CN114411091A - Mask, manufacturing method and manufacturing clamp - Google Patents
Mask, manufacturing method and manufacturing clamp Download PDFInfo
- Publication number
- CN114411091A CN114411091A CN202210105205.0A CN202210105205A CN114411091A CN 114411091 A CN114411091 A CN 114411091A CN 202210105205 A CN202210105205 A CN 202210105205A CN 114411091 A CN114411091 A CN 114411091A
- Authority
- CN
- China
- Prior art keywords
- mask
- coating
- mask plate
- plate body
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 32
- 238000000576 coating method Methods 0.000 claims abstract description 124
- 239000011248 coating agent Substances 0.000 claims abstract description 120
- 238000011068 loading method Methods 0.000 claims description 37
- 238000004140 cleaning Methods 0.000 claims description 14
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 8
- 238000005507 spraying Methods 0.000 claims description 8
- 238000001816 cooling Methods 0.000 claims description 4
- 238000011049 filling Methods 0.000 claims description 4
- 230000001681 protective effect Effects 0.000 claims description 4
- 238000007665 sagging Methods 0.000 abstract description 18
- 239000000463 material Substances 0.000 abstract description 15
- 230000005484 gravity Effects 0.000 abstract description 7
- 238000002156 mixing Methods 0.000 abstract description 7
- 229910001111 Fine metal Inorganic materials 0.000 abstract description 4
- 238000002360 preparation method Methods 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 description 15
- 239000002184 metal Substances 0.000 description 15
- 230000007246 mechanism Effects 0.000 description 7
- 238000001704 evaporation Methods 0.000 description 6
- 230000008020 evaporation Effects 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 239000011368 organic material Substances 0.000 description 5
- 230000003068 static effect Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 239000003814 drug Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 238000007751 thermal spraying Methods 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000012044 organic layer Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 229910001256 stainless steel alloy Inorganic materials 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
The invention discloses a mask, a manufacturing method and a manufacturing clamp, and relates to the technical field of display equipment; the technical scheme is as follows: the working face of the mask plate body is arched upwards, the structural strength of the mask plate body can be improved, the sagging amount of the mask plate body due to the rigidity of the material, gravity and thermal expansion is reduced, or the mask plate body is prevented from sagging, so that the fine metal mask plate is supported through the mask plate body, the sagging amount of the fine metal mask plate is reduced, or the fine metal mask plate is prevented from sagging, the color mixing proportion and the color mixing risk of the display screen are reduced, and the yield of the display screen is improved. The mask plate manufacturing method can obtain the mask plate body by coating a tensile stress coating on the working surface of the mask plate body or coating a compressive stress coating on the structural surface of the mask plate body. Mask version preparation anchor clamps load frame and backup pad including the mask version frame, and the backup pad is located and loads frame upper end and each side and load the lateral wall that the frame corresponds and be connected, and accessible backup pad can provide the support to the mask version.
Description
Technical Field
The invention relates to the technical field of display equipment, in particular to a mask, a manufacturing method and a manufacturing clamp.
Background
In the use process of the metal fine mask, due to the gravity and thermal expansion, a certain drooping amount (different drooping amounts, such as 500 microns, according to the sizes of the masks) exists, so that the supporting mask is adopted for supporting, the drooping amount of the mask is improved, the drooping amount of the fine metal mask is controlled below 200 microns, the higher the drooping amount of the mask is, the higher the proportion and risk of color mixing are, and particularly, the influence on a high-resolution product is serious; in addition, when vacuum chamber evaporation is performed, the mask and the glass generate static electricity, which may break down the evaporated organic material and the backplane circuit.
Disclosure of Invention
The method aims at solving the technical problems that the display screen has high defective rate and evaporation static electricity caused by large drooping amount of the existing metal fine mask and public layer mask during working; the invention provides a mask, a manufacturing method and a manufacturing clamp, which can reduce the drooping amount of a metal fine mask during working and prevent electrostatic breakdown so as to reduce the color mixing proportion, the color mixing risk and the electrostatic breakdown risk of a display screen and improve the yield of the display screen.
The invention is realized by the following technical scheme:
in a first aspect, the invention provides a mask, which comprises a mask body, wherein a working surface of the mask body is arched upwards.
In an alternative embodiment, the working surface of the reticle body is coated with a tensile stress coating.
In an alternative embodiment, the thickness of the tensile-stressed coating is greater in the middle than at both ends.
In an alternative embodiment, the tensile stress coating is one of an aluminum oxide coating and a diamond-like coating.
In an alternative embodiment, the structural surface of the mask body is covered with a compressive stress coating.
In an alternative embodiment, the thickness of the middle portion of the compressive stress coating is greater than the thickness of the two ends.
In an alternative embodiment, the compressive stress coating is one of an aluminum oxide coating and a diamond-like coating.
In a second aspect, the present invention provides a method for manufacturing a mask, comprising the following steps:
s1, obtaining a mask plate body;
and S2, coating a tensile stress coating on the mask plate body (working surface or coating a compressive stress coating on the structural surface of the mask plate body).
Specifically, step S2 includes the sub-steps of:
s21, cleaning the mask body;
s22, moving the cleaned mask plate body into coating equipment, vacuumizing the spraying cavity and heating the mask plate body;
s23, cleaning the surface of the mask plate body to be coated;
s24, coating the surface of the mask version body after cleaning;
and S25, cooling the mask version body to room temperature, and filling protective gas into the spraying cavity.
In a third aspect, the invention provides a mask manufacturing fixture, which is used for manufacturing the mask, and comprises a loading frame for loading a frame of the mask, wherein a supporting plate is arranged at the upper end of the loading frame and used for supporting a mask body, each side of the supporting plate is connected with a corresponding side wall of the loading frame, and the projection distance between the supporting plate and the loading frame is adjustable.
The invention has the following beneficial effects:
1. according to the mask provided by the invention, the working surface of the mask body is arched upwards, so that the structural strength of the mask body can be improved, the sagging quantity of the mask body due to the rigidity, gravity and thermal expansion of materials can be reduced, or the mask body is prevented from sagging, so that the metal fine mask is supported by the mask body, the sagging quantity of the metal fine mask is reduced, the color mixing proportion and the color mixing risk of a display screen are reduced, and the yield of the display screen is improved.
2. The mask and the working surface coating of the mask can reduce the risk of electrostatic breakdown of organic materials and a backboard circuit during evaporation of the display screen and improve the production yield of the display screen.
3. According to the mask manufacturing method provided by the invention, the mask body with the working surface arched upwards can be obtained by coating the tensile stress coating on the working surface of the mask body or coating the compressive stress coating on the structural surface of the mask body, so that the structural strength of the support plate body is improved, the sagging quantity of the mask body caused by the rigidity, gravity and thermal expansion of the material is reduced, or the sagging quantity of the mask body caused by the rigidity, gravity and thermal expansion of the material is offset.
4. The mask manufacturing clamp comprises a mask frame loading frame and a supporting plate, wherein the supporting plate is positioned at the upper end of the loading frame, each side of the supporting plate is connected with the corresponding side wall of the loading frame, and the supporting plate can support the mask when the mask is placed in the mask frame.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained from the drawings without inventive effort.
FIG. 1 is a schematic diagram of a mask according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a mask manufacturing fixture according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a height adjusting mechanism according to an embodiment of the present invention.
Reference numerals:
the mask comprises a mask body 1, a loading frame 2, a mask frame 3, a connecting piece 31, a height adjusting mechanism 4, a vertical rod 41, an adjusting cushion block 42, a fixing nut 43 and a supporting plate 5.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the embodiments of the present application, the terms "central," "upper," "lower," "left," "right," "vertical," "longitudinal," "lateral," "horizontal," "inner," "outer," "front," "rear," "top," "bottom," and the like refer to orientations or positional relationships that are conventionally used in the manufacture of the present application, or that are routinely understood by those of ordinary skill in the art, but are merely used to facilitate the description and to simplify the description and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be considered limiting of the present application.
In the description of the present invention, unless otherwise expressly specified or limited, the terms "disposed," "open," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.
Example 1
With reference to fig. 1, the embodiment provides a mask, which includes a mask body 1, and a working surface of the mask body 1 is arched.
Specifically, the working surface of the reticle body 1 is curved by bending such as press bending or coating bending.
In the actual production process of the applicant, the metal fine reticle is usually supported by the support plate body 1. It can be understood that the sagging amount of the support plate body 1 is smaller than that of the metal fine mask plate, so that the sagging amount of the metal fine mask plate is reduced to a certain extent, but the sagging amount of the metal fine mask plate is limited due to the rigidity of the material of the support plate body 1, gravity and the existence of the sagging amount of the support plate expanded by heat, for example, the sagging amount of the metal fine mask plate is reduced from 500 μm to 200 μm;
in addition, when the vacuum chamber is evaporated, static electricity is generated between the mask plate and the glass, which may break down the evaporated organic material and the back plate circuit, and the reason for this is that the metal fine mask plate and the organic material or the back plate circuit are rubbed or separated during alignment during vacuum evaporation, or the organic layer or the back plate circuit and the mask plate which are tightly adhered to each other are transferred by electrons in a high temperature environment (40 ℃ to 150 ℃) during material evaporation.
And the mask version that this embodiment provided, 1 working face of mask version body is upwarped, can improve the structural strength of mask version body 1, can reduce the flagging volume of mask version body 1 because of rigidity, gravity and the thermal expansion of material itself, or avoid the flagging of mask version body. Thereby when supporting the meticulous mask version of metal through mask version body 1, can reduce the flagging volume of the meticulous mask version of metal or avoid the meticulous mask version of metal to hang down, can make the meticulous mask version of metal keep leveling to reduce display screen colour mixture proportion and colour mixture risk, improve the yield of display screen.
The mask that this embodiment provided, mask work face coating, coating material can select high impedance material, and then has promoted the dielectric constant coefficient between backplate glass and the mask for after the static produced, this electric capacity can not be punctureed to static, reduces the risk that organic material and backplate circuit puncture, improves the yield of display screen.
Example 2
With reference to fig. 1, the present embodiment provides a mask, based on the structure and principle described in embodiment 1, the present embodiment coats a tensile stress coating (coating stress is negative) on the working surface of the mask body 1, for example, by using surface coating techniques such as thermal spraying, sputtering, and magnetron, the tensile stress coating is coated on the working surface of the mask body 1, so that the working surface of the mask body 1 is arched upward. Meanwhile, the working surface of the mask plate body 1 is coated with the coating, so that the wear resistance of the mask plate body can be improved.
It can be understood that the reticle body 1 includes an upper end surface and a lower end surface, the upper end surface is a working surface, and the lower end surface is only one structural surface of the reticle body 1, which is referred to as a structural surface in this embodiment.
It should be understood that, in order to make the working surface of the reticle body 1 arch upwards, the thickness of the middle part of the tensile stress coating is greater than the thickness of the two ends, the thickness of the two ends in the length direction of the tensile stress coating can be smaller than the thickness of the middle part, and the thickness of the two ends in the width direction of the tensile stress coating can also be smaller than the thickness of the middle part. It is known that the amount of projection of the support plate is more easily controlled by controlling the thickness variation in the length direction of the coating layer, and therefore, the thickness of both ends in the length direction of the tensile stress coating layer is generally smaller than that of the middle portion.
The tensile stress coating is made of a material which only needs to have enough adhesive force with the support plate body 1, in the embodiment, the tensile stress coating is one of an aluminum oxide coating and a diamond-like carbon coating, and of course, the tensile stress coating can be other types of coatings. Wherein, the tensile stress coating is coated on the mask body 1, which can enhance the wear resistance of the surface.
It should be noted that the stress of the working surface coating of the mask body 1 can be controlled by controlling the parameters of the coating, for example; for example, when the aluminum oxide coating is thermally sprayed, the current is 150A, and the voltage is 32V, the stress of the working surface coating of the mask plate body 1 is-5 Pa.
Example 3
With reference to fig. 1, the present embodiment provides a mask, based on the structure and principle described in embodiment 1, the present embodiment coats a compressive stress coating (coating stress is positive) on the structural surface of the mask body 1, and for example, by using surface coating technologies such as thermal spraying, sputtering, and magnetron, the structural surface of the mask body 1 is coated with the compressive stress coating, so that the working surface of the mask body 1 is arched.
It can be understood that the reticle body 1 includes an upper end surface and a lower end surface, the upper end surface is a working surface, and the lower end surface is only one structural surface of the reticle body 1, which is referred to as a structural surface in this embodiment.
It should be understood that, in order to make the working surface of the reticle body 1 arch upwards, the thickness of the middle part of the compressive stress coating is greater than the thickness of the two ends, the thickness of the two ends in the length direction of the compressive stress coating can be less than the thickness of the middle part, or the thickness of the two ends in the width direction of the compressive stress coating can be less than the thickness of the middle part. It can be known that, through the thickness variation of accuse coating length direction, the protruding volume of 1 working face of control mask version body more easily, consequently, the both ends thickness of compressive stress coating length direction is less than middle part thickness usually.
The material of the compressive stress coating only needs to meet the requirement of having enough adhesive force with the mask plate body 1, and in the embodiment, the compressive stress coating is one of an alumina coating and a diamond-like carbon coating, and can be other types of coatings.
It should be noted that, the structural surface coating stress of the mask body 1 can be controlled by controlling the parameters of the coating, for example; for example, when the aluminum oxide coating is thermally sprayed, the current is 250A, and the voltage is 36V, the structural surface coating stress of the mask plate body 1 is 5 Pa.
Example 4
The embodiment provides a mask manufacturing method for manufacturing the mask described in embodiment 2, including the following steps:
s1, obtaining a mask plate body 1;
s2, coating a tensile stress coating on the working surface of the mask plate body 1, for example, coating the tensile stress coating on the working surface of the mask plate body 1 through surface coating technologies such as thermal spraying, sputtering and magnetic control, so that the working surface of the mask plate body 1 is arched upwards.
Wherein, step S2 includes the sub-steps of:
s21, cleaning the mask plate body 1;
when the mask body 1 is cleaned, the cleaning liquid adopts alkalescent liquid medicine and is washed by deionized water, so that the situation that no liquid medicine is left on the surface of the mask body 1 and the mask body is dried is ensured.
S22, moving the cleaned mask plate body 1 into coating equipment, vacuumizing a spraying cavity and heating the mask plate body 1;
after mask version body 1 got into coating equipment, carried out evacuation and heating earlier, heating temperature be 80 ~ 100 ℃, than mask version body 1 surface temperature during the coating by vaporization during 10 ~ 20 ℃ can, vacuum reaches 0.001pa, guarantees that mask version body 1, support anchor clamps and loading frame fully degas, avoid influencing evaporation coating material's purity.
S23, cleaning the surface of the mask plate body 1 to be coated to remove the oxide layer on the surface of the mask plate to be coated and ensure that the coating and the mask plate body 1 have enough bonding force.
S24, coating the surface of the mask plate body 1 after cleaning;
specifically, the thickness of the two ends of the tensile stress coating in the length direction is smaller than that of the middle part, and the tensile stress coating is one of an aluminum oxide coating and a diamond-like carbon coating, but other types of coatings can be adopted.
When the aluminum oxide coating is thermally sprayed, the current is 150A, the voltage is 32V, and the stress of the working surface coating of the mask plate body 1 is-5 Pa. (ii) a
S25, cooling the mask body 1 to room temperature, and filling protective gas into the spraying cavity, such as nitrogen, to increase the pressure in the coating cavity to normal pressure.
Example 5
The embodiment provides a method for manufacturing a mask, which is used for manufacturing the mask described in embodiment 3 and comprises the following steps:
s1, obtaining a mask plate body 1;
s2, coating a compressive stress coating on the working surface of the mask plate body 1, for example, coating the compressive stress coating on the structural surface of the mask plate body 1 through surface coating technologies such as thermal spraying, sputtering and magnetic control, so that the working surface of the mask plate body 1 is arched.
Wherein, step S2 includes the sub-steps of:
s21, cleaning the mask plate body 1;
when the mask body 1 is cleaned, the cleaning liquid adopts alkalescent liquid medicine and is washed by deionized water, so that the situation that no liquid medicine is left on the surface of the mask body 1 and the mask body is dried is ensured.
S22, moving the cleaned mask plate body 1 into coating equipment, vacuumizing a spraying cavity and heating the mask plate body 1;
after mask version body 1 got into coating equipment, carried out evacuation and heating earlier, heating temperature be 80 ~ 100 ℃, than mask version body 1 surface temperature during the coating by vaporization during 10 ~ 20 ℃ can, vacuum reaches 0.001pa, guarantees that mask version body 1, support anchor clamps and loading frame fully degas, avoid influencing evaporation coating material's purity.
S23, cleaning the surface of the mask plate body 1 to be coated to remove the oxide layer on the surface of the mask plate to be coated and ensure that the coating and the mask plate body 1 have enough bonding force.
S24, coating the surface of the mask plate body 1 after cleaning;
specifically, the thickness of the two ends of the length direction of the compressive stress coating is smaller than that of the middle part, and the compressive stress coating is one of an aluminum oxide coating and a diamond-like carbon coating, but other types of coatings can be adopted.
When the aluminum oxide coating is thermally sprayed, the current is 250A, and the voltage is 36V, the structural surface coating stress of the mask plate body 1 is 5 Pa.
S25, cooling the mask body 1 to room temperature, and filling protective gas into the spraying cavity, such as nitrogen, to increase the pressure in the coating cavity to normal pressure.
Example 6
The embodiment provides a method for manufacturing a mask, which is used for manufacturing the mask described in any one of embodiments 1 to 3, and comprises the following steps:
s1, fixing the supporting plate 5 on the loading frame 2 according to the preset height according to the depth of the mask frame 3 and the sagging amount of the mask during coating, namely selecting the adjusting cushion block 42 with the corresponding thickness to be installed between the connecting piece 31 and the loading frame 2;
s2, loading the mask plate frame 3 into the loading frame 2, and enabling the supporting plate 5 to be located in the mask plate frame 3;
and S3, placing the mask plate body 1 in the mask plate frame 3, and performing coating treatment.
It should be noted that step S21 of embodiment 4 or embodiment 5 needs to be executed before clamping the reticle body 1, and steps S22 to S25 of embodiment 4 or embodiment 5 are executed after clamping is completed.
Example 7
The embodiment provides a mask manufacturing fixture, which is used for implementing the method described in embodiment 6, and includes a loading frame 2 for loading a mask frame 3, wherein a supporting plate 5 is arranged at the upper end of the loading frame 2, and each side of the supporting plate 5 is connected with a corresponding side wall of the loading frame 2.
Wherein, the backup pad 5 only needs to satisfy with being connected of loading frame 2, and when mask version frame 3 loaded in loading frame 2, the bellied height of anchor clamps was the sum of the sagging volume of 3 degree of depth of mask version frame and support version during operation. If the depth of the mask plate frame 3 is 30mm and the sagging amount of the support plate during working is 0.2mm, the height of the bulge of the support plate 5 is 3.2 mm.
The size of the inner hole of the mask plate frame 3 is matched with the size of the mask plate, namely, the size difference value between the length of the mask plate frame 3 in the length direction or the width direction and the length of the mask plate in the corresponding direction is 0-0.1mm, so that the length and the width of the supporting plate 5 are both smaller than the length and the width corresponding to the mask plate body 1, and the mask plate body 1 is prevented from being scratched when the mask plate 1 is clamped or disassembled.
In order to adapt to the mask plates with different sagging amounts, the projection distance between the support plate and the loading frame 2 is adjustable, namely the height of the support plate 5 on the loading frame 2 is adjustable. It can be understood that the supporting plate 5 can be connected to the loading frame 2 through the connecting members 31 having the shapes of the sheet-shaped connecting member 31, the rod-shaped connecting member 31, the U-shaped connecting member 31, the L-shaped connecting member 31, and the like, and only the connecting members 31 need to be prevented from affecting the installation of the mask supporting frame. Two connecting members 31 are provided at each side of the support plate 5, thereby ensuring stability of the connection of the support plate 5 with the loading frame 2.
In detail, referring to fig. 2, for the embodiment that the height of the supporting plate 5 is adjustable on the loading frame 2, each side of the loading frame 2 is provided with a height adjusting mechanism 4, and each side of the supporting plate 5 is connected with the corresponding height adjusting mechanism 4 through a connecting piece 31. The height adjusting mechanism 4 can be a screw adjusting structure, a micro linear driver (piezoelectric ceramic driver) and the like.
With reference to fig. 3, in order to precisely control the height of the supporting plate 5 and ensure the stability of the height adjusting mechanism 4, in this embodiment, the height adjusting mechanism 4 includes a vertical rod 41 connected to the loading frame 2, an adjusting pad 42, a connecting member 31 and a fixing nut 43 are sequentially arranged on the vertical rod 41 from bottom to top, the adjusting pad 42 and the connecting member 31 are both movably connected to the vertical rod 41, so as to change the height of the supporting plate by replacing the adjusting pad 42 with different thicknesses.
For the material of the loading frame 2, the connecting member 31 and the supporting plate 5, stainless steel or iron-nickel alloy is usually adopted, and in order to reduce the production cost, in this embodiment, the material of the loading frame 2, the supporting plate 5 and the connecting member 31 is stainless steel.
Before coating, the mask plate body 1 is fixed to the loading frame 2, the supporting plate 5 is made to cling to the non-coating surface of the mask plate body 1, the supporting plate 5 is then fixed on the loading frame 2 through the connecting rod 31, and the adjusting cushion block 42 with the proper height is selected to ensure that the protruding height of the working surface of the mask plate body 1 is the target value. When coating, the mask plate body 1 is vertical to a horizontal plane.
The foregoing is only a preferred embodiment of the present invention, and the present invention is not limited thereto in any way, and any simple modification, equivalent replacement and improvement made to the above embodiment within the spirit and principle of the present invention still fall within the protection scope of the present invention.
Claims (10)
1. The mask is characterized by comprising a mask body (1), wherein the working surface of the mask body (1) is arched upwards.
2. Reticle according to claim 1, characterized in that the working surface of the reticle body (1) is coated with a tensile stress coating.
3. The reticle of claim 2, wherein the tensile stress coating has a thickness in a middle portion that is greater than a thickness at both ends.
4. The reticle of claim 2, wherein the tensile stress coating is one of an aluminum oxide coating and a diamond-like coating.
5. Reticle according to claim 1, characterized in that the structured surface of the reticle body (1) is covered with a compressive stress coating.
6. The reticle of claim 5, wherein the compressive stress coating has a thickness in a middle portion that is greater than a thickness at both ends.
7. The reticle of claim 5, wherein the compressive stress coating is one of an aluminum oxide coating and a diamond-like coating.
8. A mask manufacturing method is characterized by comprising the following steps:
s1, obtaining a mask plate body (1);
s2, coating a tensile stress coating on the working surface of the mask plate body (1) or coating a compressive stress coating on the structural surface of the mask plate body (1).
9. The method for manufacturing the mask as claimed in claim 8, wherein the step S2 includes the sub-steps of:
s21, cleaning the mask plate body (1);
s22, moving the cleaned mask plate body (1) into coating equipment, vacuumizing a spraying cavity and heating the mask plate body (1);
s23, cleaning the surface to be coated of the mask plate body (1);
s24, coating the surface of the mask plate body (1) after cleaning;
s25, cooling the mask plate body (1) to room temperature, and filling protective gas into the spraying cavity.
10. A mask manufacturing clamp is used for manufacturing a mask according to any one of claims 1 to 7 and comprises a loading frame (2) used for loading a mask frame (3), and is characterized in that a supporting plate (5) is arranged at the upper end of the loading frame (2), the supporting plate (5) is used for supporting a mask body (1), each side of the supporting plate (5) is connected with a corresponding side wall of the loading frame (2), and the projection distance from the supporting plate (5) to the loading frame (2) is adjustable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210105205.0A CN114411091A (en) | 2022-01-28 | 2022-01-28 | Mask, manufacturing method and manufacturing clamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210105205.0A CN114411091A (en) | 2022-01-28 | 2022-01-28 | Mask, manufacturing method and manufacturing clamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114411091A true CN114411091A (en) | 2022-04-29 |
Family
ID=81279107
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210105205.0A Pending CN114411091A (en) | 2022-01-28 | 2022-01-28 | Mask, manufacturing method and manufacturing clamp |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114411091A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115896690A (en) * | 2022-11-30 | 2023-04-04 | 京东方科技集团股份有限公司 | Fine mask |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106048521A (en) * | 2016-06-12 | 2016-10-26 | 鄂尔多斯市源盛光电有限责任公司 | Preparation method of metal mask plate and metal mask plate |
| CN206692714U (en) * | 2017-04-14 | 2017-12-01 | 信利（惠州）智能显示有限公司 | A kind of accurate mask plate framework |
| CN108385058A (en) * | 2018-05-31 | 2018-08-10 | 京东方科技集团股份有限公司 | The manufacturing method of mask plate and mask plate |
| CN108943670A (en) * | 2018-06-28 | 2018-12-07 | 信利光电股份有限公司 | A kind of 3D cover board and its processing method |
| CN112011757A (en) * | 2020-08-26 | 2020-12-01 | 昆山国显光电有限公司 | Mask and evaporation device |
| CN112251716A (en) * | 2020-10-21 | 2021-01-22 | 云谷（固安）科技有限公司 | Mask plate preparation method and mask plate |
-
2022
- 2022-01-28 CN CN202210105205.0A patent/CN114411091A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106048521A (en) * | 2016-06-12 | 2016-10-26 | 鄂尔多斯市源盛光电有限责任公司 | Preparation method of metal mask plate and metal mask plate |
| CN206692714U (en) * | 2017-04-14 | 2017-12-01 | 信利（惠州）智能显示有限公司 | A kind of accurate mask plate framework |
| CN108385058A (en) * | 2018-05-31 | 2018-08-10 | 京东方科技集团股份有限公司 | The manufacturing method of mask plate and mask plate |
| CN108943670A (en) * | 2018-06-28 | 2018-12-07 | 信利光电股份有限公司 | A kind of 3D cover board and its processing method |
| CN112011757A (en) * | 2020-08-26 | 2020-12-01 | 昆山国显光电有限公司 | Mask and evaporation device |
| CN112251716A (en) * | 2020-10-21 | 2021-01-22 | 云谷（固安）科技有限公司 | Mask plate preparation method and mask plate |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115896690A (en) * | 2022-11-30 | 2023-04-04 | 京东方科技集团股份有限公司 | Fine mask |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6881271B2 (en) | Fixing member for evaporation apparatus | |
| TWI313304B (en) | Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof | |
| US7534301B2 (en) | RF grounding of cathode in process chamber | |
| US8264813B2 (en) | Electrostatic chuck device | |
| CN101728297A (en) | Electrostatic chucking apparatus and method for manufacturing the same | |
| US20070146961A1 (en) | Electrostatic chuck | |
| US20060266643A1 (en) | Elastomer bonding of large area sputtering target | |
| JP6703078B2 (en) | Film forming apparatus and method for manufacturing organic EL display device using the same | |
| WO2005004229A1 (en) | Electrostatic chuck for substrate stage, electrode used for the chuck, and treating system having the chuck and the electrode | |
| KR101441858B1 (en) | Reducing electrostatic charge by roughening the susceptor | |
| WO2000072376A1 (en) | Electrostatic chuck and treating device | |
| US6849832B2 (en) | Evaporation apparatus | |
| KR20030082472A (en) | Electrostatic chucking stage and substrate processing apparatus | |
| JP2006066079A (en) | Manufacturing method of envelope and manufacturing device of the same | |
| TW201812987A (en) | Electrostatic chuck and manufacturing method for the same | |
| CN111261573A (en) | Support frame, vacuum drying device, drying system and substrate drying method | |
| CN114411091A (en) | Mask, manufacturing method and manufacturing clamp | |
| US20030047589A1 (en) | Joined article of a supporting member for a semiconductor wafer and a method of producing the same | |
| CN101633989A (en) | Electrode material | |
| US20020083898A1 (en) | Susceptor with bi-metal effect | |
| JP2004353085A (en) | Evaporation apparatus | |
| KR20100032310A (en) | Method of making a vacuum vessel | |
| KR20200044747A (en) | Producing method of mask and producing method of mask integrated frame | |
| CN111663102A (en) | Evaporation equipment and evaporation process | |
| JP4059158B2 (en) | Semiconductor manufacturing equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |