CN114594312A - Liquid complex dielectric constant sensor of mutual coupling annular gap resonance structure and measuring method - Google Patents
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Abstract
本发明公开了一种互耦环缝谐振结构的液体复介电常数传感器及测量方法,涉及射频和微波工程技术领域。该液体复介电常数传感器,包括玻璃管(4)、地线GND层(3)、介质层(2)、微带线层(1),地线GND层(3)用于形成等效电路,并通过与液体样品所在的玻璃管(4)接触,测量液体样品的复介电常数;介质层(2)用于形成类LC谐振腔体;微带线层(1)用于传输信号,并且使信号输出端与负载进行匹配。实现了同时测量液体样品的介电常数和损耗正切值,提高了测量复介电常数的测量精度。
The invention discloses a liquid complex dielectric constant sensor and a measurement method of a mutual coupling ring-slit resonance structure, and relates to the technical field of radio frequency and microwave engineering. The liquid complex permittivity sensor comprises a glass tube (4), a ground wire GND layer (3), a dielectric layer (2), a microstrip line layer (1), and the ground wire GND layer (3) is used to form an equivalent circuit , and measure the complex permittivity of the liquid sample by contacting the glass tube (4) where the liquid sample is located; the dielectric layer (2) is used to form an LC-like resonant cavity; the microstrip line layer (1) is used to transmit signals, And make the signal output end match the load. Simultaneous measurement of the dielectric constant and loss tangent of the liquid sample is achieved, and the measurement accuracy of the complex dielectric constant is improved.
Description
技术领域technical field
本发明涉及射频和微波工程技术领域,具体涉及一种互耦环缝谐振结构的液体复介电常数传感器及测量方法。The invention relates to the technical field of radio frequency and microwave engineering, in particular to a liquid complex permittivity sensor and a measurement method with a mutually coupled annular slot resonance structure.
背景技术Background technique
复介电常数是射频和微波工程中材料最重要的参数之一。微波设备的基板中所用材料的介电性能,会影响微波平面电路的响应。为了对复杂的微波设备进行建模,必须先测量微波设备的基板中所用材料的复介电常数。因此,准确测定材料的复介电常数是射频和微波工程领域的重要任务。除了在微波工程中,其他诸如食品,医疗保健、农业等各个领域,也需要对复介电常数进行精确测量。复介电常数包括介电常数和损耗正切值,而相对于固体材料,液体材料有着介电常数高、损耗正切值大以及流动性难以固定的特点,导致测量液体材料的复介电常数更加困难。The complex permittivity is one of the most important parameters of materials in RF and microwave engineering. The dielectric properties of the materials used in the substrates of microwave devices affect the response of microwave planar circuits. In order to model a complex microwave device, the complex permittivity of the materials used in the substrate of the microwave device must first be measured. Therefore, accurate determination of the complex permittivity of materials is an important task in the field of RF and microwave engineering. In addition to microwave engineering, other fields such as food, health care, agriculture, etc., also require accurate measurement of complex permittivity. The complex dielectric constant includes dielectric constant and loss tangent. Compared with solid materials, liquid materials have the characteristics of high dielectric constant, large loss tangent and difficult to fix fluidity, which makes it more difficult to measure the complex dielectric constant of liquid materials. .
现有技术中,液体复介电常数的测量方法,大致可分为自由空间方法、传输线方法和共振方法。然而这些方法都存在着对液体样品要求高、灵敏度低、只能测量低介电常数液体材料、无法测量损耗正切值等缺点。In the prior art, methods for measuring the complex permittivity of liquids can be roughly divided into free space methods, transmission line methods and resonance methods. However, these methods all have shortcomings such as high requirements for liquid samples, low sensitivity, only low dielectric constant liquid materials can be measured, and loss tangent cannot be measured.
发明内容SUMMARY OF THE INVENTION
本发明的目的就在于解决上述背景技术的问题,而提出一种互耦环缝谐振结构的液体复介电常数传感器及测量方法,实现同时测量液体样品的介电常数和损耗正切值,提高测量复介电常数的测量精度。The purpose of the present invention is to solve the problems of the above-mentioned background technology, and propose a liquid complex permittivity sensor and a measurement method with a mutual coupling ring-slit resonance structure, so as to realize the simultaneous measurement of the permittivity and loss tangent of the liquid sample, and improve the measurement Measurement accuracy of complex permittivity.
本发明的目的可以通过以下技术方案实现:The object of the present invention can be realized through the following technical solutions:
本发明实施例第一方面,首先提供了互耦环缝谐振结构的液体复介电常数传感器,包括玻璃管4、地线GND层3、介质层2、微带线层1,所述地线GND层3用于形成等效电路,并通过与液体样品所在的玻璃管4接触,测量所述液体样品的复介电常数;所述介质层2用于形成类LC谐振腔体;所述微带线层1用于传输信号,并且使信号输出端与负载进行匹配。In the first aspect of the embodiment of the present invention, a liquid complex permittivity sensor with a mutually coupled ring-slit resonance structure is provided, including a
可选地,所述地线GND层3包括3个圆环蚀刻组成的互耦环缝谐振结构31,其中,3个圆环蚀刻的圆心重合,并在圆心处贯穿直径1.5mm的通孔32;所述互耦环缝谐振结构31用于与通孔32中装载所述液体样品的玻璃管4形成微变等效电路。Optionally, the ground
可选地,所述地线GND层3为一块蚀刻有三环互耦环缝结构的矩形金属;其中,所述三环互耦环缝结构的互耦环缝大环311的内圆半径为3.2mm,外圆半径为3.65mm;所述三环互耦环缝结构的互耦环缝中环312的内圆半径为2.5mm,外圆半径为2.9mm;所述三环互耦环缝结构的互耦环缝小环313的内圆半径为1.9mm,外圆半径为2.2mm。Optionally, the ground
可选地,所述互耦环缝大环311在垂直于微带线层1的底端蚀刻有一条狭缝,该狭缝宽度为0.22mm;所述互耦环缝中环312在垂直于微带线层1的顶端蚀刻有一条狭缝,该狭缝宽度为0.22mm;所述互耦环缝小环313在垂直于微带线层1的底端蚀刻有一条狭缝,该狭缝宽度为0.22mm。Optionally, a slit is etched at the bottom end perpendicular to the microstrip line layer 1 of the mutual coupling ring
可选地,所述玻璃管4的材质为石英玻璃,所述玻璃管4为外径1.5mm、内径0.9mm、长度75mm单面有底的空心圆柱,用于装载所述液体样品插入传感器的通孔32。Optionally, the material of the
可选地,所述地线GND层3和微带线层1的厚度为0-0.02mm,所述地线GND层3和微带线层1的材质为金、银和铜中任意一种,或者是与金、银和铜中任意一种具有相当导电率的导电材料。Optionally, the thickness of the ground
可选地,所述微带线层1为一条从介质层2中间位置纵向穿过的微带线,其尺寸为28mm×1.66mm。Optionally, the microstrip line layer 1 is a microstrip line longitudinally passing through the middle position of the
可选地,所述的介质层2尺寸为28mm×20mm×0.75mm,且在该尺寸的基础上上下浮动0.0015mm,所述的介质层2的材质为介电常数为3.5的RO3035材料,损耗正切值为0.02。Optionally, the size of the
可选地,所述液体复介电常数传感器的测量频带为2.75GHz-3GHz之间,有效测量范围为介电常数为1-90、损耗正切值为0-1的液体样品。Optionally, the measurement frequency band of the liquid complex permittivity sensor is between 2.75GHz-3GHz, and the effective measurement range is a liquid sample with a permittivity of 1-90 and a loss tangent value of 0-1.
基于上述任一所述的液体复介电常数传感器,本发明实施例还提供了一种液体复介电常数测量方法,液体复介电常数包括介电常数和损耗正切值,所述方法包括:Based on any of the liquid complex permittivity sensors described above, an embodiment of the present invention further provides a method for measuring liquid complex permittivity, where the liquid complex permittivity includes permittivity and loss tangent, and the method includes:
将装有液体样品的玻璃管4插入液体复介电常数传感器的通孔32中;Insert the
在2.75GHz-3GHz频段的谐振下,使用矢量网络分析仪测量所述液体复介电常数传感器,得到传输系数中心频率S21参数曲线;Under the resonance of the 2.75GHz-3GHz frequency band, use a vector network analyzer to measure the liquid complex permittivity sensor to obtain the S21 parameter curve of the center frequency of the transmission coefficient;
确定所述S21参数曲线的谐振频率和插入损耗;Determine the resonant frequency and insertion loss of the S21 parameter curve;
根据所述谐振频率确定所述液体样品的介电常数,根据所述插入损耗确定所述液体样品的损耗正切值。The dielectric constant of the liquid sample is determined according to the resonant frequency, and the loss tangent value of the liquid sample is determined according to the insertion loss.
基于本发明实施例提供的互耦环缝谐振结构的液体复介电常数传感器,可以在2.75GHz-3GHz频段的谐振下,使用矢量网络分析仪测量传输系数中心频率S21参数曲线,并根据S21参数曲线的谐振频率和插入损耗确定液体样品的介电常数和损耗正切值。本发明实施例提供的液体复介电常数传感器具有体积较小、结构简单、加工成本低、测量范围适配好等优点,可以同时测量体样品的介电常数和损耗正切值,提高了测量复介电常数的测量精度。The liquid complex permittivity sensor based on the mutual coupling ring-slit resonance structure provided by the embodiment of the present invention can use a vector network analyzer to measure the S21 parameter curve of the center frequency of the transmission coefficient under the resonance of the 2.75GHz-3GHz frequency band, and according to the S21 parameter The resonant frequency and insertion loss of the curve determine the dielectric constant and loss tangent of the liquid sample. The liquid complex permittivity sensor provided by the embodiment of the present invention has the advantages of small volume, simple structure, low processing cost, good measurement range adaptation, etc., and can simultaneously measure the permittivity and loss tangent of the bulk sample, which improves the measurement complexity. The measurement accuracy of the dielectric constant.
附图说明Description of drawings
下面结合附图对本发明作进一步的说明。The present invention will be further described below in conjunction with the accompanying drawings.
图1为本发明实施例提供的互耦环缝谐振结构的液体复介电常数传感器的三维结构图;1 is a three-dimensional structural diagram of a liquid complex permittivity sensor with a mutually coupled annular slot resonance structure provided in an embodiment of the present invention;
图2为本发明实施例提供的互耦环缝谐振结构的液体复介电常数传感器的地线GND层示意图;FIG. 2 is a schematic diagram of a ground wire GND layer of a liquid complex permittivity sensor with a mutually coupled annular slot resonance structure provided in an embodiment of the present invention;
图3为本发明实施例提供的液体复介电常数传感器的互耦环缝谐振结构的平面示意图;3 is a schematic plan view of a mutually coupled annular slot resonance structure of a liquid complex permittivity sensor provided by an embodiment of the present invention;
图4为本发明实施例提供的液体复介电常数测量方法的流程图;4 is a flowchart of a liquid complex permittivity measurement method provided by an embodiment of the present invention;
图5为本发明实施例提供的互耦环缝谐振结构的等效电路图;5 is an equivalent circuit diagram of a mutually coupled annular slot resonance structure provided by an embodiment of the present invention;
图6为本发明实施例提供的在微带线2.75GHz-3GHz的频段谐振下液体复介电常数传感器的S21参数曲线示意图;6 is a schematic diagram of the S21 parameter curve of the liquid complex permittivity sensor under the frequency band resonance of the microstrip line of 2.75GHz-3GHz provided by an embodiment of the present invention;
图7为本发明实施例提供的在介电常数20和介电常数70、损耗正切值在0-1变化的液体复介电常数传感器的S21参数曲线示意图。FIG. 7 is a schematic diagram of the S21 parameter curve of a liquid complex permittivity sensor with a dielectric constant of 20 and a dielectric constant of 70 and a loss tangent value varying from 0 to 1 according to an embodiment of the present invention.
图中:1、微带线层;2、介质层;3、地线GND层;4、玻璃管;31、互耦环缝谐振结构;32、通孔;311、互耦环缝大环;312、互耦环缝中环;313、互耦环缝小环。In the figure: 1. Microstrip line layer; 2. Dielectric layer; 3. Ground wire GND layer; 4. Glass tube; 31. Mutual coupling ring slot resonance structure; 32, Through hole; 312. The middle ring of the mutual coupling annular seam; 313, the small ring of the mutual coupling annular seam.
具体实施方式Detailed ways
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其它实施例,都属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
本发明实施例提供了一种互耦环缝谐振结构的液体复介电常数传感器。参见图1,图1为本发明实施例提供的互耦环缝谐振结构的液体复介电常数传感器的三维结构图。液体复介电常数传感器包括玻璃管4、地线GND层3、介质层2、微带线层1。The embodiment of the present invention provides a liquid complex permittivity sensor with a mutually coupled annular slot resonance structure. Referring to FIG. 1 , FIG. 1 is a three-dimensional structural diagram of a liquid complex permittivity sensor with a mutually coupled ring-slit resonance structure provided in an embodiment of the present invention. The liquid complex permittivity sensor includes a
地线GND层3用于和贴片层激励形成等效电路,并通过与液体样品所在的玻璃管4接触,测量液体样品的复介电常数;介质层2用于形成类LC谐振腔体;微带线层1用于传输信号,并且使信号输出端与负载进行匹配。The ground
在一个实施例中,参见图2,图2为本发明实施例提供的互耦环缝谐振结构的液体复介电常数传感器的地线GND层示意图。In one embodiment, referring to FIG. 2 , FIG. 2 is a schematic diagram of a ground wire GND layer of a liquid complex permittivity sensor with a mutual coupling ring-slit resonance structure provided in an embodiment of the present invention.
地线GND层3包括3个圆环蚀刻组成的互耦环缝谐振结构31,其中,3个圆环蚀刻的圆心重合,并在圆心处贯穿直径1.5mm的通孔32;互耦环缝谐振结构31用于与通孔32中装载液体样品的玻璃管4形成微变等效电路。The ground
在一个实施例中,参见图3,图3为本发明实施例提供的液体复介电常数传感器的互耦环缝谐振结构的平面示意图。In one embodiment, referring to FIG. 3 , FIG. 3 is a schematic plan view of a mutual-coupled ring-slit resonance structure of a liquid complex permittivity sensor according to an embodiment of the present invention.
地线GND层3为一块蚀刻有三环互耦环缝结构的矩形金属;其中,三环互耦环缝结构的互耦环缝大环311的内圆半径为3.2mm,外圆半径为3.65mm;三环互耦环缝结构的互耦环缝中环312的内圆半径为2.5mm,外圆半径为2.9mm;三环互耦环缝结构的互耦环缝小环313的内圆半径为1.9mm,外圆半径为2.2mm。The ground
在一个实施例中,互耦环缝大环311在垂直于微带线层1的底端蚀刻有一条狭缝,该狭缝宽度为0.22mm;互耦环缝中环312在垂直于微带线层1的顶端蚀刻有一条狭缝,该狭缝宽度为0.22mm;互耦环缝小环313在垂直于微带线层1的底端蚀刻有一条狭缝,该狭缝宽度为0.22mm。In one embodiment, a slit is etched at the bottom end of the mutual coupling ring slit
在一个实施例中,玻璃管4的材质为石英玻璃,玻璃管4为外径1.5mm、内径0.9mm、长度75mm单面有底的空心圆柱,用于装载液体样品插入传感器的通孔32。In one embodiment, the
在一个实施例中,地线GND层3和微带线层1的厚度为0-0.02mm,地线GND层3和微带线层1的材质为金、银和铜中任意一种,或者是与金、银和铜中任意一种具有相当导电率的导电材料。In one embodiment, the thickness of the ground
在一个实施例中,微带线层1为一条从介质层2中间位置纵向穿过的微带线,其尺寸为28mm×1.66mm。In one embodiment, the microstrip line layer 1 is a microstrip line longitudinally passing through the middle position of the
在一个实施例中,介质层2尺寸为28mm×20mm×0.75mm,且在该尺寸的基础上上下浮动0.0015mm,的介质层2的材质为介电常数为3.5的RO3035材料,损耗正切值为0.02。In one embodiment, the size of the
在一个实施例中,液体复介电常数传感器的测量频带为2.75GHz-3GHz之间,有效测量范围为介电常数为1-90、损耗正切值为0-1的液体样品。In one embodiment, the measurement frequency band of the liquid complex permittivity sensor is between 2.75GHz-3GHz, and the effective measurement range is a liquid sample with a permittivity of 1-90 and a loss tangent of 0-1.
基于相同的发明构思,本发明实施例还提供了一种液体复介电常数测量方法。参见图4,图4为本发明实施例提供的液体复介电常数测量方法的流程图。液体复介电常数包括介电常数和损耗正切值,该方法包括以下步骤:Based on the same inventive concept, the embodiments of the present invention also provide a method for measuring the complex permittivity of liquids. Referring to FIG. 4 , FIG. 4 is a flowchart of a method for measuring a liquid complex permittivity provided by an embodiment of the present invention. Liquid complex permittivity includes permittivity and loss tangent, and the method includes the following steps:
S401,将装有液体样品的玻璃管4插入液体复介电常数传感器的通孔32中。S401, insert the
S402,在2.75GHz-3GHz频段的谐振下,使用矢量网络分析仪测量液体复介电常数传感器,得到传输系数中心频率S21参数曲线。S402, under the resonance of the 2.75GHz-3GHz frequency band, a vector network analyzer is used to measure the liquid complex permittivity sensor, and the S21 parameter curve of the center frequency of the transmission coefficient is obtained.
S403,确定S21参数曲线的谐振频率和插入损耗。S403, determine the resonance frequency and insertion loss of the S21 parameter curve.
S404,根据谐振频率确定液体样品的介电常数,根据插入损耗确定液体样品的损耗正切值。S404, the dielectric constant of the liquid sample is determined according to the resonance frequency, and the loss tangent value of the liquid sample is determined according to the insertion loss.
一种实现方式中,液体复介电常数传感器可以采用双SMA(Small AType)接口,可以直接用矢量网络分析仪接入液体复介电常数传感器的接口进行测量。In an implementation manner, the liquid complex permittivity sensor may adopt dual SMA (Small AType) interfaces, and a vector network analyzer may be directly connected to the interface of the liquid complex permittivity sensor for measurement.
一种实现方式中,液体复介电常数传感器的互耦环缝谐振结构31由回路和分割回路的间隙两部分组成。根据互耦环缝谐振结构31,可以得到互耦环缝谐振结构31的等效电路。In an implementation manner, the mutual coupling ring-slit
参见图5,图5为本发明本发明实施例提供的互耦环缝谐振结构的等效电路图。由于回路中的环路电流产生的电感和间隙形成的等效电容共同作用,因此该互耦环缝谐振结构31会产生谐振。由于液体样品的复介电常数的变化,可以导致互耦环缝谐振结构31对应的等效电容的变化,而互补开环结构对应的等效电感基本不变。所以通过微带线层1分别激励左侧和右侧的互补开环结构,可以使互耦环缝谐振结构31的激励电场发生变化。Referring to FIG. 5 , FIG. 5 is an equivalent circuit diagram of a mutually coupled annular slot resonance structure provided by an embodiment of the present invention. Since the inductance generated by the loop current in the loop and the equivalent capacitance formed by the gap work together, the mutual coupling ring
参见图6,图6为本发明实施例提供的在微带线2.75GHz-3GHz的频段激励下液体介电常数传感器的S21参数曲线示意图。Referring to FIG. 6, FIG. 6 is a schematic diagram of the S21 parameter curve of the liquid permittivity sensor under the excitation of the microstrip line in the frequency band of 2.75 GHz-3 GHz provided by the embodiment of the present invention.
使用EM仿真软件的时域求解器对上述液体复介电常数传感器进行仿真,在2.75GHz-3GHz频段的谐振下,计算液体复介电常数传感器的传输系数中心频率S21参数。The time domain solver of the EM simulation software is used to simulate the above-mentioned liquid complex permittivity sensor, and the transmission coefficient center frequency S21 parameter of the liquid complex permittivity sensor is calculated under the resonance of the 2.75GHz-3GHz frequency band.
由图6可知,液体样品的介电常数与S21参数的中心谐振频率相关,因此通过建立不同介电常数的液体样品与S21参数的谐振频率之间的对应关系,可以通过测量S21参数的中心谐振频率,进而确定液体样品的介电常数。It can be seen from Figure 6 that the dielectric constant of the liquid sample is related to the central resonance frequency of the S21 parameter. Therefore, by establishing the corresponding relationship between the liquid samples with different dielectric constants and the resonance frequency of the S21 parameter, the central resonance of the S21 parameter can be measured. frequency to determine the dielectric constant of the liquid sample.
参见图7,图7为本发明实施例提供的在介电常数20和介电常数70、损耗正切值在0-1变化的液体复介电常数传感器的S21参数曲线示意图。Referring to FIG. 7 , FIG. 7 is a schematic diagram of the S21 parameter curve of a liquid complex permittivity sensor with a dielectric constant of 20 and a dielectric constant of 70 and a loss tangent value varying from 0 to 1 according to an embodiment of the present invention.
由图7可知,在对介电常数相同、损耗正切值不同的多个液体样品进行测量时,可以观察到,损耗正切值的变化只会影响S21参数的插入损耗,不会对谐振频率产生影响。因此,通过建立不同损耗正切值的液体样品与S21参数曲线插入损耗之间的对应关系,可以通过测量S21参数的插入损耗,进而确定液体样品的损耗正切值。It can be seen from Figure 7 that when measuring multiple liquid samples with the same dielectric constant and different loss tangents, it can be observed that the change of the loss tangent will only affect the insertion loss of the S21 parameter, and will not affect the resonant frequency. . Therefore, by establishing the correspondence between liquid samples with different loss tangent values and the insertion loss of the S21 parameter curve, the loss tangent value of the liquid sample can be determined by measuring the insertion loss of the S21 parameter.
由于矢量网络分析仪精度可以达到10Hz,因此,液体复介电常数传感器对不同复介电常数的液体样品的反应敏感测量精度可以达到±1之内。Since the accuracy of the vector network analyzer can reach 10Hz, the response-sensitive measurement accuracy of the liquid complex permittivity sensor to liquid samples with different complex permittivity can be within ±1.
以上对本发明的一个实施例进行了详细说明,但所述内容仅为本发明的较佳实施例,不能被认为用于限定本发明的实施范围。凡依本发明申请范围所作的均等变化与改进等,均应仍归属于本发明的专利涵盖范围之内。An embodiment of the present invention has been described in detail above, but the content is only a preferred embodiment of the present invention, and cannot be considered to limit the scope of the present invention. All equivalent changes and improvements made according to the scope of the application of the present invention should still belong to the scope of the patent of the present invention.
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