CN114414083A - Surface acoustic wave temperature and stress sensor for aircraft engine and preparation method thereof - Google Patents
Surface acoustic wave temperature and stress sensor for aircraft engine and preparation method thereof Download PDFInfo
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- 238000002360 preparation method Methods 0.000 title claims abstract description 9
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- 230000005284 excitation Effects 0.000 claims abstract description 4
- 239000000919 ceramic Substances 0.000 claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 10
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- 238000000034 method Methods 0.000 claims description 10
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical group [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 229910001220 stainless steel Inorganic materials 0.000 claims description 7
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- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 6
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 6
- 229910052451 lead zirconate titanate Inorganic materials 0.000 claims description 6
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 6
- 229920000642 polymer Polymers 0.000 claims description 6
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- 229910052790 beryllium Inorganic materials 0.000 claims description 4
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 claims description 4
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- 238000005498 polishing Methods 0.000 claims description 3
- 238000009434 installation Methods 0.000 abstract description 6
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/22—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of acoustic effects
- G01K11/26—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of acoustic effects of resonant frequencies
- G01K11/265—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of acoustic effects of resonant frequencies using surface acoustic wave [SAW]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M15/00—Testing of engines
- G01M15/14—Testing gas-turbine engines or jet-propulsion engines
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
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- Combustion & Propulsion (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention provides a surface acoustic wave temperature and stress sensor for an aircraft engine and a preparation method thereof, wherein the sensor comprises at least one temperature measuring unit and a plurality of stress measuring units; the sensor has a flexible mounting surface; the sensor sequentially comprises a flexible substrate layer, a bonding layer, a piezoelectric layer and an electrode layer from bottom to top; the flexible substrate layer is used as a bottom electrode and used as the flexible mounting surface, the bonding layer is used for bonding the piezoelectric layer on the flexible substrate layer, the piezoelectric layer is used as an acoustic wave excitation transmission element and a pressure sensitive element, and the electrode layer is used for outputting a temperature signal and a pressure signal. The invention integrates the surface acoustic wave temperature sensor and the surface acoustic wave pressure sensor, can simultaneously measure the single-point temperature and the multipoint pressure in the same position area, can dispense with an independent temperature sensor, and can effectively reduce the installation area of the sensor on an engine.
Description
Technical Field
The invention relates to the field of sensors, in particular to a surface acoustic wave temperature and stress sensor for an aircraft engine and a preparation method thereof.
Background
The performance state of an aircraft engine is an important guarantee for flight safety. The control system is used for monitoring the state of the engine to ensure the safe operation, namely determining the operation state and predicting the state change trend of the operation state according to flight parameters (rotating speed, exhaust temperature, pressure and the like) measured by an engine sensor.
Temperature sensors and pressure sensors currently used in aircraft engines are arranged independently of one another. Because the clearance between the inner wall of the casing and the blades of the engine is small, the installation height provided for the sensor by the position of the inner wall of the casing is strictly limited, and the stress sensor can not be installed in a superposition mode at the position where the temperature sensor is installed, and vice versa. This presents at least two problems: first, temperature and pressure cannot be measured at the same location at the same time; secondly, because the number of the sensors is large, a large sensor installation area is needed, large disturbance can be caused to a temperature field, a pressure field and the like of an inherent structure of the engine, uncertainty in the running process of the engine is increased, potential safety hazards are increased, and reliability is reduced.
In addition, most of the existing sensors are rigid mounting surfaces, that is, the sensors are in rigid contact with the inner wall of the casing, and the inner wall of the casing is a curved surface, so that at least three other problems are caused: firstly, because the mounting surface of the sensor is a rigid plane and is not matched with the curved surface of the inner wall of the casing in shape, only the frame is contacted with the casing after mounting, and the central part is suspended, the mounting is not firm, and the sensor is very easy to fall off under severe working conditions; secondly, the actual detection position and the expected position of the sensor can deviate due to the structural mismatch of the two, so that a large deviation is generated between a measured value and a designed value, and the significance of measurement is lost; thirdly, the mismatch of the two structures can generate adverse effects on the inherent structure of the engine, destroy the mechanical balance of the engine, cause disturbance to the inherent temperature field, pressure field and the like of the engine and have potential safety hazards.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a surface acoustic wave temperature and stress sensor for an aeroengine and a preparation method thereof, on one hand, the sensor integrates temperature and stress measurement, and the use number of the sensor can be reduced; on the other hand, the mounting surface of the sensor is of a flexible structure, and can be seamlessly attached to the curved surface of the inner wall of the casing during mounting, so that related parameters can be accurately measured, and the influence on the inherent structure of the engine is reduced to the minimum.
In order to achieve the above object, the present invention provides, in a first aspect, a surface acoustic wave temperature and stress sensor for an aircraft engine, the sensor comprising at least one temperature measuring unit and a plurality of stress measuring units; the sensor has a flexible mounting surface; the sensor sequentially comprises a flexible substrate layer, a bonding layer, a piezoelectric layer and an electrode layer from bottom to top; the flexible substrate layer is used as a bottom electrode and used as the flexible mounting surface, the bonding layer is used for bonding the piezoelectric layer on the flexible substrate layer, the piezoelectric layer is used as an acoustic wave excitation transmission element and a pressure sensitive element, and the electrode layer is used for outputting a temperature signal and a pressure signal.
Preferably, the electrode layer comprises at least one first interdigital electrode for outputting a temperature signal and a plurality of second interdigital electrodes for outputting a pressure signal; the first interdigital electrode outputs a real-time temperature value of the position where the first interdigital electrode is located, and each second interdigital electrode outputs a real-time pressure value of the position where the second interdigital electrode is located.
Preferably, the material used for the piezoelectric layer is one of piezoelectric ceramics, quartz crystal, aluminum nitride, lithium niobate and piezoelectric polymer.
Preferably, the flexible substrate layer is stainless steel or beryllium copper.
Preferably, the electrode layer is a Cr/Au double-layer metal thin film.
Preferably, the bonding layer is conductive silver paste.
Preferably, each of the first interdigital electrode and the second interdigital electrode includes an interdigital transducer and a pair of reflection gratings, and the interdigital transducer is disposed at a central position between the two reflection gratings.
Preferably, the electrode layer includes one of the first interdigital electrodes and four of the second interdigital electrodes; the first interdigital electrode is arranged at the center of the electrode layer, and the four second interdigital electrodes are respectively arranged at the four side positions of the electrode layer.
Preferably, the piezoelectric ceramic is a lead zirconate titanate piezoelectric ceramic.
In a second aspect, the present invention provides a method for manufacturing a surface acoustic wave temperature and stress sensor for an aircraft engine, comprising the following steps: (1) bonding the piezoelectric layer on the flexible substrate layer through the bonding layer; (2) thinning the piezoelectric layer to a preset thickness by mechanical polishing; (3) depositing an electrode layer on the piezoelectric layer; (4) and etching the electrode layer according to a preset pattern to form at least one first interdigital electrode for outputting a temperature signal and a plurality of second interdigital electrodes for outputting a pressure signal.
Preferably, the material used for the piezoelectric layer in step (1) is one of piezoelectric ceramics, quartz crystal, aluminum nitride, lithium niobate and piezoelectric polymer.
Preferably, the flexible substrate layer in step (1) is stainless steel or beryllium copper.
Preferably, the electrode layer in step (1) is a Cr/Au bilayer metal thin film.
Preferably, the bonding layer in step (1) is conductive silver paste.
Preferably, the piezoelectric ceramic in step (1) is a lead zirconate titanate piezoelectric ceramic.
Compared with the prior art, the invention has the following beneficial effects:
1. collect at least one surface acoustic wave temperature sensor and a plurality of surface acoustic wave pressure sensor as an organic whole, can measure the single-point temperature and the multiple spot pressure of same position region simultaneously, this temperature not only can be used to pressure sensor's temperature compensation control to improve pressure sensor's measurement accuracy, can also be used to the relevant temperature state of real-time supervision engine itself. It should be emphasized that, because the size of the whole sensor is small, and the temperature sensor and the pressure sensor are integrated together, the measured temperature value is the temperature of the position where the pressure sensor is located, and the temperature compensation control based on the temperature is more accurate.
2. Independent temperature sensors are omitted in the multi-sensor integrated structure, the total installation area of the sensors on the engine can be effectively reduced due to the reduction of the number of the sensors, the disturbance of the sensors on the temperature field, the pressure field and the like of the inherent structure of the engine can be reduced to the minimum, the uncertainty of the engine in the running process is reduced, and the safety and the reliability are improved.
3. The sensor is provided with the flexible mounting surface which is seamlessly attached to the curved surface of the inner wall of the casing, so that the mounting surface of the sensor is integrally in close contact with the curved surface of the inner wall of the casing, the sensor is firmly mounted, and cannot fall off under severe working conditions such as vibration and large airflow, and the working reliability is improved.
4. The installation surface of the sensor is seamlessly matched with the curved surface of the inner wall of the casing, so that the actual detection position of the sensor is consistent with the expected position, and the measurement precision can be ensured.
5. The sensor and the engine are in a unified use state, so that the adverse effect on the inherent characteristics of the engine can be effectively reduced, the mechanical balance of the engine is kept, the interference on the inherent temperature field, pressure field and the like of the engine is basically avoided, and the safety and the reliability are ensured.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a schematic perspective view of one embodiment of a sensor according to the present invention;
FIG. 2 is a top view of one embodiment of a sensor of the present invention;
FIG. 3 is a cross-sectional view of the center position of FIG. 2;
FIG. 4 is a process flow diagram of one embodiment of the method of the present invention.
In the figure: the flexible substrate layer 1, the bonding layer 2, the piezoelectric layer 3, the first interdigital electrode 4, the first group of second interdigital electrodes 5 and the second group of second interdigital electrodes 6.
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that variations and modifications can be made by persons skilled in the art without departing from the spirit of the invention. All falling within the scope of the present invention.
As shown in fig. 1-3, an embodiment of the surface acoustic wave temperature and stress sensor for an aircraft engine according to the present invention includes, from bottom to top, a flexible substrate layer 1, a bonding layer 2, a piezoelectric layer 3, and an electrode layer; the flexible substrate layer 1 is used as a bottom electrode and a flexible mounting surface, the bonding layer 2 is used for bonding the piezoelectric layer 3 on the flexible substrate layer 1, the piezoelectric layer 3 is used as a sound wave excitation transmission element and a pressure sensitive element, the electrode layer is used for outputting at least one temperature signal and a plurality of pressure signals, namely, at least one temperature measuring unit and a plurality of stress measuring units are integrated in the sensor, or the sensor is a composite structure sensor integrating at least one surface acoustic wave temperature sensor and a plurality of surface acoustic wave pressure sensors, the single-point temperature and the multi-point pressure in the same position area can be measured simultaneously, and the temperature can be used for temperature compensation control of the pressure sensor, so that the measurement accuracy of the pressure sensor is improved, and the relevant temperature state of the engine can be monitored in real time.
In one embodiment of the sensor of the present invention, said electrode layers comprise at least one first interdigital electrode 4 for outputting a temperature signal and a plurality of second interdigital electrodes for outputting a pressure signal; the first interdigital electrode 4 outputs a real-time temperature value of the position where the first interdigital electrode is located, and each second interdigital electrode outputs a real-time pressure value of the position where the second interdigital electrode is located. Independent temperature sensors are omitted in the multi-sensor integrated structure, the total installation area of the sensors on the engine can be effectively reduced due to the reduction of the number of the sensors, the disturbance of the sensors on the temperature field, the pressure field and the like of the inherent structure of the engine can be reduced to the minimum, the uncertainty of the engine in the running process is reduced, and the safety and the reliability are improved.
In one embodiment of the sensor of the present invention, the piezoelectric layer 3 is one of piezoelectric ceramics, quartz crystal, aluminum nitride, lithium niobate, and piezoelectric polymer. Different piezoelectric materials can be selected according to the required working temperature range, so that the application range can be improved.
In one embodiment of the sensor, the flexible substrate layer 1 is a stainless steel or beryllium bronze metal film, and belongs to a metal flexible substrate, so that the whole sensor mounting surface is in seamless fit with the curved surface of the inner wall of the engine case during mounting, the mounting is firm, the sensor mounting surface cannot fall off under severe working conditions such as vibration and atmospheric flow, and the working reliability is improved. The actual detection position of the sensor can be kept consistent with the expected position, and the measurement accuracy can be ensured. The engine dynamic balance control method can effectively reduce adverse effects on the inherent characteristics of the engine, maintain the mechanical balance of the engine, basically cannot cause interference on the inherent temperature field, pressure field and the like of the engine, and ensures both safety and reliability. The metal film of stainless steel or beryllium bronze has good flexibility and thermal stability, and can adapt to a wider temperature range while being convenient to install so as to stably work under the severe working conditions of an engine.
In one embodiment of the sensor of the present invention, the electrode layer is a Cr/Au bilayer metal thin film. The composite metal electrode layer has good conductivity and oxidation resistance, the material property is stable, and the conductivity can be kept unchanged in the service life.
In one embodiment of the sensor of the present invention, the bonding layer 2 is a conductive silver paste. The conductive silver paste can realize bonding at low temperature, so that the piezoelectric performance of the piezoelectric ceramic can be effectively prevented from being influenced by the degradation of the piezoelectric ceramic at high temperature.
In one embodiment of the sensor of the present invention, as shown in fig. 1 and 2, each of the first interdigital electrode 4 and the second interdigital electrode includes an interdigital transducer and a pair of reflection gratings, and the interdigital transducer is disposed at a central position between the two reflection gratings.
In one embodiment of the sensor of the present invention, said electrode layers comprise one said first interdigitated electrode 4 and four said second interdigitated electrodes; the first interdigital electrode 4 is arranged at the center of the electrode layer, and the four second interdigital electrodes are respectively arranged at the four side positions of the electrode layer, namely a first group of second interdigital electrodes 5 and a second group of second interdigital electrodes 6. The first interdigital electrode 4 outputs a temperature measurement signal at the center position of the sensor, the two second interdigital electrodes 5 of the first group respectively output buckling strain signals at the left and right positions of the sensor, or two buckling strain signals in the Y direction, and the two second interdigital electrodes 6 of the second group respectively output buckling strain signals at the front and rear positions of the sensor, or two buckling strain signals in the X direction. That is, the sensors in this embodiment can measure the temperature at the center position and the pressure at the four side positions. Of course, the number of the first interdigital electrode 4, the first group of second interdigital electrodes 5 and the second group of second interdigital electrodes 6 can be increased or decreased according to the actual requirement. It should be emphasized that, because the size of the whole sensor is small, and the temperature sensor and the pressure sensor are integrated together, the measured temperature value is the temperature of the position where the pressure sensor is located, and the temperature compensation control based on the temperature is more accurate.
In one embodiment of the sensor of the present invention, the piezoelectric ceramic is a lead zirconate titanate piezoelectric ceramic. The piezoelectric material has high piezoelectric coupling coefficient, and improves energy conversion efficiency, thereby improving the sensitivity of the sensor.
As shown in fig. 4, an embodiment of the method for manufacturing a surface acoustic wave temperature and stress sensor for an aircraft engine according to the present invention includes the following steps: a, bonding a piezoelectric layer 3 on a flexible substrate layer 1 through a bonding layer 2; b, thinning the piezoelectric layer 3 to a preset thickness by mechanical polishing; c depositing an electrode layer on the piezoelectric layer 3; and d, etching the electrode layer according to a preset pattern to form at least one first interdigital electrode 4 for outputting a temperature signal and a plurality of second interdigital electrodes for outputting a pressure signal.
It should be noted that, in the step a of the preparation method, the bonding temperature can be controlled to be 150-200 ℃, and the bonding pressure can be controlled to be 0.1-0.5 Mpa. The clearance between the inner wall of the casing and the tip of the engine fan blade is generally 1mm-2mm, and the thickness of the sensor is only 30% of the clearance at most. In the embodiment, the whole thickness of the sensor can be controlled to be 50-500 μm so as to meet the requirement of extremely small clearance between the inner wall of the casing and the tips of the fan blades of the engine, and thus, the sensor does not interfere with the inherent mechanism, the temperature field, the pressure field and the like of the engine.
In one embodiment of the manufacturing method of the present invention, the piezoelectric layer 3 in step a is one of piezoelectric ceramics, quartz crystal, aluminum nitride, lithium niobate, and piezoelectric polymer.
In one embodiment of the manufacturing method of the present invention, the flexible substrate layer 1 in step a is stainless steel or beryllium copper.
In one embodiment of the preparation method of the present invention, the electrode layer in step a is a Cr/Au bilayer metal thin film.
In an embodiment of the manufacturing method of the present invention, the bonding layer 2 in step a is conductive silver paste.
In one embodiment of the production method of the present invention, the piezoelectric ceramic in step a is a lead zirconate titanate piezoelectric ceramic.
The technical effects of any embodiment of the preparation method of the present invention are the same as those of the corresponding embodiment of the sensor of the present invention, and are not described herein again.
The foregoing description of specific embodiments of the present invention has been presented. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various changes and modifications may be made by one skilled in the art within the scope of the appended claims without departing from the spirit of the invention. The above-described preferred features may be used in any combination without conflict with each other.
Claims (10)
1. A surface acoustic wave temperature and stress sensor for an aircraft engine, characterized in that the sensor comprises at least one temperature measuring cell and a plurality of stress measuring cells; the sensor has a flexible mounting surface; the sensor sequentially comprises a flexible substrate layer, a bonding layer, a piezoelectric layer and an electrode layer from bottom to top; the flexible substrate layer is used as a bottom electrode and used as the flexible mounting surface, the bonding layer is used for bonding the piezoelectric layer on the flexible substrate layer, the piezoelectric layer is used as an acoustic wave excitation transmission element and a pressure sensitive element, and the electrode layer is used for outputting a temperature signal and a pressure signal.
2. Surface acoustic wave temperature and stress sensor for aeroengines according to claim 1, wherein said electrode layer comprises at least one first interdigital electrode for outputting a temperature signal and a plurality of second interdigital electrodes for outputting a pressure signal; the first interdigital electrode outputs a real-time temperature value of the position where the first interdigital electrode is located, and each second interdigital electrode outputs a real-time pressure value of the position where the second interdigital electrode is located.
3. A surface acoustic wave temperature and stress sensor for an aircraft engine as claimed in claim 1, wherein the material used for the piezoelectric layer is one of piezoelectric ceramics, quartz crystal, aluminum nitride, lithium niobate and piezoelectric polymer.
4. The surface acoustic wave temperature and stress sensor for an aircraft engine of claim 1, wherein the flexible substrate layer is stainless steel or beryllium bronze, the electrode layer is a Cr/Au double-layer metal film, and the bonding layer is a conductive silver paste.
5. Surface acoustic wave temperature and stress sensor for aeroengines, according to claim 2, characterized in that said first and second interdigital electrodes each comprise an interdigital transducer and a pair of reflection gratings, said interdigital transducer being placed in a central position between two of said reflection gratings.
6. A surface acoustic wave temperature and stress sensor for an aircraft engine as claimed in claim 2, wherein said electrode layer comprises one said first interdigital electrode and four said second interdigital electrodes; the first interdigital electrode is arranged at the center of the electrode layer, and the four second interdigital electrodes are respectively arranged at the four side positions of the electrode layer.
7. Surface acoustic wave temperature and stress sensor for aeroengines, according to claim 3, wherein said piezoelectric ceramic is a lead zirconate titanate piezoelectric ceramic.
8. A preparation method of a surface acoustic wave temperature and stress sensor for an aircraft engine is characterized by comprising the following steps:
(1) bonding the piezoelectric layer on the flexible substrate layer through the bonding layer;
(2) thinning the piezoelectric layer to a preset thickness by mechanical polishing;
(3) depositing an electrode layer on the piezoelectric layer;
(4) and etching the electrode layer according to a preset pattern to form at least one first interdigital electrode for outputting a temperature signal and a plurality of second interdigital electrodes for outputting a pressure signal.
9. The method for manufacturing a surface acoustic wave temperature and stress sensor for an aeroengine according to claim 8, wherein the material used for the piezoelectric layer in step (1) is one of piezoelectric ceramics, quartz crystal, aluminum nitride, lithium niobate and piezoelectric polymer; the flexible substrate layer is made of stainless steel or beryllium bronze; the electrode layer is a Cr/Au double-layer metal film; the bonding layer is conductive silver paste.
10. The method for making a surface acoustic wave temperature and stress sensor for an aircraft engine of claim 9, wherein said piezoelectric ceramic is a lead zirconate titanate piezoelectric ceramic.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111504199.8A CN114414083A (en) | 2021-12-10 | 2021-12-10 | Surface acoustic wave temperature and stress sensor for aircraft engine and preparation method thereof |
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| CN202111504199.8A CN114414083A (en) | 2021-12-10 | 2021-12-10 | Surface acoustic wave temperature and stress sensor for aircraft engine and preparation method thereof |
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