CN114659706A - Vacuum degree detection method, device, electronic equipment, storage medium and system - Google Patents
Vacuum degree detection method, device, electronic equipment, storage medium and system Download PDFInfo
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- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
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Abstract
The application belongs to the technical field of vacuum measurement and discloses a vacuum degree detection method, a vacuum degree detection device, electronic equipment, a storage medium and a vacuum degree detection system, wherein a first voltage signal generated by an inner ring capacitor and a second voltage signal generated by an outer ring capacitor are obtained; respectively carrying out peak detection processing on the first voltage signal and the second voltage signal to obtain a first peak signal and a second peak signal; carrying out differential processing on the first peak value signal and the second peak value signal to obtain a voltage difference value signal; and calculating the voltage difference signal to obtain a vacuum degree detection result, wherein the differential processing can reduce signal interference and improve detection precision, thereby ensuring the reliability of the vacuum degree detection result.
Description
Technical Field
The application relates to the technical field of vacuum measurement, in particular to a vacuum degree detection method, a vacuum degree detection device, electronic equipment, a storage medium and a vacuum degree detection system.
Background
The capacitance film vacuum gauge is a vacuum gauge for full pressure measurement, and has the characteristics of miniaturization, good stability, no relation between a measured value and gas components and the like.
In view of the above problems, no effective technical solution exists at present.
Disclosure of Invention
The application aims to provide a vacuum degree detection method, a vacuum degree detection device, electronic equipment, a storage medium and a vacuum degree detection system, and aims to solve the problem that the vacuum degree detection result of a capacitance film vacuum gauge is not reliable enough.
In a first aspect, the present application provides a vacuum degree detection method for processing a detection signal of a gauge vacuum gauge, where the gauge vacuum gauge includes a metal diaphragm, and a first fixed electrode and a second fixed electrode concentrically arranged, the metal diaphragm and the first fixed electrode form an inner ring capacitor, and the metal diaphragm and the second fixed electrode form an outer ring capacitor, including:
A1. acquiring a first voltage signal generated by an inner ring capacitor and a second voltage signal generated by an outer ring capacitor;
A2. respectively carrying out peak detection processing on the first voltage signal and the second voltage signal to obtain a first peak signal and a second peak signal;
A3. carrying out differential processing on the first peak value signal and the second peak value signal to obtain a voltage difference value signal;
A4. and calculating the voltage difference signal to obtain a vacuum degree detection result.
According to the vacuum degree detection method, peak value detection processing is carried out on the first voltage signal and the second voltage signal, difference processing is carried out on the first peak value signal and the second peak value signal after the peak value detection processing, a voltage difference value signal is obtained, calculation processing is carried out on the voltage difference value signal, and a vacuum degree detection result is obtained, wherein signal interference can be reduced through the difference processing, detection precision is improved, and therefore reliability of the vacuum degree detection result is guaranteed.
Preferably, step a2 includes:
acquiring a first peak signal output value at the previous moment and a first voltage signal measured value at the current moment;
if the first voltage signal measured value at the current moment is greater than the first peak signal output value at the previous moment, enabling the first peak signal output value at the current moment to be equal to the first voltage signal measured value at the current moment;
if the measured value of the first voltage signal at the current moment is not greater than the output value of the first peak signal at the previous moment, enabling the output value of the first peak signal at the current moment to be equal to the output value of the first peak signal at the previous moment;
acquiring a second peak signal output value at the previous moment and a second voltage signal measured value at the current moment;
if the second voltage signal measured value at the current moment is greater than the second peak signal output value at the previous moment, enabling the second peak signal output value at the current moment to be equal to the second voltage signal measured value at the current moment;
and if the measured value of the second voltage signal at the current moment is not greater than the output value of the second peak signal at the previous moment, enabling the output value of the second peak signal at the current moment to be equal to the output value of the second peak signal at the previous moment.
The method comprises the steps of detecting each peak value of a first voltage signal, comparing a first voltage signal measured value at the current moment with a first peak signal output value at the previous moment, so that the first peak signal output value at the current moment is not lower than the previous peak value of the first voltage signal measured value, detecting each peak value of a second voltage signal, comparing a second voltage signal measured value at the current moment with the second peak signal output value at the previous moment, and making the second peak signal output value at the current moment not lower than the previous peak value of the second voltage signal measured value.
Preferably, after the step A3 and before the step A4, the method further comprises the steps of:
A5. and carrying out filtering processing on the voltage difference signal.
Preferably, after the step A3 and before the step A4, the method further comprises the steps of:
A6. and amplifying the voltage difference signal.
Preferably, step a4 includes:
and calculating the amplified voltage difference signal by adopting a linear function to obtain a vacuum degree detection result.
Preferably, the linear function is:
;
in the formula (I), the compound is shown in the specification,
is a pressure value;
is a preset value;
is the amplified voltage difference signal;
is a preset value.
In a second aspect, the present application provides a vacuum degree detection device for processing detection signals of a gauge vacuum gauge, the gauge vacuum gauge includes a metal diaphragm and a first fixed electrode and a second fixed electrode which are concentrically arranged, the metal diaphragm and the first fixed electrode form an inner ring capacitor, the metal diaphragm and the second fixed electrode form an outer ring capacitor, including:
the first acquisition module is used for acquiring a first voltage signal generated by the inner ring capacitor and a second voltage signal generated by the outer ring capacitor;
the detection module is used for respectively carrying out peak detection processing on the first voltage signal and the second voltage signal to obtain a first peak signal and a second peak signal;
the first calculation module is used for carrying out differential processing on the first peak value signal and the second peak value signal to obtain a voltage difference value signal;
and the second calculation module is used for calculating the voltage difference value signal to obtain a vacuum degree detection result.
The application provides a vacuum degree detection device, through carrying out peak value detection to first voltage signal and second voltage signal and handling, carry out difference processing to first peak value signal and second peak value signal after peak value detection handles, obtain the voltage difference value signal, carry out calculation processing to the voltage difference value signal, obtain the vacuum degree testing result, wherein, difference processing can reduce signal interference, improves and detects the precision to guarantee the reliability of vacuum degree testing result.
In a third aspect, the present application provides a vacuum degree detection system, including a thin film gauge vacuum gauge, where the thin film gauge vacuum gauge includes a metal diaphragm, and a first fixed electrode and a second fixed electrode that are concentrically arranged, where the metal diaphragm and the first fixed electrode form an inner ring capacitor, and the metal diaphragm and the second fixed electrode form an outer ring capacitor, and the vacuum degree detection system further includes: the device comprises a first peak value detection circuit, a second peak value detection circuit, a differential filter circuit, an amplification circuit and an MCU (microprogrammed control unit) processor;
the first peak detection circuit is used for carrying out peak detection processing on a first voltage signal generated by the inner-loop capacitor to obtain a first peak signal, and inputting the first peak signal to the differential filter circuit;
the second peak detection circuit is used for carrying out peak detection processing on a second voltage signal generated by the outer ring capacitor to obtain a second peak signal, and inputting the second peak signal to the differential filter circuit;
the differential filter circuit is used for carrying out differential processing on the first peak value signal and the second peak value signal to obtain a voltage difference value signal, and inputting the voltage difference value signal to the amplifying circuit;
the amplifying circuit is used for amplifying the voltage difference signal and inputting the voltage difference signal to the MCU processor;
and the MCU processor is used for calculating the voltage difference value signal to obtain a vacuum degree detection result.
The application provides a vacuum degree detection system carries out peak value detection processing to first voltage signal and second voltage signal respectively through first peak value detection circuit and second peak value detection circuit, and the signal input difference filter circuit after the processing carries out difference processing and filtering, obtains the voltage difference signal, and amplifier circuit exports MCU treater after amplifying the voltage difference signal and carries out the calculation processing to obtain the vacuum degree testing result.
In a fourth aspect, the present application provides an electronic device, which includes a processor and a memory, where the memory stores a computer program executable by the processor, and the processor executes the computer program to execute the steps in the vacuum degree detection method as described above.
In a fifth aspect, the present application provides a computer storage medium having a computer program stored thereon, which when executed by a processor, performs the steps in the vacuum level detection method as described above.
Has the advantages that:
according to the vacuum degree detection method, the vacuum degree detection device, the electronic equipment, the storage medium and the vacuum degree detection system, a first voltage signal generated by an inner ring capacitor and a second voltage signal generated by an outer ring capacitor are obtained; respectively carrying out peak detection processing on the first voltage signal and the second voltage signal to obtain a first peak signal and a second peak signal; carrying out differential processing on the first peak value signal and the second peak value signal to obtain a voltage difference value signal; and calculating the voltage difference signal to obtain a vacuum degree detection result, wherein the differential processing can reduce signal interference and improve detection precision, thereby ensuring the reliability of the vacuum degree detection result.
Additional features and advantages of the application will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by the practice of the application.
Drawings
Fig. 1 is a flowchart of a vacuum degree detection method provided in the present application.
Fig. 2 is a schematic structural diagram of the vacuum degree detection device provided in the present application.
Fig. 3 is a schematic structural diagram of an electronic device provided in the present application.
Fig. 4 is a schematic structural diagram of a vacuum degree detection system provided in the present application.
Fig. 5 is a diagram showing the test results of the vacuum degree detection of the thin film gauge vacuum gauge.
FIG. 6 is a linear graph showing the test results of the vacuum degree test of the thin film gauge vacuum gauge.
1, a first acquisition module; 2. a detection module; 3. a first calculation module; 4. a second calculation module; 301. a processor; 302. a memory; 303. a communication bus; 401. a first peak detection circuit; 402. a second peak detection circuit; 403. a differential filter circuit; 404. an amplifying circuit; 405. an MCU processor.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only some embodiments of the present application, and not all embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present application without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures. Meanwhile, in the description of the present application, the terms "first", "second", and the like are used only for distinguishing the description, and are not to be construed as indicating or implying relative importance.
Referring to fig. 1, fig. 1 is a diagram of a vacuum degree detection method for processing a detection signal of a gauge vacuum gauge, where the gauge vacuum gauge includes a metal diaphragm, a first fixed electrode and a second fixed electrode concentrically arranged, the metal diaphragm and the first fixed electrode form an inner-ring capacitor, and the metal diaphragm and the second fixed electrode form an outer-ring capacitor, and the vacuum degree detection method includes the steps of:
A1. acquiring a first voltage signal generated by an inner ring capacitor and a second voltage signal generated by an outer ring capacitor;
A2. respectively carrying out peak value detection processing on the first voltage signal and the second voltage signal to obtain a first peak value signal and a second peak value signal;
A3. carrying out differential processing on the first peak value signal and the second peak value signal to obtain a voltage difference value signal;
A4. and calculating the voltage difference signal to obtain a vacuum degree detection result.
Specifically, peak detection is respectively carried out on a first voltage signal and a second voltage signal by acquiring the first voltage signal generated by an inner ring capacitor and the second voltage signal generated by an outer ring capacitor, so as to obtain a first peak signal and a second peak signal; the first peak value signal and the second peak value signal are subjected to differential processing to obtain a voltage difference value signal, and the differential processing can effectively eliminate the interference of a common mode signal, reduce the interference of the signal and improve the accuracy and reliability of a detection result; and calculating the voltage difference signal to obtain a vacuum degree detection result, so that the reliability of the vacuum degree detection result is ensured.
In some embodiments, step a2 includes:
acquiring a first peak signal output value at the previous moment and a first voltage signal measured value at the current moment;
if the first voltage signal measured value at the current moment is greater than the first peak signal output value at the previous moment, enabling the first peak signal output value at the current moment to be equal to the first voltage signal measured value at the current moment;
if the measured value of the first voltage signal at the current moment is not greater than the output value of the first peak signal at the previous moment, enabling the output value of the first peak signal at the current moment to be equal to the output value of the first peak signal at the previous moment;
acquiring a second peak signal output value at the previous moment and a second voltage signal measured value at the current moment;
if the second voltage signal measured value at the current moment is greater than the second peak signal output value at the previous moment, enabling the second peak signal output value at the current moment to be equal to the second voltage signal measured value at the current moment;
and if the measured value of the second voltage signal at the current moment is not greater than the output value of the second peak signal at the previous moment, enabling the output value of the second peak signal at the current moment to be equal to the output value of the second peak signal at the previous moment.
Specifically, a first voltage signal measured value at the current moment is compared with a first peak signal output value at the previous moment, and if the first voltage signal measured value at the current moment is greater than the first peak signal output value at the previous moment, the first peak signal output value at the current moment is equal to the first voltage signal measured value at the current moment; if the measured value of the first voltage signal at the current moment is not greater than the output value of the first peak signal at the previous moment, enabling the output value of the first peak signal at the current moment to be equal to the output value of the first peak signal at the previous moment; the principle of the peak detection processing of the second voltage signal is the same as above, and is not described in detail here. Therefore, the output value of the first peak signal or the second peak signal always follows the larger peak signal, and if no larger peak signal is detected to appear, the output value is kept as the output value of the peak signal at the previous moment.
In some embodiments, after step A3 and before step a4, further comprising the steps of:
A5. and filtering the voltage difference signal.
Specifically, the voltage difference signal is filtered, so that the interference of the signal is reduced, and the reliability of the detection result is improved. The filtering process may be performed by using an existing filtering process method, which is not limited herein.
In some embodiments, after step A3 and before step a4, further comprising the steps of:
A6. and amplifying the voltage difference signal.
Specifically, the voltage difference signal is amplified, so that noise is reduced, the detection result is more stable and reliable, and the specific amplification factor is set according to actual needs and is not limited here.
In some preferred embodiments, step a4 includes:
and calculating the amplified voltage difference signal by adopting a linear function to obtain a pressure value.
Specifically, linear function calculation processing is performed on the amplified voltage difference value signal, and a pressure value can be obtained; as shown in fig. 5, by inputting different pressures, comparing the data of the voltage difference signal before the linearity with the data of the voltage difference signal after the linearity, the situation that the pressures change with the two voltage difference signals is shown in fig. 6, where the ordinate in the figure represents the pressure value, the abscissa represents the voltage difference value, the gray line (i.e., a in fig. 6) represents the change curve of the pressure with the data of the voltage difference signal before the linearity, and the dark gray line (i.e., B in fig. 6) represents the change curve of the pressure with the data of the voltage difference signal after the linearity, and it can be visually seen from fig. 6 that the linearity between the data of the voltage difference signal after the linearity and the pressure is higher, thereby ensuring that the linearity of the vacuum degree detection result is higher and more reliable.
In some embodiments, the linear function is:
;
in the formula (I), the compound is shown in the specification,
is a pressure value;
is a preset value;
is the amplified voltage difference signal;
is a preset value.
In view of the above, the vacuum degree detection method provided by the present application obtains the first voltage signal generated by the inner ring capacitor and the second voltage signal generated by the outer ring capacitor; respectively carrying out peak value detection processing on the first voltage signal and the second voltage signal to obtain a first peak value signal and a second peak value signal; carrying out differential processing on the first peak value signal and the second peak value signal to obtain a voltage difference value signal; and calculating the voltage difference signal to obtain a vacuum degree detection result, wherein the differential processing can reduce signal interference and improve detection precision, thereby ensuring the reliability of the vacuum degree detection result.
Referring to fig. 2, the present application provides a vacuum degree detection apparatus for processing a detection signal of a gauge vacuum gauge, wherein the gauge vacuum gauge includes a metal diaphragm, a first fixed electrode and a second fixed electrode concentrically disposed, the metal diaphragm and the first fixed electrode form an inner ring capacitor, and the metal diaphragm and the second fixed electrode form an outer ring capacitor, including:
the first acquisition module 1 is used for acquiring a first voltage signal generated by the inner ring capacitor and a second voltage signal generated by the outer ring capacitor;
the detection module 2 is used for respectively carrying out peak detection processing on the first voltage signal and the second voltage signal to obtain a first peak signal and a second peak signal;
the first calculation module 3 is configured to perform difference processing on the first peak signal and the second peak signal to obtain a voltage difference signal;
and the second calculation module 4 is used for calculating the voltage difference value signal to obtain a vacuum degree detection result.
According to the vacuum degree detection device, peak detection is respectively carried out on a first voltage signal and a second voltage signal through obtaining the first voltage signal generated by an inner ring capacitor and the second voltage signal generated by an outer ring capacitor, and a first peak signal and a second peak signal are obtained; the first peak value signal and the second peak value signal are subjected to differential processing to obtain a voltage difference value signal, and the differential processing can effectively eliminate the interference of common mode signals, reduce the interference of signals and improve the accuracy and reliability of detection results; and calculating the voltage difference signal to obtain a vacuum degree detection result, so that the reliability of the vacuum degree detection result is ensured.
In some embodiments, the detection module 2 is configured to perform peak detection processing on the first voltage signal and the second voltage signal respectively to obtain a first peak signal and a second peak signal, and specifically perform:
acquiring a first peak signal output value at the previous moment and a first voltage signal measured value at the current moment;
if the first voltage signal measured value at the current moment is greater than the first peak signal output value at the previous moment, enabling the first peak signal output value at the current moment to be equal to the first voltage signal measured value at the current moment;
if the measured value of the first voltage signal at the current moment is not greater than the output value of the first peak signal at the previous moment, enabling the output value of the first peak signal at the current moment to be equal to the output value of the first peak signal at the previous moment;
acquiring a second peak signal output value at the previous moment and a second voltage signal measured value at the current moment;
if the second voltage signal measured value at the current moment is greater than the second peak signal output value at the previous moment, enabling the second peak signal output value at the current moment to be equal to the second voltage signal measured value at the current moment;
and if the measured value of the second voltage signal at the current moment is not greater than the output value of the second peak signal at the previous moment, enabling the output value of the second peak signal at the current moment to be equal to the output value of the second peak signal at the previous moment.
Specifically, a first voltage signal measured value at the current moment is compared with a first peak signal output value at the previous moment, and if the first voltage signal measured value at the current moment is greater than the first peak signal output value at the previous moment, the first peak signal output value at the current moment is equal to the first voltage signal measured value at the current moment; if the measured value of the first voltage signal at the current moment is not greater than the output value of the first peak signal at the previous moment, enabling the output value of the first peak signal at the current moment to be equal to the output value of the first peak signal at the previous moment; the principle of the peak detection processing of the second voltage signal is the same as above, and is not described in detail here. Therefore, the output value of the first peak signal or the second peak signal always follows the larger peak signal, and if no larger peak signal is detected to appear, the output value is kept as the output value of the peak signal at the previous moment.
In some embodiments, the vacuum degree detection device further includes a first processing module, and when the first computing module 3 performs a difference processing on the first peak signal and the second peak signal to obtain a voltage difference signal and before the second computing module 4 performs a computation processing on the voltage difference signal to obtain a vacuum degree detection result, the first processing module specifically performs:
A5. and carrying out filtering processing on the voltage difference value signal.
Specifically, the voltage difference signal is filtered, so that the interference of the signal is reduced, and the reliability of the detection result is improved.
In other embodiments, the vacuum degree detection apparatus further includes a second processing module, and the second processing module specifically executes, after the first calculation module 3 performs the difference processing on the first peak value signal and the second peak value signal to obtain the voltage difference value signal and before the second calculation module 4 performs the calculation processing on the voltage difference value signal to obtain the vacuum degree detection result:
A6. and amplifying the voltage difference signal.
Specifically, the voltage difference signal is amplified, so that noise is reduced, the detection result is more stable and reliable, and the specific amplification factor is set according to actual needs and is not limited here.
In some preferred embodiments, when the second calculating module 4 is configured to perform calculation processing on the voltage difference signal to obtain the vacuum degree detection result, specifically perform:
and calculating the amplified voltage difference signal by adopting a linear function to obtain a vacuum degree detection result.
Specifically, linear function calculation processing is carried out on the amplified voltage difference signal, and a vacuum degree detection result can be obtained; as shown in fig. 5, by inputting different pressures, comparing the data of the voltage difference signal before the linearity with the data of the voltage difference signal after the linearity, the situation that the pressures change with the two voltage difference signals is shown in fig. 6, where the ordinate in the figure represents the pressure value, the abscissa represents the voltage difference value, the gray line (i.e., a in fig. 6) represents the change curve of the pressure with the data of the voltage difference signal before the linearity, and the dark gray line (i.e., B in fig. 6) represents the change curve of the pressure with the data of the voltage difference signal after the linearity, and it can be visually seen from fig. 6 that the linearity between the data of the voltage difference signal after the linearity and the pressure is higher, thereby ensuring that the linearity of the vacuum degree detection result is higher and more reliable.
In some embodiments, the linear function is:
;
in the formula (I), the compound is shown in the specification,
is a pressure value;
is a preset value;
is the amplified voltage difference signal;
is a preset value.
Referring to fig. 4, fig. 4 is a vacuum degree detection system provided by the present application, including a thin film gauge vacuum gauge, the thin film gauge vacuum gauge includes a metal diaphragm, and a first fixed electrode and a second fixed electrode concentrically arranged, the metal diaphragm and the first fixed electrode form an inner ring capacitor, the metal diaphragm and the second fixed electrode form an outer ring capacitor, and further including: a first peak detection circuit 401, a second peak detection circuit 402, a differential filter circuit 403, an amplification circuit 404, and an MCU processor 405;
the first peak detection circuit 401 is configured to perform peak detection processing on the first voltage signal generated by the inner loop capacitor to obtain a first peak signal, and input the first peak signal to the differential filter circuit 403 (refer to step a2 in the foregoing);
the second peak detection circuit 402 is configured to perform peak detection processing on a second voltage signal generated by the outer loop capacitor to obtain a second peak signal, and input the second peak signal to the differential filter circuit 403 (refer to the foregoing step a2 in the specific process);
the differential filter circuit 403 is configured to perform differential processing on the first peak signal and the second peak signal to obtain a voltage difference signal, and input the voltage difference signal to the amplifying circuit 404;
the amplifying circuit 404 is configured to amplify the voltage difference signal and input the amplified voltage difference signal to the MCU processor 405;
the MCU processor 405 is configured to perform calculation processing on the voltage difference signal to obtain a vacuum degree detection result (refer to step a4 before).
In some embodiments, the differential filter circuit 403 is further configured to filter the voltage difference signal (refer to step a5 before), and input the filtered voltage difference signal to the amplifying circuit 404 after the filtering.
In the vacuum degree detection system provided by the application, a first voltage signal (excitation C1 in fig. 4) generated by an inner ring capacitor of a film gauge vacuum gauge and a second voltage signal (excitation C2 in fig. 4) generated by an outer ring capacitor are subjected to peak value detection processing respectively through a first peak value detection circuit 401 and a second peak value detection circuit 402, the processed signals are respectively input into a differential filter circuit 403 for differential processing and filtering to obtain a voltage difference signal, and an amplification circuit 404 amplifies the voltage difference signal and outputs the amplified voltage difference signal to an MCU (microprogrammed control unit) processor 405 for calculation processing, so that a vacuum degree detection result is obtained.
Referring to fig. 3, fig. 3 is a schematic structural diagram of an electronic device according to an embodiment of the present disclosure, where the present disclosure provides an electronic device, including: the processor 301 and the memory 302, the processor 301 and the memory 302 being interconnected and communicating with each other via a communication bus 303 and/or other form of connection mechanism (not shown), the memory 302 storing a computer program executable by the processor 301, the processor 301 executing the computer program when the electronic device is running to perform the vacuum degree detection method in any of the alternative implementations of the above embodiments to implement the following functions: acquiring a first voltage signal generated by an inner ring capacitor and a second voltage signal generated by an outer ring capacitor; respectively carrying out peak value detection processing on the first voltage signal and the second voltage signal to obtain a first peak value signal and a second peak value signal; carrying out differential processing on the first peak value signal and the second peak value signal to obtain a voltage difference value signal; and calculating the voltage difference signal to obtain a vacuum degree detection result.
The embodiment of the present application provides a computer storage medium, on which a computer program is stored, and when the computer program is executed by a processor, the method for detecting a vacuum degree in any optional implementation manner of the foregoing embodiment is executed, so as to implement the following functions: acquiring a first voltage signal generated by an inner ring capacitor and a second voltage signal generated by an outer ring capacitor; respectively carrying out peak value detection processing on the first voltage signal and the second voltage signal to obtain a first peak value signal and a second peak value signal; carrying out differential processing on the first peak value signal and the second peak value signal to obtain a voltage difference value signal; and calculating the voltage difference signal to obtain a vacuum degree detection result. The storage medium may be implemented by any type of volatile or nonvolatile storage device or combination thereof, such as a Static Random Access Memory (SRAM), an Electrically Erasable Programmable Read-Only Memory (EEPROM), an Erasable Programmable Read-Only Memory (EPROM), a Programmable Read-Only Memory (PROM), a Read-Only Memory (ROM), a magnetic Memory, a flash Memory, a magnetic disk, or an optical disk.
In the embodiments provided in the present application, it should be understood that the disclosed apparatus and method may be implemented in other ways. The above-described embodiments of the apparatus are merely illustrative, and for example, a division of a unit is merely a division of one logic function, and there may be other divisions when actually implemented, and for example, a plurality of units or components may be combined or integrated into another system, or some features may be omitted, or not executed. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection of devices or units through some communication interfaces, and may be in an electrical, mechanical or other form.
In addition, units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
Furthermore, the functional modules in the embodiments of the present application may be integrated together to form an independent part, or each module may exist separately, or two or more modules may be integrated to form an independent part.
In this document, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions.
The above embodiments are merely examples of the present application and are not intended to limit the scope of the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (10)
1. A vacuum degree detection method is used for processing detection signals of a film gauge vacuum gauge, the film gauge vacuum gauge comprises a metal diaphragm, a first fixed electrode and a second fixed electrode which are concentrically arranged, the metal diaphragm and the first fixed electrode form an inner ring capacitor, and the metal diaphragm and the second fixed electrode form an outer ring capacitor, and is characterized by comprising the following steps:
A1. acquiring a first voltage signal generated by an inner ring capacitor and a second voltage signal generated by an outer ring capacitor;
A2. respectively carrying out peak detection processing on the first voltage signal and the second voltage signal to obtain a first peak signal and a second peak signal;
A3. carrying out differential processing on the first peak value signal and the second peak value signal to obtain a voltage difference value signal;
A4. and calculating the voltage difference signal to obtain a vacuum degree detection result.
2. The vacuum degree detection method according to claim 1, wherein the step a2 includes:
acquiring a first peak signal output value at the previous moment and a first voltage signal measured value at the current moment;
if the first voltage signal measured value at the current moment is greater than the first peak signal output value at the previous moment, enabling the first peak signal output value at the current moment to be equal to the first voltage signal measured value at the current moment;
if the measured value of the first voltage signal at the current moment is not greater than the output value of the first peak signal at the previous moment, enabling the output value of the first peak signal at the current moment to be equal to the output value of the first peak signal at the previous moment;
acquiring a second peak signal output value at the previous moment and a second voltage signal measured value at the current moment;
if the second voltage signal measured value at the current moment is greater than the second peak signal output value at the previous moment, enabling the second peak signal output value at the current moment to be equal to the second voltage signal measured value at the current moment;
and if the measured value of the second voltage signal at the current moment is not greater than the output value of the second peak signal at the previous moment, enabling the output value of the second peak signal at the current moment to be equal to the output value of the second peak signal at the previous moment.
3. The vacuum level detection method of claim 1, further comprising, after step A3 and before step a4, the steps of:
A5. and carrying out filtering processing on the voltage difference signal.
4. The vacuum level detection method of claim 1, further comprising, after step A3 and before step a4, the steps of:
A6. and amplifying the voltage difference signal.
5. The vacuum degree detection method according to claim 4, wherein the step A4 includes:
and calculating the amplified voltage difference signal by adopting a linear function to obtain a vacuum degree detection result.
6. The vacuum level detection method of claim 5, wherein the linear function is:
;
in the formula (I), the compound is shown in the specification,
is a pressure value;
is toSetting a value;
is the amplified voltage difference signal;
is a preset value.
7. The utility model provides a vacuum detection device for handle the detected signal of film gauge vacuum gauge, the film gauge vacuum gauge includes metal diaphragm and concentric first fixed electrode and the second fixed electrode that sets up, the metal diaphragm with inner loop electric capacity is constituteed to first fixed electrode, the metal diaphragm with outer loop electric capacity is constituteed to the second fixed electrode, its characterized in that includes:
the first acquisition module is used for acquiring a first voltage signal generated by the inner ring capacitor and a second voltage signal generated by the outer ring capacitor;
the detection module is used for respectively carrying out peak value detection processing on the first voltage signal and the second voltage signal to obtain a first peak value signal and a second peak value signal;
the first calculation module is used for carrying out differential processing on the first peak value signal and the second peak value signal to obtain a voltage difference value signal;
and the second calculation module is used for calculating the voltage difference value signal to obtain a vacuum degree detection result.
8. The utility model provides a vacuum degree detecting system, includes the film gauge vacuum gauge, the film gauge vacuum gauge includes metal diaphragm and concentric first fixed electrode and the second fixed electrode that sets up, the metal diaphragm with inner loop electric capacity is constituteed to first fixed electrode, the metal diaphragm with outer loop electric capacity is constituteed to the second fixed electrode, its characterized in that still includes: the device comprises a first peak value detection circuit, a second peak value detection circuit, a differential filter circuit, an amplification circuit and an MCU (microprogrammed control unit) processor;
the first peak detection circuit is used for carrying out peak detection processing on a first voltage signal generated by the inner-loop capacitor to obtain a first peak signal, and inputting the first peak signal to the differential filter circuit;
the second peak detection circuit is used for carrying out peak detection processing on a second voltage signal generated by the outer loop capacitor to obtain a second peak signal, and inputting the second peak signal to the differential filter circuit;
the differential filter circuit is used for carrying out differential processing on the first peak value signal and the second peak value signal to obtain a voltage difference value signal, and inputting the voltage difference value signal to the amplifying circuit;
the amplifying circuit is used for amplifying the voltage difference signal and inputting the voltage difference signal to the MCU processor;
and the MCU processor is used for calculating the voltage difference value signal to obtain a vacuum degree detection result.
9. An electronic device comprising a processor and a memory, wherein the memory stores a computer program executable by the processor, and the processor executes the computer program to perform the steps of the vacuum level detection method according to any one of claims 1 to 6.
10. A computer storage medium having a computer program stored thereon, wherein the computer program, when executed by a processor, performs the steps of the vacuum level detection method according to any one of claims 1-6.
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