CN114423105A - Induction heating power supply and double-temperature-zone crystal furnace - Google Patents
Induction heating power supply and double-temperature-zone crystal furnace Download PDFInfo
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- CN114423105A CN114423105A CN202210091770.6A CN202210091770A CN114423105A CN 114423105 A CN114423105 A CN 114423105A CN 202210091770 A CN202210091770 A CN 202210091770A CN 114423105 A CN114423105 A CN 114423105A
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- 230000006698 induction Effects 0.000 title claims abstract description 100
- 238000010438 heat treatment Methods 0.000 title claims abstract description 72
- 239000013078 crystal Substances 0.000 title claims abstract description 18
- 230000008878 coupling Effects 0.000 claims abstract description 22
- 238000010168 coupling process Methods 0.000 claims abstract description 22
- 238000005859 coupling reaction Methods 0.000 claims abstract description 22
- 239000003990 capacitor Substances 0.000 claims description 12
- 238000004804 winding Methods 0.000 claims description 8
- 230000009977 dual effect Effects 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 3
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- 230000033228 biological regulation Effects 0.000 description 2
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/02—Induction heating
- H05B6/04—Sources of current
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Abstract
The invention discloses an induction heating power supply and a double-temperature-zone crystal furnace; the induction heating power supply comprises a first induction heating power supply and a second induction heating power supply; the first induction heating power supply comprises a first resonant tank circuit; the second induction heating power supply comprises a second resonant tank circuit; a coupling transformer is connected in series between the first resonant tank circuit and the second resonant tank circuit; the induction heating power supply eliminates mutual interference between two inductors by adding a coupling transformer between resonance tank circuits of two series-connection type induction heating power supplies, thereby realizing adjustment of power on different coils to adjust heating temperature; the induction heating power supply of the double-temperature-zone crystal furnace not only saves electric energy, but also does not need to increase a short-circuit shielding coil.
Description
Technical Field
The invention belongs to the technical field of power electronic converters, series resonance inverters and semiconductor material processing, and particularly relates to an induction heating power supply and a dual-temperature-zone crystal furnace.
Background
The dual-temperature-zone heating means that different temperature regulation is realized in different zones of the same load, if the induction heating crystal furnace wants to realize dual-zone temperature regulation, two induction coils are inevitably used, and the heating temperature is regulated by regulating the power on the different coils. In the induction heating technology, a load generates an eddy current through a magnetic field, so that the load generates heat, but two adjacent induction coils generate magnetic field interference, so that the power cannot be independently adjusted.
The method used in the industry at present is to add a closed shielding coil between two induction coils in order to short-circuit the magnetic fields of the two induction coils, as shown in fig. 1, so that the magnetic field of the induction coil 1 cannot pass through the shielding coil to interfere with the induction coil 2, and similarly, the magnetic field of the induction coil 2 cannot interfere with the induction coil 1. The disadvantages of this approach are the following: firstly, the closed shielding coil can be equivalent to a short-circuit load in the circuit principle, so that large losses are generated on the shielding coil, the losses cannot be used for heating the load, and electric energy is lost; secondly, the existence of the shielding coil restricts the position relation of the two induction coils which normally work, and in order to put down the shielding coil, a water-cooling copper pipe mode is generally used, so that the distance between the two coils is enlarged.
Therefore, how to eliminate the mutual interference between the two inductors based on solving the above problems becomes a key problem in current research.
Disclosure of Invention
In view of the above problems, the present invention provides an induction heating power supply and a dual-temperature-zone crystal furnace, which at least solve some of the above technical problems, wherein the induction heating power supply eliminates mutual interference between two inductors by adding a coupling transformer between resonant tanks of two series induction heating power supplies, thereby realizing adjustment of power on different coils to adjust heating temperature; the induction heating power supply of the double-temperature-zone crystal furnace not only saves electric energy, but also does not need to increase a short-circuit shielding coil.
In one aspect, an embodiment of the present invention provides an induction heating power supply, including: a first induction heating power supply and a second induction heating power supply;
the first induction heating power supply comprises a first resonant tank circuit;
the second induction heating power supply comprises a second resonant tank circuit;
and a coupling transformer is connected in series between the first resonant tank circuit and the second resonant tank circuit.
Further, at the same-name end of the coupling transformer, the current direction between the first resonant tank circuit and the second resonant tank circuit is opposite.
Further, the first resonant tank circuit comprises a first matching transformer, a first resonant capacitor and a first induction coil;
the first matching transformer, the first resonant capacitor and the first induction coil are connected in series.
Further, the second resonant tank circuit comprises a second matching transformer, a second resonant capacitor and a second induction coil;
the second matching transformer, the second resonant capacitor and the second induction coil are connected in series;
the coupling transformer is used for decoupling and compensating mutual induction voltage between the first induction coil and the second induction coil.
Further, a first winding of the coupling transformer is connected in series on the first resonant tank; and the second winding of the coupling transformer is connected in series on the second resonant tank circuit.
Further, the first induction heating power supply further includes: a first rectifier, a first chopper and a first inverter;
the first rectifier, the first chopper, the first inverter and the first resonant tank circuit are connected in sequence;
the first rectifier is used for rectifying the three-phase input voltage of the first induction heating power supply into a first direct-current voltage;
the first chopper is used for adjusting the bus voltage of the first inverter;
the first inverter is used for inverting the first direct-current voltage into alternating-current square-wave voltage.
Further, the second induction heating power supply further includes: a second rectifier, a second chopper and a second inverter;
the second rectifier, the second chopper, the second inverter and the second resonant tank circuit are connected in sequence;
the second rectifier is used for rectifying the three-phase input voltage of the second induction heating power supply into a second direct-current voltage;
the second chopper is used for adjusting the bus voltage of the second inverter;
the second inverter is used for inverting the second direct-current voltage into alternating-current square-wave voltage.
On the other hand, the embodiment of the invention also provides a double-temperature-zone crystal furnace which applies any one of the induction heating power supplies.
Compared with the prior art, the induction heating power supply and the double-temperature-zone crystal furnace have the following beneficial effects:
according to the induction heating power supply provided by the embodiment of the invention, the coupling transformer is additionally arranged between the resonant tank circuits of the two series induction heating power supplies to eliminate mutual interference between the two inductors, so that the heating temperature of the induction heating power supply can be adjusted by adjusting the power of different coils; the method does not only need to add a short-circuit shielding coil, but also does not add extra loss.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
The technical solution of the present invention is further described in detail by the accompanying drawings and embodiments.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
fig. 1 is a schematic view of a dual-temperature zone heating coil provided in the related art with a short-circuited coil.
Fig. 2 is a schematic view of a dual-temperature-zone heating coil according to an embodiment of the present invention.
FIG. 3 is a block diagram of an induction heating power supply of a dual-temperature-zone crystal furnace according to an embodiment of the present invention.
Detailed Description
Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
The embodiment of the invention provides an induction heating power supply, which comprises a first induction heating power supply and a second induction heating power supply; the first induction heating power supply and the second induction heating power supply are connected in series;
the first induction heating power supply comprises a first rectifier, a first chopper, a first inverter and a first resonant tank circuit; the first rectifier, the first chopper, the first inverter and the first resonant tank circuit are connected in sequence; the first rectifier is used for rectifying a three-phase 380VAC input voltage of the first induction heating power supply into a first direct-current voltage of 513V; the first chopper is used for regulating the bus voltage of the first inverter; the first inverter is used for inverting the first direct-current voltage into alternating-current square-wave voltage; the first resonant tank circuit comprises a first matching transformer T1, a first resonant capacitor C1 and a first induction coil L1; and the first matching transformer T1, the first resonant capacitor C1 and the first induction coil L1 are connected in series.
The second induction heating power supply comprises a second rectifier, a second chopper, a second inverter and a second resonant tank circuit; the second rectifier, the second chopper, the second inverter and the second resonant tank circuit are connected in sequence; the second rectifier is used for rectifying a three-phase 380VAC input voltage of the second induction heating power supply into a 513V second direct-current voltage; the second chopper is used for regulating the bus voltage of the second inverter; the second inverter is used for inverting the second direct-current voltage into alternating-current square-wave voltage; the second resonant tank circuit comprises a second matching transformer T2, a second resonant capacitor C2 and a second induction coil L2; and the second matching transformer T2, the second resonant capacitor C2 and the second induction coil L2 are connected in series.
Since the first induction coil L1 and the second induction coil L2 have electromagnetic interference with each other, the first chopper and the second chopper cannot normally adjust the output power. In order to eliminate the electromagnetic interference, in the embodiment of the invention, a coupling transformer TM is connected in series between the first resonant tank circuit and the second resonant tank circuit; specifically, a first winding of a coupling transformer is connected in series with a first resonant tank circuit, and a second winding of the coupling transformer is connected in series with a second resonant tank circuit; the coupling transformer TM can perform decoupling compensation on the mutual induction voltage between the first induction coil L1 and the second induction coil L2, so that the electromotive force directions of the two resonant tank circuits are consistent, mutual interference is reduced, and the first induction heating power supply and the second induction heating power supply can independently adjust power, as shown in fig. 2 specifically; and at the same-name end of the coupling transformer, the current directions between the first resonant tank circuit and the second resonant tank circuit must be opposite, otherwise, the coupling transformer cannot be normally decoupled.
The principle that the coupling transformer TM can eliminate mutual inductance interference is described in reference to fig. 3, specifically: u shape1To sense the voltage of coil L1, U2To sense the voltage of coil L2, U1' for coupling the voltage of the transformer across the winding in unit 1, U2' to couple the voltage of the transformer to the winding in the 2 units, the voltage generated by the mutual inductance between coil L2 and U at coil L1 is known from the law of electromagnetic induction1In phase, similarly, the voltage induced in coil L2 by mutual inductance of coil L1 and U2' in phase, U can be guaranteed only by reasonably setting TM parameters1' and U2The two induction coils are respectively equal to mutual induction voltage on the two induction coils and mutually offset, so that the two induction coils are not influenced by mutual induction voltage interference, and the output power of the two induction heating power supplies can be independently adjustedThereby realizing the adjustment of the temperature of each temperature zone.
The embodiment of the invention also provides a double-temperature-zone crystal furnace which applies the induction heating power supply. Compared with a single-temperature-zone crystal furnace heating power supply, namely a crystal furnace heating power supply of an induction coil, the double-temperature-zone power supply has better flexibility, can enable the temperature field of the crystal furnace to generate different temperature fields at different stages of crystal growth, and is favorable for crystal growth synthesis.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (8)
1. An induction heating power supply, comprising: a first induction heating power supply and a second induction heating power supply;
the first induction heating power supply comprises a first resonant tank circuit;
the second induction heating power supply comprises a second resonant tank circuit;
and a coupling transformer is connected in series between the first resonant tank circuit and the second resonant tank circuit.
2. An induction heating power supply as claimed in claim 1, wherein at the end of the same name of said coupling transformer, the direction of current flow between said first resonant tank circuit and said second resonant tank circuit is opposite.
3. An induction heating power supply as claimed in claim 1, wherein said first resonant tank circuit comprises a first matching transformer, a first resonant capacitor and a first induction coil;
the first matching transformer, the first resonant capacitor and the first induction coil are connected in series.
4. An induction heating power supply according to claim 3, wherein said second resonant tank circuit includes a second matching transformer, a second resonant capacitor and a second induction coil;
the second matching transformer, the second resonant capacitor and the second induction coil are connected in series;
the coupling transformer is used for decoupling and compensating mutual induction voltage between the first induction coil and the second induction coil.
5. An induction heating power supply as claimed in claim 1, wherein a first winding of said coupling transformer is connected in series to said first resonant tank; and the second winding of the coupling transformer is connected in series on the second resonant tank circuit.
6. An induction heating power supply as set forth in claim 1, wherein said first induction heating power supply further comprises: a first rectifier, a first chopper and a first inverter;
the first rectifier, the first chopper, the first inverter and the first resonant tank circuit are connected in sequence;
the first rectifier is used for rectifying the three-phase input voltage of the first induction heating power supply into a first direct-current voltage;
the first chopper is used for adjusting the bus voltage of the first inverter;
the first inverter is used for inverting the first direct-current voltage into alternating-current square-wave voltage.
7. An induction heating power supply as set forth in claim 1, wherein said second induction heating power supply further comprises: a second rectifier, a second chopper and a second inverter;
the second rectifier, the second chopper, the second inverter and the second resonant tank circuit are connected in sequence;
the second rectifier is used for rectifying the three-phase input voltage of the second induction heating power supply into a second direct-current voltage;
the second chopper is used for adjusting the bus voltage of the second inverter;
the second inverter is used for inverting the second direct-current voltage into alternating-current square-wave voltage.
8. A dual temperature zone crystal furnace, characterized in that an induction heating power supply according to any one of claims 1-7 is applied.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210091770.6A CN114423105A (en) | 2022-01-26 | 2022-01-26 | Induction heating power supply and double-temperature-zone crystal furnace |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210091770.6A CN114423105A (en) | 2022-01-26 | 2022-01-26 | Induction heating power supply and double-temperature-zone crystal furnace |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101237725A (en) * | 2007-02-02 | 2008-08-06 | 陈淑文 | A LC coupling circuit capacitance |
| JP2012048962A (en) * | 2010-08-26 | 2012-03-08 | Mitsui Eng & Shipbuild Co Ltd | Induction heating apparatus and induction heating method |
| CN103262648A (en) * | 2010-12-03 | 2013-08-21 | 三井造船株式会社 | Induction heating device, induction heating method, and program |
| CN104770059A (en) * | 2012-10-30 | 2015-07-08 | 三井造船株式会社 | Inductive heating device, method for controlling inductive heating device, and program |
| CN109428490A (en) * | 2017-08-15 | 2019-03-05 | 台达电子企业管理（上海）有限公司 | Multi-unit power transformation system |
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2022
- 2022-01-26 CN CN202210091770.6A patent/CN114423105A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101237725A (en) * | 2007-02-02 | 2008-08-06 | 陈淑文 | A LC coupling circuit capacitance |
| JP2012048962A (en) * | 2010-08-26 | 2012-03-08 | Mitsui Eng & Shipbuild Co Ltd | Induction heating apparatus and induction heating method |
| CN103262648A (en) * | 2010-12-03 | 2013-08-21 | 三井造船株式会社 | Induction heating device, induction heating method, and program |
| CN104770059A (en) * | 2012-10-30 | 2015-07-08 | 三井造船株式会社 | Inductive heating device, method for controlling inductive heating device, and program |
| CN109428490A (en) * | 2017-08-15 | 2019-03-05 | 台达电子企业管理（上海）有限公司 | Multi-unit power transformation system |
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Effective date of registration: 20231012 Address after: Room 107, Building 4, No. 75 Fuyuan Road, Wuqing Development Zone, Wuqing District, Tianjin City, 301700 Applicant after: Tianjin Yingda Kexun Electrical Equipment Co.,Ltd. Address before: 046000 Floor 1 and 2 of No. 4 Factory Building of Xingxing Standard Industrial Park, 188 Taihang North Road, Changzhi City, Shanxi Province Applicant before: Shanxi Edel Electrical Equipment Co.,Ltd. |
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