CN114562963A - Surface topography measuring system for imaging nano material - Google Patents
Surface topography measuring system for imaging nano material Download PDFInfo
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- CN114562963A CN114562963A CN202210204932.2A CN202210204932A CN114562963A CN 114562963 A CN114562963 A CN 114562963A CN 202210204932 A CN202210204932 A CN 202210204932A CN 114562963 A CN114562963 A CN 114562963A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
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Abstract
The invention discloses a surface topography measuring system for imaging a nano material. The SPR sensor scans the material to be detected step by step under the control of the controller along with the scanning platform, an air layer between the metal film and the material to be detected is regarded as a part of a coupling structure of the SPR sensor, the surface appearance of the material to be detected influences the surface plasma resonance phenomenon, the SPR sensor transmits the reflection map of each step to an upper computer, the upper computer extracts the surface plasma resonance signals in the reflection map, and the reconstruction of the surface appearance of the material to be detected is completed through data analysis. The surface topography measuring system can realize non-contact nondestructive detection of a sample with high precision and high resolution.
Description
Technical Field
The invention relates to the field of surface topography measurement, in particular to a surface topography measurement system for imaging of a nano material.
Background
Surface topography measurement on a nanometer scale is taken as an important component of a high-resolution microscopic technology and is widely used in a plurality of fields such as physical quantity measurement, nanometer material manufacturing, life science, nanometer device research and development and the like. Currently, the common methods for measuring the surface appearance with high precision are an atomic force microscope, a scanning electron microscope, a transmission electron microscope and the like. The atomic force microscope has larger longitudinal resolution in detection, but has small imaging range and poor transverse resolution capability, and is not easy to realize nondestructive detection. The scanning electron microscope has harsh use environment, high cost and no miniaturization. The transmission electron microscope has low penetrating power, and the density, thickness and the like of the sample can influence the final imaging quality.
Surface Plasmon Resonance (SPR) is a special physical optical phenomenon that can be summarized as an electromagnetic oscillation phenomenon that excites and couples charge density fluctuations at the interface between a dielectric and a metal, and has the characteristics of near-field enhancement, Surface confinement, short wavelength, and the like. When the wave vector of the incident light is matched with the wave vector of the Surface Plasmon Wave (SPW) and the component of the dielectric-metal interface, the SPR effect is excited, and the reflected light is greatly changed. The detection of various properties of the substance to be detected can be completed by detecting information such as light intensity carried in the reflected light wave, and the sensor based on the SPR technology has been widely applied.
Disclosure of Invention
Aiming at the defects of the existing surface topography measuring technology, the invention provides a surface topography measuring system for imaging a nano material, which aims to solve the problems of harsh measuring environment, difficulty in miniaturization, high cost, damage to a material to be measured and the like in the existing measuring technology. The invention can carry out measurement and analysis according to the distance between the scanning probe and the surface of the object to be measured, thereby obtaining the surface appearance of the object through three-dimensional reconstruction.
The invention is realized by the following technical scheme:
a surface topography measuring system for imaging nano materials comprises an SPR sensor, a controller, a scanning platform and an upper computer. The SPR sensor consists of a light source, a prism, a metal film and a photoelectric coupling device. The metal film is plated on the working surface of the prism, and forms an angle modulation type Kretschmann four-layer structure SPR sensor with an air layer and the surface of a material to be measured. Laser emitted by the light source is incident on the metal film through the prism, the metal film reflects the incident laser generated by the light source, and the incident laser is received by the photoelectric coupling device and then sent to the upper computer for processing.
The scanning platform consists of a macroscopic moving platform, a micro-nano moving platform and an assembling device, and is controlled by the controller. The assembling device assembles the SPR sensor and the scanning platform together, the macro moving platform is used for roughly adjusting the scanning measurement position, and the micro-nano moving platform can perform micro-nano scale translation on the SPR sensor to complete positioning scanning on the material to be measured. After the scanning platform moves for one step, the SPR sensor sends the measured local information to the upper computer to complete the scanning of the surface of the material to be measured.
The upper computer has the functions of controlling the scanning platform, receiving image processing by the photoelectric coupling device and three-dimensional reconstruction of the surface appearance of the material to be detected. And the upper computer sets the motion steps of the macro motion platform and the voltage of the micro-nano moving platform through the controller to complete the control of the scanning platform. The upper computer extracts an SPR resonance angle from the image received by the photoelectric coupler with high precision, obtains the distance between the SPR sensor and the material to be measured by a data fitting method, and stores the data into an imaging data matrix. And after the scanning is finished, the upper computer takes out all the data from the imaging data matrix, and the surface image of the material to be detected is obtained through a three-dimensional reconstruction algorithm.
In the scheme, the SPR technology is used for scanning measurement, the SPR phenomenon is very sensitive to the thickness of a film layer in the SPR structure, and the position of an SPR resonance angle can be correspondingly changed according to the shape change of the surface of a material to be measured. By utilizing the characteristic, the surface topography of the material to be measured can be reconstructed according to the change of the SPR resonance angle.
The invention has the beneficial effects that:
in order to achieve the nanometer resolution, the traditional surface topography measuring technology generally has the defects of harsh measuring environment and incapability of realizing nondestructive detection, but the surface topography measuring and scanning method can carry out surface topography measuring and scanning according to the thickness of an air layer from a metal film in an SPR sensor to the surface of a material to be detected, and achieves ultrahigh resolution nondestructive detection on the surface topography of the material to be detected by utilizing the high sensitivity of an SPR phenomenon to the thickness of the air layer.
Drawings
FIG. 1 is a schematic diagram of a surface topography measurement system.
FIG. 2 is a schematic diagram of the operation of the SPR sensor.
Fig. 3 is a characteristic graph of the thickness d of the air layer and the surface plasmon resonance angle.
In the figure, 1-1 is an upper computer, 1-2 is a controller, 1-3 is a scanning platform, 1-4 is an SPR sensor, 1-5 is a material to be detected, 2-1 is a light source, 2-2 is a prism, 2-3 is a metal film, and 2-4 is a photoelectric coupling device.
Detailed Description
The embodiments of the present invention will be further described with reference to the accompanying drawings, and the following examples are intended to describe the present invention in detail, but not to limit the present invention.
The first specific implementation way is as follows: the embodiment is described with reference to fig. 1, and the surface topography measurement system for imaging of a nano material of the embodiment comprises an upper computer 1-1, a controller 1-2, a scanning platform 1-3 and an SPR sensor 1-4, wherein the SPR sensor 1-4 and the scanning platform 1-3 are assembled together to serve as a scanning probe, the SPR sensor 1-4 is connected with the upper computer 1-1 through a signal line for transmitting a reflection map, the controller 1-2 is connected with the scanning platform 1-3 through a signal line and controls the movement of the scanning platform 1-3, the upper computer 1-1 is connected with the controller 1-2 through a signal line and sends an instruction, and the whole system forms closed-loop control. When the surface topography is measured, the scanning platform 1-3 and the assembled SPR sensor 1-4 move to the material to be measured 1-5 under the control of the controller 1-2, when the distance between the SPR sensor 1-4 and the material to be measured 1-5 is smaller than 1 micron, the surface topography scanning is started according to the step length and the scanning path set by the upper computer 1-1, the measuring signal of each step of the SPR sensor 1-4 is transmitted and stored in the upper computer 1-1, and the upper computer 1-1 extracts the surface topography of the material to be measured 1-5 from the measuring signal of the SPR sensor 1-4 through data processing.
The second embodiment is as follows: the present embodiment is described with reference to fig. 1-2, and is further described with reference to a first embodiment, where the SPR sensor 1-4 of the present embodiment includes a light source 2-1, a prism 2-2, a metal thin film 2-3, and a photocoupler 2-4, laser emitted from the light source 2-1 is incident on the metal thin film 2-3 through the prism 2-2, and the metal thin film 2-3 reflects the laser emitted from the light source 2-1 and irradiates the photocoupler 2-4 through the prism 2-2. The SPR sensor 1-4 operates on the principle that when the wave vector of the incident light is matched with the wave vector of the surface plasmon wave in the component of the prism and the metal thin film interface, the SPR phenomenon is excited to couple the energy of the incident light into the surface plasmon wave, and thus the intensity of the reflected light is sharply reduced. An air layer is arranged between the metal film 2-3 of the SPR sensor 1-4 and the material 1-5 to be detected, the air layer is regarded as a part of an SPR coupling structure, and the SPR phenomenon is sensitive to the thickness change of the film layer and reaches a nanometer level, so that the thickness of the air layer can be influenced by the surface morphology of the material 1-5 to be detected, the SPR phenomenon is influenced, and the surface morphology of the material 1-5 to be detected can be recovered through the detection treatment of reflected light.
In the surface topography measuring system for imaging a nano material according to the embodiment, the metal thin film 2-3 is plated on the working surface of the prism 2-2, the metal thin film 2-3 is a gold film or a silver film, and the optimal thickness of the metal thin film 2-3 is about 50nm when the gold film is adopted and about 40nm when the silver film is adopted.
The third concrete implementation mode: in this embodiment, the process of extracting the surface topography of the material to be measured 1 to 5 from the measurement signal of the SPR sensor 1 to 4 by the upper computer 1 to 1 through data processing is as follows: the upper computer 1-1 extracts an SPR resonance angle of a corresponding position from a measurement signal of the SPR sensor 1-4 with high precision, obtains the thickness d of an air layer between the metal film 2-3 and the medium to be measured 1-5 by a data fitting method, converts the thickness d into local information of the surface topography of the material to be measured 1-5, stores the local information into a data matrix according to a scanning sequence, extracts data from the data matrix after the surface topography of the material to be measured 1-5 is scanned, and reconstructs the surface topography of the material to be measured 1-5 according to the scanning sequence.
Fig. 3 is a characteristic curve between the thickness d of the air layer between the metal thin film 2-3 and the material 1-5 to be measured and the resonance angle of the SPR phenomenon, where the thickness d of the air layer is increased from 20nm to 500nm in 2nm steps, and it can be seen from the graph that the resonance angle of the SPR phenomenon is gradually decreased as the thickness d of the air layer is increased. When the thickness d of the air layer is less than 200nm, the change of the resonance angle is very obvious; when the thickness d of the air layer is more than 200nm, the resonance angle is still reduced, but the variation amplitude is reduced. The above results show that the resonance angle of the surface SPR phenomenon is very sensitive to the thickness d of the air layer, and the thickness d of the air layer can be influenced when the surface topography of the material to be detected 1-5 is changed, so that the surface topography of the material to be detected 1-5 can be restored from the change of the resonance angle of the SPR phenomenon.
It should be noted that the present invention is not limited to the above embodiments, and any other structural design obtained by modifying or substituting the above embodiments of the present invention is within the scope of the present invention.
Claims (7)
1. A surface topography measurement system for imaging nanomaterials, comprising: the device comprises an upper computer (1-1), a controller (1-2), a scanning platform (1-3) and an SPR sensor (1-4), wherein the SPR sensor (1-4) and the scanning platform (1-3) are assembled together to serve as a scanning probe, the SPR sensor (1-4) is connected with the upper computer (1-1) through a signal line and used for transmitting a reflection map, the controller (1-2) is connected with the scanning platform (1-3) through the signal line and controls the movement of the scanning platform (1-3), the upper computer (1-1) is connected with the controller (1-2) through the signal line and sends out an instruction, and the whole system forms closed-loop control.
2. A surface topography measurement system for imaging of nanomaterials as recited in claim 1, wherein: after the upper computer (1-1) receives the reflection map of the SPR sensor (1-4), extracting an SPR resonance angle from the reflection map with high precision, recovering the distance between the SPR sensor (1-4) and the material to be detected (1-5), converting the distance into local information of the surface topography of the material to be detected (1-5), and reconstructing to obtain the surface topography information of the material to be detected (1-5).
3. Method to restore the distance of the SPR sensor (1-4) from the material (1-5) to be measured according to claim 2, characterized in that: the recovery method is a data fitting method.
4. The method of reconstructing the surface topography of a material (1-5) to be measured according to claim 2, characterized in that: the reconstruction method reconstructs the surface topography of the material (1-5) to be measured according to the scanning sequence.
5. A surface topography measurement system for imaging of nanomaterials as recited in claim 1, wherein: the SPR sensor (1-4) comprises a light source (2-1), a prism (2-2), a metal film (2-3) and a photoelectric coupling device (2-4), wherein laser emitted by the light source (2-1) is incident on the metal film (2-3) through the prism (2-2), and the metal film (2-3) reflects the laser emitted by the light source (2-1) and irradiates the photoelectric coupling device (2-4) through the prism (2-2).
6. A SPR sensor (1-4) according to claim 5 wherein: and an air layer between the metal thin film (2-3) and the material to be measured (1-5) is part of the SPR coupling structure.
7. A SPR sensor (1-4) according to claim 5 wherein: the metal film (2-3) is a gold film with the thickness of 50nm or a silver film with the thickness of 40 nm.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210204932.2A CN114562963A (en) | 2022-03-02 | 2022-03-02 | Surface topography measuring system for imaging nano material |
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| CN202210204932.2A CN114562963A (en) | 2022-03-02 | 2022-03-02 | Surface topography measuring system for imaging nano material |
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Citations (6)
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| KR20070081557A (en) * | 2006-02-13 | 2007-08-17 | 연세대학교 산학협력단 | Surface plasmon resonance biological sensor system using a reconfigurable optical element |
| JP2009128086A (en) * | 2007-11-21 | 2009-06-11 | Japan Aviation Electronics Industry Ltd | Surface plasmon sensor |
| CN103454253A (en) * | 2013-06-25 | 2013-12-18 | 复旦大学 | Organic phosphorus detection method based on surface plasmon resonance |
| CN107479177A (en) * | 2017-09-15 | 2017-12-15 | 北京航空航天大学 | High-resolution surface plasma microscope |
| CN109030454A (en) * | 2018-07-19 | 2018-12-18 | 温州森佰生物科技有限公司 | A kind of high-resolution biological detection imaging method |
| CN111879242A (en) * | 2020-05-21 | 2020-11-03 | 哈尔滨理工大学 | Nano positioning control system for micro-displacement platform |
-
2022
- 2022-03-02 CN CN202210204932.2A patent/CN114562963A/en active Pending
Patent Citations (6)
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|---|---|---|---|---|
| KR20070081557A (en) * | 2006-02-13 | 2007-08-17 | 연세대학교 산학협력단 | Surface plasmon resonance biological sensor system using a reconfigurable optical element |
| JP2009128086A (en) * | 2007-11-21 | 2009-06-11 | Japan Aviation Electronics Industry Ltd | Surface plasmon sensor |
| CN103454253A (en) * | 2013-06-25 | 2013-12-18 | 复旦大学 | Organic phosphorus detection method based on surface plasmon resonance |
| CN107479177A (en) * | 2017-09-15 | 2017-12-15 | 北京航空航天大学 | High-resolution surface plasma microscope |
| CN109030454A (en) * | 2018-07-19 | 2018-12-18 | 温州森佰生物科技有限公司 | A kind of high-resolution biological detection imaging method |
| CN111879242A (en) * | 2020-05-21 | 2020-11-03 | 哈尔滨理工大学 | Nano positioning control system for micro-displacement platform |
Non-Patent Citations (1)
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| ZHITAO YANG 等: "Studying corrosion of silver thin film by surface plasmon resonance technique", OPTICAL AND QUANTUM ELECTRONICS, vol. 52, no. 31, pages 1 - 8 * |
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