CN114494028B - Particle beam imaging noise reduction method and device - Google Patents
Particle beam imaging noise reduction method and device Download PDFInfo
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Abstract
The embodiment of the disclosure discloses a particle beam imaging noise reduction method and a particle beam imaging noise reduction device. The particle beam imaging noise reduction method comprises the following steps: performing line scanning on the imaging area by using the particle beam to acquire a line scanning image signal; acquiring a first image signal of the line from the line scanning image signal within the effective time of the line scanning; acquiring a noise signal of the line from the line scanning image signal in the non-effective time of the line scanning; acquiring an average noise signal of the row according to the noise signal of the row; and acquiring a second image signal of the line according to the first image signal of the line and the average noise signal of the line, thereby carrying out line-by-line estimation and elimination on the noise of the imaging area, having accurate noise estimation, being capable of well tracking the change of the noise at different positions and different times and effectively improving the imaging quality.
Description
Technical Field
The disclosure relates to the technical field of image processing, in particular to a particle beam imaging noise reduction method and device.
Background
Particle beam imaging is widely used in a variety of inspection and imaging fields. For example, scanning electron microscopes are widely used in various fields such as medicine, materials, biology, and electronics, and their imaging quality is a main manifestation of their performance, and reducing the noise of the imaging process is a key to improving their imaging quality. In a conventional scanning electron microscope system, two scanning electron microscope images are successively acquired for a sample, and subtraction is performed on the two images, whereby noise values of all pixels in the images can be obtained. And carrying out statistical analysis on the noise values of all pixels in the image to obtain a noise value variance as a characteristic parameter for describing image noise.
The existing noise reduction method for the electron microscope adopts the whole image processing and unified noise reduction, adopts the same processing mode for all lines, cannot perform differentiated processing on different noise characteristics among different lines, and has poor time-varying tracking capability on noise.
Disclosure of Invention
In order to solve the problems in the related art, embodiments of the present disclosure provide a method and an apparatus for noise reduction in particle beam imaging.
In a first aspect, an embodiment of the present disclosure provides a particle beam imaging noise reduction method, including: performing line scanning on the imaging area by using the particle beam to acquire a line scanning image signal;
acquiring a first image signal of the line from the line scanning image signal within the effective time of the line scanning;
acquiring a noise signal of the line from the line scanning image signal in the non-effective time of the line scanning;
acquiring an average noise signal of the row according to the noise signal of the row;
and acquiring a second image signal of the line according to the first image signal of the line and the average noise signal of the line.
With reference to the first aspect, in a first implementation manner of the first aspect, the effective time of the line scan includes:
the time the particle beam enters the sample area during the forward cycle of the line scan; and/or
The non-active time of the line scan includes:
the time before the particle beam enters the sample area in the forward cycle of the line scan; and/or
The time of the particle beam in the reverse period of the line scan.
With reference to the first aspect, in a second implementation manner of the first aspect, the acquiring, in an inactive time of the line scan, a noise signal of the line from the line scan image signal includes:
within the non-effective time of the line scanning, reducing the particle beams, and acquiring a noise signal of the line from the line scanning image signal; and/or
Deflecting the particle beam during the inactive time of the line scan to obtain a noise signal of the line from the line scan image signal.
With reference to the second implementation manner of the first aspect, in a third implementation manner of the first aspect, the attenuating the particle beam includes:
absorbing the particle beam on a channel of the particle beam entering the imaging area, so that the particle beam cannot reach the imaging area; and/or
Reflecting the particle beam on a channel of the particle beam entering the imaging area, so that the particle beam cannot reach the imaging area; and/or
And scattering the particle beam on a channel of the particle beam entering the imaging area, so that the particle beam cannot reach the imaging area.
With reference to the second implementation manner of the first aspect, the present disclosure provides in a fourth implementation manner of the first aspect, the deflecting the particle beam includes:
deflecting the particle beam using an electric and/or magnetic field on its way into the imaging region such that the particle beam does not reach the imaging region.
With reference to the first aspect, in a fifth implementation manner of the first aspect, the obtaining an average noise signal of the row according to the noise signal of the row includes:
performing integration processing on the noise signals of the rows to obtain average noise signals of the rows; or
And carrying out mean value filtering processing on the noise signals of the rows to obtain average noise signals of the rows.
With reference to the first aspect, in a sixth implementation manner of the first aspect, the acquiring the second image signal of the line according to the first image signal of the line and the average noise signal of the line includes:
carrying out holding operation on the first image signals of the row to obtain third image signals of the row;
and subtracting the average noise signal of the line from the third image signal of the line to obtain a second image signal of the line.
With reference to the sixth implementation manner of the first aspect, in a seventh implementation manner of the first aspect, the subtracting the average noise signal of the row from the third image signal of the row includes:
using a Kalman filtering process, subtracting the average noise signal for the line from the third image signal for the line.
With reference to the first aspect, in an eighth implementation manner of the first aspect, before acquiring the first image signal of the line from the line scanning image signal within the effective time of the line scanning, the present disclosure further includes:
and converting the line scanning image signal from an analog signal to a digital signal.
With reference to the first aspect, in a ninth implementation manner of the first aspect, the present disclosure further includes:
and converting the second image signal from an analog signal to a digital signal.
In a second aspect, an embodiment of the present disclosure provides a particle beam imaging noise reduction apparatus, including:
a line scanning image signal acquisition module configured to perform line scanning on the imaging region using the particle beam to acquire a line scanning image signal;
a first image signal acquisition module configured to acquire a first image signal of the line from the line scan image signal in an effective time of the line scan;
a noise signal acquisition module configured to acquire a noise signal of the line from the line scan image signal during an inactive time of the line scan;
an average noise signal acquisition module configured to acquire an average noise signal of the row according to the noise signal of the row;
a second image signal acquisition module configured to acquire a second image signal of the line according to the first image signal of the line and the average noise signal of the line.
With reference to the second aspect, in a first implementation manner of the second aspect, the effective time of the line scan includes:
the time the particle beam enters the sample area during the forward cycle of the line scan; and/or
The non-active time of the line scan includes:
the time before the particle beam enters the sample area in the forward cycle of the line scan; and/or
The time of the particle beam in the reverse period of the line scan.
With reference to the second aspect, in a second implementation manner of the second aspect, the noise signal acquiring module includes:
a particle beam reduction sub-module configured to reduce the particle beam during an inactive time of the line scan, and to obtain a noise signal of the line from the line scan image signal; and/or
A particle beam deflection sub-module configured to deflect the particle beam during an inactive time of the line scan to obtain a noise signal of the line from the line scan image signal.
With reference to the second implementation manner of the second aspect, in a third implementation manner of the second aspect, the attenuating the particle beam includes:
absorbing the particle beam on a channel of the particle beam entering the imaging area, so that the particle beam cannot reach the imaging area; and/or
Reflecting the particle beam on a channel of the particle beam entering the imaging area, so that the particle beam cannot reach the imaging area; and/or
And scattering the particle beam on a channel of the particle beam entering the imaging area, so that the particle beam cannot reach the imaging area.
With reference to the second implementation manner of the second aspect, in a fourth implementation manner of the second aspect, the deflecting the particle beam includes:
deflecting the particle beam using an electric and/or magnetic field on its way into the imaging region such that the particle beam does not reach the imaging region.
With reference to the second aspect, in a fifth implementation manner of the second aspect, the average noise signal obtaining module includes:
an integration processing submodule configured to perform integration processing on the noise signals of the rows to obtain average noise signals of the rows; or
And the mean value filtering processing sub-module is configured to perform mean value filtering processing on the noise signals of the rows to obtain average noise signals of the rows.
With reference to the second aspect, in a sixth implementation manner of the second aspect, the second image signal acquiring module includes:
a third image signal acquisition sub-module configured to perform a hold operation on the first image signals of the row, resulting in third image signals of the row;
an average noise signal reduction sub-module configured to reduce the average noise signal of the row from the third image signal of the row, resulting in the second image signal of the row.
With reference to the sixth implementation manner of the second aspect, in a seventh implementation manner of the second aspect, the subtracting the average noise signal of the row from the third image signal of the row includes:
using a Kalman filtering process, subtracting the average noise signal for the line from the third image signal for the line.
With reference to the second aspect, in an eighth implementation manner of the second aspect, before acquiring the first image signal of the line from the line scanning image signal within the effective time of the line scanning, the present disclosure further includes:
a first analog-to-digital conversion module configured to convert the line scan image signal from an analog signal to a digital signal.
With reference to the second aspect, in a ninth implementation manner of the second aspect, the present disclosure further includes:
a second analog-to-digital conversion module configured to convert the second image signal from an analog signal to a digital signal.
The technical scheme provided by the embodiment of the disclosure can have the following beneficial effects:
according to the technical scheme provided by the embodiment of the disclosure, a line scanning image signal is obtained by performing line scanning on an imaging area by using a particle beam; acquiring a first image signal of the line from the line scanning image signal within the effective time of the line scanning; acquiring a noise signal of the line from the line scanning image signal in the non-effective time of the line scanning; acquiring an average noise signal of the row according to the noise signal of the row; and acquiring a second image signal of the line according to the first image signal of the line and the average noise signal of the line, thereby carrying out line-by-line estimation and elimination on the noise of the imaging area, having accurate noise estimation, being capable of well tracking the change of the noise at different positions and different times and effectively improving the imaging quality.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure.
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Other features, objects, and advantages of the present disclosure will become more apparent from the following detailed description of non-limiting embodiments when taken in conjunction with the accompanying drawings. In the drawings:
FIG. 1a shows an exemplary schematic diagram of an implementation scenario of a particle beam imaging noise reduction method according to an embodiment of the present disclosure;
fig. 1b shows an exemplary schematic diagram of an implementation scenario of a particle beam imaging noise reduction method according to an embodiment of the present disclosure;
FIG. 1c shows an exemplary schematic diagram of an implementation scenario of a particle beam imaging noise reduction method according to an embodiment of the present disclosure;
FIG. 2 shows a flow diagram of a particle beam imaging noise reduction method according to an embodiment of the present disclosure;
FIG. 3 shows a flow chart according to step S203 in the embodiment shown in FIG. 2;
FIG. 4 shows a flow diagram of a particle beam imaging noise reduction method according to another embodiment of the present disclosure;
FIG. 5 shows a flow diagram of a particle beam imaging noise reduction method according to yet another embodiment of the present disclosure;
fig. 6 shows a block diagram of a particle beam imaging noise reduction apparatus according to an embodiment of the present disclosure.
Detailed Description
Hereinafter, exemplary embodiments of the present disclosure will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily implement them. Also, for the sake of clarity, parts not relevant to the description of the exemplary embodiments are omitted in the drawings.
In the present disclosure, it is to be understood that terms such as "including" or "having," etc., are intended to indicate the presence of labels, numbers, steps, actions, components, parts, or combinations thereof disclosed in the present specification, and are not intended to preclude the possibility that one or more other labels, numbers, steps, actions, components, parts, or combinations thereof are present or added.
It should be further noted that the embodiments and labels in the embodiments of the present disclosure may be combined with each other without conflict. The present disclosure will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
Particle beam imaging is widely used in a variety of inspection and imaging fields. For example, scanning electron microscopes are widely used in various fields such as medicine, materials, biology, and electronics, and their imaging quality is a main manifestation of their performance, and reducing the noise of the imaging process is a key to improving their imaging quality.
In a conventional scanning electron microscope system, two scanning electron microscope images are successively acquired for a sample, and the two images are subtracted from each other to obtain noise values of all pixels in the images. And carrying out statistical analysis on the noise values of all pixels in the image to obtain a noise value variance which is used as a characteristic parameter for describing image noise. And optimizing photographic parameters including the size of a light spot, the object distance and the scanning time of the scanning electron microscope image by taking the noise characteristic parameter as an objective function to finally obtain a low-noise digital image.
Basis function components associated with noise may be selectively reduced by applying a spectral transform to row and column values associated with an acquired image frame to provide adjusted row and column values. The adjusted row and column values may be used to generate row and column offset terms that effectively filter noise from the acquired image in an efficient and effective manner.
The existing noise reduction method for the electron microscope adopts the whole image processing and unified noise reduction, adopts the same processing mode for all lines, cannot perform differentiated processing on different noise characteristics among different lines, and has poor time-varying tracking capability on noise.
It will be appreciated by those skilled in the art that other particle beam imaging systems, besides scanning electron microscopes, other types of electron microscopes, proton imaging systems, etc., also face the same or similar problems.
In order to solve the above problems, the present disclosure provides a method and an apparatus for reducing noise in particle beam imaging.
Fig. 1a shows an exemplary schematic diagram of an implementation scenario of a particle beam imaging noise reduction method according to an embodiment of the present disclosure.
In the embodiment of the present disclosure, fig. 1a is illustrated by taking an electron beam of a scanning electron microscope as an example. The present disclosure is not limited to electron beams, and may be applied to other particle beams such as proton beams, and the present disclosure is not limited thereto. It will be understood by those skilled in the art that fig. 1a is an exemplary schematic diagram of an implementation scenario of the particle beam imaging noise reduction method, and does not constitute a limitation to the present disclosure.
As shown in fig. 1a, a sample region 102 is included in an imaging region 101. The electron beam is "zigzag" line scanned in the imaging region 101 and passes through the sample region 102. The line scan period of the electron beam includes a forward period 103 and a reverse period 104. The portion 1032 of the forward period 103 that enters the sample area 102 constitutes the active time of the line scan; the portion 1031 of the forward period 103 before entering the sample region 102 and the reverse period 104 constitute an inactive time of the line scan.
Noise is present on the detector of a scanning electron microscope during the entire line scan period of the electron beam. During the effective time of line scanning, the detector of the scanning electron microscope receives the electron beam imaged by the sample and outputs a noise-containing sample image signal. In the non-effective time of line scanning, the electron beam is absorbed, reflected, scattered or deflected, and the detector of the scanning electron microscope cannot detect the electron beam imaged by the sample, and a noise signal is output.
In embodiments of the present disclosure, during the inactive time of the line scan, a substance capable of absorbing and/or scattering and/or reflecting the electron beam may be used in the path of the electron beam toward the imaging region 101, so that the electron beam does not reach the imaging region 101. Magnetic coils may also be used to generate magnetic fields and/or plates may be used to generate electric fields to deflect the electron beam so that it does not reach the imaging region 101. It will be appreciated by those skilled in the art that other ways to prevent the electron beam from reaching the imaging area 101 may be used, and the present disclosure is not limited thereto.
In the embodiment of the present disclosure, after averaging the noise acquired in the non-valid time, an average noise signal in one row is obtained. The average noise signal in a row is obtained from the noise acquired in the non-valid time, and an integral processing mode may be used, or an average filter processing mode such as kalman filtering, wiener filtering, and the like may also be adopted, which is not limited in this disclosure.
In the embodiment of the present disclosure, an image holding operation is performed on the noise-containing sample image signal, and the noise-containing sample image signal after the image holding is obtained. The above-mentioned average processing of the noise acquired within the non-effective time requires a certain time, and the image holding operation can compensate for the time consumed for the average processing of the noise acquired within the non-effective time, so that the average noise signal in one row is synchronized in time with the image signal of the noise-containing sample after image holding, thereby facilitating the subsequent noise reduction processing.
It will be understood by those skilled in the art that the image holding operation may be implemented using an analog delay line, a digital buffer, or other implementations, and the disclosure is not limited thereto.
In the embodiment of the present disclosure, the average noise signal in one row is used to perform noise reduction processing on the noise-containing sample image signal after image holding, so as to obtain a noise-reduced sample image signal. The noise reduction processing may adopt a kalman filtering manner, a fractional kalman filtering manner, or other noise reduction image signal processing manners, which is not limited in this disclosure.
It can be understood by those skilled in the art that, depending on the usage scenario, in addition to calculating the noise mean value line by line of the line scan and performing the noise reduction processing on the noise-containing sample image signal, multiple lines such as 2 lines and 3 lines can be used as units to calculate the noise mean value and perform the noise reduction processing on the noise-containing sample image signal, which is not limited in the present disclosure. When the noise characteristics are consistent in a multi-line area of 2 lines, 3 lines and the like, the noise acquired in the non-effective time of the multiple lines can be uniformly processed to acquire an average noise signal in the multiple lines. Since the noise signal data is more, the calculation of the average noise signal is more accurate. Then, the noise reduction processing may be performed on the image signals of the noise-containing samples of the plurality of lines after the image holding using the average noise signal in the plurality of lines.
In the embodiment of the present disclosure, an analog method may be used to obtain a mean value of the intra-line noise and perform noise reduction processing on the noise-containing sample image signal, or a digital signal processing method may be used to obtain a mean value of the intra-line noise and perform noise reduction processing on the noise-containing sample image signal, which is not limited in the present disclosure.
Fig. 1b shows an exemplary schematic diagram of an implementation scenario of a particle beam imaging noise reduction method according to an embodiment of the present disclosure. It will be understood by those of ordinary skill in the art that fig. 1b is an exemplary schematic diagram of an implementation scenario of the particle beam imaging noise reduction method, and does not constitute a limitation of the present disclosure.
As shown in fig. 1b, the detector 112 of the scanning electron microscope 111 outputs a line scan image signal. The line scan image signal may be an image signal output by the detector 112 after the scanning electron microscope 111 performs line scanning of one line. The signal extraction 113 extracts a noise signal from the line-scanned image signal during the non-effective time of the line scanning; during the active time of the line scan, a noise-containing sample image signal is extracted from the line scan image signal. Referring to fig. 1a, during the inactive time of the line scan, a substance capable of absorbing and/or scattering and/or reflecting the electron beam may be used to be placed in a path of the electron beam toward the imaging region 101 so that the electron beam does not reach the imaging region 101, thereby extracting a noise signal from the line scan image signal; the noise signal may also be extracted from the line scan image signal by using a magnetic coil to generate a magnetic field and/or using a polar plate to generate an electric field to deflect the electron beam so that the electron beam does not reach the imaging region 101. One of ordinary skill in the art will appreciate that other ways to prevent the electron beam from reaching the imaging area 101 may be used, and the disclosure is not limited thereto.
In the embodiment of the present disclosure, the average noise estimation 114 performs an averaging process on the noise signals to obtain an average noise signal in a row. The noise signal may be integrated using a capacitor to obtain an average noise signal within a row. It will be understood by those skilled in the art that other analog circuits may be used to average the noise signal to obtain an average noise signal within a row, and the disclosure is not limited thereto.
In the embodiment of the present disclosure, the image holding 115 performs image holding processing on the noise-containing sample image signal, and obtains the noise-containing sample image signal after image holding. The image retention may be performed using an analog delay line, or may be performed in other ways, which is not limited by this disclosure.
The noise reduction process 116 processes the average noise signal in one line and the noise-containing sample image signal after image holding to obtain a noise-reduced sample image signal. The noise reduction process 116 may be implemented by a subtraction circuit, a kalman filter, or other means, which is not limited by this disclosure.
In the embodiment of the present disclosure, the signal extraction 113, the average noise estimation 114, the image holding 115, and the noise reduction processing 116 are all performed in the analog domain, so as to obtain the noise-reduced sample image signal in the analog domain. The analog-to-digital conversion 117 performs analog-to-digital conversion on the noise-reduced sample image signal in the analog domain to obtain a noise-reduced sample image signal in the digital domain for storage or transmission.
Fig. 1c shows an exemplary schematic diagram of an implementation scenario of a particle beam imaging noise reduction method according to an embodiment of the present disclosure. It will be understood by those skilled in the art that fig. 1c is an exemplary schematic diagram of an implementation scenario of the particle beam imaging noise reduction method, and does not constitute a limitation to the present disclosure.
FIG. 1c includes the same scanning electron microscope 111 and detector 112 as in FIG. 1 b.
As shown in fig. 1c, the detector 112 of the scanning electron microscope 111 outputs a line scan image signal.
In the embodiment of the present disclosure, the analog-to-digital conversion 121 performs analog-to-digital conversion on the line scan image signal in the analog domain to obtain a line scan image signal in the digital domain. The processing after the analog-to-digital conversion 121 is performed in the digital domain, thereby increasing flexibility.
In the embodiment of the present disclosure, the signal extraction 122 extracts a noise signal from the line scan image signal in the digital domain during the inactive time of the line scan; during the effective time of line scanning, a noise-containing sample image signal is extracted from the line scanning image signal in the digital domain. Referring to fig. 1a, during the inactive time of the line scan, a substance capable of absorbing and/or scattering and/or reflecting the electron beam may be used to be placed in a path of the electron beam toward the imaging region 101 so that the electron beam does not reach the imaging region 101, thereby extracting a noise signal from the line scan image signal; the noise signal may also be extracted from the line scan image signal by using a magnetic coil to generate a magnetic field and/or using a polar plate to generate an electric field to deflect the electron beam so that the electron beam does not reach the imaging region 101. It will be appreciated by those skilled in the art that other ways to prevent the electron beam from reaching the imaging area 101 may be used, and the present disclosure is not limited thereto.
In the embodiment of the present disclosure, the average noise estimation 123 performs an averaging process on the noise signal, and obtains an average noise signal in a row. The average noise estimate 123 may be implemented by using a discrete integral operation, or a kalman filter, or a wiener filter, or other averaging methods, which is not limited in this disclosure.
In an embodiment of the present disclosure, the image holding 124, e.g., a digital buffer, performs an image holding process on the noise-containing sample image signal to obtain an image-held noise-containing sample image signal. The noise reduction process 125 processes the average noise signal in one line and the noise-containing sample image signal after image holding to obtain a noise-reduced sample image signal. The noise reduction process 125 may be implemented using a kalman filter, a fractional kalman filter, or other methods, which are not limited by this disclosure. The noise-reduced sample image signal is a digital domain signal for storage or transmission.
FIG. 2 shows a flow diagram of a particle beam imaging noise reduction method according to an embodiment of the present disclosure. As shown in fig. 2, the particle beam imaging noise reduction method includes steps S201, S202, S203, S204, S205.
In step S201, a line scan image signal is acquired by performing a line scan on the imaging region using the particle beam.
In step S202, a first image signal of the line is acquired from the line scan image signal during the active time of the line scan.
In step S203, in the non-effective time of the line scanning, the noise signal of the line is acquired from the line scanning image signal.
In step S204, an average noise signal of the row is obtained according to the noise signal of the row.
In step S205, a second image signal of the line is acquired according to the first image signal of the line and the average noise signal of the line.
In an embodiment of the present disclosure, the line scan image signal may be an image signal output by the detector after line scanning of one line by the scanning electron microscope. During the active time of the line scan, a first image signal, for example, a noise-containing sample image signal, of the line can be acquired from the line scan image signal. During the inactive time of the line scan, the noise signal of the line can be acquired from the line scan image signal. And averaging the noise signals of the rows to obtain average noise signals of the rows. And carrying out noise reduction processing on the sample image signal containing the noise by using the average noise signal of the line to obtain a second image signal of the line, such as the sample image signal after noise reduction. It will be understood by those skilled in the art that the particle beam may be the electron beam of a scanning electron microscope, but is not limited by the present disclosure.
According to the technical scheme provided by the embodiment of the disclosure, a line scanning image signal is obtained by performing line scanning on an imaging area by using a particle beam; acquiring a first image signal of the line from the line scanning image signal within the effective time of the line scanning; acquiring a noise signal of the line from the line scanning image signal in the non-effective time of the line scanning; acquiring an average noise signal of the row according to the noise signal of the row; and acquiring a second image signal of the line according to the first image signal of the line and the average noise signal of the line, thereby estimating and eliminating the noise of the imaging area line by line, accurately estimating the noise, tracking the change of the noise at different positions and different time well and effectively improving the imaging quality.
In an embodiment of the present disclosure, the effective time of the line scan may include a time when the particle beam enters the sample region in a forward cycle of the line scan; the inactive time of the line scan may include: the time before the particle beam enters the sample area in a forward cycle of the line scan and/or the time of the particle beam in a reverse cycle of the line scan. And for each line of scanning, the effective scanning time and the ineffective line scanning time are set, so that the noise can be estimated line by line, and the noise at different positions and different times of an imaging area can be well tracked.
According to the technical scheme provided by the embodiment of the disclosure, the effective time of line scanning comprises: the time the particle beam enters the sample area during the forward cycle of the line scan; and/or the non-active time of the line scan comprises: the time before the particle beam enters the sample area in the forward cycle of the line scan; and/or the time of the particle beam in the reverse period of the line scanning, thereby obtaining a noise signal without sample information by using the ineffective time of the line scanning line by line, well tracking the change of noise at different positions and different times, and improving the noise estimation precision.
Fig. 3 shows a flow chart according to step S203 in the embodiment shown in fig. 2. As shown in fig. 3, step S203 in fig. 2 includes: steps S301 and S302.
In step S301, the particle beam is subtracted during the non-effective time of the line scan, and a noise signal of the line is acquired from the line scan image signal.
In step S302, the particle beam is deflected during the inactive time of the line scan, and a noise signal of the line is acquired from the line scan image signal.
One of ordinary skill in the art will understand that the operations in steps S301 and S302 may be arbitrarily selected to be used, or may be used simultaneously, which is not limited in the present disclosure.
In the embodiment of the disclosure, a mode of reducing and/or deflecting the particle beam can be adopted in the ineffective time of line scanning, so that the particle beam is prevented from reaching an imaging area in the ineffective time of line scanning, and an accurate noise signal of a line is obtained from a line scanning image signal.
According to the technical solution provided by the embodiment of the present disclosure, acquiring the noise signal of the line from the line scanning image signal in the non-effective time of the line scanning includes: within the non-effective time of the line scanning, reducing the particle beams, and acquiring a noise signal of the line from the line scanning image signal; and/or deflecting the particle beam in the non-effective time of the line scanning to obtain the noise signal of the line from the line scanning image signal, thereby preventing the particle beam from reaching an imaging area in the non-effective time of the line scanning and obtaining an accurate noise signal.
In an embodiment of the present disclosure, a substance that absorbs and/or reflects and/or scatters the particle beam may be disposed on a passage of the particle beam into the imaging region, so as to attenuate the particle beam, and prevent the particle beam from reaching the imaging region.
According to the technical solution provided by the embodiment of the present disclosure, the reducing the particle beam includes: absorbing the particle beam on a channel of the particle beam entering the imaging area, so that the particle beam cannot reach the imaging area; and/or reflecting the particle beam on a passage of the particle beam into the imaging region so that the particle beam cannot reach the imaging region; and/or scattering the particle beam on a channel of the particle beam entering the imaging area, so that the particle beam cannot reach the imaging area, and an accurate noise signal is acquired.
In embodiments of the present disclosure, a coil may be used to generate a magnetic field and/or a plate to generate an electric field, such that the particle beam is deflected out of reach of the imaging region.
According to the technical solution provided by the embodiment of the present disclosure, deflecting the particle beam includes: and deflecting the particle beam on a channel of the particle beam entering the imaging area by using an electric field and/or a magnetic field, so that the particle beam cannot reach the imaging area, and an accurate noise signal is acquired.
In the embodiment of the present disclosure, the average noise signal of the line may be obtained from the noise signal of the line by using an integration process in an analog domain or a digital domain or a mean filtering process such as kalman filtering or wiener filtering. One of ordinary skill in the art will appreciate that other analog or digital domain averaging filters may be used, and the present disclosure is not limited thereto.
According to the technical scheme provided by the embodiment of the present disclosure, acquiring the average noise signal of the row by the noise signal of the row includes: performing integration processing on the noise signals of the rows to obtain average noise signals of the rows; or carrying out mean filtering processing on the noise signals of the rows to obtain the average noise signals of the rows, thereby obtaining accurate average noise of the rows and tracking the average noise of the rows in different areas and different time.
In the embodiment of the present disclosure, a holding operation may be performed on a first image signal, for example, a noise-containing sample image signal, to obtain a third image signal, for example, a noise-containing sample image signal after image holding, and then the third image signal and the average noise signal of the row are processed to reduce noise, so as to obtain a second image signal, for example, a noise-reduced sample image signal.
According to the technical solution provided by the embodiment of the present disclosure, acquiring the second image signal of the line through the first image signal of the line and the average noise signal of the line includes: carrying out holding operation on the first image signals of the row to obtain third image signals of the row; and subtracting the average noise signal of the line from the third image signal of the line to obtain the second image signal of the line, so that the third image signal and the average noise signal of the line are kept synchronous, the noise is accurately eliminated, and the imaging quality is improved.
In embodiments of the present disclosure, a kalman filtering process may be used to subtract the average noise signal of a row from a third image signal, e.g., the noise-containing sample image signal after image retention. It will be understood by those skilled in the art that kalman filtering may be implemented in the analog domain, in the digital domain, or in other filter manners, such as fractional kalman filtering, and the disclosure is not limited thereto.
According to the technical solution provided by the embodiment of the present disclosure, reducing the average noise signal of the line from the third image signal of the line by the method includes: and using Kalman filtering processing to reduce the average noise signal of the line from the third image signal of the line, thereby effectively tracking the average noise of the lines of different lines and different time, reducing the adverse effect of the noise in the line on the image quality and improving the image quality.
FIG. 4 shows a flow diagram of a particle beam imaging noise reduction method according to another embodiment of the present disclosure. Fig. 4 includes a step S401 in addition to the steps S201, S202, S203, S204, and S205 which are the same as those in fig. 2.
In step S401, the line scan image signal is converted from an analog signal to a digital signal.
In the embodiment of the disclosure, the line scanning image signal output by the detector can be converted from an analog domain to a digital domain, and subsequent processing is performed in the digital domain, so that the flexibility is improved.
According to the technical solution provided by the embodiment of the present disclosure, before acquiring the first image signal of the line from the line scanning image signal in the effective time of the line scanning, the method further includes: the line scanning image signal is converted from an analog signal to a digital signal, so that most processing is realized in a digital domain, and the flexibility is improved.
FIG. 5 shows a flow diagram of a particle beam imaging noise reduction method according to yet another embodiment of the present disclosure. Fig. 5 includes step S501, in addition to steps S201, S202, S203, S204, and S205, which are the same as those in fig. 2.
In step S501, the second image signal is converted from an analog signal to a digital signal.
In embodiments of the present disclosure, the second image signal, e.g., the denoised sample image signal, may be converted from the analog domain to the digital domain after all processing is complete, facilitating storage and transmission of the denoised sample image signal.
According to the technical scheme provided by the embodiment of the disclosure, the method further comprises the following steps: and converting the second image signal from an analog signal to a digital signal, thereby converting the noise-reduced sample image signal to a digital domain for storage and transmission.
Fig. 6 shows a block diagram of a particle beam imaging noise reduction apparatus according to an embodiment of the present disclosure.
As shown in fig. 6, the particle beam imaging noise reduction apparatus 600 includes: a line scanning image signal acquisition module 601, a first image signal acquisition module 602, a noise signal acquisition module 603, an average noise signal acquisition module 604, and a second image signal acquisition module 605.
The line scan image signal acquisition module 601 is configured to perform line scan on the imaging region using the particle beam, and acquire a line scan image signal;
the first image signal acquiring module 602 is configured to acquire a first image signal of the line from the line scan image signal during the active time of the line scan;
the noise signal obtaining module 603 is configured to obtain the noise signal of the line from the line scan image signal in the non-effective time of the line scan;
the average noise signal obtaining module 604 is configured to obtain the average noise signal of the row according to the noise signal of the row;
the second image signal acquisition module 605 is configured to acquire the second image signal of the line according to the first image signal of the line and the average noise signal of the line.
According to the technical scheme provided by the embodiment of the disclosure, the line scanning image signal acquisition module is configured to perform line scanning on an imaging area by using a particle beam to acquire a line scanning image signal; a first image signal acquisition module configured to acquire a first image signal of the line from the line scan image signal during an active time of the line scan; a noise signal acquisition module configured to acquire a noise signal of the line from the line scan image signal during an inactive time of the line scan; an average noise signal acquisition module configured to acquire an average noise signal of the row according to the noise signal of the row; the second image signal acquisition module is configured to acquire the second image signal of the line according to the first image signal of the line and the average noise signal of the line, so that the noise of the imaging area is estimated and eliminated line by line, the noise estimation is accurate, the change of the noise at different positions and different time can be well tracked, and the imaging quality is effectively improved.
According to the technical scheme provided by the embodiment of the disclosure, the effective time of line scanning comprises: the time the particle beam enters the sample area during the forward cycle of the line scan; and/or the non-active time of the line scan comprises: the time before the particle beam enters the sample area in the forward cycle of the line scan; and/or the time of the particle beam in the reverse period of the line scanning, thereby obtaining a noise signal without sample information by using the ineffective time of the line scanning line by line, well tracking the change of noise at different positions and different times, and improving the noise estimation precision.
According to the technical scheme provided by the embodiment of the disclosure, the noise signal acquisition module comprises: a particle beam reduction sub-module configured to reduce the particle beam during an inactive time of the line scan, and to obtain a noise signal of the line from the line scan image signal; and/or a particle beam deflection submodule configured to deflect the particle beam during the inactive time of the line scan to acquire a noise signal of the line from the line scan image signal, thereby preventing the particle beam from reaching an imaging region during the inactive time of the line scan to acquire an accurate noise signal.
According to the technical solution provided by the embodiment of the present disclosure, the reducing the particle beam includes: absorbing the particle beam on a channel of the particle beam entering the imaging area, so that the particle beam cannot reach the imaging area; and/or reflecting the particle beam on a passage of the particle beam into the imaging region so that the particle beam cannot reach the imaging region; and/or scattering the particle beam on a channel of the particle beam entering the imaging area, so that the particle beam cannot reach the imaging area, and an accurate noise signal is acquired.
According to the technical solution provided by the embodiment of the present disclosure, deflecting the particle beam includes: and deflecting the particle beam on a channel of the particle beam entering the imaging area by using an electric field and/or a magnetic field, so that the particle beam cannot reach the imaging area, and an accurate noise signal is acquired.
According to the technical scheme provided by the embodiment of the disclosure, the average noise signal acquisition module comprises: an integration processing submodule configured to perform integration processing on the noise signals of the rows to obtain average noise signals of the rows; or the mean filtering processing sub-module is configured to perform mean filtering processing on the noise signals of the rows to obtain average noise signals of the rows, so as to obtain accurate average noise of the rows and track the average noise of the rows in different areas and at different times.
According to the technical scheme provided by the embodiment of the disclosure, the second image signal acquisition module comprises: a third image signal acquisition sub-module configured to perform a hold operation on the first image signals of the row, resulting in third image signals of the row; and the average noise signal reduction sub-module is configured to reduce the average noise signal of the line from the third image signal of the line to obtain the second image signal of the line, so that the third image signal and the average noise signal of the line are kept synchronous, noise is accurately removed, and the imaging quality is improved.
According to the technical solution provided by the embodiment of the present disclosure, reducing the average noise signal of the line from the third image signal of the line by the method includes: and using Kalman filtering processing to reduce the average noise signal of the line from the third image signal of the line, thereby effectively tracking the average noise of the lines of different lines and different time, reducing the adverse effect of the noise in the line on the image quality and improving the image quality.
According to the technical solution provided by the embodiment of the present disclosure, before acquiring the first image signal of the line from the line scanning image signal in the effective time of the line scanning, the method further includes: and the first analog-to-digital conversion module is configured to convert the line scanning image signal from an analog signal to a digital signal, so that most of processing is realized in a digital domain, and the flexibility is improved.
According to the technical scheme provided by the embodiment of the disclosure, the method further comprises the following steps: and the second analog-to-digital conversion module is configured to convert the second image signal from an analog signal to a digital signal, so that the sample image signal subjected to noise reduction is converted into a digital domain for storage and transmission.
The flowchart and block diagrams in the figures illustrate the architecture, functionality, and operation of possible implementations of systems, methods and computer program products according to various embodiments of the present disclosure. In this regard, each block in the flowcharts or block diagrams may represent a module, a program segment, or a portion of code, which comprises one or more executable instructions for implementing the specified logical function(s). It should also be noted that, in some alternative implementations, the functions noted in the block may occur out of the order noted in the figures. For example, two blocks shown in succession may, in fact, be executed substantially concurrently, or the blocks may sometimes be executed in the reverse order, depending upon the functionality involved. It will also be noted that each block of the block diagrams and/or flowchart illustration, and combinations of blocks in the block diagrams and/or flowchart illustration, can be implemented by special purpose hardware-based systems which perform the specified functions or acts, or combinations of special purpose hardware and computer instructions.
The units or modules described in the embodiments of the present disclosure may be implemented by software or hardware. The units or modules described may also be provided in a processor, and the names of the units or modules do not in some cases constitute a limitation on the units or modules themselves.
As another aspect, the present disclosure also provides a computer-readable storage medium, which may be the computer-readable storage medium included in the node in the above embodiment; or it may be a separate computer readable storage medium not incorporated into the device. The computer readable storage medium stores one or more programs for use by one or more processors in performing the methods described in the present disclosure.
The foregoing description is only exemplary of the preferred embodiments of the disclosure and is illustrative of the principles of the technology employed. It will be appreciated by those skilled in the art that the scope of the invention in the present disclosure is not limited to the specific combination of the above-mentioned features, but also encompasses other embodiments in which any combination of the above-mentioned features or their equivalents is possible without departing from the inventive concept. For example, the above features and the technical features disclosed in the present disclosure (but not limited to) having similar functions are replaced with each other to form the technical solution.
Claims (16)
1. A particle beam imaging noise reduction method, comprising:
performing line scanning on the imaging area by using the particle beam to acquire a line scanning image signal;
acquiring a first image signal of the line from the line scanning image signal within the effective time of the line scanning;
acquiring a noise signal of the line from the line scanning image signal in the non-effective time of the line scanning;
acquiring an average noise signal of the row according to the noise signal of the row;
acquiring a second image signal of the line according to the first image signal of the line and the average noise signal of the line;
wherein the effective time of the line scan comprises:
the time during which the particle beam enters the sample area during the forward cycle of the line scan; and/or
The non-active time of the line scan includes:
the time before the particle beam enters the sample area in the forward cycle of the line scan; and/or
The time of the particle beam in a reverse period of the line scan;
the acquiring the noise signal of the line from the line scanning image signal in the non-effective time of the line scanning comprises:
within the non-effective time of the line scanning, reducing the particle beams, and acquiring a noise signal of the line from the line scanning image signal; and/or
Deflecting the particle beam during an inactive time of the line scan to obtain a noise signal of the line from the line scan image signal.
2. The method of claim 1, wherein said attenuating the particle beam comprises:
absorbing the particle beam on a channel of the particle beam entering the imaging area, so that the particle beam cannot reach the imaging area; and/or
Reflecting the particle beam on a channel of the particle beam entering the imaging area, so that the particle beam cannot reach the imaging area; and/or
And scattering the particle beam on a channel of the particle beam entering the imaging area, so that the particle beam cannot reach the imaging area.
3. The method of claim 1, wherein said deflecting said particle beam comprises:
deflecting the particle beam using an electric and/or magnetic field on its way into the imaging region such that the particle beam does not reach the imaging region.
4. The method of claim 1, wherein obtaining the average noise signal of the row according to the noise signal of the row comprises:
performing integration processing on the noise signals of the rows to obtain average noise signals of the rows; or
And carrying out mean value filtering processing on the noise signals of the rows to obtain average noise signals of the rows.
5. The method of claim 1, wherein obtaining the second image signal of the row from the first image signal of the row and the average noise signal of the row comprises:
carrying out holding operation on the first image signals of the row to obtain third image signals of the row;
and subtracting the average noise signal of the line from the third image signal of the line to obtain a second image signal of the line.
6. The method of claim 5, wherein subtracting the row's average noise signal from the row's third image signal comprises:
using a Kalman filtering process, subtracting the average noise signal for the line from the third image signal for the line.
7. The method of claim 1, wherein before acquiring the first image signal of the line from the line scan image signal during the active time of the line scan, further comprising:
and converting the line scanning image signal from an analog signal to a digital signal.
8. The method of claim 1, further comprising:
and converting the second image signal from an analog signal to a digital signal.
9. A particle beam imaging noise reducer, comprising:
a line scanning image signal acquisition module configured to perform line scanning on the imaging region using the particle beam to acquire a line scanning image signal;
a first image signal acquisition module configured to acquire a first image signal of the line from the line scan image signal in an effective time of the line scan;
a noise signal acquisition module configured to acquire a noise signal of the line from the line scan image signal during an inactive time of the line scan;
an average noise signal acquisition module configured to acquire an average noise signal of the row according to the noise signal of the row;
a second image signal acquisition module configured to acquire a second image signal of the line according to the first image signal of the line and the average noise signal of the line;
wherein the effective time of the line scan comprises:
the time the particle beam enters the sample area during the forward cycle of the line scan; and/or
The non-active time of the line scan includes:
the time before the particle beam enters the sample area in the forward cycle of the line scan; and/or
The time of the particle beam in a reverse period of the line scan;
the noise signal acquisition module includes:
a particle beam reduction sub-module configured to reduce the particle beam during an inactive time of the line scan, and to obtain a noise signal of the line from the line scan image signal; and/or
A particle beam deflection sub-module configured to deflect the particle beam during an inactive time of the line scan to obtain a noise signal of the line from the line scan image signal.
10. The apparatus of claim 9, wherein said attenuating the particle beam comprises:
absorbing the particle beam on a channel of the particle beam entering the imaging area, so that the particle beam cannot reach the imaging area; and/or
Reflecting the particle beam on a channel of the particle beam entering the imaging area, so that the particle beam cannot reach the imaging area; and/or
And scattering the particle beam on a channel of the particle beam entering the imaging area, so that the particle beam cannot reach the imaging area.
11. The apparatus of claim 9, wherein said deflecting said particle beam comprises:
deflecting the particle beam using an electric and/or magnetic field on its way into the imaging region such that the particle beam does not reach the imaging region.
12. The apparatus of claim 9, wherein the average noise signal obtaining module comprises:
an integration processing submodule configured to perform integration processing on the noise signals of the rows to obtain average noise signals of the rows; or
And the mean value filtering processing sub-module is configured to perform mean value filtering processing on the noise signals of the rows to obtain average noise signals of the rows.
13. The apparatus of claim 9, wherein the second image signal acquisition module comprises:
a third image signal acquisition sub-module configured to perform a hold operation on the first image signals of the row, resulting in third image signals of the row;
and the average noise signal reduction sub-module is configured to reduce the average noise signal of the row from the third image signal of the row to obtain the second image signal of the row.
14. The apparatus of claim 13, wherein the subtracting the row's average noise signal from the row's third image signal comprises:
using a Kalman filtering process, subtracting the average noise signal for the line from the third image signal for the line.
15. The apparatus according to claim 9, before acquiring the first image signal of the line from the line scan image signal in the active time of the line scan, further comprising:
a first analog-to-digital conversion module configured to convert the line scan image signal from an analog signal to a digital signal.
16. The apparatus of claim 9, further comprising:
a second analog-to-digital conversion module configured to convert the second image signal from an analog signal to a digital signal.
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102833462A (en) * | 2012-07-23 | 2012-12-19 | 苏州生物医学工程技术研究所 | Confocal point scanning and imaging signal preprocessing method |
| CN103020913A (en) * | 2012-12-18 | 2013-04-03 | 武汉大学 | Remote-sensing image stripe noise removing method based on segmented correction |
| CN104754181A (en) * | 2013-12-30 | 2015-07-01 | 浙江大华技术股份有限公司 | Video noise estimating method and device |
| CN107564509A (en) * | 2017-10-23 | 2018-01-09 | 上海联影医疗科技有限公司 | Noise reduction system |
| CN108027501A (en) * | 2015-09-21 | 2018-05-11 | 科磊股份有限公司 | The method and system of noise decrease in multi beam scanning electron microscope system |
| CN110537201A (en) * | 2017-02-24 | 2019-12-03 | 新宁研究院 | System and method for noise reduction to be imaged |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4007775B2 (en) * | 2001-07-23 | 2007-11-14 | 株式会社日立メディコ | X-ray diagnostic equipment |
| JP6108684B2 (en) * | 2011-06-08 | 2017-04-05 | エフ・イ−・アイ・カンパニー | High precision beam placement for local area navigation |
| GB201402318D0 (en) * | 2014-02-11 | 2014-03-26 | Oxford Instr Nanotechnology Tools Ltd | Method for materials analysis |
| CN104574316B (en) * | 2015-01-13 | 2018-09-14 | 南京佰能唯医疗科技有限公司 | A kind of digitized X-ray machine system |
| US11257190B2 (en) * | 2019-03-01 | 2022-02-22 | Topcon Corporation | Image quality improvement methods for optical coherence tomography |
| CN110618131B (en) * | 2019-09-12 | 2022-03-18 | 西北工业大学深圳研究院 | Large-field super-resolution fluid microscopic imaging system and implementation method thereof |
| CN111199526A (en) * | 2019-12-31 | 2020-05-26 | 南京钜典影像科技有限公司 | Medical image denoising method and system |
-
2020
- 2020-11-12 CN CN202011264352.XA patent/CN114494028B/en active Active
- 2020-12-15 WO PCT/CN2020/136610 patent/WO2022099851A1/en unknown
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102833462A (en) * | 2012-07-23 | 2012-12-19 | 苏州生物医学工程技术研究所 | Confocal point scanning and imaging signal preprocessing method |
| CN103020913A (en) * | 2012-12-18 | 2013-04-03 | 武汉大学 | Remote-sensing image stripe noise removing method based on segmented correction |
| CN104754181A (en) * | 2013-12-30 | 2015-07-01 | 浙江大华技术股份有限公司 | Video noise estimating method and device |
| CN108027501A (en) * | 2015-09-21 | 2018-05-11 | 科磊股份有限公司 | The method and system of noise decrease in multi beam scanning electron microscope system |
| CN110537201A (en) * | 2017-02-24 | 2019-12-03 | 新宁研究院 | System and method for noise reduction to be imaged |
| CN107564509A (en) * | 2017-10-23 | 2018-01-09 | 上海联影医疗科技有限公司 | Noise reduction system |
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