CN114551296A - Partition management method and device, computer equipment and storage medium - Google Patents
Partition management method and device, computer equipment and storage medium Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/30—Computing systems specially adapted for manufacturing
Abstract
The invention provides a partition management method, a partition management device, computer equipment and a storage medium, belonging to the field of wafer storage device management, wherein the method comprises the steps of receiving a wafer box transportation request; acquiring target state information of the target storage bin according to the attribute information; judging whether an available area exists in a physical area of the target storage bin within a preset time period according to the attribute information and the target state information; when the judgment result is no, acquiring the region setting information of the target storage bin and the region storage information in each setting region; and resetting the region according to the region setting information and the region storage information, and transporting the target wafer box to the target storage bin within a preset time period. Through the processing scheme of this application, when wafer box's usage or attribute change on the transfer line, can in time change transport storage storehouse to guarantee the accuracy that wafer box carried.
Description
Technical Field
The invention relates to the field of wafer storage device management, in particular to a partition management method and device, computer equipment and a storage medium.
Background
A semiconductor fabrication facility is provided with a storage cabinet (Stocker) for storing FOUPs, and each shelf in the storage cabinet stores a plurality of FOUPs. In the process of transmission through the transmission equipment, in order to transmit each wafer transmission box to a destination, each wafer transmission box (FOUP) has own attribute and priority, and the attribute of the FOUP required in different production process stages can change along with the process, so that each type of wafer transmission box needs to be managed to ensure that the wafer transmission box is positioned on an operation table closest to the process, and the processing of each process is completed; meanwhile, when the priority of the FOUPs in the same conveying line is changed in the conveying process, the conveying paths and the like can be adjusted in time, and the number of the FOUPs stored in each warehouse can be balanced.
At present, the prior art cannot adjust a conveying path and the like in time, or well realize the balance of the FOUP, or can store the FOUP on an operation platform corresponding to a process in time when the attribute of the FOUP is changed.
Disclosure of Invention
Accordingly, to overcome the above-mentioned shortcomings of the prior art, the present invention provides a partition management method, apparatus, computer device and storage medium.
In order to achieve the above object, the present invention provides a partition management method, including: receiving a wafer box transportation request, wherein the wafer box transportation request carries attribute information of a target wafer box, current storage bin information, target storage bin information and a preset time period for conveying the target wafer box to a target storage bin; acquiring target state information of the target storage bin according to the attribute information, wherein the target state information comprises storage information of a physical area of the target storage bin; judging whether an available area exists in a physical area of the target storage bin within the preset time period according to the attribute information and the target state information; when the judgment result is no, acquiring the region setting information of the target storage bin and the region storage information in each setting region; and resetting the region according to the region setting information and the region storage information, and transporting the target wafer box to the target storage bin within the preset time period.
In one embodiment, the determining, according to the attribute information and the target state information, whether there is an available area in a physical area of the target storage bin within the preset time period further includes: judging whether an available area exists in the physical area of the target storage bin within the preset time period according to the attribute information and the storage information of the physical area; and when the judgment result is negative, judging whether the logic area of the target storage bin has an available area in the preset time period according to the attribute information and the storage information of the logic area, and outputting the judgment result.
In one embodiment, the target storage bin is further provided with a cache region, and when the storage information of the target storage bin is not updated in time, which results in misjudgment that the target storage bin is in an available region, the target wafer cassette is transported into the cache region of the target storage bin within the preset time period.
In one embodiment, when the area setting cannot be performed again according to the area setting information and the area storage information, the method further includes: acquiring temporary state information of a temporary storage bin adjacent to the target storage bin, and screening handover wafer box list information which can be handed over to each other in the target storage bin and the temporary storage bin according to the temporary state information and the target state information; and handing over the wafer boxes in the target storage bin and the temporary storage bin according to the handed-over wafer box list information, and transporting the target wafer boxes to the target storage bin within the preset time period.
In one embodiment, the handing over the wafer cassette in the target storage bin and the temporary storage bin according to the handed over wafer cassette list information and transporting the target wafer cassette into the target storage bin within the preset time period includes: performing handover storage on a first batch of handover wafer boxes in the target storage bin and the temporary storage bin before the preset time period based on the handover wafer box list; transporting the target wafer cassette into the target storage bin within the preset time period; and based on the handover wafer box list, performing handover storage on a second batch of handover wafer boxes in the target storage bin and the temporary storage bin after the preset time period, so as to reset the wafer boxes stored in the target storage bin and the temporary storage bin.
The invention also provides a partition management device, which comprises: a request receiving module, configured to receive a wafer cassette transportation request, where the wafer cassette transportation request carries attribute information of a target wafer cassette, current storage bin information, target storage bin information, and a preset time period for the target wafer cassette to be transported to a target storage bin; a storage information obtaining module, configured to obtain target state information of the target storage bin according to the attribute information, where the target state information includes storage information of a physical area of the target storage bin; the area judgment module is used for judging whether an available area exists in the physical area of the target storage bin within the preset time period according to the attribute information and the target state information; the regional information acquisition module is used for acquiring regional setting information of the target storage bin and regional storage information in each setting region when the judgment result is no; and the area resetting module is used for resetting the area according to the area setting information and the area storage information and transporting the target wafer box to the target storage bin within the preset time period.
The invention also provides a computer device comprising a memory and a processor, the memory storing a computer program, characterized in that the processor implements the steps of the above method when executing the computer program.
The invention also provides a computer-readable storage medium, on which a computer program is stored which, when being executed by a processor, carries out the steps of the method as described above.
Compared with the prior art, the invention has the advantages that: according to the method and the device, the priority of the FOUP can be acquired through identifying the attributes of the FOUP, the position information of the FOUP is determined according to the attribute priority, the wafers in the FOUP can be processed by the near process, the working hours are further shortened, and the production efficiency is improved.
The corresponding processing technology of the wafer balances the condition of the wafer box stored in the target storage bin, and when the attribute of the FOUP conveyed by the conveying line changes, the conveying storage bin can be changed in time, so that the conveying accuracy of the wafer box is ensured, the wafer box can be stored in the storage bin near the corresponding workbench, and the condition that the FOUP is in waiting state to influence the process flow is avoided.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a flow diagram illustrating a partition management method according to an embodiment of the invention;
FIG. 2 is a block diagram showing the structure of a partition management apparatus according to an embodiment of the present invention; and
fig. 3 is an internal configuration diagram of a computer device in an embodiment of the present invention.
Detailed Description
The embodiments of the present application will be described in detail below with reference to the accompanying drawings.
The following description of the embodiments of the present application is provided by way of specific examples, and other advantages and effects of the present application will be readily apparent to those skilled in the art from the disclosure herein. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. The present application is capable of other and different embodiments and its several details are capable of modifications and/or changes in various respects, all without departing from the spirit of the present application. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It is noted that various aspects of the embodiments are described below within the scope of the appended claims. It should be apparent that the aspects described herein may be embodied in a wide variety of forms and that any specific structure and/or function described herein is merely illustrative. Based on the present application, one skilled in the art should appreciate that one aspect described herein may be implemented independently of any other aspects and that two or more of these aspects may be combined in various ways. For example, an apparatus may be implemented and/or a method practiced using any number and aspects set forth herein. Additionally, such an apparatus may be implemented and/or such a method may be practiced using other structure and/or functionality in addition to one or more of the aspects set forth herein.
It should be noted that the drawings provided in the following embodiments are only for illustrating the basic idea of the present application, and the drawings only show the components related to the present application rather than the number, shape and size of the components in actual implementation, and the type, amount and ratio of the components in actual implementation may be changed arbitrarily, and the layout of the components may be more complicated.
In addition, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, it will be understood by those skilled in the art that the aspects may be practiced without these specific details.
In a semiconductor wafer factory, each FOUP has its own attribute and priority, so that during the FOUP transportation process, the priority setting needs to be performed on the FOUP, and the specific placing bin is balanced and adjusted according to the priority and the attribute of the FOUP. In addition, when the bin is full, the placing space is difficult to control, an emergency treatment plan is lacked at present, and a scheme for reasonable allocation is adopted, so that the problem existing at present is solved, the stored FOUP is subjected to partition management control, the placing is more reasonable, the problem that the FOUP cannot be placed when the transportation equipment with the FOUP runs and the unreasonable placing problem is solved, and the problem of the utilization rate of the bin for placing the FOUP is improved. As shown in fig. 1, the embodiment of the present application provides a partition management method, which can be applied to a terminal or a server, where the terminal includes but is not limited to various personal computers, notebook computers, smart phones, tablet computers and portable smart devices, and the server can be implemented by an independent server or a server cluster formed by a plurality of servers, and in one embodiment, the partition management method for FOUP is applied to an MCS system, and the terminal or server operation method includes the following steps:
The pod is a wafer transfer pod (FOUP) that can transfer different types of wafers. The attribute information may include priority information to which the wafer box belongs, and may be identified by numerical values or characters, for example, in one embodiment, the attribute information may be divided into Un-knock, Common, Standard, HotLot, Empty-Clean-a-Free, and the like. The storage region priority of the corresponding target storage bin can also be divided into Un-Know, Common, Standard, HotLot, Empty-Clean-A-Free and the like; or the storage region priority of the corresponding target storage bin can be divided into Un-Know, Common and the like, and the Common storage region can store four priority wafer boxes of Common, Standard, HotLot and Empty-Clean-A-Free. The attribute information may further include priority information to which the wafer cassette belongs, a value of capacity required for the wafer cassette, and the like. The target stocker in the pod transport request may be selected according to the wafer processing process, the type of wafer in the FOUP. The server receives the wafer box transportation request, and can acquire the storage bin information near the corresponding operation table according to the process applicable to the current wafer. The current bin information and the target bin information may be physical address information corresponding to the bins.
The server receives a wafer box transportation request, wherein the wafer box transportation request carries attribute information of a target wafer box, current storage bin information, target storage bin information and a preset time period for conveying the target wafer box to a target storage bin.
And 102, acquiring target state information of the target storage bin according to the attribute information, wherein the target state information comprises storage information of a physical area of the target storage bin.
The target state information includes storage information of a physical region of the target storage bin, the storage information includes wafer cassette related information stored in the current target storage bin, and the wafer cassette related information may include a storage time period, a storage capacity, a transportation device, and the like. And the server acquires the target state information of the target storage bin according to the attribute information.
And 103, judging whether an available area exists in the physical area of the target storage bin within a preset time period according to the attribute information and the target state information.
And the server judges whether an available area exists in the physical area of the target storage bin within a preset time period according to the attribute information and the target state information. The server may determine whether the physical area of the target storage bin is free in a preset time period, or may determine whether the physical area of the target storage bin is available in the preset time period according to the capacity information in the attribute information and the capacity in the target state information.
And step 104, when the judgment result is no, acquiring the region setting information of the target storage bin and the region storage information in each setting region.
And when the server judges that the wafer cassette is in the positive state, the server controls the transmission system to transport the target wafer cassette into the target storage bin within a preset time period. When the server judges that the target storage bin is not the target storage bin, the server acquires the region setting information of the target storage bin and the region storage information in each setting region.
And 105, resetting the region according to the region setting information and the region storage information, and transporting the target wafer box to the target storage bin within a preset time period.
The server may also perform region resetting based on the region setting information and the region storage information according to the balancing rule, and transport the target wafer cassette into the target storage bin within a preset time period. The server may expand the storage area corresponding to the target pod attribute information and transport the target pod to the expanded target storage bay within a preset time period. The balancing rule may be to acquire a process flow corresponding to the attribute information of a FOUP, determine a ratio of each corresponding FOUP according to the process flow, and allocate the number of FOUPs based on a storage capacity of a storage bin near the stage.
According to the zone management method, the wafer box conditions stored in the target storage bin can be balanced according to the priority of the wafer box and the corresponding processing technology of the wafer, and when the attribute of the wafer box on the conveying line changes, the conveying storage bin can be changed in time, so that the conveying accuracy of the wafer box is ensured, and the wafer box can be stored in the storage bin near the corresponding workbench.
In one embodiment, the target status information further includes storage information of a logical area of the target storage bin, and determining whether there is an available area in a physical area of the target storage bin within a preset time period according to the attribute information and the target status information includes: judging whether an available area exists in the physical area of the target storage bin within a preset time period according to the attribute information and the storage information of the physical area; and when the judgment result is negative, judging whether the logic area of the target storage bin has an available area within a preset time period according to the attribute information and the storage information of the logic area, and outputting the judgment result.
The physical areas of the target storage bins are the actual number of shelves reserved for the areas in one target storage bin; the logical area of the target storage bin refers to the number of shelves which can be theoretically set in each area in one target storage bin, the number of shelves may be greater than the actual number of physical shelves corresponding to the area, but the number of shelves in a single logical area cannot be greater than the total number of physical shelves of the target storage bin, for example, when the actual number of physical shelves of the storage bin is 100, the shelves are uniformly allocated to 5 priority storage areas, and each storage area can set an upper limit and a lower limit of the storage number, wherein the number of shelves in the physical area corresponding to each storage area is 20, but the upper limit of the logical area can be set to 20-100, when the number of wafer boxes in a preset time period is greater than the number of shelves, the server can reset the shelves corresponding to each area, and can also reallocate the wafer boxes stored in the physical area according to the time period in which the wafer boxes are located. The logical zones are divided according to the properties of the FOUPs (unified pods) with the aim of balancing the number of different FOUP types in each bin.
The target state information also contains storage information for the logical region of the target bin. And the server judges whether the physical area of the target storage bin has an available area within a preset time period according to the attribute information and the storage information of the physical area. And when the server judges that the wafer cassette is in the positive state, the server controls the transmission system to transport the target wafer cassette into the target storage bin within a preset time period. And when the judgment result is negative, the server judges whether the logic area of the target storage bin has an available area within a preset time period according to the attribute information and the storage information of the logic area, and outputs the judgment result.
In one embodiment, the target storage bin is further provided with a cache region, and when the storage information of the target storage bin is not updated in time, which results in misjudgment that the target storage bin has an available region, the target wafer cassette is transported into the cache region of the target storage bin within a preset time period.
The server may set a buffer area for transmitting and storing the wafer cassette as a temporary storage bin corresponding to the target wafer cassette, and transport the target wafer cassette to the target storage bin when the target storage bin is idle. The buffer area aims at temporarily storing the FOUP to be transmitted in a buffer area for waiting the PORT PORT to be idle when the PORT PORT for transfer is occupied in the transmission process, and then transmitting, wherein the area for transfer waiting is the buffer area; and secondly, the wafer box is used as a reserved area, in the production process, one wafer box needs to be transmitted to a machine B for subsequent processing after the machine A finishes processing, the machine B is in production, the wafer box can be firstly placed in a storage bin near the machine B at the moment, the position is the reserved area, and after the machine B finishes processing the current wafer box, the wafer box is transmitted to the machine B from a storage.
In the above embodiment, a physical area, a logical area, and a cache area may be provided for a FOUP during transfer, and by setting different attribute conditions, a conveying path and the like may be adjusted in time and each warehouse may be balanced for storage, so that the FOUP may be allocated more reasonably.
In one embodiment, when the area setting cannot be performed again according to the area setting information and the area storage information, the method further includes: acquiring temporary state information of a temporary storage bin adjacent to a target storage bin, and screening handover wafer box list information which can be handed over with each other in the target storage bin and the temporary storage bin according to the temporary state information and the target state information; and transferring the wafer boxes in the target storage bin and the temporary storage bin according to the transfer wafer box list information, and transporting the target wafer boxes to the target storage bin within a preset time period.
When the region setting cannot be carried out again according to the region setting information and the region storage information, at the moment, the number of the logic regions or the physical regions of the target storage bin reaches the upper limit value of the type storage region, the server can also acquire temporary state information of a temporary storage bin adjacent to the target storage bin, and screen out handover wafer box list information which can be handed over to each other in the target storage bin and the temporary storage bin according to the temporary state information and the target state information; and the server hands over the wafer boxes in the target storage bin and the temporary storage bin according to the hand-over wafer box list information, and transports the target wafer boxes to the target storage bin within a preset time period.
The temporary state information and the target state information include parameters that are substantially consistent. The hand-over cassette list information may contain a cassette identification, position information of the cassettes stored in different storage bins before and after being exchanged, an expected storage period, an exchanged period, etc.
In one embodiment, handing over the wafer cassettes in the target storage stocker and the temporary storage stocker according to the hand-over wafer cassette list information, and transporting the target wafer cassettes into the target storage stocker within a preset time period, includes: based on the handover wafer box list, performing handover storage on a first batch of handover wafer boxes in the target storage bin and the temporary storage bin before a preset time period; transporting the target wafer box into a target storage bin within a preset time period; and based on the handover wafer box list, performing handover storage on the second batch of handover wafer boxes in the target storage bin and the temporary storage bin after a preset time period, so as to realize resetting of the wafer boxes stored in the target storage bin and the temporary storage bin.
The server not only can hand over the storage according to handing over the clear list of wafer box, also can hand over the storage with the second batch hand over wafer box in target storage storehouse and interim storage storehouse after predetermineeing the time quantum in target storage storehouse idle back, realizes the reseing of storage wafer box in target storage storehouse and interim storage storehouse to avoid the unusual when wafer box is taken out. The server hands over and stores the first handed over wafer boxes in the target storage bin and the temporary storage bin before a preset time period based on the handed over wafer box list; transporting the target wafer box into a target storage bin within a preset time period; and based on the handover wafer box list, performing handover storage on the second batch of handover wafer boxes in the target storage bin and the temporary storage bin after a preset time period, so as to realize resetting of the wafer boxes stored in the target storage bin and the temporary storage bin.
In one embodiment, as shown in fig. 2, a partition management apparatus is provided, and the apparatus includes a request receiving module 201, a storage information acquiring module 202, an area determining module 203, an area information acquiring module 204, and an area resetting module 205.
The request receiving module 201 is configured to receive a wafer cassette transportation request, where the wafer cassette transportation request carries attribute information of a target wafer cassette, current storage bin information, target storage bin information, and a preset time period for the target wafer cassette to be transported to the target storage bin.
A storage information obtaining module 202, configured to obtain target state information of the target storage bin according to the attribute information, where the target state information includes storage information of a physical area of the target storage bin.
And the area judgment module 203 is configured to judge whether an available area exists in the physical area of the target storage bin within a preset time period according to the attribute information and the target state information.
And an area information acquiring module 204, configured to acquire the area setting information of the target storage bin and the area storage information in each setting area when the determination result is no.
And the area resetting module 205 is configured to reset the area setting according to the area setting information and the area storage information, and transport the target wafer cassette into the target storage bin within a preset time period.
In one embodiment, the region determining module includes:
and the physical area judging unit is used for judging whether the physical area of the target storage bin has an available area within a preset time period according to the attribute information and the storage information of the physical area.
And the logic area judging unit is used for judging whether the logic area of the target storage bin has an available area within a preset time period according to the attribute information and the storage information of the logic area when the judgment result is negative, and outputting the judgment result.
In one embodiment, the apparatus further comprises:
and the transfer wafer box list screening module is used for acquiring temporary state information of a temporary storage bin adjacent to the target storage bin and screening transfer wafer box list information which can be mutually transferred in the target storage bin and the temporary storage bin according to the temporary state information and the target state information.
And the wafer box handover module is used for handing over the wafer boxes in the target storage bin and the temporary storage bin according to the handover wafer box list information and transporting the target wafer boxes to the target storage bin within a preset time period.
In one embodiment, the apparatus further comprises:
and the transfer storage module is used for transferring and storing the first batch of transfer wafer boxes in the target storage bin and the temporary storage bin before a preset time period based on the transfer wafer box list.
And the transportation instruction generation module is used for transporting the target wafer box to the target storage bin within a preset time period.
And the transfer resetting module is used for transferring and storing the second batch of transfer wafer boxes in the target storage bin and the temporary storage bin after a preset time period based on the transfer wafer box list, so that the wafer boxes stored in the target storage bin and the temporary storage bin are reset.
For the specific definition of the partition management device, reference may be made to the above definition of the partition management method, which is not described herein again. The modules in the partition management apparatus may be implemented in whole or in part by software, hardware, and a combination thereof. The modules can be embedded in a hardware form or independent from a processor in the computer device, and can also be stored in a memory in the computer device in a software form, so that the processor can call and execute operations corresponding to the modules.
In one embodiment, a computer device is provided, which may be a server, the internal structure of which may be as shown in fig. 3. The computer device includes a processor, a memory, a network interface, and a database connected by a system bus. Wherein the processor of the computer device is configured to provide computing and control capabilities. The memory of the computer device comprises a nonvolatile storage medium and an internal memory. The non-volatile storage medium stores an operating system, a computer program, and a database. The internal memory provides an environment for the operation of an operating system and computer programs in the non-volatile storage medium. The database of the computer device is used for storing attribute information and the like. The network interface of the computer device is used for communicating with an external terminal through a network connection. The computer program is executed by a processor to implement a partition management method.
Those skilled in the art will appreciate that the architecture shown in fig. 3 is merely a block diagram of some of the structures associated with the disclosed aspects and is not intended to limit the computing devices to which the disclosed aspects apply, as particular computing devices may include more or less components than those shown, or may combine certain components, or have a different arrangement of components.
In one embodiment, there is provided a computer device comprising a memory storing a computer program and a processor implementing the following steps when the processor executes the computer program: receiving a wafer box transportation request, wherein the wafer box transportation request carries attribute information of a target wafer box, a current storage bin, a target storage bin and a preset time period for conveying the target wafer box to the target storage bin; acquiring target state information of the target storage bin according to the attribute information, wherein the target state information comprises storage information of a physical area of the target storage bin; judging whether an available area exists in a physical area of the target storage bin within a preset time period according to the attribute information and the target state information; when the judgment result is no, acquiring the region setting information of the target storage bin and the region storage information in each setting region; and resetting the region according to the region setting information and the region storage information, and transporting the target wafer box to the target storage bin within a preset time period.
In one embodiment, the target state information realized when the processor executes the computer program further includes storage information of a logical area of the target storage bin, and determining whether there is an available area in a physical area of the target storage bin within a preset time period according to the attribute information and the target state information includes: judging whether an available area exists in the physical area of the target storage bin within a preset time period according to the attribute information and the storage information of the physical area; and when the judgment result is negative, judging whether the logic area of the target storage bin has an available area within a preset time period according to the attribute information and the storage information of the logic area, and outputting the judgment result.
In one embodiment, when the region setting cannot be newly performed according to the region setting information and the region storage information, which is implemented when the processor executes the computer program, the method further includes: acquiring temporary state information of a temporary storage bin adjacent to a target storage bin, and screening handover wafer box list information which can be handed over with each other in the target storage bin and the temporary storage bin according to the temporary state information and the target state information; and transferring the wafer boxes in the target storage bin and the temporary storage bin according to the transfer wafer box list information, and transporting the target wafer boxes to the target storage bin within a preset time period.
In one embodiment, the handing over the wafer cassettes in the target storage bay and the temporary storage bay according to the handed over wafer cassette list information and transporting the target wafer cassettes into the target storage bay for a preset time period, implemented when the processor executes the computer program, includes: based on the handover wafer box list, performing handover storage on a first batch of handover wafer boxes in the target storage bin and the temporary storage bin before a preset time period; transporting the target wafer box into a target storage bin within a preset time period; and based on the handover wafer box list, performing handover storage on the second batch of handover wafer boxes in the target storage bin and the temporary storage bin after a preset time period, so as to realize resetting of the wafer boxes stored in the target storage bin and the temporary storage bin.
In one embodiment, a computer-readable storage medium is provided, having a computer program stored thereon, which when executed by a processor, performs the steps of: receiving a wafer box transportation request, wherein the wafer box transportation request carries attribute information of a target wafer box, a current storage bin, a target storage bin and a preset time period for conveying the target wafer box to the target storage bin; acquiring target state information of the target storage bin according to the attribute information, wherein the target state information comprises storage information of a physical area of the target storage bin; judging whether an available area exists in a physical area of the target storage bin within a preset time period according to the attribute information and the target state information; when the judgment result is no, acquiring the region setting information of the target storage bin and the region storage information in each setting region; and resetting the region according to the region setting information and the region storage information, and transporting the target wafer box to the target storage bin within a preset time period.
In one embodiment, the target state information realized when the computer program is executed by the processor further includes storage information of a logical area of the target storage bin, and determining whether there is an available area in a physical area of the target storage bin within a preset time period according to the attribute information and the target state information includes: judging whether an available area exists in the physical area of the target storage bin within a preset time period according to the attribute information and the storage information of the physical area; and when the judgment result is negative, judging whether the logic area of the target storage bin has an available area within a preset time period according to the attribute information and the storage information of the logic area, and outputting the judgment result.
In one embodiment, the computer program when executed by the processor implements when the region setting cannot be redone based on the region setting information and the region storage information, the method further comprising: acquiring temporary state information of a temporary storage bin adjacent to a target storage bin, and screening handover wafer box list information which can be handed over with each other in the target storage bin and the temporary storage bin according to the temporary state information and the target state information; and transferring the wafer boxes in the target storage bin and the temporary storage bin according to the transfer wafer box list information, and transporting the target wafer boxes to the target storage bin within a preset time period.
In one embodiment, the hand-off of the wafer cassette in the target storage bay and the temporary storage bay according to the hand-off wafer cassette list information and the transportation of the target wafer cassette into the target storage bay for a preset time period, which are implemented by the processor, comprises: based on the handover wafer box list, performing handover storage on a first batch of handover wafer boxes in the target storage bin and the temporary storage bin before a preset time period; transporting the target wafer box into a target storage bin within a preset time period; and based on the handover wafer box list, performing handover storage on the second batch of handover wafer boxes in the target storage bin and the temporary storage bin after a preset time period, so as to realize resetting of the wafer boxes stored in the target storage bin and the temporary storage bin.
The above description is only for the specific embodiments of the present application, but the scope of the present application is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present application should be covered within the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (8)
1. A partition management method, comprising:
receiving a wafer box transportation request, wherein the wafer box transportation request carries attribute information of a target wafer box, current storage bin information, target storage bin information and a preset time period for conveying the target wafer box to a target storage bin;
acquiring target state information of the target storage bin according to the attribute information, wherein the target state information comprises storage information of a physical area of the target storage bin;
judging whether an available area exists in a physical area of the target storage bin within the preset time period according to the attribute information and the target state information;
when the judgment result is no, acquiring the region setting information of the target storage bin and the region storage information in each setting region;
and resetting the region according to the region setting information and the region storage information, and transporting the target wafer box to the target storage bin within the preset time period.
2. The method according to claim 1, wherein the target status information further includes storage information of a logical area of the target storage bin, and the determining whether there is an available area in a physical area of the target storage bin within the preset time period according to the attribute information and the target status information comprises:
judging whether an available area exists in the physical area of the target storage bin within the preset time period according to the attribute information and the storage information of the physical area;
and when the judgment result is negative, judging whether the logic area of the target storage bin has an available area in the preset time period according to the attribute information and the storage information of the logic area, and outputting the judgment result.
3. The method according to claim 2, wherein the target storage bin is further provided with a buffer area, and when the storage information of the target storage bin is not updated in time, which results in misjudgment that the target storage bin is in the available area, the target wafer cassette is transported into the buffer area of the target storage bin within the preset time period.
4. The method according to claim 1, wherein when the area setting cannot be newly performed according to the area setting information and the area storage information, the method further comprises:
acquiring temporary state information of a temporary storage bin adjacent to the target storage bin, and screening handover wafer cassette list information which can be handed over with each other in the target storage bin and the temporary storage bin according to the temporary state information and the target state information;
and handing over the wafer boxes in the target storage bin and the temporary storage bin according to the handed-over wafer box list information, and transporting the target wafer boxes to the target storage bin within the preset time period.
5. The method of claim 4, wherein the handing over the wafer cassettes in the target storage bin and the temporary storage bin according to the handed over wafer cassette list information and transporting the target wafer cassettes into the target storage bin within the preset time period comprises:
performing handover storage on a first batch of handover wafer boxes in the target storage bin and the temporary storage bin before the preset time period based on the handover wafer box list;
transporting the target wafer cassette into the target storage bin within the preset time period;
and based on the handover wafer box list, performing handover storage on a second batch of handover wafer boxes in the target storage bin and the temporary storage bin after the preset time period, and regulating and controlling the resetting of the wafer boxes stored in the target storage bin and the temporary storage bin.
6. A partition management apparatus, the apparatus comprising:
a request receiving module, configured to receive a wafer cassette transportation request, where the wafer cassette transportation request carries attribute information of a target wafer cassette, current storage bin information, target storage bin information, and a preset time period for the target wafer cassette to be transported to a target storage bin;
a storage information obtaining module, configured to obtain target state information of the target storage bin according to the attribute information, where the target state information includes storage information of a physical area of the target storage bin;
the area judgment module is used for judging whether an available area exists in the physical area of the target storage bin within the preset time period according to the attribute information and the target state information;
the regional information acquisition module is used for acquiring regional setting information of the target storage bin and regional storage information in each setting region when the judgment result is no;
and the area resetting module is used for resetting the area according to the area setting information and the area storage information and transporting the target wafer box to the target storage bin within the preset time period.
7. A computer device comprising a memory and a processor, the memory storing a computer program, wherein the processor implements the steps of the method of any one of claims 1 to 5 when executing the computer program.
8. A computer-readable storage medium, on which a computer program is stored, which, when being executed by a processor, carries out the steps of the method of any one of claims 1 to 5.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210108743.5A CN114551296B (en) | 2022-01-28 | 2022-01-28 | Partition management method and device, computer equipment and storage medium |
| PCT/CN2022/135183 WO2023142653A1 (en) | 2022-01-28 | 2022-11-29 | Area-based management method and apparatus, computer device, and storage medium |
| TW111146625A TW202331892A (en) | 2022-01-28 | 2022-12-05 | A partition management method, apparatus, computer device, and storage medium |
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| CN202210108743.5A CN114551296B (en) | 2022-01-28 | 2022-01-28 | Partition management method and device, computer equipment and storage medium |
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| Country | Link |
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| CN (1) | CN114551296B (en) |
| TW (1) | TW202331892A (en) |
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Cited By (1)
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| WO2023142653A1 (en) * | 2022-01-28 | 2023-08-03 | 弥费科技(上海)股份有限公司 | Area-based management method and apparatus, computer device, and storage medium |
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| Publication number | Publication date |
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| TW202331892A (en) | 2023-08-01 |
| CN114551296B (en) | 2023-02-28 |
| WO2023142653A1 (en) | 2023-08-03 |
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