CN114603976A - Electrostatic chuck laminating auxiliary device - Google Patents
Electrostatic chuck laminating auxiliary device Download PDFInfo
- Publication number
- CN114603976A CN114603976A CN202210153727.8A CN202210153727A CN114603976A CN 114603976 A CN114603976 A CN 114603976A CN 202210153727 A CN202210153727 A CN 202210153727A CN 114603976 A CN114603976 A CN 114603976A
- Authority
- CN
- China
- Prior art keywords
- backup pad
- electrostatic chuck
- plate
- supporting plate
- spacing
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/18—Handling of layers or the laminate
- B32B38/1825—Handling of layers or the laminate characterised by the control or constructional features of devices for tensioning, stretching or registration
- B32B38/1833—Positioning, e.g. registration or centering
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses an electrostatic chuck attaching auxiliary device, which belongs to the technical field of electrostatic chucks and comprises a rack, wherein an upper plate positioning assembly and a lower plate positioning assembly are arranged on the rack, the upper plate positioning assembly is connected with the rack through a telescopic rod, the upper plate positioning assembly comprises an upper supporting plate, the upper supporting plate is rotatably connected with the telescopic rod, a plurality of upper limiting blocks are arranged on the upper supporting plate and are in sliding connection with the upper supporting plate, the lower plate positioning assembly comprises a lower supporting plate, the lower supporting plate is arranged in parallel with the upper supporting plate, a plurality of lower limiting blocks are arranged on the lower supporting plate, and the lower limiting blocks are in sliding connection with the lower supporting plate.
Description
Technical Field
The invention relates to the technical field of electrostatic chucks, in particular to an auxiliary device for electrostatic chuck attachment.
Background
The ceramic plate and the substrate of the electrostatic chuck need to be bonded together, the in-process of laminating is carried out between the electrostatic chuck substrate and the electrostatic chuck substrate, the central axis of the electrostatic chuck substrate and the central axis of the electrostatic chuck substrate need to coincide, at present, the bonding of the electrostatic chuck substrate and the electrostatic chuck substrate is generally carried out through manual bonding, the working requirement operating personnel have more experiences, the electrostatic chuck is prevented from being influenced, the manual bonding requirement is high, and the efficiency is low.
However, in the prior art, since the bonding between the electrostatic chuck substrate and the electrostatic chuck substrate is generally performed by manual bonding, this work requires a lot of experience of an operator, avoids affecting the electrostatic chuck, requires high manual bonding, and is inefficient, and thus, an electrostatic chuck bonding auxiliary device is required.
Disclosure of Invention
The invention aims to provide an electrostatic chuck attaching auxiliary device which can attach a substrate and a ceramic plate of an electrostatic chuck in an auxiliary manner, has a simple structure and is suitable for attaching electrostatic chucks of different sizes.
In order to solve the technical problems, the technical scheme of the invention is as follows:
the utility model provides an electrostatic chuck laminating auxiliary device, includes the frame, be equipped with upper plate locating component and hypoplastron locating component in the frame, upper plate locating component with the frame is passed through the telescopic link and is connected, upper plate locating component includes the backup pad, go up the backup pad with the telescopic link rotates to be connected, go up to be equipped with a plurality of spacing blocks on the backup pad, go up the spacing block with go up backup pad sliding connection, hypoplastron locating component includes the bottom suspension fagging, the bottom suspension fagging with go up backup pad parallel arrangement, be equipped with a plurality of spacing blocks down in the bottom suspension fagging, down the spacing block with bottom suspension fagging sliding connection.
Preferably, go up the backup pad with connect through the connecting piece between the telescopic link, the connecting piece include with the first sleeve that the telescopic link is connected, go up be equipped with on the backup pad with first sleeve inside wall complex second sleeve, be equipped with the locating piece on the telescopic lateral wall of second, be equipped with on the first sleeve and be used for the restriction the first spacing groove and the second spacing groove of locating piece.
Preferably, the upper supporting plate is an electromagnetic plate, and any one of the upper limiting blocks is an iron limiting block.
Preferably, be equipped with on the last backup pad with go up spacing piece complex last constant head tank, go up the backup pad along be equipped with the length scale in the direction of going up the constant head tank.
Preferably, the upper supporting plate and the lower supporting plate are disc-shaped supporting plates, and the central axes of the upper supporting plate and the lower supporting plate are overlapped.
Preferably, the lower supporting plate is an electromagnetic plate, and any one of the lower limiting blocks is an iron limiting block.
Preferably, the lower support plate is provided with a lower positioning groove matched with the lower positioning block, and the lower support plate is provided with lower length scales along the direction of the lower positioning groove.
Preferably, an upper rubber block is bonded to any one of the upper limiting blocks, and the upper rubber block faces to the center of the upper supporting plate.
Preferably, a lower rubber block is bonded to any one of the lower limiting blocks, and the lower rubber block faces to the center of the lower support plate.
Adopt above-mentioned technical scheme, owing to be equipped with backup pad and last spacing piece, make can fix a position and spacing to electrostatic chuck's ceramic plate, so that laminate to the ceramic plate, owing to be equipped with backup pad and spacing piece down, make the base plate to electrostatic chuck fix a position and spacing, owing to be equipped with the telescopic link, make electrostatic chuck ceramic plate and electrostatic chuck base plate position all fixed back, can change the position of electrostatic chuck ceramic plate and electrostatic chuck base plate through the telescopic link, after gluing the adhesive linkage on the electrostatic chuck base plate, can accomplish the electrostatic chuck ceramic plate and laminate in electrostatic chuck's base plate.
Drawings
FIG. 1 is a schematic structural view of an electrostatic chuck attachment assisting device according to the present invention;
FIG. 2 is a schematic structural view of the upper plate positioning assembly of the present invention;
FIG. 3 is a schematic view of the lower plate positioning assembly of the present invention;
fig. 4 is an enlarged sectional view of the first sleeve according to the present invention.
Detailed Description
The following further describes embodiments of the present invention with reference to the drawings. It should be noted that the description of the embodiments is provided to help understanding of the present invention, but the present invention is not limited thereto. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
As shown in fig. 1 to 4, fig. 1 is a schematic structural view of an electrostatic chuck attachment assisting device according to the present invention, FIG. 2 is a schematic structural view of an upper plate positioning assembly of the present invention, FIG. 3 is a schematic structural view of a lower plate positioning assembly of the present invention, fig. 4 is an enlarged cross-sectional structural diagram of the first sleeve, which includes a frame 1, an upper plate positioning assembly and a lower plate positioning assembly are arranged on the frame 1, the upper plate positioning assembly is connected with the frame 1 through a telescopic rod 2, the upper plate positioning assembly includes an upper support plate 5, the upper support plate 5 is rotatably connected with the telescopic rod 2, a plurality of upper limit blocks 6 are arranged on the upper support plate 5, the upper limit blocks 6 are slidably connected with the upper support plate 5, the lower plate positioning assembly includes a lower support plate 7, the lower support plate 7 is arranged in parallel with the upper support plate 5, a plurality of lower limit blocks 8 are arranged on the lower support plate 7, and the lower limit blocks 8 are slidably connected with the lower support plate 7;
the upper support plate 5 is connected with the telescopic rod 2 through a connecting piece, the connecting piece comprises a first sleeve 3 connected with the telescopic rod 2, a second sleeve 4 matched with the inner side wall of the first sleeve 3 is arranged on the upper support plate 5, a positioning block 9 is arranged on the outer side wall of the second sleeve 4, a first limiting groove 12 and a second limiting groove 13 used for limiting the positioning block 9 are arranged on the first sleeve 3, the second sleeve 4 and the first sleeve 3 can rotate relatively, the first limiting groove 12 is arranged above the second limiting groove 13, when the electrostatic chuck ceramic is installed and positioned, one side of the upper support plate 5 with an upper limiting block 6 faces upwards, at the moment, the positioning block 9 rotates upwards, the second sleeve 4 is pushed towards the first sleeve 3 until the positioning block 9 is embedded into the first limiting groove 12, and after the position of the electrostatic chuck is determined, the positioning block 9 is pulled out of the first limiting groove 12, rotating 180 degrees, and embedding the positioning block 9 into the second limiting groove 13, wherein the central axis of the disc type upper supporting plate 5 is overlapped with the central axis of the disc type lower supporting plate 7;
the upper supporting plate 5 is an electromagnetic plate, any one upper limiting block 6 is an iron limiting block, the upper supporting plate 5 can be disc-shaped, when the ceramic plate positioning device is used, the upper supporting plate 5 is rotated 180 degrees firstly, so that the upper limiting block 6 on the upper supporting plate 5 faces upwards, the operation is convenient, the number of the upper limiting blocks 6 can be three, the positions of the electrostatic chuck ceramic plate can be limited by the three upper limiting blocks 6, the three upper limiting blocks 6 are positioned on the circumference of the same circle, when the electrostatic chuck ceramic plate is positioned, the upper supporting plate 5 is powered off and loses magnetism, after the positions of the three upper limiting blocks 6 are determined, the upper supporting plate 5 is powered on and has magnetism, the three upper limiting blocks 6 are adsorbed and positioned, and the positioning and limiting of the electrostatic chuck ceramic plate are completed;
the upper support plate 5 is provided with upper positioning grooves 10 matched with the upper positioning blocks 6, the upper support plate 5 is provided with upper length scales along the direction of the upper positioning grooves 10, the number of the upper positioning grooves 10 is equal to that of the upper positioning blocks 6, the number of the upper positioning grooves 10 can be three, the three upper positioning grooves 10 are arranged along the radius direction of the upper support plate 5, the three upper positioning grooves 10 are evenly distributed, the included angle between the three upper positioning grooves is 120 degrees, the upper positioning grooves 10 are used for limiting the positions of the upper positioning blocks 6, the cross section of the upper positioning grooves 10 can be T-shaped, the upper length scales are used for determining the positions of the three upper positioning blocks 6, the three upper positioning blocks 6 can be adjusted to corresponding positions according to the size of the ceramic plate of the electrostatic chuck, and the electrostatic chucks with different specifications and sizes can be conveniently attached;
the upper supporting plate 5 and the lower supporting plate 7 are disc-shaped supporting plates, the central axes of the upper supporting plate 5 and the lower supporting plate 7 are overlapped, and because the electrostatic chuck ceramic plate and the electrostatic chuck substrate are both disc-shaped, the upper supporting plate 5 and the lower supporting plate 7 can be disc-shaped supporting plates, in order to enable the electrostatic chuck ceramic plate and the electrostatic chuck substrate to be attached at correct positions, the central axes of the upper supporting plate 5 and the lower supporting plate 7 are overlapped during attachment;
the lower supporting plate 7 is an electromagnetic plate, any one lower limiting block 8 is an iron limiting block, when the lower limiting block 8 needs to be adjusted, the lower supporting plate 7 is not magnetic, the lower limiting block 8 can be conveniently moved at the moment, after the position of the electrostatic chuck substrate on the lower supporting plate 7 is determined, the lower supporting plate 7 is made to be magnetic through electrification, the lower limiting blocks 8 can be adsorbed, when the electrostatic chuck device is used, the number of the lower limiting blocks 8 can be three, the three lower limiting blocks 8 are evenly divided according to the circumference, any two of the three lower limiting blocks 8 are adjusted to proper positions according to the lower length scale, then the electrostatic chuck substrate is placed on, and then the position of the third lower limiting block 8 is determined;
the lower support plate 7 is provided with lower positioning grooves 11 matched with the lower limiting blocks 8, the lower support plate 7 is provided with lower length scales along the direction of the lower positioning grooves 11, the number of the lower positioning grooves 11 is equal to that of the lower limiting blocks 8, the number of the lower positioning grooves 11 can be three, the lower limiting blocks 8 can be limited by the lower positioning grooves 11, and the lower length scales are arranged, so that the lower support plate 7 can limit electrostatic chuck substrates of different specifications;
an upper rubber block is bonded on any one upper limiting block 6, the upper rubber block faces to the center of an upper supporting plate 5, the upper supporting plate 5 is disc-shaped, the center of the upper supporting plate 5 is the circle center of the disc-shaped upper supporting plate 5, the upper rubber block is used for being attached to an electrostatic chuck ceramic plate, the electrostatic chuck ceramic plate is better protected, and meanwhile, an anti-skidding groove can be further arranged on the side, facing to the center of the upper supporting plate 5, of the upper rubber block, so that when the upper supporting plate 5 rotates to the side, provided with the upper limiting block 6, facing downwards, the electrostatic chuck ceramic plate cannot fall off;
a lower rubber block is bonded on any one lower limiting block 8, faces to the center of the lower supporting plate 7, the lower supporting plate 7 is disc-shaped, the center of the lower supporting plate 7 is the circle center of the disc-shaped lower supporting plate 7, and the lower rubber block is used for being attached to an electrostatic chuck substrate to better protect the electrostatic chuck substrate;
owing to be equipped with backup pad 5 and last spacing block 6, make can fix a position and spacing to the ceramic plate of electrostatic chuck, so that laminate the ceramic plate, owing to be equipped with backup pad 7 and spacing block 8 down, make the base plate to electrostatic chuck fix a position and spacing, owing to be equipped with telescopic link 2, make electrostatic chuck ceramic plate and electrostatic chuck base plate position all fixed back, can change the position of electrostatic chuck ceramic plate and electrostatic chuck base plate through telescopic link 2, glue on the electrostatic chuck base plate and glue after the layer, can accomplish the electrostatic chuck ceramic plate and laminate in the base plate of electrostatic chuck.
The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the described embodiments. It will be apparent to those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, and the scope of protection is still within the scope of the invention.
Claims (9)
1. The utility model provides an electrostatic chuck laminating auxiliary device which characterized in that: the automatic positioning device comprises a frame, be equipped with upper plate locating component and hypoplastron locating component in the frame, upper plate locating component with the frame passes through the telescopic link and connects, upper plate locating component includes the backup pad, go up the backup pad with the telescopic link rotates to be connected, go up to be equipped with a plurality of spacing pieces on the backup pad, go up the spacing piece with go up backup pad sliding connection, hypoplastron locating component includes the backup pad, the backup pad with go up backup pad parallel arrangement, be equipped with a plurality of spacing pieces down on the backup pad, down the spacing piece with the backup pad sliding connection down.
2. The electrostatic chuck attachment assisting device according to claim 1, characterized in that: go up the backup pad with connect through the connecting piece between the telescopic link, the connecting piece include with the first sleeve that the telescopic link is connected, go up be equipped with on the backup pad with first sleeve inside wall complex second sleeve, be equipped with the locating piece on the telescopic lateral wall of second, be equipped with on the first sleeve and be used for the restriction the first spacing groove and the second spacing groove of locating piece.
3. The electrostatic chuck attachment assisting device according to claim 2, characterized in that: go up the backup pad and be the electromagnetism board, arbitrary one go up the stopper and be the iron stopper.
4. The electrostatic chuck application assisting device according to claim 3, characterized in that: go up be equipped with on the backup pad with go up spacing piece complex last constant head tank, go up the backup pad along be equipped with length scale in the direction of going up the constant head tank.
5. The electrostatic chuck application assisting device according to claim 4, wherein: go up backup pad and bottom suspension fagging and be the disc backup pad, go up the central axis coincidence of backup pad and bottom suspension fagging.
6. The electrostatic chuck attachment assisting device according to claim 5, wherein: the lower supporting plate is an electromagnetic plate, and any one of the lower limiting blocks is an iron limiting block.
7. The electrostatic chuck application assisting apparatus according to claim 6, wherein: the lower support plate is provided with a lower positioning groove matched with the lower positioning block, and the lower support plate is provided with lower length scales along the direction of the lower positioning groove.
8. The electrostatic chuck application assisting device according to claim 7, comprising: an upper rubber block is bonded on any one of the upper limiting blocks, and faces towards the center of the upper supporting plate.
9. The electrostatic chuck application assisting apparatus according to claim 8, wherein: and a lower rubber block is bonded on any one of the lower limiting blocks and faces to the center of the lower supporting plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210153727.8A CN114603976A (en) | 2022-02-19 | 2022-02-19 | Electrostatic chuck laminating auxiliary device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210153727.8A CN114603976A (en) | 2022-02-19 | 2022-02-19 | Electrostatic chuck laminating auxiliary device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114603976A true CN114603976A (en) | 2022-06-10 |
Family
ID=81858927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210153727.8A Pending CN114603976A (en) | 2022-02-19 | 2022-02-19 | Electrostatic chuck laminating auxiliary device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114603976A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20150262858A1 (en) * | 2012-09-28 | 2015-09-17 | Tokyo Ohka Kogyo Co., Ltd. | Attaching device and attaching method |
| CN208907423U (en) * | 2018-07-24 | 2019-05-28 | 深圳大视野志远科技有限公司 | A kind of tablet computer OCA optical cement LCD screen fitting ancillary equipment |
| CN111716874A (en) * | 2020-06-04 | 2020-09-29 | 惠州市华星光电技术有限公司 | Alignment laminating device and alignment laminating method thereof |
| CN113682030A (en) * | 2021-09-06 | 2021-11-23 | 睿合科技有限公司 | Ultra-high precision laminating alignment device |
-
2022
- 2022-02-19 CN CN202210153727.8A patent/CN114603976A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20150262858A1 (en) * | 2012-09-28 | 2015-09-17 | Tokyo Ohka Kogyo Co., Ltd. | Attaching device and attaching method |
| CN208907423U (en) * | 2018-07-24 | 2019-05-28 | 深圳大视野志远科技有限公司 | A kind of tablet computer OCA optical cement LCD screen fitting ancillary equipment |
| CN111716874A (en) * | 2020-06-04 | 2020-09-29 | 惠州市华星光电技术有限公司 | Alignment laminating device and alignment laminating method thereof |
| CN113682030A (en) * | 2021-09-06 | 2021-11-23 | 睿合科技有限公司 | Ultra-high precision laminating alignment device |
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