CN114488550B - Infrared multi-angle continuously variable spectral ratio coated fluoride spectroscope and manufacturing method thereof - Google Patents
Infrared multi-angle continuously variable spectral ratio coated fluoride spectroscope and manufacturing method thereof Download PDFInfo
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- CN114488550B CN114488550B CN202210088974.4A CN202210088974A CN114488550B CN 114488550 B CN114488550 B CN 114488550B CN 202210088974 A CN202210088974 A CN 202210088974A CN 114488550 B CN114488550 B CN 114488550B
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- vanadium dioxide
- barium fluoride
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- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 title claims abstract description 13
- 230000003595 spectral effect Effects 0.000 title claims abstract description 9
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 229910021542 Vanadium(IV) oxide Inorganic materials 0.000 claims abstract description 78
- GRUMUEUJTSXQOI-UHFFFAOYSA-N vanadium dioxide Chemical compound O=[V]=O GRUMUEUJTSXQOI-UHFFFAOYSA-N 0.000 claims abstract description 78
- OYLGJCQECKOTOL-UHFFFAOYSA-L barium fluoride Chemical compound [F-].[F-].[Ba+2] OYLGJCQECKOTOL-UHFFFAOYSA-L 0.000 claims abstract description 65
- 229910001632 barium fluoride Inorganic materials 0.000 claims abstract description 65
- 238000007747 plating Methods 0.000 claims abstract description 26
- 239000000463 material Substances 0.000 claims abstract description 22
- 238000005485 electric heating Methods 0.000 claims abstract description 18
- 239000011248 coating agent Substances 0.000 claims abstract description 11
- 238000000576 coating method Methods 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims abstract description 10
- 229920002120 photoresistant polymer Polymers 0.000 claims description 26
- 238000005530 etching Methods 0.000 claims description 9
- 238000004140 cleaning Methods 0.000 claims description 8
- 230000008859 change Effects 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 238000004590 computer program Methods 0.000 claims description 3
- 238000003331 infrared imaging Methods 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 3
- 238000004806 packaging method and process Methods 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 abstract description 9
- 238000000206 photolithography Methods 0.000 abstract 1
- 230000007704 transition Effects 0.000 description 20
- 238000002834 transmittance Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
Abstract
The invention discloses an infrared multi-angle continuous variable spectral ratio coated fluoride spectroscope, which comprises a barium fluoride flat sheet, wherein an antireflection film and a dimming film are respectively coated on two surfaces of the barium fluoride flat sheet, the dimming film is formed by matching and coating a plurality of vanadium dioxide film blocks and barium fluoride film blocks, and an electric heating material is coated on the surfaces of the vanadium dioxide film blocks and is used for heating the vanadium dioxide film blocks; also disclosed is a method of preparing the light modulating film by plating a vanadium dioxide film block and a barium fluoride film block by photolithography. The invention has adjustable beam splitting ratio, wide application range and improved use convenience.
Description
Technical Field
The invention relates to the technical field of spectroscope preparation, in particular to a spectroscope with far infrared multi-angle continuously variable spectroscope ratio in a fluoride substrate and a manufacturing method thereof.
Background
A beam splitter is an optical device for splitting a beam of light into two beams, and is generally performed by plating a semi-transparent and semi-reflective film on the surface of a substrate.
The light-splitting film can realize light splitting of a specific proportion only in a specific wavelength or a specific wavelength range under the condition of a specific or small range of incident angles because the film layer is fixed and invariable.
For the condition of a certain light splitting ratio, the fixed proportion spectroscope can better complete tasks. However, in special cases, such as a spectrometer or some optical experiments, where continuous changes in the spectrum are required, such a fixed ratio spectroscope is not adequate.
The problem can be solved to a certain extent by replacing the spectroscope, but the method needs to purchase an additional spectroscope and readjust the light path, which is time-consuming and labor-consuming. While the solution is also inadequate in the face of a continuous variation of the angle of incidence and the ratio of the light split.
Disclosure of Invention
The invention aims to solve the technical problem of providing an infrared multi-angle continuously variable spectral ratio coated fluoride spectroscope and a manufacturing method thereof, which have adjustable spectral ratio, wide application range and improved use convenience.
In order to solve the technical problems, the invention provides an infrared multi-angle continuously variable light splitting ratio coated fluoride spectroscope, which comprises a barium fluoride flat sheet, wherein an antireflection film and a light adjusting film are respectively coated on two surfaces of the barium fluoride flat sheet, the light adjusting film is formed by matching and coating a plurality of vanadium dioxide film blocks and barium fluoride film blocks, an electric heating material is coated on the surfaces of the barium fluoride film blocks, and the electric heating material is used for heating the vanadium dioxide film blocks.
Further, the area ratio of the plurality of vanadium dioxide film blocks to the plurality of barium fluoride film blocks on the surface of the barium fluoride flat sheet is 3:1.
further, the barium fluoride film blocks are of triangular structures, and the vanadium dioxide film blocks are arranged on three peripheries of the barium fluoride film blocks in a surrounding mode.
Further, the barium fluoride film block is of a honeycomb frame structure, and the vanadium dioxide film block is of a hexagonal structure.
Further, the electric heating device also comprises a control mirror frame, wherein an electric control contact is arranged on the electric heating material, a connecting circuit connected with the electric control contact is arranged in the control mirror frame, and the connecting circuit is connected with a power supply through a controller.
Further, the wavelength band of the antireflection film is 5-10 micrometers, and the thickness of the dimming film is 0.8-1.2 micrometers.
The method for manufacturing the infrared multi-angle continuously variable spectral ratio coated fluoride spectroscope comprises the following steps:
step 1) polishing a barium fluoride flat sheet to be used as a base material;
step 2) uniformly coating photoresist on one side surface of the barium fluoride flat sheet;
step 3) exposing and etching the photoresist, and exposing partial areas of the surface of the barium fluoride flat sheet;
step 4) plating a vanadium dioxide film block or a barium fluoride film block on the surface of the substrate according to the exposed area;
step 5) cleaning and removing the photoresist; when the vanadium dioxide film block is plated in the step 4, exposing the surface area of the barium fluoride flat sheet corresponding to the barium fluoride film block to obtain an unplated area; when the barium fluoride film block is plated in the step 4, exposing the surface area of the barium fluoride flat sheet corresponding to the vanadium dioxide film block to obtain an unplated area;
step 6) coating photoresist again;
step 7) etching and removing the photoresist in the unplated areas;
step 8) plating a vanadium dioxide film block or a barium fluoride film block, when the vanadium dioxide film block is plated in the step 4, plating the barium fluoride film block at the moment, and otherwise plating the vanadium dioxide film block;
step 9) cleaning and removing the photoresist to obtain a dimming film;
step 10), coating photoresist on the surface of the dimming film again, etching and plating electric heating materials on the vanadium dioxide film blocks, wherein each electric heating material is provided with an independent contact, and cleaning and removing the photoresist to finish plating;
step 11), plating a broadband antireflection film on the other surface of the barium fluoride flat sheet;
step 12) packaging the lenses in a lens frame, wherein a connecting circuit connected with an electric control contact is arranged in the lens frame, and the connecting circuit is connected with a power supply through a controller to obtain the spectroscope.
Further, an infrared imaging temperature measuring device is arranged at the position where the mirror surface leaves the light path, and the whole of the splitter and each vanadium dioxide film block are monitored.
Further, the proportion of the area needing phase change in the vanadium dioxide film block is calculated according to the required light splitting ratio, and the vanadium dioxide film block is heated under the control of a computer program, so that the heated vanadium dioxide film block is changed from an insulating state to a metal state and is maintained.
The invention has the beneficial effects that:
the coated spectroscope formed by matching the fluoride substrate and the vanadium dioxide/barium fluoride film can realize the effect of adjustable transmission/reflection ratio in a very wide range of mid-far infrared under the condition of continuous incident angle conversion, so that spectroscopes with different beam splitting ratios do not need to be purchased, and related light paths do not need to be adjusted.
The vanadium dioxide film blocks can be independently heated, so that the phase change state of each vanadium dioxide film block can be controlled, the purpose of continuous adjustment is effectively achieved through the control of different states, and the use requirement is met.
Drawings
FIG. 1 is a schematic cross-sectional view of a beam-splitting lens of the present invention;
FIG. 2 is a graph of transmittance at various temperatures of a vanadium dioxide film of the present invention;
FIG. 3 is a schematic view of a light modulating film structure of the present invention;
FIG. 4 is a schematic view of a light modulation film according to another embodiment of the present invention;
FIG. 5 is a schematic illustration of the preparation flow of the present invention.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and specific examples, which are not intended to be limiting, so that those skilled in the art will better understand the invention and practice it.
Referring to fig. 1, in an embodiment of an infrared multi-angle continuously variable spectral ratio coated fluoride spectroscope of the present invention, a barium fluoride flat sheet 1 is adopted, barium fluoride has the advantages of high transmittance and low absorption in a far infrared band (5-10 micrometers), an antireflection film 2 and a light modulation film 3 are respectively coated on two surfaces of the barium fluoride flat sheet, the wavelength band of the antireflection film is 5-10 micrometers, the thickness of the light modulation film is 0.8-1.2 micrometers, the light modulation film is formed by plating a plurality of vanadium dioxide film blocks 4 and barium fluoride film blocks 5 in a matched manner, the surfaces of the barium fluoride film blocks are coated with an electric heating material 6, the electric heating material is used for heating the vanadium dioxide film blocks, and the vanadium dioxide film blocks are in an insulating state when being lower than a transition temperature, have very low middle and far infrared absorption, can transmit most middle and far infrared light rays, are in a metal state when being higher than the transition temperature, and can reflect the middle far infrared light rays. By controlling the state change of the plurality of vanadium dioxide film blocks, different transmission/reflection ratios are formed after the vanadium dioxide film blocks with different numbers are changed into metal states, and the effect of continuously variable light splitting ratio is achieved.
The plating thickness of the vanadium dioxide film block is consistent with that of a plurality of barium fluoride film blocks, so that the evenness of the surface of the dimming film is ensured, the effect of forming a layer of film is achieved, the scattering effect is reduced, and the light emitting effect is also ensured.
The area ratio of the plurality of vanadium dioxide film blocks to the plurality of barium fluoride film blocks on the surface of the barium fluoride flat sheet is 3:1, the duty cycle is a near optimal solution calculated based on the condition of the maximum range of reflection/transmission ratios. As can be seen from fig. 2, in the insulating state, the transmittance of vanadium dioxide is about 65% (reflectance is about 30% -35%), and in the metallic state, the transmittance of vanadium dioxide is about 0, and the reflectance is about 80%. Therefore, in the design of plating vanadium dioxide in 75% of the lens and barium fluoride in 25% of the lens, when the vanadium dioxide is all in an insulating state, the overall transmittance/reflectance of the lens is about 7:3; when the vanadium dioxide is all in the metallic state, the overall lens transmittance/reflectance is about 1:3. By adjusting the state of each vanadium dioxide film block individually, the transmittance/reflectance ratio of the entire lens can be controlled to be continuously adjusted in the range of 1:3 to 7:3.
Specifically, when the method is used, the number of vanadium dioxide film blocks needing phase transition is calculated according to the applicable splitting ratio, taking partial phase transition as an example, selecting a target needing phase transition, heating the target by controlling an electric heating material, immediately converting the target into a metal state after reaching the phase transition temperature, and controlling the electric heating material to control the temperature of the vanadium dioxide film blocks after phase transition within the phase transition continuous temperature due to direct heating, wherein the temperature on the target is higher than the unheated temperature for the vanadium dioxide film blocks which are unheated at the periphery, so that the heating is immediately stopped after reaching the phase transition temperature, the unheated vanadium dioxide film blocks do not change phase, and the vanadium dioxide film blocks after phase transition can continue to keep the metal state under the phase transition continuous temperature.
For better work of electric heating material, still be provided with the control picture frame, be provided with automatically controlled contact on the electric heating material, be provided with the connecting circuit who is connected with automatically controlled contact in the control picture frame, connecting circuit can obtain through the mode of printing, and connecting circuit passes through the controller and is connected with the power, and the controller controls electric heating material and gets electricity or lose electricity to reach the purpose of control heating.
The dimming film can be composed of three vanadium dioxide film blocks and a barium fluoride film block, so that a most simplified continuous adjusting structure is formed, the three vanadium dioxide film blocks are separated by the barium fluoride film block, and the three vanadium dioxide film blocks can be independently phase-changed, so that a 5-gear adjusting effect is formed.
In an embodiment, in order to meet more gear adjustments, the above-mentioned barium fluoride film blocks are all in a triangle structure, and the vanadium dioxide film blocks are arranged around three peripheries of the barium fluoride film blocks, and may also be in a triangle structure, and the two structures are identical, and are equilateral triangles, and one barium fluoride film block and three vanadium dioxide film blocks are matched to form a large triangle structure, as shown in fig. 3, so that the requirement of 3:1, and the design is reasonable. The dimming film is formed by adjacently combining the large triangular structures, the plurality of adjacent vanadium dioxide film blocks can be independent parts and can be combined to form an integrated structure, and when the dimming film is used, each vanadium dioxide film block is subjected to independent phase change, so that the adjustment interval between adjacent gears is greatly reduced, the adjustment continuity is greatly improved, and the dimming film is wider in application scene.
In an embodiment, referring to fig. 4, the barium fluoride film block may be designed into a honeycomb frame structure, and the vanadium dioxide film block is of a hexagonal structure, so that the structure is more compact by embedding the vanadium dioxide film block into the frame structure, the adjacent vanadium dioxide film blocks can be independent of each other, the adjustment accuracy can be greatly improved, and the interference between the adjacent vanadium dioxide film blocks is small.
The invention also discloses a method for preparing the infrared multi-angle continuously variable spectral ratio coated fluoride spectroscope, referring to FIG. 5, firstly polishing a barium fluoride flat sheet as a base material; the low refractive index of the barium fluoride is beneficial to that the surface of the barium fluoride does not need to be plated with an antireflection film, namely, the transmittance of nearly 90 percent is achieved, and compared with materials such as germanium or zinc selenide, and the like, the materials of which the surface is plated with the antireflection film are used as spectroscope substrates, so that the complexity of the process flow can be reduced; then uniformly coating photoresist on one side surface of the barium fluoride flat sheet; exposing and etching the photoresist to expose 75% of the area of the surface of the barium fluoride flat sheet, plating a vanadium dioxide film, namely a vanadium dioxide film block, protecting 25% of the area by the photoresist, and plating a barium fluoride film, namely a barium fluoride film block; plating a vanadium dioxide film block on the surface of the substrate according to the exposed area; then the photoresist is removed after being cleaned; the surface area of the barium fluoride flat sheet corresponding to the barium fluoride film block is exposed, namely 25% of the area is protected by photoresist before, and an unplated area is obtained; coating photoresist again; etching and removing the photoresist in the unplated areas; plating a barium fluoride film block, and cleaning and removing the photoresist to obtain a dimming film; coating photoresist on the surface of the dimming film again, etching and plating electric heating materials on the vanadium dioxide film blocks, wherein each electric heating material is provided with an independent contact, and cleaning and removing the photoresist to finish plating one side;
then plating a broadband antireflection film on the other surface of the barium fluoride flat sheet to obtain a plated lens;
in order to ensure the applicability, the lens is packaged in a lens frame, a connecting circuit connected with an electric control contact is arranged in the lens frame, and the connecting circuit is connected with a power supply through a controller to obtain the spectroscope.
When the device is used, an infrared imaging temperature measuring device is arranged at the position where the mirror surface leaves the light path, and the whole of the splitter and each vanadium dioxide film block are monitored and the heating state is feedback controlled in real time.
The mirror frame can be set to be of an angle-adjustable structure, as the beam splitter is used for splitting light in a mode of module conversion, the beam splitting ratio is basically unaffected in the process of angle adjustment, the beam splitting performance is unchanged, compared with the existing film-coated beam splitter, the existing film-coated beam splitter is used for realizing beam splitting by light interference, the relative optical path of the film-coated beam splitter can also be changed when the incident angle of the film-coated beam splitter changes, and therefore the beam splitter can be used under the condition that the beam splitter does not exist, the beam splitting performance can be guaranteed to be in a controllable range after the angle of the beam splitter changes, and the beam splitter is not affected. After the picture frame is set to the angularly adjustable structure, in the equipment use, can be under the prerequisite that does not influence the beam split ratio, quick regulation light path to reduce the equipment degree of difficulty, the operation is used convenient reliably.
Further, the proportion of the area needing phase change in the vanadium dioxide film block is calculated according to the required light splitting ratio, and the vanadium dioxide film block is heated under the control of a computer program, so that the heated vanadium dioxide film block is changed from an insulating state to a metal state and is kept, and the transmission/reflection ratio of the whole spectroscope can be freely and continuously adjusted within a very wide range from 1:3 to 7:3.
In an embodiment, a plurality of vanadium dioxide film blocks are divided into two parts, the phase transition temperatures of the two parts are inconsistent, one part of the two parts can be the original phase transition temperature, the phase transition temperature of the other part can be reduced by more than 20 degrees through doping vanadium dioxide, the two parts of vanadium dioxide film blocks are arranged at intervals, when the phase transition is controlled, firstly, the barium fluoride film blocks with low phase transition temperature are heated, and after the phase transition, the barium fluoride film blocks with high phase transition temperature do not reach the phase transition temperature, so that the phase transition is avoided, the step control effect is formed in the adjusting process, the difficulty in heating control is reduced, the control interference is reduced, and the operation convenience and the use stability are greatly improved.
In the preparation process, the two parts of vanadium dioxide film blocks need to be prepared separately, and the two parts of vanadium dioxide film blocks are plated twice.
The above-described embodiments are merely preferred embodiments for fully explaining the present invention, and the scope of the present invention is not limited thereto. Equivalent substitutions and modifications will occur to those skilled in the art based on the present invention, and are intended to be within the scope of the present invention. The protection scope of the invention is subject to the claims.
Claims (3)
1. The manufacturing method of the infrared multi-angle continuous variable spectral ratio coated fluoride spectroscope is characterized by comprising the following steps of:
step 1) polishing a barium fluoride flat sheet to be used as a base material;
step 2) uniformly coating photoresist on one side surface of the barium fluoride flat sheet;
step 3) exposing and etching the photoresist, and exposing partial areas of the surface of the barium fluoride flat sheet;
step 4) plating a vanadium dioxide film block or a barium fluoride film block on the surface of the substrate according to the exposed area;
step 5) cleaning and removing the photoresist; when the vanadium dioxide film block is plated in the step 4), exposing the surface area of the barium fluoride flat sheet corresponding to the barium fluoride film block to obtain an unplated area; when the barium fluoride film block is plated in the step 4), exposing the surface area of the barium fluoride flat sheet corresponding to the vanadium dioxide film block to obtain an unplated area;
step 6) coating photoresist again;
step 7) etching and removing the photoresist in the unplated areas;
step 8) plating a vanadium dioxide film block or a barium fluoride film block, when the vanadium dioxide film block is plated in the step 4), plating a barium fluoride film block at the moment, otherwise plating the vanadium dioxide film block, and enabling the thickness of the vanadium dioxide film block and the thickness of the barium fluoride film block to be consistent through a thickness control technology, wherein the surface is in a horizontal plane;
step 9) cleaning and removing the photoresist to obtain a dimming film;
step 10), coating photoresist on the surface of the dimming film again, etching and plating electric heating materials on the vanadium dioxide film blocks, wherein each electric heating material is provided with an independent contact, and cleaning and removing the photoresist to finish plating;
step 11), plating a broadband antireflection film on the other surface of the barium fluoride flat sheet;
step 12) packaging the lenses in a lens frame, wherein a connecting circuit connected with an electric control contact is arranged in the lens frame, and the connecting circuit is connected with a power supply through a controller to obtain the spectroscope.
2. The method for manufacturing an infrared multi-angle continuously variable spectroscopic coated fluoride spectroscope according to claim 1, wherein an infrared imaging temperature measuring device is arranged at the position where the mirror surface leaves the light path, and the whole spectroscope and each vanadium dioxide film block are monitored and the temperature is feedback controlled.
3. The method for manufacturing the infrared multi-angle continuously variable spectroscopic coated fluoride spectroscope according to claim 2, wherein the proportion of the area needing phase change in the vanadium dioxide film block is calculated according to the required spectroscopic ratio, and the vanadium dioxide film block is heated by computer program control, so that the heated vanadium dioxide film block is changed from an insulating state to a metal state and is maintained.
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| CN103640299A (en) * | 2013-11-26 | 2014-03-19 | 上海紫东薄膜材料股份有限公司 | Co-extruded intelligent polyester dimming film with bidirectional tension function and preparation method of film |
| CN106435472A (en) * | 2016-10-18 | 2017-02-22 | 天津大学 | Preparation method of gold triangular nanoparticle array and vanadium dioxide film composite embedded structure |
| CN108866483A (en) * | 2018-06-26 | 2018-11-23 | 中国人民解放军国防科技大学 | Intelligent thermal control device and preparation method thereof |
| CN111562685A (en) * | 2020-04-28 | 2020-08-21 | 苏州大学 | Intelligent infrared light switch for infrared window material and manufacturing method |
| CN112921273A (en) * | 2021-01-21 | 2021-06-08 | 电子科技大学 | Dynamic thermal radiation refrigerating device based on phase-change material vanadium dioxide |
| CN113451719A (en) * | 2021-03-22 | 2021-09-28 | 电子科技大学 | Design of dual electrical regulation super-surface switch filter |
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