CN114478500B - Coumarin two-photon initiator and synthesis method and application thereof - Google Patents
Coumarin two-photon initiator and synthesis method and application thereof Download PDFInfo
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- CN114478500B CN114478500B CN202210035676.9A CN202210035676A CN114478500B CN 114478500 B CN114478500 B CN 114478500B CN 202210035676 A CN202210035676 A CN 202210035676A CN 114478500 B CN114478500 B CN 114478500B
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- 239000003999 initiator Substances 0.000 title claims abstract description 46
- ZYGHJZDHTFUPRJ-UHFFFAOYSA-N coumarin Chemical compound C1=CC=C2OC(=O)C=CC2=C1 ZYGHJZDHTFUPRJ-UHFFFAOYSA-N 0.000 title claims abstract description 44
- 229960000956 coumarin Drugs 0.000 title claims abstract description 22
- 235000001671 coumarin Nutrition 0.000 title claims abstract description 22
- 238000001308 synthesis method Methods 0.000 title claims abstract description 9
- SMQUZDBALVYZAC-UHFFFAOYSA-N salicylaldehyde Chemical class OC1=CC=CC=C1C=O SMQUZDBALVYZAC-UHFFFAOYSA-N 0.000 claims abstract description 8
- 238000006243 chemical reaction Methods 0.000 claims description 30
- 239000000047 product Substances 0.000 claims description 21
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 claims description 18
- 238000001914 filtration Methods 0.000 claims description 16
- -1 2-diacetoxyethyl thiophene Chemical compound 0.000 claims description 14
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 14
- 238000001035 drying Methods 0.000 claims description 14
- 239000000203 mixture Substances 0.000 claims description 14
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 12
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 10
- 239000003960 organic solvent Substances 0.000 claims description 9
- 238000012545 processing Methods 0.000 claims description 9
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims description 8
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 claims description 8
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- WFDIJRYMOXRFFG-UHFFFAOYSA-N acetic acid anhydride Natural products CC(=O)OC(C)=O WFDIJRYMOXRFFG-UHFFFAOYSA-N 0.000 claims description 8
- 238000000605 extraction Methods 0.000 claims description 8
- 239000012074 organic phase Substances 0.000 claims description 8
- 229920002120 photoresistant polymer Polymers 0.000 claims description 8
- 239000012312 sodium hydride Substances 0.000 claims description 8
- 229910000104 sodium hydride Inorganic materials 0.000 claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- 238000004140 cleaning Methods 0.000 claims description 7
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- 239000011734 sodium Substances 0.000 claims description 7
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- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 6
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- 239000002879 Lewis base Substances 0.000 claims description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 claims description 6
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- NFHFRUOZVGFOOS-UHFFFAOYSA-N palladium;triphenylphosphane Chemical compound [Pd].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 NFHFRUOZVGFOOS-UHFFFAOYSA-N 0.000 claims description 6
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- OIFBSDVPJOWBCH-UHFFFAOYSA-N Diethyl carbonate Chemical compound CCOC(=O)OCC OIFBSDVPJOWBCH-UHFFFAOYSA-N 0.000 claims description 5
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- HXITXNWTGFUOAU-UHFFFAOYSA-N phenylboronic acid Chemical compound OB(O)C1=CC=CC=C1 HXITXNWTGFUOAU-UHFFFAOYSA-N 0.000 claims description 5
- SPXBZAHGTSZQLL-UHFFFAOYSA-N 1-(5-phenylthiophen-2-yl)ethanone Chemical compound S1C(C(=O)C)=CC=C1C1=CC=CC=C1 SPXBZAHGTSZQLL-UHFFFAOYSA-N 0.000 claims description 4
- WYJOVVXUZNRJQY-UHFFFAOYSA-N 2-Acetylthiophene Chemical compound CC(=O)C1=CC=CS1 WYJOVVXUZNRJQY-UHFFFAOYSA-N 0.000 claims description 4
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 claims description 4
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 4
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 claims description 4
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 claims description 4
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 claims description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 4
- NQRYJNQNLNOLGT-UHFFFAOYSA-N Piperidine Chemical compound C1CCNCC1 NQRYJNQNLNOLGT-UHFFFAOYSA-N 0.000 claims description 4
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- SMWDFEZZVXVKRB-UHFFFAOYSA-N Quinoline Chemical compound N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 claims description 4
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 4
- ZCSHNCUQKCANBX-UHFFFAOYSA-N lithium diisopropylamide Chemical compound [Li+].CC(C)[N-]C(C)C ZCSHNCUQKCANBX-UHFFFAOYSA-N 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 3
- LZDKZFUFMNSQCJ-UHFFFAOYSA-N 1,2-diethoxyethane Chemical compound CCOCCOCC LZDKZFUFMNSQCJ-UHFFFAOYSA-N 0.000 claims description 2
- IGBZCOWXSCWSHO-UHFFFAOYSA-N 1-(5-bromothiophen-2-yl)ethanone Chemical compound CC(=O)C1=CC=C(Br)S1 IGBZCOWXSCWSHO-UHFFFAOYSA-N 0.000 claims description 2
- JCCCMAAJYSNBPR-UHFFFAOYSA-N 2-ethylthiophene Chemical compound CCC1=CC=CS1 JCCCMAAJYSNBPR-UHFFFAOYSA-N 0.000 claims description 2
- LCGLNKUTAGEVQW-UHFFFAOYSA-N Dimethyl ether Chemical compound COC LCGLNKUTAGEVQW-UHFFFAOYSA-N 0.000 claims description 2
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 claims description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 claims description 2
- 239000012043 crude product Substances 0.000 claims description 2
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 claims description 2
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 claims description 2
- AEDZKIACDBYJLQ-UHFFFAOYSA-N ethane-1,2-diol;hydrate Chemical compound O.OCCO AEDZKIACDBYJLQ-UHFFFAOYSA-N 0.000 claims description 2
- VLKZOEOYAKHREP-UHFFFAOYSA-N hexane Substances CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 claims description 2
- LPNYRYFBWFDTMA-UHFFFAOYSA-N potassium tert-butoxide Chemical compound [K+].CC(C)(C)[O-] LPNYRYFBWFDTMA-UHFFFAOYSA-N 0.000 claims description 2
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 claims description 2
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 claims description 2
- 150000003242 quaternary ammonium salts Chemical class 0.000 claims description 2
- 229910052708 sodium Inorganic materials 0.000 claims description 2
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 claims description 2
- YXHVGMQJXJAUAR-UHFFFAOYSA-N 2-(diethylaminooxy)benzaldehyde Chemical compound CCN(CC)OC1=CC=CC=C1C=O YXHVGMQJXJAUAR-UHFFFAOYSA-N 0.000 claims 1
- 238000004090 dissolution Methods 0.000 claims 1
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- 238000006116 polymerization reaction Methods 0.000 abstract description 19
- 238000010521 absorption reaction Methods 0.000 abstract description 13
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Thiophene Chemical compound C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 abstract description 6
- 125000000524 functional group Chemical group 0.000 abstract description 5
- 230000000977 initiatory effect Effects 0.000 abstract description 4
- 230000037048 polymerization activity Effects 0.000 abstract description 3
- 230000015572 biosynthetic process Effects 0.000 abstract description 2
- 238000006482 condensation reaction Methods 0.000 abstract description 2
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- 230000035945 sensitivity Effects 0.000 abstract description 2
- 238000003786 synthesis reaction Methods 0.000 abstract description 2
- 229930192474 thiophene Natural products 0.000 abstract description 2
- 238000005481 NMR spectroscopy Methods 0.000 description 12
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 9
- 239000002904 solvent Substances 0.000 description 6
- 229910052763 palladium Inorganic materials 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 150000001491 aromatic compounds Chemical class 0.000 description 4
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- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
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- 239000012153 distilled water Substances 0.000 description 2
- SHZIWNPUGXLXDT-UHFFFAOYSA-N ethyl hexanoate Chemical compound CCCCCC(=O)OCC SHZIWNPUGXLXDT-UHFFFAOYSA-N 0.000 description 2
- WDAXFOBOLVPGLV-UHFFFAOYSA-N ethyl isobutyrate Chemical compound CCOC(=O)C(C)C WDAXFOBOLVPGLV-UHFFFAOYSA-N 0.000 description 2
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- OFQRUTMGVBMTFQ-UHFFFAOYSA-N Ethyl 4-methylpentanoate Chemical compound CCOC(=O)CCC(C)C OFQRUTMGVBMTFQ-UHFFFAOYSA-N 0.000 description 1
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- DTQVDTLACAAQTR-UHFFFAOYSA-M Trifluoroacetate Chemical compound [O-]C(=O)C(F)(F)F DTQVDTLACAAQTR-UHFFFAOYSA-M 0.000 description 1
- IPBVNPXQWQGGJP-UHFFFAOYSA-N acetic acid phenyl ester Natural products CC(=O)OC1=CC=CC=C1 IPBVNPXQWQGGJP-UHFFFAOYSA-N 0.000 description 1
- KXKVLQRXCPHEJC-UHFFFAOYSA-N acetic acid trimethyl ester Natural products COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 description 1
- 150000001299 aldehydes Chemical class 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- KFGVRWGDTLZAAO-UHFFFAOYSA-N cyclopenta-1,3-diene dicyclohexyl(cyclopenta-1,3-dien-1-yl)phosphane iron(2+) Chemical compound [Fe++].c1cc[cH-]c1.C1CCC(CC1)P(C1CCCCC1)c1ccc[cH-]1 KFGVRWGDTLZAAO-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 125000004915 dibutylamino group Chemical group C(CCC)N(CCCC)* 0.000 description 1
- JDXYSCUOABNLIR-UHFFFAOYSA-N diethyl 2-oxobutanedioate Chemical compound CCOC(=O)CC(=O)C(=O)OCC JDXYSCUOABNLIR-UHFFFAOYSA-N 0.000 description 1
- OUWSNHWQZPEFEX-UHFFFAOYSA-N diethyl glutarate Chemical compound CCOC(=O)CCCC(=O)OCC OUWSNHWQZPEFEX-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 125000006575 electron-withdrawing group Chemical group 0.000 description 1
- HHEIMYAXCOIQCJ-UHFFFAOYSA-N ethyl 2,2-dimethylpropanoate Chemical compound CCOC(=O)C(C)(C)C HHEIMYAXCOIQCJ-UHFFFAOYSA-N 0.000 description 1
- RDULEYWUGKOCMR-UHFFFAOYSA-N ethyl 2-chloro-3-oxobutanoate Chemical compound CCOC(=O)C(Cl)C(C)=O RDULEYWUGKOCMR-UHFFFAOYSA-N 0.000 description 1
- 229940117360 ethyl pyruvate Drugs 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 239000005457 ice water Substances 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- JMZFEHDNIAQMNB-UHFFFAOYSA-N m-aminophenylboronic acid Chemical compound NC1=CC=CC(B(O)O)=C1 JMZFEHDNIAQMNB-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- UKVIEHSSVKSQBA-UHFFFAOYSA-N methane;palladium Chemical compound C.[Pd] UKVIEHSSVKSQBA-UHFFFAOYSA-N 0.000 description 1
- 229940095102 methyl benzoate Drugs 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- KPTRDYONBVUWPD-UHFFFAOYSA-N naphthalen-2-ylboronic acid Chemical compound C1=CC=CC2=CC(B(O)O)=CC=C21 KPTRDYONBVUWPD-UHFFFAOYSA-N 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 125000003261 o-tolyl group Chemical group [H]C1=C([H])C(*)=C(C([H])=C1[H])C([H])([H])[H] 0.000 description 1
- 229940065472 octyl acrylate Drugs 0.000 description 1
- ANISOHQJBAQUQP-UHFFFAOYSA-N octyl prop-2-enoate Chemical compound CCCCCCCCOC(=O)C=C ANISOHQJBAQUQP-UHFFFAOYSA-N 0.000 description 1
- PIBWKRNGBLPSSY-UHFFFAOYSA-L palladium(II) chloride Chemical compound Cl[Pd]Cl PIBWKRNGBLPSSY-UHFFFAOYSA-L 0.000 description 1
- YJVFFLUZDVXJQI-UHFFFAOYSA-L palladium(ii) acetate Chemical compound [Pd+2].CC([O-])=O.CC([O-])=O YJVFFLUZDVXJQI-UHFFFAOYSA-L 0.000 description 1
- MXQOYLRVSVOCQT-UHFFFAOYSA-N palladium;tritert-butylphosphane Chemical compound [Pd].CC(C)(C)P(C(C)(C)C)C(C)(C)C.CC(C)(C)P(C(C)(C)C)C(C)(C)C MXQOYLRVSVOCQT-UHFFFAOYSA-N 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 229940049953 phenylacetate Drugs 0.000 description 1
- WLJVXDMOQOGPHL-UHFFFAOYSA-N phenylacetic acid Chemical compound OC(=O)CC1=CC=CC=C1 WLJVXDMOQOGPHL-UHFFFAOYSA-N 0.000 description 1
- 239000003505 polymerization initiator Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910052704 radon Inorganic materials 0.000 description 1
- SYUHGPGVQRZVTB-UHFFFAOYSA-N radon atom Chemical compound [Rn] SYUHGPGVQRZVTB-UHFFFAOYSA-N 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- CWLNAJYDRSIKJS-UHFFFAOYSA-N triethoxymethoxyethane Chemical compound CCOC(OCC)(OCC)OCC CWLNAJYDRSIKJS-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D409/00—Heterocyclic compounds containing two or more hetero rings, at least one ring having sulfur atoms as the only ring hetero atoms
- C07D409/02—Heterocyclic compounds containing two or more hetero rings, at least one ring having sulfur atoms as the only ring hetero atoms containing two hetero rings
- C07D409/06—Heterocyclic compounds containing two or more hetero rings, at least one ring having sulfur atoms as the only ring hetero atoms containing two hetero rings linked by a carbon chain containing only aliphatic carbon atoms
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Polymerisation Methods In General (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Abstract
The invention discloses a coumarin two-photon initiator, a synthesis method and application thereof, and is characterized in that the solubility of the two-photon initiator is improved and the two-photon absorption section is improved by changing functional groups and the sites where the functional groups are located, so that more excellent two-photon polymerization initiation efficiency is obtained. The synthesis steps of the novel two-photon initiator are as follows: step one, introducing corresponding groups into the positions 2 and 5 of thiophene; step two, introducing ester groups on the basis of the products of the step one; step three, performing a Kenaonvinguel condensation reaction on the product of the step two and a salicylaldehyde derivative to generate a corresponding novel two-photon initiator; the novel two-photon initiator provided by the invention has higher sensitivity, larger two-photon absorption section and lower polymerization threshold, and shows excellent two-photon polymerization activity and stability.
Description
Technical Field
The invention belongs to the technical field of micro-nano processing and manufacturing and photosensitive materials, and particularly relates to a coumarin two-photon initiator and a synthesis method and application thereof.
Background
Two-photon absorption refers to a nonlinear optical process in which a substance absorbs two photons simultaneously under the excitation of a strong laser, and transitions from a ground state to a high-level excited state. Unlike conventional ultraviolet single photon polymerization, two-photon polymerization generally adopts near infrared (600-1000 nm) laser, has longer wavelength, lower energy, lower linear absorption and Rayleigh scattering, lower photon energy, and only two-photon absorption occurs at the position with the maximum laser intensity near the focus, so that the two-photon process has good space selectivity, less damage to samples and better light stability of the compound in the wavelength range. In addition, the liquid resin has higher permeability to near infrared light, and the two-photon absorption intensity is in direct proportion to the flat hair of the incident laser intensity, so that only the focal point can initiate two-photon polymerization by controlling the laser intensity, and the two-photon polymerization has a 'point' polymerization characteristic. The laser direct writing technology based on two-photon polymerization has wide application prospect in the fields of two-photon dynamic treatment, high-density 3D optical information storage, micro-nano processing, three-dimensional stereo forming and the like.
The two-photon initiator is an important component and a research key point of two-photon polymerization, and has decisive effects on polymerization initiation efficiency, micro-nano processing speed and precision. Research and development of a high-efficiency two-photon polymerization initiator has important practical significance and decisive influence on reducing a polymerization threshold value, shortening exposure time, reducing polymerization cost, improving polymerization efficiency of two-photon polymerization, improving processing micro-nano processing precision and the like.
Accordingly, there is a need to provide a two-photon initiator having a large two-photon absorption cross section and high two-photon polymerization efficiency.
Disclosure of Invention
The invention aims to make up the defects in the prior art and provides a coumarin two-photon initiator and a synthesis method and application thereof.
The specific technical scheme adopted by the invention is as follows:
in a first aspect, the invention provides a coumarin two-photon initiator, which has a chemical structural formula as follows:
wherein R is 1 ,R 2 ,R 3 ,R 4 ,R 5 respectively-Ar (-Ar is aryl, refers to any functional group or substituent derived from a simple aromatic ring), phenyl, o-tolyl, 1-naphthyl, 2-naphthyl and the like belong to the category), -X (-X is any one of F, cl, br, I), -H, -OH, -CN, -NO 2 、-NH 2 、-COOC x H 2x+1 、-OC x H 2x+1 、-N(C x H 2x+1 ) 2 、-CH 2 CH(C m H 2m+1 )C n H 2n+1 Wherein x is any natural number in the range of 1 to 15, m+n=5 to 30, m and n are non-zero natural numbers.
In a second aspect, the invention provides a method for synthesizing a coumarin two-photon initiator, which comprises the following steps:
s1: dissolving 2, 5-disubstituted thiophene and aromatic compounds in an organic solvent, adding strong base and palladium catalyst, and reacting for 1-72 hours at-100-150 ℃ in an inert gas atmosphere; after the reaction is finished, the reaction returns to room temperature, and then is sequentially extracted, washed, dried, filtered and purified to obtain R 1 First product being an-Ar group (if R 1 Halogen, carbon chain or other simple groups, the step can be omitted, and the raw materials with the groups can be directly purchased;
s2: dissolving the first product in an organic solvent, then adding an ester compound and sodium hydride, and reacting for 1-50 hours at the temperature of-20-100 ℃; after the reaction is finished, the reaction returns to room temperature, and then the second product is obtained after extraction, cleaning, drying, filtering and purification are sequentially carried out;
s3: dissolving the second product, the Lewis base and the salicylaldehyde derivative in an organic solvent, and reacting for 1-64 hours at 0-150 ℃ in an anhydrous and anaerobic environment; and (3) after the reaction is finished, recovering the temperature to room temperature, and then sequentially extracting, cleaning, drying, filtering and purifying to obtain the coumarin two-photon initiator.
Preferably, the steps of extraction, washing, drying, filtration and purification are specifically as follows: extraction with Dimethylformamide (DCM), washing several times, combining the organic phases, followed by addition of anhydrous Na 2 SO 4 Drying, filtering, and purifying the crude product obtained after filtering by column chromatography.
Preferably, in the step S1, the molar ratio of the 2, 5-disubstituted thiophene to the aromatic compound is 1:1 to 1:8.
Preferably, the molar ratio of the aromatic compound, the palladium catalyst and the strong base is 1 (0.01-1): 1-10.
Preferably, the aromatic compound is any one or a mixture of two or more of phenylboronic acid, phenylboronic anhydride, pentafluorophenylboronic acid, 4-fluorobenzeneboronic acid, 2-fluorobenzeneboronic acid, 4-chlorophenylboronic acid, sodium tetraphenylborate, 2-naphthylboronic acid, 2-biphenylboronic acid, 3-bromophenylboronic acid, 4-biphenylboronic acid, 3-biphenylboronic acid, 4-tolueneboronic acid, m-butylphenylboronic acid, 3-nitrobenzeneboronic acid, 4-cyanobenzeneboronic acid, 3-aminophenylboronic acid, 4-carboxyphenylboronic acid, 4-propylphenylboronic acid, 4-acetylphenylboronic acid, 2-vinylphenylboronic acid, 4-triphenylamine borate, p-ethoxyphenylboronic acid, 4-ethylphenylboronic acid, 4-nonylphenylphenylboronic acid, 3-hydroxyphenylboronic acid pinacol ester, 4-butoxyphenylboronic acid, 4-benzyloxy phenylboronic acid, 4-hexyloxybenzeneboronic acid, 4-octyloxybenzeneboronic acid, 4-cyclohexylphenylboronic acid, 4-pentyloxyphenylboronic acid, and the like.
Preferably, the palladium catalyst is one or a mixture of more than two of bis (tri-tert-butylphosphine) palladium, tetrakis (triphenylphosphine) palladium, palladium acetate, diphenylphosphino ferrocene palladium dichloride, dichlorodiphenylphosphino palladium, palladium carbon, palladium pivalate, trifluoroacetate palladium and tris (dibenzylideneacetone) dipalladium.
Preferably, in the step S2, the molar ratio of the first product, the ester compound and the sodium hydride is 1 (2-8): 2-8, more preferably 1 (2-6): 2-6.
Preferably, the ester compound is any one or a mixture of two or more of methyl acetate, ethyl acetate, butyl acetate, ethyl propionate, phenyl acetate, methyl benzoate, ethyl caproate, ethyl trimethylacetate, diethyl malonate, ethyl pyruvate, ethyl laurate, octyl acrylate, diethyl oxaloacetate, tetraethyl orthocarbonate, ethyl isohexanoate, diethyl carbonate, ethyl tridecanoate, ethyl pentadecanoate, ethyl benzoylacetate, diethyl phthalate, ethyl 2-chloroacetoacetate, ethyl isobutyrate, and diethyl glutarate.
Preferably, in the step S3, the molar ratio of the second product, the Lewis base and the salicylaldehyde derivative is 1 (1-8): 1-8.
Preferably, the lewis base is any one or a mixture of more than two of quaternary ammonium salt, pyridine, aniline, triethylamine, diethylamine, potassium tert-butoxide, sodium alkoxide, sodium hydride, lithium diisopropylamide, piperidine, 4-dimethylpyridine and quinoline.
Preferably, the salicylaldehyde derivative is that the substituent at the 4-position of salicylaldehyde is-H, -X, -CN, -OH, -NO 2 、-NH 2 、-COOC x H 2x+1 、-OC x H 2x+1 、-N(C x H 2x+1 ) 2 -any one of Ar, wherein, -X is any one of F, cl, br, I, X is any natural number in the range of 1 to 15.
Preferably, the organic solvent is one or a mixture of two or more of methanol, ethanol, isopropanol, diethyl ether, diethanol monomethyl ether, ethylene glycol dimethyl ether, ethylene glycol diethyl ether, diethylene glycol dimethyl ether, propylene glycol methyl ether acetate, γ -butyrolactone, di (ethylene glycol) diethyl ether, methyl iso Ding Tonger ethanol monoethyl ether, acetone, dichloromethane, chloroform, N-hexane, toluene, tetrahydrofuran, N-dimethylformamide, N-dimethylacetamide, dimethyl sulfoxide, acetic acid and acetic anhydride.
Preferably, steps S2 and S3 are both performed in an anhydrous and anaerobic environment; the inert gas is any one of helium, neon, argon, krypton, xenon, radon and nitrogen.
In a third aspect, the invention provides an application of the coumarin two-photon initiator in the micro-nano processing and photoresist fields.
Compared with the prior art, the invention has the following beneficial effects:
1) According to the two-photon initiator molecule, a thiophene ring is used as a core, coumarin is used as an arm, and the solubility and the two-photon polymerization efficiency of the series of initiators in the resin are improved by introducing aromatic rings, carbon chains and electron-withdrawing groups on the thiophene core and the coumarin arm.
2) The two-photon initiator has a larger two-photon absorption section, good stability and two-photon polymerization activity, and high microstructure precision processed by two-photon polymerization reaction.
Drawings
FIG. 1 is a graph of the Z-Scan test results of the two-photon initiator prepared in example 2;
FIG. 2 is a line matrix electron microscopic image of the photoresist obtained in example 3 after development by femtosecond laser lithography;
FIG. 3 is an electron microscope image of a 3D model of the photoresist obtained in example 4 after being developed by a femtosecond laser printer;
FIG. 4 is a graph showing the nuclear magnetic resonance results of the product obtained in example 1;
FIG. 5 is a graph showing the nuclear magnetic resonance results of the product obtained in example 2.
Detailed Description
In order to more clearly illustrate the present invention, the present invention will be further described with reference to preferred embodiments and the accompanying drawings. Those skilled in the art will appreciate that these embodiments are by way of example only. Numerous variations, changes, and substitutions will now occur to those skilled in the art without departing from the invention. It should be understood that various alternatives to the embodiments of the invention described in the specification may be employed in practicing the invention. The appended claims are intended to define the scope of the invention and are therefore to cover methods and structures within the scope of these claims and their equivalents. The specific conditions are not noted in the examples and are carried out according to conventional conditions or conditions recommended by the manufacturer. The manufacturer reagents or instruments are not noted and are all conventional products available commercially.
Example 1
The two-photon initiator is prepared by the embodiment, and the specific synthesis method comprises the following steps:
step one:
to the pressure-resistant flask was added 2-acetyl-5-bromothiophene (1 g,4.88 mmol), phenylboronic acid (0.89 g,7.32 mmol), tetrakis (triphenylphosphine) palladium (0.552 g,0.49 mmol), anhydrous sodium carbonate (1.03 g,9.76 mmol), and ethylene glycol dimethyl ether and water were added to dissolve, and reacted under anhydrous and anaerobic conditions at 130℃for 12 hours. The reaction process can be as follows:
reaction completionAfter the addition of a suitable amount of water, extraction three times with DCM and the organic phases were combined. Organic phase added anhydrous Na 2 SO 4 Drying, filtering, removing solvent under reduced pressure, purifying by column chromatography, and removing solvent under reduced pressure to obtain light yellow powder of 0.94g of 2-acetyl-5-phenylthiophene with a yield of 95%. The resulting product was characterized by nuclear magnetic resonance and the results were as follows: 1 H NMR(400MHz,CDCl 3 )δ7.40~8.10(m,7H)δ2.50(s,3H,-CH 3 )。
step two:
to the reaction flask, 10ml of diethyl carbonate and sodium hydride (0.29 g,12.0 mmol) were added and stirred for 2 hours in an ice-water bath, followed by dropwise addition of 10ml of a THF solution of 2-acetyl-5-phenylthiophene (0.15 g,0.7 mmol) and reaction at 80℃for 24 hours. The reaction process can be as follows:
after the reaction, cooling to room temperature, adding appropriate amount of glacial acetic acid for acidification, washing with distilled water until no acidity appears, extracting with DCM for three times, mixing organic phases, adding anhydrous Na 2 SO 4 Drying, filtering, removing solvent under reduced pressure, purifying by column chromatography, and removing solvent under reduced pressure to obtain yellow powdery solid 2-diacetoacetic acid ethyl ester-5-phenylthiophene 0.2g, with a yield of 99%. The resulting product was characterized by nuclear magnetic resonance and the results were as follows: 1 H NMR(400MHz,CDCl 3 )δ1.20(m,3H,-CH 3 ),4.11(m,2H,-CH 2 O-),3.84(s,2H,-CH 2 -),7.49~8.00(m,7H)。
step three:
to the reaction flask were added ethyl 2-diacetoacetate-5-phenylthiophene (0.1 g,0.34 mmol), diethylamino salicylic aldehyde (0.116 g,0.60 mmol), triethylamine 0.5ml and 20ml of anhydrous methanol, and the mixture was reacted at 65℃for 5 hours under the protection of argon. The reaction process can be as follows:
after the reaction, adding a large amount of KOH, washing until the reaction does not become alkaline, extracting with DCM for three times, combining organic phases, washing with water for three times, decompressing, desolventizing, purifying by column chromatography to obtain 0.14g of orange-red powdery solid with the yield of 98%. And the nuclear magnetic resonance characterization is carried out on the obtained product, the nuclear magnetic resonance result is shown in fig. 4, and the nuclear magnetic data is consistent with the structure of a preset product, so that the designed molecule is successfully synthesized, and the product has higher purity.
Example 2
The two-photon initiator is prepared by the embodiment, and the specific synthesis method comprises the following steps:
step one:
to the reaction flask, 15ml of diethyl carbonate and 15ml of sodium hydride (3.65 g,0.095 mol) in an ice salt bath were added and stirred for 2 hours, followed by dropwise addition of 15ml of a THF solution of 2-acetylthiophene (3.00 g,23.8 mmol) and reaction at 80℃for 32 hours. The reaction process can be as follows:
after the reaction, cooling to room temperature, adding appropriate amount of glacial acetic acid for acidification, washing with distilled water until no acidity appears, extracting with DCM for three times, mixing organic phases, adding anhydrous Na 2 SO 4 Drying, filtering, removing solvent under reduced pressure, purifying by column chromatography, and removing solvent under reduced pressure to obtain yellow liquid of 4.7g of 2-diacetoacetic acid ethyl thiophene with the yield of 100%. The resulting product was characterized by nuclear magnetic resonance and the results were as follows: 1 H NMR(400MHz,CDCl 3 )δ1.20(m,3H,-CH 3 ),4.11(m,2H,-CH 2 O-),3.84(s,2H,-CH 2 -),7.25(m,1H),7.99(m,2H)。
step three:
to the reaction flask were added 2-diacetoxyethyl thiophene (0.2 g,1.02 mmol), dibutylamino Shui Yang aldehyde (0.3 g,1.22 mmol), triethylamine 0.5ml and 20ml of anhydrous methanol, and the mixture was reacted at 65℃for 30 hours under nitrogen atmosphere. The reaction process can be as follows:
after the reaction, a large amount of KOH is added, the mixture is washed until the mixture does not become alkaline, the mixture is extracted three times by DCM, the organic phases are combined, washed three times by water, decompressed and desolventized, and purified by column chromatography, thus obtaining 0.37g of orange-yellow liquid with the yield of 99%. And the nuclear magnetic resonance characterization is carried out on the obtained product, the nuclear magnetic resonance result is shown in fig. 5, and the nuclear magnetic data is consistent with the structure of a preset product, so that the designed molecule is successfully synthesized, and the product has higher purity. In addition, performance test is carried out on the two-photon initiator obtained in the embodiment, the two-photon absorption section of the initiator is 340GM through the test of a Z-Scan device, and the test result is shown in fig. 1, which shows that the two-photon initiator has larger two-photon absorption capacity.
Example 3
Under the dark environment, 10mg of the two-photon initiator in the embodiment 2 and 400mg of pentaerythritol triacrylate are added into a 10mL beaker and stirred until the two-photon initiator and the pentaerythritol triacrylate are uniformly mixed, and the two-photon photoresist is obtained. The glass slide is smeared with a proper amount of prepared photoresist, micro-nano structure processing is carried out under 780nm titanium sapphire femtosecond laser, the femtosecond laser pulse is 100fs, the laser frequency is 80MHz, a two-dimensional line graph shown in figure 2 is obtained, and from a scanning result, a good line structure can be obtained by using the initiator, and the minimum line width is below 100 nm.
Example 4
Under a dark environment, 10mg of the two-photon initiator in the example 2 and 400mg of pentaerythritol triacrylate are added into a 10mL beaker, and the mixture is stirred until the mixture is uniform, so as to obtain the two-photon photoresist. And (3) smearing a proper amount of prepared photoresist on the glass slide, and processing the micro-nano structure under 780nm titanium sapphire femtosecond laser, wherein the femtosecond laser pulse is 100fs, and the laser frequency is 80MHz. A three-dimensional structure in the form of a thread is obtained, as shown in fig. 3. It can be seen from the figure that the structures processed using the initiator have smooth edges and a stable stereomorphology.
Therefore, the initiator improves the solubility of the two-photon initiator and improves the two-photon absorption section by changing the functional group and the position of the functional group, thereby obtaining more excellent two-photon polymerization initiation efficiency. The synthesis steps of the novel two-photon initiator mainly comprise: step one, introducing different proper groups into the positions 2 and 5 of thiophene; step two, introducing ester groups on the basis of the products of the step one; and thirdly, performing a Kenaonvinguel condensation reaction on the product of the step two and the salicylaldehyde derivative to generate a corresponding novel two-photon initiator. The novel two-photon initiator provided by the invention has higher sensitivity, larger two-photon absorption section and lower polymerization threshold, and shows excellent two-photon polymerization activity and stability.
Compared with the Chinese patent with the application number of 2021112613459, the invention can regulate and control the two-photon absorption capacity and the solubility of the initiator molecule by optimizing the molecular structure, thereby obtaining more excellent two-photon initiation performance.
The above embodiment is only a preferred embodiment of the present invention, but it is not intended to limit the present invention. Various changes and modifications may be made by one of ordinary skill in the pertinent art without departing from the spirit and scope of the present invention. Therefore, all the technical schemes obtained by adopting the equivalent substitution or equivalent transformation are within the protection scope of the invention.
Claims (9)
1. The coumarin two-photon initiator is characterized by comprising the following specific chemical structural formula:
2. the synthesis method of the coumarin two-photon initiator is characterized by comprising the following steps of:
s1: dissolving 2-acetylthiophene in an organic solvent, then adding diethyl carbonate and sodium hydride, and reacting for 1-50 hours at the temperature of-20-100 ℃; after the reaction is finished, the temperature is restored to the room temperature, and then the 2-diacetoacetic acid ethyl thiophene is obtained after the steps of extraction, cleaning, drying, filtering and purification are sequentially carried out;
s2: dissolving the 2-diacetoxyethyl thiophene, lewis base and dibutylamino salicylaldehyde in an organic solvent, and reacting for 1-64 hours at 0-150 ℃ in an anhydrous and anaerobic environment; and (3) after the reaction is finished, recovering the temperature to room temperature, and then sequentially extracting, cleaning, drying, filtering and purifying to obtain the coumarin two-photon initiator.
3. The synthesis method of the coumarin two-photon initiator is characterized by comprising the following steps of:
s1: dissolving 2-acetyl-5-phenyl thiophene in an organic solvent, then adding diethyl carbonate and sodium hydride, and reacting for 1-50 hours at the temperature of minus 20-100 ℃; after the reaction is finished, the reaction returns to room temperature, and then the 2-diacetoacetic acid ethyl ester-5-phenylthiophene is obtained after extraction, cleaning, drying, filtering and purification are sequentially carried out;
s2: dissolving the 2-diacetoacetic acid ethyl ester-5-phenyl thiophene, lewis base and diethylamino salicylaldehyde in an organic solvent, and reacting for 1-64 hours at 0-150 ℃ in an anhydrous and anaerobic environment; and (3) after the reaction is finished, recovering the temperature to room temperature, and then sequentially extracting, cleaning, drying, filtering and purifying to obtain the coumarin two-photon initiator.
4. The method for synthesizing the coumarin two-photon initiator according to claim 3, wherein the preparation method of the 2-acetyl-5-phenylthiophene is as follows:
1g,4.88mmol of 2-acetyl-5-bromothiophene, 0.89g,7.32mmol of phenylboric acid, 0.552 g,0.49mmol of tetrakis (triphenylphosphine) palladium, 1.03g,9.76mmol of anhydrous sodium carbonate are added into ethylene glycol dimethyl ether and water for dissolution, and the reaction is carried out for 12 hours under anhydrous and anaerobic conditions at 130 ℃; and after the reaction is finished, the reaction returns to room temperature, and then the first product is obtained after extraction, cleaning, drying, filtering and purification are sequentially carried out.
5. The method for synthesizing a coumarin type two-photon initiator according to claim 4, wherein the steps of extraction, washing, drying, filtering and purification are performedThe method comprises the following steps: extracting with dimethylformamide, adding the washed organic phase to anhydrous Na 2 SO 4 Drying, filtering, and purifying the crude product obtained after filtering by column chromatography.
6. The method for synthesizing a coumarin two-photon initiator according to claim 2 or 3, wherein the lewis base is any one or a mixture of two or more of quaternary ammonium salt, pyridine, aniline, triethylamine, diethylamine, potassium tert-butoxide, sodium alkoxide, sodium hydride, lithium diisopropylamide, piperidine, 4-dimethylpyridine and quinoline.
7. The method for synthesizing a coumarin two-photon initiator according to claim 2 or 3, wherein the organic solvent is any one or a mixture of two or more of methanol, ethanol, isopropanol, diethyl ether, diethanol monomethyl ether, ethylene glycol dimethyl ether, ethylene glycol diethyl ether, diethylene glycol dimethyl ether, propylene glycol methyl ether acetate, γ -butyrolactone, di (ethylene glycol) diethyl ether, methyl iso Ding Tonger ethanol monoethyl ether, acetone, dichloromethane, chloroform, N-hexane, toluene, tetrahydrofuran, N-dimethylformamide, N-dimethylacetamide, dimethyl sulfoxide, acetic acid and acetic anhydride.
8. A method for synthesizing a coumarin-based two-photon initiator according to claim 2 or 3, wherein steps S1 and S2 are performed in an anhydrous and anaerobic environment.
9. Use of the coumarin-based two-photon initiator according to claim 1 in micro-nano processing and photoresist fields.
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