CN114544065A - Capacitance film gauge, pressure measurement method, system, electronic device and storage medium - Google Patents
Capacitance film gauge, pressure measurement method, system, electronic device and storage medium Download PDFInfo
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- CN114544065A CN114544065A CN202210422504.7A CN202210422504A CN114544065A CN 114544065 A CN114544065 A CN 114544065A CN 202210422504 A CN202210422504 A CN 202210422504A CN 114544065 A CN114544065 A CN 114544065A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
- G01L27/005—Apparatus for calibrating pressure sensors
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Abstract
The utility model relates to a capacitance film rule technical field, specifically provide capacitance film rule, pressure measurement method, a system, electronic equipment and storage medium, use in pressure measurement system, pressure measurement system includes the diaphragm, ceramic base member, fixed electrode and a plurality of first measuring electrode, fixed electrode is used for generating first measurement capacitance information according to its distance with the diaphragm, first measuring electrode circumference array is in the fixed electrode outside, a plurality of first measuring electrode are used for respectively generating corresponding second measurement capacitance information according to its distance with the diaphragm, pressure measurement method includes following step: acquiring first measured capacitance information and second measured capacitance information; detecting whether the deformation of the diaphragm is uniform according to second measured capacitance information generated by the first measuring electrodes at different positions, and calculating a pressure value according to the first measured capacitance information and the second measured capacitance information; the method can realize the self-adaptive correction of the pressure value of the measured gas.
Description
Technical Field
The application relates to the technical field of capacitance film gauges, in particular to a capacitance film gauge, a pressure measurement method, a pressure measurement system, electronic equipment and a storage medium.
Background
The capacitance film gauge in the prior art comprises a shell, an elastic element (generally a metal diaphragm), a ceramic substrate and a fixed electrode, wherein the shell is divided into a measuring chamber and a reference chamber by the diaphragm, the ceramic substrate is arranged in the reference chamber, the fixed electrode is arranged on the end face, close to the diaphragm, of the ceramic substrate, and the capacitance formed on the fixed electrode is related to the distance from the fixed electrode to the diaphragm. The working principle of the capacitance film gauge is as follows: the measured gas is introduced into the measuring chamber, under ideal conditions or after waiting for a long enough time, the measured gas is uniformly mixed and the gas pressure is stable, and the elastic element generates uniform deformation under the action of pressure difference because the gas pressure in the measuring chamber is different from the gas pressure in the reference chamber, so that the size of the capacitor formed on the fixed electrode is changed, and the pressure value of the measured gas can be calculated through the variation of the capacitor formed on the fixed electrode. When the capacitance film gauge is horizontally installed, the deformation of the diaphragm is not uniform under the influence of gravity, so that the measured gas pressure value measured by the capacitance film gauge is inaccurate. Although the capacitance error generated by the external electrode can be reduced by zeroing the diaphragm, the diaphragm needs to be zeroed when the installation direction of the capacitance film gauge is changed every time, so that the installation and the use of the capacitance film gauge are inconvenient.
In view of the above problems, no effective technical solution exists at present.
Disclosure of Invention
The application aims to provide a capacitance film gauge, a pressure measurement method, a pressure measurement system, electronic equipment and a storage medium, which can realize self-adaptive correction and measurement of the pressure value of measured gas.
In a first aspect, the present application provides a pressure measurement method for measuring a gas pressure of a capacitance film gauge, and the pressure measurement method is applied to a pressure measurement system, where the pressure measurement system includes a diaphragm, a ceramic substrate, a fixed electrode and a plurality of first measurement electrodes, the ceramic substrate is disposed on one side of the diaphragm, the fixed electrode is disposed on an end surface of the ceramic substrate close to the diaphragm, the fixed electrode is configured to generate first measurement capacitance information according to a distance between the fixed electrode and the diaphragm, the plurality of first measurement electrodes are disposed on the ceramic substrate and circumferentially arrayed outside the fixed electrode, and the plurality of first measurement electrodes are respectively configured to generate corresponding second measurement capacitance information according to a distance between the first measurement electrodes and the diaphragm, and the pressure measurement method includes:
acquiring the first measured capacitance information and the second measured capacitance information;
and detecting whether the deformation of the diaphragm is uniform or not according to the second measured capacitance information generated by the first measuring electrodes at different positions, and calculating a pressure value according to the first measured capacitance information and the second measured capacitance information.
The pressure measurement method provided by the application, calculate the pressure value according to first measurement capacitance information and a plurality of second measurement capacitance information, because the combination of the second measurement capacitance information of different positions can reflect whether the diaphragm deformation is even, and the second measurement capacitance information plays a corrective action in the calculation process, so that the calculated pressure value can accurately reflect the measured gas pressure, thereby realizing the self-adaptive correction and measurement of the pressure value of the measured gas, therefore, the zero setting of the diaphragm is not needed when the installation position of the capacitance diaphragm gauge is changed, so that the pressure measurement system is suitable for different use scenes, and the convenience of installing and using the capacitance diaphragm gauge is effectively improved.
Optionally, the number of the first measuring electrodes is even, the step of detecting whether the deformation of the diaphragm is uniform according to the second measured capacitance information generated by the first measuring electrodes at different positions, and calculating the pressure value according to the first measured capacitance information and a plurality of second measured capacitance information includes the following sub-steps:
performing differential processing on the second measured capacitance information generated by each set of symmetrically arranged first measuring electrodes to generate a plurality of first differential results;
if all the first difference results are smaller than or equal to a preset uniform threshold value, calculating the pressure value according to any one of the second measured capacitance information and the first measured capacitance information according to the fact that the deformation of the diaphragm is uniform;
if any one of the first differential results is greater than the uniformity threshold, considering that the deformation of the diaphragm is not uniform, calculating a first average capacitance value according to the two pieces of second measured capacitance information corresponding to the largest first differential result, and calculating the pressure value according to the first average capacitance value and the first measured capacitance information.
Optionally, the number of the first measuring electrodes is even, the step of detecting whether the deformation of the diaphragm is uniform according to the second measured capacitance information generated by the first measuring electrodes at different positions, and calculating the pressure value according to the first measured capacitance information and a plurality of second measured capacitance information includes the following sub-steps:
performing differential processing on the second measured capacitance information generated by each set of symmetrically arranged first measuring electrodes to generate a plurality of second differential results;
if all the second difference results are smaller than or equal to a preset uniform threshold value, considering that the deformation of the diaphragm is uniform, calculating a second average capacitance value according to two pieces of second measured capacitance information corresponding to the smallest second difference results, and calculating the pressure value according to the second average capacitance value and the first measured capacitance information;
if any one of the second difference results is greater than the uniformity threshold, a third average capacitance value is calculated according to the two pieces of second measured capacitance information corresponding to the largest second difference result according to the uneven deformation of the diaphragm, and the pressure value is calculated according to the third average capacitance value and the first measured capacitance information.
Optionally, the pressure measurement system further includes a plurality of second measurement electrodes circumferentially arranged outside the first measurement electrode in an array, the number of the second measurement electrodes is the same as the number of the first measurement electrodes, and the second measurement electrodes are arranged in a staggered manner from the first measurement electrodes, the plurality of second measurement electrodes are configured to generate third measurement capacitance information corresponding to the distance between the second measurement electrodes and the diaphragm, the number of the first measurement electrodes and the number of the second measurement electrodes are both even, the step of detecting whether the deformation of the diaphragm is uniform according to the second measurement capacitance information generated by the first measurement electrodes at different positions, and calculating the pressure value according to the first measurement capacitance information and the plurality of second measurement capacitance information includes the following sub-steps:
performing a differential process on the second measured capacitance information generated by each set of the symmetrically arranged first measuring electrodes to generate a plurality of third differential results, and performing a differential process on the third measured capacitance information generated by each set of the symmetrically arranged second measuring electrodes to generate a plurality of fourth differential results;
if all the third difference results and the fourth difference results are less than or equal to a preset uniform threshold value, calculating the pressure value according to any one of the second measured capacitance information and/or any one of the third measured capacitance information and the first measured capacitance information according to the uniform deformation of the diaphragm;
if any one of the third difference result and any one of the fourth difference result is greater than the uniformity threshold, a fourth average capacitance value is calculated according to the two pieces of the second measured capacitance information or the third measured capacitance information corresponding to the largest one of the third difference result and the fourth difference result, and the pressure value is calculated according to the fourth average capacitance value and the first measured capacitance information, according to the fact that the deformation of the diaphragm is not uniform.
Optionally, the step of detecting whether the deformation of the diaphragm is uniform according to the second measured capacitance information, and calculating the pressure value according to the first measured capacitance information and the plurality of second measured capacitance information includes the following substeps:
performing a difference processing on each of the second measured capacitance information and the other second measured capacitance information to generate a plurality of fifth difference results;
if all the fifth difference results are smaller than or equal to a preset uniform threshold value, calculating the pressure value according to any one of the second measured capacitance information and the first measured capacitance information according to the fact that the deformation of the diaphragm is uniform;
if any of the fifth difference results is greater than the uniformity threshold, a fifth average capacitance value is calculated according to all second measured capacitance information, and the pressure value is calculated according to the fifth average capacitance value and the first measured capacitance information, depending on the fact that the deformation of the diaphragm is not uniform.
Optionally, the difference processing includes difference amplification processing and amplification filtering processing.
The differential processing in the pressure measurement method provided by the application comprises differential amplification processing and amplification filtering processing, so that the calculation accuracy is effectively improved.
In a second aspect, the present application also provides a pressure measurement system for gas pressure measurement of a capacitance diaphragm gauge, comprising:
a membrane;
a ceramic substrate disposed on one side of the diaphragm;
the fixed electrode is arranged on the end face, close to the diaphragm, of the ceramic substrate and used for generating first measured capacitance information according to the distance between the fixed electrode and the diaphragm;
a plurality of first measuring electrodes arranged on the ceramic substrate, circumferentially arrayed outside the fixed electrodes, and used for generating corresponding second measuring capacitance information according to the distance between the first measuring electrodes and the diaphragm;
and the controller is electrically connected with the fixed electrode and the first measuring electrode, is used for acquiring the first measured capacitance information and the second measured capacitance information, is also used for detecting whether the deformation of the diaphragm is uniform according to the second measured capacitance information generated by the first measuring electrode at different positions, and calculates a pressure value according to the first measured capacitance information and a plurality of second measured capacitance information.
The application provides a pair of pressure measurement system, measure the capacitance information according to first measurement capacitance information and a plurality of second and calculate the pressure value, because the second of different positions measures capacitance information and combines whether can reflect the diaphragm deformation even, and the second measures capacitance information and plays the corrective action in the calculation process, so that the pressure value of calculating can accurately reflect the gas pressure of being surveyed, thereby realize that self-adaptation rectifies the pressure value of measuring the gas of being surveyed, consequently need not to zero the diaphragm when the installation position of transform electric capacity diaphragm gage, so that this pressure measurement system is applicable to different use scenes, improve the convenience of installing and using electric capacity diaphragm gage effectively.
In a third aspect, the present application also provides a capacitance diaphragm gauge for gas pressure measurement, comprising:
a housing;
a wave washer;
a pressure measurement system, comprising:
a diaphragm disposed in the housing for dividing the housing into a reference chamber and a measurement chamber, the wave washer being disposed in the reference chamber, the measurement chamber being provided with an air inlet;
a ceramic substrate disposed on one side of the diaphragm;
the fixed electrode is arranged on the end face, close to the diaphragm, of the ceramic substrate and used for generating first measured capacitance information according to the distance between the fixed electrode and the diaphragm;
a plurality of first measuring electrodes arranged on the ceramic substrate, circumferentially arrayed outside the fixed electrodes, and used for generating corresponding second measuring capacitance information according to the distance between the first measuring electrodes and the diaphragm;
and the controller is electrically connected with the fixed electrode and the first measuring electrode, is used for acquiring the first measured capacitance information and the second measured capacitance information, is also used for detecting whether the deformation of the diaphragm is uniform according to the second measured capacitance information generated by the first measuring electrode at different positions, and calculates a pressure value according to the first measured capacitance information and a plurality of second measured capacitance information.
The utility model provides a pair of electric capacity film rule, measure the capacitance information according to first measurement capacitance information and a plurality of second and calculate the pressure value, because the second of different positions measures capacitance information and combines whether can reflect the diaphragm deformation even, and the second measures capacitance information and plays the corrective action in the calculation process, so that the pressure value of calculating can accurately reflect the gas pressure of being surveyed, thereby realize that self-adaptation rectifies the pressure value of measuring the gas of being surveyed, consequently need not to zero the diaphragm when the installation position of transform electric capacity film rule, so that this pressure measurement system is applicable to different use scenes, improve the convenience of installing and using electric capacity film rule effectively.
In a fourth aspect, the present application further provides an electronic device, comprising a processor and a memory, where the memory stores computer-readable instructions, and when the computer-readable instructions are executed by the processor, the steps in the method provided in the first aspect are executed.
In a fifth aspect, the present application further provides a storage medium having a computer program stored thereon, wherein the computer program, when executed by a processor, performs the steps of the method as provided in the first aspect.
Therefore, the capacitance film gauge, the pressure measuring method, the system, the electronic device and the storage medium provided by the application can calculate the pressure value according to the first measured capacitance information and the second measured capacitance information, because the second measured capacitance information at different positions can reflect whether the deformation of the diaphragm is uniform or not by combining the second measured capacitance information, and the second measured capacitance information plays a role in correction in the calculation process, the calculated pressure value can accurately reflect the pressure of the measured gas, the pressure value of the measured gas can be measured by self-adaptive correction, and therefore the zero setting of the diaphragm is not needed when the installation direction of the capacitance film gauge is changed, the pressure measuring system is suitable for different use scenes, and the convenience of installing and using the capacitance film gauge is effectively improved.
Additional features and advantages of the present application will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by the practice of the embodiments of the present application. The objectives and other advantages of the application may be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
Drawings
Fig. 1 is a schematic top view of a prior art fixed electrode.
Fig. 2 is a schematic structural diagram of a prior art capacitance gauge in a vertical state and a horizontal state, and a measured gas is a single gas.
Fig. 3 is a schematic structural diagram of a prior art capacitance thin film gauge in a vertical state and a horizontal state, and a measured gas is a mixed gas.
Fig. 4 is a flowchart of a pressure measurement method according to an embodiment of the present disclosure.
Fig. 5 is a schematic cross-sectional view of a pressure measurement system provided in an embodiment of the present application along a vertical direction.
Fig. 6 is a schematic top view of a fixed electrode and a first measurement electrode according to an embodiment of the present disclosure.
Fig. 7 is a schematic top-view structural diagram of a fixed electrode, a first measuring electrode, and a second measuring electrode according to an embodiment of the present disclosure.
Fig. 8 is a schematic cross-sectional view of a capacitor film gauge provided in an embodiment of the present application along a vertical direction.
Fig. 9 is a partially enlarged view of a capacitor film gauge according to an embodiment of the present disclosure.
Fig. 10 is a schematic structural diagram of an electronic device according to an embodiment of the present application.
Reference numerals: 1. a membrane; 2. a ceramic substrate; 3. a fixed electrode; 4. a first measuring electrode; 5. a second measuring electrode; 6. a housing; 61. a reference chamber; 62. a measurement chamber; 7. a wave washer; 801. a processor; 802. a memory; 803. a communication bus.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present application without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures. Meanwhile, in the description of the present application, the terms "first", "second", and the like are used only for distinguishing the description, and are not construed as indicating or implying relative importance.
Fig. 1 is a schematic top view of a fixed electrode in the prior art, fig. 2 is a schematic structural diagram of a capacitance gauge in the prior art in a vertical state and a horizontal state and a measured gas is a single gas, arrows G and right side thereof in fig. 2 represent a gravity direction, other arrows in fig. 2 represent a single gas, fig. 3 is a schematic structural diagram of a capacitance gauge in the prior art in a vertical state and a horizontal state and a measured gas is a mixed gas, a thick arrow in fig. 3 represents a gas with a large density, and a thin arrow represents a gas with a small density. As shown in fig. 1, the fixed electrode of the capacitance film gauge includes an outer electrode and an inner electrode, the inner electrode is a circular electrode, the outer electrode is a circular electrode, the capacitance formed on the inner electrode and the outer electrode is related to the distance from the inner electrode and the outer electrode to the diaphragm, the outer electrode and the inner electrode are both electrically connected with a controller, and the controller calculates the pressure value of the gas to be measured according to the capacitance formed by the outer electrode and the capacitance formed by the inner electrode. The upper half part of fig. 2 is a schematic structural diagram when the capacitance film gauge is in a vertical state and the measured gas is a single gas, and the measured gas in the measuring chamber is uniformly distributed, so that the diaphragm is uniformly deformed. The lower half of fig. 2 is a schematic structural diagram of the capacitor film gauge in a horizontal state and the measured gas is a single gas, the capacitor film gauge is in a horizontal state and the measured gas is a single gas, and under the action of gravity, the measured gas is weakly and unevenly distributed along the upper and lower sides of the diaphragm due to the fact that the density of the measured gas at a higher position is smaller than that of the measured gas at a lower position, and the diaphragm is unevenly deformed, so that a certain error exists in the capacitance generated by the outer electrode at this time. The left half part of fig. 3 is a schematic structural diagram when the capacitance film gauge is in a vertical state and the measured gas is a mixed gas, and the capacitance film gauge is in the vertical state, so that even if the measured gas is the mixed gas, after waiting for a period of time, the pressure distribution of the measured gas in the measuring chamber is uniform, and the deformation of the diaphragm is uniform. The right part of fig. 3 is a schematic structural diagram when the capacitance gauge is in a horizontal state and the measured gas is a mixed gas, after waiting for a period of time, the gas with higher density is gathered and distributed at a lower position on the diaphragm, and the gas with lower density is focused and distributed at a higher position on the diaphragm, so that the pressure distribution in the measuring chamber is uneven, the deformation of the diaphragm is uneven, and the capacitance generated by the outer electrode has a larger error. Namely, when the capacitance film gauge is in a horizontal state, the capacitance formed by the outer electrode has errors, so that the measured gas pressure measured by the capacitance film gauge is inaccurate. Although the capacitance error generated by the external electrode can be reduced by zeroing the diaphragm, the diaphragm needs to be zeroed when the installation direction of the capacitance film gauge is changed every time, so that the installation and the use of the capacitance film gauge are inconvenient.
In a first aspect, as shown in fig. 4 to 6, the present application provides a pressure measurement method for gas pressure measurement of a capacitance thin film gauge, and the pressure measurement method is applied in a pressure measurement system, where the pressure measurement system includes a diaphragm 1, a ceramic substrate 2, a fixed electrode 3, and a plurality of first measurement electrodes 4, the ceramic substrate 2 is disposed on one side of the diaphragm 1, the fixed electrode 3 is disposed on an end surface of the ceramic substrate 2 close to the diaphragm 1, the fixed electrode 3 is configured to generate first measurement capacitance information according to a distance between the fixed electrode and the diaphragm 1, the plurality of first measurement electrodes 4 are disposed on the ceramic substrate 2 and are circumferentially arrayed outside the fixed electrode 3, the plurality of first measurement electrodes 4 are respectively configured to generate corresponding second measurement capacitance information according to a distance between the first measurement electrodes and the diaphragm 1, and the pressure measurement method includes the following steps:
s1, acquiring first measured capacitance information and second measured capacitance information;
s2, detecting whether the deformation of the diaphragm 1 is uniform or not according to second measured capacitance information generated by the first measuring electrodes 4 at different positions, and calculating pressure values according to the first measured capacitance information and the second measured capacitance information.
The structure of the pressure measurement system is as shown in fig. 5 and fig. 6, and the operation principle of step S2 for detecting whether the diaphragm 1 is uniform according to the second measured capacitance information generated by the first measurement electrode 4 at different positions is as follows: because the second measured capacitance information generated by the first measuring electrode 4 is related to the distance from the first measuring electrode 4 to the diaphragm 1, the second measured capacitance information at different positions can reflect the distances from the first measuring electrode 4 to the diaphragm 1 at different positions, so that the deformation degrees of the diaphragm 1 at different positions are reflected, and whether the diaphragm 1 is detected to be uniform or not according to the second measured capacitance information generated by the first measuring electrode 4 at different positions is further realized. In order to simplify the detection logic, the embodiment of the present application analyzes whether the deformation of the diaphragm 1 is uniform by calculating the difference between the second measured capacitance information at different positions. For example, the second measured capacitance information generated by each first measuring electrode 4 and the second measured capacitance information generated by the adjacent first measuring electrode 4 are subjected to differential processing, and if the result of the differential processing is 0, the diaphragm 1 is considered to be deformed uniformly; if the difference processing result is not 0, it is considered that the deformation of the diaphragm 1 is not uniform. The combination of the second measured capacitance information at different positions can accurately reflect whether the deformation of the diaphragm 1 is uniform, and if the deformation of the diaphragm 1 is uniform, the pressure of the measured gas can be accurately calculated according to the first measured capacitance information and the second measured capacitance information; if the diaphragm 1 is not uniformly deformed, the pressure of the measured gas is calculated according to the first measured capacitance information and the second measured capacitance information (a plurality of second measured capacitance information generated by the first measuring electrodes 4), and the second measured capacitance information plays a role in correction in the calculation process, so that the calculated pressure value can accurately reflect the pressure of the measured gas, and the pressure value of the measured gas is adaptively corrected and measured.
Example 1
The number of the first measuring electrodes 4 is even, and the step S2 includes the sub-steps of:
s21, carrying out differential processing on the second measured capacitance information generated by each group of symmetrically arranged first measuring electrodes 4 to generate a plurality of first differential results;
s22, if all the first difference results are smaller than or equal to a preset uniform threshold value, considering that the deformation of the diaphragm 1 is uniform, and calculating a pressure value according to any one of the second measured capacitance information and the first measured capacitance information;
s23, if any first difference result is larger than the uniform threshold value, considering that the deformation of the diaphragm 1 is not uniform, calculating a first average capacitance value according to the two pieces of second measured capacitance information corresponding to the largest first difference result, and calculating a pressure value according to the first average capacitance value and the first measured capacitance information.
In step S21, since the number of the first measuring electrodes 4 is even and the plurality of first measuring electrodes 4 are circumferentially arrayed outside the fixed electrode 3, a plurality of groups of symmetrically arranged first measuring electrodes 4 are formed with the circle center of the fixed electrode 3 as the center of symmetry.
In step S22, when the pressure value is calculated, the second measured capacitance information replaces the existing capacitance formed on the outer electrode, and it is the prior art to calculate the pressure value according to the first measured capacitance information and the second measured capacitance information.
In step S23, the two pieces of measured capacitance information corresponding to the largest first difference result are generally generated for the first measuring electrode 4 at the highest position of the diaphragm 1 and the first measuring electrode 4 at the lowest position of the diaphragm 1, respectively. Because the second measured capacitance information generated by the two first measured electrodes 4 can reflect the influence of the gravity action on the deformation of the diaphragm 1, the pressure value calculated according to the first measured capacitance information and the first average capacitance value of the two second measured capacitance information can reflect the measured gas pressure more accurately. The first average capacitance value is used to replace the capacitance formed on the existing outer electrode when calculating the pressure value.
Example 2
The number of the first measuring electrodes 4 is even, and the step S2 includes the sub-steps of:
s21', performing a difference process on the second measured capacitance information generated by each set of symmetrically arranged first measuring electrodes 4 to generate a plurality of second difference results;
s22', if all the second difference results are smaller than or equal to the preset uniform threshold value, the diaphragm 1 deforms uniformly, a second average capacitance value is calculated according to two pieces of second measured capacitance information corresponding to the smallest second difference results, and a pressure value is calculated according to the second average capacitance value and the first measured capacitance information;
s23', if any of the second difference results is greater than the uniformity threshold, the third average capacitance value is calculated according to the two second measured capacitance information corresponding to the largest second difference result, and the pressure value is calculated according to the third average capacitance value and the first measured capacitance information, according to the fact that the deformation of the diaphragm 1 is not uniform.
Step S22' is to replace the existing capacitance formed on the outer electrode with the second average capacitance value when calculating the pressure value.
Step S23' is to calculate the pressure value, and the third average capacitance value is used to replace the existing capacitance formed on the external electrode.
Example 3
The pressure measurement system further comprises a plurality of second measurement electrodes 5, the plurality of second measurement electrodes 5 are arranged outside the first measurement electrode 4 in a circumferential array, the number of the second measurement electrodes 5 is the same as that of the first measurement electrodes 4, and the second measurement electrodes 5 are arranged in a staggered manner with respect to the first measurement electrodes 4, the plurality of second measurement electrodes 5 are used for generating corresponding third measurement capacitance information according to the distance between the second measurement electrodes 5 and the diaphragm 1, the number of the first measurement electrodes 4 and the number of the second measurement electrodes 5 are both even, and the step S2 includes the following sub-steps:
s21 ″, performing a differential process on the second measured capacitance information generated by each set of the symmetrically arranged first measuring electrodes 4 to generate a plurality of third differential results, and performing a differential process on the third measured capacitance information generated by each set of the symmetrically arranged second measuring electrodes 5 to generate a plurality of fourth differential results;
s22 '', if all the third difference results and the fourth difference results are less than or equal to the preset uniform threshold value, calculating a pressure value according to any second measured capacitance information or any third measured capacitance information and the first measured capacitance information according to the uniform deformation of the diaphragm 1;
and S23 '', if any third difference result and any fourth difference result are greater than the uniformity threshold, considering that the deformation of the diaphragm 1 is not uniform, calculating a fourth average capacitance value according to the two second measured capacitance information or the third measured capacitance information corresponding to the largest third difference result and the fourth difference result, and calculating a pressure value according to the fourth average capacitance value and the first measured capacitance information.
In step S22 ″, the second measured capacitance information or the third measured capacitance information replaces the existing capacitance formed on the external electrode when the pressure value is calculated.
In step S23 ″, the fourth average capacitance value replaces the capacitance formed on the conventional external electrode when calculating the pressure value.
Because the third measured capacitance information generated by the second measuring electrode 5 can also reflect whether the deformation of the diaphragm 1 is uniform or not, and the third measured capacitance information can also play a role in correcting the pressure value in the process of calculating the pressure value, compared with the embodiment 1 and the embodiment 2, the accuracy of the pressure value calculated in the embodiment of the application is higher.
Example 4
It differs from example 3 in that: step S22 ″ is changed to step S22' ″, where if the third difference result and the fourth difference result are both less than or equal to the predetermined uniformity threshold, the pressure value is calculated according to any one of the second measured capacitance information, any one of the third measured capacitance information and the first measured capacitance information, depending on the deformation uniformity of the diaphragm 1.
In step S22' ″, the second measured capacitance information or the third measured capacitance information replaces the existing capacitance formed on the external electrode when the pressure value is calculated.
Since the second measuring electrode 5 is circumferentially arrayed outside the first measuring electrode 4, even if the deformation of the diaphragm 1 is uniform, the second measured capacitance information generated by the first measuring electrode 4 is different from the third measured capacitance information generated by the second measuring electrode 5, and therefore the pressure value calculated from the first measured capacitance information and the second measured capacitance information is also different from the pressure value calculated from the first measured capacitance information and the third measured capacitance information. According to the embodiment, when the deformation of the diaphragm 1 is uniform, the sixth average capacitance value is calculated according to the second measured capacitance information and the third measured capacitance information, and the pressure value is calculated according to the sixth average capacitance value and the first measured capacitance information.
Example 5
Step S2 includes the following substeps:
s21' ″, respectively, differentiating each of the second measured capacitance information and the other second measured capacitance information to generate a plurality of fifth differential results;
s22 ' ' ', if all the fifth difference results are less than or equal to a preset uniform threshold value, considering that the deformation of the diaphragm 1 is uniform, calculating a pressure value according to any second measured capacitance information and the first measured capacitance information;
s23' ″, if any of the fifth difference results is greater than the uniformity threshold, a fifth average capacitance value is calculated according to all the second measured capacitance information, and a pressure value is calculated according to the fifth average capacitance value and the first measured capacitance information, depending on the non-uniform deformation of the diaphragm 1.
This embodiment is suitable for the case where the number of the first measuring electrodes 4 is an odd number or an even number.
Step S22' ″ replaces the existing capacitance formed on the outer electrode with the second measured capacitance information when calculating the pressure value.
In step S23' ″, the fifth average capacitance value replaces the capacitance formed on the conventional external electrode when calculating the pressure value.
The uniformity threshold in the above embodiment is an allowable error value of the second measured capacitance information generated by the first measuring electrode 4 when the deformation of the diaphragm 1 is uniform. If the differential processing results are less than or equal to the uniform threshold value, the deformation of the membrane 1 is considered to be uniform; if the result of any difference processing is greater than the uniformity threshold, the deformation of the membrane 1 is considered to be non-uniform. The working principle of calculating the pressure value according to the first measured capacitance information and the second measured capacitance information in the above embodiment is as follows: the deformation degree of the diaphragm can reflect the pressure of the gas to be measured, and the deformation degree of the diaphragm can be reflected by the first measured capacitance information generated by the fixed electrode 3, the second measured capacitance information generated by the first measured electrode 4 at different positions and the third measured capacitance information generated by the second measured electrode 5 at different positions, so that the pressure value of the gas to be measured can be calculated according to the first measured capacitance information, the second measured capacitance information at different positions and/or the third measured capacitance information at different positions.
In some embodiments, the difference processing in embodiments 1 to 5 includes a difference amplification processing and an amplification filter processing, thereby effectively improving the accuracy of the calculation.
Therefore, according to the pressure measurement method provided by the embodiment of the application, the pressure value is calculated according to the first measured capacitance information and the plurality of second measured capacitance information, whether the deformation of the diaphragm 1 is uniform can be reflected due to the combination of the second measured capacitance information at different positions, and the second measured capacitance information plays a role in correction in the calculation process, so that the calculated pressure value can accurately reflect the pressure of the measured gas, the pressure value of the measured gas can be measured in a self-adaptive correction mode, zero adjustment is not needed to be carried out on the diaphragm 1 when the installation direction of the capacitance diaphragm gauge is changed, the pressure measurement system is suitable for different use scenes, and the convenience in installing and using the capacitance diaphragm gauge is effectively improved.
In a second aspect, as shown in fig. 5, the present application further provides a pressure measurement system for gas pressure measurement of a capacitance diaphragm gauge, comprising:
a membrane 1;
a ceramic substrate 2 disposed at one side of the diaphragm 1;
the fixed electrode 3 is arranged on the end face, close to the diaphragm 1, of the ceramic substrate 2 and used for generating first measurement capacitance information according to the distance between the fixed electrode and the diaphragm 1;
the first measuring electrodes 4 are arranged on the ceramic substrate 2, are circumferentially arrayed outside the fixed electrode 3, and are respectively used for generating corresponding second measuring capacitance information according to the distance between the first measuring electrodes and the diaphragm 1;
and the controller is electrically connected with the fixed electrode 3 and the first measuring electrode 4, is used for acquiring first measured capacitance information and second measured capacitance information, is also used for detecting whether the deformation of the diaphragm 1 is uniform or not according to the second measured capacitance information generated by the first measuring electrode 4 at different positions, and calculates a pressure value according to the first measured capacitance information and the second measured capacitance information.
The working principle of the pressure measurement system provided by the embodiment of the present application is the same as that of the pressure measurement method provided by the first aspect, and will not be discussed in detail here. The application provides a pair of pressure measurement system, measure the capacitance information according to first measurement capacitance information and a plurality of second and calculate the pressure value, because the second is measured capacitance information and can reflect 1 deformation of diaphragm even, and the second measures capacitance information and plays the corrective action in the calculation process, consequently measure capacitance information through first measurement capacitance information and a plurality of second and can accurately calculate the measured gas pressure, need not to zero diaphragm 1 when the installation position of transform electric capacity membrane rule, thereby improve the convenience of installation use electric capacity membrane rule effectively.
If the number of the first measuring electrodes 4 is too small, the second measuring capacitance information generated by the first measuring electrodes 4 cannot accurately reflect whether the deformation of the diaphragm 1 is uniform or not; if the number of the first measuring electrodes 4 is too large, the power consumption of the pressure measuring system is too large.
In order to solve the above problem, in some embodiments, the number of the first measuring electrodes 4 is 6-10, which is a range obtained by the applicant through a large number of experiments. When the number of the first measuring electrodes 4 is within the number range, the second measuring capacitance information generated by the first measuring electrodes 4 can accurately reflect whether the deformation of the diaphragm 1 is uniform, and the problem that the power consumption of the pressure measuring system is overlarge due to the fact that the number of the first measuring electrodes 4 is too large can not occur. In some preferred embodiments, the number of first measuring electrodes 4 is 8.
In some embodiments, the cross-sectional shape of the first measurement electrode 4 is any one of trapezoidal, fan-shaped, rectangular, circular, and fan-shaped. In some preferred embodiments, the cross-sectional shape of the first measuring electrode 4 is a sector ring, and when the number of the first measuring electrodes 4 is 8, the included angle formed by the two sides of the first measuring electrode 4 is 30 °.
In some embodiments, the fixed electrode 3 is a circular electrode and the ratio of the width of the first measurement electrode 4 to the radius of the fixed electrode 3 is 1:4-1: 2. Wherein the width of the first measuring electrode 4 is the difference between the outer diameter and the inner diameter of the first measuring electrode 4. In some preferred embodiments, the width of the first measuring electrode 4 is 4.5mm, the radius of the fixed electrode 3 is 13.5mm, and the ratio of the width of the first measuring electrode 4 to the radius of the fixed electrode 3 is 1: 3.
When diaphragm 1 produced deformation, the stress distribution at 1 tensioning edge of diaphragm was great, and the deformation that 1 tensioning edge of diaphragm produced is less than the deformation that 1 center of diaphragm produced, and the deformation at 1 tensioning edge of diaphragm is not applicable to the pressure value of calculating the gas of being surveyed.
In order to solve the above problem, in some embodiments, the ratio of the distance from the side of the first measuring electrode 4 away from the fixed electrode 3 to the center of the fixed electrode 3 to the radius of the fixed electrode 3 is 1:2-3:4, which is obtained by the applicant through a large number of experiments. The distance from the first measuring electrode 4 to the center of the fixed electrode 3 is moderate, and the second measured capacitance information generated by the first measuring electrode 4 can be used for calculating the pressure value of the measured gas and can be combined with the second measured capacitance information generated by the first measuring electrode 4 at different positions to reflect whether the diaphragm 1 is deformed uniformly or not. In some preferred embodiments, the distance from the side of the first measuring electrode 4 away from the fixed electrode 3 to the center of the fixed electrode 3 is 19.5mm, the radius of the fixed electrode 3 is 13.5mm, and the ratio of the distance from the side of the first measuring electrode 4 away from the fixed electrode 3 to the center of the fixed electrode 3 to the radius of the fixed electrode 3 is 9: 13.
By last knowing, the pressure measurement system that this application provided, measure the capacitance information according to first measurement capacitance information and a plurality of second and calculate the pressure value, because the second measures capacitance information and can reflect that 1 deformation of diaphragm is even, and the second measures capacitance information and plays the corrective action in the calculation process, consequently measure capacitance information through first measurement capacitance information and a plurality of second and can accurately calculate the measured gas pressure, need not to carry out the zeroing to diaphragm 1 when the installation position of transform electric capacity diaphragm gage, thereby improve the convenience of installation use electric capacity diaphragm gage effectively.
In a third aspect, as shown in fig. 8 and 9, the present application also provides a capacitance diaphragm gauge for gas pressure measurement, comprising:
a housing 6;
a wave washer 7;
a pressure measurement system, comprising:
the diaphragm 1 is arranged in the shell 6 and used for dividing the shell 6 into a reference chamber 61 and a measuring chamber 62, the wave washer 7 is arranged in the reference chamber 61, and an air inlet is arranged on the measuring chamber 62;
a ceramic substrate 2 disposed at one side of the diaphragm 1;
the fixed electrode 3 is arranged on the end face, close to the diaphragm 1, of the ceramic substrate 2 and used for generating first measurement capacitance information according to the distance between the fixed electrode and the diaphragm 1;
the first measuring electrodes 4 are arranged on the ceramic substrate 2, are circumferentially arrayed outside the fixed electrode 3, and are respectively used for generating corresponding second measuring capacitance information according to the distance between the first measuring electrodes and the diaphragm 1;
and the controller is electrically connected with the fixed electrode 3 and the first measuring electrode 4, is used for acquiring first measured capacitance information and second measured capacitance information, is also used for detecting whether the deformation of the diaphragm 1 is uniform or not according to the second measured capacitance information generated by the first measuring electrode 4 at different positions, and calculates a pressure value according to the first measured capacitance information and the second measured capacitance information.
Wherein, wave washer 7 is prior art, and it sets up between the up end of ceramic base member 2 and benchmark room 61, and it is used for compressing tightly ceramic base member 2 to the condition that ceramic base member 2 rocked appears when avoiding electric capacity film rule to remove. The lower end surface of the measuring chamber 62 is provided with an air inlet which is connected with a measured gas supply device. In the embodiment of the present application, the fixed electrode 3 is a circular electrode, the cross section of the first measuring electrode 4 is a sector ring, the number of the first measuring electrodes 4 is 8, and an included angle formed by two side edges of the first measuring electrode 4 is 30 °. The working principle of the pressure measuring system of the embodiment of the present application is the same as that of the pressure measuring system provided by the second aspect described above, and will not be discussed in detail here. The utility model provides a pair of electric capacity membrane rule, measure the electric capacity information according to first measurement electric capacity information and a plurality of second and calculate the pressure value, because the combination of the second measurement electric capacity information of different positions can reflect that 1 deformation of diaphragm is even, and the second measurement electric capacity information plays the corrective action in the calculation process, so that the pressure value of calculating can accurately reflect the gas pressure of being surveyed, thereby realize that self-adaptation rectifies the pressure value of measuring the gas of being surveyed, consequently need not to zero to diaphragm 1 when the installation position of transform electric capacity membrane rule, so that this pressure measurement system is applicable to different use scenes, improve the convenience of installing and using electric capacity membrane rule effectively.
In a fourth aspect, please refer to fig. 10, where fig. 10 is a schematic structural diagram of an electronic device according to an embodiment of the present application, and the present application provides an electronic device including: the processor 801 and the memory 802, the processor 801 and the memory 802 being interconnected and communicating with each other via a communication bus 803 and/or other form of connection mechanism (not shown), the memory 802 storing a computer program executable by the processor 801 which, when executed by the computing device, the processor 801 executes to perform the method of any of the alternative implementations of the embodiments to perform the following functions: acquiring first measured capacitance information and second measured capacitance information; and detecting whether the deformation of the diaphragm 1 is uniform or not according to second measured capacitance information generated by the first measuring electrodes 4 at different positions, and calculating a pressure value according to the first measured capacitance information and the second measured capacitance information.
In a fifth aspect, the present application provides a storage medium, on which a computer program is stored, and when the computer program is executed by a processor, the computer program executes the method in any optional implementation manner of the embodiments to implement the following functions: acquiring first measured capacitance information and second measured capacitance information; and detecting whether the deformation of the diaphragm 1 is uniform or not according to second measured capacitance information generated by the first measuring electrodes 4 at different positions, and calculating a pressure value according to the first measured capacitance information and the second measured capacitance information. The storage medium may be implemented by any type of volatile or nonvolatile storage device or combination thereof, such as a Static Random Access Memory (SRAM), an Electrically Erasable Programmable Read-Only Memory (EEPROM), an Erasable Programmable Read-Only Memory (EPROM), a Programmable Read-Only Memory (PROM), a Read-Only Memory (ROM), a magnetic Memory, a flash Memory, a magnetic disk, or an optical disk.
Therefore, according to the capacitance film gauge, the pressure measuring method, the system, the electronic device and the storage medium, the pressure value is calculated according to the first measured capacitance information and the second measured capacitance information, whether the deformation of the diaphragm 1 is uniform can be reflected due to the combination of the second measured capacitance information at different positions, and the second measured capacitance information plays a role in correction in the calculation process, so that the calculated pressure value can accurately reflect the pressure of the measured gas, the pressure value of the measured gas can be corrected and measured in a self-adaptive mode, zero setting of the diaphragm 1 is not needed when the installation direction of the capacitance film gauge is changed, the pressure measuring system is suitable for different use scenes, and the convenience in installing and using the capacitance film gauge is effectively improved.
In the embodiments provided in the present application, it should be understood that the disclosed apparatus and method may be implemented in other ways. The above-described apparatus embodiments are merely illustrative, and for example, a division of a unit is only a logical division, and other divisions may be realized in practice, and for example, a plurality of units or components may be combined or integrated into another system, or some features may be omitted, or not executed. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection of devices or units through some communication interfaces, and may be in an electrical, mechanical or other form.
In addition, units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
Furthermore, the functional modules in the embodiments of the present application may be integrated together to form an independent part, or each module may exist separately, or two or more modules may be integrated to form an independent part.
In this document, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions.
The above embodiments are merely examples of the present application and are not intended to limit the scope of the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (10)
1. A pressure measurement method is used for gas pressure measurement of a capacitance film gauge and applied to a pressure measurement system, the pressure measurement system comprises a diaphragm (1), a ceramic substrate (2) and a fixed electrode (3), the ceramic substrate (2) is arranged on one side of the diaphragm (1), the fixed electrode (3) is arranged on the end face, close to the diaphragm (1), of the ceramic substrate (2), the fixed electrode (3) is used for generating first measurement capacitance information according to the distance between the fixed electrode and the diaphragm (1), the pressure measurement system is characterized by further comprising a plurality of first measurement electrodes (4), the first measurement electrodes (4) are arranged on the ceramic substrate (2) and are circumferentially arrayed on the outer side of the fixed electrode (3), the first measurement electrodes (4) are respectively used for generating corresponding second measurement capacitance information according to the distance between the first measurement electrodes and the diaphragm (1), the pressure measurement method comprises the following steps:
acquiring the first measured capacitance information and the second measured capacitance information;
detecting whether the deformation of the diaphragm (1) is uniform or not according to the second measured capacitance information generated by the first measuring electrodes (4) at different positions, and calculating a pressure value according to the first measured capacitance information and the second measured capacitance information.
2. A method for measuring pressure according to claim 1, wherein the number of said first measuring electrodes (4) is even, and said step of detecting whether the deformation of said diaphragm (1) is uniform or not based on said second measured capacitance information generated by said first measuring electrodes (4) at different positions, and calculating a pressure value based on said first measured capacitance information and a number of said second measured capacitance information comprises the sub-steps of:
carrying out differential processing on the second measured capacitance information generated by each group of symmetrically arranged first measuring electrodes (4) to generate a plurality of first differential results;
if all the first difference results are smaller than or equal to a preset uniform threshold value, the pressure value is calculated according to any one of the second measured capacitance information and the first measured capacitance information according to the fact that the diaphragm (1) is uniformly deformed;
if any one first difference result is larger than the uniform threshold value, according to the fact that deformation of the diaphragm (1) is not uniform, a first average capacitance value is calculated according to two pieces of second measured capacitance information corresponding to the largest first difference result, and the pressure value is calculated according to the first average capacitance value and the first measured capacitance information.
3. A method for measuring pressure according to claim 1, wherein the number of said first measuring electrodes (4) is even, and said step of detecting whether the deformation of said diaphragm (1) is uniform or not based on said second measured capacitance information generated by said first measuring electrodes (4) at different positions, and calculating a pressure value based on said first measured capacitance information and a number of said second measured capacitance information comprises the sub-steps of:
carrying out differential processing on the second measured capacitance information generated by each group of symmetrically arranged first measuring electrodes (4) to generate a plurality of second differential results;
if all the second difference results are smaller than or equal to a preset uniform threshold value, according to the fact that the deformation of the diaphragm (1) is uniform, calculating a second average capacitance value according to two pieces of second measured capacitance information corresponding to the smallest second difference results, and calculating the pressure value according to the second average capacitance value and the first measured capacitance information;
if any one of the second difference results is larger than the uniform threshold value, according to the fact that the deformation of the diaphragm (1) is not uniform, a third average capacitance value is calculated according to the two pieces of second measured capacitance information corresponding to the largest second difference result, and the pressure value is calculated according to the third average capacitance value and the first measured capacitance information.
4. The pressure measurement method according to claim 1, wherein the pressure measurement system further comprises a plurality of second measurement electrodes (5), the plurality of second measurement electrodes (5) are arranged in a circumferential array outside the first measurement electrode (4), the number of the second measurement electrodes (5) is the same as the number of the first measurement electrodes (4), and the second measurement electrodes are arranged in a staggered manner with respect to the first measurement electrodes (4), the plurality of second measurement electrodes (5) are used for generating corresponding third measurement capacitance information according to the distance between the second measurement electrodes and the membrane (1), the number of the first measurement electrodes (4) and the number of the second measurement electrodes (5) are both even, and the second measurement capacitance information generated according to the first measurement electrodes (4) at different positions is used for detecting whether the membrane (1) is deformed uniformly, and the step of calculating a pressure value from said first measured capacitance information and a number of said second measured capacitance information comprises the sub-steps of:
carrying out differential processing on the second measured capacitance information generated by each group of symmetrically arranged first measuring electrodes (4) to generate a plurality of third differential results, and carrying out differential processing on the third measured capacitance information generated by each group of symmetrically arranged second measuring electrodes (5) to generate a plurality of fourth differential results;
if all the third difference results and the fourth difference results are smaller than or equal to a preset uniform threshold value, calculating the pressure value according to any one of the second measured capacitance information and/or any one of the third measured capacitance information and the first measured capacitance information according to the fact that the deformation of the diaphragm (1) is uniform;
if any one of the third difference result and any one of the fourth difference result is larger than the uniformity threshold value, according to the fact that deformation of the diaphragm (1) is not uniform, a fourth average capacitance value is calculated according to the two pieces of second measured capacitance information or the third measured capacitance information corresponding to the largest third difference result and the fourth difference result, and the pressure value is calculated according to the fourth average capacitance value and the first measured capacitance information.
5. A method for pressure measurement according to claim 1, characterized in that the step of detecting whether the deformation of the diaphragm (1) is uniform or not from the second measured capacitance information generated by the first measuring electrode (4) in different positions, and calculating a pressure value from the first measured capacitance information and a number of the second measured capacitance information comprises the sub-steps of:
performing differential processing on each piece of second measured capacitance information and other pieces of second measured capacitance information to generate a plurality of fifth differential results;
if all the fifth difference results are smaller than or equal to a preset uniform threshold value, the pressure value is calculated according to any one of the second measured capacitance information and the first measured capacitance information according to the fact that the deformation of the diaphragm (1) is uniform;
if any fifth difference result is larger than the uniformity threshold value, according to the fact that deformation of the diaphragm (1) is not uniform, a fifth average capacitance value is calculated according to all second measured capacitance information, and the pressure value is calculated according to the fifth average capacitance value and the first measured capacitance information.
6. A method of pressure measurement according to any of claims 2-5, wherein the differential processing comprises differential amplification processing and amplification filtering processing.
7. A pressure measurement system for gas pressure measurement of a capacitance diaphragm gauge, comprising a diaphragm (1), a ceramic substrate (2) and a fixed electrode (3), wherein the ceramic substrate (2) is arranged on one side of the diaphragm (1), the fixed electrode (3) is arranged on the end surface of the ceramic substrate (2) close to the diaphragm (1), the fixed electrode (3) is used for generating first measurement capacitance information according to the distance between the fixed electrode and the diaphragm (1), and the pressure measurement system is characterized by further comprising:
the first measuring electrodes (4) are arranged on the ceramic substrate (2), are circumferentially arrayed on the outer side of the fixed electrode (3), and are respectively used for generating corresponding second measuring capacitance information according to the distance between the first measuring electrodes and the diaphragm (1);
the controller is electrically connected with the fixed electrode (3) and the first measuring electrode (4), is used for acquiring the first measured capacitance information and the second measured capacitance information, is also used for detecting whether the deformation of the diaphragm (1) is uniform or not according to the second measured capacitance information generated by the first measuring electrode (4) at different positions, and calculates a pressure value according to the first measured capacitance information and the plurality of second measured capacitance information.
8. A capacitance diaphragm gauge for gas pressure measurement comprising a housing (6), a wave washer (7) and a pressure measurement system, the pressure measurement system comprising: diaphragm (1), ceramic base (2) and fixed electrode (3), diaphragm (1) sets up in casing (6), diaphragm (1) are used for with casing (6) divide into benchmark room (61) and measurement room (62), wave form packing ring (7) with ceramic base (2) all set up in benchmark room (61), fixed electrode (3) set up ceramic base (2) are close to on the terminal surface of diaphragm (1), fixed electrode (3) be used for according to it with the distance of diaphragm (1) generates first measurement capacitance information, be equipped with the air inlet on measurement room (62), its characterized in that, the pressure measurement system still includes:
the first measuring electrodes (4) are arranged on the ceramic substrate (2), are circumferentially arrayed on the outer side of the fixed electrode (3), and are respectively used for generating corresponding second measuring capacitance information according to the distance between the first measuring electrodes and the diaphragm (1);
the controller is electrically connected with the fixed electrode (3) and the first measuring electrode (4), is used for acquiring the first measured capacitance information and the second measured capacitance information, is also used for detecting whether the deformation of the diaphragm (1) is uniform or not according to the second measured capacitance information generated by the first measuring electrode (4) at different positions, and calculates a pressure value according to the first measured capacitance information and the plurality of second measured capacitance information.
9. An electronic device comprising a processor (801) and a memory (802), the memory (802) storing computer readable instructions, which, when executed by the processor (801), perform the steps of the method according to any one of claims 1-6.
10. A storage medium having a computer program stored thereon, wherein the computer program, when executed by a processor, performs the steps of the method according to any of claims 1-6.
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| EP0524550A1 (en) * | 1991-07-25 | 1993-01-27 | Fibronix Sensoren GmbH | Gas filled relative pressure sensor |
| US20100154552A1 (en) * | 2008-12-24 | 2010-06-24 | Canon Anelva Technix Corporation | Capacitance diaphragm gauge and vaccum apparatus |
| CN105829850A (en) * | 2014-01-28 | 2016-08-03 | 西门子公司 | Method for operating a pressure transducer and pressure transducer |
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