CN114535218A

CN114535218A - Full-automatic degumming machine

Info

Publication number: CN114535218A
Application number: CN202210051241.3A
Authority: CN
Inventors: 张飞; 李建华; 刘永兴; 詹登星; 蔡文文; 曾令锐
Original assignee: Dongguan Andong Semiconductor Technology Co ltd
Current assignee: Dongguan Andong Semiconductor Technology Co ltd
Priority date: 2022-01-17
Filing date: 2022-01-17
Publication date: 2022-05-27

Abstract

The invention belongs to the technical field of a degumming machine, in particular to a full-automatic degumming machine, which comprises: the glue removing machine comprises a machine body, a placing mechanism, a manipulator mechanism, a glue removing mechanism and a cooling mechanism, wherein a fan filter unit and a control computer are mounted on the machine body; the placing mechanism is arranged on the machine body and used for placing a product; the manipulator mechanism comprises a driver, a vertical plate, a connecting table, a mechanical arm and an electromagnet, wherein the driver is installed on the machine body and located on the side of the placing mechanism, the vertical plate is arranged in the driver, the connecting table is adjustably assembled on the vertical plate, the mechanical arm is hinged to the connecting table, and the electromagnet is connected to the end portion of the mechanical arm. According to the automatic glue removing device, the placing mechanism, the mechanical arm mechanism and the glue removing mechanism are matched for use, only the product needs to be placed on the placing mechanism, and the mechanical arm mechanism is adopted for automatic operation in subsequent feeding and discharging, so that the manual operation amount is greatly reduced, the cleaning efficiency of the product is improved, no manual potential safety hazard exists in automatic operation, and the automatic glue removing device is more reasonable.

Description

Full-automatic degumming machine

Technical Field

The invention relates to the technical field of photoresist removers, in particular to a full-automatic photoresist remover.

Background

The photoresist remover ionizes oxygen or other reaction gas by utilizing microwave plasma to form chemically active free radicals, then the free radicals react with photoresist to generate volatile substances, and the volatile substances are pumped out of a cavity by a vacuum pump, so that the functions of etching and removing the photoresist are realized.

The existing glue removing machine needs to be manually placed into a vacuum glue removing chamber for a product to be subjected to glue removing when in use, the product is taken out after the glue removing is completed, manual operation is excessively relied on, the efficiency is low, potential safety hazards exist in manual long-time operation, and the glue removing machine is not convenient to popularize and use.

Disclosure of Invention

The present invention is directed to solving one of the technical problems of the prior art or the related art.

Therefore, the technical scheme adopted by the invention is as follows:

a full-automatic degumming machine comprises: the glue removing machine comprises a machine body, a placing mechanism, a manipulator mechanism, a glue removing mechanism and a cooling mechanism, wherein a fan filter unit and a control computer are mounted on the machine body; the placing mechanism is arranged on the machine body and used for placing a product; the manipulator mechanism comprises a driver, a vertical plate, a connecting table, a mechanical arm and an electromagnet, wherein the driver is arranged on the machine body and positioned on the side of the placing mechanism, the vertical plate is arranged in the driver, the connecting table is adjustably assembled on the vertical plate, the mechanical arm is hinged to the connecting table, and the electromagnet is connected to the end part of the mechanical arm; the degumming mechanism comprises a vacuum degumming chamber arranged on the machine body and positioned at the side of the manipulator mechanism, a feed and discharge port arranged on the vacuum degumming chamber, a switch door hinged to the vacuum degumming chamber and positioned at the side of the feed and discharge port, a switch cylinder hinged and driving the switch of the switch door, an exhaust passage connected between the vacuum degumming chamber and the fan filter unit and a control valve group connected to the bottom of the vacuum degumming chamber; the bottom of the control valve group is connected with a plasma microwave generator and a gas flow meter group, and a microwave electric box is connected below the gas flow meter group; the cooling mechanism is arranged on the side of the manipulator mechanism and used for dissipating heat of products.

Through adopting above-mentioned technical scheme, utilize the collocation use of placing mechanism, manipulator mechanism and degumming mechanism, only need to place the product in placing mechanism, follow-up unloading all adopts manipulator mechanism's automation mechanized operation, and the manual work volume that has significantly reduced has improved the cleaning efficiency of product, and the automation mechanized operation does not have artifical potential safety hazard, and is more reasonable.

The present invention in a preferred example may be further configured to: the placing mechanism comprises stand frames arranged in the machine body, positioning blocks adjustably arranged on the stand frames and material boxes placed between the positioning blocks.

By adopting the technical scheme, the products can be stacked in the material box, and the positions of the positioning blocks are adjusted according to the specification of the material box, so that the products can be placed at fixed points.

The present invention in a preferred example may be further configured to: the cooling mechanism comprises a cooling disc, a connecting frame and an induction block, wherein the cooling disc is installed on the machine body and located on the side of the manipulator mechanism, the connecting frame is installed on the cooling disc, and the induction block is arranged on the connecting frame.

By adopting the technical scheme, the product which is cleaned can be quickly cooled.

The present invention in a preferred example may be further configured to: the inside of driver is equipped with rotary machine and controller.

Through adopting above-mentioned technical scheme, the rotating machine can drive the arm and turn to, and then accomplishes the transporting on to the product, and the controller is convenient for programming control.

The present invention in a preferred example may be further configured to: and rotary positioning shafts are respectively arranged at the joint and the joint of the mechanical arm.

By adopting the technical scheme, the position of the electromagnet can be adjusted as required, and the positioning accuracy of the product to be taken and placed is ensured.

The present invention in a preferred example may be further configured to: the cooling plate is provided with a heat dissipation groove, and the bottom of the heat dissipation groove is connected with an input pipeline for leading in a refrigerating medium.

Through adopting above-mentioned technical scheme, be convenient for connect external cooling equipment, refrigeration plant such as liquid nitrogen container, air-cooler can lead to going on of liquid nitrogen cooling with higher speed to cooling body.

The present invention in a preferred example may be further configured to: the vacuum degumming chamber is provided with a feeding and discharging port, the side of the feeding and discharging port is provided with a switch door, the switch door is hinged with the vacuum degumming chamber, and the side of the feeding and discharging port is provided with a switch cylinder which is hinged and drives the switch of the switch door.

The technical scheme of the invention has the following beneficial technical effects:

according to the automatic glue removing device, the placing mechanism, the mechanical arm mechanism and the glue removing mechanism are matched for use, only the product needs to be placed on the placing mechanism, and the mechanical arm mechanism is adopted for automatic operation in subsequent feeding and discharging, so that the manual operation amount is greatly reduced, the cleaning efficiency of the product is improved, no manual potential safety hazard exists in automatic operation, and the automatic glue removing device is more reasonable.

Drawings

FIG. 1 is an internal structural view of the present invention;

FIG. 2 is a schematic view of the placement mechanism of the present invention;

FIG. 3 is a schematic view of the robot mechanism of the present invention;

FIG. 4 is a schematic diagram of a photoresist stripping mechanism of the present invention;

FIG. 5 is a schematic view of the cooling mechanism of the present invention;

fig. 6 is a schematic view of a plasma microwave generator according to the present invention.

Reference numerals:

100. a body; 110. a fan filter unit; 120. a control computer;

200. a placement mechanism; 210. a rack; 220. positioning blocks; 230. a material box;

300. a manipulator mechanism; 310. a driver; 320. a vertical plate; 330. a connecting table; 340. a mechanical arm; 350. an electromagnet;

400. a degumming mechanism; 410. a vacuum degumming chamber; 420. feeding and discharging ports; 430. opening and closing the door; 440. switching on and off the air cylinder; 450. an exhaust passage; 460. a control valve group; 470. a plasma microwave generator; 480. a gas flow meter group; 490. a microwave electronic box;

500. a cooling mechanism; 510. a cooling pan; 520. a connecting frame; 530. and a sensing block.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail with reference to the accompanying drawings in conjunction with the following detailed description. It should be noted that the embodiments of the present invention and features of the embodiments may be combined with each other without conflict.

It is to be understood that this description is made only by way of example and not as a limitation on the scope of the invention.

The following describes a fully automatic photoresist stripper provided by some embodiments of the present invention with reference to the accompanying drawings.

Referring to fig. 1 to 6, the present invention provides a full-automatic photoresist remover, which comprises: organism 100, placing mechanism 200, manipulator mechanism 300, remove gluey mechanism 400 and cooling body 500, install fan filter unit 110 and control computer 120 on the organism 100, can purify the gas that the mechanism 400 of gluing cleaned the production through fan filter unit 110, guaranteed operational environment's security, and control computer 120 electric connection complete machine instrument is convenient for integrate intelligent control.

As shown in fig. 1 and 2, the placing mechanism 200 is disposed on the machine body 100 and used for placing a product, and specifically, the placing mechanism 200 includes a rack 210 installed in the machine body 100, positioning blocks 220 adjustably installed on the rack 210, and a material box 230 placed between the positioning blocks 220, and by stacking the product inside the material box 230, the position of the positioning block 220 is adjusted according to the specification of the material box 230, so as to facilitate the fixed-point placing of the product.

As shown in fig. 1 and 3, the manipulator mechanism 300 includes a driver 310 installed on the machine body 100 and located at the side of the placing mechanism 200, a vertical plate 320 installed in the driver 310, a connecting table 330 adjustably assembled on the vertical plate 320, a mechanical arm 340 hinged on the connecting table 330, and an electromagnet 350 connected to an end of the mechanical arm 340, and the manipulator mechanism 300 can suck the product on the placing mechanism 200, and then transfer the product to the inside of the vacuum degumming chamber 410, so that the automatic operation is realized, and the cleaning efficiency is higher.

Specifically, the driver 310 is internally provided with a rotating machine and a controller, the rotating machine can drive the mechanical arm 340 to rotate, so that the product is transferred, the controller is convenient for programmed control, in addition, the connecting part and the joint part of the mechanical arm 340 are respectively provided with a rotary positioning shaft, the position of the electromagnet 350 can be adjusted according to requirements, and the positioning accuracy of taking and placing the product is ensured.

As shown in fig. 1 and 4, the degumming mechanism 400 includes a vacuum degumming chamber 410 installed on the machine body 100 and located at the side of the manipulator mechanism 300, a feeding and discharging port 420 opened on the vacuum degumming chamber 410, a switch door 430 hinged to the vacuum degumming chamber 410 and located at the side of the feeding and discharging port 420, a switch cylinder 440 hinged and driving the switch door 430 to open and close, an exhaust passage 450 connected between the vacuum degumming chamber 410 and the fan filter unit 110, and a control valve group 460 connected to the bottom of the vacuum degumming chamber 410; wherein, the bottom of the control valve group 460 is connected with a plasma microwave generator 470 and a gas flow meter group 480, the lower part of the gas flow meter group 480 is connected with a microwave electronic box 490, the product can be cleaned by plasma microwave through the degumming mechanism 400, and the cleaning effect is better.

As shown in fig. 1 and 5, the cooling mechanism 500 is disposed at the side of the robot mechanism 300 for dissipating heat of the product, and the cooling mechanism 500 includes a cooling plate 510 mounted at the side of the robot mechanism 300 and mounted on the machine body 100, a connecting frame 520 mounted on the cooling plate 510, and a sensing block 530 disposed on the connecting frame 520, so that the cleaned product can be quickly dissipated heat through the cooling mechanism 500.

Specifically, the cooling plate 510 is provided with a heat dissipation groove, the bottom of the heat dissipation groove is connected with an input pipeline for guiding in refrigeration media, external cooling equipment such as a liquid nitrogen tank and an air cooler can be conveniently connected, and the cooling mechanism 500 can be accelerated to cool and cool the liquid nitrogen.

The working principle and the using process of the invention are as follows: firstly, manually placing a material box 230 stacked with products to be subjected to glue removal in a layered mode on a rack 210, sucking the products layer by layer from the material box 230 by a manipulator mechanism 300, placing the products into a vacuum glue removing chamber 410, sealing the vacuum glue removing chamber 410, vacuumizing, removing the glue from the products in the cavity by plasma generated by a plasma microwave generator 470, taking out the products from the manipulator mechanism 300 after the glue removal is finished, placing the products into a cooling mechanism 500 for cooling, taking out the products from the manipulator mechanism 300 after the cooling is finished, placing the products back to the material box 230 layer by layer, manually taking out the products from the material box 230 after the glue removal of the products on the material box 230 is finished, and placing a new material box 230 again.

In the present invention, the term "plurality" means two or more unless explicitly defined otherwise. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items. The terms "mounted," "connected," "fixed," and the like are to be construed broadly, and for example, "connected" may be a fixed connection, a removable connection, or an integral connection; "coupled" may be direct or indirect through an intermediary. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

It will be understood that when an element is referred to as being "mounted to," "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.

In the description herein, the description of the terms "one embodiment," "some embodiments," "specific embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the claims and their equivalents.

Claims

1. The utility model provides a full-automatic degumming machine which characterized in that includes:

the air conditioner comprises a machine body (100), wherein a fan filter unit (110) and a control computer (120) are installed on the machine body (100);

the placing mechanism (200) is arranged on the machine body (100) and used for placing a product;

the manipulator mechanism (300) comprises a driver (310) which is arranged on the machine body (100) and is positioned on the side of the placing mechanism (200), a vertical plate (320) which is arranged in the driver (310), a connecting table (330) which is adjustably assembled on the vertical plate (320), a mechanical arm (340) which is hinged on the connecting table (330) and an electromagnet (350) which is connected to the end part of the mechanical arm (340);

the degumming mechanism (400) comprises a vacuum degumming chamber (410) which is arranged on the machine body (100) and is positioned at the side of the manipulator mechanism (300), an exhaust channel (450) which is connected between the vacuum degumming chamber (410) and the fan filter unit (110), and a control valve group (460) which is connected to the bottom of the vacuum degumming chamber (410); wherein the content of the first and second substances,

the bottom of the control valve group (460) is connected with a plasma microwave generator (470) and a gas flow meter group (480), and a microwave electric box (490) is connected below the gas flow meter group (480);

and the cooling mechanism (500) is arranged on the side of the manipulator mechanism (300) and is used for dissipating heat of the product.

2. The full-automatic glue removing machine according to claim 1, wherein the placing mechanism (200) comprises a rack (210) installed in the machine body (100), positioning blocks (220) adjustably installed on the rack (210), and a material box (230) placed between the positioning blocks (220).

3. The full-automatic glue removing machine according to claim 1, wherein the cooling mechanism (500) comprises a cooling tray (510) installed on the machine body (100) and located at the side of the manipulator mechanism (300), a connecting frame (520) installed on the cooling tray (510), and a sensing block (530) arranged on the connecting frame (520).

4. The automatic glue remover according to claim 1, wherein a rotating machine and a controller are arranged in the driver (310).

5. The full-automatic glue removing machine is characterized in that a rotary positioning shaft is respectively arranged at the joint of the mechanical arm (340).

6. The full-automatic degumming machine according to claim 1, characterized in that the cooling disc (510) is provided with a heat dissipation groove, and the bottom of the heat dissipation groove is connected with an input pipeline for leading in a refrigeration medium.

7. The full-automatic degumming machine according to claim 1, wherein the vacuum degumming chamber (410) is provided with a feeding and discharging port (420), the side of the feeding and discharging port (420) is provided with a switch door (430), the switch door (430) is hinged with the vacuum degumming chamber (410), and the side of the feeding and discharging port (420) is provided with a switch cylinder (440) which is hinged and drives the switch door (430) to open and close.