CN114593059A - Stator component of dry vacuum pump - Google Patents
Stator component of dry vacuum pump Download PDFInfo
- Publication number
- CN114593059A CN114593059A CN202011430505.3A CN202011430505A CN114593059A CN 114593059 A CN114593059 A CN 114593059A CN 202011430505 A CN202011430505 A CN 202011430505A CN 114593059 A CN114593059 A CN 114593059A
- Authority
- CN
- China
- Prior art keywords
- vacuum pump
- gas
- stator component
- stator
- dry vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims abstract description 25
- 238000009434 installation Methods 0.000 claims abstract description 11
- 239000011148 porous material Substances 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 abstract description 13
- 239000000428 dust Substances 0.000 abstract description 3
- 230000002349 favourable effect Effects 0.000 abstract description 3
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 47
- 238000000034 method Methods 0.000 description 10
- 239000010410 layer Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0007—Injection of a fluid in the working chamber for sealing, cooling and lubricating
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
The invention belongs to the field of vacuum pumps, in particular to a stator component of a dry vacuum pump, which comprises a stator component body, wherein a rotor installation cavity is arranged in the stator component body; the stator component body is also provided with a gas distribution channel which is directly communicated with an external gas source and an exhaust side hole in the rotor installation cavity. The invention adopts the structure of the double-layer sealing element, thus effectively prolonging the service life of the whole sealing structure and enhancing the reliability of the dry vacuum pump; through the setting of distribution passageway, can directly let in the pump with cleaning gas in, be favorable to the discharge of vacuum pump interstage condensable gas when reducing the cleaning gas conductance loss, also be favorable to the discharge of the dust medium of being extracted, do not remain at the dead angle in the pump and pile up.
Description
Technical Field
The invention belongs to the field of vacuum pumps, and particularly relates to a stator component of a dry vacuum pump.
Background
Current multi-stage dry vacuum pumps, each cavity is typically formed by two separately machined stator components and the rotor components located within the cavity between them; a single-layer O-shaped ring sealing structure is arranged between the two stator parts for sealing, so that process gas is prevented from leaking to the outside from the pump, and meanwhile, outside gas can be shielded from entering the pump. However, because the process gases are generally highly corrosive, the single layer O-rings mounted on the stator components are susceptible to corrosion and require frequent replacement, which both affects the reliability of the O-ring seal and increases the cost of maintenance per shutdown.
In addition, after the vacuum pump is used, a purge gas needs to be introduced into the multistage dry vacuum pump. However, the structure of the stator part of the existing vacuum pump is not convenient for introducing cleaning gas, the flow conductance loss of the cleaning gas is large, and the discharging effect of condensable gas between stages of the vacuum pump is poor.
Disclosure of Invention
The invention aims to provide a stator component of a dry vacuum pump, aiming at the problems that the existing stator component has low sealing performance and is inconvenient to introduce cleaning gas.
The purpose of the invention is realized by the following technical scheme:
a stator part of a dry vacuum pump comprises a stator part body internally provided with a rotor installation cavity, wherein an inner annular groove and an outer annular groove are respectively arranged on a part contact surface of the stator part body connected with a stator part body of another stator part, the inner annular groove is arranged on the periphery of an opening of the rotor installation cavity on the part contact surface, the outer annular groove is arranged on the periphery of the outer annular groove on the part contact surface, an inner sealing element is arranged in the inner annular groove, and an outer sealing element is arranged in the outer annular groove;
and the stator component body is provided with a gas distribution channel which is directly communicated with an external gas source and an exhaust side hole in the rotor installation cavity.
The air distribution channel is a linear pore channel.
The connecting inlet of the air distribution channel and the external air source is provided with threads, and the air distribution channel is connected with the interface of the external air source through the threads.
The invention has the advantages and positive effects that:
1. the double-layer sealing structure effectively prolongs the service life of the integral sealing structure and enhances the reliability of the dry vacuum pump;
2. according to the invention, through the arrangement of the gas distribution channel, the cleaning gas can be directly introduced into the pump, the flow guide loss of the cleaning gas is reduced, the discharge of the condensable gas between stages of the vacuum pump is facilitated, the discharge of the extracted dust medium is also facilitated, and no residue or accumulation is caused in a dead angle in the pump.
Drawings
FIG. 1 is a schematic structural diagram of the present invention.
In the figure: 1-part contact surface, 2-rotor installation cavity, 3-outer layer ring groove, 4-outer layer sealing element, 5-inner layer ring groove, 6-inner layer sealing element, 7-gas distribution channel and 8-exhaust side hole opening.
Detailed Description
The invention is described in further detail below with reference to fig. 1.
The utility model provides a dry vacuum pump's stator part, including the inside stator part body that is equipped with rotor installation cavity 2, be equipped with inlayer annular 5 and outer annular 3 on the part contact surface 1 that stator part body and another stator part's stator part body are connected respectively, inlayer annular 5 sets up 2 open-ended peripheries of rotor installation cavity on part contact surface 1, outer annular 3 sets up the periphery of outer annular 5 on part contact surface 1, install inlayer sealing member 6 in the inlayer annular 5, install outer sealing member 4 in the outer annular 3. The inner sealing element 6 and the outer sealing element 4 can be made of elastic sealing material or sealant with sealing performance in the prior art, and in the embodiment, the inner sealing element 6 and the outer sealing element 4 are both O-shaped sealing rings; inner seal 6 and outer seal 4 set up between the stator part body of two connections, play and prevent that the inside fluid of stator part body from flowing the effect outside the part from stator part body junction, and inner seal 6 near rotor installation cavity 2 can shield the stator part body in the fluid and be close to the outer seal 4 contact of outside, reinforcing whole sealed effect.
The stator component body is provided with a gas distribution channel 7 which is directly communicated with an external gas source and an exhaust side orifice 8 inside the rotor installation cavity 2, the gas distribution channel 7 is a linear pore passage and can reduce the flow conductance loss of cleaning gas as much as possible, threads are arranged at the connecting inlet of the gas distribution channel 7 and the external gas source, the gas distribution channel 7 is connected with an interface of the external gas source through the threads, NPT taper pipe threads are arranged at the connecting inlet of the gas distribution channel 7 and the external gas source in the embodiment, and the gas distribution channel 7 is connected with the external gas source through a connection mode of an NPT clamping sleeve. Cleaning gas is fed from an external source through the gas distribution channels 7 to the exhaust side port 8, typically selected to be a gas that is inert under the given conditions, such as nitrogen, and this purge gas is used to dilute the process gas in the pump to prevent the process gas from corroding or otherwise causing deposits to form between the rotor and rotor or between the rotor and stator and thereby affecting the clearances, resulting in reduced reliability of the pump. In the invention, cleaning gas directly enters the exhaust side hole 8 in the pump through the gas distribution channel 7 to be mixed with process gas, and the cleaning gas usually enters the rotor mounting cavity 2 at higher pressure, so that the cleaning gas does not flow into the rotor mounting cavity 2 with inappropriate resistance, is favorable for discharging condensable gas between vacuum pump stages and extracted dust medium, and does not remain and accumulate in dead corners in the pump.
The working principle is as follows:
the cleaning gas is input to the exhaust side orifice 8 through the gas distribution channel 7 by an external gas source, dilutes the process gas and carries the process gas and byproducts to be exhausted. The inner seal 6 performs the conventional sealing function. Most of the process gas is shielded there after leaking inside the stator component body to the inner seal 6. The process gas is not contacted with the part outside the inner-layer ring groove 5, so that the contact amount of the process gas and the outer-layer sealing element 4 is reduced to the minimum, and the service life of the integral sealing structure of the double-layer sealing element is prolonged.
Claims (3)
1. The utility model provides a stator part of dry vacuum pump, includes the stator part body that inside was equipped with rotor installation cavity (2), its characterized in that: an inner ring groove (5) and an outer ring groove (3) are respectively arranged on a part contact surface (1) for connecting the stator part body with a stator part body of another stator part, the inner ring groove (5) is arranged on the periphery of an opening of the rotor mounting cavity (2) on the part contact surface (1), the outer ring groove (3) is arranged on the periphery of the outer ring groove (5) on the part contact surface (1), an inner sealing element (6) is arranged in the inner ring groove (5), and an outer sealing element (4) is arranged in the outer ring groove (3);
and the stator component body is provided with a gas distribution channel (7) which is directly communicated with an external gas source and an exhaust side orifice (8) in the rotor mounting cavity (2).
2. A stator component of a dry vacuum pump according to claim 1, wherein: the air distribution channel (7) is a linear pore channel.
3. A stator component of a dry vacuum pump according to claim 1, wherein: the connecting inlet of the air distribution channel (7) and the external air source is provided with threads, and the air distribution channel (7) is connected with the interface of the external air source through the threads.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011430505.3A CN114593059A (en) | 2020-12-07 | 2020-12-07 | Stator component of dry vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011430505.3A CN114593059A (en) | 2020-12-07 | 2020-12-07 | Stator component of dry vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114593059A true CN114593059A (en) | 2022-06-07 |
Family
ID=81812149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011430505.3A Pending CN114593059A (en) | 2020-12-07 | 2020-12-07 | Stator component of dry vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114593059A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050123414A1 (en) * | 2003-12-03 | 2005-06-09 | Matthew Key | Pumping apparatus |
| CN1784546A (en) * | 2003-05-08 | 2006-06-07 | 英国氧气集团有限公司 | Improvements in seal assemblies |
| CN101815873A (en) * | 2007-10-04 | 2010-08-25 | 爱德华兹有限公司 | A multi stage, clam shell vacuum pump |
-
2020
- 2020-12-07 CN CN202011430505.3A patent/CN114593059A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1784546A (en) * | 2003-05-08 | 2006-06-07 | 英国氧气集团有限公司 | Improvements in seal assemblies |
| US20050123414A1 (en) * | 2003-12-03 | 2005-06-09 | Matthew Key | Pumping apparatus |
| CN2844879Y (en) * | 2003-12-03 | 2006-12-06 | 英国氧气集团有限公司 | Pumping apparatus |
| CN101815873A (en) * | 2007-10-04 | 2010-08-25 | 爱德华兹有限公司 | A multi stage, clam shell vacuum pump |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20220607 |
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| RJ01 | Rejection of invention patent application after publication |