CN114634163A - Production device and method for manufacturing electronic-grade hydrogen chloride - Google Patents
Production device and method for manufacturing electronic-grade hydrogen chloride Download PDFInfo
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- CN114634163A CN114634163A CN202210536811.8A CN202210536811A CN114634163A CN 114634163 A CN114634163 A CN 114634163A CN 202210536811 A CN202210536811 A CN 202210536811A CN 114634163 A CN114634163 A CN 114634163A
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- C01B7/00—Halogens; Halogen acids
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- C01B7/0706—Purification ; Separation of hydrogen chloride
- C01B7/0718—Purification ; Separation of hydrogen chloride by adsorption
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Abstract
The invention discloses a production device and a method for manufacturing electronic-grade hydrogen chloride, wherein the device comprises an adsorption tower, a cooler, a raw material rectifying tower, a first heavy component removal tower, a flash tank, a reactor, a light component removal tower, a maneuvering tower, a second heavy component removal tower and a membrane separation device, wherein a tower top outlet of the adsorption tower is connected with a tower kettle feed inlet of the raw material rectifying tower through the cooler; a tower kettle feed inlet of the first de-heavy tower is connected with the bottom of the raw material rectifying tower; an inlet of the flash tank is connected with the top of the first de-weighting tower; the bottom of the reactor is connected with the top of the flash tank; a tower kettle feed inlet of the lightness-removing tower is connected with the top of the reactor; the tower kettle of the mobile tower is connected with the bottom of the light component removal tower; the second heavy component removing tower is connected with the tower top or the tower kettle of the mobile tower; the membrane separation device is connected with the top of the second de-heavy tower. The method utilizes the byproduct and the recovered hydrogen chloride or the synthesized hydrogen chloride as raw materials, fully utilizes resources, fully recovers the industrial byproduct hydrogen chloride under the conditions of high efficiency and energy saving, and has higher economic benefit and environmental benefit.
Description
Technical Field
The invention relates to the technical field of preparation of electronic-grade hydrogen chloride, in particular to a production device and a method for preparing electronic-grade hydrogen chloride.
Background
The electronic grade hydrogen chloride is one of inorganic acids, is colorless gas at normal temperature, and is easily absorbed by water to form strong corrosive liquid. High-purity electronic grade hydrogen chloride is an industrial basic material with wide application prospect, and particularly plays a significant role in the fields of semiconductor integrated circuits, metal smelting, solar cells, pharmacy and the like. In recent years, with further deterioration of energy crisis and air pollution, economic and scientific development of various countries in the world gradually turns to low-carbon economic and clean energy based on environmental protectionThe technical and electronic industry field becomes the focus of the next development and the direction of continuous research of each country. The further development of large-scale integrated circuits and solar photovoltaic industry puts higher requirements on the purity of hydrogen chloride, the purity needs to reach more than 99.999 percent (5N) of volume fraction, and C in the hydrogen chloride2Unsaturated hydrocarbon, N2、O2、Ar、CH4、H2The content of impurities such as O must be strictly controlled.
However, the traditional analysis method and hydrochloric acid desorption method are difficult to meet, the high water content of the produced electronic grade hydrogen chloride causes serious corrosivity in the process of the method, the production cost is high, the production capacity is small, and the market demand of rapidly developed downstream integrated circuits and solar photovoltaic industry cannot be met; meanwhile, a large amount of industrial byproduct hydrogen chloride is difficult to treat, high in energy consumption and incapable of being fully utilized.
Therefore, it is an urgent need to solve the problems of the art to provide a production apparatus and method for efficiently producing electronic grade hydrogen chloride.
Disclosure of Invention
In view of this, the invention provides a production device and a method for manufacturing electronic grade hydrogen chloride, which can remove light component C in byproduct hydrogen chloride2Unsaturated hydrocarbon, N2、O2、Ar、CH4And a heavy fraction H2O and the like to prepare 5N-grade (volume fraction is 99.999%) hydrogen chloride products, and simultaneously solve the problems of difficult recovery and difficult purification of hydrogen chloride in industrial byproducts.
In order to achieve the purpose, the invention adopts the following technical scheme:
a production device for manufacturing electronic-grade hydrogen chloride comprises an adsorption tower, a cooler, a raw material rectifying tower, a first heavy component removal tower, a flash tank, a reactor, a light component removal tower, a maneuvering tower, a second heavy component removal tower and a membrane separation device which are sequentially connected through pipelines.
Further, an outlet at the top of the adsorption tower is connected with a feed inlet of a tower kettle of the raw material rectifying tower through the cooler; a tower kettle feed inlet of the first de-heavy tower is connected with the bottom of the raw material rectifying tower; the inlet of the flash tank is connected with the top of the first de-heavy tower; the bottom of the reactor is connected with the top of the flash tank; a tower kettle feed inlet of the lightness-removing tower is connected with the top of the reactor; a tower kettle feed inlet of the motorized tower is connected with the bottom of the light component removal tower; the second heavy component removal tower is connected with the tower top of the mobile tower or a tower kettle discharge hole; the membrane separation device is connected with the top of the second de-heavy tower.
Further, the raw material rectifying tower, the first heavy component removing tower, the light component removing tower, the maneuvering tower and the second heavy component removing tower all adopt high-efficiency mass transfer elements, and the high-efficiency mass transfer elements are random packing or regular packing or high-efficiency BH packing.
The method for producing the electronic grade hydrogen chloride by using the production device comprises the following steps:
s1, taking the byproduct hydrogen chloride or synthetic hydrogen chloride with the purity of 97% as a raw material, feeding the raw material into an adsorption tower, cooling the adsorption outlet gas, and feeding the cooled adsorption outlet gas into a raw material rectifying tower for primary impurity separation;
s2, feeding the tower bottom stream of the raw material rectifying tower into a first de-heavy tower to obtain 1.0N-4.0N chemical pure hydrogen chloride at the tower top;
s3, enabling the tower top product of the first de-weighting tower to enter a flash tank to remove moisture;
s4, feeding the gas phase evaporated from the flash tank into a reactor for catalytic reaction, and removing C2An unsaturated hydrocarbon;
s5, the product in the reactor enters a light component removal tower to further remove light component impurity N2、O2、Ar；
S6, feeding the tower bottom liquid of the light component removal tower into a mobile tower to further remove light component impurities or heavy component impurities;
s7, enabling the produced liquid of the mobile tower to finally enter a second heavy component removal tower to further remove heavy component impurities;
and S8, feeding the tower top product of the second de-heavy tower into a membrane separation device, and outputting a 5.0N-10.0N electronic grade hydrogen chloride product at an outlet.
Further, the adsorption medium in the adsorption tower is titanium dioxide or active carbon or acidic resin or active alumina or silica gel.
Further, the membrane component of the membrane separation device is in a plate frame type or a tube type or a spiral coil type or a hollow fiber type.
Further, the light component impurities include C2Unsaturated hydrocarbon, N2、O2Ar and CH4(ii) a The heavy component impurities comprise H2O。
Therefore, compared with the prior art, the invention utilizes the byproduct and the recovered hydrogen chloride or the synthesized hydrogen chloride as raw materials, fully utilizes resources, reduces the influence on the surrounding environment, and only about 2-5 percent of tower bottom discharge is prepared into 20 percent hydrochloric acid for sale in the related production process, so the method is an environment-friendly method without three wastes discharge, fully recovers the industrial byproduct hydrogen chloride under the conditions of high efficiency and energy saving, balances the supply and demand relationship of domestic high-purity electronic grade hydrogen chloride, and has higher economic benefit and environmental benefit.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a schematic flow diagram of a process for manufacturing electronic grade hydrogen chloride production apparatus according to the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
As shown in fig. 1, the embodiment of the invention discloses a production device for manufacturing electronic grade hydrogen chloride, which comprises an adsorption tower 1, a cooler 2, a raw material rectifying tower 3, a first heavy component removal tower 4, a flash tank 5, a reactor 6, a light component removal tower 7, a mobile tower 8, a second heavy component removal tower 9 and a membrane separation device 10, wherein an outlet at the top of the adsorption tower 1 is connected with a feed inlet at the bottom of the raw material rectifying tower 3 through the cooler 2; a tower kettle feed inlet of the first de-heavy tower 4 is connected with the bottom of the raw material rectifying tower 3; an inlet of the flash tank 5 is connected with the top of the first de-weighting tower 4; the bottom of the reactor 6 is connected with the top of the flash tank 5; a tower kettle feed inlet of the lightness-removing tower 7 is connected with the top of the reactor 6; a tower kettle feed inlet of the motorized tower 8 is connected with the bottom of the light component removal tower 7; the second heavy component removal tower 9 is connected with the tower top of the mobile tower 8 or a tower kettle discharge hole; the membrane separation device 10 is connected to the top of the second de-heaving column 9.
In this embodiment, in order to improve the mass transfer efficiency and enhance the corrosion resistance of the equipment, and obtain a high-purity electronic grade hydrogen chloride product with a relatively low equipment investment, the raw material rectifying tower 3, the first heavy component removal tower 4, the light component removal tower 7, the mobile tower 8 and the second heavy component removal tower 9 all adopt high-efficiency mass transfer elements and uniformly distributed liquid distributors, and in this embodiment, the high-efficiency mass transfer elements are high-efficiency BH fillers.
In this embodiment, in order to guarantee the large reflux ratio, prevent the pollution that the backwash pump probably caused to the product, further improved the purity of electronic grade hydrogen chloride end product, reduce the energy consumption, raw materials rectifying column 3, first heavy tower 4 that takes off, take off light tower 7, mobile tower 8 and second and take off the rectifying column that heavy tower 9 all adopted special tower head structure, the condenser is installed inside the top of the tower promptly, saves liquid hydrogen chloride backwash pump.
It is worth mentioning that the connection between the above components is through a pipe. In order to ensure that no scar is left on the inner wall, the pressure drop of the equipment is obviously reduced, the operation elasticity is large, and the operation safety of the equipment is improved, the pipeline, the equipment and the instrument are made of stainless steel, the valve and the connecting piece are made of corrosion-resistant 316L stainless steel, the control valve and the stop valve are made of diaphragm type structures, the pipeline and the equipment are subjected to polishing, oil removal, cleaning, passivation and other treatment, and the inner side of the welding line of the end socket is welded in a triangular butt joint mode.
It is worth proposing that in order to prevent the pollution of the engine oil to the system and improve the purity of the final product hydrogen chloride, the liquid conveying adopts liquid level difference or pressure difference without a pump, the gas compression liquefaction adopts a membrane compressor, and the membrane is a stainless steel sheet.
In order to ensure that the whole system does not have dead corners in the cleaning and replacing process and ensure the uniformity and stability of product quality, the equipment positioning and pipeline arrangement are elaborately designed, a plurality of emptying and liquid discharging ports are arranged in the system, and no material flow cecum exists in the production process.
The embodiment of the invention also discloses a method for producing the electronic grade hydrogen chloride by using the production device, which comprises the following steps:
s1, taking the byproduct hydrogen chloride or synthetic hydrogen chloride with the purity of 97% as a raw material, feeding the raw material into an adsorption tower 1, cooling the adsorption outlet gas, and feeding the cooled adsorption outlet gas into a raw material rectifying tower 3 for primary impurity separation;
in the step, in order to avoid pollution caused by raw material canning and transportation, a byproduct hydrogen chloride or synthetic hydrogen chloride is directly introduced into the adsorption tower 1 from a storage tank through a seamless steel pipe as a raw material;
in this step, the adsorption medium in the adsorption tower 1 is titanium dioxide or activated carbon or acidic resin or activated alumina or silica gel.
S2, feeding the tower bottom stream of the raw material rectifying tower 3 into a first de-heavy tower 4, and obtaining 1.0N-4.0N chemical pure hydrogen chloride at the tower top;
s3, enabling the tower top product of the first de-weighting tower 4 to enter a flash tank 5 to remove moisture;
s4, introducing the gas phase evaporated by the flash tank 5 into the reactor 6, filling a catalyst into the reactor 6, carrying out catalytic reaction, and removing C2Unsaturated hydrocarbons, which step enhances the catalytic removal of C2The efficiency of unsaturated hydrocarbon improves the product purity of the final electronic grade hydrogen chloride.
S5, the product in the reactor 6 enters a light component removing tower 7 to further remove light component impurity N2、O2、Ar；
S6, feeding the material liquid in the tower bottom of the light component removal tower 7 into a mobile tower 8 to further remove light component impurities or heavy component impurities;
in the step, in order to adjust according to the actual production working condition and improve the operation flexibility of the whole process, the working mode of the mobile tower 8 is adjusted according to the discharge composition of the light component removal tower 7.
S7, the produced liquid of the mobile tower 8 finally enters a second heavy component removal tower 9 to further remove heavy component impurities;
s8, feeding the tower top product of the second de-heavy tower 9 into a membrane separation device 10, and obtaining a 5.0N-10.0N electronic grade hydrogen chloride product at an outlet.
In this step, the membrane module of the membrane separation device 10 is in a plate-and-frame type or a tubular type or a spiral wound type or a hollow fiber type.
According to the production device and the method for producing electronic grade hydrogen chloride by using byproduct hydrogen chloride or synthetic hydrogen chloride, the product at the outlet of the device is calculated according to the design and analyzed, wherein the impurity only contains C2Hx、H2O and N2And the contents are all below 0.1ppm, and the steel bottle is basically free of metal ions, but a trace amount of N adheres to the wall of the steel bottle after treatment2And H2O, and impurities accumulated by the reuse of the steel cylinder, so that the total content of hydrocarbons in the bottled product is about 0.4ppm, H2O about 0.8ppm, N2About 0.3ppm, and at the same time, there is a trace amount of corrosion due to the influence of air on the cylinder valve outlet, resulting in about 0.1ppm fe in the gas actually used. The composition of the final electronic grade hydrogen chloride product obtained after the implementation is detailed in table 1:
| stream of molten metal | 5 | |
| Purity of hydrogen chloride (volume fraction)/10 -2 | ≥ | 99.999 |
| Oxygen + argon (O)2+ Ar) content (volume fraction)/10-6 | ＜ | 0.5 |
| Nitrogen (N)2) Content (volume fraction)/10-6 | ＜ | 2 |
| Carbon dioxide (CO)2) Content (volume fraction)/10-6 | ＜ | 1 |
| Carbon monoxide (CO) content (volume fraction)/10-6 | ＜ | 0.5 |
| Hydrocarbons (CH)4+C2H2) Content (volume fraction)/10-6 | ＜ | 0.5 |
| Water content (H)20) Content (volume fraction)/10-6 | ＜ | 0.5 |
| Iron (Fe) content (mg/L) | ≤ | 0.1 |
| Other metal elements (manganese, cobalt, zinc, copper, chromium, iron, cobalt, iron, manganese, zinc, copper, chromium, manganese, zinc, manganese, zinc, chromium, manganese, zinc, manganese, chromium, manganese, chromium, manganese, chromium, manganese,Nickel) content (mg/L) | ≤ | 0.1 |
TABLE 1
Parameters such as gas flow velocity, liquid flow density and the like in the lightness-removing column are obtained through ASPEN simulation calculation and hydromechanics design calculation, and the column diameter is further obtained through calculation, so that the rectification column can be completely and stably operated after being reasonably designed and when the hydromechanics conditions are met, the separation efficiency of the column is high, and the structural parameters and the hydromechanics calculation results of the lightness-removing column are shown in a table 2:
| structural parameter I | Upper section | Lower segment |
| Packing pattern | BHS II | BHS II |
| Height m of filler | 28 | 40 |
| Inner diameter m of tower | 2.4 | 1.6 |
| Tower internals, cover | 1 | 1 |
| Gas-liquid load | ||
| Vapor phase load m3/hr | 1748 | 1012 |
| Density of vapor phase kg/m3 | 2.4 | 2.4 |
| Liquid phase load m3/hr | 3.4 | 3.16 |
| Density of liquid phase kg/m3 | 1182 | 1182 |
| Hydraulic data | ||
| Empty tower gas velocity m/s | 0.43 | 0.56 |
| Kinetic energy factor of empty tower | 2.68 | 3.48 |
| Intensity of liquid flow, m3/m2h | 6.68 | 6.25 |
| Pressure drop KPa | ＜6 | ＜6 |
TABLE 2
The calculation shows that the designed high-efficiency packing lightness-removing tower with the diameter of 2400mm and the packing of 68 meters is used for rectifying and removing the light component N in the mixed gas2、O2、Ar、CH4And the data are in the normal range, the pressure drop of the tower is low, the tower is well operated, and the operation flexibility is high.
Parameters such as gas flow velocity, liquid flow density and the like in the de-heavy tower are obtained through ASPEN simulation calculation and fluid mechanics design calculation, and tower diameter is further obtained through calculation, so that the rectifying tower can be completely and stably operated after being reasonably designed and when fluid mechanics conditions are met, and the separation efficiency of the tower is high. The structural parameters and hydrodynamics calculations for the de-heaving column are shown in table 3:
| structural parameter I | |
| Type of packing | BHS II |
| Height m of the filler | 80 |
| Inner diameter m of tower | 4.8 |
| Tower internals, cover | 1 |
| Gas-liquid load | |
| Vapor phase load m3/hr | 10832 |
| Density of vapor phase kg/m3 | 2.4 |
| Liquid phase load m3/hr | 20.96 |
| Liquid phase density kg/m3 | 1182 |
| Hydraulic data | |
| Empty tower gas velocity m/s | 0.67 |
| Kinetic energy factor of empty tower | 4.12 |
| Intensity of liquid flow, m3/m2h | 10.4 |
| Pressure drop KPa | ＜6 |
TABLE 3
The calculation shows that the designed efficient packing de-heavy tower with the diameter of 4800mm and the packing of 80 meters is used for rectifying and removing heavy components H in mixed gas2O, etc., the data are all within the normal range, and the pressure drop of the column is low, indicating that the column is operating well and has great operating flexibility.
According to the detection and simulation results in tables 1-3, the invention can produce and recover hydrogen chloride or purify the synthesized hydrogen chloride to the level of 99.999% -99.99999999% (5N-10N grade).
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (7)
1. The production device for manufacturing the electronic-grade hydrogen chloride is characterized by comprising an adsorption tower, a cooler, a raw material rectifying tower, a first heavy component removal tower, a flash tank, a reactor, a light component removal tower, a maneuvering tower, a second heavy component removal tower and a membrane separation device which are sequentially connected through pipelines.
2. The production device for producing the electronic grade hydrogen chloride according to claim 1, wherein the top outlet of the adsorption tower is connected with the bottom feed inlet of the raw material rectifying tower through the cooler; a tower kettle feed inlet of the first de-heavy tower is connected with the bottom of the raw material rectifying tower; the inlet of the flash tank is connected with the top of the first de-heavy tower; the bottom of the reactor is connected with the top of the flash tank; a tower kettle feed inlet of the lightness-removing tower is connected with the top of the reactor; a tower kettle feed inlet of the motorized tower is connected with the bottom of the light component removal tower; the second heavy component removal tower is connected with the tower top of the mobile tower or a tower kettle discharge hole; the membrane separation device is connected with the top of the second de-heavy tower.
3. The production device for producing electronic-grade hydrogen chloride according to claim 1 or 2, wherein the raw material rectification column, the first heavy component removal column, the light component removal column, the motorized column and the second heavy component removal column all use high-efficiency mass transfer elements, and the high-efficiency mass transfer elements are random packing or regular packing or high-efficiency BH packing.
4. A process for manufacturing a production plant for electronic grade hydrogen chloride according to claim 1 or 2, characterized by comprising the following steps:
s1, taking the byproduct hydrogen chloride or synthetic hydrogen chloride with the purity of 97% as a raw material, feeding the raw material into an adsorption tower, cooling the adsorption outlet gas, and feeding the cooled adsorption outlet gas into a raw material rectifying tower for primary impurity separation;
s2, feeding the tower bottom stream of the raw material rectifying tower into a first de-heavy tower to obtain 1.0N-4.0N chemical pure hydrogen chloride at the tower top;
s3, enabling the tower top product of the first de-heavy tower to enter a flash drum to remove moisture;
s4, feeding the gas phase evaporated from the flash tank into a reactor for catalytic reaction, and removing C2An unsaturated hydrocarbon;
s5, the product in the reactor enters a light component removal tower to further remove light component impurity N2、O2、Ar；
S6, feeding the tower bottom liquid of the light component removal tower into a mobile tower to further remove light component impurities or heavy component impurities;
s7, enabling the produced liquid of the mobile tower to finally enter a second heavy component removal tower to further remove heavy component impurities;
and S8, feeding the tower top product of the second de-heavy tower into a membrane separation device, and outputting a 5.0N-10.0N electronic grade hydrogen chloride product at an outlet.
5. The method as claimed in claim 4, wherein the adsorption medium in the adsorption tower is titanium dioxide or activated carbon or acidic resin or activated alumina or silica gel.
6. The process according to claim 4, wherein the membrane module of the membrane separation device is in a plate-and-frame or tubular or spiral wound or hollow fiber form.
7. The method of claim 4, wherein the light component impurities comprise C2Unsaturated hydrocarbon, N2、O2Ar and CH4(ii) a The heavy component impurities comprise H2O。
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115006883A (en) * | 2022-08-04 | 2022-09-06 | 北京化工大学 | Production system, production method and application of general high-purity chemicals |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4222997A (en) * | 1979-03-09 | 1980-09-16 | Voss Steel Corporation | Method of recovering hydrochloric acid from spent hydrochloric acid pickle waste |
| CN1511780A (en) * | 2002-12-31 | 2004-07-14 | 北京华宇同方化工科技开发有限公司 | Process for preparing electronic grade hydrogen chloride |
| JP2004345884A (en) * | 2003-05-21 | 2004-12-09 | Mitsubishi Chemicals Corp | High-purity hydrogen chloride and its production method |
| CN102826512A (en) * | 2011-06-16 | 2012-12-19 | 跨特株式会社 | Manufacturing method and apparatus of high-purity hydrogen chloride |
| CN103387211A (en) * | 2013-08-09 | 2013-11-13 | 杭州电化集团有限公司 | Method for preparing electronic grade high-purity hydrogen chloride from industrially synthesized hydrogen chloride |
| WO2021117610A1 (en) * | 2019-12-09 | 2021-06-17 | 株式会社トクヤマ | Production method for high-purity hydrogen chloride gas |
| CN113247862A (en) * | 2021-06-18 | 2021-08-13 | 湖北和远气体股份有限公司 | High-purity electronic-grade hydrogen chloride production device and process |
| CN113321184A (en) * | 2021-06-18 | 2021-08-31 | 湖北和远气体股份有限公司 | High-purity electronic grade chlorine gas purification production device and process thereof |
-
2022
- 2022-05-18 CN CN202210536811.8A patent/CN114634163B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4222997A (en) * | 1979-03-09 | 1980-09-16 | Voss Steel Corporation | Method of recovering hydrochloric acid from spent hydrochloric acid pickle waste |
| CN1511780A (en) * | 2002-12-31 | 2004-07-14 | 北京华宇同方化工科技开发有限公司 | Process for preparing electronic grade hydrogen chloride |
| JP2004345884A (en) * | 2003-05-21 | 2004-12-09 | Mitsubishi Chemicals Corp | High-purity hydrogen chloride and its production method |
| CN102826512A (en) * | 2011-06-16 | 2012-12-19 | 跨特株式会社 | Manufacturing method and apparatus of high-purity hydrogen chloride |
| CN103387211A (en) * | 2013-08-09 | 2013-11-13 | 杭州电化集团有限公司 | Method for preparing electronic grade high-purity hydrogen chloride from industrially synthesized hydrogen chloride |
| WO2021117610A1 (en) * | 2019-12-09 | 2021-06-17 | 株式会社トクヤマ | Production method for high-purity hydrogen chloride gas |
| CN113247862A (en) * | 2021-06-18 | 2021-08-13 | 湖北和远气体股份有限公司 | High-purity electronic-grade hydrogen chloride production device and process |
| CN113321184A (en) * | 2021-06-18 | 2021-08-31 | 湖北和远气体股份有限公司 | High-purity electronic grade chlorine gas purification production device and process thereof |
Non-Patent Citations (1)
| Title |
|---|
| 曾晓国等: "电子级氯化氢精制工艺的研究进展", 《低温与特气》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115006883A (en) * | 2022-08-04 | 2022-09-06 | 北京化工大学 | Production system, production method and application of general high-purity chemicals |
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