CN114485394B - Double-workbench optical scattering measurement system - Google Patents
Double-workbench optical scattering measurement system Download PDFInfo
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- CN114485394B CN114485394B CN202210005296.0A CN202210005296A CN114485394B CN 114485394 B CN114485394 B CN 114485394B CN 202210005296 A CN202210005296 A CN 202210005296A CN 114485394 B CN114485394 B CN 114485394B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
- G01B5/0004—Supports
Abstract
The invention belongs to the technical field of optical measurement, and discloses a double-workbench optical scattering measurement system, which comprises a sample rotary table, an inner rotary table and an outer rotary table which are concentrically arranged from inside to outside in sequence; the sample turntable is used for placing a sample to be measured, the inner turntable is provided with a light source assembly and an alignment device, the light source assembly comprises a light source support and a laser source, the laser source is arranged on the light source support, and the alignment device is arranged on a light path of the laser source and is used for aligning and adjusting incident light of the sample to be measured; the detection assembly is arranged on the outer turntable and comprises a detection device bracket and a detector, the detector is arranged on the detection device bracket, and the detection assembly is used for measuring a sample to be detected; the sample turntable, the inner turntable and the outer turntable rotate according to preset rotation angles respectively to adjust the incident angle and the measuring angle of the incident light of the sample to be measured and adjust the alignment angle of the incident light. The invention can realize light alignment and measurement at the same time.
Description
Technical Field
The invention belongs to the technical field of optical measurement, and particularly relates to a double-workbench optical scattering measurement system.
Background
With the continuous development of the field of integrated circuits, devices have the characteristics of higher storage capacity, smaller transistor size and more complex shape, and the continuous development of measurement and measurement tools of complex 3D device structures is promoted. Optical scatterometry has been applied in large scale in Optical Critical Dimension (OCD) measurements on integrated circuit fabrication lines in the semiconductor industry by virtue of its non-contact, non-destructive, fast, low cost, etc. features.
Optical scattering measurement is a non-imaging optical technique, which uses a function with wavelength or angle as a variable as input, measures the reflection spectrum information of a nano structure, and obtains the information of the nano structure such as geometric parameters and the like through inverse solution.
The current scatterometry devices are based on a single stage, and alignment and measurement are two separate processes, which do not allow for rapid alignment and measurement at the same time, which increases measurement time and measurement errors.
Disclosure of Invention
The invention provides a double-workbench optical scattering measurement system, which solves the problem that a scattering measurement device in the prior art cannot simultaneously realize light alignment and measurement.
The invention provides a double-workbench optical scattering measurement system, comprising: the sample turntable, the inner turntable and the outer turntable are concentrically arranged from inside to outside in sequence; the sample turntable is used for placing a sample to be tested; the inner rotary table is provided with a light source assembly and an alignment device, the light source assembly comprises a light source bracket and a laser source, and the laser source is arranged on the light source bracket; the alignment device is arranged on the light path of the laser source and is used for aligning and adjusting the incident light of the sample to be measured; the detection assembly is arranged on the outer turntable and comprises a detection device bracket and a detector, and the detector is arranged on the detection device bracket; the detection assembly is used for measuring the sample to be detected; the sample turntable, the inner turntable and the outer turntable respectively rotate according to preset rotation angles so as to adjust the incident angle and the measurement angle of incident light of the sample to be measured and adjust the alignment angle of the incident light.
Preferably, the height of the light source bracket is adjustable.
Preferably, at least one horizontal channel and at least one vertical channel are distributed on the detection device support, and the position of the detector on the detection device support is adjustable.
Preferably, the outer turntable and the inner turntable both adopt two-stage reduction transmission devices; the secondary speed reduction transmission device comprises a primary speed reduction device and a secondary speed reduction device, the primary speed reduction device adopts synchronous belt wheel transmission, and the secondary speed reduction device adopts worm and gear transmission; the inner rotary table adopts a first stepping motor as a rotary table power source, and the first stepping motor is connected with a first motor driver; the outer turntable adopts a second stepping motor as a power source of the turntable, and the second stepping motor is connected with a second motor driver.
Preferably, the outer rotary table and the inner rotary table are both supported by bearings specially used for the rotary table at a high precision level; the bearing special for the high-precision level of the rotary worktable adopts a crossed cylindrical roller bearing, a ZKLDF four-point ball contact bearing or a YRT turntable bearing.
Preferably, the dual stage optical scatterometry system further comprises: a stage body; the sample turntable, the inner turntable and the outer turntable are all arranged on the table body.
Preferably, the dual stage optical scatterometry system further comprises: a first angular position sensor and a second angular position sensor; the first angular position sensor is arranged between the inner rotary table and the table body and used for acquiring angular position information when the inner rotary table rotates and feeding the acquired angular position information back to the first stepping motor to form closed-loop negative feedback; the second angular position sensor is arranged between the outer turntable and the table body and used for acquiring angular position information of the outer turntable during rotation and feeding back the acquired angular position information to the second stepping motor to form closed-loop negative feedback.
Preferably, the first angular position sensor may employ a rotary transformer, an induction synchronizer or a grating encoder, and the second angular position sensor may employ a rotary transformer, an induction synchronizer or a grating encoder.
Preferably, the dual stage optical scatterometry system further comprises: the control system comprises a microcomputer processor, an external input device, an error analysis device and an isolation protection device; the external input equipment is connected with the microcomputer processor, the output end of the microcomputer processor is respectively connected with a power source of the rotary table and a power source of the angular position sensor, and the output end of the angular position sensor, the error analysis device and the isolation protection device are sequentially connected; the error analysis device is used for obtaining a feedback error signal according to the angular position information when the inner turntable rotates and the angular position information when the outer turntable rotates; the isolation protection device is used for carrying out isolation protection on the feedback error signal; the microcomputer processor is used for receiving external input information from the external input equipment, receiving the feedback error signal after the isolation protection, and adjusting and outputting control parameters according to the external input information and the feedback error signal; the control parameters comprise the rotation direction and the rotation angle of each rotary table and the positioning precision of the relative position between the inner rotary table and the outer rotary table.
Preferably, the double-workbench optical scattering measurement system can perform theta-n theta linkage measurement, n is a nonzero arbitrary numerical value, and when n is a negative number, a negative sign indicates that the rotating directions of the outer turntable and the inner turntable are opposite; when the linkage measurement of theta-n theta is carried out, incident light rays rotate around an axis center O axis of the rotary table along with the rotation of the light source assembly and the alignment device, the detector rotates around the axis center O axis of the rotary table by n theta, and the ratio of the rotation angular speeds of the inner rotary table and the outer rotary table is 1.
One or more technical schemes provided by the invention at least have the following technical effects or advantages:
the invention provides a double-workbench optical scattering measurement system which comprises a sample rotary table, an inner rotary table and an outer rotary table which are concentrically arranged from inside to outside in sequence, wherein the sample rotary table is used for placing a sample to be measured; a detection assembly is arranged on the outer rotary table (a detector is arranged on a detection device bracket), and a sample to be detected is measured through the detection assembly; the sample turntable, the inner turntable and the outer turntable respectively rotate according to preset rotation angles, so that the incident angle and the measurement angle of incident light of a sample to be measured can be adjusted, and the alignment angle of the incident light can be adjusted in the measurement process. The invention is based on the internal and external double turntables, can simultaneously realize the alignment and measurement of light rays, and improves the efficiency and the precision of measurement.
Drawings
Fig. 1 is a schematic structural diagram of a dual-stage optical scatterometry system according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of the transmission of an inner turntable and an outer turntable in a dual-stage optical scatterometry system according to an embodiment of the present invention;
FIG. 3 (a) is a schematic diagram of the inner turntable performing closed-loop negative feedback control, and FIG. 3 (b) is a schematic diagram of the outer turntable performing closed-loop negative feedback control;
FIG. 4 is a control schematic diagram of a dual stage optical scatterometry system according to an embodiment of the present invention;
fig. 5 is a schematic diagram of a dual-stage optical scatterometry system for performing theta-2 theta measurements according to an embodiment of the present invention.
Wherein, 1-laser source, 2-light source support, 3-stage body, 4-outer turntable, 5-inner turntable, 6-sample turntable, 7-alignment device, 8-sample to be detected, 9-detection device support;
201-a first step motor, 202-a first synchronous pulley, 203-a second synchronous pulley, 204-an outer turntable, 205-an inner turntable, 206-a first worm-and-gear pair, 207-a second worm-and-gear pair, 208-a first angular position sensor, 209-a third worm-and-gear pair, 210-a fourth worm-and-gear pair, 211-a second angular position sensor, 212-a third synchronous pulley, 213-a fourth synchronous pulley, and 214-a second step motor.
Detailed Description
In order to better understand the technical scheme, the technical scheme is described in detail in the following with reference to the attached drawings of the specification and specific embodiments.
The present embodiment provides a dual-stage optical scatterometry system, referring to fig. 1 and 5, including: a sample turntable 6, an inner turntable 5 and an outer turntable 4 which are concentrically arranged from inside to outside.
The sample rotary table 6 is used for placing a sample 8 to be measured. A light source assembly and an alignment device 7 are arranged on the inner rotary table 5, the light source assembly comprises a light source bracket 2 and a laser source 1, and the laser source 1 is arranged on the light source bracket 2; the alignment device 7 is arranged on the light path of the laser source 1, and the alignment device 7 is used for aligning and adjusting the incident light of the sample 8 to be measured. The outer turntable 4 is provided with a detection assembly, the detection assembly comprises a detection device bracket 9 and a detector, and the detector is arranged on the detection device bracket 9; the detection component is used for measuring the sample 8 to be detected. The sample turntable 6, the inner turntable 5 and the outer turntable 4 respectively rotate according to preset rotation angles so as to adjust the incident angle and the measurement angle of the incident light of the sample 8 to be measured, and adjust the alignment angle of the incident light, thereby achieving the effects of instant alignment and multi-angle measurement.
The sample 8 to be measured may be a film, a wafer, a grating, or other shaped sample.
The height of the light source support 2 is adjustable, so that the height position of the laser source 1 can be adjusted through the light source support 2, and the adjustment of the alignment angle of incident light rays is facilitated. Specifically, the light source bracket 2 may be adjusted in height by sleeving a sleeve and fastening a screw.
At least one horizontal channel and at least one vertical channel are distributed on the detection device support 9, the position of the detector on the detection device support 9 can be adjusted, and specifically, the horizontal distance and the height of the detector relative to the sample 8 to be detected can be adjusted.
The detection device support 9 is placed on the outward rotating table 4, and the detector and the detection device support 9 rotate along with the outward rotating table 4, so that multi-angle measurement of the sample 8 to be measured is realized. The detector can be in the position adjustment about can going on the detection device support 9, and can remove sample 8 that awaits measuring or can pass through sample revolving stage 6 is right the position of sample 8 that awaits measuring is adjusted, realizes right sample 8 that awaits measuring carries out the multiposition measurement.
The alignment device 7 is placed on the inner rotary table 5, and the alignment device 7 performs real-time alignment adjustment on incident light on the surface of the sample 8 to be measured along with the rotation of the inner rotary table 5. The shell of the aligning device 7 is internally provided with a lens group formed by a series of lenses, the aligning device 7 is fixed right in front of the laser source 1, light emitted by the laser source 1 can be corrected to obtain collimated light beams, and the collimated light beams are aligned to the measuring position of the sample 8 to be measured, so that position alignment is realized.
In addition, the dual-stage optical scatterometry system may further include a stage body 3, and the sample turntable 6, the inner turntable 5, and the outer turntable 4 are all mounted on the stage body 3.
Referring to fig. 2 and 3, the outer turntable 204 and the inner turntable 205 of the present invention can rotate independently on the same central axis without affecting each other. Specifically, the outer turntable 204 and the inner turntable 205 both adopt a two-stage reduction transmission device; the two-stage speed reduction transmission device comprises a first-stage speed reduction device and a second-stage speed reduction device, wherein the first-stage speed reduction device adopts a synchronous pulley (comprising a first synchronous pulley 202, a second synchronous pulley 203, a third synchronous pulley 212 and a fourth synchronous pulley 213) for transmission, and the second-stage speed reduction device adopts a worm gear (comprising a first worm-gear pair 206, a second worm-gear pair 207, a third worm-gear pair 209 and a fourth worm-gear pair 210) for transmission. The worm gear and worm transmission has the advantages of large transmission ratio, good stability, compact structure, low impact vibration noise and the like. The inner rotary table 205 adopts a first stepping motor 201 as a rotary table power source, and the first stepping motor 201 is connected with a first motor driver; the outer turntable 204 adopts a second stepping motor 214 as a power source of the turntable, and the second stepping motor 214 is connected with a second motor driver. Two stepping motors with adjustable speeds are used as power sources of the rotary table to drive the inner rotary table and the outer rotary table. In order to improve the precision of the stepping motor, a matched motor driver can be adopted to drive the stepping motor.
The outer turntable 204 and the inner turntable 205 are both supported by bearings specially used for a rotary worktable at a high precision level; the bearing special for the high-precision level of the rotary worktable can adopt a crossed cylindrical roller bearing, a ZKLDF four-point ball contact bearing, a YRT turntable bearing and the like.
In a preferred embodiment, in order to minimize the vibration effect when the outer turntable 204 and the inner turntable 205 rotate, the dual-stage optical scatterometry system further includes a first angular position sensor 208 and a second angular position sensor 211. Fig. 3 (a) is a schematic diagram of performing closed-loop negative feedback control on the inner turntable, the first angular position sensor 208 is installed between the inner turntable 205 and the table body 3, and the first angular position sensor 208 is configured to acquire angular position information when the inner turntable 205 rotates, and feed back the acquired angular position information to the first stepping motor 201 to form closed-loop negative feedback. Fig. 3 (b) is a schematic diagram of the closed-loop negative feedback control of the outer turntable, the second angular position sensor 211 is installed between the outer turntable 204 and the table body 3, and the second angular position sensor 211 is configured to acquire angular position information of the outer turntable 204 during rotation and feed back the acquired angular position information to the second stepping motor 214 to form a closed-loop negative feedback.
The first angular position sensor may adopt a rotary transformer, an induction synchronizer, a grating encoder and the like, and the second angular position sensor may adopt a rotary transformer, an induction synchronizer, a grating encoder and the like.
The angular position sensor can sense the information such as angle change (rotary transformer) and position change (induction synchronizer and grating encoder) when the inner turntable and the outer turntable rotate, the information is converted into an electric signal, then the electric signal is reflected to the motor drivers corresponding to the inner turntable and the outer turntable, the voltage of the motor drivers is adjusted, the position deviation is reduced, the adverse effect caused by vibration is reduced, and the positioning accuracy of the double-working platform is further improved.
Referring to fig. 4, in a preferred embodiment, the dual-stage optical scatterometry system further comprises: the control system comprises a microcomputer processor, an external input device, an error analysis device and an isolation protection device. The external input equipment is connected with the microcomputer processor, the output end of the microcomputer processor is respectively connected with the power source of the rotary table and the power source of the angular position sensor, and the output end of the angular position sensor, the error analysis device and the isolation protection device are sequentially connected; the error analysis device is used for obtaining a feedback error signal according to the angular position information when the inner turntable rotates and the angular position information when the outer turntable rotates; the isolation protection device is used for carrying out isolation protection on the feedback error signal; the microcomputer processor is used for receiving external input information from the external input equipment, receiving a feedback error signal after isolation protection, and adjusting and outputting control parameters according to the external input information and the feedback error signal; the control parameters comprise the rotation direction and the rotation angle of each rotary table and the positioning precision of the relative position between the inner rotary table and the outer rotary table.
Furthermore, the following may also occur: the light is initially aligned during the measurement, but various errors may occur during the measurement. By the control system provided by the invention, errors generated in the measurement process can be eliminated through negative feedback, and high-precision light alignment is realized.
The double-workbench optical scattering measurement system can perform theta-n theta linkage measurement, n is a non-zero arbitrary numerical value, and when n is a negative number, a negative sign indicates that the rotating directions of the outer turntable and the inner turntable are opposite; when the theta-n theta linkage measurement is carried out, incident light rotates theta around the axis center O axis of the rotary table along with the rotation of the light source assembly and the alignment device, the detector rotates n theta around the axis center O axis of the rotary table, and the ratio of the rotation angular speeds of the inner rotary table and the outer rotary table is 1.
Taking the theta-2 theta measurement as an example, referring to fig. 5, incident light rotates theta around the axis center O axis of the turntable along with the rotation of the light source assembly and the alignment device, and the detector placed on the outer turntable rotates 2 theta around the axis center O, so that the theta-2 theta linkage measurement is realized. During the rotation, the ratio of the rotation angular speed of the inner turntable and the outer turntable is 1. The linkage measurement of other angles can be realized only by adjusting the ratio of the angular speeds of the inner turntable and the outer turntable.
The optical scattering measurement system with the double workbenches provided by the embodiment of the invention at least comprises the following technical effects:
(1) The invention is based on the inner and outer double turntables, can simultaneously realize the alignment and measurement of light rays, and improves the efficiency and the precision of optical scattering measurement.
(2) The height of the light source support is adjustable, and the laser source can be adjusted in height and position through the light source support, so that the alignment angle of incident light rays can be adjusted. The detector can be used for adjusting the front position, the rear position, the up position and the down position on the detection device support, and can move the sample to be detected or adjust the position of the sample 8 to be detected through the sample turntable, so that the multi-position measurement of the sample to be detected is realized. The detector and the detection device support can realize multi-angle measurement of the sample to be measured along with the rotation of the outer turntable.
(3) The outer turntable and the inner turntable both adopt two-stage speed reduction transmission devices, and the outer turntable and the inner turntable can independently rotate on the same central shaft system without mutual influence.
(4) The position deviation can be reduced by arranging the angular position sensor, the adverse effect caused by vibration is reduced, and the positioning precision of the double working platforms is further improved.
(5) Errors generated in the measuring process can be eliminated through negative feedback through the control system, and high-precision light alignment and measurement are achieved.
(6) The linkage measurement of various angles can be realized only by adjusting the ratio of the angular speeds of the inner turntable and the outer turntable, and the operation is convenient and simple.
Finally, it should be noted that the above embodiments are only for illustrating the technical solutions of the present invention and not for limiting, and although the present invention is described in detail with reference to examples, it should be understood by those skilled in the art that modifications or equivalent substitutions may be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, which should be covered by the claims of the present invention.
Claims (9)
1. A dual stage optical scatterometry system, comprising: the device comprises a control system, a first angular position sensor, a second angular position sensor, a sample rotary table, an inner rotary table and an outer rotary table which are concentrically arranged from inside to outside in sequence;
the sample turntable is used for placing a sample to be tested;
the inner rotary table is provided with a light source assembly and an alignment device, the light source assembly comprises a light source support and a laser source, and the laser source is arranged on the light source support; the alignment device is arranged on the light path of the laser source and is used for aligning and adjusting the incident light of the sample to be measured;
the detection assembly is arranged on the outer turntable and comprises a detection device bracket and a detector, and the detector is arranged on the detection device bracket; the detection assembly is used for measuring the sample to be detected;
the sample turntable, the inner turntable and the outer turntable respectively rotate according to preset rotation angles so as to adjust the incident angle and the measuring angle of the incident light of the sample to be measured and adjust the alignment angle of the incident light;
the first angular position sensor is used for acquiring angular position information when the inner rotary table rotates and feeding the acquired angular position information back to a rotary table power source of the inner rotary table to form closed-loop negative feedback; the second angular position sensor is used for acquiring angular position information when the outer turntable rotates and feeding the acquired angular position information back to a turntable power source of the outer turntable to form closed-loop negative feedback;
the control system comprises a microcomputer processor, an external input device, an error analysis device and an isolation protection device; the external input device is connected with the microcomputer processor, the output end of the microcomputer processor is respectively connected with the rotary table power source of the inner rotary table, the rotary table power source of the outer rotary table, the power source of the first angular position sensor and the power source of the second angular position sensor, and the output ends of the two angular position sensors, the error analysis device and the isolation protection device are sequentially connected; the error analysis device is used for obtaining a feedback error signal according to the angular position information when the inner turntable rotates and the angular position information when the outer turntable rotates; the isolation protection device is used for carrying out isolation protection on the feedback error signal; the microcomputer processor is used for receiving external input information from the external input equipment, receiving a feedback error signal after isolation protection, and adjusting and outputting control parameters according to the external input information and the feedback error signal; the control parameters comprise the rotation direction and the rotation angle of each rotary table and the positioning precision of the relative position between the inner rotary table and the outer rotary table.
2. The dual stage optical scatterometry system of claim 1, wherein the height of the light source support is adjustable.
3. The dual stage optical scatterometry system of claim 1, wherein the detection device support has disposed thereon at least one horizontal channel and at least one vertical channel, the position of the detector on the detection device support being adjustable.
4. The dual stage optical scatterometry system of claim 1, wherein both the outer turntable and the inner turntable employ a two-stage reduction gearing; the secondary speed reduction transmission device comprises a primary speed reduction device and a secondary speed reduction device, the primary speed reduction device adopts synchronous belt wheel transmission, and the secondary speed reduction device adopts worm and gear transmission;
the inner rotary table adopts a first stepping motor as a rotary table power source, and the first stepping motor is connected with a first motor driver; the outer turntable adopts a second stepping motor as a power source of the turntable, and the second stepping motor is connected with a second motor driver.
5. The dual stage optical scatterometry system of claim 1, wherein the outer turntable and the inner turntable are each supported by bearings dedicated to the high-precision stage of the rotary stage; the bearing special for the rotary worktable at high precision level adopts a crossed cylindrical roller bearing, a ZKLDF four-point ball contact bearing or a YRT turntable bearing.
6. The dual stage optical scatterometry system of claim 1, further comprising: a table body; the sample turntable, the inner turntable and the outer turntable are all arranged on the table body.
7. The dual stage optical scatterometry system of claim 6, wherein the first angular position sensor is mounted between the inner turntable and the stage body and the second angular position sensor is mounted between the outer turntable and the stage body.
8. The dual stage optical scatterometry system of claim 7, wherein the first angular position sensor employs any of a resolver, an induction synchronizer or a grating encoder, and the second angular position sensor employs any of a resolver, an induction synchronizer or a grating encoder.
9. The dual stage optical scatterometry system of claim 1, wherein the dual stage optical scatterometry system is capable of performing theta-n theta linked measurements, n is any value other than zero, and when n is a negative number, the negative sign indicates that the outer turntable and the inner turntable are rotating in opposite directions; when the theta-n theta linkage measurement is carried out, incident light rotates theta around the axis center O axis of the rotary table along with the rotation of the light source assembly and the alignment device, the detector rotates n theta around the axis center O axis of the rotary table, and the ratio of the rotation angular speeds of the inner rotary table and the outer rotary table is 1.
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| CN1586823A (en) * | 2004-10-14 | 2005-03-02 | 上海交通大学 | Rotating platform for realizing double angle rotation |
| US8267388B2 (en) * | 2007-09-12 | 2012-09-18 | Xradia, Inc. | Alignment assembly |
| JP2009109387A (en) * | 2007-10-31 | 2009-05-21 | Fujitsu Ltd | Sample analysis apparatus and method |
| CN101144726A (en) * | 2007-11-01 | 2008-03-19 | 上海交通大学 | Goos-Hanchen shift measuring system based on wave length scanning |
| CN208999306U (en) * | 2018-10-23 | 2019-06-18 | 南京航空航天大学 | A kind of device using Brewster angular measurement refractive index |
| CN111766048B (en) * | 2020-07-28 | 2022-04-22 | 深圳先进技术研究院 | Automatic grating diffraction angle spectrum measuring system |
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