CN114488655A - Gray filtering lens, preparation method thereof and camera module - Google Patents
Gray filtering lens, preparation method thereof and camera module Download PDFInfo
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- CN114488655A CN114488655A CN202210276282.2A CN202210276282A CN114488655A CN 114488655 A CN114488655 A CN 114488655A CN 202210276282 A CN202210276282 A CN 202210276282A CN 114488655 A CN114488655 A CN 114488655A
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B11/00—Filters or other obturators specially adapted for photographic purposes
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
- G02F1/153—Constructional details
Abstract
A gray-scale filtering lens, a manufacturing method thereof and a camera module relate to the technical field of optics. The gray filter lens comprises a first substrate, a second substrate, an electrochromic layer arranged between the first substrate and the second substrate, two conductive columns penetrating through the first substrate and arranged at intervals, a positive electrode and a negative electrode; and one ends of the two conductive columns, which are close to the second substrate, are connected with the electrochromic layer, and the other ends of the two conductive columns are respectively connected with the positive electrode and the negative electrode. The gray filter lens can improve the use flexibility and the universality of the gray filter lens.
Description
Technical Field
The invention relates to the technical field of optics, in particular to a gray-scale filtering lens, a preparation method thereof and a camera module.
Background
The gray filter lens is also called ND mirror, is a colorless to gray photographic filter, and is an optical element that attenuates light intensity by using the absorption characteristics of a substance to light. In the field of photography, the main purpose of using a gray filter lens is to prevent overexposure, for example, outdoor photography where sunlight is intense or exposure to light for a long time under normal light conditions is required.
The traditional single-chip gray-scale filter lens can only attenuate light intensity to a single degree, so the gray-scale filter lens used in photography is divided into different specifications according to different light-reducing amounts, and in actual use, the gray-scale filter lens with different specifications needs to be selected according to requirements. However, when the gray filter lens is applied to scenes with wide light intensity variation range, in order to switch different filter levels according to requirements, gray filter lenses with different specifications need to be equipped for standby, which undoubtedly increases the photographing cost and the photographing working intensity.
Disclosure of Invention
The invention aims to provide a gray-scale filtering lens, a preparation method thereof and a camera module.
The embodiment of the invention is realized by the following steps:
in one aspect of the present invention, a gray filter lens is provided, which includes a first substrate, a second substrate, an electrochromic layer disposed between the first substrate and the second substrate, two conductive pillars penetrating the first substrate and disposed at intervals, and a positive electrode and a negative electrode; and one ends of the two conductive columns, which are close to the second substrate, are connected with the electrochromic layer, and the other ends of the two conductive columns are respectively connected with the positive electrode and the negative electrode. The gray filter lens can improve the use flexibility and the universality of the gray filter lens.
Optionally, the gray filter lens further includes a sealant layer located between the second substrate and the electrochromic layer, and the sealant layer covers the electrochromic layer and is exposed out of the surface of the first substrate.
Optionally, the material of the conductive pillar is silicon doped with phosphorus or boron.
Optionally, the resistivity of the conductive pillars is less than 2m Ω · cm.
Optionally, the gray filter lens further includes a first antireflection film disposed on a side of the first substrate away from the second substrate, and an orthographic projection of the first antireflection film on the first substrate and an orthographic projection of the electrochromic layer on the first substrate are at least partially overlapped.
Optionally, the gray filter lens further includes a second antireflection film disposed on a side of the second substrate away from the first substrate, and an orthographic projection of the second antireflection film on the first substrate and an orthographic projection of the electrochromic layer on the first substrate are at least partially overlapped.
Optionally, the material of the first substrate and the second substrate is glass.
In another aspect of the present invention, a method for manufacturing a gray-scale filter lens is provided, the method comprising:
providing a first substrate, wherein two spaced conductive columns are arranged in the first substrate, and a conductive layer is arranged on one side of the first substrate;
forming an electrochromic layer on one surface of the first substrate, which is far away from the conductive layer, wherein the electrochromic layer is respectively connected with the two conductive posts, and the orthographic projection of the electrochromic layer on the first substrate is positioned in the first substrate;
bonding a second substrate and one surface of the first substrate, which is close to the electrochromic layer, wherein the second substrate is provided with a blind hole, and the electrochromic layer is positioned in the blind hole;
removing the conductive layer and exposing the two conductive columns;
and forming a positive electrode connected with one conductive column and a negative electrode connected with the other conductive column on one side of the two conductive columns, which is far away from the second substrate.
Optionally, the providing a first substrate, wherein two spaced conductive pillars are disposed in the first substrate, and one side of the first substrate has a conductive layer, includes:
coating a photoresist layer on a silicon wafer and patterning the photoresist layer;
etching the silicon wafer through the photoresist layer to form three spaced grooves, conductive columns respectively positioned between two adjacent grooves and conductive layers positioned on the same sides of the grooves and the conductive columns on the silicon wafer, and removing the photoresist layer;
bonding a first substrate on one surface of the silicon wafer with the grooves, and melting the first substrate into the three grooves through a hot melting process to obtain the first substrate embedded with two spaced conductive columns;
and thinning and polishing one surface of the first substrate departing from the conducting layer to expose the two conducting posts.
In another aspect of the present invention, a camera module is provided, which includes the above-mentioned gray-scale filter lens.
The beneficial effects of the invention include:
the gray filter lens comprises a first substrate, a second substrate, an electrochromic layer arranged between the first substrate and the second substrate, two conductive columns penetrating through the first substrate and arranged at intervals, a positive electrode and a negative electrode; and one ends of the two conductive columns, which are close to the second substrate, are connected with the electrochromic layer, and the other ends of the two conductive columns are respectively connected with the positive electrode and the negative electrode. When the electrochromic layer is used, a user switches on the positive electrode and the negative electrode, and applies different levels of voltage to the positive electrode and the negative electrode according to requirements, so that the electrochromic layer can show different transmittances in a visible light wave band. Through the design, compared with the gray level filtering lenses with different specifications adopted in the prior art, when different filtering grades are required to be obtained, only the applied voltage grade needs to be changed according to requirements, and the gray level filtering lenses with other specifications do not need to be disassembled and replaced, so that the universality of the gray level filtering lenses can be improved; on the other hand, the user's work intensity during photographing can be reduced.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of a gray-scale filter lens according to some embodiments of the present invention;
fig. 2 is a schematic flow chart illustrating a method for manufacturing a gray filter lens according to some embodiments of the present invention;
fig. 3 is a second schematic flow chart of a method for manufacturing a gray-scale filter lens according to some embodiments of the present invention;
fig. 4 is a schematic diagram illustrating a manufacturing process of a gray-scale filter lens according to some embodiments of the present invention;
fig. 5 is a second schematic view illustrating a manufacturing process of a gray-scale filter lens according to some embodiments of the invention;
fig. 6 is a third schematic view illustrating a manufacturing process of a gray-scale filter lens according to some embodiments of the invention;
fig. 7 is a fourth schematic view illustrating a manufacturing process of a gray-scale filter lens according to some embodiments of the invention;
fig. 8 is a fifth schematic view illustrating a manufacturing process of a gray-scale filter lens according to some embodiments of the present invention;
fig. 9 is a sixth schematic view illustrating a manufacturing process of a gray-scale filter lens according to some embodiments of the present invention;
fig. 10 is a seventh schematic view illustrating a manufacturing process of a gray-scale filter lens according to some embodiments of the present invention;
fig. 11 is an eighth schematic view illustrating a manufacturing process of a gray-scale filter lens according to some embodiments of the invention;
fig. 12 is a ninth schematic view illustrating a process for manufacturing a gray-scale filter lens according to some embodiments of the present invention;
fig. 13 is a ten-step schematic diagram illustrating a process for manufacturing a gray-scale filter lens according to some embodiments of the invention;
fig. 14 is an eleventh schematic view illustrating a manufacturing process of a gray-scale filter lens according to some embodiments of the invention;
fig. 15 is a twelfth schematic view of a manufacturing process of a gray-scale filter lens according to some embodiments of the present invention.
Icon: 10-a first substrate; 20-a second substrate; 30-an electrochromic layer; 40-a silicon wafer; 41-conductive pillars; 42-a conductive layer; 51-positive electrode; 52-negative electrode; 60-sealing adhesive layer; 71-a first antireflection film; 72-a second antireflective film; 81-photoresist layer; 82-a groove; 83-bonding layer.
Detailed Description
The embodiments set forth below represent the information necessary to enable those skilled in the art to practice the embodiments and illustrate the best mode of practicing the embodiments. Upon reading the following description in light of the accompanying drawing figures, those skilled in the art will understand the concepts of the invention and will recognize applications of these concepts not particularly addressed herein. It should be understood that these concepts and applications fall within the scope of the invention and the accompanying claims.
It will be understood that, although the terms first, second, etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, a first element could be termed a second element, and, similarly, a second element could be termed a first element, without departing from the scope of the present invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
It will be understood that when an element such as a layer, region or substrate is referred to as being "on" or "extending" onto "another element, it can be directly on or extend directly onto the other element or intervening elements may also be present. In contrast, when an element is referred to as being "directly on" or extending "directly onto" another element, there are no intervening elements present. Also, it will be understood that when an element such as a layer, region or substrate is referred to as being "on" or "extending over" another element, it can be directly on or extend directly over the other element or intervening elements may also be present. In contrast, when an element is referred to as being "directly on" or extending "directly over" another element, there are no intervening elements present. It will also be understood that when an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements may be present. In contrast, when an element is referred to as being "directly connected" or "directly coupled" to another element, there are no intervening elements present.
Relative terms such as "below …" or "above …" or "upper" or "lower" or "horizontal" or "vertical" may be used herein to describe one element, layer or region's relationship to another element, layer or region as illustrated in the figures. It will be understood that these terms and those discussed above are intended to encompass different orientations of the device in addition to the orientation depicted in the figures.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used herein, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms used herein should be interpreted as having a meaning that is consistent with their meaning in the context of this specification and the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
Referring to fig. 1, the present embodiment provides a gray filter lens, which includes a first substrate 10, a second substrate 20, an electrochromic layer 30 disposed between the first substrate 10 and the second substrate 20, two conductive pillars 41 penetrating the first substrate 10 and disposed at intervals, and a positive electrode 51 and a negative electrode 52; one end of each of the two conductive pillars 41 near the second substrate 20 is connected to the electrochromic layer 30, and the other end is connected to the positive electrode 51 and the negative electrode 52, respectively.
Wherein, optionally, the material of the first substrate 10 and the second substrate 20 is glass. In the present embodiment, two spaced conductive pillars 41 need to be disposed through the first substrate 10, as shown in fig. 1, and therefore, when the material of the first substrate 10 provided in the present embodiment is glass, it should be through-hole glass (i.e. glass with through-holes, in the present embodiment, it should be glass with two through-holes, and one through-hole is embedded with one conductive pillar 41).
The second substrate 20 and the first substrate 10 are bonded together by a bonding layer 83, wherein when the second substrate 20 is made of glass, the second substrate 20 may be blind-hole glass in order to facilitate the electrochromic layer 30 to be disposed on the surface of the first substrate 10 close to the second substrate 20 and to be accommodated in the second substrate 20.
In the present embodiment, the electrochromic layer 30 is connected to two conductive pillars 41, and the positive electrode 51 is connected to one of the conductive pillars 41 and the negative electrode is connected to the other conductive pillar 41. Thus, the electrochromic layer 30 may be applied with a voltage through the positive electrode 51 and the negative electrode 52. In this way, when voltages of different levels are applied to the electrochromic layer 30, the electrochromic layer 30 may exhibit different transmittances in the visible light band, thereby implementing the function of a gray mirror. This application is through having the conductive pillar 41 at first base plate 10 is embedded, and makes conductive pillar 41 and electrochromic layer 30 connect, can realize the switching of different filtering grades through changing the voltage level to effectively improve the poor problem of grey level filtering lens commonality among the prior art.
It should be noted that the left conductive pillar 41 shown in fig. 1 is connected to the positive electrode 51, and the right conductive pillar 41 is connected to the negative electrode 52 only for the purpose of illustration and not limitation, and in other embodiments, the left conductive pillar 41 may also be connected to the negative electrode 52, and the right conductive pillar 41 may be connected to the positive electrode 51. When the gray filter lens provided by the application is used, the positive electrode 51 and the negative electrode 52 are powered on, so that voltages with different levels are applied to the electrochromic layer 30, and free switching of different filtering levels can be realized.
In summary, the gray filter lens provided by the present application includes a first substrate 10, a second substrate 20, an electrochromic layer 30 disposed between the first substrate 10 and the second substrate 20, two conductive pillars 41 penetrating the first substrate 10 and disposed at intervals, and a positive electrode 51 and a negative electrode 52; one end of each of the two conductive pillars 41 near the second substrate 20 is connected to the electrochromic layer 30, and the other end is connected to the positive electrode 51 and the negative electrode 52, respectively. In use, the user turns on the positive electrode 51 and the negative electrode 52 and applies different levels of voltage to them as needed, so that the electrochromic layer 30 can exhibit different transmittances in the visible light band. Through the design, compared with the gray level filtering lenses with different specifications adopted in the prior art, when different filtering grades are required to be obtained, only the applied voltage grade needs to be changed according to the requirement, and the gray level filtering lenses with other specifications do not need to be disassembled and replaced, so that on one hand, the universality of the gray level filtering lenses can be improved; on the other hand, the user's work intensity during photographing can be reduced.
In order to improve the sealing property and connection reliability between the electrochromic layer 30 and the second substrate 20, in the present embodiment, the gray filter lens further includes a sealant layer 60 between the second substrate 20 and the electrochromic layer 30, and the sealant layer 60 covers the surface of the electrochromic layer 30 exposed to the first substrate 10.
Optionally, the material of the conductive pillar 41 is silicon doped with phosphorus or boron. By doping silicon with phosphorus or boron, the resistance of silicon can be reduced (i.e., the resistance of the conductive post 41 is reduced), which can facilitate accurate control of the voltage control of the electrochromic layer 30.
Further, in the present embodiment, the resistivity of the conductive post 41 may be less than 2m Ω · cm. Illustratively, the resistivity of the conductive post 41 may be, for example, 1.5m Ω · cm, 1.3m Ω · cm, 1.0m Ω · cm, or the like, which is not enumerated herein.
In order to improve the transmittance of the gray filter lens, in this embodiment, optionally, the gray filter lens further includes a first antireflection film 71 disposed on a side of the first substrate 10 away from the second substrate 20, and an orthographic projection of the first antireflection film 71 on the first substrate 10 and an orthographic projection of the electrochromic layer 30 on the first substrate 10 at least partially overlap.
Of course, in addition to adding the first antireflection film 71 on the surface of the first substrate 10 away from the second substrate 20, in this embodiment, the gray filter lens may further include a second antireflection film 72 disposed on the side of the second substrate 20 away from the first substrate 10, and an orthographic projection of the second antireflection film 72 on the first substrate 10 and an orthographic projection of the electrochromic layer 30 on the first substrate 10 are at least partially overlapped.
Referring to fig. 2, another aspect of the present invention provides a method for manufacturing a gray-scale filter lens, the method comprising:
s100, a first substrate 10 is provided, two spaced conductive pillars 41 are disposed in the first substrate 10, and a conductive layer 42 is disposed on one side of the first substrate 10, as shown in fig. 9.
It should be noted that the first substrate 10 has two blind holes, and the two conductive posts 41 are embedded in the two blind holes respectively. The conductive post 41 and the conductive layer 42 may be made of the same material.
Referring to fig. 3, optionally, the step S100 of providing a first substrate 10, wherein two spaced conductive pillars 41 are disposed in the first substrate 10, and one side of the first substrate 10 has a conductive layer 42, may specifically include the following steps:
s110, a photoresist layer 81 is coated on the silicon wafer 40, and the photoresist layer 81 is patterned, as shown in fig. 4.
In the present embodiment, the silicon wafer 40 is used for forming the conductive pillars 41 and the conductive layer 42 through subsequent steps, and in the present embodiment, the silicon wafer 40 may be heavily doped with phosphorus or boron so as to reduce the resistivity of the subsequently formed conductive pillars 41, so that the resistivity of the subsequently formed conductive pillars 41 is less than 2m Ω.
S120, etching the silicon wafer 40 through the photoresist layer 81 to form three spaced grooves 82, conductive pillars 41 respectively located between two adjacent grooves 82, and conductive layers 42 located at the same sides of the grooves 82 and the conductive pillars 41 on the silicon wafer 40, and removing the photoresist layer 81, as shown in fig. 5 and 6.
It should be noted that the conductive pillars 41 include two, and two conductive pillars 41 are respectively located between two adjacent grooves 82.
S130, bonding the first substrate 10 on the surface of the silicon wafer 40 having the grooves 82, and melting the first substrate 10 into the three grooves 82 through a hot melting process to obtain the first substrate 10 embedded with two spaced conductive pillars 41, as shown in fig. 7 and 8.
In this embodiment, the material of the first substrate 10 may be glass, wherein the glass and the silicon wafer 40 have similar thermal expansion coefficients and similar processing characteristics, so that the first substrate 10 embedded with the conductive pillar 41 has better thermal shock resistance, air tightness and stability when processed.
The silicon wafer 40 and the first substrate 10 may be bonded by anodic bonding or laser bonding.
S140, performing thinning and polishing on a surface of the first substrate 10 away from the conductive layer 42 to expose the two conductive pillars 41, as shown in fig. 9.
S200, forming an electrochromic layer 30 on a surface of the first substrate 10 away from the conductive layer 42, where the electrochromic layer 30 is connected to the two conductive pillars 41, respectively, and an orthographic projection of the electrochromic layer 30 on the first substrate 10 is located inside the first substrate 10, please refer to fig. 10.
The electrochromic layer 30 and the conductive posts 41 are connected to facilitate applying a voltage to the electrochromic layer 30 through the conductive posts 41 to change the transmittance thereof.
And S300, bonding the second substrate 20 and the first substrate 10 on the side close to the electrochromic layer 30, wherein the second substrate 20 is provided with a blind hole, and the electrochromic layer 30 is positioned in the blind hole, as shown in figure 12.
In order to protect the electrochromic layer 30 and to improve the connection strength between the electrochromic layer 30 and the second substrate 20, in this embodiment, optionally between step S200 and step S300, the following steps may be further included:
a sealant layer 60 is formed on the electrochromic layer 30, and the sealant layer 60 covers the electrochromic layer 30 exposed to the outer surface of the first substrate 10, as shown in fig. 11.
Note that the first substrate 10 and the second substrate 20 may be bonded together by a bonding layer 83.
S400, remove the conductive layer 42 and expose the two conductive pillars 41, as shown in fig. 13.
Wherein, removing the conductive layer 42 can be achieved by using a thinning and polishing process.
In step S400, when the conductive layer 42 is removed, the second substrate 20 may be thinned by a thinning polishing process.
S500, forming a positive electrode 51 connected to one conductive pillar 41 and a negative electrode 52 connected to another conductive pillar 41 on a side of the two conductive pillars 41 away from the second substrate 20, as shown in fig. 14.
In addition, in order to improve the transmittance of the gray filter lens, in this embodiment, the preparation method may further include a process of forming a first antireflection film 71 on a side of the first substrate 10 away from the second substrate 20 and forming a second antireflection film 72 on a side of the second substrate 20 away from the first substrate 10, as shown in fig. 15.
In another aspect of the present invention, a camera module is provided, which includes the above-mentioned gray-scale filter lens. The specific structure and the beneficial effects of the gray-scale filtering lens have been described in detail in the foregoing, so that no further description is provided herein.
The above description is only an alternative embodiment of the present invention and is not intended to limit the present invention, and various modifications and variations of the present invention may occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
It should be noted that the various technical features described in the above embodiments can be combined in any suitable manner without contradiction, and the invention is not described in any way for the possible combinations in order to avoid unnecessary repetition.
Claims (10)
1. A gray filter lens is characterized by comprising a first substrate, a second substrate, an electrochromic layer arranged between the first substrate and the second substrate, two conductive columns penetrating through the first substrate and arranged at intervals, and a positive electrode and a negative electrode; one end of each conductive column close to the second substrate is connected with the electrochromic layer, and the other end of each conductive column is connected with the positive electrode and the negative electrode respectively.
2. The gray-scale filter lens of claim 1, further comprising a sealant layer between the second substrate and the electrochromic layer, wherein the sealant layer covers the electrochromic layer exposed from the surface of the first substrate.
3. The gray-scale filter lens of claim 1, wherein the conductive pillar is made of silicon doped with phosphorus or boron.
4. The gray filter lens of claim 3, wherein the resistivity of the conductive pillars is less than 2m Ω -cm.
5. The gray filter lens of claim 1, further comprising a first anti-reflection film disposed on a side of the first substrate facing away from the second substrate, wherein an orthographic projection of the first anti-reflection film on the first substrate and an orthographic projection of the electrochromic layer on the first substrate at least partially overlap.
6. The gray filter lens of claim 1 or 5, further comprising a second antireflection film disposed on a side of the second substrate facing away from the first substrate, wherein an orthographic projection of the second antireflection film on the first substrate and an orthographic projection of the electrochromic layer on the first substrate at least partially overlap.
7. A gray filter lens as claimed in claim 1, wherein the material of said first substrate and said second substrate is glass.
8. A method for manufacturing a gray-scale filter lens is characterized by comprising the following steps:
providing a first substrate, wherein two spaced conductive columns are arranged in the first substrate, and a conductive layer is arranged on one side of the first substrate;
forming an electrochromic layer on one surface of the first substrate, which is far away from the conductive layer, wherein the electrochromic layer is respectively connected with the two conductive posts, and the orthographic projection of the electrochromic layer on the first substrate is positioned in the first substrate;
bonding a second substrate and one surface, close to the electrochromic layer, of the first substrate, wherein the second substrate is provided with a blind hole, and the electrochromic layer is located in the blind hole;
removing the conducting layer and exposing the two conducting posts;
and forming a positive electrode connected with one conductive column and a negative electrode connected with the other conductive column on one side of the two conductive columns, which is far away from the second substrate.
9. The method of claim 8, wherein providing a first substrate with two spaced conductive pillars and a conductive layer on one side of the first substrate comprises:
coating a photoresist layer on a silicon wafer and patterning the photoresist layer;
etching the silicon wafer through the photoresist layer to form three spaced grooves, conductive columns respectively positioned between two adjacent grooves and conductive layers positioned on the same sides of the grooves and the conductive columns on the silicon wafer, and removing the photoresist layer;
bonding a first substrate on one surface of the silicon wafer, which is provided with the grooves, and fusing the first substrate into the three grooves through a hot melting process to obtain a first substrate embedded with two spaced conductive posts;
it is right that first base plate deviates from the one side of conducting layer carries out the attenuate polishing, in order to expose two it leads electrical pillar.
10. A camera module comprising the gray-scale filter lens according to any one of claims 1 to 7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210276282.2A CN114488655A (en) | 2022-03-21 | 2022-03-21 | Gray filtering lens, preparation method thereof and camera module |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
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