CN114459597B - Vibrating mirror calibration system and method - Google Patents
Vibrating mirror calibration system and method Download PDFInfo
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- CN114459597B CN114459597B CN202210131776.1A CN202210131776A CN114459597B CN 114459597 B CN114459597 B CN 114459597B CN 202210131776 A CN202210131776 A CN 202210131776A CN 114459597 B CN114459597 B CN 114459597B
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- 238000012984 biological imaging Methods 0.000 description 2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H17/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves, not provided for in the preceding groups
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M13/00—Testing of machine parts
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
Abstract
The invention relates to the technical field of optical confocal, and discloses a vibrating mirror calibration system and a method, wherein the system comprises the following components: the first light-passing hole and the second light-passing hole are respectively used as a light inlet and a light outlet of the first theodolite and the second theodolite, the optical flat is tightly attached to the first galvanometer structure, the second galvanometer structure or the process hole and is used for reflecting laser beams emitted by the first theodolite and the second theodolite to an emergent point so as to calibrate the first theodolite and the second theodolite. The invention adopts the theodolite to calibrate the galvanometer, has simple system structure, combines optical flat and other devices, and has high calibration precision and high efficiency.
Description
Technical Field
The invention relates to the technical field of optical confocal, in particular to a vibrating mirror calibration system and method.
Background
The optical system of the existing vibrating mirror is in a space layout, the assembling scheme of the deflecting mirror is that a laser light source is arranged to the top, a standard center ring is horizontally arranged, and the laser beam is reflected to the center of the center ring cross after passing through the deflecting mirror by adjusting the posture of the deflecting mirror. The technique requires a professional jig to carry out space layout for calibration measurement, is not suitable for civil market transplanting and use, and has low precision and dangerous operation. The disadvantages are as follows:
a. the optical system is spatially laid out. The optical system is spatially distributed in the transmission process, is complex and difficult to calibrate in the use of mechanical arms, horizontal light paths and the like, and particularly in the civil market, the current single-shaft purchase quantity is increased, and the original assembly difficulty after purchase is quite high.
b. The Y-axis deflection mirror is larger. At present, aiming at the micro-machining field or the biological imaging field, the original vibrating mirror is large in Y-axis direction, so that the integral scanning speed of the system is limited, and the heating condition is easy to occur after long-time use.
c. The actual debugging is dangerous. In the field of biological imaging, a galvanometer scanning module is used, light leakage phenomenon can occur in the debugging process, X deflection mirror reflected light vertically exits, local light beams can occur to be emitted to a ceiling, and potential safety hazards exist in the debugging process.
d. The debugging precision of the vibrating mirror system is not high. The existing vibrating mirror is debugged by a laser light source, the debugging precision is about 1', the precision is not high, the follow-up correction is needed, and the efficiency is low.
The foregoing is provided merely for the purpose of facilitating understanding of the technical solutions of the present invention and is not intended to represent an admission that the foregoing is prior art.
Disclosure of Invention
The invention mainly aims to provide a vibrating mirror calibration system and method, and aims to solve the technical problems of complex vibrating mirror calibration, low precision and low efficiency in the prior art.
In order to achieve the above purpose, the invention provides a vibrating mirror calibration method, which comprises the following steps:
calibrating the first theodolite;
coarse aiming and position coarse adjustment are carried out on the second theodolite;
coarse tuning, coarse targeting and fine targeting are carried out on the calibrated first theodolite and the second theodolite after coarse tuning;
performing zero setting operation on the first theodolite and the second theodolite after fine sighting, starting collimating lasers of the first theodolite and the second theodolite after zero setting, performing rough adjustment and fine adjustment on a rotating shaft of the first deflection mirror until cross silk images in the fields of the first theodolite and the second theodolite are overlapped with corresponding field centers, and completing calibration of the first deflection mirror;
moving the second theodolite to a preset position, and calibrating the second theodolite by mutually aiming the first theodolite and the second theodolite at the preset position;
and carrying out rough adjustment and fine adjustment on the rotating shaft of the second deflection mirror until the cross silk images in the fields of view of the first theodolite and the second theodolite are coincident with the corresponding field centers, and completing the calibration of the second deflection mirror.
Preferably, the calibrating the first theodolite includes:
adjusting the gesture of the first theodolite to be a first preset gesture;
and carrying out coarse aiming and collimation on the first theodolite after the posture adjustment so as to calibrate the first theodolite.
Preferably, the adjusting the posture of the first theodolite to be the first preset posture includes:
the first theodolite is placed on an optical adjusting frame;
adjusting the gesture of the first theodolite so that the coarse and fine level of the first theodolite is the central position;
and adjusting the optical adjusting frame to enable the laser beam emitted by the first theodolite to pass through along the center of the first light-passing hole.
Preferably, the rough aiming and collimation are performed on the first theodolite after the posture adjustment, so as to calibrate the first theodolite, including:
placing the optical flat against a reference surface of the first galvanometer structure;
opening the coarse sight of the first theodolite after the posture adjustment, enabling emergent light of the first theodolite to enter the optical flat surface, and reflecting the emergent light to a coarse sight emergent point of the first theodolite through the optical flat surface to finish coarse sight;
starting a collimation laser of the first theodolite, emitting laser by the collimation laser of the first theodolite, and carrying out collimation through rough adjustment and fine adjustment buttons on the first theodolite according to the position of the returned cross hair image until the returned cross hair image completely coincides with the central position of the first theodolite;
and checking whether the first theodolite meets the requirement of the coarse adjustment and the fine adjustment, wherein the emergent laser beam passes through the center of the first light passing hole, and if so, the calibration of the first theodolite is finished.
Preferably, the optical flat is placed against the reference surface of the process hole;
the coarse sighting and position adjustment of the second theodolite comprises the following steps:
adjusting the gesture of the second theodolite to be a second preset gesture;
starting the second theodolite after the posture adjustment, wherein emergent light of the second theodolite is incident to the optical flat surface and reflected to a coarse-aiming emergent point of the second theodolite through the optical flat surface to finish coarse aiming;
and starting a collimation laser of the second theodolite after the posture adjustment, emitting laser by the collimation laser of the second theodolite, and adjusting the posture of the second theodolite according to the position of the returned cross-hair image, so that the returned cross-hair image is completely overlapped with the center position of an eyepiece of the second theodolite, and completing coarse position adjustment.
Preferably, the optical flat is placed close to the second light-passing hole reference surface;
the second theodolite is moved to a preset position, and the second theodolite is calibrated by mutually aiming the first theodolite and the second theodolite at the preset position, and the method comprises the following steps:
step S01: moving the second theodolite to a preset position, and adjusting the second theodolite so that a coarse-tuning level gauge and a fine-tuning level gauge of the second theodolite are taken as central positions;
step S02: starting collimation laser of the second theodolite, enabling an incident laser beam to pass through along the center of the second light-passing hole, and performing coarse aiming and position adjustment on the second theodolite;
step S03: rotating a first theodolite by an angle u according to a preset direction, simultaneously rotating a second theodolite by a first preset angle, opening coarse aiming lasers of the first theodolite and the second theodolite, and rotating the first theodolite and the second theodolite so that the emergent coarse aiming lasers respectively enter the outlets of the first theodolite and the second theodolite;
step S04: opening the collimation lasers of the first theodolite and the second theodolite, observing whether cross silk images exist in the fields of view of each other, repeating the step S03 until the cross silk images appear, adjusting the posture of the second theodolite, enabling the centers of the cross silk images in the fields of view of each other to coincide with the centers of the fields of view, and carrying out zero setting operation on the second theodolite;
step S05: and rotating the first theodolite by the u angle in a direction opposite to the preset direction, rotating the second theodolite by the v angle, and calibrating the second theodolite, wherein the u angle and the v angle are complementary.
Preferably, the coarse tuning, coarse tuning and fine tuning of the calibrated first theodolite and the coarse tuned second theodolite comprise:
performing zero setting operation on the calibrated first theodolite, rotating the first theodolite after zero setting by an alpha angle, rotating the second theodolite after rough adjustment by a second preset angle, aligning the rotated second theodolite with a laser light outlet of the first theodolite after rotation, and completing rough adjustment;
respectively starting coarse aiming lasers of the first theodolite and the second theodolite after coarse adjustment, keeping the gesture of the first theodolite unchanged, and adjusting the gesture of the second theodolite to ensure that coarse aiming laser beams mutually enter the emergent points of the first theodolite and the second theodolite to finish coarse aiming;
and respectively starting collimation lasers of the first theodolite and the second theodolite after rough sighting, keeping the gesture of the first theodolite unchanged, adjusting the gesture of the second theodolite, and adjusting a rough regulating or fine regulating knob according to the returned position of the cross hair image so that the returned cross hair image coincides with the center of the visual field, thereby finishing fine sighting.
Preferably, the zeroing operation is performed on the first theodolite and the second theodolite after fine sighting, the collimating lasers of the first theodolite and the second theodolite after zeroing are started, coarse adjustment and fine adjustment are performed on the rotating shaft of the first deflection mirror until the cross wire images in the fields of view of the first theodolite and the second theodolite are coincident with the corresponding field of view centers, and the calibration of the first deflection mirror is completed, including:
powering on the first driving plate to enable the first deflection mirror to return to a zero position under the driving of the first motor shaft;
starting collimation lasers of the first theodolite after zero setting and the second theodolite after zero setting;
coarse tuning the rotating shaft of the first deflection mirror to enable cross silk images to appear in the visual fields of the first theodolite and the second theodolite, and fine tuning the rotating shaft of the first deflection mirror;
repeating the step of coarse adjusting the rotating shafts of the first deflection mirrors to enable cross silk images to appear in the visual fields of the first theodolite and the second theodolite, and then fine adjusting the rotating shafts of the first deflection mirrors until the cross silk images in the visual fields of the first theodolite and the second theodolite are overlapped with the corresponding visual field centers, and completing the calibration of the first deflection mirrors.
In addition, to achieve the above object, the present invention further provides a galvanometer calibration system to which the galvanometer calibration method described above is applied, the galvanometer calibration system including: the device comprises a first vibrating mirror structure, a second vibrating mirror structure, a first light-passing hole, a second light-passing hole, a process hole, a first theodolite, a second theodolite and an optical flat crystal;
the first light through hole and the second light through hole are respectively used as a light inlet and a light outlet of the first theodolite and the second theodolite;
the optical flat is clung to the first vibrating mirror structure, the second vibrating mirror structure or the process hole;
the optical flat is used for reflecting laser beams emitted by the first theodolite and the second theodolite to an emission point so as to calibrate the first theodolite and the second theodolite;
the first theodolite and the second theodolite are used for calibrating the first galvanometer structure and the second galvanometer structure.
Preferably, the first galvanometer structure comprises a first motor shaft, a first deflection mirror and a first driving plate, and the first deflection mirror is connected with the first motor shaft through a structural member;
the first driving plate is electrified to drive the first motor shaft to rotate or return to zero, and the first motor shaft drives the first deflection mirror to deflect;
the second vibrating mirror comprises a second motor shaft, a second deflection mirror and a second driving plate, and the second deflection mirror is connected with the second motor shaft through a structural member;
the second driving plate is electrified to drive the second motor shaft to rotate or return to zero, and the second motor shaft drives the second deflection mirror to deflect.
In the invention, the galvanometer calibration system comprises: the device comprises a first vibrating mirror structure, a second vibrating mirror structure, a first light-passing hole, a second light-passing hole, a process hole, a first theodolite, a second theodolite and an optical flat crystal; the first light through hole and the second light through hole are respectively used as a light inlet and a light outlet of the first theodolite and the second theodolite; the optical flat is clung to the first vibrating mirror structure, the second vibrating mirror structure or the process hole; the optical flat is used for reflecting laser beams emitted by the first theodolite and the second theodolite to an emission point so as to calibrate the first theodolite and the second theodolite; the first theodolite and the second theodolite are used for calibrating the first galvanometer structure and the second galvanometer structure. The invention adopts the theodolite to calibrate the galvanometer, has simple system structure, combines optical flat and other devices, and has high calibration precision and high efficiency.
Drawings
FIG. 1 is a schematic diagram of an embodiment of a galvanometer calibration system of the invention;
FIG. 2 is a schematic flow chart of an embodiment of a galvanometer calibration method according to the present invention;
FIG. 3 is a schematic diagram of a first theodolite calibration structure in an embodiment of the galvanometer calibration method of the present invention;
FIG. 4 is a schematic diagram of a second theodolite calibration position rough adjustment structure according to an embodiment of the galvanometer calibration method of the present invention;
FIG. 5 is a schematic diagram of a second theodolite calibrating coarse and fine views in an embodiment of the galvanometer calibrating method of the present invention;
FIG. 6 is a schematic diagram of a first deflection mirror calibration structure in an embodiment of the galvanometer calibration method of the present invention;
FIG. 7 is a schematic diagram of a second theodolite calibration position rough adjustment structure according to an embodiment of the galvanometer calibration method of the present invention;
FIG. 8 is a schematic diagram of a second theodolite calibration coarse-aiming and collimation structure in an embodiment of the galvanometer calibration method of the present invention;
FIG. 9 is a schematic diagram of a second theodolite calibration coarse-aiming and collimation structure in an embodiment of the galvanometer calibration method of the present invention.
The achievement of the objects, functional features and advantages of the present invention will be further described with reference to the accompanying drawings, in conjunction with the embodiments.
Detailed Description
It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
Referring to fig. 1, fig. 1 is a schematic structural diagram of an embodiment of a galvanometer calibration system according to the present invention.
The galvanometer calibration system comprises: the first vibrating mirror structure (10), the second vibrating mirror structure (20), the first light-passing hole (30), the second light-passing hole (40), the process hole (50), the first theodolite (60), the second theodolite (70) and the optical flat crystal (80);
the first light through hole (30) and the second light through hole (40) are respectively used as a light inlet and a light outlet of the first theodolite (60) and the second theodolite (70);
the optical flat (80) is closely attached to the first vibrating mirror structure (10), the second vibrating mirror structure (20) or the process hole (50);
the optical flat crystal (80) is used for reflecting laser beams emitted by the first theodolite (60) and the second theodolite (70) to an emission point so as to calibrate the first theodolite (60) and the second theodolite (70);
the first theodolite (60) and the second theodolite (70) are used for calibrating the first galvanometer structure (10) and the second galvanometer structure (20).
Further, in this embodiment, the first galvanometer structure (10) includes a first motor shaft, a first deflection mirror, and a first driving plate, where the first deflection mirror is connected to the first motor shaft through a structural member;
the first driving plate is electrified to drive the first motor shaft to rotate or return to zero, and the first motor shaft drives the first deflection mirror to deflect;
the second vibrating mirror (20) comprises a second motor shaft, a second deflection mirror and a second driving plate, and the second deflection mirror is connected with the second motor shaft through a structural member;
the second driving plate is electrified to drive the second motor shaft to rotate or return to zero, and the second motor shaft drives the second deflection mirror to deflect.
It should be understood that the galvanometer calibration system comprises a first deflection mirror and a second deflection mirror, wherein the first deflection mirror and the second deflection mirror are connected with corresponding motor shafts, and each motor shaft is matched with a driving plate with a corresponding serial number. The driving plate is electrified to drive the motor shaft to rotate or return to zero, and the motor shaft drives the deflection mirror to deflect.
As shown in fig. 1, the motor drive shaft of the first deflection mirror rotates perpendicular to the paper surface, and the deflection direction of the first deflection mirror is perpendicular to the paper surface; the motor driving shaft of the second deflection mirror is in a straight plane, and the deflection direction of the second deflection mirror has a certain included angle with the paper surface.
The galvanometer optical systems displayed by the system are distributed in the same plane, namely, the systems are horizontally incident and vertically emergent (parallel or coincident with the paper surface).
In one embodiment, the included angle between the two deflection mirrors of the system is 45 degrees, the included angle theta between the second deflection mirror and the horizontal direction is in the range of 45 degrees to 90 degrees, and the included angle phi between the first deflection mirror and the horizontal direction is in the range of 0 degrees to 45 degrees. The layout of the vibrating mirror system is a plane layout, so that the whole calibration is convenient.
The structure of the vibrating mirror system comprises two light through holes, namely a light inlet and a light outlet, and a process port, wherein the process port is used for calibrating a first deflection mirror, a driving shaft is clamped by a shaft sleeve and is circumferentially fastened by a screw, a surface-to-surface contact positioning is adopted between the shaft sleeve and a bonding structure, and a flat cushion is purchased between the shaft sleeve and an outer structure for fixing. The vibrating mirror system is calibrated by mainly adopting an auto-collimation theodolite, and meanwhile, standard blocks, a level meter, a ruler, an optical flat crystal and other devices are used.
In this embodiment, the planar layout does not need a very specialized jig, so that the planar layout has more convenient debugging performance, can be transplanted outside a laboratory, and can provide better debugging methods and practicality for common users.
Referring to fig. 2, fig. 2 is a schematic flow chart of an embodiment of a galvanometer calibration method according to the present invention, and a first embodiment of the galvanometer calibration method according to the present invention is provided.
In this embodiment, the galvanometer calibration method includes the following steps:
step S10: and calibrating the first theodolite.
It should be understood that in this embodiment, the specific calibration implementation is as follows:
1. firstly, components required for calibration are placed on an optical vibration isolation platform, as shown in fig. 3, a structure for assembling a vibrating mirror is placed on a standard block and fixed at the same time, and a first theodolite and a second theodolite are usually placed on an optical adjusting frame on the optical vibration isolation platform.
2. The gesture of theodolite is adjusted for coarse adjustment and fine adjustment's spirit level all are in central point, and rotatory round keeps the spirit level central point unchanged simultaneously.
The precision of the coarse and fine level in the theodolite is ensured by one rotation. In this embodiment, the step S10 includes: adjusting the gesture of the first theodolite to be a first preset gesture; and carrying out coarse aiming and collimation on the first theodolite after the posture adjustment so as to calibrate the first theodolite.
3. The optical adjusting frame is adjusted, so that the laser beam emitted by the theodolite passes through the center of the light passing hole, the strict center is not needed to pass through calibration, and other positions are parallel beams at the center position.
In this embodiment, the adjusting the posture of the first theodolite to be the first preset posture includes: the first theodolite is placed on an optical adjusting frame; adjusting the gesture of the first theodolite so that the coarse and fine level of the first theodolite is the central position; and adjusting the optical adjusting frame to enable the laser beam emitted by the first theodolite to pass through along the center of the first light-passing hole.
4. As shown in fig. 3, an optical flat is tightly attached to the reference plane of the galvanometer structure, so that the optical flat is free from horizontal and vertical deflection angles, and the first theodolite calibration is performed. And opening the coarse aiming of the first theodolite, and enabling emergent light to enter the surface of the optical flat and reflect to an emergent point of the coarse aiming through the surface of the optical flat to finish the coarse aiming.
5. And (3) collimation is carried out on the basis of the step (4), namely, the fine collimation of the first theodolite is carried out, the collimation laser of the first theodolite is turned on, the position of the returned cross hair image is observed in the field of view of the ocular lens, and the coarse adjustment and fine adjustment buttons on the theodolite are adjusted to carry out rotary adjustment until the returned cross hair image completely coincides with the center.
6. And on the basis of the step 5, checking whether the requirements of the steps 2 and 3 are met, if not, repeating the steps 2 and 3 until the requirements of the steps 2, 3 and 5 are met at the same time, and finishing the calibration of the first theodolite.
In this embodiment, the performing coarse collimation and collimation on the first theodolite after the posture adjustment to calibrate the first theodolite includes: placing the optical flat against a reference surface of the first galvanometer structure; opening the coarse sight of the first theodolite after the posture adjustment, enabling emergent light of the first theodolite to enter the optical flat surface, and reflecting the emergent light to a coarse sight emergent point of the first theodolite through the optical flat surface to finish coarse sight; starting a collimation laser of the first theodolite, emitting laser by the collimation laser of the first theodolite, and carrying out collimation through rough adjustment and fine adjustment buttons on the first theodolite according to the position of the returned cross hair image until the returned cross hair image completely coincides with the central position of the first theodolite; and checking whether the first theodolite meets the requirement of the coarse adjustment and the fine adjustment, wherein the emergent laser beam passes through the center of the first light passing hole, and if so, the calibration of the first theodolite is finished.
Step S20: and carrying out coarse aiming and position coarse adjustment on the second theodolite.
It should be noted that, in this embodiment, the specific calibration implementation process continues with the following steps:
7. as shown in fig. 4, the optical flat is placed on the reference surface of the process hole (closely attached to the reference surface), and before the position of the second theodolite is roughly adjusted, the second theodolite is also required to be adjusted in posture, and steps 2 and 3 are repeated. Namely: and adjusting the gesture of the second theodolite so that the coarse and fine level gauges are at the central position, and simultaneously rotating for one circle to keep the central position of the level gauge unchanged. And the optical adjusting frame is adjusted to enable the laser beam emitted by the second theodolite to pass through along the center of the light passing hole, so that the laser beam does not need to pass through a strict center for calibration, and other positions are parallel beams at the center position.
8. And opening the coarse aiming laser of the second theodolite, enabling the emergent laser beam to enter the surface of the optical flat, and reflecting the beam to an emergent point through the surface of the optical flat to finish coarse aiming.
9. And (3) opening the second theodolite to collimate laser, observing the cross mercerization generated by the return light in the system in the field of view of the ocular lens, and adjusting the posture of the second theodolite to enable the cross silk image generated by the return light to coincide with the center of the field of view, thereby completing coarse position adjustment.
In this embodiment, the optical flat is placed against the reference surface of the process hole; the step S20 includes: adjusting the gesture of the second theodolite to be a second preset gesture; starting the second theodolite after the posture adjustment, wherein emergent light of the second theodolite is incident to the optical flat surface and reflected to a coarse-aiming emergent point of the second theodolite through the optical flat surface to finish coarse aiming; and starting a collimation laser of the second theodolite after the posture adjustment, emitting laser by the collimation laser of the second theodolite, and adjusting the posture of the second theodolite according to the position of the returned cross-hair image, so that the returned cross-hair image is completely overlapped with the center position of an eyepiece of the second theodolite, and completing coarse position adjustment.
Step S30: and carrying out coarse tuning, coarse aiming and fine aiming on the calibrated first theodolite and the second theodolite after coarse tuning.
It will be appreciated that in this embodiment, the specific calibration implementation process continues with the following steps:
10. as shown in fig. 5, the calibration of the second theodolite is performed by mutual aiming (including coarse and fine aiming) of the first theodolite and the second theodolite. Firstly, performing zero setting operation on the first theodolite, then rotating the first theodolite by an angle alpha, and rotating the second theodolite by a certain angle so that the second theodolite is aligned with a laser light outlet of the first theodolite (coarse adjustment).
11. And respectively opening the rough aiming laser of the first theodolite and the second theodolite, keeping the gesture of the first theodolite unchanged, and adjusting the gesture of the second theodolite to enable the rough aiming laser beams to mutually enter the emergent points of the first theodolite and the second theodolite, and closing the rough aiming laser.
12. And respectively opening the collimation lasers of the first theodolite and the second theodolite, keeping the gesture of the first theodolite unchanged, adjusting the gesture of the second theodolite, observing the position of the cross-hair image in the visual field of the ocular of the second theodolite, and adjusting a rough adjustment knob or a fine adjustment knob so that the cross-hair image in the visual field coincides with the center of the visual field.
In this embodiment, the step S30 specifically includes: performing zero setting operation on the calibrated first theodolite, rotating the first theodolite after zero setting by an alpha angle, rotating the second theodolite after rough adjustment by a second preset angle, aligning the rotated second theodolite with a laser light outlet of the first theodolite after rotation, and completing rough adjustment; respectively starting coarse aiming lasers of the first theodolite and the second theodolite after coarse adjustment, keeping the gesture of the first theodolite unchanged, and adjusting the gesture of the second theodolite to ensure that coarse aiming laser beams mutually enter the emergent points of the first theodolite and the second theodolite to finish coarse aiming; and respectively starting collimation lasers of the first theodolite and the second theodolite after rough sighting, keeping the gesture of the first theodolite unchanged, adjusting the gesture of the second theodolite, and adjusting a rough regulating or fine regulating knob according to the returned position of the cross hair image so that the returned cross hair image coincides with the center of the visual field, thereby finishing fine sighting.
The second preset angle is usually in the range of 0 to 90 degrees.
Step S40: and performing zero setting operation on the first theodolite and the second theodolite after fine sighting, starting collimating lasers of the first theodolite and the second theodolite after zero setting, performing rough adjustment and fine adjustment on the rotating shaft of the first deflection mirror until cross silk images in the fields of the first theodolite and the second theodolite are overlapped with the corresponding field centers, and completing the calibration of the first deflection mirror.
It should be understood that in this embodiment, the specific calibration implementation process continues with the following steps:
13. based on step 12, the second theodolite is zeroed, as shown in fig. 5, the first theodolite is rotated to a zeroing position (i.e. a calibration position), and the second theodolite is rotated by an angle β, where β=180 ° - α - δ, α is the actual rotation angle of the first theodolite, and the value range of the angle δ is 0 to 90 °, typically δ=45° (45 ° is the optimum angle of light flux).
14. As shown in fig. 6, the first deflection mirror system of the galvanometer is installed in the first galvanometer structure, the driving plate is electrified, so that the deflection mirror returns to a zero position under the driving of the motor shaft, the collimated lasers of the first theodolite and the second theodolite are opened, the rotation shafts of the first deflection mirror are roughly adjusted, the cross-hair images appear in the fields of view of the first theodolite and the second theodolite, then the rotation shafts of the first deflection mirror are finely adjusted, the rough adjustment and the fine adjustment are repeated, the cross-hair images in the fields of view of the first theodolite and the second theodolite are completely overlapped with the center, the debugging precision is within 5 ", and the calibration of the first deflection mirror is completed.
In this embodiment, the step S40 specifically includes: powering on the first driving plate to enable the first deflection mirror to return to a zero position under the driving of the first motor shaft; starting collimation lasers of the first theodolite after zero setting and the second theodolite after zero setting; coarse tuning the rotating shaft of the first deflection mirror to enable cross silk images to appear in the visual fields of the first theodolite and the second theodolite, and fine tuning the rotating shaft of the first deflection mirror; repeating the step of coarse adjusting the rotating shafts of the first deflection mirrors to enable cross silk images to appear in the visual fields of the first theodolite and the second theodolite, and then fine adjusting the rotating shafts of the first deflection mirrors until the cross silk images in the visual fields of the first theodolite and the second theodolite are overlapped with the corresponding visual field centers, and completing the calibration of the first deflection mirrors.
Step S50: and moving the second theodolite to a preset position, and calibrating the second theodolite by mutually aiming the first theodolite and the second theodolite at the preset position.
In a specific implementation, the specific calibration implementation process continues with the following steps:
15. as shown in fig. 7, the second theodolite is moved to the current position, an optical flat is placed on the reference plane of the light passing hole (the reference plane is tightly attached), the second theodolite is adjusted, the coarse adjustment level and the fine adjustment level of the second theodolite are both at the central position, the collimated laser is turned on, the incident laser beam passes through the center of the second light passing hole, then the coarse aiming laser is turned on, the posture of the second theodolite is adjusted, and the beam incident on the surface of the optical flat is reflected by the surface and returns to the incident light port.
16. On the basis of the step 15, the collimated laser of the second theodolite is turned on, the laser beam is incident to the surface of the optical plano crystal, the position of the cross hair image generated by the return light in the lens system is observed in the field of view of the second theodolite, the posture of the second theodolite is adjusted, the center of the cross hair image is overlapped with the center of the field of view, zero setting operation is carried out, and coarse adjustment of the position of the second theodolite is completed.
17. As shown in fig. 8, based on step 16, the first theodolite is rotated by an angle u, and the second theodolite is rotated by a certain angle, the coarse laser of the first theodolite and the coarse laser of the second theodolite are turned on, and the first theodolite and the second theodolite are rotated so that the outgoing laser respectively enter the outlets of each other.
18. On the basis of the step 17, opening the collimated lasers of the first theodolite and the second theodolite, observing whether cross-hair images exist in the fields of view of the first theodolite and the second theodolite, if not, repeating the step 17 until the cross-hair images appear, then adjusting the posture of the second theodolite to enable the centers of the cross-hair images in the fields of view of the first theodolite and the second theodolite to coincide with the centers of view, and performing zero setting operation on the second theodolite.
19. Based on step 18, the first theodolite is rotated by an angle u (i.e. returned to the calibration position), the second theodolite is rotated by an angle v, where v=90 ° -u, u being the rotational accuracy of the first theodolite when calibrating the second theodolite, u being the interface readable by the first theodolite. And the second theodolite finishes calibration.
In this embodiment, the optical flat is placed against the second light-passing hole reference surface;
the step S50 includes:
step S01: moving the second theodolite to a preset position, and adjusting the second theodolite so that a coarse-tuning level gauge and a fine-tuning level gauge of the second theodolite are taken as central positions;
step S02: starting collimation laser of the second theodolite, enabling an incident laser beam to pass through along the center of the second light-passing hole, and performing coarse aiming and position adjustment on the second theodolite;
step S03: rotating a first theodolite by an angle u according to a preset direction, simultaneously rotating a second theodolite by a first preset angle, opening coarse aiming lasers of the first theodolite and the second theodolite, and rotating the first theodolite and the second theodolite so that the emergent coarse aiming lasers respectively enter the outlets of the first theodolite and the second theodolite;
step S04: opening the collimation lasers of the first theodolite and the second theodolite, observing whether cross silk images exist in the fields of view of each other, repeating the step S03 until the cross silk images appear, adjusting the posture of the second theodolite, enabling the centers of the cross silk images in the fields of view of each other to coincide with the centers of the fields of view, and carrying out zero setting operation on the second theodolite;
step S05: and rotating the first theodolite by the u angle in a direction opposite to the preset direction, rotating the second theodolite by the v angle, and calibrating the second theodolite, wherein the u angle and the v angle are complementary.
Step S60: and carrying out rough adjustment and fine adjustment on the rotating shaft of the second deflection mirror until the cross silk images in the fields of view of the first theodolite and the second theodolite are coincident with the corresponding field centers, and completing the calibration of the second deflection mirror.
The second preset angle is usually in the range of 0 to 90 degrees.
It should be noted that the specific calibration implementation process continues with the following steps:
20. as shown in fig. 9, a second deflection mirror system is mounted on the second galvanometer structure to supply power to the second motor shaft driving plate, and the second motor shaft drives the second deflection mirror to rotate or return to zero, and returns to zero after being electrified.
21. Based on the step 20, the cross silk image can be observed in the visual field by rotating the rotating shaft (coarse adjustment), and then the center of the cross silk image in the visual field of the first theodolite and the center of the visual field of the second theodolite are completely overlapped by fine adjustment of the rotating shaft, so that the adjustment precision is within 10', and the calibration of the second deflection mirror is completed.
22. And keeping the vibrating mirror after calibration still in a static state, and keeping the collimated laser of the first theodolite and the second theodolite normally open. The precision is kept within 2' after 30min, and the stability is higher.
In this embodiment, compared with the spatial layout in the background technology, the embodiment has higher calibration precision, the precision is 10 ", and is far superior to the 1' precision of the current technology d; compared with the Y-axis deflection mirror in the background technology, the Y-axis deflection mirror is large, the embodiment can be used for rapidly calibrating the same vibrating mirror deflection mirror, can be used for specific requirements of biology, medical treatment and the like, has small scanning angle and has the characteristic of higher scanning speed. Compared with the debugging danger in the background technology, the embodiment has better safety, and in the debugging process, the light beams are always in the same plane, so that the debugging is more humanized.
It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or system that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or system. Without further limitation, an element defined by the phrase "comprising one does not exclude the presence of other like elements in a process, method, article, or system that comprises the element.
The foregoing embodiment numbers of the present invention are merely for the purpose of description, and do not represent the advantages or disadvantages of the embodiments. In the unit claims enumerating several means, several of these means may be embodied by one and the same item of hardware. The use of the terms first, second, third, etc. do not denote any order, but rather the terms first, second, third, etc. are used to interpret the terms as labels.
From the above description of the embodiments, it will be clear to those skilled in the art that the above-described embodiment method may be implemented by means of software plus a necessary general hardware platform, but of course may also be implemented by means of hardware, but in many cases the former is a preferred embodiment. Based on such understanding, the technical solution of the present invention may be embodied essentially or in a part contributing to the prior art in the form of a software product stored in a storage medium (e.g. read only memory mirror (Read OnlyMemory image, ROM)/random access memory (RandomAccess Memory, RAM), magnetic disk, optical disk), comprising instructions for causing a terminal device (which may be a mobile phone, a computer, a server, an air conditioner, or a network device, etc.) to perform the method according to the embodiments of the present invention.
The foregoing description is only of the preferred embodiments of the present invention, and is not intended to limit the scope of the invention, but rather is intended to cover any equivalents of the structures or equivalent processes disclosed herein or in the alternative, which may be employed directly or indirectly in other related arts.
Claims (8)
1. The galvanometer calibration method is characterized by being applied to a galvanometer calibration system, and the galvanometer calibration system comprises: the device comprises a first vibrating mirror structure, a second vibrating mirror structure, a first light-passing hole, a second light-passing hole, a process hole, a first theodolite, a second theodolite and an optical flat crystal;
the first light through hole and the second light through hole are respectively used as a light inlet and a light outlet of the first theodolite and the second theodolite;
the optical flat is clung to the first vibrating mirror structure, the second vibrating mirror structure or the process hole;
the optical flat is used for reflecting laser beams emitted by the first theodolite and the second theodolite to an emission point so as to calibrate the first theodolite and the second theodolite;
the first theodolite and the second theodolite are used for calibrating the first galvanometer structure and the second galvanometer structure;
the first vibrating mirror structure comprises a first motor shaft, a first deflection mirror and a first driving plate, and the first deflection mirror is connected with the first motor shaft through a structural member;
the first driving plate is electrified to drive the first motor shaft to rotate or return to zero, and the first motor shaft drives the first deflection mirror to deflect;
the second vibrating mirror comprises a second motor shaft, a second deflection mirror and a second driving plate, and the second deflection mirror is connected with the second motor shaft through a structural member;
the second driving plate is electrified to drive the second motor shaft to rotate or return to zero, and the second motor shaft drives the second deflection mirror to deflect;
the galvanometer calibration method comprises the following steps:
calibrating the first theodolite;
coarse aiming and position coarse adjustment are carried out on the second theodolite;
coarse tuning, coarse targeting and fine targeting are carried out on the calibrated first theodolite and the second theodolite after coarse tuning;
performing zero setting operation on the first theodolite and the second theodolite after fine sighting, starting collimating lasers of the first theodolite and the second theodolite after zero setting, performing rough adjustment and fine adjustment on a rotating shaft of the first deflection mirror until cross silk images in the fields of the first theodolite and the second theodolite are overlapped with corresponding field centers, and completing calibration of the first deflection mirror;
moving the second theodolite to a preset position, and calibrating the second theodolite by mutually aiming the first theodolite and the second theodolite at the preset position;
and carrying out rough adjustment and fine adjustment on the rotating shaft of the second deflection mirror until the cross silk images in the fields of view of the first theodolite and the second theodolite are coincident with the corresponding field centers, and completing the calibration of the second deflection mirror.
2. The galvanometer calibration method as set forth in claim 1 wherein said calibrating the first theodolite includes:
adjusting the gesture of the first theodolite to be a first preset gesture;
and carrying out coarse aiming and collimation on the first theodolite after the posture adjustment so as to calibrate the first theodolite.
3. The galvanometer calibration method of claim 2, wherein the adjusting the attitude of the first theodolite to the first preset attitude comprises:
the first theodolite is placed on an optical adjusting frame;
adjusting the gesture of the first theodolite so that the coarse and fine level of the first theodolite is the central position;
and adjusting the optical adjusting frame to enable the laser beam emitted by the first theodolite to pass through along the center of the first light-passing hole.
4. The galvanometer calibration method as set forth in claim 2 wherein the coarsely aiming and collimating the adjusted attitude first theodolite to calibrate the first theodolite includes:
placing the optical flat against a reference surface of the first galvanometer structure;
opening the coarse sight of the first theodolite after the posture adjustment, enabling emergent light of the first theodolite to enter the optical flat surface, and reflecting the emergent light to a coarse sight emergent point of the first theodolite through the optical flat surface to finish coarse sight;
starting a collimation laser of the first theodolite, emitting laser by the collimation laser of the first theodolite, and carrying out collimation through rough adjustment and fine adjustment buttons on the first theodolite according to the position of the returned cross hair image until the returned cross hair image completely coincides with the central position of the first theodolite;
and checking whether the first theodolite meets the requirement of the coarse adjustment and the fine adjustment, wherein the emergent laser beam passes through the center of the first light passing hole, and if so, the calibration of the first theodolite is finished.
5. The galvanometer calibration method of claim 1, wherein the optical flat is placed against a reference surface of the process hole;
the coarse sighting and position adjustment of the second theodolite comprises the following steps:
adjusting the gesture of the second theodolite to be a second preset gesture;
starting the second theodolite after the posture adjustment, wherein emergent light of the second theodolite is incident to the optical flat surface and reflected to a coarse-aiming emergent point of the second theodolite through the optical flat surface to finish coarse aiming;
and starting a collimation laser of the second theodolite after the posture adjustment, emitting laser by the collimation laser of the second theodolite, and adjusting the posture of the second theodolite according to the position of the returned cross-hair image, so that the returned cross-hair image is completely overlapped with the center position of an eyepiece of the second theodolite, and completing coarse position adjustment.
6. The galvanometer calibration method of claim 1, wherein the optical flat is placed against the second aperture reference surface;
the second theodolite is moved to a preset position, and the second theodolite is calibrated by mutually aiming the first theodolite and the second theodolite at the preset position, and the method comprises the following steps:
step S01: moving the second theodolite to a preset position, and adjusting the second theodolite so that a coarse-tuning level gauge and a fine-tuning level gauge of the second theodolite are taken as central positions;
step S02: starting collimation laser of the second theodolite, enabling an incident laser beam to pass through along the center of the second light-passing hole, and performing coarse aiming and position adjustment on the second theodolite;
step S03: rotating a first theodolite by an angle u according to a preset direction, simultaneously rotating a second theodolite by a first preset angle, opening coarse aiming lasers of the first theodolite and the second theodolite, and rotating the first theodolite and the second theodolite so that the emergent coarse aiming lasers respectively enter the outlets of the first theodolite and the second theodolite;
step S04: opening the collimation lasers of the first theodolite and the second theodolite, observing whether cross silk images exist in the fields of view of each other, repeating the step S03 until the cross silk images appear, adjusting the posture of the second theodolite, enabling the centers of the cross silk images in the fields of view of each other to coincide with the centers of the fields of view, and carrying out zero setting operation on the second theodolite;
step S05: and rotating the first theodolite by the u angle in a direction opposite to the preset direction, rotating the second theodolite by the v angle, and calibrating the second theodolite, wherein the u angle and the v angle are complementary.
7. The galvanometer calibration method as set forth in claim 1 wherein said coarse, coarse and fine calibrating the calibrated first theodolite and the coarse-tuned second theodolite includes:
performing zero setting operation on the calibrated first theodolite, rotating the first theodolite after zero setting by an alpha angle, rotating the second theodolite after rough adjustment by a second preset angle, aligning the rotated second theodolite with a laser light outlet of the first theodolite after rotation, and completing rough adjustment;
respectively starting coarse aiming lasers of the first theodolite and the second theodolite after coarse adjustment, keeping the gesture of the first theodolite unchanged, and adjusting the gesture of the second theodolite to ensure that coarse aiming laser beams mutually enter the emergent points of the first theodolite and the second theodolite to finish coarse aiming;
and respectively starting collimation lasers of the first theodolite and the second theodolite after rough sighting, keeping the gesture of the first theodolite unchanged, adjusting the gesture of the second theodolite, and adjusting a rough regulating or fine regulating knob according to the returned position of the cross hair image so that the returned cross hair image coincides with the center of the visual field, thereby finishing fine sighting.
8. The galvanometer calibration method as set forth in any one of claims 1 to 7 wherein the zeroing operation is performed on the first theodolite and the second theodolite after fine sighting, the collimating lasers of the first theodolite and the second theodolite after zeroing are turned on, and the rotating shafts of the first deflection mirror are subjected to rough adjustment and fine adjustment until the cross wire images in the fields of view of the first theodolite and the second theodolite coincide with the corresponding field centers, and the first deflection mirror calibration is completed, including:
powering on the first driving plate to enable the first deflection mirror to return to a zero position under the driving of the first motor shaft;
starting collimation lasers of the first theodolite after zero setting and the second theodolite after zero setting;
coarse tuning the rotating shaft of the first deflection mirror to enable cross silk images to appear in the visual fields of the first theodolite and the second theodolite, and fine tuning the rotating shaft of the first deflection mirror;
repeating the step of coarse adjusting the rotating shafts of the first deflection mirrors to enable cross silk images to appear in the visual fields of the first theodolite and the second theodolite, and then fine adjusting the rotating shafts of the first deflection mirrors until the cross silk images in the visual fields of the first theodolite and the second theodolite are overlapped with the corresponding visual field centers, and completing the calibration of the first deflection mirrors.
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Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02253115A (en) * | 1989-03-28 | 1990-10-11 | Topcon Corp | Laser theodolite |
| JPH05172738A (en) * | 1991-12-24 | 1993-07-09 | Jasco Corp | Acoustic cell |
| RU2419766C1 (en) * | 2009-12-01 | 2011-05-27 | Государственное образовательное учреждение высшего профессионального образования "Московский государственный университет геодезии и картографии" (МИИГАиК) | Bench to test and calibrate levels and bar code stick |
| CN103913294A (en) * | 2014-03-20 | 2014-07-09 | 西安交通大学 | Reticle increment calibration method for laser galvanometer system |
| CN108152013A (en) * | 2017-12-28 | 2018-06-12 | 西安应用光学研究所 | Electro-optical system pointing accuracy measuring device light path adjusting process |
| WO2018103694A1 (en) * | 2016-12-07 | 2018-06-14 | 苏州笛卡测试技术有限公司 | Robotic three-dimensional scanning device and method |
| CN108955537A (en) * | 2018-08-06 | 2018-12-07 | 中国科学院西安光学精密机械研究所 | A kind of system and method for achievable off axis reflector mirror height position precise measurement |
| CN110333511A (en) * | 2019-07-22 | 2019-10-15 | 西安知微传感技术有限公司 | A kind of transmitting-receiving synchronization laser radar optical system |
| CN111736163A (en) * | 2020-07-06 | 2020-10-02 | 长春理工大学 | Space-based space target laser ranging optical system |
| CN112192021A (en) * | 2020-10-16 | 2021-01-08 | 西安中科微精光子制造科技有限公司 | Laser scanning device |
| CN113175899A (en) * | 2021-04-28 | 2021-07-27 | 南京航空航天大学 | Camera and galvanometer combined three-dimensional imaging model of variable sight line system and calibration method thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2780794B1 (en) * | 1998-07-06 | 2007-09-28 | Centre Nat Rech Scient | DYNAMIC HOLOGRAPHIC VELOCIMETER FOR MEASURING VIBRATIONS |
-
2022
- 2022-02-14 CN CN202210131776.1A patent/CN114459597B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02253115A (en) * | 1989-03-28 | 1990-10-11 | Topcon Corp | Laser theodolite |
| JPH05172738A (en) * | 1991-12-24 | 1993-07-09 | Jasco Corp | Acoustic cell |
| RU2419766C1 (en) * | 2009-12-01 | 2011-05-27 | Государственное образовательное учреждение высшего профессионального образования "Московский государственный университет геодезии и картографии" (МИИГАиК) | Bench to test and calibrate levels and bar code stick |
| CN103913294A (en) * | 2014-03-20 | 2014-07-09 | 西安交通大学 | Reticle increment calibration method for laser galvanometer system |
| WO2018103694A1 (en) * | 2016-12-07 | 2018-06-14 | 苏州笛卡测试技术有限公司 | Robotic three-dimensional scanning device and method |
| CN108152013A (en) * | 2017-12-28 | 2018-06-12 | 西安应用光学研究所 | Electro-optical system pointing accuracy measuring device light path adjusting process |
| CN108955537A (en) * | 2018-08-06 | 2018-12-07 | 中国科学院西安光学精密机械研究所 | A kind of system and method for achievable off axis reflector mirror height position precise measurement |
| CN110333511A (en) * | 2019-07-22 | 2019-10-15 | 西安知微传感技术有限公司 | A kind of transmitting-receiving synchronization laser radar optical system |
| CN111736163A (en) * | 2020-07-06 | 2020-10-02 | 长春理工大学 | Space-based space target laser ranging optical system |
| CN112192021A (en) * | 2020-10-16 | 2021-01-08 | 西安中科微精光子制造科技有限公司 | Laser scanning device |
| CN113175899A (en) * | 2021-04-28 | 2021-07-27 | 南京航空航天大学 | Camera and galvanometer combined three-dimensional imaging model of variable sight line system and calibration method thereof |
Non-Patent Citations (3)
| Title |
|---|
| 平行度测试仪原理及其测量精度分析;贺和好;叶露;周兴义;沈湘衡;;光电工程;20070515;34(05);52-56 * |
| 扫描振镜幅频特性测试及位置标定的研究;李玥华;光电工程;第31卷(第增刊期);73-79 * |
| 视觉辅助下的激光振镜模型参数分步标定;涂俊超等;仪器仪表学报;第40卷(第1期);236-247 * |
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