CN114624636A

CN114624636A - Electron beam control coil magnetic field detection system and detection method thereof

Info

Publication number: CN114624636A
Application number: CN202011460582.3A
Authority: CN
Inventors: 成成; 张帆; 高学林; 贾子朝; 郭志伟
Original assignee: Research Institute of Physical and Chemical Engineering of Nuclear Industry
Current assignee: Research Institute of Physical and Chemical Engineering of Nuclear Industry
Priority date: 2020-12-11
Filing date: 2020-12-11
Publication date: 2022-06-14

Abstract

The invention discloses a magnetic field detection system of an electron beam control coil and a detection method thereof, wherein the detection system comprises a nonmagnetic optical platform, the electron beam control coil, a multidimensional electric control displacement module arranged on the nonmagnetic optical platform, a magnetic field measurement sensor which is driven by the multidimensional electric control displacement module to move in a magnetic field generated by the electron beam control coil, and a test controller in communication connection with the magnetic field measurement sensor, and the detection system utilizes a magnetic field measurement device and an automatic electric control displacement system and combines a main control module to automatically scan magnetic fields in different shape areas to obtain more comprehensive magnetic field measurement data and a magnetic field space distribution map.

Description

Electron beam control coil magnetic field detection system and detection method thereof

Technical Field

The invention relates to the technical field of coil magnetic field measurement, in particular to a magnetic field detection system of an electron beam control coil and a detection method thereof.

Background

The electron beam generating device is a high-performance heating device, the electron beam is generally required to be transmitted in a long distance after being emitted, electrons in the electron beam are negatively charged, and mutual repulsion force can enable the electron beam in the transmission process to be rapidly dispersed, so that the electron beam is intercepted by a metal component to cause heat transfer, and certain harm is caused to a system. In order to obtain a high quality electron beam, the electron beam needs to be confined during its transport.

The focusing magnetic field coil is an important way to realize stable transmission of high-quality electron beams, and the performance of the focusing magnetic field coil determines the focusing performance and the energy stability of electrons. The scanning coil has the working principle that the electron beams are controllably deflected under the dual actions of the electric field and the magnetic field by utilizing the deflection action of the magnetic field on the electrons. Therefore, the magnetic field characteristic test analysis of the electron beam control magnetic field coil (focusing coil and scanning coil) is beneficial to adjusting the electron beam energy system and providing a judgment basis for the consistency of the subsequent coil magnetic field.

At present, a magnetic field detection means of a coil mainly adopts a gaussmeter made by a Hall effect to test, and a mode of manually moving a Hall probe is utilized to test magnetic field values inside a focusing coil and a scanning coil, but the magnetic field values are limited by the problems of positioning precision and testing efficiency of a test point.

Disclosure of Invention

The invention aims to provide a magnetic field detection system for an electron beam control coil, aiming at the problem that the overall magnetic field distribution condition in the coil cannot be accurately analyzed in the prior art.

Another aspect of the invention is to provide a detection method of the electron beam control coil magnetic field detection system.

The technical scheme adopted for realizing the purpose of the invention is as follows:

the utility model provides an electron beam control coil magnetic field detecting system, includes no magnetism optical platform, electron beam control coil, set up in the automatically controlled displacement module of multidimension on no magnetism optical platform, receive the automatically controlled displacement module drive of multidimension is in the magnetic field that electron beam control coil produced removes magnetic field measurement sensor and with the test controller of magnetic field measurement sensor communication connection, wherein:

the multi-dimensional electronic control displacement module comprises a five-dimensional electronic control displacement platform and a motor controller for controlling the movement of each motor in the five-dimensional electronic control displacement platform, the five-dimensional electronic control displacement platform is fixedly installed on a nonmagnetic optical platform and comprises a drive magnetic field measuring sensor, a three-dimensional electronic control translation table and a drive which perform X-axis, Y-axis and Z-axis three-dimensional linear motion under a Cartesian coordinate system, the magnetic field measuring sensor rotates around a Z-axis electric control rotation table W shaft and adjusts under the Cartesian coordinate system, the magnetic field measuring sensor is fixed on a table top of the U shaft of the electronic control translation table.

In the technical scheme, the three-dimensional electronic control translation stage comprises an electronic control translation stage X shaft, an electronic control translation stage Y shaft and an electronic control translation stage Z shaft, the electronic control translation stage W shaft is fixed on the table top of the electronic control translation stage Z shaft, the electronic control translation stage U shaft is installed on the table top of the electronic control translation stage W shaft, and the magnetic field measurement sensor is fixed on the table top of the electronic control translation stage U shaft through the clamp.

In the above technical solution, the motor controller includes a motion control main board and a step motor driver, and the motion control main board is respectively connected with the control module and the step motor driver in a communication manner.

In the technical scheme, the electron beam control coil is installed on the table top of the non-magnetic optical platform through the positioning tool and is driven by stable DC current output by the DC stabilized power supply.

In the above technical scheme, the magnetic field measurement sensor is a three-axis hall probe, and the test controller is a three-axis gaussmeter.

In the above technical solution, the system for detecting the magnetic field of the electron beam control coil further comprises a main control module, and the main control module is respectively in communication connection with the motor controller and the test controller.

In the above technical solution, the electron beam control coil includes a magnetic field coil and a magnetic field coil power supply electrically connected thereto, and the magnetic field coil includes a focusing coil and a scanning coil.

In the above technical scheme, automatically controlled translation platform X axle includes first step motor, first bottom plate, first transmission lead screw, first transmission guide rail and first slider, and two first transmission guide rails are fixed in on the first bottom plate, first bottom plate is fixed in on the nonmagnetic optical platform, first step motor pass through the shaft coupling with first transmission lead screw is connected in order to drive first transmission lead screw rotatory, first slider passes through the ball and constitutes drive mechanism with first transmission lead screw, first slider freely slides on first transmission guide rail under the drive of first transmission lead screw to realize the translational motion along horizontal plane X axle direction under the cartesian coordinate system.

In the technical scheme, the Y axis of the electric control translation stage comprises a second stepping motor, a second bottom plate, a second transmission lead screw, a second transmission guide rail and a second sliding block, wherein the two second transmission guide rails are fixed on the second bottom plate, the second bottom plate is fixed on the first sliding block, the second stepping motor is connected with the second transmission lead screw through a coupler so as to drive the second transmission lead screw to rotate, the second sliding block and the second transmission lead screw form a transmission mechanism through balls, and the second sliding block freely slides on the second transmission guide rail under the drive of the second transmission lead screw so as to realize the translation motion along the Y axis direction of the horizontal plane under a Cartesian coordinate system.

In the technical scheme, the Z shaft of the electric control translation table comprises a third bottom plate, four supporting column transmission guide rails, a third transmission screw, a third sliding block, a top plate and a third stepping motor, wherein the four supporting column transmission guide rails are fixed between the third bottom plate and the top plate, the third bottom plate is fixed on the second sliding block, the third stepping motor is connected with the third transmission screw through a coupler so as to drive the third transmission screw to rotate, the third sliding block forms a transmission mechanism with the third transmission screw through balls, and the third sliding block freely slides on the four supporting column transmission guide rails under the driving of the third transmission screw, so that the translation motion along the Z shaft direction of the vertical plane under a Cartesian coordinate system is realized.

In the above technical scheme, the W shaft of the electric control rotating platform comprises a fourth stepping motor, a turbine worm transmission mechanism and a rotating table top, a positioning surface of the turbine worm transmission mechanism is fixed on the third sliding block, and the fourth stepping motor drives a worm in the turbine worm transmission mechanism to rotate through a coupler, so as to drive the rotating table top connected with a turbine of the turbine worm transmission mechanism to rotate, thereby realizing the rotating motion around the Z axis direction of the vertical plane under the cartesian coordinate system.

In the above technical scheme, the electronic control translation table U shaft includes a fifth stepping motor, a fifth bottom plate, a fifth transmission screw, a fifth transmission guide rail and a fifth slider, two fifth transmission guide rails are fixed on the fifth bottom plate, the fifth bottom plate is fixed on the rotary table top, the fifth stepping motor is connected with the fifth transmission screw through a coupler to drive the fifth transmission screw to rotate, the fifth slider forms a transmission mechanism with the fifth transmission screw through balls, and the fifth slider slides freely on the fifth transmission guide rail under the drive of the fifth transmission screw.

In the above technical scheme, when the fifth slider is in the U-axis zero position, the fixture axis for fixing the three-axis hall probe coincides with the W-axis rotation axis of the electrically controlled rotary table, and when the fifth slider is in the U-axis position, the three-axis hall probe fixture can use the W-axis rotation axis as the center of a circle, use the length U as the radius, and perform circular motion under the drive of the W-axis.

In another aspect of the present invention, the method for scanning the magnetic field distribution by the electron beam control coil magnetic field detection system is characterized by comprising the following steps:

step 1, connecting each motor in the five-dimensional electric control displacement platform to the motor controller, and connecting the magnetic field measurement sensor to the test controller;

step 2, electrifying the test controller and the motor controller for work;

step 3, operating the master control module, and establishing serial port communication connection between the master control module and the test controller as well as between the master control module and the motor controller;

step 4, respectively controlling an X axis of the electric control translation stage, a Y axis of the electric control translation stage and a Z axis of the electric control translation stage to move the magnetic field measurement sensor to the initial position of the measured electron beam control coil through the main control module;

and 5, selecting a proper control mode according to the required scanning dimension:

(1) if two-dimensional scanning is carried out, a scanning control mode of a line is entered, a motion axis is selected according to a scanning shape, and if linear scanning is required, the operation parameters of an X axis of the electric control translation stage or a Y axis of the electric control translation stage or a Z axis of the electric control translation stage are set; if curve scanning is needed, setting operation parameters of a W shaft of the electric control rotating platform;

(2) if three-dimensional scanning is carried out, a scanning control mode of an entry surface is selected, a motion axis combination form is selected according to a scanning shape, and if rectangular surface scanning is required, operation parameters of an X axis of an electric control translation table and a Y axis of the electric control translation table, or the X axis of the electric control translation table and a Z axis of the electric control translation table, or the Y axis of the electric control translation table and the Z axis of the electric control translation table are set; if circular plane scanning is required, setting operation parameters of a W shaft of the electric control rotating platform and a U shaft of the electric control translation platform; if the cylindrical surface needs to be scanned, setting operation parameters of a W axis of the electric control rotating platform and a Z axis of the electric control translation platform;

and 6, after the parameter setting in the step 5 is finished, executing an automatic scanning process: the main control module can automatically control the five-dimensional electric control displacement platform to execute a scanning track according to set parameters, and automatically stores displacement coordinates and corresponding magnetic field data in the scanning process;

and 7, finishing the scanning process, and performing data processing by the main control module:

(1) in a data drawing unit of the main control module, performing data drawing operation according to scanning dimensions, and performing two-dimensional data drawing if scanning of lines is performed; if the scanning of the surface is carried out, three-dimensional data drawing is carried out, and the drawing operation can represent the variation trend of the magnetic field along with the displacement and can also represent the three-dimensional distribution condition of the magnetic field in the space;

(2) in a data viewing unit of the main control module, test data can be exported to an Excel table for data storage and further analysis;

and 8, after the test process is finished, selecting the next operation as required:

(1) if the next test is needed, returning to the step 4, and retesting after adjusting the initial position of the magnetic field measurement sensor;

(2) if no other test is needed, the control module is closed, the test controller and the motor controller are powered off, and the test is finished.

Compared with the prior art, the invention has the beneficial effects that:

1. the detection system utilizes the magnetic field measurement equipment and the automatic electric control displacement system, combines the upper computer control software, and performs automatic magnetic field scanning on different shapes of areas to obtain more comprehensive magnetic field measurement data and magnetic field space distribution maps, provides an important theoretical basis for solving the optimization of an electron beam energy system, and has typical engineering practice guiding significance.

2. The multidimensional electric control displacement system adopted by the invention has four translation automaticity and one rotation freedom degree in space, on one hand, the scanning range is enriched, and the scanning of a straight line, a rectangular area, a circular area and a cylindrical area can be realized; on the other hand, through the model selection of mechanical structure parts, the ball screw and the worm gear speed reducer are matched for use, so that the positioning precision in the scanning process is improved, and the accuracy of test data is ensured.

3. The gaussmeter adopted by the invention is a high-precision high-sensitivity triaxial gaussmeter, on one hand, the magnetic field intensity in three directions of a certain point in space can be measured simultaneously, and compared with a single-axis gaussmeter which can only measure the magnetic field intensity in one direction at a time, the testing efficiency is improved; on the other hand, the triaxial Hall probe is small in size, the diameter is only 2mm, the improvement of the flexibility of testing in a narrow space range is facilitated, the active area is small, the diameter is only 0.15mm, and the sensitivity of space magnetic field measurement is facilitated.

4. The main control module (control software in the upper computer) adopted by the invention has the functions of magnetic field data acquisition and displacement control, can realize automatic control of the scanning process, does not need manual supervision, and improves the testing efficiency; the automatic management of the test data can realize the functions of real-time display, data drawing, data storage, data export and the like of the data, and is convenient for the analysis of the test data in the later period.

Drawings

FIG. 1 is a schematic structural diagram of a magnetic field detection system of an electron beam control coil;

fig. 2 is a flow chart of the automatic detection of the magnetic field of the electron beam control coil.

In the figure: 1-a non-magnetic optical platform, 2-an electrically controlled translation stage X-axis stepping motor, 3-an electrically controlled translation stage X-axis base plate, 4-an electrically controlled translation stage X-axis drive screw, 5-an electrically controlled translation stage X-axis drive guide rail, 6-an electrically controlled translation stage X-axis slider, 7-an electrically controlled translation stage Y-axis base plate, 8-an electrically controlled translation stage Y-axis drive guide rail, 9-an electrically controlled translation stage Y-axis slider, 10-an electrically controlled translation stage Y-axis drive screw, 11-an electrically controlled translation stage Y-axis stepping motor, 12-an electrically controlled translation stage Z-axis base plate, 13-an electrically controlled translation stage Z-axis four-column drive guide rail, 14-an electrically controlled translation stage Z-axis drive screw, 15-an electrically controlled translation stage Z-axis slider, 16-an electrically controlled translation stage Z-axis top plate, 17-an electrically controlled translation stage Z-axis stepping motor, 18-an electrically controlled translation stage W-axis stepping motor, 19-an electric control rotary table W-axis turbine worm transmission mechanism, 20-an electric control rotary table W-axis rotary table top, 21-an electric control translation table U-axis stepping motor, 22-an electric control translation table U-axis base plate, 23-an electric control translation table U-axis transmission lead screw, 24-an electric control translation table U-axis transmission guide rail, 25-an electric control translation table U-axis slide block, 26-a three-axis Hall probe clamp, 27-a three-axis Hall probe and 28-an electron beam control coil.

Detailed Description

The invention is described in further detail below with reference to the figures and specific examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

Example 1

The utility model provides an electron beam control coil magnetic field detecting system, includes no magnetism optical platform 1, electron beam control coil, set up in no magnetism optical platform 1 is last multidimensional automatically controlled displacement module, receives multidimensional automatically controlled displacement module drive is in the magnetic field removal that electron beam control coil produced magnetic field measurement sensor and with the test controller of magnetic field measurement sensor communication connection, wherein:

The motor controller controls the five-axis movement in the five-dimensional electric control displacement platform, so that the movement track of the magnetic field measurement sensor is regulated, the magnetic field measurement sensor transmits a sensed signal to the test controller in the movement process, and the test controller calculates output data.

Preferably, the three-dimensional electric control translation table comprises an electric control translation table X shaft, an electric control translation table Y shaft and an electric control translation table Z shaft, the electric control rotation table W shaft is fixed on the table top of the electric control translation table Z shaft, the electric control translation table U shaft is installed on the table top of the electric control rotation table W shaft, and the magnetic field measurement sensor is fixed on the table top of the electric control translation table U shaft through the clamp 26.

Preferably, the motor controller comprises a motion control mainboard and a stepping motor driver, and the motion control mainboard is respectively in communication connection with the upper computer and the stepping motor driver. The motion control mainboard has the serial port communication function with host computer software, the motion control mainboard sends appointed number PWM pulse to after receiving the control command of host computer step motor driver to it is rotatory to drive five epaxial step motor, thereby drives translation platform among the five-dimensional automatically controlled displacement platform removes or the revolving stage is rotatory.

Preferably, the electron beam control coil 28 is mounted on the table top of the non-magnetic optical platform 1 through a positioning tool, and is driven by a stable DC current output by a DC regulated power supply to generate a magnetic field.

Preferably, the magnetic field measuring sensor is a three-axis hall probe, and the test controller is a three-axis gaussmeter. The three-axis Hall probe is made by adopting a Hall effect principle, comprises three Hall chips which are orthogonal in space, and can simultaneously measure the magnetic fields in three directions at a certain point in space. The three-axis Hall probe serving as a magnetic field measurement sensor is fixed on a U-axis table top in the five-dimensional electric control displacement platform through a clamp and is placed inside the magnetic field coil. The three-axis gaussmeter provides stable working current for the three-axis Hall probe, collects and analyzes Hall voltage signals generated by the three-axis Hall probe in a magnetic field, converts the Hall voltage signals into magnetic field signals, and displays the readings on the front panel liquid crystal screen.

Specifically, the three-axis hall probe 27 and the three-axis gaussmeter are connected through a shielding cable, the three-axis gaussmeter provides 2-10 mA working current for the three hall chips in a constant current mode, and the three hall chips of the three-axis hall probe 27 generate hall voltage which is linearly related to the magnetic field intensity through the hall effect in the magnetic field; the gaussmeter amplifying and filtering circuit amplifies and filters an original voltage signal output by the Hall probe, and the original voltage signal is converted into a digital signal through the AD acquisition circuit and enters the CPU; the CPU calculates magnetic field intensity data measured by each channel according to the calibration data (magnetic field-voltage corresponding relation) of each Hall chip, and uploads the magnetic field data and the frequency data of the three channels to an upper computer through a serial port.

Preferably, the automatic detection system further comprises a main control module, and the main control module is in communication connection with the motor controller and the test controller respectively. The motor controller feeds back real-time position coordinates of the five-dimensional electric control displacement platform to the main control module for display and storage of the main control module, the main control module controls the five-dimensional electric control displacement platform to drive the three-axis Hall probe to perform automatic scanning movement according to a path set by a user, magnetic field data uploaded by the three-axis gaussmeter are collected through a serial port in the process, the magnetic field data and coordinate data of the five-dimensional electric control displacement platform are combined to be stored and displayed, and operations such as two-dimensional drawing and three-dimensional drawing are performed by using the magnetic field data and the coordinate data of the five-dimensional electric control displacement platform.

Preferably, the electron beam control coil includes a magnetic field coil and a magnetic field coil power supply electrically connected to the magnetic field coil, and the magnetic field coil includes a focusing coil and a scanning coil. The magnetic field coil power supply provides stable working current for the focusing coil and the scanning coil, and the driving coil generates a magnetic field. The scanning modes of the focusing coil and the scanning coil are scanning according to a circular track, finally collected data are processed by different methods, and the focusing coil mainly focuses on the consistency of numerical values of each point, specifically the proportion of fluctuation and absolute value of the magnetic induction intensity. The scan coil is mainly focused on the angle between the maximum of the magnetic induction and 0, and the difference is compared with 90 degrees.

Example 2

Preferably, the X-axis of the electric control translation stage comprises a first stepping motor 2, a first bottom plate 3, a first transmission screw 4, a first transmission guide rail 5 and a first sliding block 6, wherein the two first transmission guide rails 5 are fixed on the first bottom plate 3, the first bottom plate 3 is fixed on the nonmagnetic optical platform 1, the first stepping motor 2 is connected with the first transmission screw 4 through a coupler so as to drive the first transmission screw 4 to rotate, the first sliding block 6 forms a transmission mechanism with the first transmission screw 4 through a ball, and the first sliding block 6 freely slides on the first transmission guide rail 5 under the drive of the first transmission screw 4 so as to realize the translation motion along the X-axis direction of the horizontal plane under the cartesian coordinate system. The first bottom plate 3 of the X axis of the electric control translation table is fixedly connected with the table top of the non-magnetic optical platform 1 through screws.

Automatically controlled translation platform Y axle includes second step motor 11, second bottom plate 7, second drive screw 10, second drive rail 8 and second slider 9, and two second drive rail 8 are fixed in on the second bottom plate 7, second bottom plate 7 is fixed in on the first slider 6, second step motor 11 passes through the shaft coupling and is connected in order to drive the rotation of second drive screw 10 with second drive screw 10, second slider 9 passes through ball and second drive screw 10 constitution drive mechanism, second slider 9 freely slides on second drive rail 8 under the drive of second drive screw 10 to realize the translational motion along horizontal plane Y axle direction under cartesian coordinate system. The second bottom plate 7 of the Y axis of the electric control translation stage is fixedly connected with the table surface of the first sliding block 6 of the X axis of the electric control translation stage through screws.

The Z-axis of the electric control translation table comprises a third bottom plate 12, four supporting column transmission guide rails 13, a third transmission lead screw 14, a third sliding block 15, a top plate 16 and a third stepping motor 17, wherein the four supporting column transmission guide rails 13 are fixed between the third bottom plate 12 and the top plate 16, the third bottom plate 12 is fixed on the second sliding block 9, the third stepping motor 17 is connected with the third transmission lead screw 14 through a coupler to drive the third transmission lead screw 14 to rotate, the third sliding block 15 and the third transmission lead screw 14 form a transmission mechanism through balls, and the third sliding block 15 is driven by the third transmission lead screw 14 to freely slide on the four supporting column transmission guide rails 13, so that the translation motion along the Z-axis direction of a vertical plane under a Cartesian coordinate system is realized. And a third bottom plate 12 of the Z axis of the electric control translation table is fixedly connected with the table surface of a second sliding block 9 of the Y axis of the electric control translation table through screws.

The electric control rotating platform W shaft comprises a fourth stepping motor 18, a turbine worm transmission mechanism 19 and a rotating table top 20, a positioning surface of the turbine worm transmission mechanism 19 is fixed on the third sliding block 15, and the fourth stepping motor 18 drives a worm in the turbine worm transmission mechanism 19 to rotate through a coupler, so that the rotating table top 20 connected with a turbine of the turbine worm transmission mechanism 19 is driven to rotate, and the rotating movement around the Z-axis direction of the vertical plane under a Cartesian coordinate system is realized. And a worm gear transmission mechanism 19 of the W shaft of the electric control rotating platform is fixed on an extending arm extending out of the third sliding block 15 of the Z shaft of the electric control translation platform through a screw.

The U shaft of the electric control translation table comprises a fifth stepping motor 21, a fifth bottom plate 22, a fifth transmission lead screw 23, a fifth transmission guide rail 24 and a fifth sliding block 25, the two fifth transmission guide rails 24 are fixed on the fifth bottom plate 22, the fifth bottom plate 22 is fixed on the rotary table top 20, the fifth stepping motor 21 is connected with the fifth transmission lead screw 23 through a coupler to drive the fifth transmission lead screw 23 to rotate, the fifth sliding block 25 forms a transmission mechanism with the fifth transmission lead screw 23 through a ball, and the fifth sliding block 25 slides freely on the fifth transmission guide rail 24 under the drive of the fifth transmission lead screw 23. And a fifth bottom plate 22 of the U shaft of the electric control translation table is fixedly connected with the rotary table top 20 of the W shaft of the electric control rotary table through screws.

The fixture 26 is fixedly installed on the table top of the fifth slider 25, when the fifth slider 25 is located at the zero position of the U-axis, the axis of the fixture 26 for fixing the three-axis hall probe coincides with the W-axis rotation axis of the electrically controlled rotary table, and when the fifth slider 25 is located at the position where U is equal to U0, the three-axis hall probe fixture can perform circular motion under the driving of the W-axis by using the W-axis rotation axis as the center of circle and using the length U0 as the radius.

Example 3

As shown in fig. 2, the method for scanning the magnetic field distribution of the focusing coil and the scanning coil by the electron beam control coil magnetic field detection system is specifically as follows.

Step 1, connecting each motor in the five-dimensional electric control displacement platform to the motor controller, and connecting the magnetic field measurement sensor to the test controller

Connecting an X-axis stepping motor 2 of the electric control translation table, a Y-axis stepping motor 11 of the electric control translation table, a Z-axis stepping motor 17 of the electric control translation table, a W-axis stepping motor 18 of the electric control rotation table and a U-axis stepping motor 21 of the electric control translation table to a motor controller through shielded cables; the magnetic field measurement sensor (three-axis hall probe 27) is connected to the test controller (three-axis gaussmeter) by a shielded cable.

And 2, electrifying the test controller (triaxial gauss meter) and the motor controller to work.

And 3, operating control software of a main control module (an upper computer) and establishing serial port communication connection between the software and the test controller (the three-axis gaussmeter) and the motor controller.

And 4, operating control software of the main control module (an upper computer), and moving the magnetic field measurement sensor (the three-axis Hall probe 27) to the initial position of the coil to be measured by respectively controlling the X axis, the Y axis and the Z axis of the electric control translation stage.

(2) if three-dimensional scanning is carried out, a scanning control mode of an entry surface is selected, a motion axis combination form is selected according to a scanning shape, and if rectangular surface scanning is required, operation parameters of an X axis of an electric control translation table and a Y axis (horizontal plane) of the electric control translation table, or the X axis of the electric control translation table and a Z axis (vertical plane) of the electric control translation table, or the Y axis of the electric control translation table and the Z axis (vertical plane) of the electric control translation table are set; if circular plane scanning is required, setting operation parameters of a W shaft of the electric control rotating platform and a U shaft of the electric control translation platform; and if the cylindrical surface needs to be scanned, setting the operation parameters of the W shaft of the electric control rotating platform and the Z shaft of the electric control translation platform.

And 6, executing an automatic scanning process after the scanning parameter setting is finished. The main control module (upper computer) can automatically control the five-dimensional electric control displacement platform to execute the scanning track according to the set parameters, and automatically stores the displacement coordinates and the corresponding magnetic field data in the scanning process.

And 7, after the scanning process is finished, performing a software data management interface of the upper computer:

(1) in the data drawing unit, performing data drawing operation according to scanning dimensions, and performing two-dimensional data drawing if scanning of lines is performed; if the surface is scanned, three-dimensional data drawing is performed. The drawing operation can represent the variation trend of the magnetic field along with the displacement and can also represent the three-dimensional distribution condition of the magnetic field in the space;

(2) in the data viewing unit, the test data can be exported into an Excel table, so that the data can be conveniently stored and further analyzed.

(1) if the next test is needed, returning to the step 4, and retesting after adjusting the initial position of the magnetic field measurement sensor (the three-axis Hall probe 27);

(2) if no other test is needed, the control module (upper computer) is closed, the test controller (three-axis gaussmeter) and the motor controller are powered off, and the test is finished.

Spatially relative terms, such as "upper," "lower," "left," "right," and the like, may be used in the embodiments for ease of description to describe one element or feature's relationship to another element or feature as illustrated in the figures. It will be understood that the spatial terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary term "lower" can encompass both an upper and a lower orientation. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

Moreover, relational terms such as "first" and "second," and the like, may be used solely to distinguish one element from another element having the same name, without necessarily requiring or implying any actual such relationship or order between such elements.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications can be made without departing from the principle of the present invention, and these modifications should also be construed as the protection scope of the present invention.

Claims

1. The utility model provides an electron beam control coil magnetic field detecting system, its characterized in that, including no magnetism optical platform, electron beam control coil, set up in no magnetism optical platform is last multidimensional automatically controlled displacement module, receive multidimensional automatically controlled displacement module drive is in the magnetic field removal that electron beam control coil produced magnetic field measurement sensor and with the test controller of magnetic field measurement sensor communication connection, wherein:

2. The electron beam control coil magnetic field detection system of claim 1, wherein the three-dimensional electrically controlled translation stage comprises an electrically controlled translation stage X-axis, an electrically controlled translation stage Y-axis and an electrically controlled translation stage Z-axis, the electrically controlled rotation stage W-axis is fixed on a table top of the electrically controlled translation stage Z-axis, the electrically controlled translation stage U-axis is mounted on a table top of the electrically controlled rotation stage W-axis, and the magnetic field measurement sensor is fixed on the table top of the electrically controlled translation stage U-axis through a clamp.

3. The system of claim 1, wherein the motor controller comprises a motion control motherboard and a stepper motor driver, and the motion control motherboard is in communication with the control module and the stepper motor driver, respectively.

4. The electron beam control coil magnetic field detection system of claim 1, wherein the electron beam control coil is mounted on the table top of the non-magnetic optical platform through a positioning tool and driven by a stable DC current output from a DC regulated power supply.

5. The electron beam control coil magnetic field sensing system of claim 1, wherein the magnetic field measuring sensor is a three-axis hall probe and the test controller is a three-axis gaussmeter.

6. The system of claim 1, further comprising a master control module, wherein the master control module is communicatively coupled to the motor controller and the test controller, respectively.

7. The electron beam control coil magnetic field sensing system of claim 1, wherein the electron beam control coil comprises a field coil and a field coil power supply electrically connected thereto, the field coil comprising a focusing coil and a scanning coil.

8. The system of claim 1, wherein the X-axis of the electrically controlled translation stage comprises a first stepper motor, a first base plate, a first transmission screw, a first transmission rail, and a first slider, wherein two first transmission rails are fixed on the first base plate, the first base plate is fixed on the non-magnetic optical platform, the first stepper motor is connected to the first transmission screw through a coupler to drive the first transmission screw to rotate, the first slider forms a transmission mechanism with the first transmission screw through a ball, and the first slider slides freely on the first transmission rails under the driving of the first transmission screw to realize the translational motion along the X-axis direction of the horizontal plane under the cartesian coordinate system.

9. The electron beam control coil magnetic field detection system according to claim 8, wherein the Y-axis of the electrically controlled translation stage includes a second stepping motor, a second bottom plate, a second transmission screw, a second transmission rail and a second slider, the two second transmission rails are fixed on the second bottom plate, the second bottom plate is fixed on the first slider, the second stepping motor is connected to the second transmission screw through a coupler to drive the second transmission screw to rotate, the second slider forms a transmission mechanism with the second transmission screw through a ball, and the second slider is driven by the second transmission screw to slide freely on the second transmission rails, so as to realize the translation motion along the Y-axis direction of the horizontal plane under the cartesian coordinate system.

10. The electron beam control coil magnetic field detection system of claim 9, wherein the Z-axis of the electrically controlled translation stage comprises a third bottom plate, four pillar transmission rails, a third transmission screw, a third slider, a top plate and a third stepping motor, the four pillar transmission rails are fixed between the third bottom plate and the top plate, the third bottom plate is fixed on the second slider, the third stepping motor is connected with the third transmission screw through a coupler to drive the third transmission screw to rotate, the third slider and the third transmission screw form a transmission mechanism through balls, and the third slider is driven by the third transmission screw to freely slide on the four pillar transmission rails, so as to realize the translation motion along the Z-axis direction of the vertical plane under the cartesian coordinate system.

11. The system of claim 10, wherein the W axis of the electrically controlled rotating platform comprises a fourth stepping motor, a worm gear transmission mechanism and a rotating platform, a positioning surface of the worm gear transmission mechanism is fixed on the third sliding block, and the fourth stepping motor drives a worm in the worm gear transmission mechanism to rotate through a coupling, so as to drive the rotating platform connected with a worm wheel of the worm gear transmission mechanism to rotate, thereby realizing a rotating motion around the Z axis of the vertical plane in a cartesian coordinate system.

12. The electron beam control coil magnetic field detection system of claim 11, wherein the U-axis of the electrically controlled translation stage includes a fifth stepping motor, a fifth bottom plate, a fifth transmission screw, a fifth transmission rail, and a fifth slider, two fifth transmission rails are fixed on the fifth bottom plate, the fifth bottom plate is fixed on the rotary table, the fifth stepping motor is connected to the fifth transmission screw through a coupler to drive the fifth transmission screw to rotate, the fifth slider forms a transmission mechanism with the fifth transmission screw through a ball, and the fifth slider slides freely on the fifth transmission rail under the driving of the fifth transmission screw.

13. The system of claim 1, wherein when the fifth slider is at the zero position of the U-axis, the axis of the fixture for fixing the three-axis hall probe coincides with the W-axis rotation axis of the electrically controlled turntable, and when the fifth slider is at the U-U position, the three-axis hall probe fixture performs a circular motion driven by the W-axis with the W-axis rotation axis as a center and the length U as a radius.

14. The method for scanning the magnetic field distribution of the electron beam control coil magnetic field detection system according to any one of claims 1 to 13, comprising the steps of:

step 2, electrifying the test controller and the motor controller for work;

(1) in a data drawing unit of the main control module, performing data drawing operation according to scanning dimensions, and performing two-dimensional data drawing if scanning of lines is performed; if the surface is scanned, three-dimensional data drawing is carried out, and the drawing operation can represent the variation trend of the magnetic field along with displacement and can also represent the three-dimensional distribution condition of the magnetic field in the space;