CN114413633A - Placement tool for firing silicon carbide tube - Google Patents
Placement tool for firing silicon carbide tube Download PDFInfo
- Publication number
- CN114413633A CN114413633A CN202210086793.8A CN202210086793A CN114413633A CN 114413633 A CN114413633 A CN 114413633A CN 202210086793 A CN202210086793 A CN 202210086793A CN 114413633 A CN114413633 A CN 114413633A
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- supporting plate
- sleeve
- plate
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- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 50
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 37
- 238000010304 firing Methods 0.000 title claims abstract description 16
- 229910000831 Steel Inorganic materials 0.000 claims description 18
- 239000010959 steel Substances 0.000 claims description 18
- 230000000149 penetrating effect Effects 0.000 claims description 8
- 230000003014 reinforcing effect Effects 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 4
- 230000008646 thermal stress Effects 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 229910002601 GaN Inorganic materials 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000005728 strengthening Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D5/00—Supports, screens, or the like for the charge within the furnace
- F27D5/0037—Supports specially adapted for semi-conductors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
- F27B17/0016—Chamber type furnaces
- F27B17/0025—Especially adapted for treating semiconductor wafers
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Supports For Pipes And Cables (AREA)
- Ceramic Products (AREA)
Abstract
The invention discloses a placement tool for firing a silicon carbide tube, which belongs to the technical field of firing of silicon carbide tubes and comprises the following components: the connecting pieces are provided with supporting pieces, and a first baffle and a second baffle are respectively arranged at two ends of each connecting piece; the support member includes: the supporting plates are provided with a plurality of concave grooves, wherein two sides of the supporting plates are fixedly connected to the connecting pieces through fixing pieces. But the carborundum pipe is placed to the frock that this scheme set up the multilayer, improves production efficiency, will place the frock and make detachable modular structure, easy to process, and reduced the support as far as possible to avoid thermal stress fatigue, the easy operation of carborundum pipe is placed to the multilayer simultaneously is easily handed, stable in structure.
Description
Technical Field
The invention relates to the technical field of silicon carbide firing, in particular to a placement tool for firing a silicon carbide tube.
Background
In recent years, the third-generation semiconductor is emerging in many fields, and the third-generation compound semiconductor mainly composed of SiC (silicon carbide) and GaN (gallium nitride) has become a favorite in the industrial, investment and local governments. With the increasing market demand, particularly for large-size silicon carbide products, the production efficiency needs to be improved.
When the existing horizontal sintering furnace is used for firing large-size silicon carbide tubes, the silicon carbide tubes are generally placed in a single layer mode so as to ensure the consistent quality of the silicon carbide tube products. However, the molding cycle of the silicon carbide product is long, so the production mode has low efficiency.
Disclosure of Invention
Aiming at the problems, the invention provides a placement tool for firing a silicon carbide tube.
The technical scheme adopted by the invention is as follows: the utility model provides a fire frock of placing of carborundum pipe, includes: a pair of connecting pieces, a supporting piece is arranged between the connecting pieces,
a first baffle and a second baffle are respectively arranged at two ends of the connecting piece;
the support member includes: a plurality of supporting plates are arranged on the base plate,
a plurality of concave grooves are arranged on the supporting plate,
wherein, the both sides of backup pad pass through the mounting fixed connection on the connecting piece.
Further, the connector includes: a pair of support beams, a pair of support rods,
the two support beams are arranged in parallel,
the two support rods are positioned between the two support beams,
the two supporting rods are arranged in parallel, and are both parallel to the two supporting beams;
the supporting plate is located between the supporting rods, and the two sides of the supporting plate are fixedly connected with the supporting rods and the supporting beams at the same side respectively.
Further, the first baffle and the second baffle have a convex shape in cross section,
a convex through hole is arranged in the middle of the second baffle,
the first baffle plate and the second baffle plate are both provided with a pair of round holes,
the diameter of the round hole is matched with that of the supporting rod;
the two ends of the supporting rod respectively penetrate through the round holes in the first baffle and the second baffle, the part of the supporting rod penetrating out is provided with a limiting hole, and a pin is inserted in the limiting hole.
Still further, the support plate includes: a plurality of first supporting plates, second supporting plates, third supporting plates and fourth supporting plates are arranged;
a plurality of the first supporting plates are arranged between the supporting rods at intervals,
the two sides of the first supporting plate are respectively fixedly connected with the supporting rod and the beam supporting beam on the same side through the fixing piece,
the second supporting plates are arranged between two adjacent first supporting plates at intervals,
one side of the second supporting plate is rotatably connected with the supporting rod at the same side through the fixing piece, the other side of the second supporting plate is clamped with the supporting rod at the same side,
the third supporting plate is arranged right above the first supporting plate,
the lower end of the third supporting plate is clamped with the upper end of the first supporting plate through a limiting piece,
the fourth support plate is arranged right above the third support,
the lower end of the fourth supporting plate is clamped with the upper end of the third supporting plate through the limiting piece;
the first supporting plate and the upper end middle part, the middle parts of the upper end and the lower end of the second supporting plate, the middle parts of the upper end and the lower end of the third supporting plate and the middle part of the lower end of the fourth supporting plate are respectively provided with a plurality of concave grooves.
Further, the concave groove has a semicircular shape.
Still further, the fixing member includes: a plurality of first sleeves, a plurality of second sleeves and a plurality of equal angle steels,
the first sleeve and the second sleeve are both T-shaped in cross section,
the first sleeve is positioned at the joint of the first supporting plate and the supporting rod,
the first sleeve is fixedly connected with the supporting rod at the same side, the first supporting plate is fixedly connected with the first sleeve at the same side,
the second sleeve is positioned at the joint of the first supporting plate and the supporting rod on one side,
the second sleeve is fixedly connected with the supporting rod, the second supporting plate is rotatably connected with the second sleeve,
the equilateral angle steel is positioned at the lower ends of two sides of the front end surface of the first supporting plate,
one side of the equilateral angle steel is connected with the front end surface pin of the first supporting plate,
the other side of the equal-edge angle steel is connected with the supporting beam pin at the same side.
Furthermore, the outer side wall of the first sleeve is provided with a tangent plane,
a first threaded hole penetrating through the wall thickness of the first sleeve is arranged on the section,
a second threaded hole corresponding to the first threaded hole is arranged on the support rod,
wherein the first sleeve and the support rod are fixedly connected through the first threaded hole and the second threaded hole by a first screw,
in a similar way, the outer wall of the second sleeve is provided with the tangent plane,
a third threaded hole penetrating through the wall thickness of the second sleeve is arranged on the section,
a fourth threaded hole corresponding to the third threaded hole is arranged on the support rod,
wherein the second sleeve and the support rod are fixedly connected through a second screw via the third threaded hole and the fourth threaded hole,
a groove is arranged on the side wall of the second sleeve, a bearing is arranged in the groove,
a mounting hole is arranged at the joint of the second supporting plate and the second sleeve,
the inner ring of the bearing is fixedly connected with the groove bottom of the groove, and the outer ring of the bearing is fixedly connected with the mounting hole.
Still further, the stopper includes: a plurality of loop bars and a plurality of circular sleeves,
the loop bars are symmetrically and fixedly connected at the upper end and the lower end of the two sides of the third supporting plate,
the circular sleeves are symmetrically arranged at the upper ends of the two sides of the first supporting plate and the lower ends of the two sides of the fourth supporting plate,
wherein the size of the loop bar is matched with the size of the circular sleeve.
Furthermore, the support rod and the support beam are respectively provided with a plurality of screw holes and pin holes.
Furthermore, reinforcing ribs are fixedly connected to the outer end faces of the first baffle plate and the second baffle plate.
The invention has the beneficial effects that:
but the carborundum pipe is placed to the frock that this scheme set up the multilayer, improves production efficiency, will place the frock and make detachable modular structure, easy to process, and reduced the support as far as possible to avoid thermal stress fatigue, the easy operation of carborundum pipe is placed to the multilayer simultaneously is easily handed, stable in structure.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the invention and, together with the description, serve to explain the invention and not to limit the invention.
FIG. 1 is a schematic diagram of the overall structure of an embodiment of the present invention;
FIG. 2 is a schematic view of a support plate connection according to an embodiment of the present invention;
FIG. 3 is a front view of a support plate according to an embodiment of the present invention;
FIG. 4 is a schematic top view of a support plate according to an embodiment of the present invention;
fig. 5 is a schematic view of a first support plate structure according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of a second support plate structure according to an embodiment of the present invention;
FIG. 7 is a schematic diagram of a third support plate structure according to an embodiment of the present invention;
fig. 8 is a schematic structural diagram of a fourth supporting plate according to an embodiment of the invention.
Reference numerals:
1 is first baffle, 2 is the second baffle, 3 is a supporting beam, 4 is the bracing piece, 5 is first backup pad, 6 is the second backup pad, 7 is the third backup pad, 8 is the fourth backup pad, 9 is first sleeve, 10 is the second sleeve, 11 is equilateral angle steel, 12 is the loop bar, 13 is circular sleeve, 14 is the strengthening rib.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Referring to fig. 1 to 5, as shown in fig. 1 to 5, a placement tool for firing a silicon carbide tube includes: a pair of connecting pieces, a supporting piece is arranged between the connecting pieces,
a first baffle plate 1 and a second baffle plate 2 are respectively arranged at two ends of the connecting piece;
the support member includes: a plurality of supporting plates are arranged on the base plate,
a plurality of concave grooves are arranged on the supporting plate,
wherein, the both sides of backup pad pass through the mounting fixed connection on the connecting piece.
The main invention of the scheme is that under the condition of meeting the production conditions of the silicon carbide tubes, the silicon carbide tubes are placed in multiple layers instead of single-layer placement, so that the number of the placed silicon carbide tubes is increased, the production efficiency is improved, secondly, enough space is reserved between the adjacent silicon carbide tubes through the arranged support plates, the problem of thermal stress fatigue is avoided, and meanwhile, the problem of uneven temperature during the firing of the silicon carbide tubes is also avoided.
In an embodiment of the present invention, the connecting member includes: a pair of support beams 3, a pair of support rods 4,
two of the support beams 3 are arranged in parallel,
two of the support bars 4 are located between the two support beams,
the two support rods 4 are arranged in parallel, and the two support rods 4 are both parallel to the two support beams 3;
the supporting plate is located between the supporting rods 4, and two sides of the supporting plate are fixedly connected with the supporting rods 4 and the supporting beams 3 which are located on the same side.
It should be noted that the main function of the supporting rod plays a role in bearing the supporting plate, so that all acting forces are prevented from being concentrated on the supporting beam after the silicon carbide pipe is placed on the supporting plate, the bending risk of the supporting beam is increased, and meanwhile, the supporting rod also plays a role in bearing the supporting member for the installation of the baffle.
In addition, the supporting rod can be arranged on the end faces of the front end and the rear end of the supporting beam, the supporting plate is directly connected with the supporting beam, so that the whole weight of the tool can be reduced, but the connecting points are reduced because the two ends of the supporting plate at the bottommost layer are directly connected with the supporting beam, so that the stress of the connecting part of the supporting plate and the supporting beam is large, and the risk of bending the supporting beam and bending the supporting plate at the lowest layer is increased.
In one embodiment of the present invention, the cross-section of the first baffle plate 1 and the second baffle plate 2 is convex,
a convex through hole is arranged in the middle of the second baffle 2,
a pair of round holes are respectively arranged on the first baffle plate 1 and the second baffle plate 2,
the diameter of the round hole is matched with that of the supporting rod;
the two ends of the supporting rod respectively penetrate through the round holes in the first baffle 1 and the second baffle 2, the supporting rod penetrates out of the round holes, limiting holes are formed in the supporting rod, and pins are inserted in the limiting holes.
It should be noted that, the main effect of first baffle and second baffle is, place the carborundum pipe and take place horizontal removal, wherein, contact between first baffle and the head of carborundum pipe, the afterbody direct contact of second baffle and carborundum pipe has so avoided the removal of carborundum in the horizontal direction, increases the stability in the burning carborundum in-process.
In this embodiment, the material of each member is silicon or silicon carbide.
In an embodiment of the present invention, the supporting plate includes: a plurality of first supporting plates 5, second supporting plates 6, third supporting plates 7 and fourth supporting plates 8 are arranged;
a plurality of the first supporting plates 5 are arranged at intervals between the supporting rods 4,
the two sides of the first supporting plate 5 are respectively fixedly connected with the supporting rod 4 and the cross beam 3 on the same side through the fixing parts,
the second supporting plates 6 are arranged between two adjacent first supporting plates 5 at intervals,
one side of the second supporting plate 6 is rotatably connected with the supporting rod 4 at the same side through the fixing piece, the other side of the second supporting plate 6 is clamped with the supporting rod 4 at the same side,
the third support plate 7 is disposed directly above the first support plate 5,
the lower end of the third supporting plate 7 is clamped with the upper end of the first supporting plate 5 through a limiting piece,
the fourth support plate 8 is arranged directly above the third support 6,
the lower end of the fourth supporting plate 8 is clamped with the upper end of the third supporting plate 6 through the limiting piece;
the middle parts of the upper end and the lower end of the first supporting plate 5, the middle parts of the upper end and the lower end of the second supporting plate 6, the middle parts of the upper end and the lower end of the third supporting plate 7 and the middle part of the lower end of the fourth supporting plate 8 are respectively provided with a plurality of concave grooves.
It should be noted that the first baffle mainly carries the silicon carbide tube at the bottom layer, wherein the first baffle includes: a bearing part and a connecting part, wherein,
the bearing part is two U-shaped pieces connected together in parallel, wherein the silicon carbide pipe is placed in the two U-shaped pieces,
the connection portion includes: a first connecting part and a second connecting part,
the first connecting part has a section similar to a horn shape, one end is small, the other end is large, the middle part is convex outwards,
the second part is a square block with an arc unfilled corner, wherein one side edge of the square block is fixedly connected with a limiting part, the tail end of the other side edge is fixedly connected with the upper end of one side of the first connecting part, a round hole connected with the fixing part is arranged at the connecting part, and the first supporting plate is integrally formed.
The second supporting plate is a rectangular plate, the upper end and the lower end of the second supporting plate are respectively provided with a plurality of concave grooves, wherein the left end of the rectangular plate is provided with a hole for mounting a fixing piece, the right end of the rectangular plate is provided with a notch for clamping the supporting rod,
the concave groove at the lower end of the rectangular plate and the center of the groove of the first connecting part of the first supporting plate are on the same plane.
The third supporting plate is a rectangular plate, and a plurality of concave grooves are symmetrically arranged at the upper end and the lower end of the third supporting plate at intervals, wherein, limiting pieces are symmetrically arranged at the upper end and the lower end of the left side surface and the right side surface of the rectangular plate,
the concave groove at the lower end of the third supporting plate is opposite to the concave groove at the upper end of the second supporting plate.
The fourth supporting plate is a rectangular plate, a plurality of concave grooves are arranged on the lower end surface of the fourth supporting plate, limiting pieces are arranged at the ends of the left end surface and the right end surface,
the concave groove at the lower end of the fourth supporting plate is opposite to the concave groove at the upper end of the third supporting plate.
In an embodiment of the invention, the concave groove is semicircular.
In an embodiment of the present invention, the fixing member includes: a plurality of first sleeves 9, a plurality of second sleeves 10, a plurality of equal angle steels 11,
the first sleeve 9 and the second sleeve 10 are both T-shaped in cross section,
the first sleeve 9 is positioned at the joint of the first supporting plate 5 and the supporting rod 4,
the first sleeve 9 is fixedly connected with the supporting rod 4 at the same side, the first supporting plate 5 is fixedly connected with the first sleeve 9 at the same side,
the second sleeve 10 is positioned at the joint of the first supporting plate 5 and the supporting rod 4 on one side,
the second sleeve 10 is fixedly connected with the support rod 4, the second support plate 6 is rotatably connected with the second sleeve 10,
the equilateral angle steels 11 are positioned at the lower ends of two sides of the front end surface of the first supporting plate 5,
one side of the equilateral angle steel 11 is in pin connection with the front end surface of the first supporting plate 5,
the other side of the equal-edge angle steel 11 is in pin connection with the supporting beam 3 on the same side.
It should be noted that the main function of the equal angle steel is to fixedly connect the two ends of the first supporting plate with the supporting beam, wherein, in order to increase the connection stability of the first supporting plate, the equal angle steel can be replaced by L-shaped angle steel, and meanwhile, a plurality of waist holes are formed at the two sides of the end surfaces of the L-shaped angle steel and the first supporting plate, and then the connection is performed through pins.
In addition, the inner side surface of the supporting beam is fixedly connected with an L-shaped reinforcing rib, wherein the width of the L-shaped reinforcing rib and the width of the supporting beam are only equal to the width of the equal angle steel.
In an embodiment of the present invention, the outer sidewall of the first sleeve 9 is provided with a cut surface,
a first threaded hole penetrating through the wall thickness of the first sleeve 9 is arranged on the section,
a second threaded hole corresponding to the first threaded hole is arranged on the support rod 4,
wherein the first sleeve 9 and the support rod 4 are fixedly connected through the first threaded hole and the second threaded hole by a first screw,
similarly, the outer wall of the second sleeve 10 is provided with the tangent plane,
a third threaded hole penetrating through the wall thickness of the second sleeve 10 is formed in the section,
a fourth threaded hole corresponding to the third threaded hole is arranged on the support rod 4,
wherein the second sleeve 10 and the support rod 4 are fixedly connected through the third threaded hole and the fourth threaded hole by a second screw,
the side wall of the second sleeve 10 is provided with a groove, a bearing is arranged in the groove,
the joint of the second supporting plate 6 and the second sleeve 10 is provided with a mounting hole,
the inner ring of the bearing is fixedly connected with the groove bottom of the groove, and the outer ring of the bearing is fixedly connected with the mounting hole.
It should be noted that, the main function of the first sleeve and the second sleeve is to connect the first support plate and the second support plate to the support rod, wherein, in order to increase the stability between the first sleeve and the support rod and the second sleeve, a tangent plane is provided on the outer wall of the first sleeve and the second sleeve, which can increase the stability of the screw after connecting the first sleeve and the second sleeve.
In an embodiment of the present invention, the position limiting member includes: a plurality of rods 12 and a plurality of circular sleeves 13,
the loop bars 12 are symmetrically and fixedly connected at the upper and lower ends of the two sides of the third supporting plate 7,
the circular sleeves 13 are symmetrically arranged at the upper ends of the two sides of the first supporting plate 5 and at the lower ends of the two sides of the fourth supporting plate 8,
wherein the size of the loop bar 12 matches the size of the circular sleeve 13.
It should be noted that, in order to facilitate the connection between the third support plate and the first support plate and the connection between the third support plate and the third support plate, the connection between the third support plate and the first support plate can be changed from the clamping connection to the rotation connection, and the connection between the fourth support plate and the third support plate can be changed from the clamping connection to the rotation connection.
Specifically, a side lug with a hole is fixedly arranged at the upper end and the lower end of either one of the left side and the right side of the three-support-plate, a corresponding U-shaped side lug with a hole is arranged on the side surface of the first support plate on the same side, a side lug with a hole is arranged on the side surface of the fourth support plate, the side lug is rotatably connected in the U-shaped side lug through a pin, and the sleeve rod and the circular sleeve are arranged on the other side of the third support plate and the fourth support plate.
So, when placing the carborundum pipe in placing second backup pad and the third backup pad, need not take off third backup pad and fourth backup pad, can directly rotate the switching of accomplishing third backup pad and fourth backup pad round the round pin.
In an embodiment of the present invention, the support rod 4 and the support beam 3 are respectively provided with a plurality of screw holes and pin holes.
In an embodiment of the present invention, the first baffle 1 and the second baffle 2 are fixedly connected with a reinforcing rib 14 on the outer end surface.
Wherein, the strengthening rib through setting up can effectually be avoided, and the carborundum pipe acts on first baffle or second baffle after horizontal atress, and makes the problem of first baffle or second baffle deformation.
When the working method of the placement tool for firing the silicon carbide tube is used, the second support plate is opened around the second sleeve, and the third support plate and the fourth support plate are not placed temporarily;
then, placing a silicon carbide tube in the concave groove on the first supporting plate, and then closing the second supporting plate;
then, placing a silicon carbide tube on the second support plate, and then clamping the loop bar on the third support plate with the circular sleeve on the first support plate;
and finally, placing a silicon carbide pipe on the third support plate, and then clamping the sleeve on the fourth support plate with the loop bar on the third support plate.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (10)
1. The utility model provides a fire frock of placing of carborundum pipe which characterized in that includes:
a pair of connecting pieces, a supporting piece is arranged between the connecting pieces,
a first baffle and a second baffle are respectively arranged at two ends of the connecting piece;
the support member includes: a plurality of supporting plates are arranged on the base plate,
a plurality of concave grooves are arranged on the supporting plate,
wherein, the both sides of backup pad pass through the mounting fixed connection on the connecting piece.
2. The placement tool for firing the silicon carbide tube according to claim 1, wherein the connecting member comprises: a pair of support beams, a pair of support rods,
the two support beams are arranged in parallel,
the two support rods are positioned between the two support beams,
the two supporting rods are arranged in parallel, and are both parallel to the two supporting beams;
the supporting plate is located between the supporting rods, and the two sides of the supporting plate are fixedly connected with the supporting rods and the supporting beams at the same side respectively.
3. The tool for placing the fired silicon carbide tube as claimed in claim 2, wherein the first baffle plate and the second baffle plate have a convex shape in cross section,
a convex through hole is arranged in the middle of the second baffle,
the first baffle plate and the second baffle plate are both provided with a pair of round holes,
the diameter of the round hole is matched with that of the supporting rod;
the two ends of the supporting rod respectively penetrate through the round holes in the first baffle and the second baffle, the part of the supporting rod penetrating out is provided with a limiting hole, and a pin is inserted in the limiting hole.
4. The placement tool for firing the silicon carbide tube according to claim 2, wherein the support plate comprises: a plurality of first supporting plates, second supporting plates, third supporting plates and fourth supporting plates are arranged;
a plurality of the first supporting plates are arranged between the supporting rods at intervals,
the two sides of the first supporting plate are respectively fixedly connected with the supporting rod and the supporting beam at the same side through the fixing piece,
the second supporting plates are arranged between two adjacent first supporting plates at intervals,
one side of the second supporting plate is rotatably connected with the supporting rod at the same side through the fixing piece, the other side of the second supporting plate is clamped with the supporting rod at the same side,
the third supporting plate is arranged right above the first supporting plate,
the lower end of the third supporting plate is clamped with the upper end of the first supporting plate through a limiting piece,
the fourth support plate is arranged right above the third support,
the lower end of the fourth supporting plate is clamped with the upper end of the third supporting plate through the limiting piece;
the first supporting plate and the upper end middle part, the middle parts of the upper end and the lower end of the second supporting plate, the middle parts of the upper end and the lower end of the third supporting plate and the middle part of the lower end of the fourth supporting plate are respectively provided with a plurality of concave grooves.
5. The placement tool for firing the silicon carbide tube as claimed in claim 1, wherein the concave groove is semicircular.
6. The placement tool for firing the silicon carbide tube according to claim 4, wherein the fixing member comprises: a plurality of first sleeves, a plurality of second sleeves and a plurality of equal angle steels,
the first sleeve and the second sleeve are both T-shaped in cross section,
the first sleeve is positioned at the joint of the first supporting plate and the supporting rod,
the first sleeve is fixedly connected with the supporting rod at the same side, the first supporting plate is fixedly connected with the first sleeve at the same side,
the second sleeve is positioned at the joint of the first supporting plate and the supporting rod on one side,
the second sleeve is fixedly connected with the supporting rod, the second supporting plate is rotatably connected with the second sleeve,
the equilateral angle steel is positioned at the lower ends of two sides of the front end surface of the first supporting plate,
one side of the equilateral angle steel is connected with the front end surface pin of the first supporting plate,
the other side of the equal-edge angle steel is connected with the supporting beam pin at the same side.
7. The tool for placing the fired silicon carbide tube as claimed in claim 6, wherein the outer side wall of the first sleeve is provided with a tangent plane,
a first threaded hole penetrating through the wall thickness of the first sleeve is arranged on the section,
a second threaded hole corresponding to the first threaded hole is arranged on the support rod,
wherein the first sleeve and the support rod are fixedly connected through the first threaded hole and the second threaded hole by a first screw,
in a similar way, the outer wall of the second sleeve is provided with the tangent plane,
a third threaded hole penetrating through the wall thickness of the second sleeve is arranged on the section,
a fourth threaded hole corresponding to the third threaded hole is arranged on the support rod,
wherein the second sleeve and the support rod are fixedly connected through a second screw via the third threaded hole and the fourth threaded hole,
a groove is arranged on the side wall of the second sleeve, a bearing is arranged in the groove,
a mounting hole is arranged at the joint of the second supporting plate and the second sleeve,
the inner ring of the bearing is fixedly connected with the groove bottom of the groove, and the outer ring of the bearing is fixedly connected with the mounting hole.
8. The placement tool for firing the silicon carbide tube according to claim 4, wherein the limiting member comprises: a plurality of loop bars and a plurality of circular sleeves,
the loop bars are symmetrically and fixedly connected at the upper end and the lower end of the two sides of the third supporting plate,
the circular sleeves are symmetrically arranged at the upper ends of the two sides of the first supporting plate and the lower ends of the two sides of the fourth supporting plate,
wherein the size of the loop bar is matched with the size of the circular sleeve.
9. The tool for placing the fired silicon carbide pipe as claimed in claim 8, wherein the support rod and the support beam are provided with a plurality of screw holes and pin holes.
10. The tool for placing the fired silicon carbide tube as claimed in claim 3, wherein reinforcing ribs are fixedly connected to the outer end faces of the first baffle plate and the second baffle plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210086793.8A CN114413633B (en) | 2022-01-25 | 2022-01-25 | Placing tool for firing silicon carbide tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210086793.8A CN114413633B (en) | 2022-01-25 | 2022-01-25 | Placing tool for firing silicon carbide tube |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114413633A true CN114413633A (en) | 2022-04-29 |
| CN114413633B CN114413633B (en) | 2024-02-02 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114248342A (en) * | 2022-02-07 | 2022-03-29 | 东莞市志橙半导体材料有限公司 | Preparation method of special-shaped semiconductor tube core non-conductive protection tube |
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| CN107160352A (en) * | 2017-07-12 | 2017-09-15 | 聂修远 | A kind of shaft forgings storage shelf |
| CN209472356U (en) * | 2019-02-25 | 2019-10-08 | 河北嘉日电力设施安装工程有限公司 | A kind of cable duct bank mounting structure |
| CN212148969U (en) * | 2020-05-21 | 2020-12-15 | 登封市宏远电热元件有限公司 | Silicon carbide rod conveyer |
| CN213200570U (en) * | 2020-06-23 | 2021-05-14 | 佛山优维士光电科技有限公司 | Transversely place UV lamp and put tub case |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107160352A (en) * | 2017-07-12 | 2017-09-15 | 聂修远 | A kind of shaft forgings storage shelf |
| CN209472356U (en) * | 2019-02-25 | 2019-10-08 | 河北嘉日电力设施安装工程有限公司 | A kind of cable duct bank mounting structure |
| CN212148969U (en) * | 2020-05-21 | 2020-12-15 | 登封市宏远电热元件有限公司 | Silicon carbide rod conveyer |
| CN213200570U (en) * | 2020-06-23 | 2021-05-14 | 佛山优维士光电科技有限公司 | Transversely place UV lamp and put tub case |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114248342A (en) * | 2022-02-07 | 2022-03-29 | 东莞市志橙半导体材料有限公司 | Preparation method of special-shaped semiconductor tube core non-conductive protection tube |
| CN114248342B (en) * | 2022-02-07 | 2023-03-31 | 东莞市志橙半导体材料有限公司 | Preparation method of special-shaped semiconductor tube core non-conductive protection tube |
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| CN114413633B (en) | 2024-02-02 |
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