CN114561688A - Growth furnace - Google Patents
Growth furnace Download PDFInfo
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- CN114561688A CN114561688A CN202210138645.6A CN202210138645A CN114561688A CN 114561688 A CN114561688 A CN 114561688A CN 202210138645 A CN202210138645 A CN 202210138645A CN 114561688 A CN114561688 A CN 114561688A
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- 238000001816 cooling Methods 0.000 claims abstract description 126
- 238000004321 preservation Methods 0.000 claims abstract description 96
- 238000010438 heat treatment Methods 0.000 claims abstract description 55
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 43
- 239000002826 coolant Substances 0.000 claims description 9
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 6
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 6
- 238000009413 insulation Methods 0.000 abstract description 14
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- 239000013078 crystal Substances 0.000 description 25
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- 230000002411 adverse Effects 0.000 description 2
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- 230000005540 biological transmission Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- BGOFCVIGEYGEOF-UJPOAAIJSA-N helicin Chemical compound O[C@@H]1[C@@H](O)[C@H](O)[C@@H](CO)O[C@H]1OC1=CC=CC=C1C=O BGOFCVIGEYGEOF-UJPOAAIJSA-N 0.000 description 1
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Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/006—Controlling or regulating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention provides a growth furnace, comprising: the furnace comprises a furnace body, a shell, a heat preservation assembly and a cooling assembly; the furnace body comprises a heating module and a heat preservation module, the heat preservation module is sleeved on the inner side of the shell, and the heating module is sleeved on the inner side of the heat preservation module; the heat preservation assembly and the cooling assembly are both arranged on the outer wall of the shell; the heat preservation component is used for transferring heat to the shell, and the cooling component is used for dissipating heat to the outer side of the shell. According to the growth furnace, when the furnace body is in a temperature rising and constant temperature state, the heat insulation assembly transmits heat to the shell, so that the shell is maintained at a preset temperature, the influence of environment temperature fluctuation on the furnace body can be effectively avoided, and the stability of a temperature field in the furnace body is guaranteed; when the furnace body is in the cooling state, the cooling module starts, and the cooling module carries out the heat exchange with the furnace body for heat in the furnace body scatters and disappears to the external environment, improves the radiating efficiency of furnace body, makes the furnace body have high heat insulating ability and high heat dissipating nature.
Description
Technical Field
The invention relates to the technical field of crystal processing equipment, in particular to a growth furnace.
Background
Semiconductor materials are widely applied in the fields of electronic power, microwave radio frequency, photoelectron and the like, and a crystal growth technology is a key point for preparing the semiconductor materials. The core factor influencing the crystal growth is a temperature field required by the crystal growth, the shape and stability of the temperature field determine whether qualified large-size single crystals can be prepared, and the stable temperature field can reduce the nucleation probability of a crystal interface and is beneficial to growing the large-size single crystals.
A growth furnace that is used for crystal growth among the prior art generally all adopts the mode of thickening heat preservation, strengthens the heat preservation effect of furnace body, relies on thickening heat preservation to strengthen the stability of the internal temperature field of furnace, and the effect is limited, easily receives ambient temperature's influence, and when ambient temperature fluctuated, the thermal shock can transmit inside the furnace body, arouses the fluctuation of the internal temperature of furnace. Especially when the ambient temperature outside the furnace body has a large difference, the temperature in the furnace body is easy to be disturbed, and the growth of crystals is adversely affected. When the furnace body needs to be cooled, a cooling system arranged between the furnace shell and the furnace body cannot quickly dissipate heat in the furnace body, so that the heat dissipation efficiency of the furnace body is poor.
Disclosure of Invention
The invention provides a growth furnace, which is used for solving the problems that the stability of a temperature field in a furnace body is poor and the heat dissipation efficiency of the furnace body is poor due to the fact that the conventional crystal growth furnace is easily influenced by the fluctuation of the external environment temperature and the arrangement mode of a cooling system.
The invention provides a growth furnace, comprising: the furnace comprises a furnace body, a shell, a heat preservation assembly and a cooling assembly;
the furnace body comprises a heating module and a heat preservation module, the heat preservation module is sleeved on the inner side of the shell, and the heating module is sleeved on the inner side of the heat preservation module; the heat preservation assembly and the cooling assembly are both arranged on the outer wall of the shell;
the heat preservation subassembly is used for to the casing heat transfer, the cooling module is used for to the outside heat that scatters of casing.
According to the growth furnace provided by the invention, a plurality of sheet-shaped bodies are convexly arranged on the outer wall of the shell, and the heat preservation assembly and the cooling assembly are nested in a region surrounded by the adjacent sheet-shaped bodies at intervals; the heat-retaining member and/or the cooling member are in contact with a surface of the sheet-like body.
According to the growth furnace provided by the invention, the shell and the plurality of the sheet-shaped bodies are made of silicon carbide.
According to the growth furnace provided by the invention, the heating assembly comprises a heat tracing band which is spirally wound on the outer wall of the shell.
According to the growing furnace provided by the invention, the heating assembly further comprises a temperature controller, and the temperature controller is connected with the heat tracing band and is used for controlling the temperature of the heat tracing band.
According to the growth furnace provided by the invention, the cooling assembly comprises the water-cooling pipe, the water-cooling pipe is spirally wound on the outer wall of the shell, and the water-cooling pipe is used for introducing a cooling medium.
According to the growing furnace provided by the invention, the cooling assembly further comprises an electromagnetic valve;
the water cooling pipe is provided with a water inlet and a water outlet, and the electromagnetic valve is arranged at the water inlet and used for adjusting the flow of cooling media in the water cooling pipe.
According to the growing furnace provided by the invention, the growing furnace further comprises a controller;
the heat preservation assembly and the cooling assembly are both connected with the controller, and the cooling assembly is closed under the condition that the controller controls the heat preservation assembly to be started; and under the condition that the controller controls the heat preservation assembly to be closed, the cooling assembly is started.
According to the growing furnace provided by the invention, the heating module comprises a first heater, a second heater, a third heater and a fourth heater;
the first heater, the second heater, the third heater and the fourth heater are sequentially arranged along the height direction of the furnace body.
According to the growth furnace provided by the invention, the heat preservation module comprises a first heat preservation layer, a second heat preservation layer, a third heat preservation layer and a fourth heat preservation layer;
the first heat preservation layer, the second heat preservation layer, the third heat preservation layer and the fourth heat preservation layer are sequentially arranged along the height direction of the furnace body.
According to the growth furnace provided by the invention, the heating module and the heat preservation module provide a temperature field required by crystal growth in the furnace body, and when the furnace body is in a temperature rising and constant temperature state, the heat preservation assembly transfers heat to the shell, so that the shell is maintained at a preset temperature, the influence of environment temperature fluctuation on the furnace body can be effectively avoided, and the stability of the temperature field in the furnace body is ensured; when the furnace body is in the cooling state, the heat preservation subassembly is closed, and cooling module starts, and cooling module carries out the heat exchange with the furnace body for heat in the furnace body scatters and disappears to the external environment, improves the radiating efficiency of furnace body, makes the furnace body have high heat insulating ability and high heat dissipating.
Drawings
In order to more clearly illustrate the technical solutions of the present invention or the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a sectional view of a growth furnace provided by the present invention;
FIG. 2 is a schematic view of a partial structure of a growth furnace according to the present invention;
FIG. 3 is a second schematic view of a partial structure of a growth furnace according to the present invention;
reference numerals are as follows:
1: a housing; 2: a sheet-like body; 3: a heat tracing band; 4: a water-cooled tube; 5: a first heater; 6: a second heater; 7: a third heater; 8: a fourth heater; 9: a first insulating layer; 10: a second insulating layer; 11: a third insulating layer; 12: a fourth insulating layer; 13: a bottom cover plate; 14: a top cover plate.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
A growth furnace according to an embodiment of the present invention will be described below with reference to fig. 1 to 3.
As shown in fig. 1, a growth furnace provided by an embodiment of the present invention includes: the furnace comprises a furnace body, a shell 1, a heat preservation assembly and a cooling assembly; the furnace body comprises a heating module and a heat preservation module, the heat preservation module is sleeved on the inner side of the shell 1, and the heating module is sleeved on the inner side of the heat preservation module; the heat preservation assembly and the cooling assembly are both arranged on the outer wall of the shell 1; the heat preservation subassembly is used for to casing 1 transmission heat, and the cooling module is used for losing heat to the outside of casing 1.
Specifically, the housing 1 is made of a material with good heat conductivity, the shape of the housing 1 is not particularly limited, and the housing 1 may be square, circular, or polygonal. The inboard of casing 1 is equipped with heat preservation module and heating module in proper order, the outer wall face of heat preservation module and the internal face of casing 1 are laminated mutually, the outer wall face of heating module and the internal face of heat preservation module are laminated mutually, the heating module is tubular structure, the inboard of heating module is equipped with a tubular casing, the tubular casing adopts high temperature resistant metal material preparation, the outer wall face of tubular casing and the internal face of heating module are laminated mutually, the cavity that the tubular casing encloses constitutes crystal growth's space, heat preservation module and heating module are used for providing the required temperature field of crystal growth. The bottom of furnace body is installed bottom apron 13, and top apron 14 is installed at the top of furnace body, and top apron 14 and bottom apron 13 all adopt insulation material to make.
The outer wall of the shell 1 is provided with a heat insulation assembly and a cooling assembly, and the arrangement mode of the heat insulation assembly and the cooling assembly is not particularly limited. For example, the heat preservation assembly and the cooling assembly are arranged around the outer wall of the shell 1 in the circumferential direction, and the heat preservation assembly and the cooling assembly are arranged on the outer wall of the shell 1 at intervals along the height direction of the shell 1; or the heat preservation assembly and the cooling assembly are vertically arranged around the outer wall of the shell 1, and are arranged on the outer wall of the shell 1 at intervals along the circumferential direction of the shell 1.
The heat preservation component can be a heat tracing band which can be a self-temperature-limiting electric heat tracing band, a self-temperature-control electric heat tracing band or a constant-power electric heat tracing band, the heat tracing band is electrified, the heat tracing band is heated to transfer heat to the shell 1, so that the shell 1 is kept at a preset temperature, and the preset temperature is set according to actual requirements, for example, the preset temperature is 20-200 degrees. The heat preservation component can also be a resistance wire which is wound on the outer wall of the shell 1, the resistance wire is connected with a temperature control instrument and a silicon controlled rectifier, and the temperature of the resistance wire is adjusted through the temperature control instrument and the silicon controlled rectifier, so that the shell 1 is kept at a preset temperature.
The cooling assembly comprises a pipeline and a cooling medium, and the cooling medium is introduced into the pipeline to quickly dissipate heat in the furnace body to the external environment.
The existing crystal growth furnace generally adopts a mode of thickening a heat preservation layer to strengthen the heat preservation effect of a furnace body, the stability is enhanced simply by thickening the heat preservation layer, the effect is limited, the influence of the ambient temperature is easy to be received, when the ambient temperature fluctuates, thermal shock can be transmitted to the inside of the furnace body to cause the fluctuation of the temperature in the furnace body, especially when the ambient temperature where the furnace body is located has great difference, the temperature in the furnace body is easy to be disordered, the growth of crystals is adversely affected, the instability of a solid-liquid interface is caused, and polycrystal and mixed crystal are generated. In the later stage of crystal growth, the cooling speed of the furnace body needs to be controlled.
The use of the heat retention assembly and the cooling assembly is described in detail below. In the process of crystal growth, the furnace body is subjected to three processes of a temperature rise stage, a constant temperature stage and a temperature reduction stage, wherein the temperature rise stage comprises a rapid temperature rise stage and a slow temperature rise stage. Heating module and heat preservation module provide the required temperature field of crystal growth, when the furnace body is in intensification state and constant temperature state, install the heat preservation subassembly on the 1 outer wall of casing and be in the on-state, the heat preservation subassembly produces the heat, the heat transfer that the heat preservation subassembly produced is for casing 1, make casing 1's temperature keep one and predetermine the temperature, the temperature value of predetermineeing the temperature sets up according to actual demand, can be according to the region of using, season and the ambient temperature of specific use duration, heating power through control heat preservation subassembly etc, with casing 1's temperature control between 20 ~ 200. Because the outer wall at casing 1 has increased low temperature heat preservation subassembly, the heat of heat preservation subassembly makes casing 1 be in a constant temperature for example 80, when the ambient temperature fluctuation is great, the temperature of casing 1 still keeps presetting the temperature, can avoid the heat in the furnace body to transmit in the external environment, ensures the stability of the temperature field in the furnace body.
When the furnace body is in a cooling state, the heating module and the heat-insulating assembly stop working, the cooling assembly is started, and the cooling assembly can quickly dissipate the temperature in the furnace body to the external environment through air cooling or water cooling, so that the furnace body is quickly cooled.
In the embodiment of the invention, the heating module and the heat preservation module provide a temperature field required by crystal growth in the furnace body, and when the furnace body is in a temperature rising and constant temperature state, the heat preservation assembly transfers heat to the shell 1, so that the shell 1 is maintained at a preset temperature, the influence of environment temperature fluctuation on the furnace body can be effectively avoided, and the stability of the temperature field in the furnace body is ensured; when the furnace body is in the cooling state, the heat preservation subassembly is closed, and cooling module starts, and cooling module carries out the heat exchange with the furnace body for heat in the furnace body scatters and disappears to the external environment, improves the radiating efficiency of furnace body, makes the furnace body have high heat insulating ability and high heat dissipating.
As shown in fig. 1, 2 and 3, in an alternative embodiment, the outer wall of the casing 1 is convexly provided with a plurality of sheets 2, and the heat preservation assembly and the cooling assembly are nested at intervals in the area enclosed by the adjacent sheets 2; the heat-retention means and/or the cooling means are in contact with the surface of the sheet-like body 2.
Specifically, the plurality of sheet-shaped bodies 2 are convexly arranged on the outer wall of the casing 1, the sheet-shaped bodies 2 may be circumferentially or vertically arranged around the outer wall of the casing 1, for example, the plurality of vertically arranged sheet-shaped bodies 2 are arranged along the outer wall of the casing 1, the sheet-shaped bodies 2 extend from the bottom of the casing 1 to the top of the casing 1, a heat-insulating assembly or a cooling assembly is clamped between two adjacent sheet-shaped bodies 2, and the heat-insulating assembly and the cooling assembly are sequentially clamped at intervals in an area surrounded by two adjacent sheet-shaped bodies 2. When the outer wall contact of heat preservation subassembly and casing 1, also have certain contact with the surface of lamina 2, be favorable to heat preservation subassembly's heat to transmit to casing 1 fast, when ambient temperature fluctuates, be favorable to casing 1 to keep at preset temperature. In a similar way, when the cooling component contacts with the outer wall of the shell 1, the cooling component also contacts with the surface of the sheet-shaped body 2 to a certain extent, so that the cooling component can quickly dissipate heat in the furnace body to the external environment, and the cooling efficiency of the cooling component is favorably improved.
Or the outer wall of the shell 1 is provided with a plurality of annularly arranged sheet-shaped bodies 2, the heat insulation assembly and the cooling assembly are also annularly arranged on the outer wall of the shell 1, and the heat insulation assembly and the cooling assembly are sequentially clamped in an area formed by enclosing two adjacent sheet-shaped bodies 2 at intervals. Or the sheet-shaped bodies 2 extend from the bottom of the shell 1 to the top of the shell 1 and are spirally wound on the outer wall of the shell 1, the heat preservation assemblies and the cooling assemblies are also spirally wound on the outer wall of the shell 1, and the heat preservation assemblies and the cooling assemblies are sequentially clamped in an area surrounded by the adjacent sheet-shaped bodies 2 at intervals.
In the embodiment of the invention, the plurality of sheet-shaped bodies 2 are convexly arranged on the outer wall of the shell 1, the plurality of sheet-shaped bodies 2 are annularly arranged, vertically arranged or spirally wound on the outer wall of the shell 1, and the heat insulation assembly and the cooling assembly are alternately clamped in an area surrounded by two adjacent sheet-shaped bodies 2, so that the contact area between the heat insulation assembly and the shell 1 is increased, heat can be rapidly conducted to the shell 1, the contact area between the cooling assembly and the shell 1 is increased, and the heat dissipation efficiency of the cooling assembly is improved.
In an alternative embodiment, the housing 1 and the plurality of platelets 2 are both silicon carbide.
Specifically, the sheet-shaped body 2 and the shell 1 are formed by sintering through a die, and the shell 1 and the plurality of sheet-shaped bodies 2 are integrally formed, which is beneficial to shortening the manufacturing period. The shell 1 and the sheet-shaped body 2 are made of silicon carbide, and the silicon carbide has the characteristics of high temperature resistance, high strength, good heat-conducting property, impact resistance and the like. Heating element contacts with the outer wall of casing 1 and the surface of lamina 2, and when the furnace body was in intensification or constant temperature state, heating element started, and heating element's heat can be fast by casing 1's outer wall and lamina 2 transmit to casing 1 in, when ambient temperature fluctuation is great, casing 1 still can keep presetting the temperature, effectively avoids the temperature field of ambient temperature fluctuation in to the furnace body to cause the influence.
The cooling module contacts with the outer wall of casing 1 and the surface of lamina 2, and when the furnace body was in the cooling state, heating module and heat preservation subassembly were closed, and the cooling module started, and heat transfer in the furnace body is to casing 1 and lamina 2 department, and the cooling module can scatter and disappear the external environment with the heat of casing 1 and lamina 2 department fast in, is favorable to improving the radiating efficiency.
In the embodiment of the invention, the shell 1 and the sheet-shaped body 2 are both made of silicon carbide, and when the furnace body is in a temperature rising or constant temperature state, the heat of the heating assembly can be quickly transferred into the shell 1, so that the shell 1 is ensured to be kept at a preset temperature; when the furnace body is in a cooling state, heat in the furnace body can be rapidly transferred to the shell 1 and the sheet-shaped body 2 to exchange heat with the cooling assembly, and the improvement of the heat dissipation efficiency is facilitated.
In an alternative embodiment, as shown in fig. 1 and 3, the heating assembly comprises a heat tracing band 3, and the heat tracing band 3 is spirally wound on the outer wall of the housing 1.
Specifically, the heating assembly comprises a heat tracing band 3, a plurality of sheet bodies 2 are connected into a whole and are spirally arranged on the outer wall of the shell 1, the heat tracing band 3 is spirally wound on the outer wall of the shell 1, one end of the heat tracing band 3 is provided with a wiring terminal, the wiring terminal is connected with a power supply module, the power supply module is switched on to electrify the heat tracing band 3, and the heat tracing band 3 starts to heat, so that the shell 1 is maintained at a preset temperature. The power supply module is disconnected and the heat tracing band 3 stops heating. The heat tracing band 3 can be a self-temperature-limiting electric heat tracing band 3 or a constant-power electric heat tracing band 3, and is selected according to the use environment of the growing furnace.
In the embodiment of the invention, the heat tracing band 3 is spirally wound on the outer wall of the shell 1, the heat tracing band 3 can be in full heat transfer with the shell 1, the heat of the heat tracing band 3 can be uniformly transferred into the shell 1, the uniformity of heating of the shell 1 is facilitated, the heating efficiency is high, and meanwhile, the installation of the heat tracing band 3 is convenient.
In an alternative embodiment, the heating assembly further comprises a temperature controller connected to the heat trace belt 3 for controlling the temperature of the heat trace belt 3.
Specifically, the heat tracing band 3 is connected with the temperature controller, the temperature controller controls the power supply module to supply currents with different intensities to the heat tracing band 3, when the ambient temperature is in a higher temperature range, for example, the ambient temperature is between 20 ° and 50 °, the temperature of the heat tracing band 3 is controlled by the temperature controller to be kept at about 60 °, the ambient temperature changes, and the temperature of the housing 1 is not affected. When the ambient temperature is in a lower temperature range, for example, the ambient temperature is between-10 degrees and 20 degrees, the temperature of the heat tracing band 3 is controlled by the temperature controller to be kept at about 30 degrees, the ambient temperature changes, and the temperature of the shell 1 cannot be influenced. Meanwhile, the temperature of the heat tracing band 3 is kept at about 30 degrees, so that the consumption of electric quantity can be effectively reduced. The temperature of the heat tracing band 3 can be controlled according to the use environment of the growing furnace and the actual use requirement.
In the embodiment of the invention, the temperature of the heat tracing band 3 is controlled by the temperature controller, so that the temperature of the heat tracing band 3 is adaptive to the temperature of the external environment, the temperature of the shell 1 can be maintained at the preset temperature, and the electric energy can be saved.
In an alternative embodiment, as shown in fig. 1 and 3, the cooling assembly comprises a water cooling pipe 4, the water cooling pipe 4 is spirally wound on the outer wall of the shell 1, and the water cooling pipe 4 is used for introducing a cooling medium.
Specifically, cooling unit includes water-cooling tube 4, and water-cooling tube 4 can be copper pipe or aluminum pipe, and a plurality of lamina 2 are the heliciform and locate on the outer wall of casing 1, and water-cooling tube 4 is the heliciform and twines on the outer wall of casing 1. The distance between two adjacent sheets 2 and the outer diameter of the water cooling tube 4 are not particularly limited, for example, when the distance between two adjacent sheets 2 is 12mm, the outer diameter of the water cooling tube 4 may be 10mm, and when the distance between two adjacent sheets 2 is 18mm, the outer diameter of the water cooling tube 4 may be 16 mm. The both ends of water-cooled tube 4 are equipped with water inlet and delivery port respectively, and when the furnace body was in the cooling state, let in cooling medium from the one end of water-cooled tube 4, cooling medium can be normal atmospheric temperature water, and the temperature of normal atmospheric temperature water is 10 ~ 30, and normal atmospheric temperature water flows in spiral helicine copper pipe, carries out abundant heat exchange with casing 1 and lamina 2, then is discharged by the delivery port, is favorable to furnace body rapid cooling.
Furthermore, the water-cooling tube 4 is communicated with the circulating pump, the normal-temperature water becomes high-temperature water after absorbing heat, and the high-temperature water is discharged from the water outlet, cooled and then conveyed to the water inlet of the water-cooling tube 4 by the circulating pump for recycling.
In the embodiment of the invention, the water-cooling tube 4 is spirally wound on the outer wall of the shell 1, so that the cooling medium in the water-cooling tube 4 can fully absorb the heat of the shell 1 and the sheet-shaped body 2 in the flowing process, the furnace body is favorably cooled quickly, and the water-cooling tube 4 is convenient to install.
In an alternative embodiment, the cooling assembly further comprises a solenoid valve; the water cooling pipe 4 is provided with a water inlet and a water outlet, and the electromagnetic valve is arranged at the water inlet and used for adjusting the flow of the cooling medium in the water cooling pipe 4.
Specifically, the solenoid valve is installed in the water inlet department of water-cooled tube 4, through the aperture size of adjusting the solenoid valve, adjusts the flow of normal atmospheric temperature water in the water-cooled tube 4, can adjust the cooling rate of furnace body from this.
Different crystals have different requirements on the cooling speed of the furnace body in the cooling stage, and when the cooling speed is required to be higher, the opening degree of the electromagnetic valve is increased, so that the flow of normal-temperature water in the water-cooling pipe 4 is increased, and the furnace body has higher cooling speed; when a lower cooling rate is needed, the opening degree of the electromagnetic valve is reduced, so that the flow of the normal-temperature water in the water cooling pipe 4 is reduced, and the furnace body has a lower cooling rate.
In the embodiment of the invention, the flow of the normal-temperature water in the water cooling pipe 4 is adjusted by adjusting the opening of the electromagnetic valve, so that the cooling rate of the furnace body is controlled to meet the cooling requirements of different types of crystals.
In an optional embodiment, the growth furnace further comprises a controller; the heat preservation assembly and the cooling assembly are both connected with the controller, and the cooling assembly is closed under the condition that the controller controls the heat preservation assembly to be started; and under the condition that the controller controls the heat preservation assembly to be closed, the cooling assembly is started.
Specifically, the furnace body heating module starts, and controller control heat preservation subassembly starts, and when the furnace body was in intensification state or constant temperature state, heat transfer to casing 1 that the heat preservation subassembly produced for casing 1 maintains and presets the temperature, can effectively avoid external environment temperature fluctuation to cause the influence to the temperature field in the furnace body. When the furnace body changes to the cooling state through intensification state and constant temperature state, heating module closes, and controller control heat preservation subassembly closes, and control cooling module starts, and heat transfer to casing 1 department in the furnace body, cooling module and casing 1 carry out the heat exchange, scatters and disappears the heat of casing 1 department to the external environment in for the furnace body can rapid cooling.
For example, the heating assembly comprises a heat tracing band 3 and a power supply module, the cooling assembly comprises a water cooling pipe 4 and an electromagnetic valve, and the electromagnetic valve is arranged at a water inlet of the water cooling pipe 4. When the furnace body is in a temperature rising state or a constant temperature state, the controller controls the power supply module to be communicated with the heat tracing band 3, the heat tracing band 3 is in a heating state, the shell 1 is kept at a preset temperature, the furnace body is converted from the temperature rising state or the constant temperature state to a temperature reduction state, the controller controls the power supply module to be disconnected from the heat tracing band 3, the controller controls the opening size of the electromagnetic valve, normal-temperature water flows in the water cooling pipe 4, heat at the shell 1 is taken away, and the furnace body is cooled at a certain temperature reduction rate.
In the embodiment of the invention, when the furnace body is in a temperature rising state, a constant temperature state or a temperature reducing state, the controller controls the starting and closing of the heat insulation assembly and the starting and closing of the cooling assembly according to different states of the furnace body, so that the furnace body can be quickly switched between high heat insulation performance and high heat radiation performance.
As shown in fig. 1, in an alternative embodiment, the heating module includes a first heater 5, a second heater 6, a third heater 7, and a fourth heater 8; the first heater 5, the second heater 6, the third heater 7, and the fourth heater 8 are sequentially arranged in the height direction of the furnace body.
Specifically, the first heater 5, the second heater 6, the third heater 7 and the fourth heater 8 are sequentially arranged along the height direction, the first heater 5, the second heater 6, the third heater 7 and the fourth heater 8 are all in an annular structure, a space surrounded by the first heater 5 forms a first heating area, a space surrounded by the second heater 6 forms a second heating area, a space surrounded by the third heater 7 forms a third heating area, and a space surrounded by the fourth heater 8 forms a fourth heating area.
The temperature of each heating zone can be adjusted within the range of 20-1300 degrees, for example, when higher temperature is needed in the crystal growth process, the power of the heater is adjusted, so that the temperature of the first heating zone is kept between 1000-1050 degrees, the temperature of the second heating zone is kept between 1050-1080 degrees, the temperature of the third heating zone is kept between 1150-1180 degrees, and the temperature of the fourth heating zone is kept between 1120-1150 degrees, therefore, a larger temperature gradient can be formed in the chamber of the furnace body, the gradient value can be controlled within 2-20 degrees/cm, and the temperature gradient required by various types of crystal growth is met. When the constant temperature field is needed, the power of the heater is adjusted to enable the temperatures of the four heating zones to be the same, and the constant temperature field is obtained. The first heater 5, the second heater 6, the third heater 7 and the fourth heater 8 may be resistance wire heating or electromagnetic heating.
In the embodiment of the invention, the first heater 5, the second heater 6, the third heater 7 and the fourth heater 8 are sequentially arranged along the height direction, and the constant temperature field and the gradient temperature field can be conveniently adjusted in the cavity of the furnace body by adjusting the heating power of the first heater 5, the second heater 6, the third heater 7 and the fourth heater 8.
In an alternative embodiment, as shown in fig. 1, the insulation module comprises a first insulation layer 9, a second insulation layer 10, a third insulation layer 11 and a fourth insulation layer 12; the first heat preservation layer 9, the second heat preservation layer 10, the third heat preservation layer 11 and the fourth heat preservation layer 12 are sequentially arranged along the height direction of the furnace body.
Specifically, the first heat preservation layer 9 corresponds to the first heater 5, and the first heat preservation layer 9 is nested outside the first heater 5; the second heat-insulating layer 10 corresponds to the second heater 6, and the second heat-insulating layer 10 is nested outside the second heater 6; the third heat-insulating layer 11 corresponds to the third heater 7, and the third heat-insulating layer 11 is nested outside the third heater 7; the fourth heat-insulating layer 12 corresponds to the fourth heater 8, and the fourth heat-insulating layer 12 is nested outside the fourth heater 8.
The top in the furnace body needs to have good heat insulating property and stability, and the third heat insulating layer 11 and the fourth heat insulating layer 12 can be made of mullite materials with small heat conductivity coefficients, so that the heat dissipation of the upper half section of the furnace body in the axial direction and the radial direction can be reduced, and a temperature field of the top in the furnace body keeps good stability. The first heat-insulating layer 9 and the second heat-insulating layer 10 are made of alumina ceramic materials with slightly large heat conductivity coefficients, so that the heat conductivity of the lower half section of the furnace body in the axial direction is increased, a large temperature gradient can be formed, and the crystal growth requirement is met.
In the embodiment of the invention, the first heat-insulating layer 9, the second heat-insulating layer 10, the third heat-insulating layer 11 and the fourth heat-insulating layer 12 respectively correspond to different heating zones, so that a larger temperature gradient field can be formed in the lower half section of the furnace body, and the upper half section of the furnace body can keep better temperature stability.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. A growth furnace, comprising: the furnace comprises a furnace body, a shell, a heat preservation assembly and a cooling assembly;
the furnace body comprises a heating module and a heat preservation module, the heat preservation module is sleeved on the inner side of the shell, and the heating module is sleeved on the inner side of the heat preservation module; the heat preservation assembly and the cooling assembly are both arranged on the outer wall of the shell;
the heat preservation component is used for transferring heat to the shell, and the cooling component is used for dissipating heat to the outer side of the shell.
2. The growth furnace according to claim 1, wherein a plurality of sheets are convexly arranged on the outer wall of the shell, and the heat preservation assembly and the cooling assembly are nested at intervals in the area enclosed by the adjacent sheets; the heat-retaining member and/or the cooling member are in contact with a surface of the sheet-like body.
3. The growth furnace of claim 2, wherein the shell and the plurality of sheets are both silicon carbide.
4. The furnace of claim 2, wherein the heating assembly comprises a heat tracing ribbon helically wound around an outer wall of the housing.
5. The growth furnace of claim 4, wherein the heating assembly further comprises a temperature controller connected to the heat tracing band for controlling a temperature of the heat tracing band.
6. The growth furnace of claim 2, wherein the cooling assembly comprises a water-cooled tube spirally wound on the outer wall of the shell, and the water-cooled tube is used for introducing a cooling medium.
7. The growth furnace of claim 6, wherein the cooling assembly further comprises a solenoid valve;
the water cooling pipe is provided with a water inlet and a water outlet, and the electromagnetic valve is arranged at the water inlet and used for adjusting the flow of cooling media in the water cooling pipe.
8. The growth furnace of claim 1, further comprising a controller;
the heat preservation assembly and the cooling assembly are both connected with the controller, and the cooling assembly is closed under the condition that the controller controls the heat preservation assembly to be started; and under the condition that the controller controls the heat preservation assembly to be closed, the cooling assembly is started.
9. The growing furnace of claim 1, wherein the heating module comprises a first heater, a second heater, a third heater, and a fourth heater;
the first heater, the second heater, the third heater and the fourth heater are sequentially arranged along the height direction of the furnace body.
10. The growth furnace of claim 1, wherein the heat preservation module comprises a first heat preservation layer, a second heat preservation layer, a third heat preservation layer and a fourth heat preservation layer;
the first heat preservation layer, the second heat preservation layer, the third heat preservation layer and the fourth heat preservation layer are sequentially arranged along the height direction of the furnace body.
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| CN202210138645.6A CN114561688A (en) | 2022-02-15 | 2022-02-15 | Growth furnace |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210138645.6A CN114561688A (en) | 2022-02-15 | 2022-02-15 | Growth furnace |
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|---|---|---|---|---|
| US4195820A (en) * | 1978-04-10 | 1980-04-01 | Pyreflex Corporation | Precise thermal processing apparatus |
| CN201086015Y (en) * | 2007-06-08 | 2008-07-16 | 北京东方雨虹防水技术股份有限公司 | Double helix heat exchange reaction still |
| CN101762435A (en) * | 2010-01-14 | 2010-06-30 | 上海交通大学 | Wide temperature zone hydrogen storage material low temperature hydrogen storage performance testing device |
| CN110512272A (en) * | 2019-08-02 | 2019-11-29 | 合肥嘉东光学股份有限公司 | A kind of crystal growing furnace |
| CN110565168A (en) * | 2019-09-20 | 2019-12-13 | 山西中科晶电信息材料有限公司 | Furnace body temperature-adjustable cold wall single crystal furnace and gallium arsenide crystal growth method |
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2022
- 2022-02-15 CN CN202210138645.6A patent/CN114561688A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4195820A (en) * | 1978-04-10 | 1980-04-01 | Pyreflex Corporation | Precise thermal processing apparatus |
| CN201086015Y (en) * | 2007-06-08 | 2008-07-16 | 北京东方雨虹防水技术股份有限公司 | Double helix heat exchange reaction still |
| CN101762435A (en) * | 2010-01-14 | 2010-06-30 | 上海交通大学 | Wide temperature zone hydrogen storage material low temperature hydrogen storage performance testing device |
| CN110512272A (en) * | 2019-08-02 | 2019-11-29 | 合肥嘉东光学股份有限公司 | A kind of crystal growing furnace |
| CN110565168A (en) * | 2019-09-20 | 2019-12-13 | 山西中科晶电信息材料有限公司 | Furnace body temperature-adjustable cold wall single crystal furnace and gallium arsenide crystal growth method |
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