CN114518704A - Radio frequency impedance matching device and method - Google Patents

Radio frequency impedance matching device and method Download PDF

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CN114518704A
CN114518704A CN202111600893.XA CN202111600893A CN114518704A CN 114518704 A CN114518704 A CN 114518704A CN 202111600893 A CN202111600893 A CN 202111600893A CN 114518704 A CN114518704 A CN 114518704A
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impedance
variable
variable impedance
radio frequency
circuit
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乐卫平
姚志毅
张桂东
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Shenzhen CSL Vacuum Science and Technology Co Ltd
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Shenzhen CSL Vacuum Science and Technology Co Ltd
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    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B11/00—Automatic controllers
    • G05B11/01—Automatic controllers electric
    • G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
    • G05B11/42—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a characteristic which is both proportional and time-dependent, e.g. P. I., P. I. D.

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Abstract

The present application relates to a radio frequency impedance matching device and method, the radio frequency impedance matching device comprising: the device comprises a sensor module, a fractional order controller, a driving module and a variable impedance circuit. The method comprises the steps of detecting the radio frequency output impedance of a radio frequency generating device and the current impedance of a variable impedance circuit through a sensor module, calculating the current error impedance of the variable impedance circuit through a fractional order controller, determining the adjustment amount of the variable impedance circuit through a fractional order PID control algorithm, and driving the variable impedance circuit through a driving module to complete impedance adjustment so as to match the impedance. The fractional order PID control algorithm executed in the fractional order controller is provided with an integral term fractional order factor and a differential term fractional order factor, the integral term fractional order factor influences the steady-state precision of the impedance of the variable impedance circuit, and the integral term fractional order factor influences the overshoot of the impedance of the variable impedance circuit.

Description

Radio frequency impedance matching device and method
Technical Field
The present application relates to automation control technologies, and in particular, to a radio frequency impedance matching apparatus and method.
Background
The Radio Frequency (RF) generating device is used for generating a Radio Frequency electric signal with a specific Frequency, can provide Radio Frequency power and is applied to various scenes needing the Radio Frequency signal. The radio frequency generating device is combined with the plasma chamber, and radio frequency power is transmitted to the plasma chamber, so that plasmas used for etching, chemical vapor deposition and other processes can be excited and generated. However, in general, the nonlinear load impedance of the plasma chamber is not equal to the constant output impedance of the rf generator, and a relatively serious impedance imbalance exists between the rf generator and the plasma chamber, so that a large reflected power exists on the rf transmission line between the rf generator and the plasma chamber, and the power generated by the rf generator cannot be completely transmitted to the plasma chamber.
Therefore, in the conventional art, an rf impedance matching device is disposed between the rf generating device and the plasma chamber to adjust the impedance in the circuit so as to match the impedance. In the implementation process, the inventor finds that the traditional radio frequency impedance matching device has the problems of low matching speed and low matching precision.
Disclosure of Invention
Therefore, it is necessary to provide a radio frequency impedance matching device for solving the problem of low matching speed and low precision.
In one aspect, in one embodiment, there is provided a radio frequency impedance matching apparatus, including: the system comprises a sensor module, a fractional order controller, a driving module and a variable impedance circuit;
the variable impedance circuit is used for respectively connecting the radio frequency generating device and the plasma cavity, and the sensor module is used for detecting the radio frequency output impedance of the radio frequency generating device and the current impedance of the variable impedance circuit and transmitting the radio frequency output impedance and the current impedance to the fractional order controller;
the fractional order controller is respectively connected with the sensor module and the driving module and used for obtaining the current error impedance of the variable impedance circuit according to the radio frequency output impedance and the current impedance of the variable impedance circuit, obtaining the impedance adjustment quantity of the variable impedance circuit based on a fractional order PID control algorithm, generating an adjustment instruction according to the impedance adjustment quantity and sending the adjustment instruction to the driving module; the current error impedance is obtained according to the difference between the target impedance of the variable impedance circuit and the current impedance of the variable impedance circuit during impedance matching;
and the driving module is used for adjusting the current impedance of the variable impedance circuit according to the adjusting instruction so as to match the radio frequency output impedance with the input impedance of the matching network.
In one embodiment, the fractional order controller comprises an error calculation unit, a fractional order PID control unit and an instruction generation unit;
the error calculation unit is connected with the sensor module and used for receiving the radio frequency output impedance detected by the sensor module and the current impedance of the variable impedance circuit, taking the radio frequency output impedance as the input impedance of the matching network, bringing the radio frequency output impedance into a preset functional relation between the impedance of the variable impedance circuit and the input impedance of the matching network to obtain the target impedance of the variable impedance circuit during impedance matching, and obtaining the current error impedance of the variable impedance circuit according to the difference between the target impedance of the variable impedance circuit and the current impedance of the variable impedance circuit;
the fractional order PID control unit is connected with the error calculation unit and is used for substituting the current error impedance of the variable impedance circuit into a fractional order PID control algorithm to obtain the impedance adjustment quantity of the variable impedance circuit;
the instruction generating unit is respectively connected with the fractional order PID control unit and the driving module and used for generating an adjusting instruction according to the impedance adjusting quantity and sending the adjusting instruction to the driving module.
In one embodiment, the variable impedance circuit includes at least one variable impedance element.
In one embodiment, the variable impedance circuit includes a first variable impedance element and a second variable impedance element;
the sensor module is used for detecting the radio frequency output impedance of the radio frequency generating device, the current impedance of the first variable impedance element and the current impedance of the second variable impedance element and transmitting the detected impedances to the error calculating unit;
the error calculation unit is connected with the sensor module and is used for receiving the radio frequency output impedance detected by the sensor module, the current impedance of the first variable impedance element and the current impedance of the second variable impedance element, and the radio frequency output impedance is taken as the input impedance of the matching network and is brought into a preset functional relation of the impedance of the first variable impedance element, the impedance of the second variable impedance element and the input impedance of the matching network to obtain the target impedance of the first variable impedance element and the target impedance of the second variable impedance element when the impedances are matched, and obtaining a present error impedance of the first variable impedance element based on a difference between the target impedance of the first variable impedance element and the present impedance of the first variable impedance element, obtaining the current error impedance of the second variable impedance element according to the difference between the target impedance of the second variable impedance element and the current impedance of the second variable impedance element;
the fractional order PID control unit is connected with the error calculation unit and is used for substituting the current error impedance of the first variable impedance element and the current error impedance of the second variable impedance element into a fractional order PID control algorithm to obtain the impedance adjustment quantity of the first variable impedance element and the impedance adjustment quantity of the second variable impedance element;
the instruction generating unit is respectively connected with the fractional order PID control unit and the driving module and is used for generating an adjusting instruction according to the impedance adjusting quantity of the first variable impedance element and the impedance adjusting quantity of the second variable impedance element and sending the adjusting instruction to the driving module;
and the driving module is used for adjusting the current impedance of the first variable impedance element and the current impedance of the second variable impedance element according to the adjusting instruction so as to match the radio frequency output impedance with the input impedance of the matching network.
In one embodiment, the integral term fractional order factor of the fractional order PID control algorithm is greater than zero and the differential term fractional order factor is less than two.
In one embodiment, the first variable impedance element is a variable inductor or a variable capacitor.
In another aspect, in one embodiment, there is provided a radio frequency impedance matching method applied to the fractional order controller of claim 1, comprising:
receiving the radio frequency output impedance of the radio frequency generating device and the current impedance of the variable impedance circuit, which are sent by the sensor module;
obtaining the current error impedance of the variable impedance circuit according to the radio frequency output impedance and the variable impedance circuit; the current error impedance is obtained according to the difference between the target impedance of the variable impedance circuit and the current impedance of the variable impedance circuit during impedance matching;
obtaining the impedance adjustment quantity of the variable impedance circuit based on a fractional order PID control algorithm according to the current error impedance of the variable impedance circuit;
generating an adjusting instruction according to the impedance adjusting quantity and sending the adjusting instruction to a driving module; the adjustment instruction is used for controlling the driving module to adjust the impedance of the variable impedance circuit according to the impedance adjustment amount so as to enable the radio frequency output impedance to be matched with the input impedance of the matching network.
In one embodiment, the step of obtaining the current error impedance of the variable impedance circuit based on the rf output impedance and the variable impedance circuit comprises:
taking the radio frequency output impedance as the input impedance of the matching network, and bringing the radio frequency output impedance into a preset functional relation between the impedance of the variable impedance circuit and the input impedance of the matching network to obtain the target impedance of the variable impedance circuit during impedance matching;
and obtaining the current error impedance of the variable impedance circuit according to the difference between the target impedance of the variable impedance circuit and the current impedance of the variable impedance circuit.
In one embodiment, the variable impedance circuit includes at least one variable impedance element, and before the step of receiving the radio frequency output impedance of the radio frequency generating device and the current impedance of the variable impedance circuit transmitted by the sensor module, the variable impedance circuit further includes:
and obtaining a functional relation between the input impedance of the matching network and the impedance of each variable impedance element through modeling according to the topological relation of each variable impedance element.
In one embodiment, the integral term fractional order factor of the fractional order PID control algorithm is greater than zero and the differential term fractional order factor is less than two.
One of the above technical solutions has the following advantages and beneficial effects:
the method comprises the steps of detecting the radio frequency output impedance of a radio frequency generating device and the current impedance of a variable impedance circuit through a sensor module, calculating the current error impedance of the variable impedance circuit through a fractional order controller, determining the adjustment amount of the variable impedance circuit through a fractional order PID control algorithm, and driving the variable impedance circuit through a driving module to complete impedance adjustment so as to enable impedance matching. The fractional order PID control algorithm executed in the fractional order controller has the characteristic that the traditional PID control algorithm is strong in robustness, and two parameters, namely an integral term fractional order factor and a differential term fractional order factor, are added, the integral term fractional order factor influences the steady-state precision of the impedance of the variable impedance circuit, and the integral term fractional order factor influences the overshoot of the impedance of the variable impedance circuit.
Drawings
Fig. 1 is a schematic structural diagram of an rf impedance matching device according to an embodiment of the present application.
Detailed Description
To facilitate an understanding of the present application, the present application will now be described more fully with reference to the accompanying drawings. Preferred embodiments of the present application are shown in the drawings. This application may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "connected" to another element, it can be directly connected to the other element and be integral therewith, or intervening elements may also be present. The terms "mounted," "one end," "the other end," and the like as used herein are for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the description of the present application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
In one embodiment, as shown in fig. 1, the present application provides a radio frequency impedance matching device comprising: a sensor module 100, a fractional order controller 200, a driver module 300, and a variable impedance circuit 400;
the variable impedance circuit 400 is used for connecting the rf generator and the plasma chamber, respectively, and the sensor module 100 is used for detecting the rf output impedance of the rf generator and the current impedance of the variable impedance circuit, and transmitting the detected rf output impedance and current impedance to the fractional order controller 200;
the fractional order controller 200 is respectively connected with the sensor module 100 and the driving module 300, and is configured to obtain a current error impedance of the variable impedance circuit according to the radio frequency output impedance and a current impedance of the variable impedance circuit, obtain an impedance adjustment amount of the variable impedance circuit based on a fractional order PID control algorithm, generate an adjustment instruction according to the impedance adjustment amount, and send the adjustment instruction to the driving module 300; the current error impedance is obtained according to the difference between the target impedance of the variable impedance circuit and the current impedance of the variable impedance circuit during impedance matching;
and the driving module 300 is configured to adjust the current impedance of the variable impedance circuit according to the adjustment instruction, so that the radio frequency output impedance is matched with the matching network input impedance.
The matching network is a matching network formed by the variable impedance circuit 400 and the plasma chamber, and when the radio frequency output impedance of the radio frequency generating device is equal to the input impedance of the matching network, the impedance is matched. The rf output impedance of the rf generating device is generally fixed and may be, for example, 50 ohms.
Specifically, the sensor module 100 is arranged in different ways according to different detection ways. For example, the sensor module 100 may be disposed on a radio frequency transmission line between the radio frequency generating device and the variable impedance circuit 400; the sensor module 100 may be connected to the output of the rf generator through a first detection terminal and to the variable impedance circuit 400 through a second detection terminal. The sensor module 100 outputs a detection result according to a set detection cycle.
When the time reaches the detection time, the sensor module 100 detects and outputs the rf output impedance and the current impedance of the variable impedance circuit to the fractional order controller 200. The fractional order controller 200 calculates the current error impedance of the variable impedance circuit according to the radio frequency output impedance and the current impedance of the variable impedance circuit through some conventional algorithms in the field, and brings the current error impedance into the fractional order PID control algorithm to obtain the impedance adjustment amount of the variable impedance circuit. The fractional controller 200 controls the driving module 300 to adjust the current impedance of the variable impedance circuit by the impedance adjustment amount, and the adjusted current impedance of the variable impedance circuit becomes the current impedance of the variable impedance circuit detected and output by the sensor module 100 when the next detection time comes. Because of control errors caused by a plurality of factors in actual conditions, the current impedance of the variable impedance circuit is not completely consistent with the target impedance after being adjusted according to the impedance adjustment amount. Therefore, the above method needs to be circulated until the current error impedance of the variable impedance circuit meets a certain condition, and it is determined that the impedance reaches matching in the current state.
The impedance of the variable impedance circuit is used as a control object of a fractional order PID control algorithm, and impedance matching is used as a control target. It can be understood that the control target in the ideal case is to make the impedance of the variable impedance circuit stably equal to the target impedance of the variable impedance circuit, but in the real case, a control error always occurs, so the control target is considered to be reached when the input quantity of the fractional order PID control algorithm, that is, the current error of the variable impedance circuit, is converged within an interval. In one example, the fractional order controller: r (t) is a setting input; y (t) is system input; e (t) r (t) -y (t) is the tracking error, and u (t) is the control input.
Preferably, the integral term fractional order factor λ of the fractional order PID control algorithm is greater than 0, and the differential term fractional order factor μ is less than 2, and the transfer formula of the fractional order PID control algorithm is as follows. Wherein Kp，KiAnd K anddproportional, integral and differential gains, respectively, and λ is the integral term fractional order factor and μ differential term fractional order factor.
Figure RE-GDA0003602245550000071
In the radio frequency impedance matching device, the sensor module 100 detects the radio frequency output impedance of the radio frequency generator and the current impedance of the variable impedance circuit, the fractional order controller 200 calculates the current error impedance of the variable impedance circuit, the fractional order PID control algorithm is used to determine the adjustment amount of the variable impedance circuit, and the driving module 300 drives the variable impedance circuit 400 to complete impedance adjustment so as to match the impedances. In addition to the characteristic of strong robustness of the traditional PID control algorithm, the fractional order PID control algorithm executed in the fractional order controller 200 adds two parameters, namely an integral term fractional order factor and a differential term fractional order factor, wherein the integral term fractional order factor affects the steady-state accuracy of the impedance of the variable impedance circuit 400, and the integral term fractional order factor affects the overshoot of the impedance of the variable impedance circuit 400.
In one embodiment, the variable impedance circuit 400 includes at least one variable impedance element. In another embodiment, the variable impedance element is a variable inductance or a variable capacitance. When the variable impedance circuit 400 includes two variable impedance elements, the two impedance elements may be in a parallel relationship or a series relationship.
The driving module 300 is used for driving and adjusting each variable impedance element in the variable impedance circuit 400.
The driving module 300 converts the driving method according to the impedance adjusting method of the variable impedance element. In one embodiment, the impedance of the variable impedance element is adjusted by mechanically pushing and pulling an adjustment member disposed thereon, and the driving module 300 is an electrically driven mechanical device that drives and adjusts the variable impedance element by mechanically pushing and pulling. In one embodiment, the variable impedance element is electrically driven to adjust its impedance according to the adjustment driving signal of the adjustment port, and the driving module 300 is an electrically driven electrical structure device for generating the adjustment driving signal according to the adjustment command output by the fractional order controller 200.
In one embodiment, the sensor module 100 includes a sensor and a calculating unit, which are connected to each other, the sensor is used for detecting the voltage, the current, the forward power and the reverse power on the rf transmission line between the rf generating device and the variable impedance circuit 400, and the calculating unit is used for calculating the rf output impedance of the rf generating device and the current impedance of the variable impedance circuit according to a preset electrical relationship model of each element formed according to the system topology, or calculating the rf output impedance of the rf generating device and the current impedance of each variable impedance element.
In one embodiment, the fractional order controller 200 includes an error calculation unit 210, a fractional order PID control unit 220, and an instruction generation unit 230;
the error calculating unit 210 is connected to the sensor module 100 and is used for receiving the RF output impedance Z detected by the sensor module 100outAnd the current impedance Z of the variable impedance circuit, and taking the radio frequency output impedance as the input impedance Z of the matching networkinBringing the impedance of the variable impedance circuit into a preset functional relation between the impedance of the variable impedance circuit and the input impedance of the matching network to obtain the target impedance Z 'of the variable impedance circuit during impedance matching, and obtaining the current error impedance delta Z of the variable impedance circuit according to the difference between the target impedance Z' of the variable impedance circuit and the current impedance Z of the variable impedance circuit;
the fractional order PID control unit 220 is connected to the error calculation unit 210, and is configured to bring the current error impedance Δ Z of the variable impedance circuit into a fractional order PID control algorithm to obtain an impedance adjustment amount Δ Z' of the variable impedance circuit;
the instruction generating unit 230 is connected to the fractional PID control unit 220 and the driving module 300, respectively, and configured to generate an adjustment instruction according to the impedance adjustment amount Δ Z' and send the adjustment instruction to the driving module 300.
Specifically, the preset functional relation between the impedance of the variable impedance circuit and the input impedance of the matching network is obtained by modeling according to the topological structure of the device before the device works. In the device, the target impedance of the variable impedance circuit is determined according to the preset functional relation between the impedance of the variable impedance circuit and the input impedance of the matching network, the algorithm complexity is low, and the operation speed is high.
In one embodiment, the variable impedance circuit 400 is composed of a plurality of variable impedance elements, and the sensor module 100 detects the RF output impedance ZoutAnd simultaneously detecting the current impedance of each variable impedance element, and calculating the current impedance Z of the whole variable impedance circuit according to the topological structure model of the variable impedance circuit.
The functional relationship between the impedance of the variable impedance circuit and the input impedance of the matching network is as follows:
Zin＝f(Z)
will ZoutAs ZinCarrying the impedance matching circuit into the target impedance Z 'to obtain the target impedance Z' of the variable impedance circuit during impedance matching;
the current error impedance Δ Z of the variable impedance circuit is obtained according to the following equation.
ΔZ＝|Z-Z'|
Then, Δ Z is input into the fractional PID control algorithm to obtain an impedance adjustment amount Δ Z' of the variable impedance circuit, and since the variable impedance circuit in this embodiment includes a plurality of variable impedance elements, the instruction generating unit 230 is further configured to obtain an impedance adjustment amount of each variable impedance element according to the topology model of each variable impedance circuit, generate an adjustment instruction according to the impedance adjustment amount of each variable impedance element, and control the driving module 300 to adjust the current impedance of each variable impedance element.
In one embodiment, the variable impedance circuit 300 includes a first variable impedance element and a second variable impedance element.
The sensor module 100 is used for detecting the RF output impedance Z of the RF generating deviceoutThe current impedance Z of the first variable impedance element1And the present impedance Z of the second variable impedance element2And transmitted to the error calculation unit 210.
The error calculating unit 210 is connected to the sensor module 100 and is used for receiving the RF output impedance Z detected by the sensor moduleoutThe current impedance Z of the first variable impedance element1And the present impedance Z of the second variable impedance element2And output the radio frequency to impedance ZoutAs the input impedance Z of the matching networkinBringing in the impedance Z of the predetermined first variable impedance element1Impedance Z of the second variable impedance element2And matching network input impedance ZinThe functional relationship of (a) to (b),
Zin＝f(Z1,Z2)
obtaining a target impedance Z 'of the first variable impedance element at the time of impedance matching'1And a second variable impedanceTarget impedance Z 'of element'2And according to the target impedance Z 'of the first variable impedance element'1And the difference Z between the present impedance of the first variable impedance element1Obtaining the current error impedance Delta Z of the first variable impedance element1And according to the target impedance Z 'of the second variable impedance element'2And the present impedance Z of the second variable impedance element2The difference is obtained to obtain the current error impedance Delta Z of the second variable impedance element2。
Optionally, according to the formula: delta Z1＝|Z1-Z'1|,ΔZ2＝|Z2-Z'2L obtaining the current error impedance Δ Z of the first variable impedance element1And the present error impedance deltaz of the second variable impedance element2。
The fractional order PID control unit 220 is connected to the error calculation unit 210 for respectively calculating the current error impedance Δ Z of the first variable impedance element1And the present error impedance deltaz of the second variable impedance element2And obtaining an impedance adjustment amount delta Z 'of the first variable impedance element by carrying in a fractional order PID control algorithm'1And an impedance adjustment amount [ Delta ] Z 'of the second variable impedance element'2。
The instruction generating unit 230 is respectively connected to the fractional order PID control unit 220 and the driving module 300, and is used for adjusting the amount Δ Z 'according to the impedance of the first variable impedance element'1And an impedance adjustment amount [ Delta ] Z 'of the second variable impedance element'2Generating an adjusting instruction and sending the adjusting instruction to a driving module;
a driving module 300 for adjusting the current impedance Z of the first variable impedance element according to the adjustment instruction1And the present impedance Z of the second variable impedance element2To match the rf output impedance to the matching network input impedance.
In one embodiment, the first variable impedance element is a variable capacitance or a variable electron.
In one embodiment, the second variable impedance element is a variable capacitance or a variable electron.
In one embodiment, two fractional order PID control algorithm models are arranged in the fractional order PID control unit and are respectively used for controlling the second fractional order PID control algorithm modelThe error of one variable impedance element and the error of a second variable impedance element. Respectively connecting the current error impedance Δ Z of the first variable impedance element1And the present error impedance deltaz of the second variable impedance element2And obtaining an impedance adjustment amount delta Z 'of the first variable impedance element by carrying in a fractional order PID control algorithm'1And an impedance adjustment amount [ Delta ] Z 'of the second variable impedance element'2The method comprises the following steps:
the current error impedance Delta Z of the first variable impedance element1Substituting a first fractional order PID control algorithm to obtain an impedance adjustment quantity delta Z 'of the first variable impedance element'1；
The current error impedance Delta Z of the second variable impedance element2Substituting a second fractional-order PID control algorithm to obtain an impedance adjustment quantity delta Z 'of the second variable impedance element'2。
An embodiment of the present application further provides a radio frequency impedance matching method, which is applied to any fractional order controller 200, and includes:
step S520, receiving the radio frequency output impedance of the radio frequency generating device and the current impedance of the variable impedance circuit sent by the sensor module 100;
step S530, obtaining the current error impedance of the variable impedance circuit according to the radio frequency output impedance and the variable impedance circuit; the current error impedance is obtained according to the difference between the target impedance of the variable impedance circuit and the current impedance of the variable impedance circuit during impedance matching;
step S540, obtaining the impedance adjustment quantity of the variable impedance circuit based on a fractional order PID control algorithm according to the current error impedance of the variable impedance circuit;
step S550, generating an adjustment instruction according to the impedance adjustment amount and sending the adjustment instruction to the driving module 300; the adjustment instruction is used to control the driving module 300 to adjust the impedance of the variable impedance circuit according to the impedance adjustment amount, so that the rf output impedance is matched with the matching network input impedance.
For specific definition of the rf impedance matching method, reference may be made to the above definition of the rf impedance matching device, which is not described herein again.
In one embodiment, the step of obtaining the present error impedance of the variable impedance circuit based on the rf output impedance and the variable impedance circuit comprises:
step S531, taking the radio frequency output impedance as the input impedance of the matching network, and bringing the radio frequency output impedance into a preset functional relation between the impedance of the variable impedance circuit and the input impedance of the matching network to obtain the target impedance of the variable impedance circuit during impedance matching;
in step S532, the current error impedance of the variable impedance circuit is obtained according to the difference between the target impedance of the variable impedance circuit and the current impedance of the variable impedance circuit.
In one embodiment, the variable impedance circuit includes at least one variable impedance element, and further includes, before the step of receiving the radio frequency output impedance of the radio frequency generating device and the current impedance of the variable impedance circuit transmitted by the sensor module 100:
step S510, according to the topological relation of each variable impedance element, a functional relation between the input impedance of the matching network and the impedance of each variable impedance element is obtained through modeling.
In one embodiment, the integral term fractional order factor of the fractional order PID control algorithm is greater than zero and the differential term fractional order factor is less than two.
In an embodiment, an rf impedance matching method is provided, which is applied to the fractional order controller 200 of the rf impedance matching apparatus, wherein the variable impedance circuit in the rf impedance matching apparatus includes a first variable impedance element and a second variable impedance element.
Receiving the radio frequency output impedance, the present impedance of the first variable impedance element and the present impedance of the second variable impedance element detected by the sensor module 100;
taking the radio frequency output impedance as the input impedance of the matching network, and bringing the radio frequency output impedance into a preset functional relation of the impedance of the first variable impedance element, the impedance of the second variable impedance element and the input impedance of the matching network to obtain the target impedance of the first variable impedance element and the target impedance of the second variable impedance element when the impedances are matched;
obtaining the current error impedance of the first variable impedance element according to the difference between the target impedance of the first variable impedance element and the current impedance of the first variable impedance element;
obtaining the current error impedance of the second variable impedance element according to the difference between the target impedance of the second variable impedance element and the current impedance of the second variable impedance element;
substituting the current error impedance of the first variable impedance element into a first fractional order PID control algorithm to obtain an impedance adjustment quantity of the first variable impedance element;
substituting the current error impedance of the second variable impedance element into a second fractional order PID control algorithm to obtain the impedance adjustment quantity of the second variable impedance element;
generating an adjusting instruction according to the impedance adjusting amount of the first variable impedance element and the impedance adjusting amount of the second variable impedance element, and sending the adjusting instruction to the driving module; the adjusting instruction is used for controlling the driving module to adjust the current impedance of the first variable impedance element and the current impedance of the second variable impedance element so as to enable the radio frequency output impedance to be matched with the input impedance of the matching network.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present application, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, and these are all within the scope of protection of the present application. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims (10)

1. A radio frequency impedance matching device, comprising: the system comprises a sensor module, a fractional order controller, a driving module and a variable impedance circuit;
the variable impedance circuit is used for being respectively connected with a radio frequency generating device and a plasma chamber, and the sensor module is used for detecting the radio frequency output impedance of the radio frequency generating device and the current impedance of the variable impedance circuit and transmitting the radio frequency output impedance and the current impedance to the fractional order controller;
the fractional order controller is respectively connected with the sensor module and the driving module and used for obtaining the current error impedance of the variable impedance circuit according to the radio frequency output impedance and the current impedance of the variable impedance circuit, obtaining the impedance adjustment quantity of the variable impedance circuit based on a fractional order PID control algorithm, generating an adjustment instruction according to the impedance adjustment quantity and sending the adjustment instruction to the driving module; the current error impedance is obtained according to the difference between the target impedance of the variable impedance circuit and the current impedance of the variable impedance circuit during impedance matching;
and the driving module is used for adjusting the current impedance of the variable impedance circuit according to the adjusting instruction so as to enable the radio frequency output impedance to be matched with the input impedance of the matching network.
2. The radio frequency impedance matching device according to claim 1, wherein the fractional order controller includes an error calculation unit, a fractional order PID control unit, and an instruction generation unit;
the error calculation unit is connected with the sensor module and used for receiving the radio frequency output impedance detected by the sensor module and the current impedance of the variable impedance circuit, taking the radio frequency output impedance as a matching network input impedance, substituting a preset function relation between the impedance of the variable impedance circuit and the matching network input impedance to obtain a target impedance of the variable impedance circuit during impedance matching, and obtaining the current error impedance of the variable impedance circuit according to the difference between the target impedance of the variable impedance circuit and the current impedance of the variable impedance circuit;
the fractional order PID control unit is connected with the error calculation unit and is used for substituting the current error impedance of the variable impedance circuit into a fractional order PID control algorithm to obtain the impedance adjustment quantity of the variable impedance circuit;
and the instruction generating unit is respectively connected with the fractional order PID control unit and the driving module and is used for generating an adjusting instruction according to the impedance adjusting quantity and sending the adjusting instruction to the driving module.
3. The radio frequency impedance matching device of claim 2, wherein the variable impedance circuit comprises at least one variable impedance element.
4. The radio frequency impedance matching device according to claim 3, wherein the variable impedance circuit includes a first variable impedance element and a second variable impedance element;
the sensor module is used for detecting the radio frequency output impedance of the radio frequency generating device, the current impedance of the first variable impedance element and the current impedance of the second variable impedance element and transmitting the detected impedances to the error calculating unit;
the error calculation unit is connected to the sensor module, and is configured to receive the radio frequency output impedance, the current impedance of the first variable impedance element, and the current impedance of the second variable impedance element detected by the sensor module, take the radio frequency output impedance as a matching network input impedance, and bring the radio frequency output impedance into a preset functional relation between the impedance of the first variable impedance element, the impedance of the second variable impedance element, and the matching network input impedance, to obtain a target impedance of the first variable impedance element and a target impedance of the second variable impedance element during impedance matching, obtain a current error impedance of the first variable impedance element according to a difference between the target impedance of the first variable impedance element and the current impedance of the first variable impedance element, and obtain a difference between the target impedance of the second variable impedance element and the current impedance of the second variable impedance element, obtaining the current error impedance of the second variable impedance element;
the fractional order PID control unit is connected with the error calculation unit and is used for respectively substituting the current error impedance of the first variable impedance element and the current error impedance of the second variable impedance element into a fractional order PID control algorithm to obtain the impedance adjustment quantity of the first variable impedance element and the impedance adjustment quantity of the second variable impedance element;
the instruction generating unit is respectively connected with the fractional order PID control unit and the driving module, and is used for generating an adjusting instruction according to the impedance adjusting quantity of the first variable impedance element and the impedance adjusting quantity of the second variable impedance element and sending the adjusting instruction to the driving module;
and the driving module is used for adjusting the current impedance of the first variable impedance element and the current impedance of the second variable impedance element according to the adjusting instruction so as to match the radio frequency output impedance with the input impedance of the matching network.
5. The RF impedance matching device according to claim 4, wherein the integral term fractional order factor of the fractional order PID control algorithm is greater than zero and the differential term fractional order factor is less than two.
6. The radio frequency impedance matching device according to claim 5, wherein the first variable impedance element is a variable inductance or a variable capacitance.
7. A radio frequency impedance matching method applied to the fractional order controller of claim 1, comprising:
receiving the radio frequency output impedance of the radio frequency generating device and the current impedance of the variable impedance circuit which are sent by the sensor module;
obtaining the current error impedance of the variable impedance circuit according to the radio frequency output impedance and the variable impedance circuit; the current error impedance is obtained according to the difference between the target impedance of the variable impedance circuit and the current impedance of the variable impedance circuit during impedance matching;
obtaining the impedance adjustment quantity of the variable impedance circuit based on a fractional order PID control algorithm according to the current error impedance of the variable impedance circuit;
generating an adjusting instruction according to the impedance adjusting quantity and sending the adjusting instruction to the driving module; the adjustment instruction is used for controlling the driving module to adjust the impedance of the variable impedance circuit according to the impedance adjustment amount so as to enable the radio frequency output impedance to be matched with the input impedance of the matching network.
8. The method of claim 7, wherein the step of obtaining a current error impedance of the variable impedance circuit based on the rf output impedance and the variable impedance circuit comprises:
taking the radio frequency output impedance as a matching network input impedance, and bringing the radio frequency output impedance into a preset functional relation between the impedance of the variable impedance circuit and the input impedance of the matching network to obtain a target impedance of the variable impedance circuit during impedance matching;
and obtaining the current error impedance of the variable impedance circuit according to the difference between the target impedance of the variable impedance circuit and the current impedance of the variable impedance circuit.
9. The radio frequency impedance matching method according to claim 8, wherein the variable impedance circuit comprises at least one variable impedance element, and further comprises, before the step of receiving the radio frequency output impedance of the radio frequency generating device transmitted by the sensor module and the current impedance of the variable impedance circuit:
and obtaining a functional relation between the input impedance of the matching network and the impedance of each variable impedance element through modeling according to the topological relation of each variable impedance element.
10. The rf impedance matching method according to claim 8 or 9, wherein the integral term fractional order factor of the fractional order PID control algorithm is greater than zero and the differential term fractional order factor is less than two.
CN202111600893.XA 2021-12-24 2021-12-24 Radio frequency impedance matching device and method Pending CN114518704A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115622377A (en) * 2022-12-21 2023-01-17 深圳市恒运昌真空技术有限公司 Impedance matching method and system based on fractional order element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115622377A (en) * 2022-12-21 2023-01-17 深圳市恒运昌真空技术有限公司 Impedance matching method and system based on fractional order element

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