includes a cylindrical housing,
the system further comprises an annular coupling member,
the bottom of the cylindrical shell is provided with 4 holes, the 4 holes are uniformly formed by taking the axis of the cylindrical shell as the center, the side wall of the cylindrical shell is symmetrically provided with 2 holes, each hole is embedded with a detection chip 3-1,
the ring surface of the annular connecting piece is connected with the cylindrical shell, the imaging objective lens 1 extends into the cylindrical shell from the inner ring of the annular connecting piece and is connected with the splitting prism 2 in the cylindrical shell, and the outer wall of the imaging objective lens 1 is connected with the inner annular wall of the annular connecting piece.
In the present embodiment, the imaging objective lens 1, the beam splitter prism 2, and the stereo array CCD camera 3 are configured as shown in fig. 1 and 2, and form an integral structure. The imaging objective lens 1, the beam splitter prism 2 and the stereo array CCD camera 3 are coaxially arranged.
The specific embodiment IV is as follows: this embodiment is further defined by the cluster tool terminal optical assembly imaging system of embodiment three, where the system further includes a pointing angle module,
the pointing angle module is used for driving the cylindrical shell to rotate around the optical axis, so that the imaging objective lens 1, the beam splitting prism 2 and the image detector 3 rotate together around the optical axis by 90 degrees clockwise.
Fifth embodiment: the imaging system for a terminal optical assembly of a bundling apparatus according to the third embodiment is further defined in the present embodiment, wherein the system further comprises a six-degree-of-freedom mechanical arm and a control module,
the control module is used for controlling the six-degree-of-freedom mechanical arm to grasp and adjust the imaging objective lens 1, the image detector 3 and the beam splitting prism 2, so that the imaging objective lens 1, the image detector 3 and the beam splitting prism 2 are aligned to the optical assembly.
Specific embodiment six: the present embodiment is an imaging method implemented by the optical component imaging system of the cluster tool terminal according to the third embodiment, in the present embodiment, the image detector 3 is implemented by using a stereo array CCD camera, and the 6 detection chips 3-1 are 6 CCD chips.
Seventh embodiment: the present embodiment is an imaging method implemented by the imaging system of the optical component of the bundling device terminal according to the fifth embodiment, and the method includes the following steps in the present embodiment:
and 7, judging whether detection of all the optical components is finished, if so, controlling the six-degree-of-freedom mechanical arm to grasp and adjust the imaging objective lens 1, the image detector 3 and the beam splitting prism 2 to exit the vacuum target chamber by using the control module, and if not, controlling the six-degree-of-freedom mechanical arm to grasp and adjust the imaging objective lens 1, the image detector 3 and the beam splitting prism 2 to align with the next group of optical components by using the control module, and repeatedly executing the steps 2 to 7 until image acquisition of all the optical components is finished.
In this embodiment, as in the flow of fig. 12, the control module sends the imaging system into the center of the target room of a certain engineering bundling device, and adjusts the six-degree-of-freedom mechanical arm to align the imaging system with the first terminal optical component in the 48 paths.
The first group of optical elements of the light path is opened for illumination, and the focusing lens group is adjusted to enable the imaging system to clearly focus and image the first group of optical elements of the light path. 5. The imaging of the optical elements at the positions 6, 7 and 8 is directly collected by the array CCDs at the corresponding positions, and the imaging of the optical elements at the positions 1 and 2 is reflected by the beam-splitting prism and is collected by the array CCDs at the two side surfaces. The imaging system completes image acquisition for the optical elements at positions 1,2, 5, 6, 7 and 8.
The imaging system rotates 90 degrees around the optical axis clockwise, and the imaging system completes image acquisition on the optical elements at the 3 position and the 4 position. The light path is closed and the first set of optical elements illuminate.
And opening the second group of optical elements of the light path to illuminate, adjusting the focusing lens group to enable the imaging system to clearly focus and image the optical elements, repeating the image acquisition step of the first group of optical elements, and completing the image acquisition of the second group of optical elements. The above operation is repeated until the sub-beam optical path 8 groups of optical components are all collected.
Adjusting the six-degree-of-freedom mechanical arm to enable the imaging system to be aligned to the next path of light path, and repeating the steps until the 48 paths of optical elements complete image acquisition.
Eighth embodiment: the present embodiment is an imaging method implemented according to the imaging system of the terminal optical assembly of the bundling device according to the seventh embodiment, in the present embodiment, the image detector 3 is implemented by using a stereo array CCD camera, and the detection chip 3-1 is a CCD chip.
Although the invention herein has been described with reference to particular embodiments, it is to be understood that these embodiments are merely illustrative of the principles and applications of the present invention. It is therefore to be understood that numerous modifications may be made to the illustrative embodiments and that other arrangements may be devised without departing from the spirit and scope of the present invention as defined by the appended claims. It should be understood that the different dependent claims and the features described herein may be combined in ways other than as described in the original claims. It is also to be understood that features described in connection with separate embodiments may be used in other described embodiments.
Claims (7)
1. The imaging system of the optical component of the bundling device terminal is characterized in that the system comprises an imaging objective lens (1), a beam splitting prism (2) and an image detector (3),
the optical component is formed by arranging 8 sub-beams according to a Chinese character 'kou' shape, wherein the 8 sub-beams are respectively arranged at 4 vertex positions of the Chinese character 'kou' shape, the upper and lower edges of the Chinese character 'kou' shape and the left and right edges of the Chinese character 'kou' shape; wherein 4 sub-beams arranged at 4 vertex positions of the mouth shape are a first group of sub-beams; the 2 sub-beams arranged on the upper and lower edges of the square shape are a second group of sub-beams; the 2 sub-beams arranged on the left and right sides of the square are a third group of sub-beams;
the optical component, the imaging objective lens (1), the beam splitting prism (2) and the image detector (3) are coaxially arranged in sequence;
the image detector (3) comprises 6 detection chips (3-1);
the 4 detection chips (3-1) are opposite to the 4 sub-beams in the first group of sub-beams, the other 2 detection chips (3-1) are perpendicular to the 4 detection chips (3-1), and the other 2 detection chips (3-1) are oppositely arranged,
the imaging objective lens (1) collects the image of the optical component, outputs the collected image to the beam splitting prism (2), the image of the first group of sub-beams is transmitted to the corresponding 4 detection chips (3-1) through the beam splitting prism (2), and the image of the second group of sub-beams or the image of the third group of sub-beams is reflected to the other 2 detection chips (3-1) through the beam splitting prism (2),
after the imaging objective lens (1), the beam splitting prism (2) and the image detector (3) rotate together by 90 degrees around the optical axis clockwise, the image of the third group of sub-beams or the image of the second group of sub-beams is reflected to the other 2 detection chips (3-1) through the beam splitting prism (2), and the image detector (3) completes all the collection of 8 sub-beam images;
the beam-splitting prism (2) comprises 2 triangular prisms (2-1) and 1 trapezoidal table (2-2);
the structures of the 2 triangular prisms (2-1) are the same, the 2 triangular prisms (2-1) are respectively stuck to two sides of the trapezoid table (2-2), and the 2 triangular prisms (2-1) and the 1 trapezoid table (2-2) are stuck to form a cuboid structure;
a half reflection film and a half transmission film are respectively plated at the pasting position of each triangular prism (2-1) and the trapezoid table (2-2);
when the two pasting positions are opposite to the positions of the 2 sub-beams in the second group of sub-beams, the image of the first group of sub-beams is transmitted to the corresponding 4 detection chips (3-1) through the transmission film on the beam splitting prism (2), meanwhile, the image of the 2 sub-beams in the second group of sub-beams is reflected to the other 2 detection chips (3-1) through the 1 reflection films on the beam splitting prism (2), after the imaging objective lens (1), the beam splitting prism (2) and the image detector (3) are rotated by 90 degrees clockwise around the optical axis together, the two pasting positions are opposite to the positions of the 2 sub-beams in the third group of sub-beams, the image of the 2 sub-beams in the third group of sub-beams is reflected to the other 2 detection chips (3-1) through the 1 reflection film on the beam splitting prism (2), and the image detector (3) completes the whole acquisition of the 8 sub-beam images;
when the two pasting positions are opposite to the positions of the 2 sub-beams in the third group of sub-beams, the image of the first group of sub-beams is transmitted to the corresponding 4 detection chips (3-1) through the transmission film on the beam splitting prism (2), meanwhile, the image of the 2 sub-beams in the third group of sub-beams is reflected to the other 2 detection chips (3-1) through the 1 reflection film on the beam splitting prism (2), after the imaging objective lens (1), the beam splitting prism (2) and the image detector (3) are rotated by 90 degrees clockwise around the optical axis together, the two pasting positions are opposite to the positions of the 2 sub-beams in the second group of sub-beams, the image of the 2 sub-beams in the second group of sub-beams is reflected to the other 2 detection chips (3-1) through the 1 reflection film on the beam splitting prism (2), and the image detector (3) completes the whole collection of the 8 sub-beam images.
2. The cluster tool terminal optical assembly imaging system of claim 1, wherein the image detector (3) further comprises a cylindrical housing,
the system further comprises an annular coupling member,
the bottom of the cylindrical shell is provided with 4 holes, the 4 holes are uniformly formed by taking the axis of the cylindrical shell as the center, the side wall of the cylindrical shell is symmetrically provided with 2 holes, each hole is embedded with a detection chip (3-1),
the ring surface of the annular connecting piece is connected with the cylindrical shell, the imaging objective lens (1) stretches into the cylindrical shell from the inner ring of the annular connecting piece and is connected with the beam splitting prism (2) in the cylindrical shell, and the outer wall of the imaging objective lens (1) is connected with the inner ring wall of the annular connecting piece.
3. The cluster tool terminal optical assembly imaging system of claim 2, further comprising a pointing angle module,
the pointing angle module is used for driving the cylindrical shell to rotate around the optical axis, so that the imaging objective lens (1), the beam splitting prism (2) and the image detector (3) rotate around the optical axis by 90 degrees clockwise.
4. The cluster tool terminal optics assembly imaging system of claim 2, further comprising a six degree of freedom robot and a control module,
the control module is used for controlling the six-degree-of-freedom mechanical arm to grasp and adjust the imaging objective lens (1), the image detector (3) and the beam splitter prism (2) so that the imaging objective lens (1), the image detector (3) and the beam splitter prism (2) are aligned to the optical assembly.
5. The cluster tool terminal optical assembly imaging system according to claim 2, wherein the image detector (3) is implemented by a stereo array CCD camera, and the 6 detection chips (3-1) are 6 CCD chips.
6. The imaging method implemented by the cluster tool terminal optical assembly imaging system of claim 4, wherein the method comprises the steps of:
step 1, a control module controls a six-degree-of-freedom mechanical arm to grasp and adjust an imaging objective lens (1), an image detector (3) and a beam splitting prism (2), and the imaging objective lens (1), the image detector (3) and the beam splitting prism (2) are sent to the center of a vacuum target chamber;
step 2, focusing the imaging objective lens (1) to enable the imaging objective lens (1) to be aligned with the first group of optical components;
step 3, after an illumination light source on the first group of optical components is started, an imaging objective lens (1) collects images of the first group of sub-beams and the second group of sub-beams or the third group of sub-beams, and the images are output to a beam splitting prism (2);
step 4, the image of the first group of sub-beams is transmitted to the corresponding 4 detection chips (3-1) through the beam splitting prism (2), and the image of the second group of sub-beams or the image of the third group of sub-beams is reflected to the other 2 detection chips (3-1) through the beam splitting prism (2);
step 5, after the imaging objective lens (1), the beam splitting prism (2) and the image detector (3) are rotated by 90 degrees along a clockwise line around an optical axis, the image of the third group of sub-beams or the image of the second group of sub-beams is reflected to the other 2 detection chips (3-1) through the beam splitting prism (2);
step 6, a control module detects whether the image detector (3) completes all collection of 8 sub-beam images in the first group of optical components, if not, focusing is carried out on the imaging objective lens (1) and the imaging objective lens is focused to the first group of optical components, the steps 3 to 6 are repeatedly executed until all collection of 8 sub-beam images in the first group of optical components is completed, and if so, the step 7 is executed;
and 7, judging whether detection of all the optical components is finished, if so, controlling the six-degree-of-freedom mechanical arm to grasp and adjust the imaging objective lens (1), the image detector (3) and the beam splitter prism (2) to exit the vacuum target chamber by using the control module, and if not, controlling the six-degree-of-freedom mechanical arm to grasp and adjust the imaging objective lens (1), the image detector (3) and the beam splitter prism (2) to align with the next group of optical components by using the control module, and repeatedly executing the steps 2 to 7 until image acquisition of all the optical components is finished.
7. The imaging method implemented according to the cluster tool terminal optical assembly imaging system of claim 6, wherein the image detector (3) is implemented by a stereo array CCD camera, and the detection chip (3-1) is a CCD chip.
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