CN114486427A - Extensible electrode leveling integration method based on ultrathin viscous silica gel - Google Patents

Extensible electrode leveling integration method based on ultrathin viscous silica gel Download PDF

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CN114486427A
CN114486427A CN202210006079.3A CN202210006079A CN114486427A CN 114486427 A CN114486427 A CN 114486427A CN 202210006079 A CN202210006079 A CN 202210006079A CN 114486427 A CN114486427 A CN 114486427A
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silica gel
ultrathin
dust
free paper
sample
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CN114486427B (en
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吉博文
张凯
冯慧成
常洪龙
梁泽凯
周宇昊
阿凘荣
王慕尧
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Chongqing Science And Technology Innovation Center Of Northwest University Of Technology
Northwestern Polytechnical University
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Northwestern Polytechnical University
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Abstract

The invention discloses an extensible electrode leveling integration method based on ultrathin viscous silica gel, which comprises the steps of firstly, transferring an extensible electrode to the surface of the ultrathin viscous silica gel through a small-area water-soluble adhesive tape; then the ultrathin sticky silica gel is stuck down from the surface of the glass slide and turned over through the large-area water-soluble adhesive tape; secondly, coating a silica gel adhesive on the two end areas of the ultrathin viscous silica gel, and adhering two rectangular thick silica gel supporting blocks which are cut and formed to the gluing area; then finishing the processes of removing the water-soluble adhesive tape by soaking in hot water and drying; and finally, clamping the sample on clamps at two ends of a mechanical stretching experiment table, enabling the sample to be in a flat and non-stretching state, and cutting the dust-free paper from the lower part of the sample by using scissors. The invention innovatively develops an integration method of the extensible electrode based on the ultrathin viscous silica gel, the sample keeps a flat state in the whole process, self-adhesion cannot occur, the operation difficulty is reduced, and the beneficial application value is provided for the mechanical stretching experiment of the flexible electronic device.

Description

Extensible electrode leveling integration method based on ultrathin viscous silica gel
Technical Field
The invention belongs to the technical field of biomedicine and electricity, and particularly relates to a leveling and integrating method for an extensible electrode.
Background
Based on polymer film materials such as Polyimide (PI), Parylene (Parylene), polyethylene terephthalate (PET) and the like, structural designs such as serpentine lines, paper-cut and the like are performed, and the elastic silica gel substrate is combined, so that the common idea for preparing the extensible electrode is provided, and a technical possibility is provided for realizing an electronic skin or brain-computer interface device with higher shape-preserving and attaching capability. The mechanical stretching experiment of the extensible electrode based on the elastic silica gel substrate is a necessary process for judging the extensibility of the extensible electrode. In the existing research, an extensible electrode is mainly integrated on an elastic silica gel substrate without stickiness and with large thickness to perform a mechanical stretching experiment, and although the flatness of a device can be effectively kept and the operation difficulty is reduced, the ultrathin adhesive silica gel substrate can provide higher conformal adhesive capacity of a complex curved surface in practical application. How to realize the integration of the extensible electrode in a whole process flatly based on the 'sticky' and 'thin' silica gel substrate so as to be convenient for developing a mechanical stretching experiment, and a universal and feasible technical method is lacked.
It was found in the search of the prior art that in 2014, the national university of champagne, university of illinois, John A. Rogers team in Advanced health care materials,2014,3(10): 1597-. The Ecoflex elastomer is relatively easy to operate due to the large thickness of the Ecoflex, the mechanical strength is good, and the adopted Ecoflex silica gel is not sticky after being cured, so that self-adhesion is not easy to occur, and good smoothness can be kept. But the leveling integration and the operation difficulty are higher aiming at the silica gel elastic substrate with ultrathin substrate thickness and self viscosity.
In 2015, the national communications,2015,6(1) of the national institute of champagne John A. Rogers team, university of Illinois, 1-11, written "Soft network composite materials with a defined and bio-embedded designs", proposed to encapsulate a 55 micron thick network structure polyimide in an ultra-Soft silicone elastomer Silbricone with a thickness of 100 and 200 microns and a Young's modulus of only 3kPa, and to perform tensile testing by means of a one-way mechanical bench. Although the silicone elastomer Silbaine has certain viscosity and is better attached to the skin, the thicker polyimide with a network structure provides mechanical support inside the whole silicone elastomer, and the thickness of the silicone elastomer is still larger, so that self-adhesion is not easy to occur. However, as the thickness of the silicone elastomer is reduced, the device is required to be kept flat and intact all the time in the process of being fixed on a tensile experiment table, and the difficulty is obviously increased.
Journal of materials, 2020,6(2): 330-. However, if the thickness of the silica gel film substrate is further reduced, it is difficult to ensure that the silica gel film substrate is always flat in the integrated operation process, even if the silica gel film substrate has no viscosity, self-adhesion is easy to occur, and the thinned silica gel film substrate is easy to damage under the action of external force during operation, so that the mechanical tensile experiment is difficult.
In the stretching method, CN102680320B authorizes a fixture for testing the stretching performance of an ultrathin flexible film, and designs a first fixture body and a second fixture body respectively, which can clamp a film with a thickness of several micrometers to several millimeters, but does not mention how to fix an ultrathin flexible film sample on the fixture flatly and gently, and it is very difficult to manually operate an ultrathin flexible film with self-stickiness, especially to ensure that the film is always flat.
In conclusion, the existing research and invention lacks of exploration on the leveling and stretching experimental method of the ultrathin viscous silica gel film, and focuses on how to always keep the structure level and intact in the process of integrating the extensible flexible polymer electrode and the ultrathin viscous silica gel, so that the method has important application value for developing related mechanical stretching experiments.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a leveling and integrating method of an extensible electrode based on ultrathin viscous silica gel, which comprises the steps of firstly, transferring the extensible electrode to the surface of the ultrathin viscous silica gel through a small-area water-soluble adhesive tape; then the ultrathin sticky silica gel is stuck down from the surface of the glass slide and turned over through the large-area water-soluble adhesive tape; secondly, coating a silica gel adhesive on the two end areas of the ultrathin viscous silica gel, and adhering two rectangular thick silica gel supporting blocks which are cut and formed to the gluing area; then finishing the processes of removing the water-soluble adhesive tape by soaking in hot water and drying; and finally, clamping the sample on clamps at two ends of a mechanical stretching experiment table, enabling the sample to be in a flat and non-stretching state, and cutting the dust-free paper from the lower part of the sample by using scissors. The invention innovatively develops an integration method of the extensible electrode based on the ultrathin viscous silica gel, the sample keeps a flat state in the whole process, self-adhesion cannot occur, the operation difficulty is reduced, and the beneficial application value is provided for the mechanical stretching experiment of the flexible electronic device.
The technical scheme adopted by the invention for solving the technical problem comprises the following steps:
step 1: spin-coating adhesive silica gel on the surface of the glass slide or glass sheet sprayed with the release agent, and forming ultrathin adhesive silica gel by using a spin coater;
step 2: sticking the extensible electrode from the silicon wafer by using a water-soluble adhesive tape, then transferring the extensible electrode to the surface of the ultrathin adhesive silicon wafer, soaking in hot water to remove the water-soluble adhesive tape, and drying in a room temperature air-drying oven or a 70 ℃ oven;
and step 3: cutting the ultrathin viscous silica gel to form the outline of the stretched ultrathin viscous silica gel substrate area;
and 4, step 4: adhering the extensible electrode and the ultrathin adhesive silica gel after the contour cutting to the surface of the glass slide or the glass sheet together by using a water-soluble adhesive tape;
and 5: turning over to enable the ultrathin viscous silica gel to face upwards, brushing silica gel adhesive on the two end areas of the ultrathin viscous silica gel, and adhering two rectangular thick silica gel supporting blocks formed by cutting to the gluing area; so as to finish the composition of the sample to be stretched;
step 6: covering the opening of the beaker by using a piece of dust-free paper, hooping the periphery of the beaker by using an elastic rubber ring, turning over the sample to enable the large-area water-soluble adhesive tape to be upward, horizontally placing the two thick silica gel supporting blocks on the dust-free paper, pouring hot water from the upper part for soaking, dissolving and removing the water-soluble adhesive tape completely, and enabling the hot water to enter the beaker through the holes of the dust-free paper;
and 7: taking down the elastic rubber ring, keeping the dust-free paper flat, taking down the dust-free paper together with the sample to be stretched, and drying the dust-free paper to harden the dust-free paper;
and 8: supporting the dried dust-free paper of which the surface is paved with a sample to be stretched, clamping the thick silica gel supporting blocks and the dust-free paper at two ends on clamps at two ends of a mechanical stretching experiment table respectively, and keeping the sample in a flat and non-stretching state; and cutting the dust-free paper from the lower part of the sample to be stretched by using scissors to finish the preparation work before the stretching experiment.
Preferably, the ultrathin viscous silica Gel is prepared by high-speed spin coating by using a spin coater, and the material of the ultrathin viscous silica Gel is Ecoflex 00-10 or Ecoflex Gel type platinum catalytic silica Gel produced by Smooth-On company or incompletely cured PDMS silica Gel.
Preferably, the thickness of the ultrathin adhesive silica gel ranges from 3 to 100 micrometers.
Preferably, the malleable electrode is comprised of two polymer encapsulation layers and a metallic conductive layer sandwiched therebetween.
Preferably, the polymer packaging layer is made of a flexible polymer film material, and the thickness of a single layer is 0.5-15 micrometers.
Preferably, the flexible polymer film material comprises polyimide, parylene, polyethylene terephthalate.
Preferably, the metal conductive layer comprises a seed layer and a metal electrode layer; the seed layer is used for improving the bonding force between the metal electrode layer and the polymer packaging layer, and is one of the following materials: titanium, chromium, tungsten; the thickness range of the seed layer is 2-50 nanometers; the metal electrode layer is made of one of the following materials: gold, platinum iridium alloys; the thickness range of the metal electrode layer is 50-500 nanometers.
Preferably, the hot water temperature is 40-80 degrees celsius.
Preferably, the silicone adhesive is Sil-Poxy one-component adhesive or Si-Tac two-component adhesive manufactured by Smooth-On company.
Preferably, the square thick silica gel support block is Ecoflex 00-30 or DragonSkin or Solaris model silica gel manufactured by Smooth-On company; the thickness range of the thick silica gel supporting block is 1-10 mm.
The invention has the following beneficial effects:
the method realizes 'whole-process leveling', and each step of key steps always ensures that the silica gel substrate and the electrode are in a leveling state, including twice transfer printing, and the subsequent gluing, soaking, drying and fixture fixing processes; secondly, the used silica gel substrate has viscosity, so that on one hand, a reliable bonding interface can be directly formed with the extensible electrode, on the other hand, the conformal contact capability of the electrode and skin or tissue can be improved in practical application, and the adhesive silica gel substrate is prevented from self-adhesion due to the fact that the whole process is in a flat state; finally, the used silica gel substrate is ultra-thin, the problem that most of existing ultra-thin silica gel substrate devices are insufficient in mechanical tensile experiment capacity is solved, and the problem that the mechanical tensile experiment is affected due to the fact that the devices are damaged due to careless operation when the devices are not fixed on a clamp or in the fixing process is avoided. Therefore, the invention provides an operation method which has high reliability, low cost and easy realization for researching the mechanical property and the behavior of the extending performance of the ultrathin flexible electronic device.
Drawings
Fig. 1 is a schematic drawing of a tensile experiment performed by ductile electrode planarization integration according to the method of the present invention.
FIG. 2 is a process flow diagram of the method of the present invention.
FIG. 3 is a schematic diagram and a physical photograph of a water-soluble adhesive tape flatly soaked and dissolved on a piece of dust-free paper according to an embodiment of the present invention, wherein (a) is a schematic diagram and (b) is a physical photograph;
fig. 4 is a photograph of a leveling and stretching experiment of an extensible electrode based on an ultrathin adhesive silicone gel according to an embodiment of the present invention, wherein (a) the photograph is a photograph of an extensible electrode on the surface of an ultrathin adhesive silicone gel, and (b) the photograph is a photograph comparing before and after leveling a non-stretching deformation state to a stretching deformation state.
In the figure: 1-ultrathin viscous silica gel, 2-extensible electrodes, 3-silica gel adhesive, 4-thick silica gel supporting blocks, 5-dust-free paper, 6-water-soluble adhesive tape and 7-elastic rubber rings.
Detailed Description
The invention is further illustrated with reference to the following figures and examples.
The invention provides a leveling integration method of an extensible electrode based on ultrathin viscous silica gel, which enables the extensible electrode and the ultrathin viscous silica gel and a thick silica gel supporting block to form a reliable integration relation, and mainly ensures that the extensible electrode and the ultrathin viscous silica gel are always in a leveling state in the integration and stretching processes, a sample keeps the leveling state in the whole process, self-adhesion cannot occur, and the operation difficulty is reduced.
S1: spin-coating viscous silica gel on the surface of the glass slide or glass sheet sprayed with the release agent, and setting a proper rotating speed by using a spin-coating machine to form ultrathin viscous silica gel;
s2: sticking the extensible electrode from the silicon wafer by using a small-area water-soluble adhesive tape, then transferring the extensible electrode to the surface of the ultrathin adhesive silicon wafer, soaking in hot water to remove the water-soluble adhesive tape, and airing at the natural room temperature or drying in a 70 ℃ oven;
s3: cutting the ultrathin viscous silica gel by using an operating knife to form the outline of the stretched ultrathin viscous silica gel substrate area;
s4: sticking the extensible electrode and the ultrathin adhesive silica gel with the cut outline together from the surface of the glass slide or the glass sheet by using a large-area water-soluble adhesive tape;
s5: turning over to enable the ultrathin viscous silica gel to face upwards, brushing silica gel adhesive on the two end areas of the ultrathin viscous silica gel, and adhering two rectangular thick silica gel supporting blocks formed by cutting to the gluing area; so as to finish the composition of the sample to be stretched;
s6: covering the opening of the beaker by using a piece of dust-free paper, tightly hooping the periphery by using an elastic rubber ring, turning over the sample to enable the large-area water-soluble adhesive tape to be upward, enabling the two thick silica gel supporting blocks to be horizontally placed on the dust-free paper, slowly and softly pouring hot water from the upper part for soaking, dissolving and removing the water-soluble adhesive tape completely, and enabling the hot water to enter the beaker after leaking through the pores of the dust-free paper;
s7: taking down the elastic rubber ring, keeping the wet and soft dust-free paper flat, taking down the wet and soft dust-free paper together with a sample to be stretched, and drying the wet and soft dust-free paper to harden the dust-free paper;
s8: supporting the dried dust-free paper of which the surface is paved with a sample to be stretched, clamping the thick silica gel supporting blocks and the dust-free paper at two ends on clamps at two ends of a mechanical stretching experiment table respectively, and keeping the sample in a flat and non-stretching state; and cutting the dust-free paper from the lower part of the sample to be stretched by using scissors to finish the preparation work before the stretching experiment.
Preferably, the ultrathin viscous silica Gel is prepared by high-speed spin coating by using a spin coater, and the material of the ultrathin viscous silica Gel is Ecoflex 00-10 or Ecoflex Gel type platinum catalytic silica Gel produced by Smooth-On company or incompletely cured PDMS silica Gel.
Preferably, the thickness of the ultrathin adhesive silica gel ranges from 3 to 100 micrometers.
Preferably, the malleable electrode is comprised of two polymer encapsulation layers and a metallic conductive layer sandwiched therebetween.
Preferably, the polymer packaging layer is made of a flexible polymer film material, and the thickness of a single layer is 0.5-15 micrometers.
Preferably, the flexible polymer film material comprises polyimide, parylene, polyethylene terephthalate.
Preferably, the metal conductive layer comprises a seed layer and a metal electrode layer; the seed layer is used for improving the bonding force between the metal electrode layer and the polymer packaging layer, and is one of the following materials: titanium, chromium, tungsten; the thickness range of the seed layer is 2-50 nanometers; the metal electrode layer is made of one of the following materials: gold, platinum iridium alloys; the thickness range of the metal electrode layer is 50-500 nanometers.
Preferably, the hot water temperature is 40-80 degrees celsius.
Preferably, the silicone adhesive is Sil-Poxy one-component adhesive or Si-Tac two-component adhesive manufactured by Smooth-On company.
Preferably, the square thick silica gel support block is Ecoflex 00-30 or DragonSkin or Solaris model silica gel manufactured by Smooth-On company; the thickness range of the thick silica gel supporting block is 1-10 mm.
The specific embodiment is as follows:
example 1:
fig. 1 is a schematic diagram of a final flattening and stretching experiment of an ultra-thin adhesive silica gel-based ductile electrode. Wherein the ultrathin viscous silica gel material is Ecoflex 00-10 silica gel produced by Smooth-On company, the thickness is 50 microns, and the ultrathin viscous silica gel material still has certain viscosity after being cured; the extensible electrode is composed of two layers of parylene films and a Cr/Au metal conducting layer sandwiched between the two layers of parylene films, wherein the thickness of a single layer of parylene film is 2 microns, the thickness of Cr/Au is 20/200 nanometers, the whole body is of a serpentine structure, and the extensible electrode can be used for collecting cortical electroencephalogram signals, extracranial electroencephalogram signals or skin electrophysiological signals and the like; the silica gel adhesive is Sil-Poxy single-component adhesive produced by Smooth-On company, and is coated at two ends of the ultrathin viscous silica gel substrate in a brush way; the thick silicone support block material was DragonSkin silicone manufactured by Smooth-On corporation and had a thickness of 3 mm. The parts of the thick silica gel supporting blocks at the two ends, which are close to the edges, are clamped on a mechanical tensile experiment table clamp together with the flat and dried dust-free paper below, the dust-free paper can be cut off from the middle after the fixing is finished, and the ultrathin viscous silica gel and the extensible electrode above the dust-free paper are always kept in a flat state.
Fig. 2 is a flow chart of an integrated process for leveling an extensible electrode based on ultrathin adhesive silica gel, comprising the following specific steps:
s1, spin-coating Ecoflex 00-10 silica gel On the surface of a glass slide sprayed with an Ease Release 200 Release agent produced by Smooth-On company at a rotating speed of 1500r/min, and curing to form ultrathin viscous silica gel with the thickness of 50 microns;
s2, sticking extensible electrodes of the Cr/Au metal conducting layer packaged by the parylene film from a silicon wafer by using a water-soluble adhesive tape produced by a small-area Aquasol company, then transferring the extensible electrodes to the surface of ultrathin adhesive silicon, further soaking the ultrathin adhesive silicon in hot water at 60 ℃ for 1 hour, completely removing the water-soluble adhesive tape, and placing the ultrathin adhesive silicon in an oven at 70 ℃ for 10 minutes to finish low-temperature drying;
s3, cutting the ultrathin sticky silica gel by using a scalpel to form the outline of the stretched ultrathin sticky silica gel substrate area, and ensuring that the extensible electrode is positioned in the middle area of the ultrathin sticky silica gel;
s4, using a water-soluble adhesive tape produced by Aquasol company with larger area, adhering the extensible electrode and the ultrathin adhesive silica gel with cut outline together from the surface of the glass slide;
s5, turning to enable the ultrathin sticky silica gel to face upwards, brushing Sil-Poxy silica gel adhesive on the surfaces of the two end areas of the ultrathin sticky silica gel, quickly bonding two rectangular thick silica gel supporting blocks with the thickness of 3 mm, which are cut and formed, to the gluing area, waiting for 30 minutes for complete curing, and completing sample integration;
s6, covering the opening of the beaker with a piece of dust-free paper, hooping the periphery of the beaker with an elastic rubber ring, turning over the sample to enable the water-soluble adhesive tape to face upwards and to be horizontally placed on the dust-free paper, and slowly and gently pouring hot water at 60 ℃ from the upper side to soak for 1 hour by utilizing the water leakage of the dust-free paper pores, so that the water-soluble adhesive tape is completely dissolved and removed;
s7, taking down the elastic rubber ring, flatly taking down the moist and soft dust-free paper together with the sample, and placing the soft dust-free paper in a 100 ℃ oven for 2 hours for drying, wherein the dust-free paper becomes hard;
and S8, supporting the dried dust-free paper with the surface tiled with the sample, adjusting the distance between the clamps at the two ends of the mechanical stretching experiment table and finishing clamping by the thick silica gel supporting blocks at the two ends together with the dust-free paper, cutting the dust-free paper from the lower part of the sample by using scissors to finish all the integration preparation work before the stretching experiment, wherein the sample is in a flat and non-stretching state.
Fig. 3 is a schematic diagram and a photograph of a smooth soaking and dissolving water-soluble adhesive tape on the dust-free paper, which correspond to the process step of S6 in fig. 2, the dust-free paper is tightened by an elastic rubber ring to cover the cup mouth to support the sample, so as to ensure that the sample is always in a smooth state in the soaking and washing process, and meanwhile, the dust-free paper also has the characteristics of water leakage in the pores, softness in wetting and hardness in drying, and cannot cause external force pulling on the sample in the operation process.
Fig. 4 is a photograph of an extensible electrode leveling and stretching experiment based on ultrathin sticky silica gel, wherein (a) a dotted line frame in the figure is an extensible electrode transferred on the surface of the ultrathin sticky silica gel, the thickness of the ultrathin sticky silica gel shown here is 100 micrometers, thick silica gel supporting blocks with the thickness of 3 millimeters are made of DragonSkin silica gel at two ends, the supporting blocks are clamped in clamps at two ends and are extruded and deformed, the mechanical strength is good, the fixing is convenient, and meanwhile, the lower dust-free paper is cut and removed. (b) The figure is a photograph comparing before and after flattening the non-stretched deformation state to the stretched deformation state, i.e. the initial length L0Increase to L0+ Δ L, it can be seen that the proposed planarization integration and stretching method works well.
Example 2:
in another embodiment, the process flow for S2, S3, and S4 in fig. 2 is simplified by using the water-soluble adhesive tape only once, i.e., S2 does not require removal of the water-soluble adhesive tape after transfer of the malleable electrode. In the actual operation process, as in S3, the ultrathin sticky silicone is cut by hand with a scalpel, the cutting is easy, and the track is clear. After the simplified process is combined, the water-soluble adhesive tape and the ultra-thin adhesive silica gel covered below need to be cut simultaneously, the cutting mode of the scalpel is not suitable any more, the relative sliding between the water-soluble adhesive tape and the ultra-thin adhesive silica gel is caused, and the edge of the ultra-thin adhesive silica gel wrinkles and is not flat. Therefore, a contactless laser cutting machine can be used for synchronously cutting the water-soluble adhesive tape and the ultrathin viscous silica gel, and considering that the water-soluble adhesive tape and the ultrathin viscous silica gel are stacked together to have a certain thickness, the water-soluble adhesive tape and the ultrathin viscous silica gel need to be cut for many times, and the laser focusing height is adjusted to ensure complete cutting.
Example 3:
in another embodiment, the steps of the planarization integration process flow are the same as those of embodiment 1, and the materials of the ultra-thin adhesive silica gel, the ductile electrode and the thick silica gel supporting block are mainly changed as follows:
adopts a model of SYLGARDTM182, preparing a basic component and a curing agent according to a weight ratio of 30:1, and carrying out hot baking for 60 minutes in an oven at 80 ℃ after spin coating to form ultrathin viscous silica gel with good viscosity and high transparency on the surface;
spin-coating and post-baking photoetching polyimide with a Durimide 7505 model to obtain a single-layer polymer packaging layer with the thickness of 2 microns, wherein the metal conducting layer is made of Ti/Pt metal with the thickness of 30/300 nanometers, and an extensible electrode consisting of two polymer packaging layers and the metal conducting layer sandwiched between the two polymer packaging layers is also obtained;
adopts a model of SYLGARDTM184, preparing the basic components and the curing agent according to a weight ratio of 5:1, pouring the mixture into a flat-bottom glass vessel sprayed with the release agent, and putting the flat-bottom glass vessel into a 100 ℃ oven to be heated for 120 minutes to form a thick silica gel supporting block with higher hardness, so that the thick silica gel supporting block is not easy to deform in a tensile experiment.

Claims (10)

1. An extensible electrode flattening integration method based on ultrathin viscous silica gel is characterized by comprising the following steps:
step 1: spin-coating adhesive silica gel on the surface of the glass slide or glass sheet sprayed with the release agent, and forming ultrathin adhesive silica gel by using a spin coater;
step 2: sticking the extensible electrode from the silicon wafer by using a water-soluble adhesive tape, then transferring the extensible electrode to the surface of the ultrathin viscous silicon wafer, soaking in hot water to remove the water-soluble adhesive tape, and airing at room temperature or drying in a 70 ℃ oven;
and step 3: cutting the ultrathin viscous silica gel to form the outline of the stretched ultrathin viscous silica gel substrate area;
and 4, step 4: adhering the extensible electrode and the ultrathin adhesive silica gel after the contour cutting to the surface of the glass slide or the glass sheet together by using a water-soluble adhesive tape;
and 5: turning over to enable the ultrathin viscous silica gel to face upwards, brushing silica gel adhesive on the two end areas of the ultrathin viscous silica gel, and adhering two rectangular thick silica gel supporting blocks formed by cutting to the gluing area; so as to finish the composition of the sample to be stretched;
step 6: covering the opening of the beaker by using a piece of dust-free paper, hooping the periphery of the beaker by using an elastic rubber ring, turning over the sample to enable the large-area water-soluble adhesive tape to be upward, horizontally placing the two thick silica gel supporting blocks on the dust-free paper, pouring hot water from the upper part for soaking, dissolving and removing the water-soluble adhesive tape completely, and enabling the hot water to enter the beaker through the holes of the dust-free paper;
and 7: taking down the elastic rubber ring, keeping the dust-free paper flat, taking down the dust-free paper together with a sample to be stretched, and drying the dust-free paper to harden the dust-free paper;
and 8: supporting the dried dust-free paper of which the surface is paved with a sample to be stretched, clamping the thick silica gel supporting blocks and the dust-free paper at two ends on clamps at two ends of a mechanical stretching experiment table respectively, and keeping the sample in a flat and non-stretching state; and cutting the dust-free paper from the lower part of the sample to be stretched by using scissors to finish the preparation work before the stretching experiment.
2. The ductile electrode leveling integration method based On the ultrathin sticky silicone rubber as claimed in claim 1, wherein the ultrathin sticky silicone rubber is made by high-speed spin coating using a spin coater, and the material of the ultrathin sticky silicone rubber is selected from Ecoflex 00-10 or Ecoflex Gel type platinum-catalyzed silicone rubber manufactured by Smooth-On corporation or incompletely cured PDMS silicone rubber.
3. The malleable electrode leveling integration method based on ultra-thin sticky silicone gum as claimed in claim 1, wherein the ultra-thin sticky silicone gum has a thickness ranging from 3 to 100 microns.
4. The method for flatly integrating extensible electrodes based on ultrathin adhesive silica gel as claimed in claim 1, wherein the extensible electrodes are composed of two polymer encapsulation layers and a metal conductive layer sandwiched therebetween.
5. The extensible electrode flattening integration method based on ultrathin sticky silica gel as claimed in claim 4, characterized in that the polymer encapsulation layer is a flexible polymer film material with a single layer thickness in the range of 0.5-15 μm.
6. The method as claimed in claim 5, wherein the flexible polymer film material comprises polyimide, parylene, polyethylene terephthalate.
7. The extensible electrode flattening integration method based on the ultrathin adhesive silica gel is characterized in that the metal conducting layer comprises a seed layer and a metal electrode layer; the seed layer is used for improving the bonding force between the metal electrode layer and the polymer packaging layer, and is one of the following materials: titanium, chromium, tungsten; the thickness range of the seed layer is 2-50 nanometers; the metal electrode layer is made of one of the following materials: gold, platinum iridium alloys; the thickness range of the metal electrode layer is 50-500 nanometers.
8. The malleable electrode leveling integration method based on ultra-thin sticky silica gel as claimed in claim 1, wherein the hot water temperature is 40-80 degrees celsius.
9. The method as claimed in claim 1, wherein the silica gel adhesive is Sil-Poxy single component adhesive or Si-Tac two component adhesive manufactured by Smooth-On company.
10. The ductile electrode planarization integration method based On ultra-thin sticky silicone rubber according to claim 1, wherein the square thick silicone rubber support block is Ecoflex 00-30 or DragonSkin or Solaris model silicone manufactured by Smooth-On company; the thickness range of the thick silica gel supporting block is 1-10 mm.
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US4586301A (en) * 1984-08-06 1986-05-06 W. P. Hickman Company Retainer clamp membrane fastening system
CN1631067A (en) * 2002-08-07 2005-06-22 松下电器产业株式会社 Transfer carrier for flexible printed circuit board and electronic parts mounting method to flexible printed circuit board
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