CN114457322A

CN114457322A - High temperature resistant ceramic coating graphite tray subassembly

Info

Publication number: CN114457322A
Application number: CN202210271333.2A
Authority: CN
Inventors: 邹明蓓; 朱佰喜; 薛抗美; 蒋彪; 蒋旭霞
Original assignee: Guangzhou Zhicheng Semiconductor Co ltd
Current assignee: Guangzhou Zhicheng Semiconductor Co ltd
Priority date: 2022-03-18
Filing date: 2022-03-18
Publication date: 2022-05-10
Anticipated expiration: 2042-03-18
Also published as: CN114457322B

Abstract

The invention provides a high-temperature-resistant ceramic coating graphite tray assembly, which comprises: the device comprises a large bearing disc, a plurality of supporting and fixing devices, a plurality of trays and a mechanical driving mechanism; the bearing large disc is connected with a plurality of trays through a plurality of supporting and fixing devices, and the mechanical driving mechanism is used for driving the bearing large disc and the trays to rotate. In an MOCVD or high-temperature CVD epitaxial growth furnace, a mechanical method that balls and middle positioning columns are erected between a bearing large disc and a tray and a gear drive is used for replacing the existing airflow guide method to enable the tray to be suspended overcomes the defect that the tray and the bearing large disc are subjected to friction collision due to unstable and uneven airflow during rotation to cause cracks, and the defect that a coating and a moving part are directly contacted and abraded to expose a graphite substrate and are infiltrated by corrosive gas to cause the tray assembly to be scrapped due to graphite collapse is overcome, so that the service life of the high-temperature-resistant ceramic coating graphite tray assembly is effectively prolonged.

Description

High temperature resistant ceramic coating graphite tray subassembly

Technical Field

The invention relates to the technical field of tray components, in particular to a high-temperature-resistant ceramic coating graphite tray component.

Background

With the rise of the third-generation semiconductor material, the semiconductor lighting industry technology is considered as a next-generation novel solid-state light source entering the general lighting field, the market development prospect is optimistic, and the LED epitaxial wafer is the foundation stone of the semiconductor lighting industry technology. The epitaxial wafer is positioned in the upstream link of an LED industrial chain, and is the link which has the highest technical content in the semiconductor lighting industry and has the greatest influence on the quality and cost control of a final product.

At present, the LED epitaxial wafer growth technology mainly adopts an organic metal chemical vapor deposition method, an LED epitaxial wafer reaction chamber is the most core device in the organic metal chemical vapor deposition process, and a graphite tray component is the basis of the reaction chamber. The graphite tray assembly generally comprises a bearing large tray, a tray and a positioning column in the middle of the tray, the tray is suspended by air flow guiding, and then the tray rotates in the direction opposite to the bearing large tray, or the positioning column is used for limiting, so that no friction is generated during rotation.

The prior art mainly has the following defects: the posture and the height of the tray are unstable due to air suspension, so that the tray is easy to contact with a large bearing tray in the moving process, and the surface coating of the tray is damaged; once the coating has local, even the invisible small crack of naked eye, also can be invaded by corrosive gas and infiltration, reaction to corrode graphite, will finally produce the corrosion cavity, cause graphite tray subassembly to scrap, reduce life.

Disclosure of Invention

The invention provides a high-temperature-resistant ceramic coating graphite tray assembly which is used for solving the problems of the background technology: the posture and the height of the tray are unstable due to air suspension, so that the tray is easy to contact with a large bearing tray in the moving process, and the surface coating of the tray is damaged; once the coating has locally, even the invisible small crack can also be invaded by corrosive gas and permeated and reacted, thereby corroding graphite, finally generating corrosion holes, causing the graphite tray assembly to be scrapped, and reducing the technical problem of service life.

In order to solve the technical problem, a high temperature resistant ceramic coating graphite tray assembly comprises: the device comprises a large bearing disc, a plurality of supporting and fixing devices, a plurality of trays and a mechanical driving mechanism;

the bearing large disc is connected with a plurality of trays through a plurality of supporting and fixing devices, and the mechanical driving mechanism is used for driving the bearing large disc and the trays to rotate.

Preferably, the supporting and fixing device comprises:

the tray is provided with a first round groove, a first ball track is paved on the first round groove, balls are filled in the first ball track, and a second round groove or a second ball track matched with the balls is arranged on the tray;

and the upper end of the middle positioning column is positioned in the center of the bottom of the tray, and the lower end of the middle positioning column is connected with the large bearing tray.

Preferably, the material of ball, first ball track, second ball track is high temperature resistant wear-resisting material, the remaining part uses graphite to cover the coating material in the graphite tray subassembly.

Preferably, the supporting and fixing device comprises: and the upper end of the middle positioning column is fixed at the center of the bottom of the tray, and the lower end of the middle positioning column is rotatably connected with the large bearing plate.

Preferably, the middle positioning column is connected with the bottom of the tray through a high-temperature-resistant and wear-resistant connecting piece.

Preferably, the mechanical drive mechanism includes: the driving gear is arranged in the center of the large bearing disc and is driven by a driving motor; and the auxiliary gear is arranged outside the tray, and the driving gear is in meshing transmission with the auxiliary gear.

Preferably, a driving motor connected to the driving gear is connected to a stabilizing mechanism, and the stabilizing mechanism includes:

the clamping device comprises a stabilizing shell, wherein a stabilizing cavity is arranged in the middle of the stabilizing shell, fixing cavities are symmetrically arranged on the left side and the right side of the stabilizing shell, a first inclined block is arranged at the lower end of the fixing cavity in a sliding mode, the first inclined block is connected with a second inclined block in a sliding mode, the second inclined block is fixedly connected with a clamping seat, the clamping seat is provided with a groove, and the groove of the clamping seat penetrates through an open slot in the upper end of the fixing cavity and is matched with a first clamping block;

the two stabilizing blocks are respectively connected with the left side wall and the right side wall of the stabilizing cavity in a sliding mode, the inclined end of each stabilizing block is connected with a guide wheel in a rolling mode, the guide wheel is connected with one clamping block through a connecting rod in a rotating mode, the first clamping block is connected with the upper end of the stabilizing shell in a sliding mode, the front end of the first clamping block is provided with an operating rod, and the operating rod is fixedly connected with the connecting rod;

the left side and the right side of the lower end of the connecting plate are symmetrically provided with the stabilizing blocks, the middle part of the lower end of the connecting plate is fixedly provided with a guide block, a first spring is sleeved on the guide block, and the first spring is fixedly arranged in the stabilizing cavity;

the vertical end of the mounting cover is fixedly connected with the stabilizing shell, sliding cavities are symmetrically arranged on the left side and the right side of the horizontal end of the mounting cover, the sliding cavities are fixedly connected with the L-shaped plate, a spring II is fixedly arranged between the mounting cover and the L-shaped plate, the vertical end of the L-shaped plate is fixedly connected with the clamping block I, and the horizontal end of the L-shaped plate is fixedly connected with the protective plate;

the two sliding blocks are symmetrically arranged on the left side and the right side of the upper end of the mounting cover, a spring III is fixedly arranged between each sliding block and the L-shaped plate, one end, far away from the L-shaped plate, of each sliding block is rotatably connected with the contact block, the contact block is in contact with the supporting block, and the supporting block penetrates through the middle of the mounting cover and is fixedly connected with the upper end of the connecting plate;

the two limiting blocks are symmetrically arranged on the left side and the right side of the upper end of the mounting cover, and the limiting blocks are arranged below the contact block;

and the two threaded rods are respectively fixedly connected with the left side and the right side of the inclined block, and the threaded rods penetrate through the round holes in the side walls of the fixed cavities and are in threaded connection with nuts.

Preferably, still include high-efficient work subassembly, high-efficient work subassembly internally mounted has bears deep bid, a plurality of support and fixing device, a plurality of tray, mechanical drive mechanism, high-efficient work subassembly includes:

the reaction device comprises a base, wherein a reaction shell is arranged at the upper end of the right side of the base, a reaction cavity is arranged inside the reaction shell, a large bearing disc, a plurality of supporting and fixing devices, a plurality of trays, a mechanical driving mechanism and a heater are arranged inside the reaction cavity, a first working cavity, a second working cavity, a third working cavity, a fourth working cavity and a fifth working cavity are arranged inside the lower side of the base, the two working cavities are arranged on the left side and the right side of the lower end of the reaction cavity in a trisymmetric manner, and the third working cavity is communicated with the reaction cavity;

the two connecting pieces are respectively arranged in the two working cavities III, the two connecting pieces are symmetrically arranged on the left side and the right side of the large bearing disc, clamping grooves are formed in the connecting pieces, the clamping grooves are matched with the clamping blocks II, the clamping blocks II are slidably arranged in connecting grooves, the connecting grooves are communicated with the working cavities III, springs IV are fixedly arranged in the connecting grooves, and the springs IV are fixedly connected with the clamping blocks II;

the two threaded sleeves are respectively and rotatably arranged in the working cavity III, are in threaded connection with a threaded rod, the threaded rod is fixedly connected with the connecting piece, the threaded sleeve on the left side is sequentially and fixedly connected with a gear I and a belt wheel II from top to bottom, the gear I penetrates through a through hole in the three side walls of the working cavity and is meshed with the gear II, the threaded sleeve on the right side is fixedly connected with a belt wheel IV, and the belt wheel II is connected with the belt wheel IV through a belt I;

the motor is fixedly arranged in the working cavity II, the motor is fixedly connected with the rotating shaft I, the rotating shaft I is connected with the movable assembly in a sliding mode, the movable assembly comprises a movable sleeve and movable plates, the movable plates are symmetrically arranged at the upper end and the lower end of the movable sleeve, a spring V is fixedly arranged between the movable plate and the motor at the upper side, the spring V is sleeved on the rotating shaft I, the movable plate at the lower side is provided with a magnetic block, the magnetic block is arranged corresponding to the electromagnetic block, the electromagnetic block is rotatably connected with the rotating shaft I, and the movable sleeve is fixedly connected with the gear II;

the second rotating shaft is rotatably arranged in the second working cavity, a first bevel gear, a third belt wheel and a third gear are fixedly connected to the second rotating shaft from top to bottom in sequence, the third gear is meshed with the second gear, the first bevel gear is meshed with the second bevel gear, the second bevel gear is fixedly connected with a first winding wheel through a first connecting shaft, the first winding wheel is connected with a connecting rope on the left side, and the connecting rope on the left side penetrates through the second working cavity and the side wall of the connecting groove on the left side to be fixedly connected with a second clamping block on the left side;

the rotating shaft IV is rotatably arranged in the working cavity IV, a bevel gear III and a belt wheel IV are fixedly connected to the rotating shaft IV from top to bottom in sequence, the belt wheel IV and the belt wheel III are connected through a belt II, the bevel gear III is meshed with the bevel gear IV, the bevel gear IV is fixedly connected with a winding wheel II through a connecting shaft II, the winding wheel II is connected with a connecting rope on the right side, and the connecting rope on the right side penetrates through the side walls of the connecting groove on the working cavity IV and the right side and is fixedly connected with a clamping block II on the right side;

preferably, the threaded sleeve on the left side is fixedly connected with a first belt wheel, a first gear and a second belt wheel from top to bottom in sequence, and the efficient working assembly further comprises: the rotating shaft five is rotatably arranged in the working cavity I, a belt wheel six and a bevel gear five are fixedly connected to the rotating shaft five from top to bottom in sequence, the belt wheel six is connected with the belt wheel I through a belt III, the bevel gear five is meshed with the bevel gear six, the bevel gear six is fixedly connected with a reduction worm, the reduction worm is meshed with a reduction worm gear, and the reduction worm gear is fixedly connected with the rotating shaft six;

the protective shell is fixedly arranged at the upper end of the left side of the base, a conveying belt is arranged in a cavity in the protective shell, protective plates are arranged on the front side and the rear side of the conveying belt, saw teeth are arranged on the upper side of an inner ring of the conveying belt, the saw teeth on the upper end of the conveying belt are meshed with a sector gear, the sector gear is fixedly connected with a bevel gear eight through a connecting shaft III, the bevel gear eight is meshed with a bevel gear seven, and the bevel gear seven is fixedly connected with a rotating shaft six which penetrates through the working cavity I and the protective shell;

the cover plate is arranged at the upper end of the reaction shell in a sliding mode and is connected with the guard plates arranged on the front side and the rear side of the conveyor belt in a rotating mode through fixing blocks.

The technical solution of the present invention is further described in detail by the accompanying drawings and embodiments.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:

FIG. 1 is an exploded view of one embodiment of a refractory ceramic coated graphite tray assembly of the present invention;

FIG. 2 is a schematic structural view of the connection of the pallet, the large bearing plate, the first ball tracks, the balls, and the second ball tracks;

FIG. 3 is a schematic view of a portion of the structure of FIG. 2;

FIG. 4 is a partial schematic view of one embodiment of the mechanical drive mechanism of the present invention;

FIG. 5 is a schematic view of the stabilizing mechanism of the present invention;

FIG. 6 is a schematic diagram of the high efficiency working assembly of the present invention;

FIG. 7 is a schematic view of the internal structure of the second working chamber of the present invention.

In the figure: 1. a large bearing disc; 2. a first ball track; 3. a ball bearing; 4. a second ball track; 5. a tray; 6. a positioning column; 7. a drive gear; 8. an auxiliary gear; 9. a stabilizing shell; 901. a stability chamber; 902. a fixed cavity; 10. installing a cover; 11. an L-shaped plate; 12. a slider; 13. a third spring; 14. a contact block; 15. a support block; 16. a connecting plate; 17. a guide block; 18. a first spring; 19. a stabilizing block; 20. a clamping block; 21. a connecting rod; 22. a first clamping block; 23. a second spring; 24. a guard plate; 25. a second gear; 26. a first inclined block; 27. a second inclined block; 28. a card holder; 29. a nut; 30. a threaded rod; 31. a limiting block; 32. a base; 3201. a first working cavity; 3202. a second working cavity; 3203. a working cavity III; 3204. a working cavity IV; 3205. a working cavity V; 3206. connecting grooves; 33. a reaction shell; 3301. a reaction chamber; 34. a heater; 35. a connecting member; 3501. a card slot; 36. a threaded rod; 37. a threaded sleeve; 38. a second belt wheel; 39. a first belt; 40. a belt wheel IV; 41. a second clamping block; 42. a fourth spring; 43. connecting ropes; 44. a second reel; 45. a fourth bevel gear; 46. a third bevel gear; 47. rotating the shaft four; 48. a fifth belt wheel; 49. a second belt; 50. a third belt wheel; 51. a third gear; 52. a second rotating shaft; 53. a first bevel gear; 54. a second bevel gear; 55. a first reel; 56. a motor; 57. rotating a first shaft; 58. a fifth spring; 59. a movable plate; 60. a movable sleeve; 61. an electromagnetic block; 62. a first gear; 63. a first belt wheel; 64. a third belt; 65. a sixth belt wheel; 66. rotating a shaft five; 67. a fifth bevel gear; 68. a sixth bevel gear; 69. a worm; 70. a reduction worm gear; 71. a sixth rotating shaft; 72. a bevel gear seven; 73. eighthly, a bevel gear; 74. a sector gear; 75. a conveyor belt; 76. saw teeth; 77. a fixed block; 78. a cover plate; 79. a protective shell; 80. the motor is driven.

Detailed Description

The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it will be understood that they are described herein for the purpose of illustration and explanation and not limitation.

In addition, the descriptions related to the first, the second, etc. in the present invention are only used for description purposes, do not particularly refer to an order or sequence, and do not limit the present invention, but only distinguish components or operations described in the same technical terms, and are not understood to indicate or imply relative importance or implicitly indicate the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, technical solutions and technical features between various embodiments can be combined with each other, but must be realized by a person skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should be considered to be absent and not be within the protection scope of the present invention.

Example 1:

the embodiment of the invention provides a high-temperature-resistant ceramic coating graphite tray assembly, which comprises: the device comprises a large bearing disc 1, a plurality of supporting and fixing devices, a plurality of trays 5 and a mechanical driving mechanism;

the bearing large disc 1 is connected with a plurality of trays 5 (a plurality of supporting and fixing devices and a plurality of trays 5 are arranged in a one-to-one correspondence mode) through a plurality of supporting and fixing devices, and the mechanical driving mechanism is used for driving the bearing large disc 1 and the trays 5 to rotate.

Preferably, specifically, the supporting and fixing device includes:

the bearing large disc 1 is provided with a first circular groove, a first ball track 2 is laid on the first circular groove, balls 3 are filled in the first ball track 2, and a second circular groove or a second ball track 4 matched with the balls 3 is arranged on the tray 5; wherein, the size and shape of the second ball track 4 are consistent with those of the first ball track 2; as shown in fig. 3, the first ball tracks 2 and the second ball tracks 4 are concave tracks, so that the tray 5 can move smoothly on the balls 3, the method of supporting the tray by the balls 3 replaces the method of guiding the airflow to suspend the tray, and the phenomenon that the tray and the large bearing disc are rubbed due to unstable and uneven airflow during rotation is prevented.

And the upper end of the middle positioning column 6 is positioned in the center of the bottom of the tray 5, and the lower end of the middle positioning column 6 is connected with the large bearing tray 1. The middle positioning column 6 limits the central position of the tray 5 and controls the rotation circle center of the disc (tray 5); optionally, the middle positioning column 6 can be removed when the speed of the used tray 5 is low.

Optionally, the material of the ball 3, the first ball track (for example, the ball ring, for example, the ball ring made of a high temperature resistant material is used as a substrate (for example, SiC), and the temperature tolerance of the use of the ball ring is strong) 2, and the material of the second ball track 4 is a high temperature resistant and wear resistant material, so that once the ball 3, the first ball track 2, and the second ball track 4 have local small cracks, even if the small cracks are invisible to the naked eye, the small cracks can be invaded and penetrated by corrosive gas, and react, so that graphite is corroded, and finally, a cavity is corroded, and the assembly is scrapped. The rest parts in the graphite tray 5 assembly are made of graphite covering coating materials, so that the weight is reduced, the strength is guaranteed, and the coating materials guarantee that the temperature tolerance of the graphite tray assembly is high.

Optionally, in this embodiment, a SiC material is used as the graphite tray assembly coating material.

Optionally, the mechanical driving mechanism may be a gear driving mechanism, and the mechanical driving mechanism includes: a driving gear provided at the center of the large carrying tray 1, the driving gear 7 being driven by a driving motor 80; and the auxiliary gear 8 is arranged outside the tray 5, and the driving gear 7 is in meshed transmission with the auxiliary gear 8.

Alternatively, the tray 5 may be directly made of a high temperature resistant material without a method of coating the high temperature resistant material, and at this time, the second ball track 4 may be eliminated and a groove (second circular groove) may be directly formed in the tray 5.

The beneficial effects of the above technical scheme are: in an MOCVD or high-temperature CVD epitaxial growth furnace, a mechanical method that balls and middle positioning columns are erected between a bearing large disc and a tray and a gear drive is used for replacing the existing airflow guide method to enable the tray to be suspended overcomes the defect that the tray and the bearing large disc are subjected to friction collision due to unstable and uneven airflow during rotation to cause cracks, and the defect that a coating and a moving part are directly contacted and abraded to expose a graphite substrate and are infiltrated by corrosive gas to cause the tray assembly to be scrapped due to graphite collapse is overcome, so that the service life of the high-temperature-resistant ceramic coating graphite tray assembly is effectively prolonged.

This application uses the recess for the roll of ball (spin) is balanced, uses the recess of disconnect-type, makes can protect high temperature resistant pottery (like SiC) coating disc be difficult for receiving rolling friction and mechanical shock and the mouth that collapses that produces, and local stress is too big and inside crackle scheduling problem.

Example 2

the bearing large disc 1 is connected with a plurality of trays 5 through a plurality of supporting and fixing devices, and the mechanical driving mechanism is used for driving the bearing large disc 1 and the trays 5 to rotate.

Preferably, specifically, the supporting and fixing device includes: and the upper end of the middle positioning column 6 is fixed at the center of the bottom of the tray 5, and the lower end of the middle positioning column 6 is rotatably connected with the large bearing disc 1.

Preferably, middle reference column 6 with connect through high temperature resistant wear-resisting connecting piece (the connecting piece that high temperature resistant wear-resisting material made) between 5 bottoms on tray, place a high temperature resistant wear-resisting material part between reference column 6 and tray 3 in the middle of this embodiment, prevent middle reference column 6 and tray 3 direct contact, produce wearing and tearing coating material during the rotation, produce invisible crack, invaded and permeate by corrosive gas, the reaction to corrode graphite, will finally corrode the cavity, lead to the subassembly to scrap.

In this embodiment, the supporting and fixing means are eliminated and the other parts can be referred to embodiment 1;

in the example 1, the balls 3 are used for supporting the tray 5, and the middle positioning column 6 plays a role in fixing; in the embodiment, the middle positioning column 6 plays a role in supporting and fixing, and the ball 3 is taken away.

The beneficial effects of the above technical scheme are: in the embodiment, the middle positioning column is erected and a mechanical method driven by a gear is used for replacing the existing method for suspending the tray by airflow guiding, so that the defects that the tray and a large bearing disc are subjected to friction collision due to unstable and uneven airflow during rotation to generate cracks, and the coating and a moving part are directly contacted and abraded to expose a graphite substrate, so that the coating is infiltrated by corrosive gas, graphite is broken to scrap a tray assembly are overcome, and the service life of the high-temperature-resistant ceramic coating graphite tray assembly is effectively prolonged.

Example 3

In addition to

embodiment

1 or 2, as shown in fig. 5, a stabilizing mechanism is connected to the driving motor 80 connected to the driving gear 7, and the stabilizing mechanism includes:

a stable shell 9, a stable cavity 901 is arranged in the middle of the stable shell 9, fixed cavities 902 are symmetrically arranged on the left side and the right side of the stable shell 9, a first inclined block 26 is slidably arranged at the lower end of the fixed cavity 902, the first inclined block 26 is slidably connected with a second inclined block 27, the second inclined block 27 is fixedly connected with a clamping seat 28, the clamping seat 28 is provided with a groove, and the clamping seat 28 penetrates through an open slot at the upper end of the fixed cavity 902 to be matched with a clamping block;

the two stabilizing blocks 19 are respectively connected with the left side wall and the right side wall of the stabilizing cavity 901 in a sliding manner, the inclined end of each stabilizing block 19 is connected with a guide wheel 32 in a rolling manner, the guide wheel 32 is rotatably connected with a first fixture block 22 through a connecting rod 21, the first fixture block 22 is connected with the upper end of the stabilizing shell 9 in a sliding manner, an operating rod 20 is arranged at the front end of the first fixture block 22, and the operating rod 20 is fixedly connected with the connecting rod 21;

the left side and the right side of the lower end of the connecting plate 16 are symmetrically provided with the stabilizing blocks 19, the middle of the lower end of the connecting plate 16 is fixedly provided with a guide block 17, a first spring 18 is sleeved on the guide block 17, and the first spring 18 is fixedly arranged in the stabilizing cavity 901;

the mounting cover 10 is fixedly connected with the stabilizing shell 9 at the vertical end of the mounting cover 10, sliding cavities 1101 are symmetrically arranged on the left side and the right side of the horizontal end of the mounting cover 10, the sliding cavities 1101 are fixedly connected with the L-shaped plate 11, a second spring 23 is fixedly arranged between the mounting cover 10 and the L-shaped plate 11, the vertical end of the L-shaped plate 11 is fixedly connected with the first clamping block 22, and the horizontal end of the L-shaped plate 11 is fixedly connected with the guard plate 24;

two sliding blocks 12, wherein the two sliding blocks 12 are symmetrically arranged on the left side and the right side of the upper end of the mounting cover 10, a spring III 13 is fixedly arranged between the sliding blocks 12 and the L-shaped plate 11, one end of each sliding block 12, which is far away from the L-shaped plate 11, is rotatably connected with a contact block 14, the contact block 14 is contacted with a supporting block 15, and the supporting block 15 penetrates through the middle part of the mounting cover 10 and is fixedly connected with the upper end of the connecting plate 16;

the two limit blocks 31 are symmetrically arranged at the left side and the right side of the upper end of the mounting cover 10, and the limit blocks 31 are arranged below the contact block 14;

and the two threaded rods 30, the two threaded rods 30 are respectively fixedly connected with the first inclined blocks 26 on the left side and the right side, and the threaded rods 30 penetrate through the round holes in the side walls of the fixed cavity 902 and are in threaded connection with the nuts 29.

The beneficial effects of the above technical scheme are:

through setting up the stabilizing mean, make the driving motor connected with drive gear 7 run steadily, thus has improved the stability of the graphite tray assembly of ceramic coating of high temperature resistance, when the driving motor connected with drive gear 7 is connected with stabilizing mean, under the action of gravity of the driving motor, drive the contact block 14 to rotate downwards, the contact block 14 promotes the sliding block 12 to move to the outside, through setting up the third spring 13, make the moving process of the sliding block 12 keep steady, through setting up the stopper 31, play a limiting role to the contact block 14, make the contact block 14 stop rotating when rotating to the horizontal direction, promote the supporting shoe 15 to move downwards when the contact block 14 rotates, the supporting shoe 15 drives the connecting plate 16 to move downwards, the connecting plate 16 drives guide block 17 and stabilizing block 19 to move downwards, the guide block 17 drives the first spring 18 to compress, make the up-and-down movement of the driving motor have buffering effect, the stabilizing block 19 drives the connecting rod 21 to move inwards through the guide wheel 32, the connecting rod 21 drives the clamping block 22 to move inwards, the clamping block 22 drives the L-shaped plate 11 to move along the sliding cavity 1101, the L-shaped plate 11 drives the guard plate 24 to fix the driving motor, the stability of the driving motor in the working process is improved, the connecting rod 21 can be driven to rotate by rotating the operating rod 20 through controlling the operating rod 20, the guide wheel 32 rotates, the guide wheel 32 is in rolling connection with the stabilizing block 19, so that the position of the guard plate 24 is adjusted, the driving motor with different sizes can be conveniently fixed, after the guard plate 24 clamps the driving motor, under the elastic action of the second spring 23, the guard plate 24 has a buffering effect on clamping of the driving motor, after the guard plate 24 is fixed with the driving motor, through the control nut 29, through moving the threaded rod 30, the first inclined block 26 is driven to move by the threaded rod 30, the second inclined block 27 is driven by the first inclined block 26 to move, the clamping seat 28 is matched with the clamping block 22, so that the clamping block 22 is kept fixed, the position of the guard plate 24 is kept fixed, and the fixing effect of the driving motor is further improved.

Example 4

On the basis of any one of embodiments 1 to 3, as shown in fig. 6 to 7, the device further comprises a high-efficiency working assembly, wherein a large bearing disc 1, a plurality of supporting and fixing devices, a plurality of trays 5 and a mechanical driving mechanism are installed in the high-efficiency working assembly, and the high-efficiency working assembly comprises:

a reaction shell 33 is arranged at the upper end of the right side of the base 32, a reaction cavity 3301 is arranged inside the reaction shell 33, the bearing large disc 1, a plurality of supporting and fixing devices, a plurality of trays 5, a mechanical driving mechanism and a heater 34 are arranged inside the reaction cavity 3301, a first working cavity 3201, a second working cavity 3202, a third working cavity 3203, a fourth working cavity 3204 and a fifth working cavity 3205 are arranged inside the lower side of the base 32, the third working cavity 3203 is symmetrically arranged at the left side and the right side of the lower end of the reaction cavity 3301, and the third working cavity 3203 is communicated with the reaction cavity 3301;

the two connecting pieces 35 are respectively arranged in the two working cavities three 3203, the two connecting pieces 35 are symmetrically arranged on the left side and the right side of the large bearing disc 1, a clamping groove 3501 is arranged on each connecting piece 35, the clamping groove 3501 is matched with a clamping block two 41, the clamping block two 41 is slidably arranged in a connecting groove 3206, the connecting groove 3206 is communicated with the working cavities three 3203, a spring four 42 is fixedly arranged in the connecting groove 3206, and the spring four 42 is fixedly connected with the clamping block two 41;

the connecting piece 35 is rotationally connected with the bearing large disc 1;

the two threaded sleeves 37 are respectively rotatably arranged in the working cavity three 3203, the threaded sleeves 37 are in threaded connection with a threaded rod 36, the threaded rod 36 is fixedly connected with the connecting piece 35, the threaded sleeve 37 on the left side is fixedly connected with a first belt wheel 63, a first gear 62 and a second belt wheel 38 from top to bottom in sequence, the first gear 62 penetrates through a through hole in the side wall of the working cavity three 3203 and is meshed with a second gear 25, the threaded sleeve 37 on the right side is fixedly connected with a fourth belt wheel 40, and the second belt wheel 38 and the fourth belt wheel 40 are connected through a first belt 39;

the motor 56 is fixedly arranged in the second working cavity 3202, the motor 56 is fixedly connected with the first rotating shaft 57, the first rotating shaft 57 is connected with the movable assembly in a sliding manner, the movable assembly comprises a movable sleeve 60 and movable plates 59 symmetrically arranged at the upper end and the lower end of the movable sleeve 60 (specifically, the movable plates 59 can be rotationally connected with the movable sleeve, a connecting key groove is formed in the inner side of the movable sleeve, a connecting key is correspondingly arranged on the first rotating shaft, the connecting key slides up and down in the connecting key groove and is matched with the connecting key groove key), a spring five 58 is fixedly arranged between the movable plate 59 at the upper side and the motor (or the inner wall at the upper end of the second working cavity 3202), the spring five 58 is sleeved on the first rotating shaft 57, the movable plate 59 at the lower side is provided with a magnetic block, the magnetic block is correspondingly arranged with the electromagnetic block 61, and the electromagnetic block 61 is rotationally connected with the first rotating shaft 57, the movable sleeve 60 is fixedly connected with the second gear 25;

the second rotating shaft 52 is rotatably arranged in the second working cavity 3202, a first bevel gear 53, a third pulley 50 and a third gear 51 are fixedly connected to the second rotating shaft 52 from top to bottom in sequence, the third gear 51 is meshed with the second gear 25, the first bevel gear 53 is meshed with a second bevel gear 54, the second bevel gear 54 is fixedly connected with a first reel 55 through a first connecting shaft, the first reel 55 is connected with the left connecting rope 43, and the left connecting rope 43 penetrates through the side walls of the second working cavity 3202 and the left connecting groove 3206 to be fixedly connected with the second clamping block 41 on the left side;

the rotating shaft IV 47 is rotatably arranged in the working cavity V3205, a bevel gear III 46 and a belt wheel V48 are fixedly connected to the rotating shaft IV 47 from top to bottom in sequence, the belt wheel V48 and the belt wheel III 50 are connected through a belt II 49, the bevel gear III 46 is meshed with a bevel gear IV 45, the bevel gear IV 45 is fixedly connected with a second reel 44 through a second connecting shaft II, the second reel 44 is connected with a right connecting rope 43, and the right connecting rope 43 penetrates through the side walls of the working cavity V3205 and the right connecting groove 3206 to be fixedly connected with a right clamping block II 41;

a fifth rotating shaft 66, the fifth rotating shaft 66 is rotatably disposed in the first working chamber 3201, the fifth rotating shaft 66 is fixedly connected with a sixth pulley 65 and a fifth bevel gear 67 sequentially from top to bottom, the sixth pulley 65 is connected with the first pulley 63 through a third belt 64, the fifth bevel gear 67 is meshed with a sixth bevel gear 68, the sixth bevel gear 68 is fixedly connected with a reduction worm 69, the reduction worm 69 is meshed with a reduction worm gear 70, and the reduction worm gear 70 is fixedly connected with a sixth rotating shaft 71;

the protective shell 79 is fixedly arranged at the upper end of the left side of the base 32, a conveying belt 75 is arranged in a cavity in the protective shell 79, the front side and the rear side of the conveying belt 75 are provided with protective plates, sawteeth 76 are arranged on the upper side of an inner ring of the conveying belt 75, the sawteeth 76 at the upper end of the conveying belt 75 are meshed with a sector gear 74, the sector gear 74 is fixedly connected with a bevel gear eight 73 through a connecting shaft III, the bevel gear eight 73 is meshed with a bevel gear seven 72, and the bevel gear seven 72 is fixedly connected with a rotating shaft six 71 penetrating through the working cavity I3201 and the protective shell 79;

and the cover plate 78 is arranged at the upper end of the reaction shell 33 in a sliding manner, and the cover plate 78 is rotationally connected with the guard plates arranged on the front side and the rear side of the conveyor belt 75 through fixing blocks 77.

The beneficial effects of the above technical scheme are:

after the reaction of the LED epitaxial wafer is completed, the high temperature resistant ceramic coating graphite tray assembly (specifically, the mechanical driving mechanism) stops rotating, the motor 56 is started, the motor 56 drives the first rotating shaft 57 to rotate, the first rotating shaft 57 drives the movable sleeve 60 to rotate, the movable sleeve 60 drives the second gear 25 to rotate, in an initial state, the second gear 25 is meshed with the third gear 51, the second gear 25 drives the third gear 51 to rotate, the third gear 51 drives the second rotating shaft 52 to rotate, the second rotating shaft 52 drives the third pulley 50 and the first bevel gear 53 to rotate, the first bevel gear 53 drives the second bevel gear 54 to rotate, the second bevel gear 54 drives the first reel 55 to rotate, the third pulley 50 drives the fifth pulley 48 to rotate through the second belt 49, the fifth pulley 48 drives the fourth rotating shaft 47 to rotate, the third bevel gear 46 drives the fourth bevel gear 45 to rotate, the fourth bevel gear 45 drives the second reel 44 to rotate, the first reel 55 and the second reel 44 drive the connecting ropes 43 on the left side and the right side to move synchronously, the connecting ropes 43 drive the second fixture block 41 to be separated from the clamping groove 3501, and the fourth spring 42 is arranged, so that the second fixture block 41 is automatically matched with the clamping groove 3501 when corresponding to the second fixture block 41 after the connecting ropes 43 do not act on the second fixture block 41, and the connecting piece 35 can move freely; then the electromagnetic block 61 is electrified, the electromagnetic block 61 and the magnetic block on the lower end movable plate 59 repel each other, so that the movable plate 59 and the movable sleeve 60 are pushed to move upwards, the spring five 58 is compressed, the gear two 25 is meshed with the gear one 62, the spring five 58 is arranged to reset the gear two 25 under the elastic action of the spring five 58 after the electromagnetic block 61 is powered off, the gear two 25 drives the gear one 62 to rotate, the gear one 62 drives the threaded sleeve 37 on the left side to rotate, the threaded sleeve 37 on the left side rotates to drive the belt pulley two 38 and the belt pulley one 63 to rotate and drive the threaded rod 36 on the left side to move upwards, the belt pulley two 38 drives the belt pulley four 40 to rotate through the belt one 39, the belt pulley four 40 drives the threaded sleeve 37 on the right side to rotate, the threaded sleeve 37 on the right side drives the threaded rod 36 on the right side to move upwards, the threaded rods 36 on the left side and the right side synchronously move upwards to push the connecting piece 35 to move upwards, and the connecting piece 35 can drive the bearing large disc 1 and the tray 5 in the high-temperature resistant ceramic coating graphite tray assembly to move upwards, meanwhile, the first belt wheel 63 drives the sixth belt wheel 65 to rotate through the third belt 64, the sixth belt wheel 65 drives the fifth rotating shaft 66 to rotate, the fifth belt wheel 66 drives the fifth bevel gear 67 to rotate, the sixth bevel gear 68 drives the reduction worm 69 to rotate, the reduction worm 69 drives the reduction worm gear 70 to cooperate to reduce the rotating speed of the sixth rotating shaft 71 fixedly connected with the reduction worm gear 70, the sixth rotating shaft 71 drives the seventh bevel gear 72 to rotate, the eighth bevel gear 73 rotates, the eighth bevel gear 73 drives the sector gear 74 to rotate through the third connecting shaft, the sector gear 74 drives the conveyor belt 75 to move through the saw teeth 76 arranged on the upper side of the inner ring of the conveyor belt 75 meshed with the sector gear, so that the fixing block 77 drives the cover plate 78 to be separated from the upper end of the reaction shell 33, the reaction cavity 3301 is in contact with the outside, and the connecting piece 35 drives the large bearing disc 1 and the tray 5 in the high-temperature resistant ceramic coating graphite tray assembly to move out of the reaction cavity 3301, the LED epitaxial wafer after the reaction is conveniently dismantled, a new LED epitaxial wafer to be reacted is installed, the motor 56 is controlled to rotate reversely, so that the connecting piece 35 drives the bearing large disc 1 and the tray 5 in the high-temperature resistant ceramic coating graphite tray assembly to return to the original positions, meanwhile, the cover plate 78 returns to the original positions, the communication between the reaction cavity 3301 and the outside is isolated, the heat insulation effect of the reaction cavity 3301 is improved, after the bearing large disc 1, the tray 5 and the cover plate 78 in the high-temperature resistant ceramic coating graphite tray assembly return to the original positions, the electromagnetic block 61 is controlled to be powered off, the connecting rope 43 does not act on the clamping block two 41, the clamping block two 41 is matched with the clamping groove 3501, the stability of the connecting piece 35 is improved, the rotation of the high-temperature resistant ceramic coating graphite tray assembly is kept stable, the heater 34 is arranged for controlling the temperature in the reaction cavity 3301 to reach the temperature required by the growth of the LED epitaxial wafer, through setting up high-efficient work subassembly for the dismantlement simple to operate of LED epitaxial wafer is swift, has improved the growth efficiency of LED epitaxial wafer.

It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.

Claims

1. A high temperature resistant ceramic coated graphite tray assembly, comprising: the device comprises a large bearing disc (1), a plurality of supporting and fixing devices, a plurality of trays (5) and a mechanical driving mechanism;

the bearing large disc (1) is connected with a plurality of trays (5) through a plurality of supporting and fixing devices, and the mechanical driving mechanism is used for driving the bearing large disc (1) and the trays (5) to rotate.

2. The refractory ceramic coated graphite tray assembly of claim 1, wherein the supporting and securing means comprises:

the bearing large plate (1) is provided with a first circular groove, a first ball track (2) is laid on the first circular groove, balls (3) are filled on the first ball track (2), and a second circular groove or a second ball track (4) matched with the balls (3) is arranged on the tray (5);

and the upper end of the middle positioning column (6) is positioned in the center of the bottom of the tray (5), and the lower end of the middle positioning column (6) is connected with the large bearing disc (1).

3. The high-temperature-resistant ceramic-coated graphite tray assembly as claimed in claim 2, wherein the material of the balls (3), the first ball tracks (2) and the second ball tracks (4) is high-temperature-resistant and wear-resistant material, and the rest of the graphite tray (5) assembly is made of graphite covering coating material.

4. The refractory ceramic-coated graphite tray assembly as in claim 1, wherein the supporting and securing means comprises: and the upper end of the middle positioning column (6) is fixed at the center of the bottom of the tray (5), and the lower end of the middle positioning column (6) is rotatably connected with the bearing large disc (1).

5. A high temperature resistant ceramic coated graphite tray assembly as claimed in claim 3, wherein the middle positioning column (6) and the bottom of the tray (5) are connected by a high temperature resistant and wear resistant connector.

6. The refractory ceramic coated graphite tray assembly of claim 1, wherein the mechanical drive mechanism comprises: the driving gear (7) is arranged in the center of the large bearing disc (1), and the driving gear (7) is driven by a driving motor (80); and the auxiliary gear (8) is arranged outside the tray (5), and the driving gear (7) is in meshing transmission with the auxiliary gear (8).

7. A refractory ceramic coated graphite tray assembly according to claim 6, characterized in that a stabilizing mechanism is connected to the drive motor (80) connected to the drive gear (7), the stabilizing mechanism comprising:

the clamping device comprises a stabilizing shell (9), wherein a stabilizing cavity (901) is formed in the middle of the stabilizing shell (9), fixing cavities (902) are symmetrically formed in the left side and the right side of the stabilizing shell (9), an inclined block I (26) is arranged at the lower end of the fixing cavity (902) in a sliding mode, the inclined block I (26) is connected with an inclined block II (27) in a sliding mode, the inclined block II (27) is fixedly connected with a clamping seat (28), a groove is formed in the clamping seat (28), and an open slot in the upper end of the fixing cavity (902) penetrates through the groove of the clamping seat (28) to be matched with a clamping block I (22);

the two stabilizing blocks (19) are respectively connected with the left side wall and the right side wall of the stabilizing cavity (901) in a sliding mode, the inclined end of each stabilizing block (19) is connected with a guide wheel (32) in a rolling mode, the guide wheel (32) is connected with a first clamping block (22) in a rotating mode through a connecting rod (21), the first clamping block (22) is connected with the upper end of the stabilizing shell (9) in a sliding mode, an operating rod (20) is arranged at the front end of the first clamping block (22), and the operating rod (20) is fixedly connected with the connecting rod (21);

the left side and the right side of the lower end of the connecting plate (16) are symmetrically provided with the stabilizing blocks (19), the middle of the lower end of the connecting plate (16) is fixedly provided with a guide block (17), a first spring (18) is sleeved on the guide block (17), and the first spring (18) is fixedly arranged in the stabilizing cavity (901);

the installation cover (10) is fixedly connected with the stabilizing shell (9) at the vertical end of the installation cover (10), sliding cavities (1101) are symmetrically arranged on the left side and the right side of the horizontal end of the installation cover (10), the sliding cavities (1101) are fixedly connected with the L-shaped plate (11), a second spring (23) is fixedly arranged between the installation cover (10) and the L-shaped plate (11), the vertical end of the L-shaped plate (11) is fixedly connected with the first clamping block (22), and the horizontal end of the L-shaped plate (11) is fixedly connected with the protective plate (24);

the two sliding blocks (12) are symmetrically arranged on the left side and the right side of the upper end of the mounting cover (10), a spring III (13) is fixedly arranged between each sliding block (12) and the L-shaped plate (11), one end, far away from the L-shaped plate (11), of each sliding block (12) is rotatably connected with the contact block (14), the contact block (14) is in contact with the supporting block (15), and the supporting block (15) penetrates through the middle of the mounting cover (10) and is fixedly connected with the upper end of the connecting plate (16);

the two limit blocks (31) are symmetrically arranged on the left side and the right side of the upper end of the mounting cover (10), and the limit blocks (31) are arranged below the contact block (14);

two threaded rods (30), two threaded rods (30) respectively with the left and right sides the slope piece one (26) fixed connection, and threaded rod (30) pass round hole and nut (29) threaded connection on fixed chamber (902) lateral wall.

8. The high-temperature-resistant ceramic-coated graphite tray assembly according to claim 1, further comprising a high-efficiency working assembly, wherein a large bearing tray (1), a plurality of supporting and fixing devices, a plurality of trays (5) and a mechanical driving mechanism are mounted inside the high-efficiency working assembly, and the high-efficiency working assembly comprises:

the reaction device comprises a base (32), wherein a reaction shell (33) is arranged at the upper end of the right side of the base (32), a reaction cavity (3301) is arranged inside the reaction shell (33), a large bearing disc (1), a plurality of supporting and fixing devices, a plurality of trays (5), a mechanical driving mechanism and a heater (34) are arranged inside the reaction cavity (3301), a first working cavity (3201), a second working cavity (3202), two third working cavities (3203), a fourth working cavity (3204) and a fifth working cavity (3205) are arranged inside the lower side of the base (32), the two third working cavities (3203) are symmetrically arranged on the left side and the right side of the lower end of the reaction cavity (3301), and the third working cavities (3203) are communicated with the reaction cavity (3301);

the two connecting pieces (35) are respectively arranged in two working cavities III (3203), the two connecting pieces (35) are symmetrically arranged on the left side and the right side of the bearing large disc (1), clamping grooves (3501) are arranged on the connecting pieces (35), the clamping grooves (3501) are matched with clamping blocks II (41), the clamping blocks II (41) are slidably arranged in connecting grooves (3206), the connecting grooves (3206) are communicated with the working cavities III (3203), springs IV (42) are fixedly arranged in the connecting grooves (3206), and the springs IV (42) are fixedly connected with the clamping blocks II (41);

the two threaded sleeves (37) are respectively rotatably arranged in the working cavity III (3203), the threaded sleeves (37) are in threaded connection with a threaded rod (36), the threaded rod (36) is fixedly connected with the connecting piece (35), the threaded sleeve (37) on the left side is sequentially and fixedly connected with a gear I (62) and a pulley II (38) from top to bottom, the gear I (62) penetrates through a through hole in the side wall of the working cavity III (3203) and is meshed with a gear II (25), the threaded sleeve (37) on the right side is fixedly connected with a pulley IV (40), and the pulley II (38) is connected with the pulley IV (40) through a belt I (39);

the motor (56) is fixedly arranged in the second working cavity (3202), the motor (56) is fixedly connected with the first rotating shaft (57), the first rotating shaft (57) is slidably connected with the movable assembly, the movable assembly comprises a movable sleeve (60) and movable plates (59) which are symmetrically arranged at the upper end and the lower end of the movable sleeve (60), a spring five (58) is fixedly arranged between the movable plate (59) at the upper side and the motor, the spring five (58) is sleeved on the first rotating shaft (57), the movable plate (59) at the lower side is provided with magnetic blocks, the magnetic blocks are arranged corresponding to the electromagnetic blocks (61), the electromagnetic blocks (61) are rotatably connected with the first rotating shaft (57), and the movable sleeve (60) is fixedly connected with the second gear (25);

the second rotating shaft (52) is rotatably arranged in the second working cavity (3202), a first bevel gear (53), a third belt wheel (50) and a third gear (51) are fixedly connected to the second rotating shaft (52) from top to bottom in sequence, the third gear (51) is meshed with the second gear (25), the first bevel gear (53) is meshed with the second bevel gear (54), the second bevel gear (54) is fixedly connected with a first reel (55) through a first connecting shaft, the first reel (55) is connected with a left connecting rope (43), and the left connecting rope (43) penetrates through the side walls of the second working cavity (3202) and the left connecting groove (3206) and is fixedly connected with the second clamping block (41) on the left side;

the rotating shaft four (47) is rotatably arranged in the working cavity five (3205), the rotating shaft four (47) is sequentially and fixedly connected with a bevel gear three (46) and a belt wheel five (48) from top to bottom, the belt wheel five (48) and the belt wheel three (50) are connected through a belt two (49), the bevel gear three (46) is meshed with the bevel gear four (45), the bevel gear four (45) is fixedly connected with a reel two (44) through a connecting shaft two, the reel two (44) is connected with a connecting rope (43) on the right side, and the connecting rope (43) on the right side penetrates through the side walls of the working cavity five (3205) and the connecting groove (3206) on the right side and is fixedly connected with a clamping block two (41) on the right side.

9. The refractory ceramic coated graphite tray assembly as claimed in claim 8, wherein the left threaded sleeve (37) is fixedly connected with a first pulley (63), a first gear (62) and a second pulley (38) from top to bottom, and the high efficiency working assembly further comprises:

the rotating shaft five (66) is rotatably arranged in the working cavity I (3201), the rotating shaft five (66) is fixedly connected with a belt wheel six (65) and a bevel gear five (67) sequentially from top to bottom, the belt wheel six (65) is connected with a belt wheel I (63) through a belt three (64), the bevel gear five (67) is meshed with a bevel gear six (68), the bevel gear six (68) is fixedly connected with a reduction worm (69), the reduction worm (69) is meshed with a reduction worm gear (70), and the reduction worm gear (70) is fixedly connected with a rotating shaft six (71);

the protective housing (79) is fixedly arranged at the upper end of the left side of the base (32), a conveying belt (75) is arranged in a cavity in the protective housing (79), protective plates are arranged on the front side and the rear side of the conveying belt (75), sawteeth (76) are arranged on the upper side of an inner ring of the conveying belt (75), the sawteeth (76) at the upper end of the conveying belt (75) are meshed with a sector gear (74), the sector gear (74) is fixedly connected with a bevel gear eight (73) through a connecting shaft III, the bevel gear eight (73) is meshed with a bevel gear seven (72), and the bevel gear seven (72) is fixedly connected with a rotating shaft six (71) penetrating through the working cavity I (3201) and the protective housing (79);

the cover plate (78), the cover plate (78) is arranged at the upper end of the reaction shell (33) in a sliding mode, and the cover plate (78) is connected with the guard plates arranged on the front side and the rear side of the conveyor belt (75) through fixing blocks (77).