CN114659706A - Vacuum degree detection method, device, electronic equipment, storage medium and system - Google Patents

Vacuum degree detection method, device, electronic equipment, storage medium and system Download PDF

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CN114659706A
CN114659706A CN202210544153.7A CN202210544153A CN114659706A CN 114659706 A CN114659706 A CN 114659706A CN 202210544153 A CN202210544153 A CN 202210544153A CN 114659706 A CN114659706 A CN 114659706A
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CN114659706B (en
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王凤双
侯少毅
胡强
卫红
刘乔
祝经明
毕诗博
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Ji Hua Laboratory
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00Vacuum gauges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means

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Abstract

The application belongs to the technical field of vacuum measurement and discloses a vacuum degree detection method, a vacuum degree detection device, electronic equipment, a storage medium and a vacuum degree detection system, wherein a first voltage signal generated by an inner ring capacitor and a second voltage signal generated by an outer ring capacitor are obtained; respectively carrying out peak detection processing on the first voltage signal and the second voltage signal to obtain a first peak signal and a second peak signal; carrying out differential processing on the first peak value signal and the second peak value signal to obtain a voltage difference value signal; and calculating the voltage difference signal to obtain a vacuum degree detection result, wherein the differential processing can reduce signal interference and improve detection precision, thereby ensuring the reliability of the vacuum degree detection result.

Description

真空度检测方法、装置、电子设备、存储介质及系统Vacuum detection method, device, electronic device, storage medium and system

技术领域technical field

本申请涉及真空计量技术领域,具体而言,涉及一种真空度检测方法、装置、电子设备、存储介质及系统。The present application relates to the technical field of vacuum measurement, and in particular, to a vacuum degree detection method, device, electronic device, storage medium and system.

背景技术Background technique

电容薄膜真空计是一种全压测量的真空计,具有小型化、稳定性好、测量值与气体成分无关等特点,目前电容薄膜真空计的真空度检测方法一般是先通过整流后再差分滤波,但是其转换线性度差,测量结果不够可靠,难以满足实际应用需求。Capacitance film vacuum gauge is a vacuum gauge for full pressure measurement. It has the characteristics of miniaturization, good stability, and the measurement value has nothing to do with gas composition. At present, the vacuum detection method of capacitance film vacuum gauge is generally first through rectification and then differential filtering. , but its conversion linearity is poor, the measurement results are not reliable enough, and it is difficult to meet the needs of practical applications.

针对上述问题,目前尚未有有效的技术解决方案。There is currently no effective technical solution for the above-mentioned problems.

发明内容SUMMARY OF THE INVENTION

本申请的目的在于提供一种真空度检测方法、装置、电子设备、存储介质及系统,旨在解决电容薄膜真空计的真空度检测结果不够可靠的问题。The purpose of the present application is to provide a vacuum degree detection method, device, electronic device, storage medium and system, which aims to solve the problem that the vacuum degree detection result of a capacitive thin film vacuum gauge is not reliable enough.

第一方面,本申请提供了一种真空度检测方法,用于对薄膜规真空计的检测信号进行处理,所述薄膜规真空计包括金属膜片和同心设置的第一固定电极和第二固定电极,所述金属膜片和所述第一固定电极组成内环电容,所述金属膜片和所述第二固定电极组成外环电容,包括步骤:In a first aspect, the present application provides a vacuum detection method for processing detection signals of a thin-film gauge vacuum gauge, wherein the thin-film gauge vacuum gauge includes a metal diaphragm, a concentrically arranged first fixed electrode and a second fixed electrode electrode, the metal diaphragm and the first fixed electrode form an inner ring capacitor, and the metal diaphragm and the second fixed electrode form an outer ring capacitor, including the steps:

A1.获取内环电容产生的第一电压信号和外环电容产生的第二电压信号;A1. Obtain the first voltage signal generated by the inner ring capacitance and the second voltage signal generated by the outer ring capacitance;

A2.分别对所述第一电压信号和所述第二电压信号进行峰值检测处理,得到第一峰值信号和第二峰值信号;A2. Perform peak detection processing on the first voltage signal and the second voltage signal respectively to obtain a first peak signal and a second peak signal;

A3.对所述第一峰值信号和所述第二峰值信号进行差分处理,得到电压差值信号;A3. Perform differential processing on the first peak signal and the second peak signal to obtain a voltage difference signal;

A4.对所述电压差值信号进行计算处理,得到真空度检测结果。A4. Calculate and process the voltage difference signal to obtain a vacuum degree detection result.

本申请提供的真空度检测方法,通过对第一电压信号和第二电压信号进行峰值检测处理,对峰值检测处理后的第一峰值信号和第二峰值信号进行差分处理,得到电压差值信号,对电压差值信号进行计算处理,得到真空度检测结果,其中,差分处理可以减少信号干扰,提高检测精度,从而保证真空度检测结果的可靠性。In the vacuum degree detection method provided by the present application, by performing peak detection processing on the first voltage signal and the second voltage signal, and performing differential processing on the first peak signal and the second peak signal after the peak detection processing, a voltage difference signal is obtained, The voltage difference signal is calculated and processed to obtain the vacuum degree detection result, wherein the differential processing can reduce signal interference and improve the detection accuracy, thereby ensuring the reliability of the vacuum degree detection result.

优选地,步骤A2包括:Preferably, step A2 includes:

获取上一时刻的第一峰值信号输出值和当前时刻的第一电压信号测量值;Obtain the first peak signal output value at the previous moment and the first voltage signal measurement value at the current moment;

若当前时刻的第一电压信号测量值大于上一时刻的第一峰值信号输出值,则使当前时刻的第一峰值信号输出值等于当前时刻的第一电压信号测量值;If the first voltage signal measurement value at the current moment is greater than the first peak signal output value at the previous moment, the first peak signal output value at the current moment is made equal to the first voltage signal measurement value at the current moment;

若当前时刻的第一电压信号测量值不大于上一时刻的第一峰值信号输出值,则使当前时刻的第一峰值信号输出值等于上一时刻的第一峰值信号输出值;If the measured value of the first voltage signal at the current moment is not greater than the first peak signal output value at the previous moment, make the first peak signal output value at the current moment equal to the first peak signal output value at the previous moment;

获取上一时刻的第二峰值信号输出值和当前时刻的第二电压信号测量值;Obtain the second peak signal output value at the previous moment and the second voltage signal measurement value at the current moment;

若当前时刻的第二电压信号测量值大于上一时刻的第二峰值信号输出值,则使当前时刻的第二峰值信号输出值等于当前时刻的第二电压信号测量值;If the second voltage signal measurement value at the current moment is greater than the second peak signal output value at the previous moment, the second peak signal output value at the current moment is made equal to the second voltage signal measurement value at the current moment;

若当前时刻的第二电压信号测量值不大于上一时刻的第二峰值信号输出值,则使当前时刻的第二峰值信号输出值等于上一时刻的第二峰值信号输出值 。If the measured value of the second voltage signal at the current moment is not greater than the second peak signal output value at the previous moment, the second peak signal output value at the current moment is made equal to the second peak signal output value at the previous moment.

本申请通过对第一电压信号的每一次峰值进行检测,并将当前时刻的第一电压信号测量值与上一时刻的第一峰值信号输出值进行比较,使当前时刻的第一峰值信号输出值不低于第一电压信号测量值的上一个峰值;对第二电压信号的每一次峰值进行检测,并将当前时刻的第二电压信号测量值与上一时刻的第二峰值信号输出值进行比较,使当前时刻的第二峰值信号输出值不低于第二电压信号测量值的上一个峰值。The present application detects each peak value of the first voltage signal, and compares the measured value of the first voltage signal at the current moment with the output value of the first peak signal at the previous moment to make the output value of the first peak signal at the current moment Not lower than the previous peak value of the measured value of the first voltage signal; detect each peak value of the second voltage signal, and compare the measured value of the second voltage signal at the current moment with the output value of the second peak signal at the previous moment , so that the output value of the second peak signal at the current moment is not lower than the previous peak value of the measured value of the second voltage signal.

优选地,步骤A3之后和步骤A4之前,还包括步骤:Preferably, after step A3 and before step A4, it also includes steps:

A5.对所述电压差值信号进行滤波处理。A5. Filter the voltage difference signal.

优选地,步骤A3之后和步骤A4之前,还包括步骤:Preferably, after step A3 and before step A4, it also includes steps:

A6.对所述电压差值信号进行放大处理。A6. Amplify the voltage difference signal.

优选地,步骤A4包括:Preferably, step A4 includes:

采用线性函数对放大处理后的所述电压差值信号进行计算处理,得到真空度检测结果。A linear function is used to calculate and process the amplified voltage difference signal to obtain a vacuum degree detection result.

优选地,所述线性函数为:

Figure DEST_PATH_IMAGE001
; Preferably, the linear function is:
Figure DEST_PATH_IMAGE001
;

式中,

Figure 368503DEST_PATH_IMAGE002
是压力值;
Figure DEST_PATH_IMAGE003
是预设值;
Figure 308778DEST_PATH_IMAGE004
是放大处理后的电压差值信号;
Figure DEST_PATH_IMAGE005
是预设值。 In the formula,
Figure 368503DEST_PATH_IMAGE002
is the pressure value;
Figure DEST_PATH_IMAGE003
is the default value;
Figure 308778DEST_PATH_IMAGE004
is the amplified voltage difference signal;
Figure DEST_PATH_IMAGE005
is the default value.

第二方面,本申请提供了一种真空度检测装置,用于对薄膜规真空计的检测信号进行处理,所述薄膜规真空计包括金属膜片和同心设置的第一固定电极和第二固定电极,所述金属膜片和所述第一固定电极组成内环电容,所述金属膜片和所述第二固定电极组成外环电容,包括:In a second aspect, the present application provides a vacuum detection device for processing detection signals of a thin-film gauge vacuum gauge, the thin-film gauge vacuum gauge comprising a metal diaphragm, a concentrically arranged first fixed electrode and a second fixed electrode electrode, the metal diaphragm and the first fixed electrode form an inner ring capacitor, and the metal diaphragm and the second fixed electrode form an outer ring capacitor, including:

第一获取模块,用于获取内环电容产生的第一电压信号和外环电容产生的第二电压信号;a first acquisition module, configured to acquire the first voltage signal generated by the inner ring capacitance and the second voltage signal generated by the outer ring capacitance;

检测模块,用于分别对所述第一电压信号和所述第二电压信号进行峰值检测处理,得到第一峰值信号和第二峰值信号;a detection module, configured to perform peak detection processing on the first voltage signal and the second voltage signal respectively to obtain a first peak signal and a second peak signal;

第一计算模块,用于对所述第一峰值信号和所述第二峰值信号进行差分处理,得到电压差值信号;a first calculation module, configured to perform differential processing on the first peak signal and the second peak signal to obtain a voltage difference signal;

第二计算模块,用于对所述电压差值信号进行计算处理,得到真空度检测结果。The second calculation module is used for calculating and processing the voltage difference signal to obtain a vacuum degree detection result.

本申请提供的真空度检测装置,通过对第一电压信号和第二电压信号进行峰值检测处理,对峰值检测处理后的第一峰值信号和第二峰值信号进行差分处理,得到电压差值信号,对电压差值信号进行计算处理,得到真空度检测结果,其中,差分处理可以减少信号干扰,提高检测精度,从而保证真空度检测结果的可靠性。The vacuum degree detection device provided by the present application obtains a voltage difference signal by performing peak detection processing on the first voltage signal and the second voltage signal, and performing differential processing on the first peak signal and the second peak signal after the peak detection processing. The voltage difference signal is calculated and processed to obtain the vacuum degree detection result, wherein the differential processing can reduce signal interference and improve the detection accuracy, thereby ensuring the reliability of the vacuum degree detection result.

第三方面,本申请提供了一种真空度检测系统,包括薄膜规真空计,所述薄膜规真空计包括金属膜片和同心设置的第一固定电极和第二固定电极,所述金属膜片和所述第一固定电极组成内环电容,所述金属膜片和所述第二固定电极组成外环电容,还包括:第一峰值检测电路、第二峰值检测电路、差分滤波电路、放大电路和MCU处理器;In a third aspect, the present application provides a vacuum degree detection system, comprising a thin-film gauge vacuum gauge, the thin-film gauge vacuum gauge comprising a metal diaphragm and concentrically arranged first and second fixed electrodes, the metal diaphragm and the first fixed electrode form an inner ring capacitor, the metal diaphragm and the second fixed electrode form an outer ring capacitor, and also include: a first peak detection circuit, a second peak detection circuit, a differential filter circuit, and an amplifier circuit and MCU processor;

所述第一峰值检测电路用于对所述内环电容产生的第一电压信号进行峰值检测处理,得到第一峰值信号,并把所述第一峰值信号输入至所述差分滤波电路;The first peak detection circuit is configured to perform peak detection processing on the first voltage signal generated by the inner loop capacitor to obtain a first peak signal, and input the first peak signal to the differential filter circuit;

所述第二峰值检测电路用于对所述外环电容产生的第二电压信号进行峰值检测处理,得到第二峰值信号,并把所述第二峰值信号输入至所述差分滤波电路;The second peak detection circuit is configured to perform peak detection processing on the second voltage signal generated by the outer ring capacitor to obtain a second peak signal, and input the second peak signal to the differential filter circuit;

所述差分滤波电路用于对所述第一峰值信号和所述第二峰值信号进行差分处理,得到电压差值信号,并把所述电压差值信号输入至所述放大电路;The differential filtering circuit is configured to perform differential processing on the first peak signal and the second peak signal to obtain a voltage difference signal, and input the voltage difference signal to the amplifying circuit;

所述放大电路用于对所述电压差值信号进行放大处理,并输入至所述MCU处理器;The amplifying circuit is used to amplify the voltage difference signal and input it to the MCU processor;

所述MCU处理器用于对所述电压差值信号进行计算处理,得到真空度检测结果。The MCU processor is used for calculating and processing the voltage difference signal to obtain a vacuum degree detection result.

本申请提供的真空度检测系统,通过第一峰值检测电路和第二峰值检测电路分别对第一电压信号和第二电压信号进行峰值检测处理,处理后的信号输入差分滤波电路进行差分处理及滤波,得到电压差值信号,放大电路对电压差值信号进行放大后输出至MCU处理器进行计算处理,从而得到真空度检测结果。In the vacuum detection system provided by the present application, the first peak detection circuit and the second peak detection circuit respectively perform peak detection processing on the first voltage signal and the second voltage signal, and the processed signals are input to the differential filtering circuit for differential processing and filtering. , to obtain the voltage difference signal, the amplifying circuit amplifies the voltage difference signal and outputs it to the MCU processor for calculation processing, thereby obtaining the vacuum degree detection result.

第四方面,本申请提供了一种电子设备,包括处理器和存储器,所述存储器存储有所述处理器可执行的计算机程序,所述处理器执行所述计算机程序时,运行如前文所述真空度检测方法中的步骤。In a fourth aspect, the present application provides an electronic device, including a processor and a memory, where the memory stores a computer program executable by the processor, and when the processor executes the computer program, the operation is as described above The steps in the vacuum detection method.

第五方面,本申请提供了一种计算机存储介质,其上存储有计算机程序,所述计算机程序被处理器执行时运行如前文所述真空度检测方法中的步骤。In a fifth aspect, the present application provides a computer storage medium on which a computer program is stored, and when the computer program is executed by a processor, executes the steps in the above-described vacuum degree detection method.

有益效果:Beneficial effects:

本申请提供的真空度检测方法、装置、电子设备、存储介质及系统,通过获取内环电容产生的第一电压信号和外环电容产生的第二电压信号;分别对所述第一电压信号和所述第二电压信号进行峰值检测处理,得到第一峰值信号和第二峰值信号;对所述第一峰值信号和所述第二峰值信号进行差分处理,得到电压差值信号;对所述电压差值信号进行计算处理,得到真空度检测结果,其中,差分处理可以减少信号干扰,提高检测精度,从而保证真空度检测结果的可靠性。The vacuum degree detection method, device, electronic device, storage medium and system provided by the present application obtain the first voltage signal generated by the inner ring capacitance and the second voltage signal generated by the outer ring capacitance; performing peak detection processing on the second voltage signal to obtain a first peak signal and a second peak signal; performing differential processing on the first peak signal and the second peak signal to obtain a voltage difference signal; The difference signal is calculated and processed to obtain a vacuum degree detection result, wherein the differential processing can reduce signal interference and improve detection accuracy, thereby ensuring the reliability of the vacuum degree detection result.

本申请的其他特征和优点将在随后的说明书阐述,并且,部分地从说明书中变得显而易见,或者通过实施本申请了解。Other features and advantages of the present application will be set forth in the description that follows, and, in part, will be apparent from the description, or learned by practice of the present application.

附图说明Description of drawings

图1为本申请提供的真空度检测方法的流程图。FIG. 1 is a flowchart of a vacuum degree detection method provided by the present application.

图2为本申请提供的真空度检测装置的结构示意图。FIG. 2 is a schematic structural diagram of a vacuum degree detection device provided by the present application.

图3为本申请提供的电子设备的结构示意图。FIG. 3 is a schematic structural diagram of an electronic device provided by the present application.

图4为本申请提供的真空度检测系统的结构示意图。FIG. 4 is a schematic structural diagram of a vacuum degree detection system provided by the present application.

图5为薄膜规真空计的真空度检测的测试结果的示意图。FIG. 5 is a schematic diagram of the test result of the vacuum degree detection of the film gauge vacuum gauge.

图6为薄膜规真空计的真空度检测的测试结果的线性示意图。FIG. 6 is a linear schematic diagram of the test result of the vacuum degree detection of the film gauge vacuum gauge.

标号说明:1、第一获取模块;2、检测模块;3、第一计算模块;4、第二计算模块;301、处理器;302、存储器;303、通信总线;401、第一峰值检测电路;402、第二峰值检测电路;403、差分滤波电路;404、放大电路;405、MCU处理器。Numeral description: 1, first acquisition module; 2, detection module; 3, first calculation module; 4, second calculation module; 301, processor; 302, memory; 303, communication bus; 401, first peak detection circuit 402, a second peak detection circuit; 403, a differential filter circuit; 404, an amplifier circuit; 405, an MCU processor.

具体实施方式Detailed ways

下面将结合本申请实施例中附图,对本申请实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本申请一部分实施例,而不是全部的实施例。通常在此处附图中描述和示出的本申请实施例的组件可以以各种不同的配置来布置和设计。因此,以下对在附图中提供的本申请的实施例的详细描述并非旨在限制要求保护的本申请的范围,而是仅仅表示本申请的选定实施例。基于本申请的实施例,本领域技术人员在没有做出创造性劳动的前提下所获得的所有其他实施例,都属于本申请保护的范围。The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application generally described and illustrated in the drawings herein may be arranged and designed in a variety of different configurations. Thus, the following detailed description of the embodiments of the application provided in the accompanying drawings is not intended to limit the scope of the application as claimed, but is merely representative of selected embodiments of the application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application.

应注意到:相似的标号和字母在下面的附图中表示类似项,因此,一旦某一项在一个附图中被定义,则在随后的附图中不需要对其进行进一步定义和解释。同时,在本申请的描述中,术语“第一”、“第二”等仅用于区分描述,而不能理解为指示或暗示相对重要性。It should be noted that like numerals and letters refer to like items in the following figures, so once an item is defined in one figure, it does not require further definition and explanation in subsequent figures. Meanwhile, in the description of the present application, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

请参照图1,图1是本申请提供了一种真空度检测方法,用于对薄膜规真空计的检测信号进行处理,薄膜规真空计包括金属膜片和同心设置的第一固定电极和第二固定电极,金属膜片和第一固定电极组成内环电容,金属膜片和第二固定电极组成外环电容,真空度检测方法包括步骤:Please refer to FIG. 1. FIG. 1 is a vacuum detection method provided by the present application for processing the detection signal of a thin-film gauge vacuum gauge. The thin-film gauge vacuum gauge includes a metal diaphragm and a concentrically arranged first fixed electrode and a second fixed electrode. Two fixed electrodes, the metal diaphragm and the first fixed electrode form an inner ring capacitor, the metal diaphragm and the second fixed electrode form an outer ring capacitor, and the vacuum degree detection method includes the steps:

A1.获取内环电容产生的第一电压信号和外环电容产生的第二电压信号;A1. Obtain the first voltage signal generated by the inner ring capacitance and the second voltage signal generated by the outer ring capacitance;

A2.分别对第一电压信号和第二电压信号进行峰值检测处理,得到第一峰值信号和第二峰值信号;A2. Perform peak detection processing on the first voltage signal and the second voltage signal respectively to obtain the first peak signal and the second peak signal;

A3.对第一峰值信号和第二峰值信号进行差分处理,得到电压差值信号;A3. Perform differential processing on the first peak signal and the second peak signal to obtain a voltage difference signal;

A4.对电压差值信号进行计算处理,得到真空度检测结果。A4. Calculate and process the voltage difference signal to obtain the detection result of vacuum degree.

具体地,通过获取内环电容产生的第一电压信号和外环电容产生的第二电压信号,分别对第一电压信号和第二电压信号进行峰值检测,得到第一峰值信号和第二峰值信号;对第一峰值信号和第二峰值信号进行差分处理,得到电压差值信号,采用差分处理,可以有效消除共模信号的干扰,减少信号的干扰,提高检测结果的精确度和可靠性;对电压差值信号进行计算处理,即可获得真空度检测结果,从而保证真空度检测结果的可靠性。Specifically, by acquiring the first voltage signal generated by the inner ring capacitance and the second voltage signal generated by the outer ring capacitance, peak detection is performed on the first voltage signal and the second voltage signal, respectively, to obtain the first peak signal and the second peak signal. ; Perform differential processing on the first peak signal and the second peak signal to obtain a voltage difference signal. Using differential processing can effectively eliminate the interference of the common mode signal, reduce the interference of the signal, and improve the accuracy and reliability of the detection result; The voltage difference signal is calculated and processed to obtain the vacuum degree detection result, thereby ensuring the reliability of the vacuum degree detection result.

在一些实施例中,步骤A2包括:In some embodiments, step A2 includes:

获取上一时刻的第一峰值信号输出值和当前时刻的第一电压信号测量值;Obtain the first peak signal output value at the previous moment and the first voltage signal measurement value at the current moment;

若当前时刻的第一电压信号测量值大于上一时刻的第一峰值信号输出值,则使当前时刻的第一峰值信号输出值等于当前时刻的第一电压信号测量值;If the first voltage signal measurement value at the current moment is greater than the first peak signal output value at the previous moment, the first peak signal output value at the current moment is made equal to the first voltage signal measurement value at the current moment;

若当前时刻的第一电压信号测量值不大于上一时刻的第一峰值信号输出值,则使当前时刻的第一峰值信号输出值等于上一时刻的第一峰值信号输出值;If the measured value of the first voltage signal at the current moment is not greater than the first peak signal output value at the previous moment, make the first peak signal output value at the current moment equal to the first peak signal output value at the previous moment;

获取上一时刻的第二峰值信号输出值和当前时刻的第二电压信号测量值;Obtain the second peak signal output value at the previous moment and the second voltage signal measurement value at the current moment;

若当前时刻的第二电压信号测量值大于上一时刻的第二峰值信号输出值,则使当前时刻的第二峰值信号输出值等于当前时刻的第二电压信号测量值;If the second voltage signal measurement value at the current moment is greater than the second peak signal output value at the previous moment, the second peak signal output value at the current moment is made equal to the second voltage signal measurement value at the current moment;

若当前时刻的第二电压信号测量值不大于上一时刻的第二峰值信号输出值,则使当前时刻的第二峰值信号输出值等于上一时刻的第二峰值信号输出值。If the second voltage signal measurement value at the current moment is not greater than the second peak signal output value at the previous moment, the second peak signal output value at the current moment is made equal to the second peak signal output value at the previous moment.

具体地,将当前时刻的第一电压信号测量值与上一时刻的第一峰值信号输出值进行比较,若当前时刻的第一电压信号测量值大于上一时刻的第一峰值信号输出值,则使当前时刻的第一峰值信号输出值等于当前时刻的第一电压信号测量值;若当前时刻的第一电压信号测量值不大于上一时刻的第一峰值信号输出值,则使当前时刻的第一峰值信号输出值等于上一时刻的第一峰值信号输出值;第二电压信号的峰值检测处理的原理同上,此处不再详述。从而使第一峰值信号或第二峰值信号的输出值始终跟随更大的峰值信号,若检测到没有更大的峰值信号出现则保持为上一时刻的峰值信的输出值。Specifically, the first voltage signal measurement value at the current moment is compared with the first peak signal output value at the previous moment. If the first voltage signal measurement value at the current moment is greater than the first peak signal output value at the previous moment, then Make the first peak signal output value at the current moment equal to the first voltage signal measurement value at the current moment; if the first voltage signal measurement value at the current moment is not greater than the first peak signal output value at the previous moment, make the first peak signal output value at the current moment The output value of a peak signal is equal to the output value of the first peak signal at the previous moment; the principle of the peak detection processing of the second voltage signal is the same as above, and will not be described in detail here. Therefore, the output value of the first peak signal or the second peak signal always follows the larger peak signal, and if no larger peak signal is detected, the output value of the previous peak signal is maintained.

在一些实施例中,步骤A3之后和步骤A4之前,还包括步骤:In some embodiments, after step A3 and before step A4, it also includes steps:

A5.对电压差值信号进行滤波处理。A5. Filter the voltage difference signal.

具体地,对电压差值信号进行滤波处理,减少信号的干扰,提高检测结果的可靠性。可采用现有的滤波处理方法进行滤波处理,此处不对其进行限定。Specifically, filtering processing is performed on the voltage difference signal to reduce the interference of the signal and improve the reliability of the detection result. The filtering processing can be performed by using an existing filtering processing method, which is not limited here.

在一些实施例中,步骤A3之后和步骤A4之前,还包括步骤:In some embodiments, after step A3 and before step A4, it also includes steps:

A6.对电压差值信号进行放大处理。A6. Amplify the voltage difference signal.

具体地,通过对电压差值信号进行放大处理,有利于减少噪声,使检测结果更加稳定可靠,具体放大倍数根据实际需要设置,此处不作限定。Specifically, by amplifying the voltage difference signal, it is beneficial to reduce noise and make the detection result more stable and reliable. The specific amplification factor is set according to actual needs, which is not limited here.

在一些优选实施方式中,步骤A4包括:In some preferred embodiments, step A4 includes:

采用线性函数对放大处理后的电压差值信号进行计算,得到压力值。A linear function is used to calculate the amplified voltage difference signal to obtain the pressure value.

具体地,对放大处理后的电压差值信号进行线性函数计算处理,即可得到压力值;如图5所示,通过输入不同的压力,对比线性前电压差值信号的数据和线性后电压差值信号的数据,压力分别随两种电压差值信号变化的情况如图6所示,图中的纵坐标代表压力值,横坐标代表电压差值,灰色线(即图6中的A)代表压力随线性前电压差值信号数据的变化曲线,深灰色线(即图6中的B)代表压力随线性后电压差值信号数据的变化曲线,从图6中可以直观看出线性后电压差值信号的数据与压力之间的线性度更高,从而保证真空度检测结果的线性度更高更加可靠。Specifically, the pressure value can be obtained by performing linear function calculation processing on the amplified voltage difference signal; as shown in Figure 5, by inputting different pressures, compare the data of the voltage difference signal before linearity and the voltage difference after linearity The data of the value signal, the pressure changes with the two voltage difference signals, respectively, are shown in Figure 6. The ordinate in the figure represents the pressure value, the abscissa represents the voltage difference, and the gray line (ie, A in Figure 6) represents the The change curve of pressure with the voltage difference signal data before linearity. The dark gray line (ie, B in Figure 6) represents the change curve of pressure with the voltage difference signal data after linearity. It can be seen intuitively from Figure 6 that the voltage difference after linearity The linearity between the data of the value signal and the pressure is higher, so as to ensure that the linearity of the vacuum detection result is higher and more reliable.

在一些实施方式中,线性函数为:

Figure 425638DEST_PATH_IMAGE001
; In some embodiments, the linear function is:
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;

式中,

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是压力值;
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是预设值;
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是放大处理后的电压差值信号;
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是预设值。 In the formula,
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is the pressure value;
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is the default value;
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is the amplified voltage difference signal;
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is the default value.

由上可知,本申请提供的真空度检测方法,通过获取内环电容产生的第一电压信号和外环电容产生的第二电压信号;分别对第一电压信号和第二电压信号进行峰值检测处理,得到第一峰值信号和第二峰值信号;对第一峰值信号和第二峰值信号进行差分处理,得到电压差值信号;对电压差值信号进行计算处理,得到真空度检测结果,其中,差分处理可以减少信号干扰,提高检测精度,从而保证真空度检测结果的可靠性。As can be seen from the above, the vacuum degree detection method provided by the present application obtains the first voltage signal generated by the inner ring capacitance and the second voltage signal generated by the outer ring capacitance; respectively, performs peak detection processing on the first voltage signal and the second voltage signal. , obtain the first peak signal and the second peak signal; perform differential processing on the first peak signal and the second peak signal to obtain a voltage difference signal; perform calculation processing on the voltage difference signal to obtain a vacuum degree detection result, wherein the differential Processing can reduce signal interference and improve detection accuracy, thereby ensuring the reliability of vacuum detection results.

请参考图2,本申请提供了一种真空度检测装置,用于对薄膜规真空计的检测信号进行处理,薄膜规真空计包括金属膜片和同心设置的第一固定电极和第二固定电极,金属膜片和第一固定电极组成内环电容,金属膜片和第二固定电极组成外环电容,包括:Please refer to FIG. 2 , the present application provides a vacuum detection device for processing the detection signal of a thin-film gauge vacuum gauge. The thin-film gauge vacuum gauge includes a metal diaphragm and concentrically arranged first and second fixed electrodes. , the metal diaphragm and the first fixed electrode form an inner ring capacitor, and the metal diaphragm and the second fixed electrode form an outer ring capacitor, including:

第一获取模块1,用于获取内环电容产生的第一电压信号和外环电容产生的第二电压信号;The first acquisition module 1 is used to acquire the first voltage signal generated by the inner ring capacitance and the second voltage signal generated by the outer ring capacitance;

检测模块2,用于分别对第一电压信号和第二电压信号进行峰值检测处理,得到第一峰值信号和第二峰值信号;A detection module 2, configured to perform peak detection processing on the first voltage signal and the second voltage signal respectively, to obtain the first peak signal and the second peak signal;

第一计算模块3,用于对第一峰值信号和第二峰值信号进行差分处理,得到电压差值信号;The first calculation module 3 is configured to perform differential processing on the first peak signal and the second peak signal to obtain a voltage difference signal;

第二计算模块4,用于对电压差值信号进行计算处理,得到真空度检测结果。The second calculation module 4 is used for calculating and processing the voltage difference signal to obtain a vacuum degree detection result.

本申请提供的真空度检测装置,通过获取内环电容产生的第一电压信号和外环电容产生的第二电压信号,分别对第一电压信号和第二电压信号进行峰值检测,得到第一峰值信号和第二峰值信号;对第一峰值信号和第二峰值信号进行差分处理,得到电压差值信号,采用差分处理,可以有效消除共模信号的干扰,减少信号的干扰,提高检测结果的精确度和可靠性;对电压差值信号进行计算处理,即可获得真空度检测结果,从而保证真空度检测结果的可靠性。The vacuum degree detection device provided by the present application performs peak detection on the first voltage signal and the second voltage signal by acquiring the first voltage signal generated by the inner ring capacitance and the second voltage signal generated by the outer ring capacitance to obtain the first peak value. signal and the second peak signal; differential processing is performed on the first peak signal and the second peak signal to obtain a voltage difference signal. The differential processing can effectively eliminate the interference of the common mode signal, reduce the interference of the signal, and improve the accuracy of the detection result. The vacuum degree detection result can be obtained by calculating and processing the voltage difference signal, thereby ensuring the reliability of the vacuum degree detection result.

在一些实施例中,检测模块2用于分别对第一电压信号和第二电压信号进行峰值检测处理,得到第一峰值信号和第二峰值信号的时候,具体执行:In some embodiments, the detection module 2 is configured to perform peak detection processing on the first voltage signal and the second voltage signal respectively, and when the first peak signal and the second peak signal are obtained, specifically execute:

获取上一时刻的第一峰值信号输出值和当前时刻的第一电压信号测量值;Obtain the first peak signal output value at the previous moment and the first voltage signal measurement value at the current moment;

若当前时刻的第一电压信号测量值大于上一时刻的第一峰值信号输出值,则使当前时刻的第一峰值信号输出值等于当前时刻的第一电压信号测量值;If the first voltage signal measurement value at the current moment is greater than the first peak signal output value at the previous moment, the first peak signal output value at the current moment is made equal to the first voltage signal measurement value at the current moment;

若当前时刻的第一电压信号测量值不大于上一时刻的第一峰值信号输出值,则使当前时刻的第一峰值信号输出值等于上一时刻的第一峰值信号输出值;If the measured value of the first voltage signal at the current moment is not greater than the first peak signal output value at the previous moment, make the first peak signal output value at the current moment equal to the first peak signal output value at the previous moment;

获取上一时刻的第二峰值信号输出值和当前时刻的第二电压信号测量值;Obtain the second peak signal output value at the previous moment and the second voltage signal measurement value at the current moment;

若当前时刻的第二电压信号测量值大于上一时刻的第二峰值信号输出值,则使当前时刻的第二峰值信号输出值等于当前时刻的第二电压信号测量值;If the second voltage signal measurement value at the current moment is greater than the second peak signal output value at the previous moment, the second peak signal output value at the current moment is made equal to the second voltage signal measurement value at the current moment;

若当前时刻的第二电压信号测量值不大于上一时刻的第二峰值信号输出值,则使当前时刻的第二峰值信号输出值等于上一时刻的第二峰值信号输出值。If the second voltage signal measurement value at the current moment is not greater than the second peak signal output value at the previous moment, the second peak signal output value at the current moment is made equal to the second peak signal output value at the previous moment.

具体地,将当前时刻的第一电压信号测量值与上一时刻的第一峰值信号输出值进行比较,若当前时刻的第一电压信号测量值大于上一时刻的第一峰值信号输出值,则使当前时刻的第一峰值信号输出值等于当前时刻的第一电压信号测量值;若当前时刻的第一电压信号测量值不大于上一时刻的第一峰值信号输出值,则使当前时刻的第一峰值信号输出值等于上一时刻的第一峰值信号输出值;第二电压信号的峰值检测处理的原理同上,此处不再详述。从而使第一峰值信号或第二峰值信号的输出值始终跟随更大的峰值信号,若检测到没有更大的峰值信号出现则保持为上一时刻的峰值信的输出值。Specifically, the first voltage signal measurement value at the current moment is compared with the first peak signal output value at the previous moment. If the first voltage signal measurement value at the current moment is greater than the first peak signal output value at the previous moment, then Make the first peak signal output value at the current moment equal to the first voltage signal measurement value at the current moment; if the first voltage signal measurement value at the current moment is not greater than the first peak signal output value at the previous moment, make the first peak signal output value at the current moment The output value of a peak signal is equal to the output value of the first peak signal at the previous moment; the principle of the peak detection processing of the second voltage signal is the same as above, and will not be described in detail here. Therefore, the output value of the first peak signal or the second peak signal always follows the larger peak signal, and if no larger peak signal is detected, the output value of the previous peak signal is maintained.

在一些实施例中,真空度检测装置还包括第一处理模块,第一处理模块在第一计算模块3执行对第一峰值信号和第二峰值信号进行差分处理,得到电压差值信号之后并且在第二计算模块4执行对电压差值信号进行计算处理,得到真空度检测结果之前的时候,具体执行:In some embodiments, the vacuum degree detection device further includes a first processing module, the first processing module performs differential processing on the first peak signal and the second peak signal after the first calculation module 3 to obtain the voltage difference signal and after The second calculation module 4 performs calculation processing on the voltage difference signal, and before obtaining the vacuum degree detection result, specifically executes:

A5.对电压差值信号进行滤波处理。A5. Filter the voltage difference signal.

具体地,对电压差值信号进行滤波处理,减少信号的干扰,提高检测结果的可靠性。Specifically, filtering processing is performed on the voltage difference signal to reduce the interference of the signal and improve the reliability of the detection result.

在另一些实施例中,真空度检测装置还包括第二处理模块,第二处理模块在第一计算模块3执行对第一峰值信号和第二峰值信号进行差分处理,得到电压差值信号之后并且在第二计算模块4执行对电压差值信号进行计算处理,得到真空度检测结果之前的时候,具体执行:In other embodiments, the vacuum degree detection device further includes a second processing module, after the first calculation module 3 performs differential processing on the first peak signal and the second peak signal to obtain a voltage difference signal, and When the second calculation module 4 performs calculation processing on the voltage difference signal and obtains the vacuum degree detection result, it specifically executes:

A6.对电压差值信号进行放大处理。A6. Amplify the voltage difference signal.

具体地,通过对电压差值信号进行放大处理,有利于减少噪声,使检测结果更加稳定可靠,具体放大倍数根据实际需要设置,此处不作限定。Specifically, by amplifying the voltage difference signal, it is beneficial to reduce noise and make the detection result more stable and reliable. The specific amplification factor is set according to actual needs, which is not limited here.

在一些优选实施方式中,第二计算模块4在用于对电压差值信号进行计算处理,得到真空度检测结果的时候,具体执行:In some preferred embodiments, when the second calculation module 4 is used to calculate and process the voltage difference signal to obtain the vacuum degree detection result, it specifically executes:

采用线性函数对放大处理后的电压差值信号进行计算,得到真空度检测结果。A linear function is used to calculate the amplified voltage difference signal to obtain the detection result of vacuum degree.

具体地,对放大处理后的电压差值信号进行线性函数计算处理,即可得到真空度检测结果;如图5所示,通过输入不同的压力,对比线性前电压差值信号的数据和线性后电压差值信号的数据,压力分别随两种电压差值信号变化的情况如图6所示,图中的纵坐标代表压力值,横坐标代表电压差值,灰色线(即图6中的A)代表压力随线性前电压差值信号数据的变化曲线,深灰色线(即图6中的B)代表压力随线性后电压差值信号数据的变化曲线,从图6中可以直观看出线性后电压差值信号的数据与压力之间的线性度更高,从而保证真空度检测结果的线性度更高更加可靠。Specifically, a linear function calculation process is performed on the amplified voltage difference signal to obtain the vacuum degree detection result; as shown in Figure 5, by inputting different pressures, compare the data of the voltage difference signal before linearity and the linearity after The data of the voltage difference signal, the pressure changes with the two voltage difference signals respectively are shown in Figure 6, the ordinate in the figure represents the pressure value, the abscissa represents the voltage difference, the gray line (that is, A in Figure 6) ) represents the change curve of pressure with the voltage difference signal data before linearity, and the dark gray line (ie, B in Figure 6) represents the change curve of pressure with the voltage difference signal data after linearity. The linearity between the data of the voltage difference signal and the pressure is higher, so as to ensure that the linearity of the vacuum degree detection result is higher and more reliable.

在一些实施方式中,线性函数为:

Figure 272240DEST_PATH_IMAGE001
; In some embodiments, the linear function is:
Figure 272240DEST_PATH_IMAGE001
;

式中,

Figure 656954DEST_PATH_IMAGE002
是压力值;
Figure 407872DEST_PATH_IMAGE003
是预设值;
Figure 437008DEST_PATH_IMAGE004
是放大处理后的电压差值信号;
Figure 127097DEST_PATH_IMAGE005
是预设值。 In the formula,
Figure 656954DEST_PATH_IMAGE002
is the pressure value;
Figure 407872DEST_PATH_IMAGE003
is the default value;
Figure 437008DEST_PATH_IMAGE004
is the amplified voltage difference signal;
Figure 127097DEST_PATH_IMAGE005
is the default value.

请参照图4,图4为本申请提供的一种真空度检测系统,包括薄膜规真空计,薄膜规真空计包括金属膜片和同心设置的第一固定电极和第二固定电极,金属膜片和第一固定电极组成内环电容,金属膜片和第二固定电极组成外环电容,还包括:第一峰值检测电路401、第二峰值检测电路402、差分滤波电路403、放大电路404、MCU处理器405;Please refer to FIG. 4 . FIG. 4 is a vacuum detection system provided by the application, including a thin-film gauge vacuum gauge. The thin-film gauge vacuum gauge includes a metal diaphragm and concentrically arranged first and second fixed electrodes. The metal diaphragm and the first fixed electrode form an inner ring capacitor, the metal diaphragm and the second fixed electrode form an outer ring capacitor, and also include: a first peak detection circuit 401, a second peak detection circuit 402, a differential filter circuit 403, an amplifier circuit 404, MCU processor 405;

第一峰值检测电路401用于对内环电容产生的第一电压信号进行峰值检测处理,得到第一峰值信号,并把第一峰值信号输入至差分滤波电路403(具体过程参考前文的步骤A2);The first peak detection circuit 401 is used to perform peak detection processing on the first voltage signal generated by the inner loop capacitance to obtain the first peak signal, and input the first peak signal to the differential filter circuit 403 (refer to step A2 above for the specific process) ;

第二峰值检测电路402用于对外环电容产生的第二电压信号进行峰值检测处理,得到第二峰值信号,并把第二峰值信号输入至差分滤波电路403(具体过程参考前文的步骤A2);The second peak detection circuit 402 is used to perform peak detection processing on the second voltage signal generated by the outer loop capacitor to obtain a second peak signal, and input the second peak signal to the differential filter circuit 403 (refer to step A2 above for the specific process);

差分滤波电路403用于对第一峰值信号和第二峰值信号进行差分处理,得到电压差值信号,并把电压差值信号输入至放大电路404;The differential filter circuit 403 is used to perform differential processing on the first peak signal and the second peak signal to obtain a voltage difference signal, and input the voltage difference signal to the amplifying circuit 404;

放大电路404用于对电压差值信号进行放大处理,并输入至MCU处理器405;The amplifying circuit 404 is used to amplify the voltage difference signal and input it to the MCU processor 405;

MCU处理器405用于对电压差值信号进行计算处理,得到真空度检测结果(具体过程参考前文的步骤A4)。The MCU processor 405 is used to calculate and process the voltage difference signal to obtain a vacuum degree detection result (refer to step A4 above for the specific process).

在一些实施方式中,差分滤波电路403还用于对电压差值信号进行滤波处理(具体过程参考前文的步骤A5),在滤波处理后再把滤波后的电压差值信号输入至放大电路404。In some embodiments, the differential filtering circuit 403 is further configured to perform filtering processing on the voltage difference signal (refer to step A5 above for the specific process), and then input the filtered voltage difference signal to the amplifying circuit 404 after the filtering processing.

本申请提供的真空度检测系统,薄膜规真空计的内环电容产生的第一电压信号(图4中的激励C1)和外环电容产生的第二电压信号(图4中的激励C2)分别通过第一峰值检测电路401和第二峰值检测电路402分别对第一电压信号和第二电压信号进行峰值检测处理,处理后的信号分别输入差分滤波电路403进行差分处理及滤波,得到电压差值信号,放大电路404对电压差值信号进行放大后输出至MCU处理器405进行计算处理,从而得到真空度检测结果。In the vacuum detection system provided by this application, the first voltage signal (excitation C1 in Figure 4) generated by the inner ring capacitance of the film gauge vacuum gauge and the second voltage signal (excitation C2 in Figure 4) generated by the outer ring capacitance are respectively The first peak detection circuit 401 and the second peak detection circuit 402 respectively perform peak detection processing on the first voltage signal and the second voltage signal, and the processed signals are respectively input to the differential filtering circuit 403 for differential processing and filtering to obtain the voltage difference value. The amplifying circuit 404 amplifies the voltage difference signal and outputs it to the MCU processor 405 for calculation processing, thereby obtaining the vacuum degree detection result.

请参照图3,图3为本申请实施例提供的一种电子设备的结构示意图,本申请提供一种电子设备,包括:处理器301和存储器302,处理器301和存储器302通过通信总线303和/或其他形式的连接机构(未标出)互连并相互通讯,存储器302存储有处理器301可执行的计算机程序,当电子设备运行时,处理器301执行该计算机程序,以执行上述实施例的任一可选的实现方式中的真空度检测方法,以实现以下功能:获取内环电容产生的第一电压信号和外环电容产生的第二电压信号;分别对第一电压信号和第二电压信号进行峰值检测处理,得到第一峰值信号和第二峰值信号;对第一峰值信号和第二峰值信号进行差分处理,得到电压差值信号;对电压差值信号进行计算处理,得到真空度检测结果。Please refer to FIG. 3. FIG. 3 is a schematic structural diagram of an electronic device provided by an embodiment of the present application. The present application provides an electronic device, including: a processor 301 and a memory 302. The processor 301 and the memory 302 pass through the communication bus 303 and /or other forms of connection mechanisms (not shown) are interconnected and communicate with each other, and the memory 302 stores a computer program executable by the processor 301. When the electronic device is running, the processor 301 executes the computer program to execute the above embodiments. The vacuum degree detection method in any optional implementation manner of the invention can realize the following functions: obtain the first voltage signal generated by the inner ring capacitance and the second voltage signal generated by the outer ring capacitance; Perform peak detection processing on the voltage signal to obtain a first peak signal and a second peak signal; perform differential processing on the first peak signal and the second peak signal to obtain a voltage difference signal; perform calculation processing on the voltage difference signal to obtain the degree of vacuum Test results.

本申请实施例提供一种计算机存储介质,其上存储有计算机程序,计算机程序被处理器执行时,执行上述实施例的任一可选的实现方式中的真空度检测方法,以实现以下功能:获取内环电容产生的第一电压信号和外环电容产生的第二电压信号;分别对第一电压信号和第二电压信号进行峰值检测处理,得到第一峰值信号和第二峰值信号;对第一峰值信号和第二峰值信号进行差分处理,得到电压差值信号;对电压差值信号进行计算处理,得到真空度检测结果。其中,存储介质可以由任何类型的易失性或非易失性存储设备或者它们的组合实现,如静态随机存取存储器(Static Random Access Memory, 简称SRAM),电可擦除可编程只读存储器(Electrically Erasable Programmable Read-Only Memory,简称EEPROM),可擦除可编程只读存储器(Erasable Programmable Read Only Memory, 简称EPROM),可编程只读存储器(Programmable Red-Only Memory, 简称PROM),只读存储器(Read-Only Memory, 简称ROM),磁存储器,快闪存储器,磁盘或光盘。The embodiment of the present application provides a computer storage medium on which a computer program is stored. When the computer program is executed by a processor, the vacuum degree detection method in any optional implementation manner of the foregoing embodiment is executed, so as to realize the following functions: Obtain the first voltage signal generated by the inner ring capacitance and the second voltage signal generated by the outer ring capacitance; respectively perform peak detection processing on the first voltage signal and the second voltage signal to obtain the first peak signal and the second peak signal; The first peak signal and the second peak signal are differentially processed to obtain a voltage difference signal; the voltage difference signal is calculated and processed to obtain a vacuum degree detection result. Among them, the storage medium can be realized by any type of volatile or non-volatile storage device or their combination, such as Static Random Access Memory (SRAM for short), Electrically Erasable Programmable Read-Only Memory (Electrically Erasable Programmable Read-Only Memory, EEPROM for short), Erasable Programmable Read Only Memory (EPROM), Programmable Red-Only Memory (PROM), Read-Only Memory (Read-Only Memory, referred to as ROM), magnetic memory, flash memory, magnetic disk or optical disk.

在本申请所提供的实施例中,应该理解到,所揭露装置和方法,可以通过其它的方式实现。以上所描述的装置实施例仅仅是示意性的,例如,单元的划分,仅仅为一种逻辑功能划分,实际实现时可以有另外的划分方式,又例如,多个单元或组件可以结合或者可以集成到另一个系统,或一些特征可以忽略,或不执行。另一点,所显示或讨论的相互之间的耦合或直接耦合或通信连接可以是通过一些通信接口,装置或单元的间接耦合或通信连接,可以是电性,机械或其它的形式。In the embodiments provided in this application, it should be understood that the disclosed apparatus and method may be implemented in other manners. The apparatus embodiments described above are only illustrative. For example, the division of units is only a logical function division. In actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated. to another system, or some features can be ignored, or not implemented. On the other hand, the shown or discussed mutual coupling or direct coupling or communication connection may be through some communication interfaces, indirect coupling or communication connection of devices or units, which may be in electrical, mechanical or other forms.

另外,作为分离部件说明的单元可以是或者也可以不是物理上分开的,作为单元显示的部件可以是或者也可以不是物理单元,即可以位于一个地方,或者也可以分布到多个网络单元上。可以根据实际的需要选择其中的部分或者全部单元来实现本实施例方案的目的。In addition, units described as separate components may or may not be physically separated, and components shown as units may or may not be physical units, that is, may be located in one place, or may be distributed to multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution in this embodiment.

再者,在本申请各个实施例中的各功能模块可以集成在一起形成一个独立的部分,也可以是各个模块单独存在,也可以两个或两个以上模块集成形成一个独立的部分。Furthermore, each functional module in each embodiment of the present application may be integrated together to form an independent part, or each module may exist independently, or two or more modules may be integrated to form an independent part.

在本文中,诸如第一和第二等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来,而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。In this document, relational terms such as first and second, etc. are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such existence between these entities or operations. The actual relationship or sequence.

以上仅为本申请的实施例而已,并不用于限制本申请的保护范围,对于本领域的技术人员来说,本申请可以有各种更改和变化。凡在本申请的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本申请的保护范围之内。The above are only examples of the present application, and are not intended to limit the protection scope of the present application. For those skilled in the art, the present application may have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of this application shall be included within the protection scope of this application.

Claims (10)

1. A vacuum degree detection method is used for processing detection signals of a film gauge vacuum gauge, the film gauge vacuum gauge comprises a metal diaphragm, a first fixed electrode and a second fixed electrode which are concentrically arranged, the metal diaphragm and the first fixed electrode form an inner ring capacitor, and the metal diaphragm and the second fixed electrode form an outer ring capacitor, and is characterized by comprising the following steps:
A1. acquiring a first voltage signal generated by an inner ring capacitor and a second voltage signal generated by an outer ring capacitor;
A2. respectively carrying out peak detection processing on the first voltage signal and the second voltage signal to obtain a first peak signal and a second peak signal;
A3. carrying out differential processing on the first peak value signal and the second peak value signal to obtain a voltage difference value signal;
A4. and calculating the voltage difference signal to obtain a vacuum degree detection result.
2. The vacuum degree detection method according to claim 1, wherein the step a2 includes:
acquiring a first peak signal output value at the previous moment and a first voltage signal measured value at the current moment;
if the first voltage signal measured value at the current moment is greater than the first peak signal output value at the previous moment, enabling the first peak signal output value at the current moment to be equal to the first voltage signal measured value at the current moment;
if the measured value of the first voltage signal at the current moment is not greater than the output value of the first peak signal at the previous moment, enabling the output value of the first peak signal at the current moment to be equal to the output value of the first peak signal at the previous moment;
acquiring a second peak signal output value at the previous moment and a second voltage signal measured value at the current moment;
if the second voltage signal measured value at the current moment is greater than the second peak signal output value at the previous moment, enabling the second peak signal output value at the current moment to be equal to the second voltage signal measured value at the current moment;
and if the measured value of the second voltage signal at the current moment is not greater than the output value of the second peak signal at the previous moment, enabling the output value of the second peak signal at the current moment to be equal to the output value of the second peak signal at the previous moment.
3. The vacuum level detection method of claim 1, further comprising, after step A3 and before step a4, the steps of:
A5. and carrying out filtering processing on the voltage difference signal.
4. The vacuum level detection method of claim 1, further comprising, after step A3 and before step a4, the steps of:
A6. and amplifying the voltage difference signal.
5. The vacuum degree detection method according to claim 4, wherein the step A4 includes:
and calculating the amplified voltage difference signal by adopting a linear function to obtain a vacuum degree detection result.
6. The vacuum level detection method of claim 5, wherein the linear function is:
Figure DEST_PATH_IMAGE002
;
in the formula (I), the compound is shown in the specification,
Figure DEST_PATH_IMAGE004
is a pressure value;
Figure DEST_PATH_IMAGE006
is toSetting a value;
Figure DEST_PATH_IMAGE008
is the amplified voltage difference signal;
Figure DEST_PATH_IMAGE010
is a preset value.
7. The utility model provides a vacuum detection device for handle the detected signal of film gauge vacuum gauge, the film gauge vacuum gauge includes metal diaphragm and concentric first fixed electrode and the second fixed electrode that sets up, the metal diaphragm with inner loop electric capacity is constituteed to first fixed electrode, the metal diaphragm with outer loop electric capacity is constituteed to the second fixed electrode, its characterized in that includes:
the first acquisition module is used for acquiring a first voltage signal generated by the inner ring capacitor and a second voltage signal generated by the outer ring capacitor;
the detection module is used for respectively carrying out peak value detection processing on the first voltage signal and the second voltage signal to obtain a first peak value signal and a second peak value signal;
the first calculation module is used for carrying out differential processing on the first peak value signal and the second peak value signal to obtain a voltage difference value signal;
and the second calculation module is used for calculating the voltage difference value signal to obtain a vacuum degree detection result.
8. The utility model provides a vacuum degree detecting system, includes the film gauge vacuum gauge, the film gauge vacuum gauge includes metal diaphragm and concentric first fixed electrode and the second fixed electrode that sets up, the metal diaphragm with inner loop electric capacity is constituteed to first fixed electrode, the metal diaphragm with outer loop electric capacity is constituteed to the second fixed electrode, its characterized in that still includes: the device comprises a first peak value detection circuit, a second peak value detection circuit, a differential filter circuit, an amplification circuit and an MCU (microprogrammed control unit) processor;
the first peak detection circuit is used for carrying out peak detection processing on a first voltage signal generated by the inner-loop capacitor to obtain a first peak signal, and inputting the first peak signal to the differential filter circuit;
the second peak detection circuit is used for carrying out peak detection processing on a second voltage signal generated by the outer loop capacitor to obtain a second peak signal, and inputting the second peak signal to the differential filter circuit;
the differential filter circuit is used for carrying out differential processing on the first peak value signal and the second peak value signal to obtain a voltage difference value signal, and inputting the voltage difference value signal to the amplifying circuit;
the amplifying circuit is used for amplifying the voltage difference signal and inputting the voltage difference signal to the MCU processor;
and the MCU processor is used for calculating the voltage difference value signal to obtain a vacuum degree detection result.
9. An electronic device comprising a processor and a memory, wherein the memory stores a computer program executable by the processor, and the processor executes the computer program to perform the steps of the vacuum level detection method according to any one of claims 1 to 6.
10. A computer storage medium having a computer program stored thereon, wherein the computer program, when executed by a processor, performs the steps of the vacuum level detection method according to any one of claims 1-6.
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