CN114623958B - Flexible touch sensor based on electrode array and preparation method thereof - Google Patents
Flexible touch sensor based on electrode array and preparation method thereof Download PDFInfo
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- CN114623958B CN114623958B CN202210178729.2A CN202210178729A CN114623958B CN 114623958 B CN114623958 B CN 114623958B CN 202210178729 A CN202210178729 A CN 202210178729A CN 114623958 B CN114623958 B CN 114623958B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/02—Sensing devices
- B25J19/028—Piezoresistive or piezoelectric sensing devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/26—Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload
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- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
The invention relates to a flexible touch sensor based on an electrode array and a preparation method thereof. The base is a main body structure of the touch sensor, and other parts are all installed and fixed on the base. The circuit board is a double-layer printed circuit board and is divided into a top layer and a bottom layer, wherein a plurality of excitation electrode points and sensing electrode points are distributed on the top layer, and an electronic element and a pin header communicated with the outside are welded on the bottom layer. The silica gel imitation body is a part which is contacted with an object when the touch sensor works, a sealing space is formed after the silica gel imitation body is fixed with the base through the annular pressing plate, and a circuit board is placed in the silica gel imitation body and filled with conductive liquid. The pressure sensor is used for measuring pressure change of the conductive liquid. The flexible touch sensor provided by the invention can realize information acquisition of the position and the contact force of a contact object, and has the characteristics of good flexibility, low cost and high adaptability.
Description
Technical Field
The invention belongs to the field of robot interaction, relates to a flexible touch sensor, and particularly relates to a flexible touch sensor based on an electrode array and a preparation method thereof.
Background
With the development of robot technology, the demand of robot and environment interaction is larger and larger, and touch sense is used as a sensing mode of external environment and is increasingly applied to the field of robots, so that the method has very important practical significance in various operation tasks of robots.
According to the difference of measurement principles, currently mainstream tactile sensors can be divided into piezoelectric type, capacitive type, resistive type, ultrasonic type and optical fiber type tactile sensors, and different types of tactile sensors have different characteristics and are suitable for specific application scenes, but most of the tactile sensors have poor flexibility and do not have bionic structures, and particularly in the research of the field of humanoid robots, a tactile sensor with good flexibility and excellent bionic structure is needed to be used as a part for interaction between a robot and the environment or human.
Disclosure of Invention
In view of the fact that the existing touch sensor cannot meet the requirement of flexible sensing of a robot, the invention aims to provide the flexible touch sensor based on the electrode array, which has the characteristics of good flexibility, low cost and high adaptability.
In order to achieve the above purpose, the invention adopts the following technical scheme:
a flexible tactile sensor based on an electrode array, characterized by: the circuit board is provided with a plurality of soft bulges which can be contacted with the circuit board and deform; the circuit board is provided with a plurality of electrode points contacted with the conductive liquid and a data acquisition device for measuring the liquid resistance change between the electrode points, and the circuit board between the electrode points is arranged in an insulating way; the location and magnitude of the force applied to the soft replica is determined by the change in liquid resistance at the corresponding electrode point.
Further, the electrode points comprise a plurality of excitation electrode points and sensing electrode points which are distributed in a staggered mode, and the data acquisition device comprises a data acquisition card, a reference resistor, a capacitor and an excitation source for sending out excitation signals;
all excitation electrode points are connected in parallel and then connected in series on an excitation source through a capacitor, the excitation source emits rectangular pulse excitation voltage, and the rectangular pulse excitation voltage is converted into bipolar alternating voltage through the capacitor and is loaded to the excitation electrode points;
and each sensing electrode point is connected with a reference resistor, the other end of the reference resistor is grounded, and the data acquisition card is used for acquiring the voltage scores of the reference resistors.
The invention also provides a preparation method of the flexible touch sensor, which is characterized by comprising the following steps:
and 6, calibrating pressure, namely pressing the touch sensor by using a standard force sensor, recording the indication of the standard force sensor, the voltage value of a sensing electrode point and the measured value of the pressure sensor, fitting the data by using a model, and training to obtain a calibrated function model, thereby completing the preparation of the flexible touch sensor.
The beneficial effects of the invention are as follows:
1. the contact point can be positioned rapidly through the voltage change of the sensing electrode, and the data acquisition rate can be very high along with the improvement of the performance of the data acquisition device.
2. The relationship among the voltage values of all the sensing electrodes, the measured values of the pressure sensors and the actual pressure values of the contact is fitted by using a model, and the trained model can be used for predicting the magnitude of the contact force and can reach high precision in a certain range.
3. The bionic silica gel with the hardness close to that of human skin is used, so that the sensor has bionic characteristics, and the lower layer of the bionic silica gel is filled with conductive liquid, so that the flexibility of a contact area is further increased, and the bionic silica gel can be fully contacted with various objects with different shapes.
4. The main components of the sensor are manufactured by using a 3D printing technology, rapid modification and molding are supported, the appearance of the sensor can be conveniently modified to adapt to various use scenes, and compared with other similar products, the sensor is extremely low in manufacturing cost.
Drawings
FIG. 1 is an overall outline view of a flexible tactile sensor according to the present invention;
FIG. 2 is a schematic circuit diagram of a flexible tactile sensor according to the present invention;
FIG. 3 is an exploded view of a flexible tactile sensor according to the present invention;
FIG. 4 is a cross-sectional view of a flexible tactile sensor according to the present invention;
FIG. 5 is a diagram of the lower surface of a silicone gel imitation of a flexible tactile sensor according to the present invention;
FIG. 6 is a block diagram of a base of a flexible tactile sensor according to the present invention;
FIG. 7 is a schematic diagram of a conductive fluid injection channel of a flexible tactile sensor according to the present invention;
FIG. 8 is a circuit board block diagram of a flexible tactile sensor according to the present invention;
fig. 9 is a top and bottom mold view of a silicone gel imitation of a flexible tactile sensor according to the present invention.
The device comprises a 1-base, 11-sealing grooves, 12-middle through holes, 13-mounting holes, 14-mounting grooves, 15-conducting liquid injection channels, 16-pressure measurement channels, 17-pressure sensor mounting seats, 18-conical holes, 2-silica gel imitators, 21-sealing bulges, 22-pyramid-shaped bulges, 23-semicircular section-shaped stripes, 24-round table-shaped bulges, 25-touch parts, 26-blank holders, 3-annular pressing plates, 31-penetrating holes, 4-screws, 5-pressure sensors, 6-pressing plates, 7-circuit boards, 71-bottom pins, 72-exciting electrode points, 73-sensing electrode points, 8-upper dies and 9-lower dies.
Detailed Description
In order to make the technical problems and technical solutions to be solved more clear, the following describes in detail, with reference to the accompanying drawings and examples, a flexible touch sensor based on an electrode array, which is meant to explain the present invention, but not to limit the present invention.
As shown in fig. 1 to 8, the invention provides a flexible touch sensor based on an electrode array, which at least comprises a circuit board 7 and a flexible imitation body with elasticity, wherein the flexible imitation body is arranged on the circuit board 7, conductive liquid is filled between the circuit board 7 and the flexible imitation body, and a flexible bulge capable of contacting and deforming with the circuit board 7 is arranged on the lower surface of the flexible imitation body; the circuit board 7 is provided with a plurality of electrode points contacted with conductive liquid and a data acquisition device for measuring the liquid resistance change between the electrode points, and the circuit board 7 between the electrode points is arranged in an insulating way; the location and magnitude of the force applied to the soft replica is determined by the change in liquid resistance at the corresponding electrode point.
In this embodiment, the soft imitation body is a silica gel imitation body 2 made of silica gel, and has good rebound resilience and touch feeling.
When the silica gel imitation body 2 is pressed, the soft bulge is contacted with the circuit board 7, and the soft bulge near the contact is gradually deformed along with the increase of the pressure, so that the conductive liquid is discharged to the periphery, the conductive performance near the contact is reduced, the liquid resistance is increased, and the partial pressure of the sensing electrode point 73 near the contact is reduced. According to the measured voltage change of the sensing electrode point 73 on the circuit board 7, the corresponding sensing electrode point coordinates are synthesized according to the voltage change proportion, and the contact position of the silica gel imitation body 2 with the circuit board 7 during pressing, namely the position of the upper surface contact of the silica gel imitation body 2, can be calculated.
As a preferred embodiment, referring to fig. 2 and 8, the electrode points include a plurality of exciting electrode points 72 and sensing electrode points 73 which are distributed in a staggered manner, and the data acquisition device includes a data acquisition card, a reference resistor, a capacitor and an excitation source for emitting an excitation signal;
all excitation electrode points 72 are connected in parallel and then connected in series on an excitation source through a capacitor, the excitation source emits rectangular pulse excitation voltage, and the rectangular pulse excitation voltage is converted into bipolar alternating voltage through the capacitor and is loaded to the excitation electrode points 72;
each sensing electrode point 73 is connected with a reference resistor, and the other end of the reference resistor is grounded; a complete circuit structure is formed by an excitation power supply positive electrode, a capacitance, an excitation electrode point 72, a liquid resistance, a sensing electrode point 73, a reference resistance and a power supply negative electrode (grounding);
the data acquisition card is used for acquiring the voltage scores of the reference resistor.
As a preferred embodiment, the sense electrode points 73 are distributed around the excitation electrode point 72 to facilitate measurement of the sense electrode point 73.
As a preferred embodiment, referring to fig. 3 and 4, a sealed space is formed between the circuit board 7 and the silica gel imitation body 2, and a pressure sensor 5 is further included for measuring the pressure of the conductive liquid in the space, and the pressure on the silica gel imitation body 2 obtained through the change of the liquid resistance is corrected through the pressure measurement. When the surface of the silica gel imitation body 2 is pressed, the internal sealing space is reduced, the conductive hydraulic pressure is increased, the conductive pressure sensor 5 is conducted to measure the pressure change of the conductive liquid, the voltage value measured by the sensing electrode point 73 is combined, and the pressure at the contact point can be calculated through model fitting data.
As a preferred embodiment, referring to fig. 3 and 4, the flexible touch sensor further includes a base 1, the circuit board 7 is mounted on the upper middle part of the base 1, and the silica gel imitation body 2 is pressed on the base 1 around the circuit board 7 by the annular pressing plate 3.
As a preferred embodiment, as shown in fig. 6, the middle part of the base 1 is provided with a mounting groove 14 for mounting the circuit board 7, the middle part of the mounting groove 14 is provided with a middle through hole 12 penetrating downwards, the back surface of the circuit board 7 is provided with a pin array connected with an excitation electrode point 72 and a sensing electrode point 73, the pin array is placed in the middle through hole 12, and the periphery of the circuit board 7 is connected with the base 1 around the middle through hole 12 in a sealing way so as to form a sealing space below the silica gel imitation body 2.
In the embodiment, the peripheral edges of the circuit board 7 are coated with sealant to adhere to the base 1, so as to play a role in sealing and leakage prevention.
As a preferred embodiment, the circuit board 7 is a double-layered printed circuit board 7, which is divided into a top layer and a bottom layer, as shown in fig. 4 and 8. The top layer is distributed with a plurality of excitation electrode points 72 and sensing electrode points 73, the excitation electrode points 72 and the sensing electrode points 73 are solid circles with the same diameter, only the excitation electrode points 72 and the sensing electrode points 73 are exposed outside, and the other parts are covered with green oil to form insulation protection. The bottom layer of the circuit board 7 is welded with electronic elements and pins communicated with the outside, after the circuit board is connected with a power supply, bipolar rectangular pulse excitation voltage can be generated at an excitation electrode point 72, the bottom pins 71 are connected with a sensing electrode point 73 in parallel, and the voltage at the sensing electrode point 73 can be measured.
As a preferred embodiment, as shown in fig. 6, a circle of sealing groove 11 is provided on the base 1, sealing protrusions 21 (in this embodiment, semicircular cross section sealing strips) capable of being installed in the sealing groove 11 are provided around the bottom of the silica gel imitation body 2, the annular pressing plate 3 is fixed on the base 1 through fasteners (such as screws 4), a sealing space is formed between the silica gel imitation body 2 and the circuit board 7 through cooperation of the sealing groove 11 and the sealing protrusions 21, and the sealing performance of the sealing space is improved by utilizing the characteristics of the silica gel itself and the interference of external environment is reduced through arrangement of the sealing groove 11 and the sealing protrusions 21.
As a preferred embodiment, referring to fig. 3, 4 and 7, the middle portion of the silica gel imitation body 2 is protruded upwards to form a touch portion 25, the upper surface of the touch portion 25 is provided with a plurality of semicircular section stripes 23, when an object slides on the silica gel surface, vibration signals can be generated and detected by the pressure sensor 5, and the surface characteristics of different objects are different, so that the type of the contacted object can be judged according to the vibration signals. In addition, the striped structure may also increase friction upon contact.
As a preferred embodiment, referring to fig. 4, the soft protrusions on the lower surface of the haptic portion 25 are pyramid-shaped protrusions 22 with the same material and the cone tip facing downward, and the deformability of the protrusions is improved by providing the pyramid-shaped protrusions 22, thereby indirectly improving the measurement accuracy. The press edge 26 matched with the annular pressing plate 3 is arranged on the periphery of the touch part 25, the firmness of fixing the silica gel imitation body 2 is improved through the arrangement of the press edge 26, and the capability of coping with extreme environments is improved.
As a preferred embodiment, referring to fig. 3 and 4, the side of the base 1 is provided with a pressure measuring channel 16 leading into the sealed space, and the pressure sensor 5 is provided in the pressure measuring channel 16 to measure the pressure variation of the conductive liquid, thereby enabling to correct the contact pressure obtained from the sense electrode point 73. As a specific installation mode, the pressure measuring channel 16 extends to the side part of the base 1, the pressure measuring channel 16 at the side part of the base 1 is provided with pressure sensor 5 installation seats 17 at the periphery, the pressure sensor 5 is fixed on the pressing sheet 6, the pressing sheet 6 is fixed on the pressure sensor 5 installation seats 17 through bolts, the root part of the pressure sensor 5 is conical, and when the pressing sheet 6 is fixed through bolts, the conical shape of the root part of the pressure sensor 5 is tightly pressed on the end part of the pressure measuring channel 16 for sealing.
As a preferred embodiment, as shown in fig. 6 and 7, at least two conical holes 18 are formed on the base 1 outside the sealing groove 11, the bottom of the conical hole 18 is connected with the sealing space through a conductive liquid injection channel 15 formed on the inner wall of the base 1, the silica gel imitation body 2 is provided with a circular table-shaped protrusion 24 installed in the conical hole 18 and matched with the conical hole in shape, the annular plate is provided with puncture holes 31 corresponding to the positions and the number of the circular table-shaped protrusions 24, the puncture needles are used for penetrating the circular table-shaped protrusions 24 of the silica gel imitation body 2 from the puncture holes 31 to charge and discharge conductive liquid or exhaust gas in the sealing space, and by the arrangement, the filling of the conductive liquid can be completed through a simple syringe needle without a complex valve structure, and the sealing space can be ensured to be filled with the conductive liquid.
As a preferred embodiment, the present invention further provides a method for preparing the silica gel imitation body 2, firstly designing a mold according to the shape of the regular silica gel imitation body 2, and then using 3D printing to manufacture the mold, wherein the designed mold is divided into an upper mold 8 and a lower mold 9. The upper die 8 and the lower die 9 are assembled together, the mixed silica gel stock solution is injected from an injection port, and the silica gel imitation body 2 with a special shape is formed after solidification.
The invention also provides a preparation method of the flexible touch sensor, which comprises the following steps:
specifically, two syringes with thin needle tubes are taken, the position of the round table-shaped bulge 24 is penetrated through the imitation silica gel and extends into the conical hole 18, one syringe only keeps the needle tube as an exhaust port, and the other syringe sucks conductive liquid and then injects the conductive liquid into a sealed space below the silica gel imitation 2. In particular, the conductive liquid injected into the tactile sensor is required to completely fill the sealing space, no bubbles can be left, and the bubbles can be extruded from the exhaust channel in a squeezing mode in the injection process.
and 6, calibrating pressure, namely pressing the touch sensor by using a standard force sensor, recording the indication of the standard force sensor, the voltage value of a sensing electrode point 73 and the measured value of the pressure sensor 5, fitting the data by using a model, and training to obtain a calibrated function model, thereby completing the preparation of the flexible touch sensor.
Further, please refer to the figure, the process of making the imitation silica gel is: the structures of the upper die 8 and the lower die 9 are designed according to the shape of the silica gel imitation body 2, and the dies are manufactured by 3D printing. The upper die 8 and the lower die 9 are assembled in an aligned mode, screws 4 are used for screwing and fixing, then the solution A and the solution B of the silicon collagen liquid are mixed according to the proportion of 1:1, and after full stirring, bubble removal treatment is carried out to remove bubbles in the silicon glue liquid. Then, injecting the silicone gel from an injection port of the mold by using a syringe injector, when the silicone gel flows out from the other side of the mold, indicating that the silicone gel is full of the interior of the mold, stopping injection, standing, disassembling the mold after the silicone gel is solidified, and taking out the molded silicone gel imitation body 2.
Further, referring to fig. 1, the following description is given of one possible use case: firstly, the touch sensor is assembled, and a syringe is used for injecting conductive liquid into a sealed space inside the sensor. Next, the bottom pin 71 on the circuit board 7 is connected with the excitation source and the data collector by using wires, a program is written into the excitation source and the data collector, the excitation source is controlled to emit rectangular pulse excitation voltage, and the data collector is controlled to measure the voltage value of the sensing electrode point 73. The newly assembled tactile sensor is then pressure calibrated: the standard force sensor is used for pressing the touch sensor, the standard force sensor indication (namely the contact force), the voltage value of the sensing electrode point 73 and the measured value of the pressure sensor 5 are recorded, and a calibrated function model is obtained after the data are fitted and trained by using the model. Finally, when the touch screen is used, an object contacts the silica gel imitation body 2, so that the voltage at the sensing electrode point 73 near the touch point is changed, the position of the touch point can be calculated, and then the pressure of the touch point can be calculated according to the function model obtained through calibration, so that the information acquisition of the position and the contact force of the contact object is realized.
The above embodiments are only for illustrating the present invention, and are not limiting of the present invention. While the invention has been described in detail with reference to the embodiments, those skilled in the art will appreciate that various combinations, modifications, and substitutions can be made thereto without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (8)
1. A flexible tactile sensor based on an electrode array, characterized by: the pressure sensor comprises at least a pressure sensor, a circuit board and a soft imitation body which is arranged on the circuit board and has elasticity, wherein a sealed space between the circuit board and the soft imitation body is filled with conductive liquid, and a plurality of soft bulges which can be contacted with the circuit board and deform are arranged on the lower surface of the soft imitation body; the circuit board is provided with a plurality of electrode points contacted with the conductive liquid and a data acquisition device for measuring the liquid resistance change between the electrode points, and the circuit board between the electrode points is arranged in an insulating way;
the electrode points comprise a plurality of excitation electrode points and sensing electrode points which are distributed in a staggered manner, and the data acquisition device comprises a data acquisition card, a reference resistor, a capacitor and an excitation source for sending out excitation signals;
all excitation electrode points are connected in parallel and then connected in series on an excitation source through a capacitor, the excitation source emits rectangular pulse excitation voltage, and the rectangular pulse excitation voltage is converted into bipolar alternating voltage through the capacitor and is loaded to the excitation electrode points;
each sensing electrode point is connected with a reference resistor, the other end of the reference resistor is grounded, and the data acquisition card is used for acquiring the voltage scores of the reference resistors;
when the soft imitation body is pressed, the soft bulge is contacted with the circuit board, and the soft bulge near the contact is gradually deformed along with the increase of the pressure, so that the conductive liquid is discharged to the periphery, the conductive performance near the contact is reduced, the liquid resistance is increased, and the partial pressure of a sensing electrode point near the contact is reduced; determining the position and the magnitude of the force applied to the soft imitation body according to the voltage change of the sensing electrode point on the measured circuit board;
the pressure sensor is used for measuring the pressure of the conductive liquid in the sealed space, and correcting the pressure on the soft imitation body obtained through the change of the liquid resistance through pressure measurement.
2. The flexible tactile sensor according to claim 1, wherein: the circuit board is arranged at the upper middle part of the base, and the soft imitation body is pressed on the base around the circuit board through the annular pressing plate.
3. The flexible tactile sensor according to claim 2, wherein: the base is provided with a circle of sealing groove, sealing bulges which can be arranged in the sealing groove are arranged on the periphery of the bottom of the soft imitation body, and a sealing space is formed between the soft imitation body and the circuit board through the cooperation of the sealing groove and the sealing bulges.
4. The flexible tactile sensor according to claim 2, wherein: the soft imitation body is characterized in that the middle part of the soft imitation body protrudes upwards to form a touch part, a plurality of semicircular section-shaped stripes are arranged on the upper surface of the touch part, the soft protrusion on the lower surface of the touch part is a pyramid-shaped protrusion with a downward taper point made of the same material, and the periphery of the touch part is provided with a pressing edge matched with the annular pressing plate.
5. A flexible tactile sensor according to claim 3, wherein: the base middle part is equipped with the middle part through-hole, the circuit board back is equipped with the row needle that links to each other with excitation electrode point, perception electrode point, the row needle is arranged in the through-hole of middle part, the circuit board links to each other with the base seal around the through-hole of middle part to form sealed space under soft imitative body.
6. The flexible tactile sensor according to claim 5, wherein: the side part of the base is provided with a pressure measuring channel leading into the sealed space, and the pressure sensor is arranged in the pressure measuring channel.
7. The flexible tactile sensor according to claim 6, wherein: the base outside the sealing groove is provided with at least two conical holes, the bottoms of the conical holes are connected with the sealing space through a conductive liquid injection channel provided with the inner wall of the base, the soft imitation body is provided with round table-shaped protrusions which are arranged in the conical holes and matched with the soft imitation body in shape, the annular pressing plate is provided with puncture holes corresponding to the round table-shaped protrusions in position and quantity, and the puncture holes are used for puncturing the soft imitation body from the puncture holes to fill and discharge conductive liquid or exhaust gas in the sealing space.
8. A method of making a flexible tactile sensor according to claim 7, comprising the steps of:
step 1, preparing a mould according to the shape and the size of the soft imitation body, and preparing the soft imitation body by adopting silica gel casting;
step 2, mounting the circuit board in the middle of the base through gluing, and placing the pin header in a central control groove of the base;
step 3, covering the soft imitation body on the circuit board, assembling the sealing bulge at the lower part of the soft imitation body in the sealing groove of the base, pressing the annular pressing plate on the soft imitation body, and fixing the annular pressing plate on the base body through the fastener;
step 4, a hollow needle pierces the boss from a piercing hole on the annular pressing plate until the boss is used as an exhaust pipe in the conical hole, an injection needle with conductive liquid pierces the boss from another piercing hole until the boss is filled in the conical hole, until the sealed space is filled with the conductive liquid, and the hollow needle and the injection needle are pulled out to finish filling of the conductive liquid;
step 5, connecting electrode points of the circuit board with a data acquisition device through a pin header;
and 6, calibrating pressure, namely pressing the touch sensor by using a standard force sensor, recording the indication of the standard force sensor, the voltage value of a sensing electrode point and the measured value of the pressure sensor, fitting the data by using a model, and training to obtain a calibrated function model, thereby completing the preparation of the flexible touch sensor.
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| CN111533081A (en) * | 2020-05-18 | 2020-08-14 | 吉林大学 | Composite flexible pressure sensor based on bionic microstructure and preparation method thereof |
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| US9851267B1 (en) * | 2016-06-01 | 2017-12-26 | Microsoft Technology Licensing, Llc | Force-sensing element |
| CN106197773B (en) * | 2016-07-07 | 2022-06-10 | 燕山大学 | Flexible fingertip pressure sensor and manufacturing method thereof |
| CN106197774B (en) * | 2016-07-20 | 2019-08-09 | 上海交通大学 | Flexible piezoresistive tactile sensor array and preparation method thereof |
| CN108151949B (en) * | 2017-12-20 | 2021-02-26 | 深圳先进技术研究院 | Flexible electronic pressure sensing device and preparation method thereof |
| CN107976273B (en) * | 2017-12-29 | 2023-06-16 | 厦门大学 | Microfluidic flexible sensor for pneumatic pressure measurement and manufacturing method thereof |
| CN209639867U (en) * | 2019-05-13 | 2019-11-15 | 中国科学院宁波材料技术与工程研究所 | A kind of flexible sensor |
| CN111543954A (en) * | 2020-05-25 | 2020-08-18 | 华中科技大学 | Flexible resistance-variable array touch sensor based on microfluid electronics |
| CN112729662B (en) * | 2020-12-10 | 2023-01-06 | 中国科学院深圳先进技术研究院 | Underwater touch sensor and preparation method thereof |
| CN112880547B (en) * | 2021-01-14 | 2022-05-20 | 华中科技大学 | Liquid metal-based touch sensor, array and preparation method thereof |
| CN113008416B (en) * | 2021-01-28 | 2022-09-20 | 广东粤港澳大湾区黄埔材料研究院 | Packaging mechanism and packaging method for microstructure type flexible pressure sensor |
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| CN110849508A (en) * | 2019-11-29 | 2020-02-28 | 上海交通大学 | Flexible pressure sensor based on discrete contact structure and preparation method thereof |
| CN111533081A (en) * | 2020-05-18 | 2020-08-14 | 吉林大学 | Composite flexible pressure sensor based on bionic microstructure and preparation method thereof |
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