CN114527569B - Design method of spatial separation super-structured lens and stereo imaging system thereof - Google Patents
Design method of spatial separation super-structured lens and stereo imaging system thereof Download PDFInfo
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Abstract
The invention discloses a design method of an air separation super-structure lens and a stereo imaging system thereof, wherein the method comprises the following steps: presetting respective degree sets of nano units with independent variable double-shaft structures, setting corresponding variation ranges and working wavelengths and polarization states of incident light, and determining a phase database of a target nano unit combination set by combining numerical simulation processing; calculating theoretical phase distribution of the space division super-structured lens according to priori knowledge, matching the theoretical phase distribution according to a phase database, and determining target size combinations of nano units of all sampling points; the obtained space division super-structure lens is combined with the traditional optical element, a three-dimensional microscopic imaging optical system can be built, high-resolution imaging can be realized, imaging performance is obviously improved, and the space division super-structure lens can be widely applied to the field of optical lens imaging.
Description
Technical Field
The invention relates to the technical field of lens imaging, in particular to a design method of a space division super-structure lens and a stereo imaging system thereof.
Background
The super-structured surface is a typical representative of planar optics in recent years, and can realize diversified functions such as beam deflection, holography, polarization conversion and the like by utilizing a uniquely designed micro-nano scattering unit to accurately regulate and control parameters such as amplitude, phase, polarization and the like of a local electromagnetic field. The super-structure lens belongs to a super-surface with special functions, has excellent beam focusing and optical imaging capabilities, and obtains much attention. Through the development of many years, compared with a glass lens with a large volume, a single-layer super-structure lens can already show a plurality of excellent functions, such as broadband achromatization, large-field imaging, multi-focus modulation, realization of ultrahigh numerical aperture, high dispersion light splitting and the like, and has the characteristics of high design freedom, small volume, easiness in system integration miniaturization, compatibility with a semiconductor process and the like, so that the single-layer super-structure lens has more and more possibilities in practical life and particularly in imaging application. Especially in the field of microscopic imaging, the super-structure lens has wide application, for example, the super-structure lens is utilized to realize defocusing and fluorescence imaging of biological tissues at different depths, two-photon microscope imaging and the like are realized, and the super-structure lens with oblique symmetrical double optical axes is specially designed, so that an optical imaging system can be built by taking the super-structure lens as a core to realize three-dimensional microscopic imaging.
Traditional stereomicroscope is based on binocular stereovision principle, also can realize the microscopic formation of image of solid, nevertheless because it has two sets of independent lens groups, the inner space crowds and leads to the lens size to be restricted, need keep fixed body visual angle again simultaneously, therefore the magnification and the numerical aperture of objective are lower, and magnification and resolution ratio are not enough when the formation of image.
Disclosure of Invention
In view of this, embodiments of the present invention provide a method for designing a spatial separation super-structure lens and a stereoscopic imaging system thereof, where the spatial separation super-structure lens has higher resolution and magnification, and the spatial separation super-structure lens can be used to build a stereoscopic imaging system, and compared with a conventional stereoscopic microscope, an imaging effect is significantly improved.
A first aspect of an embodiment of the present invention provides a method for designing an air-separation metamaterial lens, including:
presetting a freedom set of a target nanometer unit; presetting a change value of target freedom degree and working wavelength of incident light; the target nano-unit comprises a nano-unit with an independently variable biaxial structure;
determining a phase database of a target nanometer unit combination set according to a preset target degree of freedom change value and a nanometer unit combination set after the working wavelength of incident light by combining numerical simulation processing;
calculating theoretical phase distribution of a space division super-structure lens according to priori knowledge, wherein the space division super-structure lens comprises a left super-structure lens and a right super-structure lens, the left super-structure lens and the right super-structure lens are overlapped in a spatial position, and phase centers of the left super-structure lens and the right super-structure lens are symmetrical to an inclined optical axis;
and matching the theoretical phase distribution according to the phase database, and determining the target size combination of the nanometer units of the space division metamaterial lens.
Optionally, the presetting of the set of degrees of freedom of the target nano unit comprises:
presetting a degree of freedom set with target nanometer units which are periodically arranged;
wherein the set of degrees of freedom includes an interval value of a repetition period, a shape of the nano-unit in the repetition period, a length of the nano-unit, and a width of the nano-unit.
Optionally, the variation value of the preset target degree of freedom and the operating wavelength of the incident light at least include one of:
presetting the length change value of the nanometer unit and the working wavelength of incident light;
the variation value of the width of the nano-unit and the operating wavelength of the incident light are preset.
Optionally, the determining, according to the change value of the preset target degree of freedom and the nano-element combination set after the working wavelength of the incident light, a phase database of the target nano-element combination set in combination with numerical simulation processing includes:
acquiring the emergent phases and the transmittances of the nanometer unit combinations in the Ex linearly polarized light incidence and the Ey linearly polarized light incidence respectively in the nanometer unit combination set by adopting numerical simulation processing;
determining a phase database of the target nano unit combination set according to the emergent phase and the transmittance;
the left super-structure lens works on the Ex linearly polarized light, and the right super-structure lens works on the Ey linearly polarized light.
Optionally, the calculating, according to a priori knowledge, a theoretical phase distribution of the spatial-division metamaterial lens includes:
calculating theoretical phase distribution of the space division super-structure lens according to a spherical wave transmission theory and a focusing phase theory;
wherein the theoretical phase distribution expression is:
wherein, the first and the second end of the pipe are connected with each other,
and &>
Respectively representing the phase curves of the left and right super-structure lenses, (x, y) representing the coordinate position of the sampling point on the two-dimensional plane, lambda 0 Expressed as the wavelength in air, λ sub Denotes the wavelength in the substrate, s denotes the object distance, v denotes the image distance, θ denotes the tilt angle of the optical axis, and d denotes the horizontal distance of the image point from the intermediate Z-axis.
Optionally, the matching the theoretical phase distribution according to the phase database and determining a target size combination of the nano-elements of the spatial super-structured lens include:
performing periodic transformation processing on the phases in the phase database and the theoretical phase distribution;
performing difference processing according to the phase database after the periodic transformation processing and the phase in the theoretical phase distribution to obtain a difference value database;
and determining the target size combination of the nanometer units of the space division super-structure lens according to the difference library.
Optionally, the performing difference processing according to the phase database after the periodic transformation processing and the phase in the theoretical phase distribution to obtain a difference database includes:
performing difference processing according to the phase of the Ex linearly polarized light incidence and the phase of theoretical phase distribution in the phase database after the periodic transformation processing to obtain a first difference database;
performing difference processing according to the phase of Ey linearly polarized light incidence and the phase of theoretical phase distribution in the phase database after the periodic transformation processing to obtain a second difference database;
and adding the first difference library and the second difference library to obtain a third difference library.
Optionally, the determining, according to the difference library, a target size combination of nano-units of the spatial metamorphic lens includes:
and determining the target size combination of the nanometer units of all sampling points of the space division super-structure lens according to the third difference library.
A second aspect of an embodiment of the present invention provides a spatial metamorphic lens designed according to the spatial metamorphic lens design method of the first aspect of an embodiment of the present invention, which includes a substrate and nano-elements with independently variable biaxial structures provided on the substrate.
A third aspect of an embodiment of the present invention provides a stereoscopic imaging system, including:
the transparent type illumination light source is used for illuminating the test sample;
the spatial super-structure lens according to the second aspect of the embodiment of the present invention comprises a left super-structure lens and a right super-structure lens, the left super-structure lens and the right super-structure lens coincide in spatial position, the phase centers of the left super-structure lens and the right super-structure lens are symmetrical to the inclined optical axis, and the spatial super-structure lens is used for generating two images which are symmetrical in position and have parallax according to the test sample;
the charge coupled device is used for collecting the two images which are symmetrical in position and have parallax errors so as to realize three-dimensional imaging;
the transparent illuminating light source, the space division metamaterial lens and the charge coupled device are sequentially arranged.
The method comprises the steps of presetting a freedom set of a target nanometer unit; presetting a change value of target freedom degree and working wavelength of incident light; the target nano-unit comprises a nano-unit having an independently variable biaxial structure; then, according to a preset target degree of freedom change value and a nanometer unit combination set after the working wavelength of incident light, combining numerical simulation processing to determine a phase database of the target nanometer unit combination set; calculating theoretical phase distribution of the space division super-structure lens according to prior knowledge, wherein the space division super-structure lens comprises a left super-structure lens and a right super-structure lens, the left super-structure lens and the right super-structure lens are overlapped in a spatial position, and phase centers of the left super-structure lens and the right super-structure lens are symmetrical to an inclined optical axis; and finally, according to the phase database, matching the theoretical phase distribution and determining the target size combination of the nanometer unit of the space division super-structure lens. The method can realize two paths of space division super-structure lenses with imaging light paths with proper binocular parallax, and the design of numerical aperture is not limited due to the existence of the overlapping area of the left super-structure lens and the right super-structure lens, so that high-resolution imaging can be realized, and the imaging performance is obviously improved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic flow chart of a method for designing an air separation meta-lens according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a nano-unit of an air-separation super-structured lens provided in an embodiment of the present invention;
FIG. 3 is a functional schematic diagram of a spatial super-structured lens provided in an embodiment of the present invention;
FIG. 4 is a schematic diagram of a partial nano-element of a spatial super-structured lens provided in an embodiment of the present invention;
fig. 5 is a schematic view illustrating an optical flow effect of the stereoscopic imaging system according to the embodiment of the invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
In a first aspect, referring to fig. 1, the present invention provides a method for designing an air separation meta-lens, including:
presetting a freedom set of a target nanometer unit; presetting a change value of target freedom degree and working wavelength of incident light; the target nano-unit comprises a nano-unit with an independently variable biaxial structure;
determining a phase database of a target nanometer unit combination set according to a preset target degree of freedom change value and a nanometer unit combination set after the working wavelength of incident light by combining numerical simulation processing;
calculating theoretical phase distribution of the space division super-structure lens according to priori knowledge, wherein the space division super-structure lens comprises a left super-structure lens and a right super-structure lens, the left super-structure lens and the right super-structure lens are overlapped in a spatial position, and phase centers of the left super-structure lens and the right super-structure lens are symmetrical to an inclined optical axis;
and matching theoretical phase distribution according to the phase database, and determining the target size combination of the nanometer units of the space division super-structure lens.
In some embodiments, the presetting of the set of degrees of freedom for the target nano-unit comprises:
presetting a degree of freedom set with target nanometer units which are periodically arranged;
wherein the set of degrees of freedom includes an interval value of the repetition period, a shape of the nano-unit in the repetition period, a length of the nano-unit, and a width of the nano-unit.
In some embodiments, the predetermined target degree of freedom variation and the operating wavelength of the incident light include at least one of:
presetting the length change value of the nanometer unit and the working wavelength of incident light;
the variation value of the width of the nano-unit and the operating wavelength of the incident light are preset.
In some embodiments, determining a phase database of a target nano-element combination set according to a variation value of a preset target degree of freedom and a nano-element combination set after an operating wavelength of incident light, in combination with a numerical simulation process, includes:
numerical simulation processing is adopted to obtain the emergent phases and the transmittances of the nanometer unit combinations in the Ex linearly polarized light incidence and the Ey linearly polarized light incidence respectively in the nanometer unit combination set;
determining a phase database of a target nanometer unit combination set according to the emergent phase and the transmittance;
the left super-structure lens works on Ex linearly polarized light, and the right super-structure lens works on Ey linearly polarized light.
In some embodiments, calculating the theoretical phase distribution of the spatial super-structured lens according to the prior knowledge includes:
calculating theoretical phase distribution of the space division super-structure lens according to a spherical wave transmission theory and a focusing phase theory;
wherein the theoretical phase distribution expression is:
wherein the content of the first and second substances,
and &>
Respectively representing the phase curves of the left and right super-structure lenses, (x, y) representing the coordinate position of the sampling point on the two-dimensional plane, lambda 0 Expressed as the wavelength in air, λ sub Denotes the wavelength in the substrate, s denotes the object distance, v denotes the image distance, θ denotes the tilt angle of the optical axis, and d denotes the horizontal distance of the image point from the intermediate Z axis.
In some embodiments, matching the theoretical phase distribution from the phase database to determine a target size combination of nano-elements of the spatial metameric lens comprises:
performing periodic transformation processing on the phase database and the phases in the theoretical phase distribution;
performing difference processing according to the phase database after the periodic transformation processing and the phase in the theoretical phase distribution to obtain a difference value database;
and determining the target size combination of the nanometer units of the space division super-structure lens according to the difference library.
In some embodiments, the obtaining a difference library by performing difference processing on the phase database after the periodic transformation processing and the phase in the theoretical phase distribution includes:
performing difference processing according to the incident phase of the Ex linearly polarized light in the phase database after the periodic transformation processing and the phase distributed by the theoretical phase to obtain a first difference database;
performing difference processing according to the phase of Ey linearly polarized light incidence in the phase database after the periodic transformation processing and the phase of theoretical phase distribution to obtain a second difference database;
and adding the first difference library and the second difference library to obtain a third difference library.
In some embodiments, determining a target size combination of nano-elements of a spatial metameric lens from a difference library comprises:
and determining the target size combination of the nanometer units of all sampling points of the space division super-structure lens according to the third difference library.
Specifically, in some specific embodiments, the above method is implemented by:
s1, determining respective degrees of freedom of periodically arranged nano units, setting the variation range and variation interval of the degree of freedom which is decisive for each nano unit, setting the working wavelength of incident light, scanning the shapes of the nano units combined by different degrees of freedom by using a numerical simulation method, and obtaining the transmissivity and phase databases of the combinations.
And S2, calculating the phase distribution of the space division super-structure lens according to a spherical wave transmission theory and a focusing phase theory. Wherein, left side super lens and right super lens coincide completely on spatial position, and all sampling points are the same completely, and two super lens's phase place distribution computational formula is:
wherein the content of the first and second substances,
and &>
Respectively representing the phase curves of the left and right super-structure lenses, (x, y) representing the positions of all sampling points in a selected area on a two-dimensional plane, lambda 0 Expressed as the wavelength in air, λ sub Denotes the wavelength in the substrate, s denotes the object distance, v denotes the image distance, θ denotes the tilt angle of the optical axis, and d denotes the horizontal distance of the image point from the intermediate Z axis.
And S3, according to the theoretical phase distribution, matching the theoretical phase by using a phase library obtained by scanning to obtain the most appropriate size combination, wherein each size corresponds to a sampling coordinate, all sampling points in the area are arranged with the most appropriate nano units, and finally obtaining the space division super-structure lens.
It should be noted that, in step S1, each nano unit represents a single independent sampling point, and because there is a superposed region, each nano unit needs to satisfy two orthogonal linearly polarized light phases at the same time, and the two units need to realize independent phase adjustment and control covering 2 pi, so according to the transmission phase theory, a nano unit structure with independent variable double axes is necessary, the structure of a single elliptic cylinder nano unit designed by the present invention is shown in fig. 2, and the nano unit 2 is completely covered by the protective layer 1, and has a plurality of adjustable degrees of freedom, including: the spacing of the repeating periods, the shape of the nano-units located in the repeating periods, the refractive index, the material, the handedness, the dimensions in the respective orientations, and the type of medium that coats the nano-units. According to the design requirements of the invention, an elliptic cylinder with the simplest configuration is selected as a nanometer unit, wherein only two degrees of freedom of length and width (namely, the lengths corresponding to a long axis and a short axis) are changed, the change ranges and intervals of the length and the width are set, the emergent phase and the transmittance of each combination when Ex linearly polarized light and Ey linearly polarized light are incident are obtained by numerical simulation, the data form a sampling database, and each phase corresponds to a group of length and width values. The remaining degrees of freedom are set to a fixed condition and do not vary with the data in the library.
In step S3, as shown in fig. 3, the function display of the spatial separation super-structure lens is shown, wherein the function display includes an object plane 3, a spatial separation super-structure lens 4, a left super-structure lens inclined optical axis and beam focusing 5, a right super-structure lens inclined optical axis and beam focusing 6, and an image plane 7, wherein the left super-structure lens works in Ex linear polarized light; the right metamaterial lens operates with Ey linearly polarized light.
The specific phase matching calculation mode is as follows: the theoretically calculated phase and the phase in the library are periodically transformed to be between 0 and 2 pi. As each nano unit needs to meet the requirements of Ex and Ey at the same time, the phase of each sampling point needed by the left super-structured lens is firstly differenced with the phase in the library obtained when Ex linearly polarized light enters to obtain a difference library, then the phase of each sampling point needed by the right super-structured lens is differenced with the phase in the library obtained when Ey linearly polarized light enters to obtain a second difference library, absolute values of the two are added to form a new third difference library, the minimum value is searched in the library, the corresponding size of the nano unit does not individually accord with the requirements of the left super-structured lens or the right super-structured lens, but partial compromise is made between the two, the closest phase requirements of the two can be met as far as possible, and partial phase matching errors occur, so that the tolerance is realized. According to this procedure, each sample point can be matched to the most appropriate size, and the tilted view of the partial nano-cells of the super-structured lens on the substrate in the final arrangement is shown in fig. 4.
In a second aspect, the invention provides a spatial metamorphic lens designed according to the above method, comprising a substrate and nano-elements having independently variable biaxial structures provided on the substrate.
Specifically, in some embodiments, the material of the nano-unit and the substrate is made of one or more optical medium materials selected from optical crystal, optical glass, optical thin film, optical plastic, optical metal such as gold, silver, aluminum, etc., optical non-metal materials such as iii-v group compound semiconductor, etc., and the optical crystal includes, but is not limited to, optical single crystal, optical polycrystal, and optical amorphous.
In some embodiments, the shape of the adopted nano-unit is an elliptic cylinder, but the same solutions include but are not limited to: rectangular columns and cross columns with double shafts; various non-biaxial posts, asymmetrically shaped posts with birefringent phase effects.
In some embodiments, the super-structure lens unit is provided with a micro-nano structure arranged in a patterned manner, the array can be obtained by methods such as but not limited to electron beam exposure, ultraviolet lithography and laser direct writing, and the etching method can adopt dry etching or wet etching.
In a third aspect, the present invention provides a stereoscopic imaging system comprising:
the transparent type illumination light source is used for illuminating the test sample;
the space division super-structure lens designed by the method comprises a left super-structure lens and a right super-structure lens, wherein the left super-structure lens and the right super-structure lens are superposed in a spatial position, the phase centers of the left super-structure lens and the right super-structure lens are symmetrical to an inclined optical axis, and the space division super-structure lens is used for generating two images which are symmetrical in position and have parallax according to the test sample;
the charge coupled device is used for collecting two images which are symmetrical in position and have parallax errors so as to realize three-dimensional imaging;
the transparent type illumination light source, the space division super-structure lens and the charge coupled device are sequentially arranged.
Specifically, in some specific embodiments, as shown in fig. 5, the stereoscopic imaging system includes the following three main components:
(1) A transmissive illumination source 8 for illuminating a sample 9 to be tested.
(2) And the super-structure lens 10 is used for generating two images which are symmetrical in position and have parallax according to the test sample 9.
(3) A CCD (Charge Coupled Device) 12 for collecting two images 11 with parallax in symmetrical positions.
Wherein the imaging system further comprises a carrier plate for holding the superstructural lens 10 and the test specimen 9.
In the imaging system, a specific working principle, namely an imaging flow, is as follows: the diverging light beam emitted by the source of illumination 8 is first of all focused on the test specimen 9 placed on the carrier plate, via a series of beam conditioning and focusing systems. The spatial separation super-structure lens 10 is also arranged on a carrier plate of an upper layer, an illuminated area of a test sample is used as a new light source, two images 11 which are symmetrical in position and have parallax are formed in the subsequent space of the test sample through the super-structure lens right above, and are collected by a CCD12, so that the stereoscopic microscopic imaging is realized.
In the system, all the carrier plates and the adjusting system are connected with the three-dimensional translation stage and are used for adjusting the illumination position, the size of a focusing light spot, freely moving a sample, adjusting an object and adjusting an image distance.
In summary, the present invention utilizes the high degree of freedom characteristic of the super-structured lens in design, and utilizes the nano-unit with the cross section having the shape of an elliptic cylinder with two axes, to design an air-division super-structured lens, which comprises two super-structured lens functional areas and two inclined optical axes, and can generate two symmetrical focuses, that is, two images can be generated simultaneously for an object, and since the optical axes are inclined, the images have parallax. Meanwhile, the space division super-structure lens designed by the invention not only realizes the same function of two independent objectives of the traditional stereomicroscope, but also has smaller volume and is easier to be applied to an integrated system. In the space division super-structure lens designed by the invention, because the left super-structure lens and the right super-structure lens are completely overlapped, the numerical aperture is not limited as the traditional stereoscopic microscope while the viewing angle of the stereoscopic microscope is kept, the higher resolution and the higher magnification are realized, and the defect that the numerical aperture and the magnification of the objective lens of the traditional stereoscopic microscope are limited is overcome. The super-structure lens and the optical element designed according to the invention can be used for building a three-dimensional imaging system to realize three-dimensional microscopic imaging, and the imaging quality is not output to a traditional stereoscopic microscope taking a glass lens as a core. The invention has the beneficial effects that:
(1) The resolution is high, the overlapping area enables the two independent super-structure lenses to share any area, and the numerical aperture design is not limited, so that high-resolution imaging can be realized;
(2) The spatial separation super-structure lens comprises two independent functional areas corresponding to two symmetrical inclined optical axes, so that a single object on an object plane passes through the super-structure lens to form double images which are symmetrical along a Z axis, and the images have parallax;
(3) The symmetrical image has no crosstalk, two functional areas of the space division super-structured lens respectively correspond to orthogonal linearly polarized light, and unnecessary linearly polarized light can be filtered by a linear polarizer;
(4) The volume is small, the designed space division super-structure lens is small in volume, the thickness is in millimeter order, and the integration of a miniature system is easy;
(5) The process is mature, the preparation can be realized by adopting the existing semiconductor micro-nano processing process, and no additional development of new process technology is needed.
In alternative embodiments, the functions/acts noted in the block diagrams may occur out of the order noted in the operational illustrations. For example, two blocks shown in succession may, in fact, be executed substantially concurrently, or the blocks may sometimes be executed in the reverse order, depending upon the functionality/acts involved. Furthermore, the embodiments presented and described in the flow charts of the present invention are provided by way of example in order to provide a more comprehensive understanding of the technology. The disclosed methods are not limited to the operations and logic flows presented herein. Alternative embodiments are contemplated in which the order of various operations is changed and in which sub-operations described as part of larger operations are performed independently.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
While the preferred embodiments of the present invention have been illustrated and described, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. A method for designing an air-separating super-structured lens is characterized by comprising the following steps:
presetting a freedom set of a target nanometer unit; presetting a change value of target freedom degree and working wavelength of incident light; the target nano-unit comprises a nano-unit with an independently variable biaxial structure;
determining a phase database of a target nanometer unit combination set according to a preset target degree of freedom change value and a nanometer unit combination set after the working wavelength of incident light by combining numerical simulation processing;
calculating theoretical phase distribution of a space division super-structure lens according to priori knowledge, wherein the space division super-structure lens comprises a left super-structure lens and a right super-structure lens, the left super-structure lens and the right super-structure lens are overlapped in a spatial position, and phase centers of the left super-structure lens and the right super-structure lens are symmetrical to an inclined optical axis;
and matching the theoretical phase distribution according to the phase database, and determining the target size combination of the nanometer unit of the space division super-structure lens.
2. The method for designing an air-separating metamaterial lens according to claim 1, wherein the presetting of the set of degrees of freedom of the target nano-unit includes:
presetting a freedom set of target nanometer units with periodic arrangement;
wherein the set of degrees of freedom includes an interval value of a repetition period, a shape of the nano-unit in the repetition period, a length of the nano-unit, and a width of the nano-unit.
3. The method as claimed in claim 2, wherein the variation value of the preset target degree of freedom and the operating wavelength of the incident light include at least one of:
presetting the length change value of the nanometer unit and the working wavelength of incident light;
the variation value of the width of the nano-unit and the operating wavelength of the incident light are preset.
4. The method according to claim 1, wherein determining the phase database of the target nano-element combination set according to the variation value of the preset target degree of freedom and the nano-element combination set after the working wavelength of the incident light, in combination with a numerical simulation process, comprises:
acquiring the emergent phases and the transmittances of the nanometer unit combinations in the Ex linearly polarized light incidence and the Ey linearly polarized light incidence respectively in the nanometer unit combination set by adopting numerical simulation processing;
determining a phase database of the target nano unit combination set according to the emergent phase and the transmittance;
the left super-structure lens works on the Ex linearly polarized light, and the right super-structure lens works on the Ey linearly polarized light.
5. The method for designing a spatial super-structured lens according to claim 1, wherein the calculating a theoretical phase distribution of the spatial super-structured lens according to a priori knowledge includes:
calculating theoretical phase distribution of the space division metamaterial lens according to a spherical wave transmission theory and a focusing phase theory;
wherein the theoretical phase distribution expression is:
wherein the content of the first and second substances,
and &>
Respectively representing the phase curves of the left and right super-structure lenses, (x, y) representing the coordinate position of the sampling point on the two-dimensional plane, lambda 0 Expressed as the wavelength in air, λ sub Denotes the wavelength in the substrate, s denotes the object distance, v denotes the image distance, θ denotes the tilt angle of the optical axis, and d denotes the horizontal distance of the image point from the intermediate Z axis.
6. The method according to claim 4, wherein the determining the target size combination of the nano-elements of the spatial metamorphic lens by matching the theoretical phase distribution according to the phase database comprises:
performing periodic transformation processing on the phase database and the phases in the theoretical phase distribution;
performing difference processing according to the phase database after the periodic transformation processing and the phase in the theoretical phase distribution to obtain a difference value database;
and determining the target size combination of the nanometer units of the space division super-structure lens according to the difference library.
7. The method according to claim 6, wherein the obtaining a difference library by performing a difference process on the phases in the phase database after the periodic transformation process and the theoretical phase distribution includes:
performing difference processing according to the phase of the Ex linearly polarized light incidence and the phase of theoretical phase distribution in the phase database after the periodic transformation processing to obtain a first difference database;
performing difference processing according to the phase of Ey linearly polarized light incidence and the phase of theoretical phase distribution in the phase database after the periodic transformation processing to obtain a second difference database;
and adding the first difference library and the second difference library to obtain a third difference library.
8. The method according to claim 7, wherein the determining the target size combination of the nano-elements of the spatial metamorphic lens according to the difference library comprises:
and determining the target size combination of the nanometer units of all sampling points of the space division super-structure lens according to the third difference library.
9. A spatial division metamaterial lens as claimed in any one of claims 1 to 8, comprising a substrate and nano-elements having independently variable biaxial structures disposed on the substrate.
10. A stereoscopic imaging system, comprising:
the transparent type illumination light source is used for irradiating the test sample;
the spatial super-structure lens as claimed in claim 9, which comprises a left super-structure lens and a right super-structure lens, the left super-structure lens and the right super-structure lens coincide in spatial position, the phase centers of the left super-structure lens and the right super-structure lens are symmetrical with an inclined optical axis, and the spatial super-structure lens is used for generating two images with parallax and symmetrical positions according to the test sample;
the charge coupled device is used for collecting the two images which are symmetrical in position and have parallax errors so as to realize three-dimensional imaging;
the transparent illuminating light source, the space division metamaterial lens and the charge coupled device are sequentially arranged.
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103296476A (en) * | 2012-02-29 | 2013-09-11 | 深圳光启创新技术有限公司 | Multi-beam lens antenna |
| CN107203050A (en) * | 2016-11-28 | 2017-09-26 | 四川大学 | Double vision integration imaging 3D display methods based on holographic optical elements (HOE) |
| CN109239912A (en) * | 2017-07-10 | 2019-01-18 | 三星电子株式会社 | Light-beam scanner and Optical devices including it |
| CN109507765A (en) * | 2018-12-28 | 2019-03-22 | 中国科学院苏州生物医学工程技术研究所 | The generation method of super lens micro-structure, the miniature two-photon microscopic system based on super lens |
| CN109683334A (en) * | 2019-01-16 | 2019-04-26 | 南方科技大学 | A kind of transmission-type beam splitter and its manufacturing method |
| CN111367088A (en) * | 2020-02-22 | 2020-07-03 | 清华大学 | Orthogonal polarized light imaging diffraction optical device based on super-structured surface |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10126466B2 (en) * | 2016-01-29 | 2018-11-13 | The Board Of Trustees Of The Leland Stanford Junior University | Spatially multiplexed dielectric metasurface optical elements |
| CN109799611B (en) * | 2019-01-29 | 2021-06-22 | 中山大学 | Design method of achromatic super-structure lens and achromatic super-structure lens |
| CN112505808B (en) * | 2020-12-09 | 2021-10-08 | 华中科技大学 | Long-wave infrared broadband achromatic super-surface lens |
| CN114063202B (en) * | 2021-12-06 | 2022-12-06 | 清华大学深圳国际研究生院 | Multifunctional super-structured lens capable of being regulated and controlled by any polarization state and manufacturing method thereof |
-
2022
- 2022-03-02 CN CN202210203651.5A patent/CN114527569B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103296476A (en) * | 2012-02-29 | 2013-09-11 | 深圳光启创新技术有限公司 | Multi-beam lens antenna |
| CN107203050A (en) * | 2016-11-28 | 2017-09-26 | 四川大学 | Double vision integration imaging 3D display methods based on holographic optical elements (HOE) |
| CN109239912A (en) * | 2017-07-10 | 2019-01-18 | 三星电子株式会社 | Light-beam scanner and Optical devices including it |
| CN109507765A (en) * | 2018-12-28 | 2019-03-22 | 中国科学院苏州生物医学工程技术研究所 | The generation method of super lens micro-structure, the miniature two-photon microscopic system based on super lens |
| CN109683334A (en) * | 2019-01-16 | 2019-04-26 | 南方科技大学 | A kind of transmission-type beam splitter and its manufacturing method |
| CN111367088A (en) * | 2020-02-22 | 2020-07-03 | 清华大学 | Orthogonal polarized light imaging diffraction optical device based on super-structured surface |
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