CN114476669A

CN114476669A - Version library device, version library system and attitude adjustment method

Info

Publication number: CN114476669A
Application number: CN202210127135.9A
Authority: CN
Inventors: 赵东雷; 关宏武; 王浩楠; 林继柱; 刘颖
Original assignee: Beijing Semiconductor Equipment Institute
Current assignee: Beijing Semiconductor Equipment Institute
Priority date: 2022-02-11
Filing date: 2022-02-11
Publication date: 2022-05-13
Anticipated expiration: 2042-02-11
Also published as: CN114476669B

Abstract

The application relates to the technical field of plate library storage, in particular to a plate library device, a plate library system and a posture adjusting method, wherein the plate library device comprises a Y-direction adjusting component, an RxRy adjusting component, an Rz adjusting component, an X-direction adjusting component and a plate box, and the Y-direction adjusting component, the RxRy adjusting component and the Rz adjusting component are sequentially arranged from bottom to top; the Y-direction adjusting component is connected with the Rz-direction adjusting component through an RxRy adjusting component and is used for adjusting and locking Rx and Ry of the Y-direction adjusting component and the Rz-direction adjusting component; the Rz adjustment component, the RxRy adjustment component and the Y-direction adjustment component are connected through the Rz adjustment component and are used for adjusting and locking the Rz of the Rz adjustment component; the Rz adjustment member is connected with the plate box through an X-direction adjustment assembly and is used for adjusting and locking the X-direction position of the plate box. Therefore, the device has the advantages of multiple adjustable degrees of freedom, good adaptability, simple adjustment process, labor saving and high precision.

Description

Version library device, version library system and attitude adjustment method

Technical Field

The present disclosure relates to the field of library storage technologies, and in particular, to a library device, a library system, and a method for adjusting an attitude.

Background

The existing mask plate caching equipment (internal mask plate library equipment) generally completes the posture adjustment of a mask plate library by means of module vertical movement and leveling jackscrews, and the mode has the advantages of less adjustment freedom, poor adaptability, complex adjustment process, time consumption and low precision.

Disclosure of Invention

The application aims to provide a version library device, a version library system and an attitude adjustment method, and solves the technical problems that in the attitude adjustment process of the existing mask version cache equipment in the prior art, the adjustment degree of freedom is small, the adaptability is poor, the adjustment process is complex, time is wasted and the precision is low.

The application provides a version storehouse device includes: the device comprises an attitude adjusting mechanism and a plate box arranged on the attitude adjusting mechanism, wherein the attitude adjusting mechanism comprises a Y-direction adjusting component, an RxRy adjusting component, an Rz adjusting component and an X-direction adjusting component; wherein the Y-direction adjusting member, the RxRy adjusting member, and the Rz adjusting member are sequentially disposed from bottom to top;

the Y-direction adjusting component and the Rz adjusting component are connected through the RxRy adjusting component, and the RxRy adjusting component is used for adjusting and locking RX and RY of the Y-direction adjusting component and the Rz adjusting component;

the Rz adjustment component, the RxRy adjustment component and the Y-direction adjustment component are connected through the Rz adjustment assembly, and the Rz adjustment assembly is used for adjusting and locking the Rz of the Rz adjustment component;

the Rz adjustment component is connected with the plate box through the X-direction adjusting component, and the X-direction adjusting component is used for adjusting and locking the X-direction position of the plate box.

In the above technical solution, further, the RxRy adjusting component includes a locking bolt, a locking nut, a conical washer and a spherical washer;

the locking bolt sequentially penetrates through the Y-direction adjusting member, the conical washer, the spherical washer and the RxRy adjusting member;

the conical surface of the conical surface gasket is matched with the spherical surface of the spherical surface gasket; the lock nut is screwed to the bolt and is used for locking the Y-direction adjustment member and the RxRy adjustment member.

In any of the above technical solutions, further, the Rz adjustment assembly comprises an Rz guide pin and an Rz adjustment block; wherein the Rz adjustment member and the RxRy adjustment member are rotationally coupled via an Rz guide pin;

the Rz adjustment base is connected with the Y-direction adjustment component;

the Rz adjustment seat is provided with a first waist-shaped hole and is connected with the Rz adjustment component through a first fastening component which is arranged in the first waist-shaped hole in a penetrating way; the Rz adjustment base is formed with a first threaded force application hole.

In any one of the above technical solutions, further, the Rz adjustment assembly further includes at least three second fastening members, and along a width direction of the cassette, at least two of the second fastening members are disposed on one side of the cassette, and at least one of the second fastening members is disposed on the opposite side of the cassette;

at least three of the second fastening members are each connected to the Rz adjustment member and the RxRy adjustment member.

In any of the above technical solutions, further, the X-direction adjusting assembly includes an X-direction guide pin, a guide hole, a second kidney-shaped hole, a third fastening member, and an X-direction adjusting seat;

wherein the guide hole and the second waist-shaped hole are formed in the plate box, the X-direction guide pin is provided to the Rz adjustment member and inserted into the guide hole, and the X-direction guide pin is movable along the guide hole;

the third fastening member connects the Rz adjustment member and the cassette through the second waist-shaped hole;

the X-direction adjusting seat is connected with the Rz adjusting component, and a second threaded force application hole is formed in the X-direction adjusting seat.

In any one of the above technical solutions, further, the number of the X-direction guide pins is two, and the two X-direction guide pins are sequentially arranged at intervals along the length direction of the plate box.

In any of the above technical solutions, further, the magazine includes: the device comprises an integral plate box, an in-position detection device, a relief plate detection device, an existence detection device, a right side reflection assembly, a left side reflection assembly, a plate fork limiting member and a plurality of adsorption assemblies;

the adsorption components are arranged in the integral type plate box and are sequentially arranged along the height direction of the integral type plate box;

the in-place detection device and the relief printing plate detection device are both arranged at the top of the integral type plate box; the right side reflection assembly and the left side reflection assembly are respectively arranged on two opposite sides of the bottom of the integral type plate box;

any adsorption component is provided with the presence detection device, and the presence detection device is arranged on the side part of the adsorption component;

the plate fork limiting component is arranged on one side of the integral plate box.

In any one of the above technical solutions, further, the adsorption component includes: the device comprises a supporting plate, an adsorption member, a first limiting member and a second limiting member;

the first limiting member is arranged at one end of the mounting boss, and the second limiting member is arranged at the other opposite end of the mounting boss; the other opposite side of the supporting plate is provided with a limiting bulge extending along the width direction of the supporting plate;

the adsorption member is arranged on the mounting boss and is positioned between the first limiting member and the second limiting member;

the first limiting member is provided with a first limiting part perpendicular to the supporting plate, and the second limiting member is provided with a second limiting part perpendicular to the supporting plate.

In any one of the above technical solutions, further, the plate library device further includes a Z-direction module, the posture adjustment mechanism is connected to the Z-direction module, and the Z-direction module is configured to drive the posture adjustment mechanism to move along the Z-direction; and/or

The plate library device further comprises a support frame, and the Y-direction adjusting component is arranged on the support frame.

The application also provides a version library system, which comprises the version library device in the technical scheme, so that the version library system has all the beneficial technical effects of the version library device, and is not repeated herein.

In the above technical solution, further, the plate library system includes a rotation shaft device, a support member, a gas bath device and a control device; wherein the support member is connected with a target ground through the spindle device; the Z-direction module is arranged on one side of the supporting member, and the control device is arranged on the other side of the supporting member; the plate library device is arranged on one side of the Z-direction module, which is far away from the supporting member;

the plate box of the plate library device is provided with an A surface and a B surface, the A surface is perpendicular to the height direction of the Z-direction module, the B surface is parallel to the height direction of the Z-direction module, and the B surface is arranged along the width direction of the plate box;

the air bath device is arranged on one side of the plate library device and used for blowing air to the plate library device.

The application also provides a posture adjustment method, which comprises the version library device of any technical scheme, so that the method has all the beneficial technical effects of the version library device, and is not repeated herein.

In the above technical solution, further, the posture adjustment method includes the following steps:

firstly, finishing the primary integration work of the version library system according to the guidance of equipment assembly work to meet the design requirements;

the version library system is integrated on the mask transmission subsystem through a rotating shaft device of the version library system, and a debugging coordinate origin is established on a version fork of a plate exchange hand of the mask transmission subsystem;

operating the Z-direction module, driving the plate box device to move along the Z direction, selecting the A surface and the B surface of a plate box of the plate box device as detection surfaces, detecting the delta x and the delta y of the A surface, adjusting the rotating shaft device to enable the delta x and the delta y of the A surface to be within an error allowable range, and detecting the delta x of the B surface to enable the delta x of the B surface to be within the error allowable range;

adjusting Rx and Ry of a plate box by virtue of an RxRy adjusting component of the plate library system; adjusting the Rz of the plate box by means of an Rz adjustment component of said plate library system; the adjustment of the plate box in the X direction is completed by the aid of the X-direction adjusting assembly; and completing Z-direction adjustment of the plate box by virtue of a Z-direction module so as to realize that the plate fork finishes plate taking and placing actions.

Compared with the prior art, the beneficial effect of this application is:

the application provides a version storehouse device has realized the required basic regulation structure of cooperation manipulator work, and the degree of freedom of adjustment is many, adaptability is good, and every degree of freedom adjustment mutual decoupling also does not influence each other moreover, and the adjustment process is simple, laborsaving, and the precision is high moreover.

The working principle of the plate library system provided by the application is that firstly, according to the installation guidance of the system, all devices are installed in place and integrated on a mask transmission subsystem through a rotating shaft device, the height direction of the whole plate library system is the Z direction, namely the vertical direction, the length direction of the whole plate library system is the X direction, the Z-direction module is operated to determine the position deviation of a plate box, and then the rotating shaft device is adjusted to enable the position deviation of the plate box to be within the allowable range; after the lifting section is finished, the RxRy adjusting component of the plate library system is used for finishing the adjustment of Rx and Ry of the plate box, the Rz adjusting component of the plate box is used for finishing the adjustment of Rz of the plate box, the X-direction adjusting component is used for finishing the X-direction adjustment of the plate box, and the Z-direction adjusting component is used for finishing the Z-direction adjustment of the plate box so as to realize the action of picking and placing the plate by the plate fork and further finish the adjustment of the posture of the plate box. Therefore, the whole adjusting process is simple and convenient, and the adjustment of multiple degrees of freedom can be realized.

By utilizing the posture adjusting method provided by the application, the posture adjustment of the plate box with six degrees of freedom can be realized, the adjustment of each degree of freedom is mutually decoupled, the posture adjustment is simple and convenient, and the precision is high.

Drawings

In order to more clearly illustrate the detailed description of the present application or the technical solutions in the prior art, the drawings needed to be used in the detailed description of the present application or the prior art description will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative efforts.

Fig. 1 is a schematic structural diagram of a plate library apparatus according to an embodiment of the present disclosure;

fig. 2 is a schematic structural diagram of an attitude adjustment mechanism according to an embodiment of the present application;

fig. 3 is a schematic structural diagram of an RxRy adjustment component provided in an embodiment of the present application;

FIG. 4 is a schematic structural diagram of a magazine according to an embodiment of the present disclosure;

fig. 5 is a schematic structural diagram of an adsorption assembly according to an embodiment of the present disclosure;

fig. 6 is a schematic structural diagram of a version library system provided in the second embodiment of the present application;

fig. 7 is a schematic structural diagram of a version library system according to a second embodiment of the present application;

fig. 8 is a schematic structural diagram of a rotating shaft device according to a second embodiment of the present application;

fig. 9 is a schematic structural diagram of a rotating shaft device according to a second embodiment of the present application.

Reference numerals:

100-plate library device, 10-attitude adjusting mechanism, 1-Y direction adjusting component, 2-RxRy adjusting component and 3-Rz adjusting component;

4-RxRy adjusting component, 41-locking bolt, 42-locking nut, 43-conical washer, 44-spherical washer;

5-Rz adjustment assembly, 51-Rz guide pin, 52-Rz adjustment seat, 521-first kidney-shaped hole, 522-first threaded force application hole, 53-second fastening member;

6-X direction adjusting component, 61-X direction guide pin, 62-guide hole, 63-second waist-shaped hole, 64-X direction adjusting seat, 641-second thread force application hole; 7-a support frame; 8-an electromagnetic valve;

20-plate box, 21-integral plate box, 211-air pipe installation area, 212-mask plate storage area, 213-plate fork movable area, 22-position detection device, 23-relief plate detection device, 24-existence detection device, 25-right side reflection assembly, 26-left side reflection assembly, 27-plate fork limiting component, 28-adsorption assembly, 281-support plate, 2811-installation bulge, 2812-limiting bulge, 282-adsorption component, 283-first limiting component and 284-second limiting component;

200-a support member;

300-a rotating shaft device, 301-an adjusting mechanism, 302-a main rotating shaft, 303-a universal bearing, 304-a frame interface device, 3011-an interface board, 3012-an upper bearing seat, 3013-a first spherical bearing, 3014-an adjusting screw, 3015-a wedge block, 3016-an adjusting screw, 3017-a fixing screw, 3018-a bearing seat connecting block, 3031-a second spherical bearing, 3032-a lower bearing seat, 3033-a nut, 3034-a Z-direction adjusting block and 3035-a jacking block;

400-a control device; a 500-Z direction module; 600-target land; 700-gas bath device; 1000-version library system.

Detailed Description

The technical solutions of the present application will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are only some embodiments of the present application, but not all embodiments.

The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application.

All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.

A version library device, a version library system, and a pose adjustment method according to some embodiments of the present application are described below with reference to fig. 1 to 9.

Example one

Referring to fig. 1 and 2, an embodiment of the present application provides a plate library apparatus 100 including: posture adjustment mechanism 10 and set up in the plate box 20 of posture adjustment mechanism 10, posture adjustment mechanism 10 includes: a Y-direction adjusting component 1, an RxRy adjusting component 2, an Rz adjusting component 3, an RxRy adjusting component 4, an Rz adjusting component 5 and an X-direction adjusting component 6; wherein, Y-direction adjusting member 1, RxRy adjusting member 2 and Rz adjusting member 3 are arranged in sequence from bottom to top;

the Y-direction adjusting component 1 and the Rz adjusting component 3 are connected through an RxRy adjusting component 4, and the RxRy adjusting component 4 is used for adjusting and locking RX and RY of the Y-direction adjusting component 1 and the Rz adjusting component 3;

the Rz adjustment member 3, the RxRy adjustment member 2 and the Y-direction adjustment member 1 are connected by an Rz adjustment component 5, and the Rz adjustment component 5 is used for adjusting and locking Rz of the Rz adjustment member 3;

the Rz adjustment member 3 is connected to the magazine 20 via an X-direction adjustment assembly 6, and the X-direction adjustment assembly 6 is used to adjust and lock the X-direction position of the magazine 20.

Based on the above-described structure, the plate library device 100 works in cooperation with the robot, that is, the robot takes and places the mask plate in the plate box 20, and the robot generally has the Y-direction adjustable function, so that the plate library device 100 only needs to have the above-described RX, RY, Rz, X-direction position and Z-direction position adjustment, but the plate library device 100 provided by the present application can just achieve the RX, RY, Rz and X-direction position adjustment, and in addition, regarding the Z-direction position adjustment of the plate box 20, the Z-direction position of the plate box 20 can be generally adjusted by using the below-described Z-direction module 500, driving adjustment is performed, or the Z-direction position of the plate box 20 can be manually adjusted, and the Z-direction position of the robot with the preset height after the adjustment is generally unchanged, and then the readjustment is not needed, so that the influence is not great.

It can be seen that the plate library device 100 provided by the application realizes a basic adjusting structure required by the work of a manipulator, has multiple adjusting degrees of freedom and good adaptability, and each degree of freedom adjustment is mutually decoupled, namely, does not mutually influence, and has the advantages of simple and labor-saving adjusting process and high precision.

In this embodiment, preferably, as shown in fig. 1 to 3, the RxRy adjustment assembly 4 includes a lock bolt 41, a lock nut 42, a tapered washer 43, and a spherical washer 44;

wherein, the locking bolt 41 is sequentially arranged on the Y-direction adjusting member 1, the conical washer 43, the spherical washer 44 and the RxRy adjusting member 2 in a penetrating way;

the conical surface of the conical washer 43 is matched with the spherical surface of the spherical washer 44; the lock nut 42 is screwed to the bolt, and is used to lock the Y-direction adjustment member 1 and the RxRy adjustment member 2.

According to the above-described structure, the nut and the bolt are first screwed, the levelness of the Y-direction adjustment member 1 and the RxRy adjustment member 2 is adjusted, and after the levelness is adjusted to be horizontal, the bolt is locked by the nut.

Further, it is preferable that the number of Rz adjustment components 5 is three, three Rz adjustment components 5, two Rz adjustment components 5 are disposed on one side of the RxRy adjustment member 2 along the width direction of the RxRy adjustment member 2, and two Rz adjustment components 5 disposed on the same side are disposed at intervals along the length direction of the RxRy adjustment member 2, wherein one Rz adjustment component 5 is disposed on the other side of the RxRy adjustment member 2. Three Rz adjustment components 5 with triangular connecting lines are adopted, so that the adjustment is more stable.

Further, it is preferable that the Rz adjustment member 3 is formed with an escape notch in order to escape from the Rz adjustment assembly 5.

In this embodiment, preferably, as shown in fig. 1 and 2, the Rz adjustment assembly 5 comprises an Rz guide pin 51 and an Rz adjustment block 52; wherein the Rz adjustment member 3 and the RxRy adjustment member 2 are rotationally connected by the Rz guide pin 51;

the Rz adjustment base 52 is connected to the Y-direction adjustment member 1;

the Rz adjustment base 52 is formed with a first waist-shaped hole 521, and the Rz adjustment base 52 is connected with the Rz adjustment member 3 through a first fastening member passing through the first waist-shaped hole 521; the Rz adjustment base 52 is formed with a first threaded forcing hole 522.

According to the above-described structure, when the Rz of the plate cartridge 20 is adjusted, it is only necessary to screw the stud with a ball head into the first threaded force application hole 522, and the ball head abuts against the Rz adjustment member 3, so as to apply force to the Rz adjustment member 3, and further push the Rz adjustment member 3 together with the plate cartridge 20 thereon to rotate along the Z direction, so as to adjust the Rz to a preset angle, generally to zero Rz.

In this embodiment, preferably, as shown in fig. 1 and 2, the Rz adjustment assembly 5 further comprises at least three second fastening members 53, and along the width direction of the cassette 20, at least two second fastening members 53 are provided on one side of the cassette 20, and at least one second fastening member 53 is provided on the opposite side of the cassette 20;

at least three second fastening members 53 are each connected to the Rz adjustment member 3 and the RxRy adjustment member 2.

According to the above-described structure, after Rz is adjusted, the Rz adjustment member 3 and the RxRy adjustment member 2 are sequentially locked by using the three second fastening members, so that Rz variation is prevented.

Further, preferably, the second fastening member 53 is a fastening bolt.

In this embodiment, preferably, as shown in fig. 1 and 2, the X-direction adjustment assembly 6 includes an X-direction guide pin 61, a guide hole 62, a second kidney-shaped hole 63, a third fastening member, and an X-direction adjustment seat 64;

wherein, the guide hole 62 and the second waist-shaped hole 63 are both formed in the plate box 20, the X-direction guide pin 61 is arranged on the Rz adjustment member 3 and is inserted into the guide hole 62, the X-direction guide pin 61 can move along the guide hole 62;

the third fastening member connects the Rz adjustment member 3 and the cassette 20 through the second waist-shaped hole 63;

the X-direction adjustment base 64 is connected to the Rz adjustment member 3, and the X-direction adjustment base 64 has a second screw biasing hole 641.

According to the above-described structure, when the X-direction position of the plate box 20 is adjusted, only the bolt with a ball head shape is screwed into the second thread force application hole 641, and the ball head shape abuts against the plate box 20, and pushes the plate box 20 to move along the X direction relative to the Rz adjustment member 3, so as to complete the X-direction adjustment, and in the moving process, the guide pin moves in the guide hole 62, so that the guide function is achieved, and the adjustment precision is ensured. Particularly, after the adjustment in the X direction is completed, the third fastening member is used for locking the plate box 20 on the Rz adjustment member 3, so that the position of the X direction of the plate box 20 is ensured to be unchanged.

Further, it is preferable that the number of the X-direction guide pins 61 is two, and the two X-direction guide pins 61 are sequentially provided at intervals along the length direction of the cassette 20, as shown in fig. 2.

According to the above-described structure, the use of the two X-guide pins 61 makes the magazine 20 more stable during the movement.

In this embodiment, preferably, as shown in fig. 1 and 4, the magazine 20 includes: an integral type plate box 21, a positioning detection device 22, a relief detection device 23, a presence detection device 24, a right side reflection assembly 25, a left side reflection assembly 26, a plate fork limiting member 27 and a plurality of adsorption assemblies 28;

wherein, the plurality of adsorption components 28 are all arranged in the integral type plate box 21 and are sequentially arranged along the height direction of the integral type plate box 21;

the positioning detection device 22 and the relief detection device 23 are both arranged at the top of the integral type plate box 21; the right side reflection assembly 25 and the left side reflection assembly 26 are respectively arranged on two opposite sides of the bottom of the integral type plate box 21;

any one of the adsorption units 28 is provided with a presence detection device 24, and the presence detection device 24 is provided on the side of the adsorption unit 28;

a plate fork stop member 27 is provided on one side of the integral plate cartridge 21.

According to the structure described above, a reliable detection device is arranged in the plate box 20, and whether the relief printing plate is abnormal or not is detected in real time by means of the relief printing plate detection device 23; detecting which layer of the mask plate exists in the plate box 20 by means of a 'existence detection device 24' so as to improve the transmission efficiency; judging whether the plate fork installed on the manipulator enters the plate library by using the in-position detection device 22, and avoiding mechanical interference between the plate library and the plate fork; the left and right reflecting components are used for detecting the fixed state of the mask; the plate fork limiting component 27 has the function of limiting the plate fork arranged on the manipulator, particularly limiting in the Y direction; the integral type mask box 20 is adopted, the mask storage area and the mounting groove for mounting the adsorption component 28 are machined and formed at one time, the form and position precision is guaranteed, the adsorption components 28 such as six adsorption components 28 are manufactured in a combined mode, the source of errors is reduced to the greatest extent, the relative errors of a plurality of masks such as six masks are reduced by 80%, the relative precision of the masks and the mounting groove is reduced by 75%, and the transmission precision of the masks is greatly improved.

In addition, the internal structure of the plate box 20 is optimized, the internal area of the plate box 20 is divided into a plurality of small areas such as six small areas, the improved gas bath gas flow field has uniform speed and no backflow and eddy phenomena, and the cleanliness grade of a plate library (mask) is improved.

Further, it is preferable that the seating detection means 22, the relief detection means 23, and the presence detection means 24 are all laser sensors.

Further, it is preferable that the plate fork stopper member 27 has a long strip structure extending in the Z direction, and the plate fork stopper member 27 and the integrated plate cartridge 21 are connected by a fastening member.

Further, it is preferable that the number of the relief detecting devices 23 is two, and the two relief detecting devices 23 are provided at intervals in the longitudinal direction of the cassette 20, that is, in the X direction, at portions of the cassette 20 corresponding to both ends of the adsorbing member 28.

Further, preferably, the integral type plate box 21 includes an air pipe installation region 211, a mask plate storage region 212 and a plate fork moving region 213 which are sequentially arranged along the length direction thereof, and an electromagnetic valve 8 for controlling an air pipe is arranged on the support frame 7, an air pipe joint communicated with the air pipe is installed at the end portion of the support plate 281, an air guide channel is opened on the support plate 281, one end of the air guide channel is communicated with the air pipe joint, and the other end of the air guide channel is communicated with the adsorption member 282, that is, a suction cup.

In this embodiment, preferably, as shown in fig. 5, the adsorption assembly 28 includes: a support plate 281, an adsorption member 282, a first stopper member 283, and a second stopper member 284;

wherein, one side of the supporting plate 281 is formed with a mounting boss 2811 extending along the width direction thereof, the first stopper member 283 is disposed at one end of the mounting boss 2811, and the second stopper member 284 is disposed at the opposite end of the mounting boss 2811; a limit protrusion 2812 extending in the width direction is formed at the other opposite side of the support plate 281;

the adsorption member 282 is disposed on the mounting boss 2811 and located between the first stopper member 283 and the second stopper member 284;

the first stopper member 283 is formed with a first stopper portion perpendicular to the support plate 281, and the second stopper member 284 is formed with a second stopper portion perpendicular to the support plate 281.

According to the structure described above, the first and second position-limiting

members

283 and 284 are respectively abutted against two sides of the mask plate to fix the mask plate and ensure the position of the mask plate, and the adsorption member 282 such as a suction cup is further used to adsorb the mask plate, that is, the mask plate is vacuum-adsorbed and mechanically limited to ensure the position, so that the accuracy is higher.

In this embodiment, preferably, as shown in fig. 6, the plate library apparatus 100 further includes a Z-direction module 500, the posture adjustment mechanism 10 is connected to the Z-direction module 500, specifically, connected to the Z-direction module 500 through a support member 2008, and the Z-direction module 500 is configured to drive the posture adjustment mechanism 10 to move along the Z-direction.

As can be seen from the above-described structure, the Z-direction module 500 drives the posture adjustment mechanism 10 to move in the Z-direction, thereby adjusting the position in the Z-direction.

Further, preferably, the Z-direction module 500 is a linear module extending along the Z-direction, i.e., the vertical direction, and is capable of driving the posture adjustment mechanism connected thereto to move along the Z-direction, i.e., driving the magazine 20 to move along the Z-direction.

Example two

Referring to fig. 6 and 7, a second embodiment of the present application further provides a method for adjusting a posture, which includes the version library apparatus 100 described in the first embodiment, so that all the advantageous technical effects of the version library apparatus 100 are achieved, and the same technical features and advantageous effects are not described again.

In this embodiment, preferably, as shown in fig. 6 and 7, the plate library system 1000 further includes a spindle device 300, a support member 200, a gas bath device 700, and a control device 400;

wherein the supporting member 200 is connected with the target ground 600 through the rotating shaft device 300; the Z-direction module 500 is disposed at one side of the supporting member 200, and the control device 400 is disposed at the other side of the supporting member 200; the plate library device 100 is arranged on one side of the Z-direction module 500 far away from the supporting member 200;

the magazine 20 of the magazine apparatus 100 is formed with an a-side perpendicular to the height direction of the Z-direction module 500 and a B-side parallel to the height direction of the Z-direction module 500, and the B-side is arranged along the width direction of the magazine 20;

the gas bath device 700 is disposed at one side of the plate magazine device 100, and is used to blow air to the plate magazine device 100, and functions to supply clean gas to improve the cleanliness of the plate cartridge 20.

According to the above-described structure, it can be seen that, in combination with the following attitude adjustment method, first, according to the installation guide of the system, each device is installed in place and integrated into the mask transport subsystem through the rotating shaft device 300, it is noted that the height direction of the whole of the existing plate library system 1000 is the Z direction, that is, the vertical direction, and the length direction of the whole of the plate library system 1000 is the X direction, the Z-direction module 500 is operated to determine the position deviation of the plate cartridge 20, and further, the rotating shaft device 300 is adjusted to make the position deviation of the plate cartridge 20 within the allowable range; after the lifting is completed, Rx and Ry of the plate box 20 are adjusted by the RxRy adjusting component 4 of the plate library system 1000, Rz of the plate box 20 is adjusted by the Rz adjusting component 5 of the plate library system 1000, X-direction adjustment of the plate box 20 is completed by the X-direction adjusting component 6, and Z-direction adjustment of the plate box 20 is completed by the Z-direction module 500, so that the plate fork completes plate taking and placing actions, and adjustment of the posture of the plate box 20 is completed (for the adjustment of Rx, Ry, Rz, X, and Z mentioned above). Therefore, the whole adjusting process is simple and convenient.

Further, preferably, as shown in fig. 8 and 9, the spindle device 300 includes: the leveling device comprises a main rotating shaft 302, an adjusting mechanism 301, a frame interface device 304 and a universal bearing 303, wherein two ends of the main rotating shaft 302 are respectively connected with the adjusting mechanism 301 and the universal bearing 303, the main rotating shaft 302 is fixedly connected with a supporting member 200 through the frame interface device 304, and the adjusting mechanism 301 is used for leveling the supporting member 200, a Z-direction module 500 arranged on the supporting member and the plate library device 100 through adjusting the posture position of the rotating shaft.

The adjusting mechanism 301 includes an interface board 3011, a first spherical bearing 3013, an upper bearing block 3012, a bearing block connecting block 3018, a wedge block 3015, and an adjusting screw 3016, where the adjusting screw 3016 is connected to the wedge block 3015 along the Z direction, and then drives the wedge block 3015 to adjust along the X direction through the Z direction adjustment, the wedge block 3015 is a member having a wedge surface, and the wedge surface forms an angle with a surface determined by the Y axis and the Z axis, and naturally can obtain a conversion between the Z direction and the X direction movement, which is obvious to those skilled in the art, so that the explanation is not needed to be expanded, the wedge block 3015 is connected to the upper bearing block 3012 through the bearing block connecting block 3018, and the upper bearing block 3012 is connected to one end of the main rotating shaft 302 through the first spherical bearing 3013, and then does a RY direction swing with the inner ring of the first spherical bearing 3013 along with the X direction adjustment of the block 3015.

Besides, the alternative of the present invention also introduces a fixing screw 3017 to lock the position of the wedge-shaped block 3015, and further, in order to realize the conversion of the linear motion and the final swing, in an alternative embodiment of the present invention, the wedge-shaped block 3015 further has a first kidney-shaped hole 521, and the fixing screw 3017 passes through the kidney-shaped hole, thereby providing a certain adjustment margin.

Through the above design, the adjustment in the RY direction can be realized, and specifically, the adjustment process can be described as follows: adjusting an adjusting screw 3016, a wedge-shaped block 3015 drives a bearing seat connecting block 3018 to move along the X direction, and because the lower end is fixed, a main rotating shaft 302 connected with an upper bearing seat 3012 is forced to swing along RY in a small amplitude, and after the RY is adjusted, a fixing screw 3017 is locked;

not only the RY direction but also the RX direction can be adjusted, specifically, the adjusting mechanism 301 further includes an adjusting screw 3014, the adjusting screw 3014 adjusts the position between the bearing seat connecting block 3018 and the upper bearing seat 3012 along the Y direction, so that the upper bearing seat 3012 swings in the RX direction relative to the inner ring of the first spherical bearing 3013.

The RX adjustment is performed after the RY direction adjustment is completed, specifically, the adjustment screw 3014 and the upper bearing block 3012 move along the Y direction, and since the lower end is fixed, the main rotating shaft 302 is forced to swing along RX by a small amplitude, so as to achieve the RX adjustment.

Regarding the universal bearing 303: the universal bearing 303 comprises a second spherical bearing 3031, a lower bearing seat 3032 and a Z-direction adjusting block 3034, wherein the lower bearing seat 3032 is connected with one end of the main rotating shaft 302 through the second spherical bearing 3031, and the Z-direction adjusting block 3034 adjusts the position of the main rotating shaft 302 along the Z direction through a top block 3035.

The universal bearing 303 further comprises a nut 3033 for locking the position of the Z-direction adjusting block 3034, and during actual adjustment, the Z-direction adjusting block 3034 is rotated to enable the Z-direction adjusting block 3034 to move along the Z direction, so that the top block 3035 connected with the Z-direction adjusting block 3034 realizes Z-direction adjustment of the plate library mechanism, and the nut 3033 is used for locking after adjustment. The above-mentioned spindle device 300 is a prior art and will not be described in detail herein.

Further, preferably, the control device 400 includes a driver of the module, an electromagnetic valve, an IO module, a switching board card, and the like, the control unit completes a series of actions of the reticle library through the driving module to realize station transmission of the reticle, and the control device 400 is a structure in the prior art and will not be described in detail herein.

EXAMPLE III

Referring to fig. 1 to 7, a third embodiment of the present application further provides a method for adjusting a posture, including the version library apparatus 100 described in the first embodiment, so that all the beneficial technical effects of the version library apparatus 100 are achieved, and the same technical features and beneficial effects are not described again.

In this embodiment, preferably, as shown in fig. 1 to 7, the posture adjustment method includes the steps of:

firstly, finishing the primary integration work of the version library system 1000 according to the equipment assembly operation instruction, and meeting the design requirement;

the version library system 1000 is integrated on the mask transmission subsystem through the rotating shaft device 300, and the debugging coordinate origin is established on the version fork of the plate exchange hand of the mask transmission subsystem, wherein the height direction of the Z-direction module 500 of the version library system 1000 is the Z direction, and the length direction of the version box 20 device of the version library system 1000 is the X direction;

operating the Z-direction module 500, driving the plate box 20 device to move along the Z direction, selecting the A surface and the B surface of the plate box 20 device as detection surfaces, detecting the delta x and the delta y of the A surface, adjusting the rotating shaft device 300 to enable the delta x and the delta y of the A surface to be within an error allowable range, and detecting the delta x of the B surface to enable the delta x of the B surface to be within the error allowable range;

adjusting Rx and Ry of the plate box 20 by means of an RxRy adjusting component 4 of the plate library system 1000, specifically, firstly, screwing a nut and a bolt, then adjusting levelness of a Y-direction adjusting component 1 and an RxRy adjusting component 2, and after adjusting to be horizontal, locking the bolt by using the nut;

the Rz adjustment of the plate box 20 is completed by means of the Rz adjustment assembly 5 of the plate library system 1000, specifically, when the Rz of the plate box 20 is adjusted, only a bolt with a ball-head-shaped head needs to be screwed into the first threaded force application hole 522, and the ball-head-shaped head abuts against the Rz adjustment member 3, so as to apply force to the Rz adjustment member 3, further push the Rz adjustment member 3 and the plate box 20 thereon to rotate along the Z direction, so as to adjust the Rz to a preset angle, generally, the Rz is zero, and after the Rz adjustment is completed, the Rz adjustment member 3 and the RxRy adjustment member 2 are sequentially locked by using three second fasteners, so as to avoid the Rz change;

the adjustment of the plate box 20 in the X direction is completed by the X direction adjusting assembly 6, specifically, when the position of the plate box 20 in the X direction is adjusted, only the bolt with a ball head-shaped head is screwed into the second thread force application hole 641, and the ball head-shaped head abuts against the plate box 20, and the plate box 20 is pushed to move along the X direction relative to the Rz adjustment member 3, so as to complete the adjustment in the X direction, and in the moving process, the guide pin moves in the guide hole 62, so that the guide function is achieved, and the adjustment precision is ensured. Especially, after the adjustment in the X direction is finished, the plate box 20 is locked on the Rz adjustment member 3 by using a third fastening member, so that the position of the X direction of the plate box 20 is ensured to be unchanged;

with the help of Z to module 500, accomplish the adjustment of the Z of version box 20 to realize that the version fork is accomplished and is got the version action of putting, specifically, Z is to module 500 drive gesture guiding mechanism 10 along the Z to the motion, thereby adjusts the position of Z to.

According to the structure described above, the posture adjustment of six degrees of freedom of the magazine 20 can be realized by the posture adjustment method, and the adjustment of each degree of freedom is decoupled from each other, so that the posture adjustment is simple and convenient, and the precision is high.

Finally, it should be noted that: the above embodiments are only used for illustrating the technical solutions of the present application, and not for limiting the same; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and these modifications or substitutions do not depart from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A plate library apparatus, comprising: the device comprises an attitude adjusting mechanism and a plate box arranged on the attitude adjusting mechanism, wherein the attitude adjusting mechanism comprises a Y-direction adjusting component, an RxRy adjusting component, an Rz adjusting component and an X-direction adjusting component; wherein the Y-direction adjusting member, the RxRy adjusting member, and the Rz adjusting member are sequentially disposed from bottom to top;

the Y-direction adjusting component and the Rz adjusting component are connected through the RxRy adjusting component, and the RxRy adjusting component is used for adjusting and locking the RX and RY of the Y-direction adjusting component and the Rz adjusting component;

the Rz adjustment component, the RxRy adjustment component and the Y adjustment component are connected through the Rz adjustment assembly, and the Rz adjustment assembly is used for adjusting and locking the Rz of the Rz adjustment component;

2. The library apparatus of claim 1, wherein the RxRy adjustment assembly includes a locking bolt, a locking nut, a tapered washer, and a spherical washer;

3. The plate library apparatus of claim 1, wherein the Rz adjustment assembly comprises an Rz guide pin and an Rz adjustment block; wherein the Rz adjustment member and the RxRy adjustment member are rotationally coupled via an Rz guide pin;

the Rz adjustment base is connected with the Y-direction adjustment component;

4. The plate library apparatus according to claim 1, wherein the Rz adjustment assembly further comprises at least three second fastening members, and along a width direction of the cassette, at least two of the second fastening members are provided on one side of the cassette, and at least one of the second fastening members is provided on the opposite side of the cassette;

5. The plate library device according to claim 1, wherein the X-direction adjusting assembly comprises an X-direction guide pin, a guide hole, a second waist-shaped hole, a third fastening member and an X-direction adjusting seat;

wherein the guide hole and the second kidney-shaped hole are formed in the magazine, the X-direction guide pin is provided to the Rz adjustment member and inserted into the guide hole, and the X-direction guide pin is movable along the guide hole;

6. The plate library device according to claim 5, wherein the number of the X-direction guide pins is two, and the two X-direction guide pins are sequentially provided at intervals along a length direction of the plate cassette.

7. The plate library apparatus of claim 1, wherein the magazine comprises: the device comprises an integral plate box, an in-position detection device, a relief plate detection device, an existence detection device, a right side reflection assembly, a left side reflection assembly, a plate fork limiting member and a plurality of adsorption assemblies;

8. The plate library apparatus of claim 7, wherein the adsorption component comprises: the device comprises a supporting plate, an adsorption member, a first limiting member and a second limiting member;

9. The plate library device according to any one of claims 1 to 8, further comprising a Z-direction module, wherein the posture adjusting mechanism is connected with the Z-direction module, and the Z-direction module is used for driving the posture adjusting mechanism to move along a Z direction; and/or

10. A plate library system comprising a spindle means, a support member, a gas bath means, a control means, and the plate library means of claim 9; wherein the support member is connected with a target ground through the spindle device; the Z-direction module is arranged on one side of the supporting member, and the control device is arranged on the other side of the supporting member; the plate library device is arranged on one side of the Z-direction module, which is far away from the supporting member;

11. A pose adjustment method comprising the version library system of claim 10, the pose adjustment method comprising the steps of:

operating the Z-direction module, driving the plate box device to move along the Z direction, selecting the surface A and the surface B of a plate box of the plate box device as detection surfaces, detecting the delta x and the delta y of the surface A, adjusting the rotating shaft device to enable the delta x and the delta y of the surface A to be within an error allowable range, and detecting the delta x of the surface B to enable the delta x of the surface B to be within the error allowable range;