CN114545042A

CN114545042A - Probe card device and self-aligning probe

Info

Publication number: CN114545042A
Application number: CN202011327852.3A
Authority: CN
Inventors: 谢开杰; 苏伟志; 陈弘明; 李帅
Original assignee: Taiwan Zhonghua Precision Measurement Technology Co ltd
Current assignee: Taiwan Zhonghua Precision Measurement Technology Co ltd
Priority date: 2020-11-24
Filing date: 2020-11-24
Publication date: 2022-05-27

Abstract

The invention discloses a probe card device and a self-aligning probe, wherein the self-aligning probe comprises a switching end part used for propping against a signal switching plate, a testing end part used for separably propping against an object to be tested, a first connecting part connected with the switching end part, a second connecting part connected with the testing end part and an arc-shaped part connected with the first connecting part and the second connecting part. The switching end part and the testing end part jointly define a reference axis, the first connecting part is provided with a guide projection, and the maximum distance between the arc part and the reference axis is greater than 75 micrometers and less than 150 micrometers. Accordingly, the guide projection is formed through the first connection portion, so that a gap between the self-alignment probe and the first guide plate unit can be effectively controlled, thereby facilitating development and application of the probe card device.

Description

Probe card device and self-aligning probe

Technical Field

The present invention relates to a conductive probe, and more particularly, to a probe card apparatus and a self-aligned probe.

Background

The conventional probe card device comprises a first guide plate unit, a second guide plate unit arranged at an interval with the first guide plate unit, and a plurality of conductive probes penetrating through the first guide plate unit and the second guide plate unit. The position of the existing conductive probe in the first guide plate unit is limited to the structural design with the same width, so a large gap (e.g., more than 10 micrometers) is formed between the existing conductive probe and the first guide plate unit, which is not favorable for further development and application of the existing probe card device.

The present inventors have considered that the above-mentioned drawbacks can be improved, and have made intensive studies and use of scientific principles, and finally have proposed the present invention which is designed reasonably and effectively to improve the above-mentioned drawbacks.

Disclosure of Invention

Embodiments of the present invention provide a probe card apparatus and a self-aligned probe, which can effectively overcome the defects of the conventional conductive probe.

The embodiment of the invention discloses a probe card device, which comprises a first guide plate unit and a second guide plate unit which are arranged at intervals; the plurality of self-alignment probes penetrate through the first guide plate unit and the second guide plate unit, and any two adjacent self-alignment probes are separated by a space; wherein each self-aligning probe comprises: the switching end part is positioned at the outer side of the first guide plate unit far away from the second guide plate unit; the testing end part is positioned at the outer side of the second guide plate unit far away from the first guide plate unit and is used for detachably abutting against an object to be tested; wherein, the switching end part and the testing end part jointly define a reference axis; the first connecting part is positioned in the first guide plate unit; wherein the first connecting part is formed with a pilot projection so that a gap of not more than 4 micrometers (mum) is formed between the first connecting part and the first guide plate unit; the second connecting part is positioned in the second guide plate unit; the arc-shaped part is connected with the first connecting part and the second connecting part; wherein the arc portion is spaced from the reference axis by a maximum distance greater than 75 microns and less than the pitch.

Preferably, each self-aligning probe defines a narrow region at a position where an arc portion having a maximum distance is formed; in each self-aligned probe, the cross-sectional area of the arc-shaped portion gradually increases from the narrow region toward the first connection portion and the second connection portion.

Preferably, in each self-aligning probe, the distance of the narrow region from the first connection portion is equal to the distance of the narrow region from the second connection portion.

Preferably, the narrowing region and the pilot projection are located on opposite sides of the reference axis.

Preferably, each self-aligning probe is formed with a rib adjacent to the first guide plate unit at the arc portion; the rib and the guide projection of each self-alignment probe are respectively positioned on two opposite sides of the reference axis, and the rib of each self-alignment probe does not contact the first guide plate unit.

Preferably, in each self-aligned probe, a maximum width of the first connection portion is greater than a maximum width of the second connection portion.

Preferably, the probe card apparatus further comprises a signal adapter plate adjacent to the first guide plate unit; when the first guide plate unit and the second guide plate unit are obliquely staggered, each self-aligning probe is provided with a guide protrusion, so that the switching end part is abutted against the signal switching plate at an angle ranging from 85 degrees to 95 degrees.

The embodiment of the invention also discloses a self-aligning probe, which comprises: a switching end part used for propping against a signal switching plate; a testing end portion for detachably abutting against an object to be tested; wherein, the switching end part and the testing end part jointly define a reference axis; a first connecting part connected with the switching end part; wherein, the first connecting part is provided with a pilot bulge; the second connecting part is connected with the testing end part; the arc-shaped part is connected with the first connecting part and the second connecting part; wherein the arc portion is spaced from the reference axis by a maximum distance greater than 75 microns and less than 150 microns.

Preferably, the position of the self-aligning probe where the arc part with the largest distance is formed is defined as a narrow area; the sectional area of the arc-shaped part gradually increases from the narrow area to the first connecting part and the second connecting part.

Preferably, the distance of the narrow region from the first connection portion is equal to the distance of the narrow region from the second connection portion.

In summary, in the probe card apparatus and the self-aligned probe according to the embodiments of the invention, the first connecting portion is formed with the guide protrusion, so that the gap between the self-aligned probe and the first guide plate unit can be effectively controlled, thereby facilitating the development and application of the probe card apparatus.

For a better understanding of the nature and technical content of the present invention, reference should be made to the following detailed description of the invention and the accompanying drawings, which are provided for illustration purposes only and are not intended to limit the scope of the invention in any way.

Drawings

Fig. 1 is a schematic cross-sectional view of a probe card apparatus according to a first embodiment of the present invention.

Fig. 2 is a schematic cross-sectional view of the probe card apparatus of fig. 1 when the first guide plate unit and the second guide plate unit are arranged in a staggered manner.

Fig. 3 is a schematic plan view of a self-aligned probe according to a first embodiment of the invention.

Fig. 4 is a schematic perspective view of a self-aligned probe according to a first embodiment of the invention.

Fig. 5 is an enlarged schematic view of a portion V in fig. 1.

Fig. 6 is an enlarged schematic view of a portion VI in fig. 2.

Fig. 7 is a schematic diagram of the comparative example of fig. 6.

Detailed Description

The following is a description of the embodiments of the probe card apparatus and self-aligned probe disclosed in the present invention with reference to specific embodiments, and those skilled in the art will understand the advantages and effects of the invention from the disclosure of the present specification. The invention is capable of other and different embodiments and its several details are capable of modification and various other changes, which can be made in various details within the specification and without departing from the spirit and scope of the invention. The drawings of the present invention are for illustrative purposes only and are not intended to be drawn to scale. The following embodiments will further explain the related art of the present invention in detail, but the disclosure is not intended to limit the scope of the present invention.

It will be understood that, although the terms "first," "second," "third," etc. may be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are used primarily to distinguish one element from another element or from one signal to another signal. In addition, the term "or" as used herein should be taken to include any one or combination of more of the associated listed items as the case may be.

Fig. 1 to 6 show an embodiment of the present invention. As shown in fig. 1 and 2, the present embodiment discloses a probe card apparatus 1000 (e.g., a vertical probe card apparatus) including a probe head 100 and a signal adapter board 200 abutting against one side (e.g., the top side of the probe head 100 in fig. 1) of the probe head 100, and the other side (e.g., the bottom side of the probe head 100 in fig. 1) of the probe head 100 is used for abutting against a Device Under Test (DUT) (not shown), such as a semiconductor wafer.

It should be noted that, for the convenience of understanding the present embodiment, the drawings only show a partial structure of the probe card apparatus 1000, so as to clearly show the structure and connection relationship of the components of the probe card apparatus 1000, but the invention is not limited by the drawings. The construction of each component of the probe head 100 and the connection relationship thereof will be described separately below.

As shown in fig. 1, the probe head 100 includes a first guide plate unit 1, a second guide plate unit 2 spaced apart from the first guide plate unit 1, a spacer 3 clamped between the first guide plate unit 1 and the second guide plate unit 2, and a plurality of self-aligning probes 4 penetrating the first guide plate unit 1 and the second guide plate unit 2. Wherein any two adjacent self-aligned probes 4 are separated by a distance D4.

It should be noted that the self-aligning probe 4 is described in the present embodiment by matching with the first guide plate unit 1, the second guide plate unit 2 and the partition plate 3, but the invention is not limited thereto. For example, in other embodiments not shown, the self-aligning probe 4 may be used independently (e.g., sold) or with other components.

In the present embodiment, the first guide plate unit 1 includes a first guide plate, and the second guide plate unit 2 includes a second guide plate. However, in other embodiments not shown in the present invention, the first guide plate unit 1 may include a plurality of first guide plates (and a spacer sandwiched between two adjacent first guide plates), and the second guide plate unit 2 may include a plurality of second guide plates (and a spacer sandwiched between two adjacent second guide plates), the plurality of first guide plates may be disposed to be offset from each other, the plurality of second guide plates may be disposed to be offset from each other, and the first guide plate unit 1 may be disposed to be offset from each other with respect to the second guide plate unit 2.

Furthermore, the partition plate 3 may be of an annular configuration, and the partition plate 3 is clamped between the corresponding peripheral portions of the first guide plate unit 1 and the second guide plate unit 2, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the spacing plate 3 of the probe card device 1000 may be omitted or replaced by other components.

It should be noted that a plurality of the self-aligned probes 4 have substantially the same structure in the present embodiment, so for convenience of description, a single self-aligned probe 4 will be described below, but the invention is not limited thereto. For example, in other embodiments not shown in the present disclosure, the configuration of the plurality of self-alignment probes 4 included in the probe head 100 may also be slightly different; alternatively, the self-alignment probe 4 may include only a part of the structure described below.

In order to facilitate understanding of the structure of the self-aligning probe 4, the structure of the self-aligning probe 4 will be described below in a case where the first guide plate unit 1 is not disposed to be displaced from the second guide plate unit 2.

As shown in fig. 1 and fig. 3 to 5, the self-alignment probe 4 is a one-piece structure, and the self-alignment probe 4 includes a connection end 41 and a test end 42 at two ends thereof, a first connection portion 43 connected to the connection end 41, a second connection portion 44 connected to the test end 42, and an arc portion 45 connecting the first connection portion 43 and the second connection portion 44. That is, the self-aligned probe 4 sequentially includes the adapting end 41, the first connection portion 43, the arc portion 45, the second connection portion 44 and the testing end 42, but the invention is not limited thereto.

Wherein the adapting end 41 is located at an outer side of the first guide plate unit 1 (for example, the upper side of the first guide plate unit 1) far away from the second guide plate unit 2 and is used for abutting against the signal adapting plate 200 adjacent to the first guide plate unit 1; the testing end portion 42 is located at an outer side of the second guide plate unit 2 (e.g., a lower side of the second guide plate unit 2) far away from the first guide plate unit 1, and is used for detachably abutting against the object to be tested adjacent to the second guide plate unit 2. Furthermore, the first connecting portion 43 is located in the first guide plate unit 1, the second connecting portion 44 is located in the second guide plate unit 2, and the arc portion 45 is located between the first guide plate unit 1 and the second guide plate unit 2.

In more detail, the adapting end 41 and the testing end 42 together define a reference axis L; in the embodiment, the reference axis L passes through the center of the adapting end 41 and the center of the testing end 42, but the invention is not limited thereto. The maximum distance D between the arc-shaped portion 45 and the reference axis L is greater than 75 micrometers (μm) and smaller than the distance D4 (or 150 μm), and the distance D4 may be 150 μm in this embodiment, but the invention is not limited thereto. In other words, any conductive probe (e.g., linear conductive probe) without the curved portion 45 is not the self-aligning probe 4 of this embodiment.

In the present embodiment, the position of the arc-shaped portion 45 where the maximum distance D is formed of the self-aligning probe 4 is defined as a narrow area 451, the cross-sectional area of the arc-shaped portion 45 gradually increases from the narrow area 451 toward the first connection portion 43 and the second connection portion 44, and the distance between the narrow area 451 and the first connection portion 43 is equal to the distance between the narrow area 451 and the second connection portion 44.

Accordingly, in the present embodiment, the self-aligning probe 4 is designed by the structure of the arc portion 45, so that when the arc portion 45 deforms, the stress can be dispersed at each position of the arc portion 45, and will not be concentrated on a specific area of the arc portion 45, thereby effectively prolonging the service life of the self-aligning probe 4.

The first connecting portion 43 is formed with a guiding protrusion 431, and the guiding protrusion 431 may be at least partially located in the first guide plate unit 1; that is, the pilot projection 431 may be partially located outside the first guide plate unit 1, but only the portion of the pilot projection 431 located inside the first guide plate unit 1 may perform the pilot function.

Furthermore, the self-alignment probe 4 is formed with the guide protrusion 431, so that a gap G of not more than 4 micrometers (μm) can be formed between the first connecting portion 43 and the first guide plate unit 1, and the gap G is the minimum distance between the first connecting portion 43 and the first guide plate unit 1 in this embodiment. That is, when the first connection portion 43 is located in a through hole (not labeled) of the first guide plate unit 1, the first connection portion 43 is formed with the pilot projection 431, so that the gap G between the first connection portion 43 and the inner wall surface of the through hole can be controlled to be not more than 4 μm.

In other words, the first connecting portion 43 is formed with the guide protrusion 431 such that a maximum width W43 of the first connecting portion 43 may be greater than a maximum width W44 of the second connecting portion 44, and the above width condition can effectively avoid increasing the difficulty of implanting the self-aligning probe 4 into the first guide plate unit 1 and the second guide plate unit 2. In addition, the cross-sectional area of the self-alignment probe 4 may gradually increase from the narrow zone 451 toward the guiding protrusion 431, so that the first connection portion 43 can also be used to assist the arc portion 45 in sharing stress.

Furthermore, the guiding protrusions 431 and the narrow regions 451 are respectively located at two opposite sides of the reference axis L in this embodiment, so as to facilitate the implantation of the self-aligning probes 4 into the first guide plate unit 1 and the second guide plate unit 2 and to maintain the overall structural stability of the probe card apparatus 1000, but the invention is not limited thereto. For example, in other embodiments of the invention not shown, the pilot bump 431 and the throat 451 may be on the same side of the reference axis L.

Further, each of the self-aligning probes 4 may be formed with a rib 46 adjacent to the first guide plate unit 1 at the arc portion 45, and the rib 46 and the guide protrusion 431 are respectively located at opposite sides of the reference axis L, while the rib 46 of each of the self-aligning probes 4 does not contact the first guide plate unit 1. That is, any protrusion on the same side as the pilot protrusion 431 or contacting the first guide unit 1 is different from the rib 46 of the present embodiment.

As described above, as shown in fig. 2 and 6, when the first guide plate unit 1 and the second guide plate unit 2 are diagonally misaligned with each other, the arc-shaped portions 45 of the plurality of self-aligning probes 4 are disposed toward the same side, and each of the self-aligning probes 4 is formed with the aligning protrusion 431, so that the adapting end portion 41 abuts against the signal adapting plate 200 at an angle σ between 85 degrees and 95 degrees. The adapting end 41 preferably abuts against the signal adapting board 200 at an angle σ of approximately 90 degrees (e.g., 88-92 degrees), but the invention is not limited thereto. In another aspect, when the self-aligned probe 4 is replaced with a conductive probe 4a without any conductive protrusion 431 (see fig. 7), the conductive probe 4a will be pressed against the signal adapting board 200 at an angle α less than 85 degrees (e.g., 70 degrees).

Accordingly, the probe card apparatus 1000 in this embodiment can effectively control the gap G between the self-aligned probe 4 and the first guide plate unit 1 by the structural design of the self-aligned probe 4 (e.g., the first connecting portion 43 is formed with the guide protrusion 431), thereby facilitating the development and application of the probe card apparatus 1000. The self-alignment probe 4 can be further located on two opposite sides of the reference axis L through the guiding protrusion 431 and the narrow zone 451, respectively, so that the first connection portion 43 can be abutted to the first guide plate unit 1 by the guiding protrusion 431, and further share part of the stress, thereby prolonging the service life of the self-alignment probe 4.

Furthermore, the probe card device is controlled to be less than 4 microns through the gap G between the self-alignment probe 4 and the first guide plate unit 1, so that the offset of the first guide plate unit 1 and the second guide plate unit 2 to the adapting end part 41 caused by the offset arrangement can be reduced; that is, the adapting end 41 can be aligned by the aligning protrusion 431 and further abut against the signal adapting plate 200 at an angle σ between 85 degrees and 95 degrees.

In addition, the adapting end 41 of the self-aligning probe 4 can be further shortened due to the fact that the self-aligning probe 4 can guide the adapting end 41 through the guiding protrusion 431, thereby making the self-aligning probe 4 suitable for more test applications.

[ technical effects of embodiments of the present invention ]

Furthermore, the probe card apparatus and the self-aligning probe according to the embodiments of the present invention are designed such that when the arc portion is deformed, stress can be dispersed at each portion of the arc portion and not concentrated on a specific block of the arc portion, thereby effectively prolonging a service life of the self-aligning probe.

The disclosure is only a preferred embodiment of the invention and is not intended to limit the scope of the invention, so that all equivalent technical changes made by using the contents of the specification and the drawings are included in the scope of the invention.

Claims

1. A probe card apparatus, characterized in that the probe card apparatus comprises:

a first guide plate unit and a second guide plate unit which are arranged at intervals; and

the self-alignment probes penetrate through the first guide plate unit and the second guide plate unit, and any two adjacent self-alignment probes are separated by a space; wherein each self-aligning probe comprises:

an adapter end located on an outer side of the first guide plate unit remote from the second guide plate unit;

the testing end part is positioned on the outer side of the second guide plate unit far away from the first guide plate unit and is used for detachably abutting against an object to be tested; wherein the adapting end part and the testing end part jointly define a reference axis;

the first connecting part is positioned in the first guide plate unit; wherein, the first connecting part is provided with a guide projection so as to form a gap of not more than 4 microns with the first guide plate unit;

the second connecting part is positioned in the second guide plate unit; and

the arc-shaped part is connected with the first connecting part and the second connecting part; wherein a maximum distance separating the arcuate portion from the reference axis is greater than 75 microns and less than the pitch.

2. The probe card apparatus of claim 1, wherein each of said self-aligning probes defines a narrow zone at a location where said arcuate portion of said maximum distance is formed; in each of the self-aligning probes, the cross-sectional area of the arc-shaped portion gradually increases from the narrow region toward the first connection portion and the second connection portion.

3. The probe card apparatus of claim 2, wherein in each of the self-aligned probes, a distance of the narrow region with respect to the first connection portion is equal to a distance of the narrow region with respect to the second connection portion.

4. The probe card apparatus of claim 2, wherein said narrowed region and said guide projection are on opposite sides of said reference axis.

5. The probe card apparatus of claim 1, wherein each of said self-aligning probes is formed with a rib adjacent to said first guide plate unit at said arcuate portion; the rib and the pilot boss of each self-alignment probe are located on opposite sides of the reference axis, respectively, and the rib of each self-alignment probe does not contact the first guide plate unit.

6. The probe card apparatus of claim 1, wherein in each of the self-aligned probes, a maximum width of the first connection portion is greater than a maximum width of the second connection portion.

7. The probe card apparatus of claim 1, wherein said probe card apparatus further comprises a signal adapter plate adjacent to said first guide plate unit; when the first guide plate unit and the second guide plate unit are obliquely staggered, the aligning protrusion is formed on each self-aligning probe, so that the switching end portion is abutted against the signal switching plate at an angle ranging from 85 degrees to 95 degrees.

8. A self-aligning probe, comprising:

a switching end part used for propping against a signal switching plate;

a testing end part for detachably abutting against an object to be tested; the adapter end part and the testing end part jointly define a reference axis;

the first connecting part is connected with the switching end part; wherein, the first connecting part is provided with a pilot bulge;

the second connecting part is connected with the testing end part; and

the arc-shaped part is connected with the first connecting part and the second connecting part; wherein the arc portion is spaced from the reference axis by a maximum distance greater than 75 microns and less than 150 microns.

9. The self-aligning probe of claim 8, wherein a narrow region is defined at a location of the arc portion where the maximum distance is formed; the cross-sectional area of the arc-shaped part gradually increases from the narrow area to the first connecting part and the second connecting part.

10. The self-aligning probe of claim 9, wherein the distance of the narrowed region relative to the first connection portion is the same as the distance of the narrowed region relative to the second connection portion.