CN114574975A - System for reducing iron content in lightly boron-doped crystal bar body and operation method - Google Patents
System for reducing iron content in lightly boron-doped crystal bar body and operation method Download PDFInfo
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- CN114574975A CN114574975A CN202210165196.4A CN202210165196A CN114574975A CN 114574975 A CN114574975 A CN 114574975A CN 202210165196 A CN202210165196 A CN 202210165196A CN 114574975 A CN114574975 A CN 114574975A
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
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Abstract
The invention discloses a system for reducing the iron content in a lightly boron-doped crystal bar body and an operation method. This reduce lightly mix interior iron content system of boron crystal bar and operation method, through at a supporting bench, the recess, the standing groove, driving motor, drive gear, first cell body, the second cell body, first pivot, the second pivot, first rotation gear, centre gripping subassembly, the second rotation gear, elevating system and drive assembly's cooperation is used under, before lightly mixing boron single crystal and not melting, realize the upset when heating, thereby make each face of lightly mixing boron single crystal be heated evenly, in order to improve treatment effect, solved current treatment mode and adopted open thermal field to lightly mix boron single crystal growth, however, lightly mix boron single crystal when the heating, it is inhomogeneous to be heated, influence the problem of treatment effect.
Description
Technical Field
The invention relates to the technical field of semiconductor processing, in particular to a system for reducing the iron content in a lightly boron-doped crystal rod body and an operation method.
Background
A semiconductor refers to a material having a conductivity between a conductor and an insulator at normal temperature. The semiconductor has wide application in radio, television and temperature measurement. Such as diodes, are devices fabricated using semiconductors. Semiconductor refers to a material whose conductivity can be controlled, ranging from an insulator to a conductor. The importance of semiconductors is enormous, both from a technological and economic point of view. Most of today's electronic products, such as computers, mobile phones or digital audio recorders, have a core unit closely related to semiconductors. Common semiconductor materials are silicon, germanium, gallium arsenide, etc., and silicon is the most influential of various semiconductor materials in commercial applications.
At present, two thermal field forms of an open thermal field and a closed thermal field are mainly used for single crystal growth, wherein the closed thermal field is provided with a set of guide cylinders relative to the open thermal field, the main material is high-purity molybdenum, the function of the guide cylinders can reduce the loss of radiation heat and the function of argon guide, and the heating power during single crystal growth can be reduced.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a system and an operation method for reducing the iron content in a lightly boron-doped crystal rod, which solve the problems that the existing treatment mode adopts an open thermal field to carry out the growth of lightly boron-doped single crystals, but the lightly boron-doped single crystals are heated unevenly when being heated, so that the treatment effect is influenced.
In order to achieve the purpose, the invention is realized by the following technical scheme: the utility model provides a reduce and lightly mix interior iron content system of boron crystal bar, includes the barrel, first logical groove has been seted up at the top of barrel, the inside fixedly connected with heater of barrel, the top fixedly connected with draft tube of barrel inner wall, the second logical groove has been seted up to the bottom of barrel, the bottom of barrel is through first bolt fixedly connected with bottom plate, the inside of barrel is provided with adjustment mechanism.
The adjusting mechanism comprises a supporting table, a groove is formed in the top of the supporting table, a placing groove is formed in the bottom of the supporting table, a driving motor is fixedly connected inside the placing groove, a driving gear is fixedly connected to the output end of the driving motor, a first groove body and a second groove body are respectively formed in the supporting table, the first groove body and the second groove body are communicated, a first rotating shaft and a second rotating shaft are respectively and rotatably connected inside the first groove body, a first rotating gear is fixedly connected to the end portion of the first rotating shaft, a clamping assembly is arranged on the first rotating gear, a second rotating gear is fixedly connected to the outer surface of the second rotating shaft, a lifting mechanism is arranged on the supporting table, a transmission assembly is arranged between the second rotating gear and the driving gear, and the transmission assembly comprises a transmission rod arranged in the second rotating gear, the outer surface of the transmission rod is fixedly connected with a first driven gear and a second driven gear respectively, the first driven gear is meshed with the driving gear, and the second rotating gear is meshed with the second driven gear and the first rotating gear respectively.
Preferably, first cell body is provided with two along recess bilateral symmetry, first cell body comprises gear groove, first cross slot and second cross slot, communicate between second cross slot and the recess, first pivot, second pivot and second rotating gear all are arranged in the gear groove, the inside in gear groove is connected with the tip rotation of transfer line.
Preferably, the centre gripping subassembly includes the centre gripping cylinder, the output fixedly connected with supporting rod of centre gripping cylinder, centre gripping cylinder fixed connection is on one side of first rotation gear, the inside looks adaptation of the surface of centre gripping cylinder and first cross slot, the surface of supporting rod and the inside looks adaptation of second cross slot.
Preferably, the lifting mechanism comprises a lifting groove, the lifting groove is formed in the supporting table, the output end of the lifting cylinder is fixedly connected with a lifting table which is arranged in the lifting groove, and a cavity is formed in the top of the lifting table.
Preferably, the lifting groove is composed of a first vertical groove and a second vertical groove, the first vertical groove is communicated with the groove, the lifting cylinder is fixedly connected in the second vertical groove, and the inner part of the first vertical groove is matched with the outer surface of the lifting platform.
Preferably, the outer surface of the supporting table is matched with the inside of the second through groove, a first fixing hole is formed in the bottom of the supporting table, a second fixing hole is formed in the top of the bottom plate in a penetrating mode, and a second bolt is arranged between the first fixing hole and the second fixing hole.
Preferably, a third through groove is formed in the top of the bottom plate in a penetrating mode, the size of the third through groove is the same as that of the placing groove, and the bottom of the bottom plate is fixedly connected with a first supporting plate.
Preferably, the outer surface of the barrel is fixedly connected with a second supporting plate, the outer surface of the barrel is provided with a sealing cover, the top of the inner wall of the sealing cover is fixedly connected with a sealing block, the outer surface of the sealing block is matched with the inside of the first through groove, and the side of the sealing cover is fixedly connected with a handle.
The invention also discloses an operation method of the system for reducing the iron content in the lightly boron-doped crystal bar, which specifically comprises the following steps:
s1, firstly, placing the lightly boron-doped single crystal in the concave cavity, enabling most of the lightly boron-doped single crystal to be in an exposed state, then, starting the heater, utilizing the heater to generate heat, heating the upper part of the lightly boron-doped single crystal through the groove, and then, starting the lifting cylinder to drive the lifting platform to ascend, thereby driving the lightly boron-doped single crystal to ascend;
s2, starting the clamping cylinder so that the clamping cylinder drives the clamping rods to move, clamping the lightly boron-doped single crystal by using the two clamping rods, and driving the lifting platform to reset by the lifting cylinder;
s3, starting a driving motor to drive a driving gear to rotate, so that a transmission rod is driven to rotate through the meshing effect of the driving gear and a first driven gear, and a second driven gear is driven to rotate;
s4, finally, after the lightly boron-doped single crystal is turned over and heated, the lightly boron-doped single crystal is placed back in the cavity, and the lightly boron-doped single crystal is melted, so that the lightly boron-doped single crystal is turned over when being heated before being melted, all surfaces of the lightly boron-doped single crystal are heated uniformly, the treatment effect is improved, and the problems that the existing treatment mode adopts an open thermal field to carry out lightly boron-doped single crystal growth, but the lightly boron-doped single crystal is heated non-uniformly to influence the treatment effect when being heated are solved.
Preferably, the lifting cylinder in the step S1, the clamping cylinder in the step S2 and the driving motor in the step S3 are all controlled by an external control program, and the driving motor in the step S3 stops for a period of time after each half-turn of rotation of the lightly boron-doped single crystal is driven by the driving motor.
Advantageous effects
The invention provides a system for reducing the iron content in a lightly boron-doped crystal rod body and an operation method. Compared with the prior art, the method has the following beneficial effects:
(1) the adjusting mechanism comprises a supporting table, the top of the supporting table is provided with a groove, the bottom of the supporting table is provided with a placing groove, the interior of the placing groove is fixedly connected with a driving motor, the output end of the driving motor is fixedly connected with a driving gear, the interior of the supporting table is respectively provided with a first groove body and a second groove body, the first groove body and the second groove body are communicated, the interior of the first groove body is respectively and rotatably connected with a first rotating shaft and a second rotating shaft, the end part of the first rotating shaft is fixedly connected with a first rotating gear, the first rotating gear is provided with a clamping assembly, the outer surface of the second rotating shaft is fixedly connected with a second rotating gear, the supporting table is provided with a lifting mechanism, a transmission assembly is arranged between the second rotating gear and the driving gear, the transmission assembly comprises a transmission rod arranged in the second groove body, the outer surface of transfer line fixedly connected with first driven gear and second driven gear respectively, mesh between first driven gear and the drive gear, second rotating gear meshes with second driven gear and first rotating gear branch respectively, through at the brace table, the recess, the standing groove, driving motor, drive gear, first cell body, the second cell body, first pivot, the second pivot, first rotating gear, the centre gripping subassembly, the second rotating gear, elevating system and transmission assembly's cooperation is used under, before lightly doping boron single crystal and not melting, realize the upset when heating, thereby make lightly doping boron single crystal each side be heated evenly, with the improvement treatment effect, solved current processing mode and adopted open thermal field to lightly dope boron single crystal growth, however, lightly doping boron single crystal is when heating, it is inhomogeneous to be heated, influence the problem of treatment effect.
(2) According to the system for reducing the content of iron in the lightly boron-doped crystal bar body and the operation method, the third through groove is formed in the top of the bottom plate in a penetrating mode, the size of the third through groove is the same as that of the placing groove, the first supporting plate is fixedly connected to the bottom of the bottom plate, and the third through groove and the first supporting plate are matched for use, so that heat dissipation is facilitated when the driving motor works.
(3) This reduce and lightly mix interior iron content system of boron crystal bar and operation method, through the fixed surface at the barrel and be connected with the second backup pad, the surface of barrel is provided with the closing cap, the sealed piece of top fixedly connected with of closing cap inner wall, the surface of sealed piece and the inside looks adaptation in first logical groove, the side fixedly connected with handle of closing cap, through under the cooperation of closing cap, sealed piece and handle, when not using this equipment, be favorable to covering this equipment, in order to reach dustproof effect.
(4) The system for reducing the iron content in the lightly boron-doped crystal bar body and the operation method thereof have the advantages that the outer surface of the supporting table is matched with the inside of the second through groove, the first fixing hole is formed in the bottom of the supporting table, the second fixing hole is formed in the top of the bottom plate in a penetrating mode, the second bolt is arranged between the first fixing hole and the second fixing hole, the driving motor can be conveniently dismounted and mounted through the matching of the first fixing hole, the second fixing hole and the second bolt, and the driving motor can be conveniently overhauled.
Drawings
FIG. 1 is an exploded view of the present invention;
FIG. 2 is a cross-sectional view of the cartridge of the present invention;
FIG. 3 is a cross-sectional view of a support table of the present invention;
FIG. 4 is an enlarged view of a portion of the invention at A in FIG. 3;
FIG. 5 is an enlarged view of a portion of the invention at B in FIG. 3;
FIG. 6 is a partial cross-sectional view taken at C of FIG. 3 in accordance with the present invention;
FIG. 7 is a bottom view of the support base of the present invention;
FIG. 8 is a perspective view of the base plate of the present invention;
FIG. 9 is a cross-sectional view of the lift table of the present invention;
fig. 10 is a perspective view of the closure of the present invention.
In the figure: 1-cylinder body, 2-first through groove, 3-heater, 4-guide cylinder, 5-second through groove, 6-first bolt, 7-bottom plate, 8-adjusting mechanism, 801-supporting table, 802-groove, 803-placing groove, 804-driving motor, 805-driving gear, 806-first groove body, 8061-gear groove, 8062-first transverse groove, 8063-second transverse groove, 807-second groove body, 808-first rotating shaft, 809-second rotating shaft, 810-first rotating gear, 811-clamping component, 8111-clamping cylinder, 8112-clamping rod, 812-second rotating gear, 813-lifting mechanism, 8131-lifting groove, 8131-1-first vertical groove, 8131-2-second vertical groove, 8132-a lifting cylinder, 8133-a lifting platform, 8134-a cavity, 814-a transmission component, 8141-a transmission rod, 8142-a first driven gear, 8143-a second driven gear, 9-a first fixing hole, 10-a second fixing hole, 11-a second bolt, 12-a third through groove, 13-a first supporting plate, 14-a second supporting plate, 15-a sealing cover, 16-a sealing block and 17-a handle.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-10, the present invention provides a technical solution: a system for reducing the iron content in a lightly boron-doped crystal bar comprises a barrel body 1, wherein a first through groove 2 is formed in the top of the barrel body 1, a heater 3 is fixedly connected inside the barrel body 1, a guide cylinder 4 is fixedly connected to the top of the inner wall of the barrel body 1, a second through groove 5 is formed in the bottom of the barrel body 1, a bottom plate 7 is fixedly connected to the bottom of the barrel body 1 through a first bolt 6, and an adjusting mechanism 8 is arranged inside the barrel body 1; the adjusting mechanism 8 comprises a supporting platform 801, a groove 802 is formed in the top of the supporting platform 801, a placing groove 803 is formed in the bottom of the supporting platform 801, a driving motor 804 is fixedly connected inside the placing groove 803, a driving gear 805 is fixedly connected to the output end of the driving motor 804, a first groove body 806 and a second groove body 807 are respectively formed in the supporting platform 801, the first groove body 806 is communicated with the second groove body 807, a first rotating shaft 808 and a second rotating shaft 809 are respectively rotatably connected inside the first groove body 806, a first rotating gear 810 is fixedly connected to the end portion of the first rotating shaft 808, a clamping assembly 811 is arranged on the first rotating gear 810, a second rotating gear 812 is fixedly connected to the outer surface of the second rotating shaft 809, a lifting mechanism 813 is arranged on the supporting platform 801, a transmission assembly 814 is arranged between the second rotating gear 812 and the driving gear 805, the transmission assembly 814 comprises a transmission rod 8141 arranged in the second groove body 807, the outer surface of the transmission rod 8141 is fixedly connected with a first driven gear 8142 and a second driven gear 8143 respectively, the first driven gear 8142 is meshed with the driving gear 805, the second rotating gear 812 is meshed with the second driven gear 8143 and the first rotating gear 810 respectively, and the lightly boron-doped single crystal is overturned when being heated before being melted by matching the supporting table 801, the groove 802, the placing groove 803, the driving motor 804, the driving gear 805, the first groove body 806, the second groove body 807, the first rotating shaft 808, the second rotating shaft 809, the first rotating gear 810, the clamping assembly 811, the second rotating gear 812, the lifting mechanism 813 and the transmission assembly 814, so that all surfaces of the lightly boron-doped single crystal are uniformly heated to improve the treatment effect, and the problem that the existing treatment mode adopts an open type thermal field to carry out the growth of the lightly boron-doped single crystal is solved, however, when the lightly boron-doped single crystal is heated, the heating is uneven, and the processing effect is affected, the first groove body 806 is symmetrically arranged along the left and right of the groove 802, the first groove body 806 is composed of a gear groove 8061, a first transverse groove 8062 and a second transverse groove 8063, the second transverse groove 8063 is communicated with the groove 802, the first rotating shaft 808, the second rotating shaft 809 and the second rotating gear 812 are all positioned in the gear groove 8061, the inside of the gear groove 8061 is rotatably connected with the end part of the transmission rod 8141, the clamping component 811 comprises a clamping cylinder 8111, the output end of the clamping cylinder 8111 is fixedly connected with a clamping rod 8112, the clamping cylinder 8111 is fixedly connected on one side of the first rotating gear 810, the outer surface of the clamping cylinder 8111 is matched with the inside of the first transverse groove 8062, the outer surface of the clamping rod 8112 is matched with the inside of the second transverse groove 8063, the lifting mechanism 813 comprises a lifting groove 8131, the lifting groove 8131 is arranged inside the supporting table 801, the lifting groove 8131 is internally provided with a lifting table 8133 fixedly connected with the output end of the lifting cylinder 8132, a concave cavity 8134 is arranged at the top of the lifting platform 8133, the lifting groove 8131 consists of a first vertical groove 8131-1 and a second vertical groove 8131-2, the first vertical groove 8131-1 is communicated with the groove 802, the lifting cylinder 8132 is fixedly connected in the second vertical groove 8131-2, the interior of the first vertical groove 8131-1 is matched with the outer surface of the lifting platform 8133, the outer surface of the supporting platform 801 is matched with the interior of the second through groove 5, the bottom of the supporting platform 801 is provided with a first fixing hole 9, the top of the bottom plate 7 is provided with a second fixing hole 10 in a penetrating way, a second bolt 11 is arranged between the first fixing hole 9 and the second fixing hole 10, the driving motor 804 can be conveniently dismounted and mounted through the matching use of the first fixing hole 9, the second fixing hole 10 and the second bolt 11, the driving motor 804 can be conveniently overhauled, a third through groove 12 is arranged at the top of the bottom plate 7, the size of third through groove 12 is the same with standing groove 803, the first backup pad 13 of bottom plate 7's bottom fixedly connected with, use down through the cooperation that sets up third through groove 12 and first backup pad 13, be favorable to driving motor 804 during operation to dispel the heat, barrel 1's external surface fixedly connected with second backup pad 14, barrel 1's surface is provided with closing cap 15, the sealed piece 16 of top fixedly connected with of closing cap 15 inner wall, the surface of sealed piece 16 and the inside looks adaptation of first through groove 2, the side fixedly connected with handle 17 of closing cap 15, through at closing cap 15, the cooperation of sealed piece 16 and handle 17 is used down, when not using this equipment, be favorable to covering this equipment, in order to reach dustproof effect.
The invention also discloses an operation method of the system for reducing the iron content in the lightly boron-doped crystal bar, which specifically comprises the following steps:
s1, firstly, placing the lightly boron-doped single crystal in the cavity 8134, enabling most of the lightly boron-doped single crystal to be in an exposed state, then, starting the heater 3, utilizing the heater 3 to generate heat, heating the upper part of the lightly boron-doped single crystal through the groove 802, and then, starting the lifting cylinder 8132 to drive the lifting table 8133 to ascend, thereby driving the lightly boron-doped single crystal to ascend;
s2, starting the clamping cylinder 8111, enabling the clamping cylinder 8111 to drive the clamping rods 8112 to move, clamping the lightly boron-doped single crystal by utilizing the two clamping rods 8112, and enabling the lifting cylinder 8132 to drive the lifting table 8133 to reset;
s3, then, the driving motor 804 is turned on to drive the driving gear 805 to rotate, so that the driving rod 8141 is driven to rotate by the engagement effect of the driving gear 805 and the first driven gear 8142, and the second driven gear 8143 is driven to rotate, and the first rotating gear 810 is driven to rotate by the engagement transmission effect of the second rotating gear 812 and the first rotating gear 810 and the second driven gear 8143, so that the clamping cylinder 8111 and the clamping rod 8112 are driven to rotate;
s4, finally, after the lightly boron-doped single crystal is turned over and heated, the lightly boron-doped single crystal is placed back in the cavity 8134, and the lightly boron-doped single crystal is melted, so that the lightly boron-doped single crystal is turned over when being heated before being melted, all surfaces of the lightly boron-doped single crystal are uniformly heated, the treatment effect is improved, and the problems that the lightly boron-doped single crystal grows by adopting an open thermal field in the conventional treatment mode, but the lightly boron-doped single crystal is not uniformly heated when being heated and the treatment effect is influenced are solved.
In the invention, the lifting cylinders 8132 in S1, the clamping cylinders 8111 in S2 and the driving motors 804 in S3 are controlled by an external control program, and the driving motors 804 in S3 stop for a period of time after driving the lightly boron-doped single crystal to rotate for half a circle.
And those not described in detail in this specification are well within the skill of those in the art.
It should be noted that, in this document, relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. The utility model provides a reduce and lightly mix interior iron content system of boron crystal bar, includes barrel (1), first logical groove (2) have been seted up at the top of barrel (1), the inside fixedly connected with heater (3) of barrel (1), the top fixedly connected with draft tube (4) of barrel (1) inner wall, its characterized in that: a second through groove (5) is formed in the bottom of the barrel body (1), a bottom plate (7) is fixedly connected to the bottom of the barrel body (1) through a first bolt (6), and an adjusting mechanism (8) is arranged inside the barrel body (1);
the adjusting mechanism (8) comprises a supporting table (801), a groove (802) is formed in the top of the supporting table (801), a placing groove (803) is formed in the bottom of the supporting table (801), a driving motor (804) is fixedly connected to the inside of the placing groove (803), a driving gear (805) is fixedly connected to the output end of the driving motor (804), a first groove body (806) and a second groove body (807) are respectively formed in the supporting table (801), the first groove body (806) is communicated with the second groove body (807), a first rotating shaft (808) and a second rotating shaft (809) are respectively rotatably connected to the inside of the first groove body (806), a first rotating gear (810) is fixedly connected to the end of the first rotating shaft (808), a clamping assembly (811) is arranged on the first rotating gear (810), and a second rotating gear (812) is fixedly connected to the outer surface of the second rotating shaft (809), the supporting table (801) is provided with a lifting mechanism (813), a transmission assembly (814) is arranged between the second rotating gear (812) and the driving gear (805), the transmission assembly (814) comprises a transmission rod (8141) arranged in the second groove body (807), the outer surface of the transmission rod (8141) is fixedly connected with a first driven gear (8142) and a second driven gear (8143) respectively, the first driven gear (8142) is meshed with the driving gear (805), and the second rotating gear (812) is meshed with the second driven gear (8143) and the first rotating gear (810) respectively.
2. The system of claim 1, wherein the system is configured to reduce the amount of iron in the lightly boron-doped ingot by: the first groove body (806) is bilaterally symmetrically arranged along the groove (802), the first groove body (806) is composed of a gear groove (8061), a first transverse groove (8062) and a second transverse groove (8063), the second transverse groove (8063) is communicated with the groove (802), the first rotating shaft (808), the second rotating shaft (809) and the second rotating gear (812) are all located in the gear groove (8061), and the inside of the gear groove (8061) is rotatably connected with the end part of the transmission rod (8141).
3. The system of claim 1, wherein the system is configured to reduce the amount of iron in the lightly boron-doped ingot by: centre gripping subassembly (811) includes centre gripping cylinder (8111), the output fixedly connected with clamping rod (8112) of centre gripping cylinder (8111), centre gripping cylinder (8111) fixed connection is on one side of first rotating gear (810), the inside looks adaptation of the surface of centre gripping cylinder (8111) and first cross slot (8062), the surface of clamping rod (8112) and the inside looks adaptation of second cross slot (8063).
4. The system of claim 1, wherein the system is configured to reduce the amount of iron in the lightly boron-doped ingot by: elevating system (813) include lift groove (8131), set up in the inside of brace table (801) lift groove (8131), the output end fixedly connected with elevating platform (8133) that the inside of lift groove (8131) was provided with lift cylinder (8132), cavity (8134) has been seted up at the top of elevating platform (8133).
5. The system of claim 4, wherein the system comprises: the lifting groove (8131) is composed of a first vertical groove (8131-1) and a second vertical groove (8131-2), the first vertical groove (8131-1) is communicated with the groove (802), the lifting cylinder (8132) is fixedly connected into the second vertical groove (8131-2), and the interior of the first vertical groove (8131-1) is matched with the outer surface of the lifting platform (8133).
6. The system of claim 1, wherein the system is configured to reduce the amount of iron in the lightly boron-doped ingot by: the outer surface of the supporting table (801) is matched with the inside of the second through groove (5), a first fixing hole (9) is formed in the bottom of the supporting table (801), a second fixing hole (10) is formed in the top of the bottom plate (7) in a penetrating mode, and a second bolt (11) is arranged between the first fixing hole (9) and the second fixing hole (10).
7. The system of claim 6, wherein the system comprises: the top of the bottom plate (7) is provided with a third through groove (12) in a penetrating mode, the size of the third through groove (12) is the same as that of the placing groove (803), and the bottom of the bottom plate (7) is fixedly connected with a first supporting plate (13).
8. The system of claim 1, wherein the system is configured to reduce the amount of iron in the lightly boron-doped ingot by: the outer fixed surface of barrel (1) is connected with second backup pad (14), the surface of barrel (1) is provided with closing cap (15), the top fixedly connected with of closing cap (15) inner wall seals piece (16), the surface of sealing piece (16) and the inside looks adaptation of first logical groove (2), the side fixedly connected with handle (17) of closing cap (15).
9. An operation method of a system for reducing the iron content in a lightly boron-doped crystal bar is characterized in that: the method specifically comprises the following steps:
s1, firstly, placing the lightly boron-doped single crystal in the cavity (8134), enabling most of the lightly boron-doped single crystal to be in an exposed state, then, starting the heater (3), utilizing the heater (3) to generate heat, heating the upper part of the lightly boron-doped single crystal through the groove (802), and then, starting the lifting cylinder (8132) to drive the lifting platform (8133) to ascend, thereby driving the lightly boron-doped single crystal to ascend;
s2, then, starting the clamping cylinder (8111), so that the clamping cylinder (8111) drives the clamping rods (8112) to move, the two clamping rods (8112) are used for clamping the lightly boron-doped single crystal, and then, the lifting cylinder (8132) drives the lifting table (8133) to reset;
s3, starting a driving motor (804) to drive a driving gear (805) to rotate, so that a driving rod (8141) is driven to rotate through the meshing effect of the driving gear (805) and a first driven gear (8142), a second driven gear (8143) is driven to rotate, and a first rotating gear (810) is driven to rotate through the meshing transmission effect of the second rotating gear (812) and the first rotating gear (810) and the second driven gear (8143), so that a clamping cylinder (8111) and a clamping rod (8112) are driven to rotate;
s4, finally, the lightly boron-doped single crystal is placed back in the cavity (8134) after being heated by continuously turning over the lightly boron-doped single crystal, and the lightly boron-doped single crystal is melted, so that the lightly boron-doped single crystal is turned over when being heated before being melted, all surfaces of the lightly boron-doped single crystal are uniformly heated, the treatment effect is improved, and the problem that the treatment effect is influenced because the lightly boron-doped single crystal is not uniformly heated when the existing treatment mode adopts an open thermal field to grow the lightly boron-doped single crystal is solved.
10. The method of claim 9, wherein the system further comprises: the lifting cylinder (8132) in the S1, the clamping cylinder (8111) in the S2 and the driving motor (804) in the S3 are controlled by an external control program, and the driving motor (804) in the S3 stops for a period of time after driving the lightly boron-doped single crystal to rotate for half a turn.
Priority Applications (1)
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| CN204125562U (en) * | 2014-07-30 | 2015-01-28 | 上海合晶硅材料有限公司 | Draw the closed thermal field of light boron-doping monocrystalline crystal bar |
| CN204251762U (en) * | 2014-11-27 | 2015-04-08 | 乐山新天源太阳能科技有限公司 | A kind of thermal field structure of single crystal furnace |
| CN112708931A (en) * | 2021-01-21 | 2021-04-27 | 郭艳 | Thermal field suspension single crystal furnace and method |
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| JP2000072595A (en) * | 1998-08-31 | 2000-03-07 | Shin Etsu Handotai Co Ltd | Single silicon crystal wafer doped with boron and epitaxial silicon wafer and their production |
| CN204125562U (en) * | 2014-07-30 | 2015-01-28 | 上海合晶硅材料有限公司 | Draw the closed thermal field of light boron-doping monocrystalline crystal bar |
| CN204251762U (en) * | 2014-11-27 | 2015-04-08 | 乐山新天源太阳能科技有限公司 | A kind of thermal field structure of single crystal furnace |
| CN112708931A (en) * | 2021-01-21 | 2021-04-27 | 郭艳 | Thermal field suspension single crystal furnace and method |
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