CN114562958B - Self-built microscopic imaging system based on optical energy transmission equation - Google Patents
Self-built microscopic imaging system based on optical energy transmission equation Download PDFInfo
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- CN114562958B CN114562958B CN202210447266.5A CN202210447266A CN114562958B CN 114562958 B CN114562958 B CN 114562958B CN 202210447266 A CN202210447266 A CN 202210447266A CN 114562958 B CN114562958 B CN 114562958B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/241—Devices for focusing
Abstract
The invention discloses a self-built microscopic imaging system based on an optical energy transmission equation, which comprises a bracket, a light source mechanism, a microscope main body, a position adjusting mechanism, an object placing plate and a zooming imaging mechanism, wherein the bracket is arranged on the bracket; the zooming imaging mechanism comprises a first lens, an electric control zooming lens, a second lens and a camera. The invention has the beneficial effects that: the focal length of the electric control zoom lens is changed, mechanical movement of a measured sample or a camera is not carried out, the effect is the same as that of the prior art that the measured sample or the camera is moved without changing the focal length, but high-speed measurement of three-dimensional quantitative phase can be realized; meanwhile, the position adjusting mechanism is additionally arranged between the lens cone and the support, so that the freedom degrees in the horizontal direction and the longitudinal direction are provided for the microscope main body, and therefore, the optical system can be calibrated through the movement in the horizontal direction or the longitudinal direction, the accuracy and the simplicity of system calibration are obviously improved, the time of system calibration is greatly saved, and the phase measurement efficiency is improved.
Description
Technical Field
The invention relates to the technical field of three-dimensional topography measurement, in particular to a self-built microscopic imaging system based on an optical energy transmission equation.
Background
In the field of industrial manufacturing, three-dimensional shape information of an object has important significance for manufacturing process control. When light irradiates an object, the three-dimensional shape of the object influences the wave front and phase distribution of light waves. Therefore, depth information of the object can be obtained by calculating the phase. However, currently, all optical signal detection devices (such as cmos type and ccd type cameras) and the like can record only light intensity, and cannot record phase information. Therefore, the phase information must be demodulated from the intensity detection signal using a specific method. The optical energy transfer equation technique is a typical optical phase extraction method. Unlike the conventional phase measurement method based on optical interference technology (for example, patent application No. CN 201911050178.6), the optical energy transfer equation is essentially a partial differential equation describing the first order partial derivative relationship satisfied between the phase and intensity of light in the paraxial approximation state. In principle, the optical energy transmission equation can be solved by using the light field intensity on a plurality of axial displacement planes, and then phase information can be obtained. This makes optical system designs based on optical energy transfer equations much more compact and compact than optical interference-based methods.
The traditional phase measurement system based on the optical energy transmission equation usually needs to mechanically move a measured sample or a camera, so that the high-speed measurement of three-dimensional quantitative phase cannot be realized, and meanwhile, the existing phase measurement system based on the optical energy transmission equation is difficult to calibrate so as to compensate the coaxiality and parallelism errors generated by the assembly of optical elements, so that the efficiency and the accuracy of solving phase information are low.
Disclosure of Invention
In view of the above, there is a need to provide a self-constructed microscopic imaging system based on an optical energy transmission equation, so as to solve the technical problems that a conventional phase measurement system based on an optical energy transmission equation needs to mechanically move a measured sample or a camera, so that high-speed measurement of a three-dimensional quantitative phase cannot be realized, and calibration is difficult to perform, so as to compensate errors of coaxiality and parallelism generated by assembling optical elements, and thus efficiency and accuracy of solving phase information are low.
In order to achieve the aim, the invention provides a self-built microscopic imaging system based on an optical energy transmission equation, which comprises a bracket, a light source mechanism, a microscope main body, a position adjusting mechanism, an object placing plate and a zooming imaging mechanism, wherein the bracket is arranged on the bracket;
the light source mechanism is fixed on the bracket;
the microscope body comprises a lens barrel, an ocular and an objective, and the ocular and the objective are fixed in the lens barrel;
the position adjusting mechanism is connected with the lens cone and is used for adjusting the height and the front and back position of the lens cone;
the object placing plate is fixed on the bracket and is positioned between the light source mechanism and the objective lens;
the zoom imaging mechanism comprises a first lens, an electric control zoom lens, a second lens and a camera, wherein the front focal plane of the first lens is positioned on the image plane of the eyepiece, and the electric control zoom lens is positioned on the back focal plane of the first lens and on the front focal plane of the second lens; the lens of the camera is positioned on the back focal plane of the second lens.
In some embodiments, the light source mechanism includes an illumination kit, a transmissive illumination module, a condenser lens, and a filter, an input end of the transmissive illumination module is connected to an output end of the illumination kit, an output end of the transmissive illumination module is disposed toward the condenser lens, and the filter is disposed between the condenser lens and the object placing plate.
In some embodiments, the position adjusting mechanism includes a front-rear position adjusting component, a moving block, and an up-down position adjusting component, the front-rear position adjusting component is connected with both the bracket and the moving block and used for adjusting the front-rear position of the moving block, and the up-down position adjusting component is connected with both the moving block and the lens barrel and used for adjusting the height of the lens barrel.
In some embodiments, the bracket is provided with a first guide hole and a first screw hole which extend along the horizontal direction; the front and rear position adjusting assembly comprises a first guide rod and a front and rear position adjusting screw rod, the first guide rod is inserted into the first guide hole in a sliding mode, the first guide rod is fixedly connected with the moving block, the front and rear position adjusting screw rod is connected into the first screw hole in a threaded mode, and the front and rear position adjusting screw rod is connected with the moving block in a rotating mode.
In some embodiments, the forward-backward position adjusting assembly further includes a first bearing, an inner ring of the first bearing is fixedly sleeved on the forward-backward position adjusting screw, and an outer ring of the first bearing is fixedly connected to the moving block.
In some embodiments, the moving block is provided with a second guide hole and a second screw hole which extend vertically; the up-down position adjusting assembly comprises a second guide rod and an up-down position adjusting screw rod, the second guide rod is inserted into the second guide hole in a sliding mode, the second guide rod is fixedly connected with the lens barrel, the up-down position adjusting screw rod is connected into the second screw hole in a threaded mode, and the up-down position adjusting screw rod is connected with the lens barrel in a rotating mode.
In some embodiments, the vertical position adjusting assembly further includes a second bearing, an inner ring of the second bearing is fixedly sleeved on the vertical position adjusting screw, and an outer ring of the second bearing is fixedly connected with the lens barrel.
In some embodiments, the zoom imaging mechanism further comprises a rectangular diaphragm disposed at an image plane of the eyepiece.
In some embodiments, the zoom imaging mechanism further comprises a protective sleeve, and the first lens, the electronically controlled zoom lens, the second lens, and the camera are all disposed within the protective sleeve.
In some embodiments, the self-constructing microscopic imaging system based on the optical energy transfer equation further comprises a base, and the support is fixed on the base.
Compared with the prior art, the technical scheme provided by the invention has the beneficial effects that: when in use, the focal length of the electrically controlled zoom lens is changed without mechanically moving the tested sample or the camera, the effect is the same as that of the prior art in which the tested sample or the camera is moved without changing the focal length, but the high-speed measurement of the three-dimensional quantitative phase can be realized (because the focal length of the electrically controlled zoom lens is more convenient to adjust compared with the movement of the tested sample or the camera); meanwhile, the position adjusting mechanism is additionally arranged between the lens cone and the support, so that the freedom degrees in the horizontal direction and the longitudinal direction are provided for the microscope main body (namely, the microscope measuring head can horizontally and longitudinally mechanically move), therefore, the optical system can be calibrated through the movement in the horizontal direction or the longitudinal direction, the accuracy and the simplicity of system calibration are obviously improved, meanwhile, the time of system calibration is greatly saved, the phase measurement efficiency is improved, and the universality of other optical experiments is met.
Drawings
FIG. 1 is a schematic structural diagram of an embodiment of a self-constructed microscopic imaging system based on an optical energy transfer equation provided by the present invention;
FIG. 2 is a schematic view of the position adjustment mechanism of FIG. 1;
FIG. 3 is a schematic perspective view of the zoom imaging mechanism of FIG. 1 (omitting the protective sleeve);
FIG. 4 is a diagram illustrating the variation of an image during zooming when calibrating an optical system according to an embodiment of the present invention;
FIG. 5 is an image in focus and an image out of focus when the embodiment of FIG. 1 is calibrated for an optical path system;
FIG. 6 is a three-dimensional quantitative phase retrieval plot of a microlens array before and after calibration of an optical system;
in the figure: 1-bracket, 2-light source mechanism, 21-lighting kit, 22-transmission lighting module, 23-condenser, 24-optical filter, 3-microscope body, 31-lens cone, 32-eyepiece, 33-objective, 4-position adjusting mechanism, 41-front and back position adjusting component, 411-first guide rod, 412-front and back position adjusting screw rod, 413-first bearing, 42-moving block, 43-up and down position adjusting component, 431-second guide rod, 432-up and down position adjusting screw rod, 433-second bearing, 5-object placing plate, 6-zoom imaging mechanism, 61-first lens, 62-electric control zoom lens, 63-second lens, 64-camera, 65-rectangular diaphragm, 66-protective sleeve, 7-base.
Detailed Description
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate preferred embodiments of the invention and together with the description, serve to explain the principles of the invention and not to limit the scope of the invention.
Referring to fig. 1 to 3, the present invention provides a self-constructed microscopic imaging system based on an optical energy transmission equation, which includes a support 1, a light source mechanism 2, a microscope main body 3, a position adjusting mechanism 4, a placement plate 5, and a zoom imaging mechanism 6.
The light source mechanism 2 is fixed on the bracket 1. The microscope body 3 includes a lens barrel 31, an eyepiece 32, and an objective lens 33, and the eyepiece 32 and the objective lens 33 are fixed in the lens barrel 31. The position adjustment mechanism 4 is connected to the lens barrel 31 and is used to adjust the height and the front-rear position of the lens barrel 31. The object placing plate 5 is fixed on the support 1 and positioned between the light source mechanism 2 and the objective lens 33, and the object placing plate 5 is made of transparent materials.
The zoom imaging mechanism 6 comprises a first lens 61, an electrically controlled zoom lens 62, a second lens 63 and a camera 64, wherein the front focal plane of the first lens 61 is located at the image plane of the ocular lens 32 (i.e. the imaging plane of the detection sample on the object placing plate 5 in the ocular lens 32), and the electrically controlled zoom lens 62 is located at the back focal plane of the first lens 61 and at the front focal plane of the second lens 63; the lens of the camera 64 is located at the back focal plane of the second lens 63. In this embodiment, the camera 64 is a CCD camera (resolution 1936pixels × 1216pixels, 5.86 μm/pixel).
When in use, the focal length of the electrically controlled zoom lens 62 is changed without mechanically moving the measured sample or the camera 64, which has the same effect as that of moving the measured sample or the camera 64 without changing the focal length in the prior art, but can realize high-speed measurement of three-dimensional quantitative phase (because it is more convenient to adjust the focal length of the electrically controlled zoom lens 62 relative to moving the measured sample or the camera 64); meanwhile, the position adjusting mechanism 4 is additionally arranged between the lens barrel 31 and the support 1, so that the freedom degrees in the horizontal direction and the longitudinal direction are provided for the microscope body 3 (namely, a microscope measuring head can horizontally and longitudinally mechanically move), therefore, an optical system can be calibrated through the movement in the horizontal direction or the longitudinal direction, the accuracy and the simplicity of system calibration are obviously improved, meanwhile, the time of system calibration is greatly saved, the phase measurement efficiency is improved, and the universality of other optical experiments is met.
In order to specifically realize the functions of the light source mechanism 2, please refer to fig. 1, in a preferred embodiment, the light source mechanism 2 includes an illumination kit 21, a transmission illumination module 22, a condenser 23 and an optical filter 24, an input end of the transmission illumination module 22 is connected to an output end of the illumination kit 21, an output end of the transmission illumination module 22 faces the condenser 23, the optical filter 24 is disposed between the condenser 23 and the object placing plate 5, and when in use, light generated by the illumination kit 21 sequentially passes through the illumination module 22, the condenser 23 and the optical filter 24, reaches the object placing plate 5, passes through the object placing plate 5, and then enters the eyepiece 32. In this embodiment, the lighting kit 21 is composed of a warm white LED, a collimating optical element, and a filter cube, and is connected to the transmission lighting module 22 through a cage bar.
In order to realize the function of the position adjusting mechanism 4 specifically, referring to fig. 1 and fig. 2, in a preferred embodiment, the position adjusting mechanism 4 includes a front-rear position adjusting assembly 41, a moving block 42, and an up-down position adjusting assembly 43, the front-rear position adjusting assembly 41 is connected to the bracket 1 and the moving block 42 and is used for adjusting the front-rear position of the moving block 42, and the up-down position adjusting assembly 43 is connected to the moving block 42 and the lens barrel 31 and is used for adjusting the height of the lens barrel 31.
In order to realize the function of the front-back position adjusting assembly 41, please refer to fig. 1 and fig. 2, in a preferred embodiment, a first guide hole and a first screw hole extending along the horizontal direction are formed on the bracket 1; the front-back position adjusting assembly 41 includes a first guide rod 411 and a front-back position adjusting screw 412, the first guide rod 411 is slidably inserted into the first guide hole, the first guide rod 411 is fixedly connected to the moving block 42, the front-back position adjusting screw 412 is screwed into the first screw hole, the front-back position adjusting screw 412 is rotatably connected to the moving block 42, when the front-back position of the lens barrel 31 needs to be adjusted, the front-back position adjusting screw 412 is rotated, the front-back position adjusting screw 412 drives the moving block 42 to move in the front-back direction, and the first guide rod 411 is used for limiting the moving block 42 to prevent the moving block 42 from rotating.
In order to realize the rotational connection between the forward and backward position adjusting screw 412 and the moving block 42, referring to fig. 1 and 2, in a preferred embodiment, the forward and backward position adjusting assembly 41 further includes a first bearing 413, an inner ring of the first bearing 413 is fixedly sleeved on the forward and backward position adjusting screw 412, and an outer ring of the first bearing 413 is fixedly connected to the moving block 42.
In order to realize the function of the vertical position adjusting assembly 43, please refer to fig. 1 and 2, in a preferred embodiment, the moving block 42 is provided with a second guiding hole and a second screw hole extending along the vertical direction; the up-down position adjusting assembly 43 includes a second guiding rod 431 and an up-down position adjusting screw 432, the second guiding rod 431 is slidably inserted into the second guiding hole, the second guiding rod 431 is fixedly connected with the lens barrel 31, the up-down position adjusting screw 432 is in threaded connection with the second guiding hole, the up-down position adjusting screw 432 is in rotational connection with the lens barrel 31, when the up-down position adjusting assembly is used, when the up-down position of the lens barrel 31 needs to be adjusted, the up-down position adjusting screw 432 is rotated, the up-down position adjusting screw 432 drives the lens barrel 31 to move up and down, and the second guiding rod 431 is used for limiting the lens barrel 31 to prevent the lens barrel 31 from rotating.
In order to realize the rotational connection between the up-down position adjusting screw 432 and the lens barrel 31, referring to fig. 1 and fig. 2, in a preferred embodiment, the up-down position adjusting assembly 43 further includes a second bearing 433, an inner ring of the second bearing 433 is fixedly sleeved on the up-down position adjusting screw 432, and an outer ring of the second bearing 433 is fixedly connected with the lens barrel 31.
To provide boundary conditions, referring to fig. 1 and fig. 3, in a preferred embodiment, the zoom imaging mechanism 6 further includes a rectangular diaphragm 65, and the rectangular diaphragm 65 is disposed on the image plane of the eyepiece 32. The rectangular aperture 65 may provide boundary conditions for the correlation detection algorithm.
In order to prevent the external light beam from affecting the detection result, referring to fig. 1 and fig. 3, in a preferred embodiment, the zoom imaging mechanism 6 further includes a protective sleeve 66, and the first lens 61, the electronically controlled zoom lens 62, the second lens 63, and the camera 64 are all disposed in the protective sleeve 66.
In order to improve stability, referring to fig. 1, in a preferred embodiment, the self-constructed micro-imaging system based on the optical energy transfer equation further includes a base 7, and the support 1 is fixed on the base 7.
Before the camera 64 acquires images to solve phase information, the method for calibrating the optical path system comprises the following steps:
(1) the linear relation between the current and the focal length of the electric control zoom lens 62 is used, the current of the electric control zoom lens 62 is linearly changed within a certain range by using the matched software of the electric control zoom lens 62, and the offset direction of the characteristics of the sample in the focal length change process is observed and judged;
(2) after the offset direction is known, the microscope measuring head is correspondingly finely adjusted by the position adjusting mechanism 4 (horizontal and longitudinal translation);
(3) and (5) adjusting according to the step 1 and the step 2 until the characteristic of the sample does not obviously deviate in the process of changing the focal length, and indicating that the system calibration is finished.
In the following, the samples are taken as examples of test targets and the calibration procedure is as follows:
(1) opening the software of the electric control zoom lens driver, and setting a current change interval to be 0-100 mA on a software interface;
(2) the camera driving software is turned on, and at the moment, the image (the square array with the side length of 100 um) presented by the camera can be seen to be linearly changed between the focus and the defocus, and the change trend is shown in fig. 4;
(3) observing a feature at a certain position on an image, confirming the offset direction of the feature in the change of the image, wherein the feature is as a left image in the image 5 in focus, and the feature is as a right image in the image 5 in defocus, so that the feature can be judged to be vertically offset downwards in the defocus process;
(4) after the offset direction is known, the microscope measuring head is finely adjusted in the horizontal direction through the position adjusting mechanism 4 until the offset of the characteristic position is not obvious in the in-focus and out-of-focus processes of the image, and the system calibration is completed.
And after the system is calibrated, solving the phase information by using a three-dimensional phase measurement algorithm of an optical energy transmission equation. The three-dimensional quantitative phase recovery maps of the microlens arrays before and after the optical system calibration are shown in fig. 6.
In summary, compared with the prior art, the invention has the following significant advantages:
(1) compared with other methods of optical energy transmission equations, the method does not need to mechanically move a measured sample or a camera, and realizes high-speed and continuous quantitative phase measurement;
(2) different from the traditional microscope structure, the position adjusting mechanism 4 is additionally arranged between the lens cone 31 and the bracket 1 of the microscopic imaging system provided by the invention, and the degree of freedom in the horizontal direction and the longitudinal direction is provided, so that the light path system can be calibrated through the movement in the horizontal direction or the longitudinal direction, and the accuracy and the simplicity of the system calibration are improved;
(3) the system calibration method provided by the invention can compensate coaxiality and parallelism errors generated by assembling optical elements, effectively improve three-dimensional phase measurement errors (phase height unevenness and phase inclination) based on an optical energy transmission equation and improve the accuracy and efficiency of phase measurement.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention.
Claims (9)
1. A self-built microscopic imaging system based on an optical energy transmission equation is characterized by comprising a support, a light source mechanism, a microscope main body, a position adjusting mechanism, an object placing plate and a zooming imaging mechanism;
the light source mechanism is fixed on the bracket;
the microscope body comprises a lens barrel, an ocular and an objective, and the ocular and the objective are fixed in the lens barrel;
the position adjusting mechanism is connected with the lens cone and is used for adjusting the height and the front and back position of the lens cone; the position adjusting mechanism comprises a front-back position adjusting component, a moving block and an upper-lower position adjusting component, the front-back position adjusting component is connected with the support and the moving block and used for adjusting the front-back position of the moving block, and the upper-lower position adjusting component is connected with the moving block and the lens cone and used for adjusting the height of the lens cone;
the object placing plate is fixed on the bracket and is positioned between the light source mechanism and the objective lens;
the zoom imaging mechanism comprises a first lens, an electric control zoom lens, a second lens and a camera, wherein the front focal plane of the first lens is positioned on the image plane of the eyepiece, and the electric control zoom lens is positioned on the back focal plane of the first lens and on the front focal plane of the second lens; the lens of the camera is positioned on the back focal plane of the second lens.
2. The optical energy transfer equation-based self-built microscopic imaging system according to claim 1, wherein the light source mechanism comprises an illumination kit, a transmission illumination module, a condenser lens, and a filter, an input end of the transmission illumination module is connected to an output end of the illumination kit, an output end of the transmission illumination module is disposed toward the condenser lens, and the filter is disposed between the condenser lens and the object placing plate.
3. The optical energy transmission equation-based self-constructed microscopic imaging system according to claim 1, wherein the bracket is provided with a first guide hole and a first screw hole extending in the horizontal direction;
the front and rear position adjusting assembly comprises a first guide rod and a front and rear position adjusting screw rod, the first guide rod is inserted into the first guide hole in a sliding mode, the first guide rod is fixedly connected with the moving block, the front and rear position adjusting screw rod is connected into the first screw hole in a threaded mode, and the front and rear position adjusting screw rod is connected with the moving block in a rotating mode.
4. The optical energy transmission equation-based self-constructed microscopic imaging system according to claim 3, wherein the front-rear position adjusting assembly further comprises a first bearing, an inner ring of the first bearing is fixedly sleeved on the front-rear position adjusting screw, and an outer ring of the first bearing is fixedly connected with the moving block.
5. The optical energy transmission equation-based self-construction microscopic imaging system according to claim 1, wherein the moving block is provided with a second guide hole and a second screw hole extending vertically;
the up-down position adjusting assembly comprises a second guide rod and an up-down position adjusting screw rod, the second guide rod is inserted into the second guide hole in a sliding mode, the second guide rod is fixedly connected with the lens barrel, the up-down position adjusting screw rod is connected into the second screw hole in a threaded mode, and the up-down position adjusting screw rod is connected with the lens barrel in a rotating mode.
6. The self-constructed microscopic imaging system according to claim 5, wherein the up-down position adjusting assembly further comprises a second bearing, an inner ring of the second bearing is fixedly sleeved on the up-down position adjusting screw, and an outer ring of the second bearing is fixedly connected with the lens barrel.
7. The optical energy transfer equation-based self-building microscopic imaging system according to claim 1, wherein the zoom imaging mechanism further comprises a rectangular diaphragm disposed at an image plane of the eyepiece.
8. The optical energy transfer equation-based self-building microscopic imaging system according to claim 1, wherein the zoom imaging mechanism further comprises a protective sleeve, and the first lens, the electronically controlled zoom lens, the second lens, and the camera are all embedded in the protective sleeve.
9. The optical energy transfer equation-based self-built microscopy imaging system of claim 1 further comprising a base to which the support is affixed.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210447266.5A CN114562958B (en) | 2022-04-27 | 2022-04-27 | Self-built microscopic imaging system based on optical energy transmission equation |
| PCT/CN2023/080977 WO2023207371A1 (en) | 2022-04-27 | 2023-03-13 | Self-built microscopic imaging system based on optical energy transfer equation |
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| CN202210447266.5A CN114562958B (en) | 2022-04-27 | 2022-04-27 | Self-built microscopic imaging system based on optical energy transmission equation |
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| CN114562958B true CN114562958B (en) | 2022-08-02 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH0973031A (en) * | 1995-09-05 | 1997-03-18 | Olympus Optical Co Ltd | Movable lens barrel microscope |
| JP2013003218A (en) * | 2011-06-13 | 2013-01-07 | Canon Inc | Imaging device and controlling method of the same |
| CN110967816B (en) * | 2019-11-06 | 2021-06-15 | 浙江大学 | Near-infrared two-zone wide-field microscopic imaging system based on multi-dimensional adjusting frame |
| CN111624756A (en) * | 2020-06-28 | 2020-09-04 | 中国海洋大学 | Depth-of-field extended microscopic imaging three-dimensional reconstruction device and method |
| CN113568153B (en) * | 2021-09-27 | 2021-12-21 | 板石智能科技(武汉)有限公司 | Microscopic imaging equipment and nanoscale three-dimensional shape measurement system |
| CN114562958B (en) * | 2022-04-27 | 2022-08-02 | 板石智能科技(深圳)有限公司 | Self-built microscopic imaging system based on optical energy transmission equation |
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