CN114411237A - Variable-pitch flexible induction heating system and single crystal furnace - Google Patents
Variable-pitch flexible induction heating system and single crystal furnace Download PDFInfo
- Publication number
- CN114411237A CN114411237A CN202210063831.8A CN202210063831A CN114411237A CN 114411237 A CN114411237 A CN 114411237A CN 202210063831 A CN202210063831 A CN 202210063831A CN 114411237 A CN114411237 A CN 114411237A
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- induction coil
- heating system
- sliding blocks
- screw rod
- induction heating
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- 230000006698 induction Effects 0.000 title claims abstract description 66
- 238000010438 heat treatment Methods 0.000 title claims abstract description 22
- 239000013078 crystal Substances 0.000 title claims abstract description 19
- 230000001360 synchronised effect Effects 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims description 2
- 230000007246 mechanism Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/003—Heating or cooling of the melt or the crystallised material
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- General Induction Heating (AREA)
Abstract
The invention discloses a flexible induction heating system with variable screw pitch, which comprises a spiral induction coil; the induction coil spirally extends from bottom to top to form a plurality of layers of ring bodies and also comprises an induction coil adjusting device; the induction coil adjusting device comprises slide blocks and a driving device, wherein the slide blocks are respectively fixed on the plurality of layers of ring bodies and are arranged from bottom to top, and the driving device drives the slide blocks to move up and down; all the sliding blocks are lifted up or lowered down simultaneously to adjust the distribution of the magnetic field of the induction coil, the size of the coil and the effective turns and the distance are changed by accurately adjusting the thread pitch of the coil, and the temperature gradient required by crystal generation is accurately established.
Description
Technical Field
The invention belongs to the technical field of silicon single crystal furnaces.
Background
Most of semiconductor single crystal furnaces are high-temperature furnaces, taking silicon carbide and silicon single crystal furnaces as examples, the core temperature of a thermal field is 2300 ℃ and 1400 ℃, and the axial temperature gradient of the thermal field directly influences the growth quality and defects of the crystal in the high-temperature growth process of the crystal.
For example, the patent application with the publication number of 113136618A, discloses a single crystal furnace. The single crystal furnace uses an induction coil as a heating device, and the induction coil spirally surrounds the heat preservation component. The induction coil is used for generating an alternating magnetic field to enable the crucible piece to generate eddy current so as to enable the crucible piece to generate heat, and the temperature gradient in the axial direction of the heating thermal field of the raw materials in the crucible piece needs to be accurately adjusted and controlled. However, in the prior art, the size, the number of turns and the diameter of the induction coil of the rigid spiral coil influence the magnetic field distribution, so that the fixed size and the number of turns of the coil are not beneficial to adjusting the magnetic field distribution, the temperature gradient in the axial direction of the thermal field is difficult to adjust, the temperature gradient of the thermal field required by crystal growth is difficult to accurately establish, and the defect rate of the produced crystal is high.
For example, a new technical solution is needed to solve the above technical problems.
Disclosure of Invention
The purpose of the invention is as follows: the invention provides a flexible induction heating system capable of realizing the length size of a spiral induction coil and the change of the number of turns of the coil in an effective area and a single crystal furnace with the heating system.
The technical scheme is as follows: in order to solve the above problems, the present invention may adopt the following technical solutions:
a variable pitch flexible induction heating system comprising a helical induction coil; the induction coil spirally extends from bottom to top to form a plurality of layers of ring bodies and also comprises an induction coil adjusting device;
the induction coil adjusting device comprises sliding blocks and a driving device, wherein the sliding blocks are respectively fixed on the plurality of layers of ring bodies and are arranged from top to bottom; the top of the induction coil is fixed; all the sliding blocks ascend or descend simultaneously, and the distance between every two adjacent sliding blocks is always the same.
Furthermore, the induction coil adjusting device also comprises a folding telescopic joint, the folding telescopic joint comprises a plurality of connecting rods with centers hinged and mutually crossed, the end points of two adjacent connecting rods are also hinged, and the hinged shafts of the central hinged points of the mutually crossed connecting rods are simultaneously fixed on the sliding blocks, so that the distance between every two adjacent sliding blocks is always the same; the top of the folding telescopic joint is fixed with the top of the induction coil, and when the bottom of the folding telescopic joint moves downwards, the distance between two adjacent central hinge points is increased, so that the distance between two adjacent sliding blocks is increased.
Furthermore, the driving device is a screw rod and a guide rod which extend up and down, the sliding blocks are equidistantly arranged on the guide rod, a screw rod guide block arranged on the screw rod is fixed at the bottom of the folding telescopic joint, and the screw rod guide block rises or falls along with the rotation of the screw rod to drive the bottom of the folding telescopic joint to move upwards or downwards.
Furthermore, the induction coil is provided with a plurality of guide rods and a plurality of screw rods, the guide rods are arranged outside the induction coil at equal intervals and in parallel along the circumference, and each guide rod is provided with a sliding block fixed with the ring body; each screw rod is arranged corresponding to one folding expansion joint.
Furthermore, the driving device also comprises a rotating wheel and a driving motor which are used for respectively driving each screw rod to rotate; one of the rotating wheels is a driving wheel, the other rotating wheels are driven wheels, the driving wheel and the driven wheels are in transmission through a synchronous belt, and a driving motor is coaxially connected with the driving wheel and drives the driving wheel to rotate.
The induction coil, the screw rod and the wheel shaft of the rotating wheel are all arranged on the frame, and the driving motor is arranged below the frame.
Has the advantages that: compared with the prior art, the flexible induction heating system with the variable screw pitch can adjust the magnetic field distribution of the induction coil when the temperature gradient of a thermal field is inappropriate, change the size of the coil and the effective turns and the distance by accurately adjusting the screw pitch of the coil, and accurately establish the temperature gradient required by crystal generation.
The invention also discloses a single crystal furnace which is provided with the flexible induction heating system.
Drawings
Fig. 1 is a block diagram of a flexible induction heating system of the present invention.
Detailed Description
Referring to fig. 1, a flexible induction heating system according to the present invention includes a spiral induction coil 1, an induction coil adjusting device, and a frame 8. The induction coil 1 spirally extends from bottom to top to form a plurality of layers of ring bodies. The induction coil 1 is used for generating an alternating magnetic field, so that a crucible piece (not shown) located in the surrounding area of the induction coil 1 generates eddy current, and the crucible piece generates heat.
The induction coil adjusting device comprises a slide block 4, a guide rod 2 and a folding telescopic joint 3, wherein the slide block 4 is respectively fixed on the plurality of layers of ring bodies and is arranged from bottom to top, the guide rod carries the slide block 4 to move up and down, and the folding telescopic joint 3 is arranged on the guide rod. A plurality of sliding blocks 4 are arranged on the guide rod 2 at equal intervals. The folding telescopic joint 3 comprises a plurality of connecting rods with centers hinged and mutually crossed, the end points of two adjacent connecting rods are also hinged, and the hinged shafts of the central hinged points of the mutually crossed connecting rods are simultaneously fixed on the sliding blocks 4, so that the distance between every two adjacent sliding blocks 4 is always the same. All the sliding blocks 4 ascend or descend simultaneously, and the distance between every two adjacent sliding blocks is always the same. The top of the foldable telescopic joint 3 is fixed with the top of the induction coil 1, for example, a fixing block 9 on the uppermost layer in fig. 1, the fixing block 9 is sleeved on a circle on the uppermost layer of the induction coil 1, and the side surface of the fixing block 9 is connected with the top of the foldable telescopic joint 3. The fixed block 9 is fixed, that is, the folding telescopic joint 3 and the induction coil 1 are in a hoisting installation form. The folding telescopic joint 3 can make the plurality of sliding blocks 4 simultaneously move downwards by moving the bottom downwards so as to make the thread pitch of the induction coil 1 larger.
In the present embodiment, 4 guide rods 2 are used, each located outside the induction coil. The 4 guide rods 2 are circumferentially arranged at equal intervals and in parallel outside the induction coil 1 so that each layer of loop body of the induction coil 1 does not incline when ascending or descending for more precise control.
The driving device is a screw rod 11 extending up and down, a screw rod guide block 13 arranged on the screw rod 11 is fixed at the bottom of the folding telescopic joint 3, and the screw rod guide block 13 ascends or descends along with the rotation of the screw rod 11 to drive the bottom of the folding telescopic joint 3 to move upwards or downwards. When the bottom of the folding expansion joint 3 moves downwards, the pitch of the induction coil 1 is increased; when the bottom of the folding telescopic joint 3 moves upwards, the thread pitch of the induction coil 1 becomes smaller. The plurality of screw rods 11 are arranged outside the induction coil at equal intervals and in parallel along the circumference, and each screw rod 11 is arranged corresponding to one folding expansion joint 3.
The driving device also comprises a rotating wheel 12 and a driving motor 10 which respectively drive each screw rod 11 to rotate. The rotating wheel 12 is positioned below the screw rod 11 and is coaxially connected with the screw rod 11. One of the rotating wheels is a driving wheel, the other rotating wheels are driven wheels, and the driving wheel and the driven wheels are driven by a synchronous belt 7. The driving motor 10 is coaxially connected with the driving wheel and drives the driving wheel to rotate. The frame 8 is also provided with a tension wheel mechanism 6 and an auxiliary guide wheel mechanism 5 to prevent the synchronous belt 7 from slipping, so that a driving motor 10 drives the driving wheel and the driven wheel to rotate at the same speed, and the rotating speeds of the lead screws 2 are consistent. The screw rod 2, the wheel shaft of the rotating wheel 12, the tension wheel mechanism 6 and the auxiliary guide wheel mechanism 5 are all arranged on the frame, and the driving motor 10 is arranged below the frame.
When the flexible induction heating system is used, if the temperature gradient of a thermal field is found to be not appropriate, and the magnetic field distribution of the induction coil needs to be adjusted, the pitch of the coil can be accurately adjusted to change the effective number of turns and the pitch of the coil so as to adjust the magnetic field distribution condition, so that the temperature gradient required by crystal generation can be established.
In other embodiments, the number of the lead screws can be set to be 3, 5, etc., and the description is omitted here.
The flexible induction heating system is applied to the single crystal furnace. Therefore, another embodiment provided by the invention is a single crystal furnace comprising the flexible induction heating system of the above embodiment.
The invention embodies a number of methods and approaches to this solution and the foregoing is only a preferred embodiment of the invention. It should be noted that, for those skilled in the art, without departing from the principle of the present invention, several improvements and modifications can be made, and these improvements and modifications should also be construed as the protection scope of the present invention. All the components not specified in the present embodiment can be realized by the prior art.
Claims (7)
1. A variable pitch flexible induction heating system comprising a helical induction coil; the induction coil spirally extends from bottom to top to form a plurality of layers of ring bodies, and is characterized by also comprising an induction coil adjusting device;
the induction coil adjusting device comprises sliding blocks and a driving device, wherein the sliding blocks are respectively fixed on the plurality of layers of ring bodies and are arranged from top to bottom; the top of the induction coil is fixed; all the sliding blocks ascend or descend simultaneously, and the distance between every two adjacent sliding blocks is always the same.
2. The flexible induction heating system of claim 1, wherein the induction coil adjusting device further comprises a folding telescopic joint, the folding telescopic joint comprises a plurality of connecting rods with hinged centers and mutually crossed, the end points of two adjacent connecting rods are mutually hinged, and the hinged shafts of the hinged centers of the mutually crossed connecting rods are simultaneously fixed on the sliding blocks, so that the distance between every two adjacent sliding blocks is always the same; the top of the folding telescopic joint is fixed with the top of the induction coil, and when the bottom of the folding telescopic joint moves downwards, the distance between two adjacent central hinge points is increased, so that the distance between two adjacent sliding blocks is increased.
3. The flexible induction heating system of claim 1 or 2, wherein the driving device is a screw rod and a guide rod extending up and down, the plurality of sliding blocks are equidistantly mounted on the guide rod, a screw rod guide block mounted on the screw rod is fixed at the bottom of the foldable telescopic joint, and the screw rod guide block ascends or descends along with the rotation of the screw rod to drive the bottom of the foldable telescopic joint to move up or down.
4. The flexible induction heating system of claim 3, wherein there are a plurality of guide rods and a plurality of lead screws, and the plurality of guide rods are arranged outside the induction coil at equal intervals and in parallel along the circumference, and each guide rod is provided with a slide block fixed with the ring body; each screw rod is arranged corresponding to one folding expansion joint.
5. The flexible induction heating system of claim 4, wherein the driving device further comprises a rotating wheel and a driving motor for driving each screw rod to rotate respectively; one of the rotating wheels is a driving wheel, the other rotating wheels are driven wheels, the driving wheel and the driven wheels are in transmission through a synchronous belt, and a driving motor is coaxially connected with the driving wheel and drives the driving wheel to rotate.
6. The flexible induction heating system of claim 5, further comprising a mounting frame, wherein the induction coil, the lead screw and the wheel shaft of the rotating wheel are all mounted on the frame, and the driving motor is mounted below the frame.
7. A single crystal furnace characterized by having the flexible induction heating system as claimed in any one of claims 1 to 6.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210063831.8A CN114411237B (en) | 2022-01-20 | 2022-01-20 | Flexible induction heating system with variable screw pitch and single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210063831.8A CN114411237B (en) | 2022-01-20 | 2022-01-20 | Flexible induction heating system with variable screw pitch and single crystal furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114411237A true CN114411237A (en) | 2022-04-29 |
| CN114411237B CN114411237B (en) | 2023-11-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210063831.8A Active CN114411237B (en) | 2022-01-20 | 2022-01-20 | Flexible induction heating system with variable screw pitch and single crystal furnace |
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| CN (1) | CN114411237B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2641406A1 (en) * | 1988-12-30 | 1990-07-06 | Thomson Csf | Variable inductance coil with central slider |
| CN1309196A (en) * | 2000-11-06 | 2001-08-22 | 西北工业大学 | Heating method and equipment for crystal growth |
| CN203065642U (en) * | 2013-01-06 | 2013-07-17 | 河北同光晶体有限公司 | Insulation bracket of induction coil for growth of silicon carbide crystals |
| CN105200515A (en) * | 2015-09-24 | 2015-12-30 | 山东大学 | Induction coil for SiC single-crystal growth furnace and application thereof |
| CN207193437U (en) * | 2017-05-22 | 2018-04-06 | 山东大学 | The adjusting apparatus that temperature field is adjusted in real time can be realized in a kind of SiC single crystal grower |
| CN212270278U (en) * | 2019-10-25 | 2021-01-01 | 浙江晶盛机电股份有限公司 | Device for automatically adjusting temperature field gradient of silicon carbide furnace |
| CN115807264A (en) * | 2021-09-15 | 2023-03-17 | 中国电子科技集团公司第四十八研究所 | Interval adjustable silicon carbide epitaxial equipment induction heating device |
-
2022
- 2022-01-20 CN CN202210063831.8A patent/CN114411237B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2641406A1 (en) * | 1988-12-30 | 1990-07-06 | Thomson Csf | Variable inductance coil with central slider |
| CN1309196A (en) * | 2000-11-06 | 2001-08-22 | 西北工业大学 | Heating method and equipment for crystal growth |
| CN203065642U (en) * | 2013-01-06 | 2013-07-17 | 河北同光晶体有限公司 | Insulation bracket of induction coil for growth of silicon carbide crystals |
| CN105200515A (en) * | 2015-09-24 | 2015-12-30 | 山东大学 | Induction coil for SiC single-crystal growth furnace and application thereof |
| CN207193437U (en) * | 2017-05-22 | 2018-04-06 | 山东大学 | The adjusting apparatus that temperature field is adjusted in real time can be realized in a kind of SiC single crystal grower |
| CN212270278U (en) * | 2019-10-25 | 2021-01-01 | 浙江晶盛机电股份有限公司 | Device for automatically adjusting temperature field gradient of silicon carbide furnace |
| CN115807264A (en) * | 2021-09-15 | 2023-03-17 | 中国电子科技集团公司第四十八研究所 | Interval adjustable silicon carbide epitaxial equipment induction heating device |
Non-Patent Citations (1)
| Title |
|---|
| 张兆星: "大尺寸SiC单晶生长炉温场分布的研究", 中国优秀硕士学位论文全文数据库信息科技辑, no. 12, pages 135 - 111 * |
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| CN114411237B (en) | 2023-11-28 |
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