CN114535624B - Method for reducing influence of servo vibration on ultra-precision machining of micro lens array - Google Patents
Method for reducing influence of servo vibration on ultra-precision machining of micro lens array Download PDFInfo
- Publication number
- CN114535624B CN114535624B CN202210059824.0A CN202210059824A CN114535624B CN 114535624 B CN114535624 B CN 114535624B CN 202210059824 A CN202210059824 A CN 202210059824A CN 114535624 B CN114535624 B CN 114535624B
- Authority
- CN
- China
- Prior art keywords
- ultra
- workpiece
- micro lens
- servo vibration
- surface data
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B5/00—Turning-machines or devices specially adapted for particular work; Accessories specially adapted therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
- B23Q15/007—Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
- B23Q15/013—Control or regulation of feed movement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/20—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring workpiece characteristics, e.g. contour, dimension, hardness
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Abstract
The invention discloses a method for reducing the influence of servo vibration on an ultra-precise machining micro lens array, which comprises the steps of firstly taking the vertex of a cutting edge as a reference point, taking a plane with a certain height from a workpiece as a reference plane, machining the workpiece, extracting the surface data of the machined workpiece by using a white light interferometer, comparing the surface data with the surface data of a theoretical micro lens, obtaining the magnitude of offset error, namely the required advance, and adding the advance when a machining path is adjusted to obtain a new machining path, and obtaining the micro lens with good surface quality by machining by using the machining path. This reduces the influence of the servo vibration on the work surface. Compared with the prior art, the invention has the following advantages: firstly, the method is simple and effective; secondly, the invention can effectively reduce the influence of servo vibration on the micro lens array, and well improves the surface quality of the micro lens.
Description
Technical Field
The invention relates to the technical field of ultra-precise turning of microlens arrays, in particular to a method for reducing the influence of servo vibration on ultra-precise machining of microlens arrays.
Background
The micro lens prepared by the technology overcomes the defects of rough surface, easy diffuse emission, low mechanical strength, easy abrasion and inapplicability to severe environments of micro lenses prepared by other methods. Therefore, ultra-precision machining technology is a viable research direction for preparing microlens arrays. However, many factors can affect ultra-precise machining surface generation, including the machining environment, the nature of the machining material, and relative error motions during machining, including relative error motions between the workpiece and tool, spindle vibrations, tool tip vibrations, servo vibrations, and the like. Among these many factors, servo vibration will react directly to the surface of the work piece being machined through the tool holder, one of the key factors affecting the quality of the machining. The microlens array shape is complicated, and the back and forth movement of the machine tool Z in the feed direction is unavoidable. When the acceleration of the movement in the direction is large, a servo vibration phenomenon can be caused, the processing quality can be reduced, the appearance of a workpiece can be changed, and even the machine tool can be caused to be faulty. In the original method for ultra-precisely machining the microlens, the generated servo vibration has a great influence on the surface quality of the microlens.
The prior art has the defects that: the microlens array shape is complicated, and the back and forth movement of the machine tool Z feed direction is unavoidable. When the acceleration of the movement in the direction is large, a servo vibration phenomenon can be caused, the processing quality can be reduced, the appearance of a workpiece can be changed, and even the machine tool can be caused to be faulty. In the traditional method for ultra-precisely machining the micro lens, the generated servo vibration has great influence on the surface quality of the micro lens, and the obtained micro lens has poor surface quality, so that the further development of the fields of optics and the like is restricted.
Disclosure of Invention
In order to solve the problems in the prior art, the invention aims to disclose a method for reducing the influence of servo vibration on the ultra-precision machining of a micro lens array, and mainly aims to reduce the influence of the servo vibration on the surface of the micro lens in the ultra-precision machining process of the micro lens array and improve the surface quality of the micro lens.
To achieve the purpose, the invention adopts the following technical scheme:
a method of reducing the effect of servo vibration on ultra-precisely machined microlens arrays, comprising the steps of:
s1: firstly, clamping a workpiece on a main shaft of an ultra-precise machine tool by using a sucker, selecting a cutting edge reference point, selecting a reference plane, taking the reference plane as a processed virtual plane, extending a micro lens to the plane, planning a processing path, enabling an X axis and a C axis to feed at a constant speed, and realizing processing by changing the cutting depth of a Z axis;
s2: and then, taking down the processed workpiece, extracting surface data of the workpiece (the micro lens) by using equipment, and matching the processed micro lens data with theoretical micro lens data according to the resolution of the equipment. Two section surface data curves can be obtained along the X direction, the surface data curves of the two sections are compared, on the basis, N sections are obtained along the y direction, error data of N groups of theoretical sections and actual sections are obtained, and the offset error, namely the advance, is obtained by averaging;
s3: according to the calculated advance, adjusting a processing path, and then processing a workpiece by using the processing path, so that an optimized microlens array can be obtained;
further, the suction cup in the step S1 is a vacuum suction cup.
Further, the cutting edge reference point in the step S1 is a cutter point.
Further, the reference plane in the step S1 is a plane that is a height from the machining plane h on the workpiece.
Further, the device in the step S2 is a white light interferometer.
Further, the two section surface data curves are a surface data curve of a theoretical microlens section and a surface data curve of a processed microlens section.
The beneficial effects of the invention are as follows:
the invention discloses a method for reducing the influence of servo vibration on an ultra-precise machining micro lens array, which comprises the steps of firstly taking the vertex of a cutting edge as a reference point, taking a plane with a certain height from a workpiece as a reference plane, machining the workpiece, extracting the surface data of the machined workpiece by using a white light interferometer, comparing the surface data with the surface data of a theoretical micro lens, obtaining the magnitude of offset error, namely the required advance, and adding the advance when a machining path is adjusted to obtain a new machining path, and obtaining the micro lens with good surface quality by machining by using the machining path. This reduces the influence of the servo vibration on the work surface. Compared with the prior art, the invention has the following advantages: firstly, the method is simple and effective; secondly, the white light interferometer used by the method has extremely high precision, can well obtain the micro-lens surface quality data, and provides good support for calculating offset errors; most importantly, the invention can effectively reduce the influence of servo vibration on the micro lens array, and well improve the surface quality of the micro lens.
Drawings
FIG. 1 is a schematic view of an extended surface schematic;
FIG. 2 is a graph comparing surface data of a theoretical microlens section taken along the X direction with surface data of a processed microlens section;
FIG. 3 is a schematic view of the surface morphology of a microlens processed by a conventional method;
FIG. 4 is a schematic diagram of the surface errors of a microlens processed by the conventional method;
FIG. 5 is a schematic view of the surface morphology of a microlens processed by the method of the present invention;
FIG. 6 is a schematic diagram of the surface errors of a microlens processed by the method of the present invention.
Detailed Description
For the purpose of making apparent the objects, technical solutions and advantages of the present invention, the present invention will be further described in detail with reference to the following examples and the accompanying drawings, wherein the exemplary embodiments of the present invention and the descriptions thereof are for illustrating the present invention only and are not to be construed as limiting the present invention.
Referring to fig. 1-6, the invention discloses a method for reducing the influence of servo vibration on ultra-precisely machining a microlens array, which comprises the following steps: s1: firstly, clamping a workpiece on a main shaft of an ultra-precise machine tool by using a suction cup, selecting a cutting edge reference point, selecting a reference plane, taking the reference plane as a virtual plane for processing, and as shown in figure 1, because a certain distance is reserved from the workpiece, the influence of servo vibration cannot be represented on the processing plane, and then extending a micro lens to the plane and planning a processing path, so that an X axis and a C axis are fed at a constant speed, and processing is realized by changing the cutting depth of a Z axis;
s2: and then, taking down the processed workpiece, extracting surface data of the workpiece (the micro lens) by using equipment, and matching the processed micro lens data with theoretical micro lens data according to the resolution of the equipment. Two section surface data curves can be obtained along the X direction, the surface data curves of the two sections are compared, as shown in fig. 2, on the basis, N sections are obtained along the y direction, error data of N groups of theoretical sections and actual sections are obtained, and the offset error, namely the advance, is obtained by averaging;
s3: according to the calculated advance, adjusting a processing path, and then processing a workpiece by using the processing path, so that an optimized microlens array can be obtained;
further, the suction cup in the step S1 is a vacuum suction cup, and the vacuum suction cup is made of nitrile rubber and has larger suction force.
Further, the reference point of the cutting edge in the step S1 is the tool tip point, which is relatively direct and reliable.
Further, the reference plane in step S1 is a plane that is a height from the machining plane h on the workpiece.
Furthermore, the equipment in the step S2 is a white light interferometer, the precision is particularly high, the surface quality data of the micro lens can be well obtained, and good support is provided for calculating the offset error.
Further, the two section surface data curves are a surface data curve of a theoretical microlens section and a surface data curve of a processed microlens section.
S1-S3 are the complete process of the present invention.
The microlens surface is processed by the following method: firstly, the method is simple and effective; secondly, the white light interferometer used by the method has extremely high precision, can well obtain the micro-lens surface quality data, and provides good support for calculating offset errors; most importantly, the invention can effectively reduce the influence of servo vibration on the micro lens array, and well improve the surface quality of the micro lens.
Example 1:
the embodiment provides a method for reducing the influence of ultra-precise machining servo vibration on a micro-lens array, taking a five-axis ultra-precise machining machine tool as an example, under the condition that the machining environment, the tool and the spindle speed are consistent, the method is used for machining and detecting a workpiece to obtain a micro-lens surface topography map and an error map after removing a micro-lens structure, as shown in fig. 3, 4, 5 and 6, and the comparison among the maps can obviously show that the micro-lens surface machined by adopting the traditional method has obvious servo vibration phenomenon. There is significant jitter in both the cut-in and cut-out locations, even with severe distortion of the microlenses. In the microlens surface processed by the method, the vibration caused by servo vibration is obviously reduced from the microlens surface error diagram, and the cutter directly leaves the surface of the workpiece during cutting, so that the quality of a plane is not affected, the offset error during cutting in or out is relatively reduced, and the overall microlens surface processing quality is obviously improved. As can be seen from the above, the method of the present invention has great applicability.
The above is an embodiment of the present invention. The foregoing embodiments and the specific parameters of the embodiments are only for clarity of description of the invention and are not intended to limit the scope of the invention, which is defined by the appended claims, and all equivalent structural changes made in the description and drawings of the invention are intended to be included in the scope of the invention.
Claims (5)
1. A method of reducing the effect of servo vibration on ultra-precisely machined microlens arrays, comprising: the method comprises the following steps:
s1: firstly, clamping a workpiece on a main shaft of an ultra-precise machine tool by using a sucker, selecting a cutting edge reference point, selecting a reference plane, taking the reference plane as a processed virtual plane, extending a micro lens to the plane, planning a processing path, enabling an X axis and a C axis to feed at a constant speed, and realizing processing by changing the cutting depth of a Z axis;
s2: then, taking down the processed workpiece, extracting the surface data of the workpiece micro-lens through equipment, matching the processed micro-lens data with the theoretical micro-lens data according to the resolution of the equipment, acquiring two section surface data curves along the X direction, comparing the two section surface data curves, taking N sections along the y direction on the basis, acquiring error data of N groups of theoretical sections and actual sections, and averaging to acquire the offset error, namely the advance;
s3: according to the calculated advance, adjusting a processing path, and then processing a workpiece by using the processing path, so that an optimized microlens array can be obtained;
the reference plane in the step S1 is a plane that is a height from the machining plane h on the workpiece.
2. A method of reducing the effect of servo vibration on an ultra-precision machined microlens array as set forth in claim 1 wherein:
the suction disc in the step S1 is a vacuum suction disc.
3. A method of reducing the effect of servo vibration on an ultra-precision machined microlens array as set forth in claim 1 wherein:
the reference point of the cutting edge in the step S1 is a cutter point.
4. A method of reducing the effect of servo vibration on an ultra-precision machined microlens array as set forth in claim 1 wherein:
the device in the step S2 is a white light interferometer.
5. A method of reducing the effect of servo vibration on an ultra-precision machined microlens array as set forth in claim 1 wherein:
the two section surface data curves are a surface data curve of a theoretical microlens section and a surface data curve of a processed microlens section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210059824.0A CN114535624B (en) | 2022-01-19 | 2022-01-19 | Method for reducing influence of servo vibration on ultra-precision machining of micro lens array |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210059824.0A CN114535624B (en) | 2022-01-19 | 2022-01-19 | Method for reducing influence of servo vibration on ultra-precision machining of micro lens array |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114535624A CN114535624A (en) | 2022-05-27 |
| CN114535624B true CN114535624B (en) | 2023-08-29 |
Family
ID=81671985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210059824.0A Active CN114535624B (en) | 2022-01-19 | 2022-01-19 | Method for reducing influence of servo vibration on ultra-precision machining of micro lens array |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114535624B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103620338A (en) * | 2011-06-29 | 2014-03-05 | 维尔贝莱特集团公司 | Surface measurement system and method |
| CN110275484A (en) * | 2018-03-15 | 2019-09-24 | 香港理工大学 | A method of forming microlens array mold on monocrystalline silicon substrate |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7396857B2 (en) * | 2019-11-01 | 2023-12-12 | ファナック株式会社 | display device |
-
2022
- 2022-01-19 CN CN202210059824.0A patent/CN114535624B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103620338A (en) * | 2011-06-29 | 2014-03-05 | 维尔贝莱特集团公司 | Surface measurement system and method |
| CN110275484A (en) * | 2018-03-15 | 2019-09-24 | 香港理工大学 | A method of forming microlens array mold on monocrystalline silicon substrate |
Non-Patent Citations (1)
| Title |
|---|
| 微结构表面快刀加工仿真技术与实验研究;赵明辉;中国优秀硕士学位论文全文数据库工程科技Ⅰ辑(第2期);第B022-823页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114535624A (en) | 2022-05-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100349725C (en) | Multi-diamond cutting tool assembly for creating microreplication tools | |
| CN110355537B (en) | Method for machining penult-stage and last-stage moving blades of steam turbine | |
| CN103481141B (en) | numerical control external cylindrical grinding machine | |
| CN111745462B (en) | Method for quickly correcting horizontal offset in ultra-precise turning | |
| CN113695645B (en) | Vertical offset correction method for micro-diameter diamond ball-end milling cutter | |
| KR100935150B1 (en) | Polishing apparatus for diamond bite | |
| CN114535624B (en) | Method for reducing influence of servo vibration on ultra-precision machining of micro lens array | |
| CN111375900A (en) | Complex-profile cutter laser processing method based on three-dimensional shaping focal spot | |
| CN110000606A (en) | A kind of presetting cutter method for processing Terahertz slow-wave structure part | |
| CN111673540A (en) | Actual cutting-oriented diamond cutter cutting edge profile calculation method | |
| CN1785559A (en) | Processing method of germanium single crystal non spherical surface optical element | |
| CN112222497B (en) | Method for processing large conical adapter space curved surface on three-axis linkage milling machine | |
| CN114227339B (en) | Ultra-precision turning precise tool setting method based on trial-cut circular groove | |
| CN110102805B (en) | Large-scale weak-rigidity cantilever beam structural member and ultra-precision machining method and clamping device thereof | |
| CN203900520U (en) | Anti-tremble external circular turning tool for thin-walled part processing | |
| CN1112267C (en) | Slow-pushing face-drawing machining method and die guide mechanism using the same | |
| CN114536098B (en) | Ultra-precise milling precision tool setting method based on trial cutting linear groove | |
| CN1785560A (en) | Processing method of zinc selenide and zinc sulfide non spherical surface optical element | |
| CN113798930A (en) | High-precision metal mirror surface machining method based on stirring friction treatment | |
| CN111375899A (en) | Laser processing and forming method for large-curvature curved surface | |
| CN203091875U (en) | Band saw blade tooth dividing machine | |
| CN113601257A (en) | Microstructure array processing device and method based on variable-pitch fly cutter cutting | |
| CN102476303A (en) | Vacuum sucking disc device of novel numerical control machine tool | |
| CN113134634A (en) | Aligning instrument and method for eccentric alignment of four-jaw chuck of lathe | |
| CN114101766B (en) | Compensation method for lateral return error of linear shaft of ultra-precision machine tool |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |