CN114460691A - Optical fiber-micro-nano structure integrated element and functional optical fiber array - Google Patents
Optical fiber-micro-nano structure integrated element and functional optical fiber array Download PDFInfo
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- CN114460691A CN114460691A CN202210156099.9A CN202210156099A CN114460691A CN 114460691 A CN114460691 A CN 114460691A CN 202210156099 A CN202210156099 A CN 202210156099A CN 114460691 A CN114460691 A CN 114460691A
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 90
- 239000002086 nanomaterial Substances 0.000 title claims abstract description 77
- 230000003287 optical effect Effects 0.000 title claims abstract description 32
- 239000000758 substrate Substances 0.000 claims abstract description 43
- 239000000835 fiber Substances 0.000 claims abstract description 16
- 238000005253 cladding Methods 0.000 claims abstract description 11
- 238000005530 etching Methods 0.000 claims description 10
- 239000003292 glue Substances 0.000 claims description 8
- 238000001312 dry etching Methods 0.000 claims description 3
- 238000001039 wet etching Methods 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 238000009987 spinning Methods 0.000 claims description 2
- 238000004806 packaging method and process Methods 0.000 abstract description 6
- 238000002360 preparation method Methods 0.000 abstract description 5
- 239000010410 layer Substances 0.000 description 22
- 238000000034 method Methods 0.000 description 7
- 238000013461 design Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000012536 packaging technology Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007888 film coating Substances 0.000 description 2
- 238000009501 film coating Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 239000008204 material by function Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000002365 multiple layer Substances 0.000 description 1
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- 239000010453 quartz Substances 0.000 description 1
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- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
The invention relates to the field of optical devices, and particularly discloses an optical fiber-micro nano structure integrated element and a functional optical fiber array, wherein the optical fiber-micro nano structure integrated element comprises a substrate and an optical fiber, and one end of the optical fiber is inserted into the substrate; a super-surface micro-nano structure is arranged on the substrate; the optical fiber consists of a cladding and a fiber core, wherein the fiber core is embedded in and penetrates through the cladding. The optical fiber-micro nano structure integrated element has the advantages of expandable function, small packaging difficulty and low preparation cost.
Description
Technical Field
The invention belongs to the field of optical devices, and particularly relates to an optical fiber-micro nano structure integrated element and a functional optical fiber array.
Background
The optical fiber, as a light-conducting carrier, plays an important role in the fields of sensing, communication, imaging and the like due to the excellent characteristics of large information capacity, low loss, strong anti-electromagnetic interference capability, strong safety performance and the like.
In order to enrich the functions of optical fibers, researchers begin to use external large-scale equipment together with optical fibers, but the redundant system brings great difficulty to the application of multifunctional optical fibers. The super surface is a micro component, and due to the characteristics of high design freedom, small volume, strong emergent light regulation and control capability and the like, researchers have developed and realized devices with functions such as imaging, sensing, communication and the like based on a super surface structure. The optical fiber super surface is a new research hotspot, at present, researchers process various functional materials by using technologies such as dry etching, wet etching and the like, and prepare super surface devices on the end faces of optical fibers, so that the functions of the optical fibers are greatly enriched.
Therefore, the biggest problem of the super-surface based functional optical fiber is how to realize high precision and low cost packaging to produce stable, reliable and low cost multifunctional optical fiber, breaking the application bottleneck.
Disclosure of Invention
The application provides an optical fiber-micro-nano structure integrated element and a functional optical fiber array, which aim to solve the technical problems in the prior art.
The embodiment of the application provides an optical fiber-micro nano structure integrated element on one hand, and the integrated element comprises a substrate and an optical fiber, wherein one end of the optical fiber is inserted into the substrate; one end of the substrate, which is far away from the optical fiber, is provided with at least one layer of super-surface micro-nano structure; the optical fiber consists of a cladding and a fiber core, wherein the fiber core is embedded in and penetrates through the cladding.
In an embodiment, the super-surface micro-nano structure is one layer or two layers; when the super-surface micro-nano structure is a layer, the super-surface micro-nano structure is arranged on one side of the substrate, which is far away from the optical fiber; when the super-surface micro-nano structures are two layers, the two layers of super-surface micro-nano structures are respectively arranged on one side of the substrate, which is far away from the optical fiber, and one side of the substrate, which is close to the optical fiber.
In one embodiment, the substrate has a hole on its end surface near the optical fiber, and the cladding is inserted into the hole at its end near the substrate.
In one embodiment, the hole is coated with an ultraviolet curing adhesive, and the ultraviolet curing adhesive is irradiated by ultraviolet light to cure the hole.
In one embodiment, the optical fiber is inserted into the hole under a microscope system in an aligned manner.
In one embodiment, the size of the hole is larger than the diameter of the core.
In an implementation mode, the incident light emitted from the optical fiber covers the region where the super-surface micro-nano structure is located.
In one embodiment, the optical fiber is a single mode optical fiber or a multimode optical fiber.
In an implementation mode, the super-surface micro-nano structure is obtained by exposing and etching the substrate, the exposure is deep ultraviolet exposure or electron beam exposure, and the etching is dry etching or wet etching.
In another aspect, the present application provides a functional optical fiber array, which is formed by arranging at least two optical fiber-micro nano structure integrated elements in any one of the above implementable manners.
Compared with the prior art, the method has the following advantages:
1. compared with the existing functional optical fiber packaging technology, the packaging technology of the application can realize the packaging effect with lower difficulty and lower cost than the original packaging technology through simple etching processing and ultraviolet curing packaging technology.
2. Compared with the original functional optical fiber preparation technology. The technology separates the functional part from the optical fiber part, and the functional part is prepared separately with lower difficulty and lower cost.
3. The functional part of the functional optical fiber consists of the unit structure of the super surface, and the advantages of large design freedom degree, small size and the like of the super surface micro-nano structure are fully exerted.
Drawings
Fig. 1 is a schematic structural diagram of an optical fiber-micro nano structure integrated element in an embodiment of the application;
FIG. 2 is a right side view of an optical fiber-micro nano structure integrated element in an embodiment of the present application;
FIG. 3 is a cross-sectional view taken along line A-A of FIG. 2;
FIG. 4 is a right side view of an optical fiber-micro nano structure integrated element in an embodiment of the present application;
fig. 5 is a schematic structural diagram of a functional optical fiber array in an embodiment of the present application.
Description of reference numerals:
1. a substrate; 11. a hole;
2. a super-surface micro-nano structure;
21. a first layer of a super-surface structure; 22. a second layer of super-surface structures;
3. an optical fiber; 31. a cladding layer; 32. a core.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
The incident light direction is defined as the left side, the emergent light direction is defined as the right side, the left side of the substrate is the back side of the substrate, and the right side of the substrate is the front side of the substrate.
The application discloses an optical fiber-micro nano structure integrated element, which comprises a substrate 1 and an optical fiber 3, wherein the front surface of the substrate 1 is provided with at least one layer of super-surface micro nano structure 2, and the back surface of the substrate 1 is provided with a hole 11 for inserting the optical fiber 3. To facilitate insertion of the optical fiber 3 into the hole 11, the diameter of the hole 11 is slightly larger than the diameter of the optical fiber 3. In addition, in order to align the optical fiber 3 precisely in the insertion hole 11, the insertion is performed under a microscope system, thereby achieving precise alignment of the optical fiber 3 with the substrate 1. Wherein the microscope system can be selected from a microscope. The optical fiber 3 is composed of a cladding 31 and a core 32, and the core 32 is embedded in and penetrates the cladding 31. The optical fiber 3 can be a single-mode optical fiber or a multi-mode optical fiber according to requirements. The application wavelength ranges of the single mode fiber and the multimode fiber include but are not limited to visible light, near infrared, middle infrared and the like.
The materials used to form the substrate include, but are not limited to, calcium fluoride, halide crystals, sapphire and other oxide crystals, quartz, silicon dioxide, fused silica, sulfide crystals, glasses (e.g., oxides, sulfides, and other types of glasses), semiconductor materials, metallic materials, or single or multiple layer structures of metal oxide materials, among others. The material for preparing the super-surface micro-nano structure comprises but is not limited to single-layer or multi-layer media such as silicon oxide, monocrystalline silicon, amorphous silicon, silicon nitride, titanium oxide and the like, and metal materials.
The super-surface micro-nano structure 2 modulates the wave front of emergent light from the right side of the optical fiber 3, and realizes functions such as focusing, deflecting and the like.
When the super-surface micro-nano structure 2 is a layer, the holes 11 on the substrate 1 and the super-surface micro-nano structure 2 are prepared by the following steps:
s1, coating, glue homogenizing, exposing, etching and removing glue on the front surface of the substrate 1 to obtain the super-surface micro-nano structure 2;
s2, the back surface of the substrate 1 is mainly exposed and etched to obtain the hole 11 having a diameter slightly larger than that of the optical fiber 3.
In one embodiment, in order to enhance the firmness of the optical fiber 3 and the super-surface micro-nano structure 2, an ultraviolet curing adhesive is coated around the hole 11 in a spinning mode and is irradiated to be cured by ultraviolet light, so that the optical fiber 3 and the substrate 1 form an integrated element, and the optical fiber-micro-nano structure integrated element is obtained.
The super-surface micro-nano structure 2 can realize functions of collimation, focusing and the like of light beams through different designs.
In order to facilitate the explanation of the relationship between the light beam and the super-surface micro-nano structure 2, the region occupied by the super-surface micro-nano structure 2 on the front surface of the substrate 1 is defined as a super-surface micro-nano structure region.
And the incident light emitted from the optical fiber 3 is focused in the super-surface micro-nano structure area.
When the super-surface micro-nano structure 2 is a layer and the optical fiber 3 is a single-mode optical fiber, the principle of realizing collimation by the optical fiber-micro-nano structure integrated element is as follows:
after a base film light spot incident from the single-mode fiber is transmitted for a distance in the single-mode fiber, the phase of the incident light is modulated by the super-surface micro-nano structure 2 through a specially designed super-surface structure part, and finally the incident light is emergent in the wavefront of parallel light, so that the function of plane light emergent is realized.
When the super-surface micro-nano structure 2 is a layer and the optical fiber 3 is a single-mode optical fiber, the principle of focusing of the optical fiber-micro-nano structure integrated element is as follows:
after a base film light spot incident from the single-mode fiber is transmitted for a certain distance in the single-mode fiber, the base film light spot passes through a specially designed super-surface structure part, the phase of the incident light is modulated by the super-surface structure, the incident light is emitted in the converged emergent light wave front and converged into a focus in a far field, which means that more light energy can be effectively collected, and the invention can be applied to the fields of communication, optical tweezers, imaging and the like.
Therefore, by designing the super-surface structure, the functions of the optical fiber 3 can be greatly enriched, and the requirements of industry, scientific research and life are met. And the assembly method has small packaging difficulty and low time and labor cost, and is very favorable for large-scale batch production and application.
When the super-surface micro-nano structures 2 are two layers, the two layers of super-surface micro-nano structures 2 are respectively arranged on one side of the substrate 1, which is far away from the optical fiber 3, and one side of the substrate 1, which is close to the optical fiber 3, the super-surface micro-nano structure 2 positioned on the front side of the substrate 1 is a first super-surface structure 21, and the super-surface micro-nano structure 2 positioned on the back side of the substrate 1 is a second super-surface structure 22. The area where the first super-surface structure 21 is located is a first super-surface structure area.
The holes 11 on the substrate 1 and the super-surface micro-nano structure 2 are prepared by the following steps:
the front surface of the substrate 1 is subjected to film coating, glue homogenizing, exposure, etching and glue removing to obtain a first super-surface structure 21, the back surface of the substrate 1 is mainly subjected to exposure and etching to obtain a hole 11, the bottom surface of the hole 11 is subjected to film coating, glue homogenizing, exposure, etching, glue removing and other processes to prepare a second super-surface structure 22, and the first super-surface structure 21 and the second super-surface structure 22 form a multi-layer super-surface functional region. The integration of the multi-layer super-surface functional region and a single mode fiber or a multi-mode fiber can be realized, and the specific steps are as follows:
s1, under a microscope, inserting the single-mode optical fiber or the multi-mode optical fiber into the target hole in an aligned mode;
and S2, spin-coating ultraviolet curing glue around the hole 11, and performing ultraviolet exposure reinforcement.
After the steps, the integration of the multilayer micro-nano structure and the optical fiber can be realized.
When the super-surface micro-nano structure 2 is two layers, the implementation principle of the optical fiber-micro-nano structure integrated element is as follows: the specially designed second-layer super-surface structure 22 further expands the energy distribution of the incident light signal entering from the optical fiber 3 by utilizing the function of divergence or convergence and divergence, and the larger the area of the design region is, the more ideal the realized effect is, and the more abundant the functions are. Therefore, the first layer of super-surface structure area has larger design space, and more complex and higher-effect functional effects can be realized.
The application also discloses a functional optical fiber array which is formed by arranging at least two optical fiber-micro nano structure integrated elements of any one of the optical fibers.
Taking a layer of the super-surface micro-nano structure as an example, the end face with the super-surface micro-nano structure is defined as the front face of the wafer.
Holes are etched in the back of the wafer, and the preparation method is the same as the preparation method of the holes for preparing the optical fiber-micro nano structure integrated element.
The functional optical fiber array can be obtained by exposing and etching a 16-inch large wafer to obtain a plurality of super-surface micro-nano structure areas, different functions such as divergence, focusing, collimation and the like can be realized in any super-surface micro-nano structure area through design, and different functions can be realized in different super-surface micro-nano structure areas.
Each super-surface micro-nano structure area corresponds to one optical fiber 3, and after the optical fibers 3 are inserted into the wafer from the back side of the wafer, the requirements of large-scale integration of the optical fibers and the super-surface micro-nano structure can be met after the optical fibers are reinforced by an ultraviolet curing technology, for example: large-scale focusing functional optical fibers, large-scale collimating functional optical fibers, hybrid functional optical fibers, and the like. Meanwhile, after being cut by a precision cutting machine, each functional optical fiber can be independently used.
The specific method comprises the following steps: firstly, processing and preparing super surfaces with different functions on a large wafer, processing optical fiber parts and assemblies by using a semiconductor processing technology, packaging and precisely cutting after realizing high-precision self-alignment, and obtaining the independent multifunctional optical fiber. Therefore, the semiconductor process can be used for realizing the batch preparation of the multifunctional optical fiber, the structural optical path realized by the method is completely fixed, and the requirements of quick, low-cost and high-precision packaging can be met, so that the cost is greatly reduced, and the batch large-scale deployment is facilitated.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present disclosure. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present disclosure, "a plurality" means two or more unless specifically limited otherwise.
The above is only a specific embodiment of the present disclosure, but the scope of the present disclosure is not limited thereto, and any person skilled in the art can easily conceive of changes or substitutions within the technical scope of the present disclosure, and shall be covered by the scope of the present disclosure. Therefore, the protection scope of the present disclosure shall be subject to the protection scope of the claims.
Claims (10)
1. An optical fiber-micro nano structure integrated element is characterized in that: the integrated element comprises a substrate and an optical fiber, wherein one end of the optical fiber is inserted into the substrate;
the substrate is provided with a super-surface micro-nano structure;
the optical fiber consists of a cladding and a fiber core, wherein the fiber core is embedded in and penetrates through the cladding.
2. The optical fiber-micro nano structure integrated element according to claim 1, which is characterized in that: the super-surface micro-nano structure is one layer or two layers;
when the super-surface micro-nano structure is a layer, the super-surface micro-nano structure is arranged on one side of the substrate, which is far away from the optical fiber;
when the super-surface micro-nano structures are two layers, the two layers of super-surface micro-nano structures are respectively arranged on one side of the substrate, which is far away from the optical fiber, and one side of the substrate, which is close to the optical fiber.
3. The optical fiber-micro nano structure integrated element according to claim 1, which is characterized in that: the end face of the substrate close to the optical fiber is provided with a hole, and one end of the cladding close to the substrate is inserted into the hole.
4. The optical fiber-micro nano structure integrated element according to claim 3, which is characterized in that: and ultraviolet curing glue is coated around the holes in a spinning mode and is irradiated to be cured by ultraviolet light.
5. The optical fiber-micro nano structure integrated element according to claim 3, which is characterized in that: the optical fiber is inserted into the hole in an alignment mode under the microscope system.
6. The optical fiber-micro nano structure integrated element according to claim 3, which is characterized in that: the size of the hole is larger than the diameter of the fiber core.
7. The optical fiber-micro nano structure integrated element according to claim 1, which is characterized in that: and the incident light emitted from the optical fiber covers the area where the super-surface micro-nano structure is located.
8. The optical fiber-micro nano structure integrated element according to claim 1, which is characterized in that: the optical fiber is a single mode optical fiber or a multimode optical fiber.
9. The optical fiber-micro nano structure integrated element according to claim 1, which is characterized in that: the super-surface micro-nano structure is obtained by exposing and etching the substrate, wherein the exposure is deep ultraviolet exposure or electron beam exposure, and the etching is dry etching or wet etching.
10. A functional fiber array, characterized by: the functional optical fiber array is formed by arranging at least two optical fiber-micro nano structure integrated elements according to any one of claims 1 to 9.
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| CN217034311U (en) * | 2021-12-29 | 2022-07-22 | 深圳迈塔兰斯科技有限公司 | Optical fiber adapter with modulation function and equipment for manufacturing same |
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2022
- 2022-02-21 CN CN202210156099.9A patent/CN114460691A/en active Pending
Patent Citations (7)
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| CN109196387A (en) * | 2016-04-05 | 2019-01-11 | 哈佛学院院长及董事 | Super lens for subwavelength resolution imaging |
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