CN114571614B - Subassembly that splashes is prevented in washing of full-automatic scribing machine - Google Patents
Subassembly that splashes is prevented in washing of full-automatic scribing machine Download PDFInfo
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- CN114571614B CN114571614B CN202210482720.0A CN202210482720A CN114571614B CN 114571614 B CN114571614 B CN 114571614B CN 202210482720 A CN202210482720 A CN 202210482720A CN 114571614 B CN114571614 B CN 114571614B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Condensed Matter Physics & Semiconductors (AREA)
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- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention belongs to the technical field of cleaning and splashing prevention of a full-automatic scribing machine, and particularly provides a cleaning and splashing prevention assembly of the full-automatic scribing machine. The cleaning and anti-splashing component of the full-automatic dicing saw mainly comprises a power component, a protective curtain component and a protective pad, wherein the protective curtain component comprises a membrane component, a movable end bracket, a fixed end bracket and a framework; the protective pad is a wire mesh protective pad which comprises a woven layer, a hook-shaped wire mesh and a glue layer. The protective curtain component with the folding membrane structure is used as a splash-proof component of the cleaning area, so that the space occupied by the splash-proof component is greatly reduced; the protection pad adhered to the side wall of the water tank in the cleaning area can effectively absorb product particles which collide to the side wall of the water tank at a high speed under the centrifugal action; the hook-shaped silk screen can fix the product particles impacting the surface of the silk screen protection pad, so that the product particles are prevented from continuously moving along with air flow or water flow in a water tank of the cleaning area, uncontrollable factors are reduced, and the running stability of equipment is improved.
Description
Technical Field
The invention belongs to the technical field of cleaning and splash prevention of a full-automatic scribing machine, and particularly provides a cleaning and splash prevention assembly of the full-automatic scribing machine.
Background
Dicing saws are a common type of dicing apparatus for cutting semiconductor products.
When the dicing saw is used for cutting a semiconductor product, the UV film is used as a carrier, and if bubbles are left between the semiconductor product and the UV film due to improper operation in the pasting process, semiconductor product particles and leftover bits and pieces at the bubbles can fall off from the UV film. The product particles and the leftover materials which are dropped off in the cleaning process fly out of the cleaning area due to the centrifugal force generated by high-speed rotation, if the product to be processed is just taken out by the carrying system, the flying particles and the flying waste materials have the risk of scratching the product to be processed.
Disclosure of Invention
In order to solve the problems, the invention provides a cleaning anti-splashing assembly of a full-automatic scribing machine.
In order to realize the purpose, the invention adopts the technical scheme that: the utility model provides a subassembly that splashes is prevented in washing of full-automatic scribing machine, is including setting up in last cover plate at scribing machine washing zone top, setting up in the basin lateral wall in scribing machine washing zone cavity, setting up core backplate and the power component on scribing machine washing zone core frame, core backplate is located the upper portion of last cover plate, the upper surface department of going up the cover plate is equipped with the protection curtain subassembly, and the protection curtain subassembly is connected with power component's output towards the inboard one end of scribing machine, and the core backplate is located power component's upside, the inner wall of basin lateral wall is pasted and is had the protection pad.
Further, the protective curtain component comprises a membrane component, a movable end support, a fixed end support and frameworks, the movable end support and the fixed end support are respectively and fixedly connected to the front end and the rear end of the membrane component, the frameworks are pasted on the upper surface of the membrane component at equal intervals, the membrane component is provided with creases at equal intervals along the frameworks, the left end of the movable end support is connected with the output end of the power component, and the fixed end support is fixedly installed on a shell frame of the dicing saw, which is located on the rear side of the upper cover plate.
Further, the power assembly is a rodless cylinder, a cylinder mounting base plate is fixedly mounted on a frame of the core of the cleaning area of the dicing saw, a cylinder mounting plate is fixedly mounted on the right side wall of the cylinder mounting base plate, the rodless cylinder is assembled on the cylinder mounting plate, and a moving assembly of the rodless cylinder is fixedly connected with the left end of the protective curtain assembly.
Further, the protection pad is a wire mesh protection pad.
Furthermore, the silk screen protection pad includes weaving layer, hook-like silk screen, glue film, and a plurality of hook-like silk screens are evenly provided with to one side of weaving layer, and the glue film is pasted to the other side of weaving layer, and the glue film is pasted in the surface of basin lateral wall.
Further, the front end of upper shield plate upper surface is equipped with the splashproof baffle, when the protection curtain subassembly is in fold condition, leave the clearance between it and the upper shield plate, and when the protection curtain subassembly was in the expansion state, its front end was laminated with the splashproof baffle mutually.
Further, the right end of upper shield plate upper surface is equipped with the slide rail, the right-hand member slidable mounting of protection curtain subassembly is in the slide rail.
Further, the exterior of the power assembly is fitted with a splash guard.
Further, the front side and the rear side of the rodless cylinder are provided with magnetic in-place switches.
The beneficial effects of the invention are as follows:
1. the protective curtain component with the folding film structure is used as a splash-proof component of the cleaning area, so that the space occupied by the splash-proof component is greatly reduced;
2. the protection pad adhered to the side wall of the water tank in the cleaning area can effectively absorb product particles which collide to the side wall of the water tank at a high speed under the centrifugal action;
3. the hook-shaped silk screen can fix the product particles impacting the surface of the silk screen protection pad, so that the product particles are prevented from continuously moving along with air flow or water flow in a water tank of the cleaning area, uncontrollable factors are reduced, and the running stability of equipment is improved.
Drawings
FIG. 1 is a schematic structural diagram of a cleaning area of a dicing saw;
FIG. 2 is a schematic structural view of the present invention;
FIG. 3 is an exploded view of the present invention;
FIG. 4 is a schematic view of a rodless cylinder and protective curtain assembly of the present invention;
FIG. 5 is a left front side view of the assembled relationship between the side wall of the sink and the wire mesh pad of the present invention;
FIG. 6 is a front right side view of the basin side wall and wire mesh protection pad assembly of the present invention;
fig. 7 is a schematic view of a wire mesh pad structure according to the present invention.
The reference numerals include: 1-upper cover plate; 2-side wall of water tank; 3-a rear baffle of the machine core; 4-cylinder mounting bottom plate; 5-cylinder mounting plate; 6-rodless cylinder; 7-a protective curtain assembly; 701-a membrane module; 702 — a mobile end support; 703-a fixed end support; 704-a skeleton; 8-a splash guard; 9-a slide rail; 10-anti-splash protective shell; 11-wire mesh protection pads; 1101-knit layer; 1102-hook wire mesh; 1103-glue line.
Detailed Description
The present invention is described in detail below with reference to the attached drawings.
Referring to fig. 1-7, a subassembly that splashes is prevented in washing of full-automatic scribing machine, including setting up in upper shield plate 1 at scribing machine washing district top, setting up in the basin lateral wall 2 in scribing machine washing district cavity, setting up in core backplate 3 and the power component on scribing machine washing district core frame, core backplate 3 is located the upper portion of upper shield plate 1, the upper surface department of upper shield plate 1 is equipped with protective curtain subassembly 7, and protective curtain subassembly 7 is connected with power component's output towards the inboard one end of scribing machine, and core backplate 3 is located power component's upside, the inner wall of basin lateral wall 2 is pasted and is had the protection pad.
Dicing saw equipment compact structure washs district top space and need reserve manipulator removal space, so the clearance district cabin cover of assembly integrated into one piece will seriously influence the space distribution of each construction assembly of current dicing saw, and the protection curtain subassembly 7 of the foldable membrane structure of this scheme adoption is as wasing district splashproof subassembly, very big reduction the shared space of splashproof subassembly.
After the protection curtain assembly 7 is folded, liquid drops on the surface of the protection curtain assembly 7 can be extruded, and in the process of multiple cleaning operations, no liquid drops are continuously accumulated on the surface of the protection curtain assembly 7, so that the problem that the liquid drops are dropped on the surface of a product after the liquid drops are continuously gathered is avoided.
The protection pad pasted in the side wall 2 of the water tank in the cleaning area can effectively absorb the product particles which collide to the side wall 2 of the water tank at high speed under the centrifugal action.
The protective curtain component 7 comprises a membrane component 701, a movable end support 702, a fixed end support 703 and skeletons 704, wherein the movable end support 702 and the fixed end support 703 are fixedly connected to the front end and the rear end of the membrane component 701 respectively, the skeletons 704 are adhered to the upper surface of the membrane component 701 at equal intervals, the membrane component 701 is provided with creases at equal intervals along the skeletons 704, the left end of the movable end support 702 is connected with the output end of a power component, and the fixed end support 703 is fixedly installed on a shell frame of the scribing machine on the rear side of the upper cover plate 1.
Preferably, both the membrane assembly 701 and the framework 704 are made of transparent materials; so as to observe the working state of the equipment in the cleaning tank.
The power component is a rodless cylinder 6, a cylinder mounting base plate 4 is fixedly mounted on a frame of a machine core of a dicing saw cleaning area, a cylinder mounting plate 5 is fixedly mounted on the right side wall of the cylinder mounting base plate 4, the rodless cylinder 6 is assembled on the cylinder mounting plate 5, and a moving component of the rodless cylinder 6 is fixedly connected with the left end of a protective curtain component 7.
The pad is a wire mesh pad 11.
The screen protection pad 11 comprises a woven layer 1101, a hook-shaped screen 1102 and an adhesive layer 1103, wherein a plurality of hook-shaped screens 1102 are uniformly arranged on one side surface of the woven layer 1101, the adhesive layer 1103 is adhered to the other side surface of the woven layer 1101, and the adhesive layer 1103 is adhered to the surface of the side wall 2 of the sink.
The hook-shaped wire mesh 1102 can fix the product particles (winding the particles in the hook-shaped wire mesh 1102) which impact the surface of the wire mesh pad 11, so that the product particles are prevented from continuously moving along with air flow or water flow in a water tank of a cleaning area, uncontrollable factors are reduced, and the running stability of equipment is improved.
The front end of the upper surface of the upper cover plate 1 is equipped with a splash guard 8, when the protective curtain assembly 7 is in a folded state, a gap is left between the protective curtain assembly 7 and the upper cover plate 1, and when the protective curtain assembly 7 is in an unfolded state, the front end of the protective curtain assembly 7 is attached to the splash guard 8.
The splash guard 8 is attached to the moving end bracket 702 of the protective curtain assembly 7, blocking the gap between the protective curtain assembly 7 and the upper shield 1.
The right-hand member of upper cover plate 1 upper surface is equipped with slide rail 9, the right-hand member slidable mounting of protection curtain subassembly 7 is in slide rail 9.
The slide rail 9 plays a certain supporting role on the right end of the protective curtain component 7, so that the stability of the protective curtain component 7 in the opening and closing process is ensured; the right end of the framework 704 can be provided with a pulley mechanism, so that the fluency of the opening and closing process of the protective curtain assembly 7 is further improved.
The exterior of the power assembly is fitted with a splash guard 10.
The front side and the rear side of the rodless cylinder 6 are provided with magnetic in-place switches.
The maximum stroke of rodless cylinder 6 is greater than the biggest expansion length of protection curtain subassembly 7, reserves the equipment adjustment of being convenient for of displacement surplus, and the switch that targets in place can monitor the state that opens and shuts of protection curtain subassembly 7, guarantees that protection curtain subassembly 7 expandes the in-process, removes end support 702 and can laminate with splash guard 8 just.
The foregoing is only a preferred embodiment of the present invention, and many variations in the detailed description and the application range can be made by those skilled in the art without departing from the spirit of the present invention, and all changes that fall within the protective scope of the invention are therefore considered to be within the scope of the invention.
Claims (6)
1. The utility model provides a subassembly that splashes is prevented in washing of full-automatic scribing machine which characterized in that: the automatic scribing machine comprises an upper cover plate arranged at the top of a scribing machine cleaning area, a water tank side wall arranged in a scribing machine cleaning area chamber, a machine core rear baffle arranged on a machine core framework of the scribing machine cleaning area and a power assembly, wherein the machine core rear baffle is positioned at the upper part of the upper cover plate;
the protective curtain component comprises a membrane component, a movable end support, a fixed end support and frameworks, wherein the movable end support and the fixed end support are respectively and fixedly connected to the front end and the rear end of the membrane component;
the protection pad is a wire mesh protection pad;
the silk screen protection pad comprises a weaving layer, hook-shaped silk screens and a glue layer, wherein one side surface of the weaving layer is uniformly provided with a plurality of hook-shaped silk screens, the other side surface of the weaving layer is adhered with the glue layer, and the glue layer is adhered to the surface of the side wall of the water tank.
2. The cleaning splash-proof assembly of the full-automatic scribing machine according to claim 1, wherein: the power assembly is a rodless cylinder, a cylinder mounting base plate is fixedly mounted on a frame of a core of a cleaning area of the dicing saw, a cylinder mounting plate is fixedly mounted on the right side wall of the cylinder mounting base plate, the rodless cylinder is assembled on the cylinder mounting plate, and a moving assembly of the rodless cylinder is fixedly connected with the left end of the protective curtain assembly.
3. The cleaning splash-proof assembly of the full-automatic scribing machine according to claim 1, wherein: the front end of upper shield upper surface is equipped with the splashproof baffle, when the protection curtain subassembly is in fold condition, leave the clearance between it and the upper shield, and when the protection curtain subassembly was in the expansion state, its front end was laminated with the splashproof baffle mutually.
4. The cleaning splash-proof assembly of the full-automatic scribing machine according to claim 1, wherein: the right-hand member of upper cover plate upper surface is equipped with the slide rail, the right-hand member slidable mounting of protection curtain subassembly is in the slide rail.
5. The cleaning splash-proof assembly of the full-automatic scribing machine according to claim 1, wherein: the exterior of the power assembly is fitted with a splash guard.
6. The cleaning splash-proof assembly of the full-automatic scribing machine according to claim 2, wherein: the front side and the rear side of the rodless cylinder are provided with magnetic in-place switches.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210482720.0A CN114571614B (en) | 2022-05-06 | 2022-05-06 | Subassembly that splashes is prevented in washing of full-automatic scribing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210482720.0A CN114571614B (en) | 2022-05-06 | 2022-05-06 | Subassembly that splashes is prevented in washing of full-automatic scribing machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114571614A CN114571614A (en) | 2022-06-03 |
| CN114571614B true CN114571614B (en) | 2022-07-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210482720.0A Active CN114571614B (en) | 2022-05-06 | 2022-05-06 | Subassembly that splashes is prevented in washing of full-automatic scribing machine |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203380774U (en) * | 2013-05-21 | 2014-01-08 | 安徽盛华橡塑有限公司 | Pipe polishing machine baffle plate with honeycomb adhesion layer |
| JP2015023205A (en) * | 2013-07-22 | 2015-02-02 | 株式会社ディスコ | Washing apparatus |
| CN109698149A (en) * | 2018-12-27 | 2019-04-30 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Anti-splash device and etching process consersion unit |
| CN213541851U (en) * | 2020-10-05 | 2021-06-25 | 苏州智沐星电子科技有限公司 | Injection moulding's projecting apparatus plastic fixing base |
| CN214516283U (en) * | 2020-11-25 | 2021-10-29 | 大族激光科技产业集团股份有限公司 | Wafer cleaning tank |
| CN215919904U (en) * | 2021-09-03 | 2022-03-01 | 广东科杰技术股份有限公司 | Carving mills lathe automatic guard gate |
-
2022
- 2022-05-06 CN CN202210482720.0A patent/CN114571614B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203380774U (en) * | 2013-05-21 | 2014-01-08 | 安徽盛华橡塑有限公司 | Pipe polishing machine baffle plate with honeycomb adhesion layer |
| JP2015023205A (en) * | 2013-07-22 | 2015-02-02 | 株式会社ディスコ | Washing apparatus |
| CN109698149A (en) * | 2018-12-27 | 2019-04-30 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Anti-splash device and etching process consersion unit |
| CN213541851U (en) * | 2020-10-05 | 2021-06-25 | 苏州智沐星电子科技有限公司 | Injection moulding's projecting apparatus plastic fixing base |
| CN214516283U (en) * | 2020-11-25 | 2021-10-29 | 大族激光科技产业集团股份有限公司 | Wafer cleaning tank |
| CN215919904U (en) * | 2021-09-03 | 2022-03-01 | 广东科杰技术股份有限公司 | Carving mills lathe automatic guard gate |
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| Publication number | Publication date |
|---|---|
| CN114571614A (en) | 2022-06-03 |
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Address after: 110 000 No. 53 Buyunshan Road, Huanggu District, Shenyang City, Liaoning Province Patentee after: Shenyang Heyan Technology Co.,Ltd. Address before: 110 000 No. 53 Buyunshan Road, Huanggu District, Shenyang City, Liaoning Province Patentee before: SHENYANG HEYAN TECHNOLOGY CO.,LTD. |