CN114659706A - Vacuum degree detection method, device, electronic equipment, storage medium and system - Google Patents

Abstract

The application belongs to the technical field of vacuum measurement and discloses a vacuum degree detection method, a vacuum degree detection device, electronic equipment, a storage medium and a vacuum degree detection system, wherein a first voltage signal generated by an inner ring capacitor and a second voltage signal generated by an outer ring capacitor are obtained; respectively carrying out peak detection processing on the first voltage signal and the second voltage signal to obtain a first peak signal and a second peak signal; carrying out differential processing on the first peak value signal and the second peak value signal to obtain a voltage difference value signal; and calculating the voltage difference signal to obtain a vacuum degree detection result, wherein the differential processing can reduce signal interference and improve detection precision, thereby ensuring the reliability of the vacuum degree detection result.

Description

Vacuum detection method, device, electronic device, storage medium and system

technical field

The present application relates to the technical field of vacuum measurement, and in particular, to a vacuum degree detection method, device, electronic device, storage medium and system.

Background technique

Capacitance film vacuum gauge is a vacuum gauge for full pressure measurement. It has the characteristics of miniaturization, good stability, and the measurement value has nothing to do with gas composition. At present, the vacuum detection method of capacitance film vacuum gauge is generally first through rectification and then differential filtering. , but its conversion linearity is poor, the measurement results are not reliable enough, and it is difficult to meet the needs of practical applications.

There is currently no effective technical solution for the above-mentioned problems.

SUMMARY OF THE INVENTION

The purpose of the present application is to provide a vacuum degree detection method, device, electronic device, storage medium and system, which aims to solve the problem that the vacuum degree detection result of a capacitive thin film vacuum gauge is not reliable enough.

In a first aspect, the present application provides a vacuum detection method for processing detection signals of a thin-film gauge vacuum gauge, wherein the thin-film gauge vacuum gauge includes a metal diaphragm, a concentrically arranged first fixed electrode and a second fixed electrode electrode, the metal diaphragm and the first fixed electrode form an inner ring capacitor, and the metal diaphragm and the second fixed electrode form an outer ring capacitor, including the steps:

A1. Obtain the first voltage signal generated by the inner ring capacitance and the second voltage signal generated by the outer ring capacitance;

A2. Perform peak detection processing on the first voltage signal and the second voltage signal respectively to obtain a first peak signal and a second peak signal;

A3. Perform differential processing on the first peak signal and the second peak signal to obtain a voltage difference signal;

A4. Calculate and process the voltage difference signal to obtain a vacuum degree detection result.

In the vacuum degree detection method provided by the present application, by performing peak detection processing on the first voltage signal and the second voltage signal, and performing differential processing on the first peak signal and the second peak signal after the peak detection processing, a voltage difference signal is obtained, The voltage difference signal is calculated and processed to obtain the vacuum degree detection result, wherein the differential processing can reduce signal interference and improve the detection accuracy, thereby ensuring the reliability of the vacuum degree detection result.

Preferably, step A2 includes:

Obtain the first peak signal output value at the previous moment and the first voltage signal measurement value at the current moment;

If the first voltage signal measurement value at the current moment is greater than the first peak signal output value at the previous moment, the first peak signal output value at the current moment is made equal to the first voltage signal measurement value at the current moment;

If the measured value of the first voltage signal at the current moment is not greater than the first peak signal output value at the previous moment, make the first peak signal output value at the current moment equal to the first peak signal output value at the previous moment;

Obtain the second peak signal output value at the previous moment and the second voltage signal measurement value at the current moment;

If the second voltage signal measurement value at the current moment is greater than the second peak signal output value at the previous moment, the second peak signal output value at the current moment is made equal to the second voltage signal measurement value at the current moment;

If the measured value of the second voltage signal at the current moment is not greater than the second peak signal output value at the previous moment, the second peak signal output value at the current moment is made equal to the second peak signal output value at the previous moment.

The present application detects each peak value of the first voltage signal, and compares the measured value of the first voltage signal at the current moment with the output value of the first peak signal at the previous moment to make the output value of the first peak signal at the current moment Not lower than the previous peak value of the measured value of the first voltage signal; detect each peak value of the second voltage signal, and compare the measured value of the second voltage signal at the current moment with the output value of the second peak signal at the previous moment , so that the output value of the second peak signal at the current moment is not lower than the previous peak value of the measured value of the second voltage signal.

Preferably, after step A3 and before step A4, it also includes steps:

A5. Filter the voltage difference signal.

Preferably, after step A3 and before step A4, it also includes steps:

A6. Amplify the voltage difference signal.

Preferably, step A4 includes:

A linear function is used to calculate and process the amplified voltage difference signal to obtain a vacuum degree detection result.

; Preferably, the linear function is:

;

是压力值；

是预设值；

是放大处理后的电压差值信号；

是预设值。 In the formula,

is the pressure value;

is the default value;

is the amplified voltage difference signal;

is the default value.

In a second aspect, the present application provides a vacuum detection device for processing detection signals of a thin-film gauge vacuum gauge, the thin-film gauge vacuum gauge comprising a metal diaphragm, a concentrically arranged first fixed electrode and a second fixed electrode electrode, the metal diaphragm and the first fixed electrode form an inner ring capacitor, and the metal diaphragm and the second fixed electrode form an outer ring capacitor, including:

a first acquisition module, configured to acquire the first voltage signal generated by the inner ring capacitance and the second voltage signal generated by the outer ring capacitance;

a detection module, configured to perform peak detection processing on the first voltage signal and the second voltage signal respectively to obtain a first peak signal and a second peak signal;

a first calculation module, configured to perform differential processing on the first peak signal and the second peak signal to obtain a voltage difference signal;

The second calculation module is used for calculating and processing the voltage difference signal to obtain a vacuum degree detection result.

The vacuum degree detection device provided by the present application obtains a voltage difference signal by performing peak detection processing on the first voltage signal and the second voltage signal, and performing differential processing on the first peak signal and the second peak signal after the peak detection processing. The voltage difference signal is calculated and processed to obtain the vacuum degree detection result, wherein the differential processing can reduce signal interference and improve the detection accuracy, thereby ensuring the reliability of the vacuum degree detection result.

In a third aspect, the present application provides a vacuum degree detection system, comprising a thin-film gauge vacuum gauge, the thin-film gauge vacuum gauge comprising a metal diaphragm and concentrically arranged first and second fixed electrodes, the metal diaphragm and the first fixed electrode form an inner ring capacitor, the metal diaphragm and the second fixed electrode form an outer ring capacitor, and also include: a first peak detection circuit, a second peak detection circuit, a differential filter circuit, and an amplifier circuit and MCU processor;

The first peak detection circuit is configured to perform peak detection processing on the first voltage signal generated by the inner loop capacitor to obtain a first peak signal, and input the first peak signal to the differential filter circuit;

The second peak detection circuit is configured to perform peak detection processing on the second voltage signal generated by the outer ring capacitor to obtain a second peak signal, and input the second peak signal to the differential filter circuit;

The differential filtering circuit is configured to perform differential processing on the first peak signal and the second peak signal to obtain a voltage difference signal, and input the voltage difference signal to the amplifying circuit;

The amplifying circuit is used to amplify the voltage difference signal and input it to the MCU processor;

The MCU processor is used for calculating and processing the voltage difference signal to obtain a vacuum degree detection result.

In the vacuum detection system provided by the present application, the first peak detection circuit and the second peak detection circuit respectively perform peak detection processing on the first voltage signal and the second voltage signal, and the processed signals are input to the differential filtering circuit for differential processing and filtering. , to obtain the voltage difference signal, the amplifying circuit amplifies the voltage difference signal and outputs it to the MCU processor for calculation processing, thereby obtaining the vacuum degree detection result.

In a fourth aspect, the present application provides an electronic device, including a processor and a memory, where the memory stores a computer program executable by the processor, and when the processor executes the computer program, the operation is as described above The steps in the vacuum detection method.

In a fifth aspect, the present application provides a computer storage medium on which a computer program is stored, and when the computer program is executed by a processor, executes the steps in the above-described vacuum degree detection method.

Beneficial effects:

The vacuum degree detection method, device, electronic device, storage medium and system provided by the present application obtain the first voltage signal generated by the inner ring capacitance and the second voltage signal generated by the outer ring capacitance; performing peak detection processing on the second voltage signal to obtain a first peak signal and a second peak signal; performing differential processing on the first peak signal and the second peak signal to obtain a voltage difference signal; The difference signal is calculated and processed to obtain a vacuum degree detection result, wherein the differential processing can reduce signal interference and improve detection accuracy, thereby ensuring the reliability of the vacuum degree detection result.

Other features and advantages of the present application will be set forth in the description that follows, and, in part, will be apparent from the description, or learned by practice of the present application.

Description of drawings

FIG. 1 is a flowchart of a vacuum degree detection method provided by the present application.

FIG. 2 is a schematic structural diagram of a vacuum degree detection device provided by the present application.

FIG. 3 is a schematic structural diagram of an electronic device provided by the present application.

FIG. 4 is a schematic structural diagram of a vacuum degree detection system provided by the present application.

FIG. 5 is a schematic diagram of the test result of the vacuum degree detection of the film gauge vacuum gauge.

FIG. 6 is a linear schematic diagram of the test result of the vacuum degree detection of the film gauge vacuum gauge.

Numeral description: 1, first acquisition module; 2, detection module; 3, first calculation module; 4, second calculation module; 301, processor; 302, memory; 303, communication bus; 401, first peak detection circuit 402, a second peak detection circuit; 403, a differential filter circuit; 404, an amplifier circuit; 405, an MCU processor.

Detailed ways

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application generally described and illustrated in the drawings herein may be arranged and designed in a variety of different configurations. Thus, the following detailed description of the embodiments of the application provided in the accompanying drawings is not intended to limit the scope of the application as claimed, but is merely representative of selected embodiments of the application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application.

It should be noted that like numerals and letters refer to like items in the following figures, so once an item is defined in one figure, it does not require further definition and explanation in subsequent figures. Meanwhile, in the description of the present application, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

Please refer to FIG. 1. FIG. 1 is a vacuum detection method provided by the present application for processing the detection signal of a thin-film gauge vacuum gauge. The thin-film gauge vacuum gauge includes a metal diaphragm and a concentrically arranged first fixed electrode and a second fixed electrode. Two fixed electrodes, the metal diaphragm and the first fixed electrode form an inner ring capacitor, the metal diaphragm and the second fixed electrode form an outer ring capacitor, and the vacuum degree detection method includes the steps:

A1. Obtain the first voltage signal generated by the inner ring capacitance and the second voltage signal generated by the outer ring capacitance;

A2. Perform peak detection processing on the first voltage signal and the second voltage signal respectively to obtain the first peak signal and the second peak signal;

A3. Perform differential processing on the first peak signal and the second peak signal to obtain a voltage difference signal;

A4. Calculate and process the voltage difference signal to obtain the detection result of vacuum degree.

Specifically, by acquiring the first voltage signal generated by the inner ring capacitance and the second voltage signal generated by the outer ring capacitance, peak detection is performed on the first voltage signal and the second voltage signal, respectively, to obtain the first peak signal and the second peak signal. ; Perform differential processing on the first peak signal and the second peak signal to obtain a voltage difference signal. Using differential processing can effectively eliminate the interference of the common mode signal, reduce the interference of the signal, and improve the accuracy and reliability of the detection result; The voltage difference signal is calculated and processed to obtain the vacuum degree detection result, thereby ensuring the reliability of the vacuum degree detection result.

In some embodiments, step A2 includes:

Obtain the first peak signal output value at the previous moment and the first voltage signal measurement value at the current moment;

If the first voltage signal measurement value at the current moment is greater than the first peak signal output value at the previous moment, the first peak signal output value at the current moment is made equal to the first voltage signal measurement value at the current moment;

If the measured value of the first voltage signal at the current moment is not greater than the first peak signal output value at the previous moment, make the first peak signal output value at the current moment equal to the first peak signal output value at the previous moment;

Obtain the second peak signal output value at the previous moment and the second voltage signal measurement value at the current moment;

If the second voltage signal measurement value at the current moment is greater than the second peak signal output value at the previous moment, the second peak signal output value at the current moment is made equal to the second voltage signal measurement value at the current moment;

If the second voltage signal measurement value at the current moment is not greater than the second peak signal output value at the previous moment, the second peak signal output value at the current moment is made equal to the second peak signal output value at the previous moment.

Specifically, the first voltage signal measurement value at the current moment is compared with the first peak signal output value at the previous moment. If the first voltage signal measurement value at the current moment is greater than the first peak signal output value at the previous moment, then Make the first peak signal output value at the current moment equal to the first voltage signal measurement value at the current moment; if the first voltage signal measurement value at the current moment is not greater than the first peak signal output value at the previous moment, make the first peak signal output value at the current moment The output value of a peak signal is equal to the output value of the first peak signal at the previous moment; the principle of the peak detection processing of the second voltage signal is the same as above, and will not be described in detail here. Therefore, the output value of the first peak signal or the second peak signal always follows the larger peak signal, and if no larger peak signal is detected, the output value of the previous peak signal is maintained.

In some embodiments, after step A3 and before step A4, it also includes steps:

A5. Filter the voltage difference signal.

Specifically, filtering processing is performed on the voltage difference signal to reduce the interference of the signal and improve the reliability of the detection result. The filtering processing can be performed by using an existing filtering processing method, which is not limited here.

In some embodiments, after step A3 and before step A4, it also includes steps:

A6. Amplify the voltage difference signal.

Specifically, by amplifying the voltage difference signal, it is beneficial to reduce noise and make the detection result more stable and reliable. The specific amplification factor is set according to actual needs, which is not limited here.

In some preferred embodiments, step A4 includes:

A linear function is used to calculate the amplified voltage difference signal to obtain the pressure value.

Specifically, the pressure value can be obtained by performing linear function calculation processing on the amplified voltage difference signal; as shown in Figure 5, by inputting different pressures, compare the data of the voltage difference signal before linearity and the voltage difference after linearity The data of the value signal, the pressure changes with the two voltage difference signals, respectively, are shown in Figure 6. The ordinate in the figure represents the pressure value, the abscissa represents the voltage difference, and the gray line (ie, A in Figure 6) represents the The change curve of pressure with the voltage difference signal data before linearity. The dark gray line (ie, B in Figure 6) represents the change curve of pressure with the voltage difference signal data after linearity. It can be seen intuitively from Figure 6 that the voltage difference after linearity The linearity between the data of the value signal and the pressure is higher, so as to ensure that the linearity of the vacuum detection result is higher and more reliable.

; In some embodiments, the linear function is:

;

是压力值；

是预设值；

是放大处理后的电压差值信号；

是预设值。 In the formula,

is the pressure value;

is the default value;

is the amplified voltage difference signal;

is the default value.

As can be seen from the above, the vacuum degree detection method provided by the present application obtains the first voltage signal generated by the inner ring capacitance and the second voltage signal generated by the outer ring capacitance; respectively, performs peak detection processing on the first voltage signal and the second voltage signal. , obtain the first peak signal and the second peak signal; perform differential processing on the first peak signal and the second peak signal to obtain a voltage difference signal; perform calculation processing on the voltage difference signal to obtain a vacuum degree detection result, wherein the differential Processing can reduce signal interference and improve detection accuracy, thereby ensuring the reliability of vacuum detection results.

Please refer to FIG. 2 , the present application provides a vacuum detection device for processing the detection signal of a thin-film gauge vacuum gauge. The thin-film gauge vacuum gauge includes a metal diaphragm and concentrically arranged first and second fixed electrodes. , the metal diaphragm and the first fixed electrode form an inner ring capacitor, and the metal diaphragm and the second fixed electrode form an outer ring capacitor, including:

The first acquisition module 1 is used to acquire the first voltage signal generated by the inner ring capacitance and the second voltage signal generated by the outer ring capacitance;

A detection module 2, configured to perform peak detection processing on the first voltage signal and the second voltage signal respectively, to obtain the first peak signal and the second peak signal;

The first calculation module 3 is configured to perform differential processing on the first peak signal and the second peak signal to obtain a voltage difference signal;

The second calculation module 4 is used for calculating and processing the voltage difference signal to obtain a vacuum degree detection result.

The vacuum degree detection device provided by the present application performs peak detection on the first voltage signal and the second voltage signal by acquiring the first voltage signal generated by the inner ring capacitance and the second voltage signal generated by the outer ring capacitance to obtain the first peak value. signal and the second peak signal; differential processing is performed on the first peak signal and the second peak signal to obtain a voltage difference signal. The differential processing can effectively eliminate the interference of the common mode signal, reduce the interference of the signal, and improve the accuracy of the detection result. The vacuum degree detection result can be obtained by calculating and processing the voltage difference signal, thereby ensuring the reliability of the vacuum degree detection result.

In some embodiments, the detection module 2 is configured to perform peak detection processing on the first voltage signal and the second voltage signal respectively, and when the first peak signal and the second peak signal are obtained, specifically execute:

Obtain the first peak signal output value at the previous moment and the first voltage signal measurement value at the current moment;

If the first voltage signal measurement value at the current moment is greater than the first peak signal output value at the previous moment, the first peak signal output value at the current moment is made equal to the first voltage signal measurement value at the current moment;

If the measured value of the first voltage signal at the current moment is not greater than the first peak signal output value at the previous moment, make the first peak signal output value at the current moment equal to the first peak signal output value at the previous moment;

Obtain the second peak signal output value at the previous moment and the second voltage signal measurement value at the current moment;

If the second voltage signal measurement value at the current moment is greater than the second peak signal output value at the previous moment, the second peak signal output value at the current moment is made equal to the second voltage signal measurement value at the current moment;

If the second voltage signal measurement value at the current moment is not greater than the second peak signal output value at the previous moment, the second peak signal output value at the current moment is made equal to the second peak signal output value at the previous moment.

Specifically, the first voltage signal measurement value at the current moment is compared with the first peak signal output value at the previous moment. If the first voltage signal measurement value at the current moment is greater than the first peak signal output value at the previous moment, then Make the first peak signal output value at the current moment equal to the first voltage signal measurement value at the current moment; if the first voltage signal measurement value at the current moment is not greater than the first peak signal output value at the previous moment, make the first peak signal output value at the current moment The output value of a peak signal is equal to the output value of the first peak signal at the previous moment; the principle of the peak detection processing of the second voltage signal is the same as above, and will not be described in detail here. Therefore, the output value of the first peak signal or the second peak signal always follows the larger peak signal, and if no larger peak signal is detected, the output value of the previous peak signal is maintained.

In some embodiments, the vacuum degree detection device further includes a first processing module, the first processing module performs differential processing on the first peak signal and the second peak signal after the first calculation module 3 to obtain the voltage difference signal and after The second calculation module 4 performs calculation processing on the voltage difference signal, and before obtaining the vacuum degree detection result, specifically executes:

A5. Filter the voltage difference signal.

Specifically, filtering processing is performed on the voltage difference signal to reduce the interference of the signal and improve the reliability of the detection result.

In other embodiments, the vacuum degree detection device further includes a second processing module, after the first calculation module 3 performs differential processing on the first peak signal and the second peak signal to obtain a voltage difference signal, and When the second calculation module 4 performs calculation processing on the voltage difference signal and obtains the vacuum degree detection result, it specifically executes:

A6. Amplify the voltage difference signal.

Specifically, by amplifying the voltage difference signal, it is beneficial to reduce noise and make the detection result more stable and reliable. The specific amplification factor is set according to actual needs, which is not limited here.

In some preferred embodiments, when the second calculation module 4 is used to calculate and process the voltage difference signal to obtain the vacuum degree detection result, it specifically executes:

A linear function is used to calculate the amplified voltage difference signal to obtain the detection result of vacuum degree.

Specifically, a linear function calculation process is performed on the amplified voltage difference signal to obtain the vacuum degree detection result; as shown in Figure 5, by inputting different pressures, compare the data of the voltage difference signal before linearity and the linearity after The data of the voltage difference signal, the pressure changes with the two voltage difference signals respectively are shown in Figure 6, the ordinate in the figure represents the pressure value, the abscissa represents the voltage difference, the gray line (that is, A in Figure 6) ) represents the change curve of pressure with the voltage difference signal data before linearity, and the dark gray line (ie, B in Figure 6) represents the change curve of pressure with the voltage difference signal data after linearity. The linearity between the data of the voltage difference signal and the pressure is higher, so as to ensure that the linearity of the vacuum degree detection result is higher and more reliable.

; In some embodiments, the linear function is:

;

是压力值；

是预设值；

是放大处理后的电压差值信号；

是预设值。 In the formula,

is the pressure value;

is the default value;

is the amplified voltage difference signal;

is the default value.

Please refer to FIG. 4 . FIG. 4 is a vacuum detection system provided by the application, including a thin-film gauge vacuum gauge. The thin-film gauge vacuum gauge includes a metal diaphragm and concentrically arranged first and second fixed electrodes. The metal diaphragm and the first fixed electrode form an inner ring capacitor, the metal diaphragm and the second fixed electrode form an outer ring capacitor, and also include: a first peak detection circuit 401, a second peak detection circuit 402, a differential filter circuit 403, an amplifier circuit 404, MCU processor 405;

The first peak detection circuit 401 is used to perform peak detection processing on the first voltage signal generated by the inner loop capacitance to obtain the first peak signal, and input the first peak signal to the differential filter circuit 403 (refer to step A2 above for the specific process) ;

The second peak detection circuit 402 is used to perform peak detection processing on the second voltage signal generated by the outer loop capacitor to obtain a second peak signal, and input the second peak signal to the differential filter circuit 403 (refer to step A2 above for the specific process);

The differential filter circuit 403 is used to perform differential processing on the first peak signal and the second peak signal to obtain a voltage difference signal, and input the voltage difference signal to the amplifying circuit 404;

The amplifying circuit 404 is used to amplify the voltage difference signal and input it to the MCU processor 405;

The MCU processor 405 is used to calculate and process the voltage difference signal to obtain a vacuum degree detection result (refer to step A4 above for the specific process).

In some embodiments, the differential filtering circuit 403 is further configured to perform filtering processing on the voltage difference signal (refer to step A5 above for the specific process), and then input the filtered voltage difference signal to the amplifying circuit 404 after the filtering processing.

In the vacuum detection system provided by this application, the first voltage signal (excitation C1 in Figure 4) generated by the inner ring capacitance of the film gauge vacuum gauge and the second voltage signal (excitation C2 in Figure 4) generated by the outer ring capacitance are respectively The first peak detection circuit 401 and the second peak detection circuit 402 respectively perform peak detection processing on the first voltage signal and the second voltage signal, and the processed signals are respectively input to the differential filtering circuit 403 for differential processing and filtering to obtain the voltage difference value. The amplifying circuit 404 amplifies the voltage difference signal and outputs it to the MCU processor 405 for calculation processing, thereby obtaining the vacuum degree detection result.

Please refer to FIG. 3. FIG. 3 is a schematic structural diagram of an electronic device provided by an embodiment of the present application. The present application provides an electronic device, including: a processor 301 and a memory 302. The processor 301 and the memory 302 pass through the communication bus 303 and /or other forms of connection mechanisms (not shown) are interconnected and communicate with each other, and the memory 302 stores a computer program executable by the processor 301. When the electronic device is running, the processor 301 executes the computer program to execute the above embodiments. The vacuum degree detection method in any optional implementation manner of the invention can realize the following functions: obtain the first voltage signal generated by the inner ring capacitance and the second voltage signal generated by the outer ring capacitance; Perform peak detection processing on the voltage signal to obtain a first peak signal and a second peak signal; perform differential processing on the first peak signal and the second peak signal to obtain a voltage difference signal; perform calculation processing on the voltage difference signal to obtain the degree of vacuum Test results.

The embodiment of the present application provides a computer storage medium on which a computer program is stored. When the computer program is executed by a processor, the vacuum degree detection method in any optional implementation manner of the foregoing embodiment is executed, so as to realize the following functions: Obtain the first voltage signal generated by the inner ring capacitance and the second voltage signal generated by the outer ring capacitance; respectively perform peak detection processing on the first voltage signal and the second voltage signal to obtain the first peak signal and the second peak signal; The first peak signal and the second peak signal are differentially processed to obtain a voltage difference signal; the voltage difference signal is calculated and processed to obtain a vacuum degree detection result. Among them, the storage medium can be realized by any type of volatile or non-volatile storage device or their combination, such as Static Random Access Memory (SRAM for short), Electrically Erasable Programmable Read-Only Memory (Electrically Erasable Programmable Read-Only Memory, EEPROM for short), Erasable Programmable Read Only Memory (EPROM), Programmable Red-Only Memory (PROM), Read-Only Memory (Read-Only Memory, referred to as ROM), magnetic memory, flash memory, magnetic disk or optical disk.

In the embodiments provided in this application, it should be understood that the disclosed apparatus and method may be implemented in other manners. The apparatus embodiments described above are only illustrative. For example, the division of units is only a logical function division. In actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated. to another system, or some features can be ignored, or not implemented. On the other hand, the shown or discussed mutual coupling or direct coupling or communication connection may be through some communication interfaces, indirect coupling or communication connection of devices or units, which may be in electrical, mechanical or other forms.

In addition, units described as separate components may or may not be physically separated, and components shown as units may or may not be physical units, that is, may be located in one place, or may be distributed to multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution in this embodiment.

Furthermore, each functional module in each embodiment of the present application may be integrated together to form an independent part, or each module may exist independently, or two or more modules may be integrated to form an independent part.

In this document, relational terms such as first and second, etc. are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such existence between these entities or operations. The actual relationship or sequence.

The above are only examples of the present application, and are not intended to limit the protection scope of the present application. For those skilled in the art, the present application may have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of this application shall be included within the protection scope of this application.

Claims (10)

1. A vacuum degree detection method is used for processing detection signals of a film gauge vacuum gauge, the film gauge vacuum gauge comprises a metal diaphragm, a first fixed electrode and a second fixed electrode which are concentrically arranged, the metal diaphragm and the first fixed electrode form an inner ring capacitor, and the metal diaphragm and the second fixed electrode form an outer ring capacitor, and is characterized by comprising the following steps:

A1. acquiring a first voltage signal generated by an inner ring capacitor and a second voltage signal generated by an outer ring capacitor;

A2. respectively carrying out peak detection processing on the first voltage signal and the second voltage signal to obtain a first peak signal and a second peak signal;

A3. carrying out differential processing on the first peak value signal and the second peak value signal to obtain a voltage difference value signal;

A4. and calculating the voltage difference signal to obtain a vacuum degree detection result.

2. The vacuum degree detection method according to claim 1, wherein the step a2 includes:

acquiring a first peak signal output value at the previous moment and a first voltage signal measured value at the current moment;

if the first voltage signal measured value at the current moment is greater than the first peak signal output value at the previous moment, enabling the first peak signal output value at the current moment to be equal to the first voltage signal measured value at the current moment;

if the measured value of the first voltage signal at the current moment is not greater than the output value of the first peak signal at the previous moment, enabling the output value of the first peak signal at the current moment to be equal to the output value of the first peak signal at the previous moment;

acquiring a second peak signal output value at the previous moment and a second voltage signal measured value at the current moment;

if the second voltage signal measured value at the current moment is greater than the second peak signal output value at the previous moment, enabling the second peak signal output value at the current moment to be equal to the second voltage signal measured value at the current moment;

and if the measured value of the second voltage signal at the current moment is not greater than the output value of the second peak signal at the previous moment, enabling the output value of the second peak signal at the current moment to be equal to the output value of the second peak signal at the previous moment.

3. The vacuum level detection method of claim 1, further comprising, after step A3 and before step a4, the steps of:

A5. and carrying out filtering processing on the voltage difference signal.

4. The vacuum level detection method of claim 1, further comprising, after step A3 and before step a4, the steps of:

A6. and amplifying the voltage difference signal.

5. The vacuum degree detection method according to claim 4, wherein the step A4 includes:

and calculating the amplified voltage difference signal by adopting a linear function to obtain a vacuum degree detection result.

6. The vacuum level detection method of claim 5, wherein the linear function is:

;

in the formula (I), the compound is shown in the specification,

is a pressure value;

is toSetting a value;

is the amplified voltage difference signal;

is a preset value.

7. The utility model provides a vacuum detection device for handle the detected signal of film gauge vacuum gauge, the film gauge vacuum gauge includes metal diaphragm and concentric first fixed electrode and the second fixed electrode that sets up, the metal diaphragm with inner loop electric capacity is constituteed to first fixed electrode, the metal diaphragm with outer loop electric capacity is constituteed to the second fixed electrode, its characterized in that includes:

the first acquisition module is used for acquiring a first voltage signal generated by the inner ring capacitor and a second voltage signal generated by the outer ring capacitor;

the detection module is used for respectively carrying out peak value detection processing on the first voltage signal and the second voltage signal to obtain a first peak value signal and a second peak value signal;

the first calculation module is used for carrying out differential processing on the first peak value signal and the second peak value signal to obtain a voltage difference value signal;

and the second calculation module is used for calculating the voltage difference value signal to obtain a vacuum degree detection result.

8. The utility model provides a vacuum degree detecting system, includes the film gauge vacuum gauge, the film gauge vacuum gauge includes metal diaphragm and concentric first fixed electrode and the second fixed electrode that sets up, the metal diaphragm with inner loop electric capacity is constituteed to first fixed electrode, the metal diaphragm with outer loop electric capacity is constituteed to the second fixed electrode, its characterized in that still includes: the device comprises a first peak value detection circuit, a second peak value detection circuit, a differential filter circuit, an amplification circuit and an MCU (microprogrammed control unit) processor;

the first peak detection circuit is used for carrying out peak detection processing on a first voltage signal generated by the inner-loop capacitor to obtain a first peak signal, and inputting the first peak signal to the differential filter circuit;

the second peak detection circuit is used for carrying out peak detection processing on a second voltage signal generated by the outer loop capacitor to obtain a second peak signal, and inputting the second peak signal to the differential filter circuit;

the differential filter circuit is used for carrying out differential processing on the first peak value signal and the second peak value signal to obtain a voltage difference value signal, and inputting the voltage difference value signal to the amplifying circuit;

the amplifying circuit is used for amplifying the voltage difference signal and inputting the voltage difference signal to the MCU processor;

and the MCU processor is used for calculating the voltage difference value signal to obtain a vacuum degree detection result.

9. An electronic device comprising a processor and a memory, wherein the memory stores a computer program executable by the processor, and the processor executes the computer program to perform the steps of the vacuum level detection method according to any one of claims 1 to 6.

10. A computer storage medium having a computer program stored thereon, wherein the computer program, when executed by a processor, performs the steps of the vacuum level detection method according to any one of claims 1-6.

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