CN114505757B - Metallographic polishing machine sample grinding clamp and metallographic polishing machine - Google Patents

Metallographic polishing machine sample grinding clamp and metallographic polishing machine Download PDF

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Publication number
CN114505757B
CN114505757B CN202210063924.0A CN202210063924A CN114505757B CN 114505757 B CN114505757 B CN 114505757B CN 202210063924 A CN202210063924 A CN 202210063924A CN 114505757 B CN114505757 B CN 114505757B
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CN
China
Prior art keywords
sleeve
polishing machine
clamping
rod
metallographic polishing
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Active
Application number
CN202210063924.0A
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Chinese (zh)
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CN114505757A (en
Inventor
刘平
王磊
贺艳明
石磊
金霞
闾川阳
李华鑫
郑文健
马英鹤
顾小龙
杨建国
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang Yatong New Materials Co ltd
Zhejiang University of Technology ZJUT
Original Assignee
Zhejiang Yatong New Materials Co ltd
Zhejiang University of Technology ZJUT
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Application filed by Zhejiang Yatong New Materials Co ltd, Zhejiang University of Technology ZJUT filed Critical Zhejiang Yatong New Materials Co ltd
Priority to CN202210063924.0A priority Critical patent/CN114505757B/en
Publication of CN114505757A publication Critical patent/CN114505757A/en
Application granted granted Critical
Publication of CN114505757B publication Critical patent/CN114505757B/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B19/00Single-purpose machines or devices for particular grinding operations not covered by any other main group
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • B24B29/02Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/02Frames; Beds; Carriages
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/06Work supports, e.g. adjustable steadies
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/28Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/286Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q involving mechanical work, e.g. chopping, disintegrating, compacting, homogenising
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/28Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/32Polishing; Etching
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/28Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/286Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q involving mechanical work, e.g. chopping, disintegrating, compacting, homogenising
    • G01N2001/2866Grinding or homogeneising
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

The invention provides a metallographic polishing machine sample grinding clamp, which comprises: support and fixture, wherein: the clamping mechanism comprises a connector and a clamping head, the connector can be horizontally adjusted and mounted on the support, the clamping head can be vertically adjusted and mounted on the connector, at least three clamping jaws capable of being horizontally adjusted are arranged on the clamping head, and all clamping jaws are circumferentially distributed. The metallographic polishing machine comprises the sample polishing clamp. The invention solves the problem that polishing and grinding of samples with larger physical property parameter difference are not easy to control, and improves the manufacturing efficiency of the samples. And the whole clamp has simple structure and high operation flexibility, can be well adapted to changeable working environments, and is beneficial to reducing the cost and improving the efficiency.

Description

Metallographic polishing machine sample grinding clamp and metallographic polishing machine
Technical Field
The invention relates to the technical field of material sample preparation, in particular to a metallographic polishing machine sample grinding clamp and a metallographic polishing machine.
Background
With the development of material technology and welding technology, the connection technology of dissimilar materials is mature, and the connection of materials with larger physical parameters is very popular, so that the connection mode is researched, and the observation of welding seams of material connection is an important step. The preparation polishing and grinding of the sample is very important, however, the sample is prepared on a general metallographic polishing and grinding machine due to overlarge differences of physical parameters of materials, such as connection of diamond and copper, the situation that one side is excessively ground and the other side is not ground often occurs, the manual sample grinding is low in efficiency and the final sample preparation effect is not ideal.
Disclosure of Invention
In order to solve the technical problems in the background art, the invention provides a metallographic polishing machine sample grinding clamp and a metallographic polishing machine.
The invention provides a metallographic polishing machine sample grinding clamp, which comprises: support and fixture, wherein:
the clamping mechanism comprises a connector and a clamping head, the connector can be horizontally adjusted and mounted on the support, the clamping head can be vertically adjusted and mounted on the connector, at least three clamping jaws capable of being horizontally adjusted are arranged on the clamping head, and all clamping jaws are circumferentially distributed.
Preferably, the clamping device further comprises a pressing piece which is arranged on the clamping head in an up-down adjustable mode, and the pressing piece is located on the inner side of all clamping jaws.
Preferably, the pressure application member is mounted eccentrically on the gripping head.
Preferably, the pressure member is an elastic element.
Preferably, the pressure member is a cylindrical spring.
Preferably, a sleeve A which is vertically fixed is arranged on the clamping head and positioned on the inner sides of all clamping jaws, and a fastening bolt is arranged on the side wall of the sleeve A; one end of the pressing member is located in the sleeve a and is fixed by the fastening bolt a.
Preferably, the clamping jaw comprises a base body part and clamping parts, the base body part is horizontally arranged on the clamping head in an adjustable mode, the clamping parts are positioned on one side, close to the sleeve A, of the base body part and protrude out of the wall surface of the base body part, and the clamping parts of the clamping jaws are all positioned below the sleeve A.
Preferably, the clamping head comprises a connecting rod and a guide rod, and the connecting rod is arranged on the connecting head in an up-and-down adjustable way; the guide rods are horizontally arranged, one end of each guide rod is fixed with the connecting rod, a plurality of guide rods are arranged, and all the guide rods are circumferentially distributed around the connecting rod; the clamping jaw is provided with a sliding sleeve A which is slidably sleeved on the guide rod and is fixed by a fastening bolt B.
Preferably, one end of the guide rod, which is far away from the connecting rod, is provided with a limiting part A.
Preferably, the cross section of the guide rod is rectangular, and the sliding sleeve A is a rectangular sleeve matched with the guide rod.
Preferably, the bracket comprises a vertical rod and a cross rod fixed with the vertical rod; the connector comprises a sleeve B and a sliding sleeve B, wherein the sleeve B is vertically arranged, and the sliding sleeve B is fixed at the top end of the sleeve B; the sliding sleeve B is slidably arranged on the cross rod and is fixed by the fastening bolt C; the connecting rod is vertically arranged, and the top end of the connecting rod is positioned in the sleeve B and is fixed by the fastening bolt D.
Preferably, the lower port of the sleeve B is provided with an anti-falling stop block, the side wall of the top end of the connecting rod is provided with a limit stop block, and the limit stop block is positioned above the anti-falling stop block.
Preferably, the sleeve B is a rectangular sleeve and the connecting rod is a rectangular rod.
Preferably, the cross section of the cross rod is rectangular, and the sliding sleeve B is a rectangular sleeve matched with the cross rod.
Preferably, one end of the cross rod is fixed with the vertical rod, and the other end of the cross rod is provided with a limiting part B.
The metallographic polishing machine comprises the sample polishing clamp.
The clamping mechanism comprises a connector and a clamping head, wherein the connector is horizontally arranged on a bracket, the clamping head is vertically arranged on the connector, at least three clamping jaws which can be horizontally adjusted are arranged on the clamping head, and all clamping jaws are circumferentially distributed. The structure is arranged so that the clamping jaw can be adjusted in the horizontal direction and the up-down direction, thereby solving the problem that polishing and grinding of samples with large physical parameter differences are not easy to control, and improving the manufacturing efficiency of the samples. And the whole clamp has simple structure and high operation flexibility, can be well adapted to changeable working environments, and is beneficial to reducing the cost and improving the efficiency.
Drawings
Fig. 1 is a schematic structural diagram of a sample grinding fixture of a metallographic polishing machine.
Fig. 2 is a partial enlarged view of a metallographic polishing machine sample grinding clamp provided by the invention.
Fig. 3 is a schematic diagram of an assembly mode of the connector and the clamping head in the sample grinding fixture of the metallographic polishing machine.
Fig. 4 is a schematic structural diagram of an assembling mode of the pressing piece and the clamping head in the sample polishing clamp of the metallographic polishing machine.
Fig. 5 is a schematic structural diagram of the pressing member in the sample grinding fixture of the metallographic polishing machine.
Fig. 6 is a schematic structural diagram of a metallographic polishing machine according to the present invention.
Fig. 7 is a schematic structural diagram of a metallographic polishing machine according to the present invention.
Detailed Description
Referring to fig. 1-2, a sample grinding fixture for a metallographic polishing machine provided by the invention comprises: support and fixture, wherein:
the fixture comprises a connector 1 and a clamping head 2, wherein the connector 1 can be horizontally adjusted and arranged on a bracket, the clamping head 2 can be vertically adjusted and arranged on the connector 1, at least three clamping jaws 3 which can be horizontally adjusted are arranged on the clamping head 2, and all the clamping jaws 3 are circumferentially distributed.
Specific: the clamping head 2 comprises a connecting rod 201 and a guide rod 202, and the connecting rod 201 is arranged on the connector 1 in an up-and-down adjustable manner; the guide rods 202 are horizontally arranged, one end of each guide rod 202 is fixed with the corresponding connecting rod 201, a plurality of guide rods 202 are arranged, and all the guide rods 202 are circumferentially distributed around the connecting rod 201; the clamping jaw 3 has a sliding sleeve A7, the sliding sleeve A7 being slidably fitted over the guide bar 202 and being fixed by a fastening bolt B8. The sliding sleeve A7 can slide back and forth on the guide rod 202 by unscrewing the fastening bolt B8, so that the horizontal adjustment of the clamping jaw 3 on the clamping head 2 is realized.
Specific: the bracket comprises a vertical rod 10 and a cross rod 11 fixed with the vertical rod 10; the connector 1 comprises a sleeve B101 which is vertically arranged and a sliding sleeve B102 which is fixed at the top end of the sleeve B101; the slide bush B102 is slidably mounted on the cross bar 11 and is fixed by a fastening bolt C12. The sliding sleeve B102 can slide back and forth on the cross rod 11 by unscrewing the fastening bolt C12, so that the horizontal adjustment of the connector 1 is realized. The connecting rod 201 is vertically arranged, and the top end of the connecting rod 201 is located in the sleeve B101 and fixed by the fastening bolt D13. The connecting rod 201 can be moved up and down in the sleeve B101 by unscrewing the fastening bolt D13, so as to realize up and down adjustment of the clamping head 2.
In addition, in order to move the sliding sleeve A7 and the guide rod 202 in the axial direction while remaining fixed in the circumferential direction, in this embodiment, the guide rod 202 has a rectangular cross section, and the sliding sleeve A7 is a rectangular sleeve fitted with the guide rod 202.
In order to prevent the claw 3 from slipping out of the guide rod 202, the end of the guide rod 202 far away from the connecting rod 201 is provided with a limiting part A9, so that the claw 3 is blocked from slipping by the limiting part A9.
Similarly, in this embodiment, the sleeve B101 is a rectangular sleeve, and the connecting rod 201 is a rectangular rod. So that the sleeve B101 and the connecting rod 201 move in the axial direction while remaining fixed in the circumferential direction.
Referring to fig. 3, the lower port of the sleeve B101 is provided with an anti-drop block 14, a limit block 2011 is provided on a side wall of the top end of the connecting rod 201, and the limit block 2011 is located above the anti-drop block 14. To block the connecting rod 201 from slipping off by the anti-slip stopper 14.
In this embodiment, the cross-section of the cross-bar 11 is rectangular, and the sliding sleeve B102 is a rectangular sleeve adapted to the cross-bar 11. So that the sliding sleeve B102 moves axially with the crossbar 11 while remaining fixed in the circumferential direction.
In this embodiment, one end of the cross bar 11 is fixed to the upright 10, and the other end of the cross bar 11 is provided with a limiting portion B15. So as to block the connector 1 from slipping off by the limit part B15.
From the above, the clamping jaw 3 can be adjusted in the horizontal direction and the up-down direction, so that the problem that polishing and grinding of samples with large differences of physical parameters are difficult to control is solved, and the manufacturing efficiency of the samples is improved. And the whole clamp has simple structure and high operation flexibility, can be well adapted to changeable working environments, and is beneficial to reducing the cost and improving the efficiency.
Referring to fig. 4 to 5, the clamping head 2 further comprises a pressing member 4, wherein the pressing member 4 is mounted on the clamping head 2 in an up-down adjustable manner, and the pressing member 4 is positioned on the inner side of all clamping jaws 3. When in operation, the high hardness part (such as diamond) in the part to be grinded (such as a connecting piece of diamond and copper) is positioned below the pressure applying part 4, and the clamping jaw 3 is adjusted to fix the part to be grinded; the pressing member 4 is then adjusted so as to be in contact with the workpiece to be ground and to press the high hardness portion of the workpiece to be ground. So as to achieve the effect of uniform polishing by applying uneven pressure to special samples, namely: the high-hardness part is pressed to obtain a uniform polishing effect when the high-hardness part and the low-hardness part are polished.
Specific: the pressure member 4 is eccentrically mounted on the holding head 2.
Specific: a sleeve A5 which is vertically fixed is arranged on the clamping head 2 and positioned on the inner sides of all clamping jaws 3, and a fastening bolt A6 is arranged on the side wall of the sleeve A5; one end of the pressing member 4 is located in the sleeve A5 and is fixed by a fastening bolt A6. When the pressing member 4 is adjusted, the fastening bolt A6 is loosened, and then the pressing member 4 is pushed up or pulled down to a designated position, and then the fastening bolt A6 is screwed to fix the pressing member 4.
In this embodiment, the pressing member 4 is an elastic member, and the amount of the force applied to the workpiece to be ground is controlled by the amount of expansion and contraction of the pressing member 4.
Specific: the pressure member 4 is a cylindrical spring.
In this embodiment, the clamping jaw 3 includes a base portion 301 and a clamping portion 302, the base portion 301 is mounted on the clamping head 2 in a horizontally adjustable manner, the clamping portion 302 is located on one side of the base portion 301 near the sleeve A5 and protrudes out of a wall surface of the base portion 301, and the clamping portion 302 of each clamping jaw 3 is located below the sleeve A5. When the pressing member 4 is not required to be used, the fastening bolt A6 may be loosened to remove the pressing member 4, at this time, since the grip portion 302 of the jaw 3 is located below the sleeve A5 of the sleeve A5. It can be seen that the sleeve A5 does not interfere with the clamping operation.
Referring to fig. 6-7, a metallographic polishing machine according to the present invention includes a sample polishing jig as described above.
The foregoing is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art, who is within the scope of the present invention, should make equivalent substitutions or modifications according to the technical scheme of the present invention and the inventive concept thereof, and should be covered by the scope of the present invention.

Claims (13)

1. A metallographic polishing machine grinds appearance anchor clamps, characterized in that includes: support and fixture, wherein:
the clamping mechanism comprises a connector (1) and a clamping head (2), wherein the connector (1) is horizontally adjustable and arranged on the bracket, the clamping head (2) is vertically adjustable and arranged on the connector (1), at least three clamping jaws (3) which can be horizontally adjusted are arranged on the clamping head (2), and all the clamping jaws (3) are circumferentially distributed;
the clamping head is characterized by further comprising a pressing piece (4), wherein the pressing piece (4) is arranged on the clamping head (2) in an up-down adjustable mode, and the pressing piece (4) is positioned on the inner sides of all clamping jaws (3);
the pressure applying part (4) is an elastic part; the pressure applying part (4) is eccentrically arranged on the clamping head (2);
in operation, the pressure member (4) is adjusted so as to be in contact with the workpiece to be ground and to press the high hardness portion of the workpiece to be ground.
2. Metallographic polishing machine sample grinding clamp according to claim 1, characterized in that the pressure member (4) is a cylindrical spring.
3. The metallographic polishing machine sample grinding clamp according to claim 1, wherein a sleeve A (5) which is vertically fixed is arranged on the clamping head (2) and positioned on the inner sides of all clamping jaws (3), and a fastening bolt A (6) is arranged on the side wall of the sleeve A (5); one end of the pressure member (4) is located in the sleeve A (5) and is fixed by the fastening bolt A (6).
4. A metallographic polishing machine sample grinding clamp according to claim 3, wherein the clamping jaws (3) comprise a base body part (301) and clamping parts (302), the base body part (301) is horizontally adjustable and mounted on the clamping head (2), the clamping parts (302) are positioned on one side of the base body part (301) close to the sleeve a (5) and protrude out of the wall surface of the base body part (301), and the clamping parts (302) of the clamping jaws (3) are all positioned below the sleeve a (5).
5. The metallographic polishing machine sample grinding clamp according to any one of claims 1-4, wherein the clamping head (2) comprises a connecting rod (201) and a guide rod (202), and the connecting rod (201) is installed on the connecting head (1) in an up-down adjustable manner; the guide rods (202) are horizontally arranged, one end of each guide rod (202) is fixed with the corresponding connecting rod (201), a plurality of guide rods (202) are arranged, and all the guide rods (202) are circumferentially distributed around the connecting rod (201); the clamping jaw (3) is provided with a sliding sleeve A (7), and the sliding sleeve A (7) is slidably sleeved on the guide rod (202) and is fixed by a fastening bolt B (8).
6. The metallographic polishing machine sample grinding clamp according to claim 5, wherein one end of the guide rod (202) far away from the connecting rod (201) is provided with a limiting part A (9).
7. The metallographic polishing machine sample grinding clamp according to claim 5, wherein the cross section of the guide rod (202) is rectangular, and the sliding sleeve A (7) is a rectangular sleeve matched with the guide rod (202).
8. Metallographic polishing machine sample grinding fixture according to any one of claims 1-4, characterized in that the support comprises a vertical rod (10) and a cross rod (11) fixed to the vertical rod (10); the connector (1) comprises a sleeve B (101) which is vertically arranged and a sliding sleeve B (102) which is fixed at the top end of the sleeve B (101); the sliding sleeve B (102) is slidably arranged on the cross rod (11) and is fixed by the fastening bolt C (12); the connecting rod (201) is vertically arranged, and the top end of the connecting rod (201) is positioned in the sleeve B (101) and is fixed by the fastening bolt D (13).
9. The metallographic polishing machine sample grinding clamp according to claim 8, wherein the lower port of the sleeve B (101) is provided with an anti-falling stop block (14), the side wall of the top end of the connecting rod (201) is provided with a limit stop block (2011), and the limit stop block (2011) is located above the anti-falling stop block (14).
10. The metallographic polishing machine sample grinding clamp according to claim 8, wherein the sleeve B (101) is a rectangular sleeve, and the connecting rod (201) is a rectangular rod.
11. The metallographic polishing machine sample grinding clamp according to claim 8, wherein the cross section of the cross rod (11) is rectangular, and the sliding sleeve B (102) is a rectangular sleeve matched with the cross rod (11).
12. The metallographic polishing machine sample grinding clamp according to claim 8, wherein one end of the cross rod (11) is fixed with the upright (10), and the other end of the cross rod (11) is provided with a limiting part B (15).
13. A metallographic polishing machine comprising the sample polishing clamp of the metallographic polishing machine according to any one of claims 1 to 12.
CN202210063924.0A 2022-01-20 2022-01-20 Metallographic polishing machine sample grinding clamp and metallographic polishing machine Active CN114505757B (en)

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Application Number Priority Date Filing Date Title
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CN114505757B true CN114505757B (en) 2023-06-20

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19956250C1 (en) * 1999-11-23 2001-05-17 Wacker Siltronic Halbleitermat Production of a number of semiconductor wafers comprise simultaneously polishing a front side and a rear side of each wafer and evaluating each wafer for further processing according to quality criteria
CN204094622U (en) * 2014-08-26 2015-01-14 苏州大学 A kind of fixture for grind away operation

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012103003B4 (en) * 2012-04-05 2016-07-21 Siegmund Bigott Grinding and polishing machine for metallography
CN106217217B (en) * 2016-08-10 2018-06-01 江苏大学 A kind of constant pressure simultaneously automatically corrects the accurate metallographic grinding and polishing device for eliminating cut
KR20180115858A (en) * 2017-04-14 2018-10-24 주식회사 케이씨텍 Substrate procesing apparatus and control method thereof
JP7158223B2 (en) * 2018-09-20 2022-10-21 株式会社荏原製作所 Polishing head and polishing equipment
CN110193767A (en) * 2019-07-18 2019-09-03 马鞍山钢铁股份有限公司 A kind of automatic metallic phase polishing machine
CN212043631U (en) * 2020-03-25 2020-12-01 苏州祥利机电有限公司 Assembly fixture structure for machine tool
CN213470807U (en) * 2020-11-06 2021-06-18 江西宝航新材料有限公司 Clamp for metallographic sample grinding machine

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19956250C1 (en) * 1999-11-23 2001-05-17 Wacker Siltronic Halbleitermat Production of a number of semiconductor wafers comprise simultaneously polishing a front side and a rear side of each wafer and evaluating each wafer for further processing according to quality criteria
CN204094622U (en) * 2014-08-26 2015-01-14 苏州大学 A kind of fixture for grind away operation

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