CN114532609A

CN114532609A - Structure of glass-based atomizing core and manufacturing method thereof

Info

Publication number: CN114532609A
Application number: CN202111668132.8A
Authority: CN
Inventors: 伍恒; 姜峰; 于大全; 杨婷婷
Original assignee: Xiamen Yun Tian Semiconductor Technology Co ltd
Current assignee: Xiamen Yun Tian Semiconductor Technology Co ltd
Priority date: 2021-12-30
Filing date: 2021-12-30
Publication date: 2022-05-27

Abstract

The invention discloses a structure of a glass-based atomizing core, which comprises a glass substrate, wherein the glass substrate is provided with a micropore channel penetrating through a first surface and a second surface, the micropore channel comprises a first aperture section and a second aperture section which are connected, the aperture of the second aperture section is smaller than that of the first aperture section, and the outlet of the second aperture section is positioned on the second surface; a resistive layer is attached to the sidewalls of the second aperture section and the second surface. The invention also discloses a manufacturing method of the composite material. The section with larger aperture in the micropore channel can be used for storing oil, and the section with smaller aperture is used for transferring oil, so that the problem of core pasting caused by oil transfer of single straight-hole micropore glass during dry burning can be effectively solved.

Description

Structure of glass-based atomizing core and manufacturing method thereof

Technical Field

The invention relates to the technical field of atomizing cores, in particular to a structure of a glass-based atomizing core and a manufacturing method thereof.

Background

The atomizing core material mainstream of the atomizer in the current market is ceramic structure material, and the ceramic atomizing core can have the following problems in use: 1. the sintering structure is easy to separate out particulate matters and heavy metals at high temperature, so that the health of a human body is influenced; 2. the consistency of the ceramic micropores cannot be controlled, and the atomization uniformity is not good; 3. the whole volume is large, and the occupied space is large; 4. the manufacturing process is traditional, the batch production flow is complex, and the cost is high; 5. in the long-time use process, the material can carbonize and cause the core that pastes, and then influences atomization effect, reduces life.

At present, glass substrate atomizing cores are available, but all the glass substrate atomizing cores are in a straight hole structure, and the product has the following problems: because of the glass through-hole is more perpendicular, atomizing liquid is difficult for storing and pinning in the atomizing core, can lead to the atomizing core when the atomizing of being heated, atomizing liquid can not in time effectively supply with, and then leads to burning the core futilely, from leading to the product quality problem.

Disclosure of Invention

The invention aims to overcome the defects in the prior art and provides a structure of a glass-based atomizing core and a manufacturing method thereof.

In order to achieve the above purpose, the technical scheme of the invention is as follows:

a structure of a glass-based atomizing core comprising a glass substrate having opposing first and second surfaces; the glass substrate is provided with a micropore channel penetrating through the first surface and the second surface, the micropore channel comprises a first aperture section and a second aperture section which are connected, the aperture of the second aperture section is smaller than that of the first aperture section, and the outlet of the second aperture section is positioned on the second surface; a resistive layer is attached to the sidewalls of the second aperture section and the second surface.

Optionally, the distance from the first surface to the second surface is 200 μm to 5mm, and the depth of the second aperture section is less than or equal to 50% of the distance from the first surface to the second surface.

Optionally, the aperture of the second aperture section is 2 μm to 50 μm.

Optionally, the material of the resistance layer includes one or a stacked combination of Ti, Au, Al, Pt, Ta, titanium nitride, aluminum nitride, and tantalum nitride, and the thickness is 10nm to 5 μm.

Optionally, the glass substrate is provided with one or more first aperture sections distributed at intervals, and each first aperture section is connected with one or more second aperture sections distributed at intervals.

Optionally, the first aperture section and the second aperture section are connected in a one-to-one correspondence manner to form a stepped through hole unit, and the glass substrate is provided with a plurality of stepped through hole units.

A manufacturing method of the structure of the glass-based atomizing core comprises the following steps:

1) manufacturing a blind hole with one of a first aperture and a second aperture on one surface of a glass substrate by adopting laser processing and etching liquid corrosion processes, wherein the blind hole is used for forming one of a first aperture section and a second aperture section;

2) manufacturing a through hole with the other of the first aperture and the second aperture on the back of the blind hole by adopting a laser processing and etching liquid corrosion process to form a micropore channel;

3) and depositing a resistance layer on one side surface of the second aperture section and the side wall of the second aperture section of the glass substrate to form a main body structure of the glass-based atomized core.

Optionally, the laser processing is to perform irradiation punching by using infrared picosecond laser with energy of 1-1000 μ j.

Optionally, the etching solution is etched by using an HF etching solution with a concentration of 1% -49%, or an HF: NH₄F is 1: 1-1: 10 BOE (buffered oxide etchant) solution, or 5% -50% NaOH/KOH solution.

Optionally, in step 2), before etching by the etching solution, a step of attaching a protective film to the etched surface in step 1) is further included; and removing the protective film after the etching solution is corroded.

The invention has the beneficial effects that:

(1) the atomizing core micropore channel is made of glass materials, a section with a larger pore diameter in the micropore channel can be used for storing oil, and a section with a smaller pore diameter is used for conveying oil, so that the problem of dry burning and core pasting of single straight-hole micropore glass due to oil conveying can be effectively solved;

(2) the micropore channel embedded in the glass material is manufactured, the material cost is low, the process controllability is strong, and the mass production and the manufacturing are convenient;

(3) compared with microporous ceramic, the microporous glass structure has the advantages that the volume of the atomizing core can be greatly compressed, miniaturization of atomizer products is facilitated, and the problems of carbonization of the microporous ceramic, core pasting, safety, environmental protection and reliability can be solved.

Drawings

FIG. 1 is a schematic cross-sectional structural view of a glass-based atomizing core of example 1;

FIG. 2 is a flow chart of a process for the preparation of the glass-based atomizing core of example 1, showing the structure obtained in each step;

FIG. 3 is a schematic cross-sectional view of the structure of a glass-based atomizing core of example 2.

Detailed Description

The invention is further explained below with reference to the figures and the specific embodiments. The drawings are only schematic and can be easily understood, and the specific proportion can be adjusted according to design requirements. The definitions of the top and bottom relationships of the relative elements and the front and back sides of the figures described herein are understood by those skilled in the art to refer to the relative positions of the components and thus all of the components may be flipped to present the same components and still fall within the scope of the present disclosure.

Example 1

Referring to fig. 1, a glass-based atomizing core structure 100 includes a glass substrate 1 having first and second opposing surfaces 1a and 1 b. The glass substrate 1 is provided with a micropore channel 2 penetrating the first surface 1a and the second surface 1b, the micropore channel 2 includes a first aperture section 21 and a second aperture section 22 connected, the aperture of the second aperture section 22 is smaller than that of the first aperture section 21, and the exit of the second aperture section 22 is located on the second surface 1 b. The resistive layer 3 is attached to the side wall and the second surface 1b of the second aperture section 22.

In this embodiment, the microporous channel 2 is formed by a plurality of stepped through-hole units arranged at intervals and independent from each other, each stepped through-hole unit has a first aperture section 21 and a second aperture section 22 connected in a one-to-one correspondence, an inlet of the first aperture section 21 is located on the first surface 1a, an outlet of the second aperture section 22 is located on the second surface 1b, the first aperture section 21 and the second aperture section 22 are connected to form an annular step, wherein the first aperture section 21 of the large aperture is used for conveying atomized liquid and storing liquid, and the second aperture section 22 of the small aperture is mainly used for conveying liquid. The resistance layer 3 is deposited on one side of the small aperture of the structure body, so that subsequent electrification heating is facilitated, and further atomized liquid can be atomized, and an atomization core main body structure is formed.

Specifically, the glass substrate 1 may be selected from quartz glass, and the distance (which may be understood as the thickness) between the first surface 1a and the second surface 1b is, for example, 200 μm to 5 mm; the depth of the second aperture section 22 can be less than or equal to 50% of the thickness, the aperture is 2-50 μm, the aperture of the first aperture section 21 is preferably 20-500 μm, therefore, the first aperture section 21 provides temporary storage space and timely supply, the second aperture section 22 meets the requirement of atomization size, atomization is carried out through the shorter second aperture section 22, and the problem of dry burning of paste cores is avoided.

Referring to FIG. 2, in the manufacturing method of the above structure, firstly, laser is adopted to be incident on the first surface 1a of the glass substrate 1, infrared picosecond laser is adopted, single pulse energy is adopted, the energy is 30 muj-100 muj, the repetition frequency is 100-300KHz, the laser focus position is controlled to gather the middle position of the glass, point-by-point laser drilling is carried out, a continuous variable region is induced on the glass surface, then, 1% -49% of HF solution is adopted to etch the glass substrate for 50-200 min, due to the fact that the etching speed of the variable region in etching solution is high relative to an undenatured region, a blind hole 2a with a first aperture is etched and formed in a preset region, and the blind hole 2a is used as a first aperture section 21; then, infrared picosecond laser is adopted, single pulse energy is achieved, the energy is 30 uj-100 uj, the repetition frequency is 100-plus 300KHz, the position of a laser focus is controlled to gather the position of the surface of the glass, point-by-point laser drilling is carried out, a variable area is induced to generate on the back surface of the blind hole 2a, a protective film is attached to the first surface 1a, 1% -49% of HF solution is adopted to etch the glass substrate for 10-100 min, so that a through hole with a second aperture is formed on the back surface of the blind hole 2a and serves as a second aperture section 22, then the protective film is removed, a stepped through hole unit is obtained, the microporous channel 2 is formed by the stepped through hole units, and the area of the variable area can be controlled by controlling the area treated by the laser by adopting a laser drilling method, so that the purpose of controlling the size of the aperture is achieved; then, any one of Ti, Au, Al, Pt, Ta or their nitrides or laminated combinations with the thickness of 10nm to 5 μm is deposited as a resistance layer on the second surface 1b side by adopting a physical vapor deposition or evaporation process to form the atomizing core main body structure.

In addition, the blind hole with a small aperture may be first fabricated as the second aperture section, and then the large aperture region communicated with the blind hole may be fabricated as the first aperture section on the back side, which is not limited.

By adopting the process, the required number of the stepped through hole units can be prepared in large batch, the distribution rules of the plurality of stepped through hole units, including intervals, density, uniformity and the like, can be regulated and controlled according to requirements, and compared with the existing microporous ceramic structure, the process can be used for manufacturing large-area and uniform atomization areas. Because the volume of the microporous ceramic is larger and the length, width and height are all millimeter-sized, the length, width and height can be compressed by adopting the glass processing method, and the whole volume can be reduced to 1/3-1/2. When the product is punched and etched to process the glass through hole, the appearance effect of the side wall of the through hole can be confirmed by a scanning electron microscope after slicing.

Example 2

Referring to fig. 3, the pore channels 2 ' of the glass-based atomizing core structures 200 and 200 ' of example 2 are formed by a first pore section 21 ' and a second pore section 22, wherein the first pore section 21 is one or a plurality of spaced apart pore sections (such as two structures in fig. 3), each first pore section 21 ' is respectively connected with a plurality of spaced apart second pore sections 22, the pore diameter of the first pore section 21 ' is 100 μm to 10mm, and the pore diameter of the second pore section 22 is the same as that of example 1.

The above embodiments are only used to further illustrate the structure and the manufacturing method of the glass-based atomizing core of the present invention, but the present invention is not limited to the embodiments, and any simple modification, equivalent change and modification made to the above embodiments according to the technical spirit of the present invention fall within the protection scope of the technical solution of the present invention.

Claims

1. A structure of glass-based atomizing core is characterized in that: comprises a glass substrate having first and second opposing surfaces; the glass substrate is provided with a micropore channel penetrating through the first surface and the second surface, the micropore channel comprises a first aperture section and a second aperture section which are connected, the aperture of the second aperture section is smaller than that of the first aperture section, and the outlet of the second aperture section is positioned on the second surface; a resistive layer is attached to the sidewalls of the second aperture section and the second surface.

2. The structure of a glass-based atomizing core according to claim 1, characterized in that: the distance from the first surface to the second surface is 200 μm to 5mm, and the depth of the second aperture section is less than or equal to 50% of the distance from the first surface to the second surface.

3. The structure of a glass-based atomizing core according to claim 1, characterized in that: the aperture of the second aperture section is 2-50 μm.

4. The structure of a glass-based atomizing core according to claim 1, characterized in that: the resistance layer is made of one or a laminated combination of Ti, Au, Al, Pt, Ta, titanium nitride, aluminum nitride and tantalum nitride, and the thickness of the resistance layer is 10 nm-5 mu m.

5. The structure of a glass-based atomizing core according to claim 1, characterized in that: the glass substrate is provided with one or more first aperture sections distributed at intervals, and each first aperture section is respectively connected with one or more second aperture sections distributed at intervals.

6. The structure of a glass-based atomizing core according to claim 5, characterized in that: the first aperture sections and the second aperture sections are connected in a one-to-one correspondence mode to form stepped through hole units, and the glass substrate is provided with a plurality of stepped through hole units.

7. A method for making a structure for a glass-based atomizing core according to any one of claims 1 to 6, comprising the steps of:

8. The method of manufacturing according to claim 7, wherein: the laser processing is to adopt infrared picosecond laser with energy of 1-1000 muj to perform irradiation punching.

9. The method of manufacturing according to claim 7, wherein: the etching solution is etched by adopting HF etching solution with the concentration of 1% -49%, or HF: NH (NH)₄F is 1: 1-1: 10 BOE (buffered oxide etchant) solution, or 5% -50% NaOH/KOH solution.

10. The method of manufacturing according to claim 7, wherein: in the step 2), before the etching solution is corroded, a step of attaching a protective film to the etched surface in the step 1) is further included; and removing the protective film after the etching solution is corroded.