CN114397730A - Double-cantilever inverted cone spot conversion structure for waveguide coupling - Google Patents
Double-cantilever inverted cone spot conversion structure for waveguide coupling Download PDFInfo
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- CN114397730A CN114397730A CN202210093924.5A CN202210093924A CN114397730A CN 114397730 A CN114397730 A CN 114397730A CN 202210093924 A CN202210093924 A CN 202210093924A CN 114397730 A CN114397730 A CN 114397730A
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- 238000010168 coupling process Methods 0.000 title claims abstract description 35
- 230000008878 coupling Effects 0.000 title claims abstract description 34
- 238000005859 coupling reaction Methods 0.000 title claims abstract description 34
- 238000006243 chemical reaction Methods 0.000 title claims abstract description 22
- 238000005253 cladding Methods 0.000 claims abstract description 29
- 239000000758 substrate Substances 0.000 claims abstract description 21
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 13
- 229910052710 silicon Inorganic materials 0.000 claims description 13
- 239000010703 silicon Substances 0.000 claims description 13
- 239000000377 silicon dioxide Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 5
- 230000000694 effects Effects 0.000 claims description 3
- 239000000835 fiber Substances 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 claims 1
- 230000008054 signal transmission Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 10
- 230000003287 optical effect Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12004—Combinations of two or more optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12152—Mode converter
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Abstract
The invention discloses a double-cantilever inverted cone speckle conversion structure for waveguide coupling, which consists of an input waveguide, a multimode waveguide interference region, two output waveguides and a parabolic inverted cone structure at the rear end of the output waveguide. Compared with the traditional single inverted cone coupler, the double-cantilever parabolic inverted cone coupler has the advantages that the alignment tolerance is improved by adopting the double-cantilever parabolic inverted cone structure, the small mode field of light transmitted by the smaller-size waveguide can be converted into the large mode field, so that the light is efficiently coupled into the larger-size waveguide, and meanwhile, the cladding of the parabolic inverted cone structure is suspended, so that the substrate leakage is avoided, and the loss in light signal transmission is reduced.
Description
Technical Field
The invention relates to the technical field of photonic integration, in particular to a double-cantilever inverted cone spot conversion structure for waveguide coupling.
Background
With the increasing global informatization process, the optical communication rate is increasing, and the device integration level is becoming high, and various discrete devices are uniformly concentrated on a small-size chip and coupled with optical fibers at a transmitting end and a receiving end.
However, the waveguides of different materials, such as silicon waveguide, silicon nitride waveguide, silica waveguide, single mode fiber, etc., have very different sizes, the width of the silicon waveguide is usually several hundred nanometers, the width of the silicon nitride waveguide is about 2um, the width of the input/output waveguide of the silica material arrayed waveguide grating is about 4um, and the diameter of the single mode fiber is 8-10 um. Therefore, if direct alignment coupling is performed between different waveguides, large mode field mismatch loss is generated, transmission of optical signals is damaged, and coupling efficiency between devices is reduced.
Therefore, coupling between waveguides of different sizes requires couplers to solve the problem of mode field mismatch due to large size differences. To address such issues, many coupler structures have been proposed to improve device coupling efficiency, wherein the main coupling scheme is an inverted tapered waveguide coupler based on horizontal coupling.
The traditional inverted cone waveguide coupler has the advantages of insensitivity to wavelength and polarization, small size and the like. But the alignment tolerance is small and light waves leak from the cladding into the silicon substrate during coupling, reducing the coupling efficiency to some extent.
Disclosure of Invention
Aiming at the technical problems that the traditional inverted cone waveguide coupler is small in alignment tolerance and coupling efficiency is low due to the fact that light waves leak from a cladding layer to a silicon substrate in the coupling process, the invention provides a double-cantilever inverted cone Mode spot conversion structure based on an MMI (Multi-Mode Interference Multi-Mode Interference beam splitter), and efficient coupling of waveguides with different sizes is achieved under the condition of high alignment tolerance.
In order to achieve the above purpose, the invention provides the following technical scheme:
the invention provides a double-cantilever inverted cone spot-size conversion structure for waveguide coupling, which consists of an input waveguide, a multimode waveguide interference region, two output waveguides and a parabolic inverted cone structure at the rear end of the output waveguide.
Further, the input waveguide is a small-sized single-mode waveguide.
Further, the input waveguide is a silicon waveguide, a silicon nitride waveguide or a doped silicon dioxide waveguide.
Further, the cladding material is silica.
Further, a substrate is arranged below the cladding layer.
Further, the substrate material is silicon.
Furthermore, the substrate is hollowed out corresponding to the two output waveguides and the parabolic inverted cone structure at the rear end of the output waveguides, so that a gap between the substrate and the cladding is formed.
Furthermore, two sides of the cladding corresponding to the two output waveguides and the parabolic inverted cone structure at the rear end of the output waveguides are hollowed out to form a cladding gap.
Further, the large-size waveguide is a single-mode optical fiber.
The invention also provides a waveguide coupler which comprises the double-cantilever inverted cone mode spot conversion structure for waveguide coupling.
Compared with the prior art, the invention has the beneficial effects that:
compared with the traditional single inverted cone coupler, the double-cantilever inverted cone mode spot conversion structure for waveguide coupling and the waveguide coupler adopt the double-cantilever parabolic inverted cone structure, improve the alignment tolerance, and convert a small mode field of light transmitted by a smaller-size waveguide into a large mode field, so that the light is efficiently coupled into a larger-size waveguide, and meanwhile, a cladding layer of the parabolic inverted cone structure is suspended, thereby avoiding substrate leakage and reducing loss during optical signal transmission.
Drawings
In order to more clearly illustrate the embodiments of the present application or technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments described in the present invention, and other drawings can be obtained by those skilled in the art according to the drawings.
Fig. 1 is a perspective view of a double-cantilever inverted-cone spot conversion structure for waveguide coupling according to an embodiment of the present invention;
fig. 2 is a front view of a double-cantilever inverted-cone spot conversion structure for waveguide coupling according to an embodiment of the present invention;
FIG. 3 is a side cross-sectional view of a double-cantilever inverted-cone spot conversion structure for waveguide coupling according to an embodiment of the present invention;
FIG. 4 is a top view of a double-cantilever inverted-cone spot conversion structure for waveguide coupling according to an embodiment of the present invention;
fig. 5 is a schematic view of an inverted cone structure with a parabolic shape according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention are clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1-4, an embodiment of the present invention provides a double-cantilever inverted-cone speckle conversion structure 9 for waveguide coupling, which is composed of an input waveguide 1, a multimode waveguide interference region 2, two output waveguides 3, and a parabolic inverted-cone structure 4 at the rear end of the output waveguide, wherein a light wave enters the multimode waveguide interference region 2 from the input waveguide 1, and the input light wave generates a plurality of images on the cross section of the output waveguide 3 by using a self-image effect, so as to achieve the purpose of splitting the light wave. The split light wave is transmitted in the output waveguide 3, the cross section of the output waveguide 3 is gradually reduced through the parabolic inverted cone structure 4, the effective refractive index of the waveguide is reduced, the limiting capacity on the light wave is weakened, and the light waves of a plurality of output waveguides are diffused into the cladding, so that the purpose of enlarging the size of the mode spot is achieved, and the coupling with the large-size waveguide is facilitated.
Wherein, the input waveguide 1 is a small-sized single-mode waveguide. Specifically, the input waveguide 1 is a silicon waveguide, a silicon nitride waveguide, a doped silicon dioxide waveguide, or the like.
The length of the input waveguide 1 and the length range of the front end of the output waveguide 3 are 300um-2000um, and the length of the parabolic inverted cone structure 4 is not less than 200um and is 200um-2000um, so that the width change is slow, and the purpose of reducing the loss is achieved.
The physical process of the self-image effect is: when the light wave in the single-mode input waveguide enters the multimode waveguide region, the adiabatic property is destroyed due to the difference of the widths of the two, so that each order of guided modes supported by the multimode waveguide are excited, the modes meet a certain phase relation at a specific position of the multimode waveguide to generate interference due to the phase difference generated by the different propagation constants of the modes in the multimode waveguide, and one or more images of the input light wave are generated on the section, so that the purpose of splitting the light wave is achieved.
The inverted cone structure of the present invention takes a parabolic shape, and as shown in fig. 5, two sides of the inverted cone structure are determined by two parabolic equations. The upper and lower widths are respectively WOUTAnd WINWherein W isOUTIs an inverted coneEnd width of the profile, WINThe width of the starting end of the inverted cone structure. Parabolic equation y ═ a (x-m)2The constant a, m can be based on WINAnd WOUTThe numerical value of (2) is self-regulated, and the aim is to achieve the best model performance by regulating parameters. Because the effective refractive index changes nonlinearly along with the change of the waveguide width, the effective refractive index changes at different width intervals along with the change rate of the waveguide width, and if a linear inverted cone structure is adopted, the effective refractive index of the waveguide changes too fast at partial intervals, so that extra loss is generated. Simulation results show that the power coupling efficiency of the linear inverted cone structure is 93.5%, the loss is 6.5%, the efficiency of the parabolic inverted cone structure is 95.4%, and the loss is 4.6%. The parabolic inverted cone structure changes slowly in the interval where the effective refractive index is sensitive to the width change and quickly in the insensitive interval, so that the optical transmission loss is reduced while the length of the device is not increased.
The outside of the double-cantilever inverted cone spot-size conversion structure 9 is covered with a cladding 5 with a refractive index lower than that of the structure, and specifically, the cladding 5 is made of silicon dioxide.
Since the light wave leaks from the two inverted cone structures to the cladding, the size of the output light spot can be controlled by adjusting the distance between the double cantilevers. Therefore, the influence of the error of a single inverted cone structure on the coupling of the whole device is smaller than that of a traditional coupler with a single inverted cone structure, and the error tolerance of the whole structure is higher than that of a traditional model.
As shown in fig. 1 to 4, the present invention further provides a waveguide coupler, which comprises the above-mentioned double-cantilever inverted-cone spot-size converting structure 9 for waveguide coupling, a cladding 5 and a substrate 6.
Wherein said substrate 6 is arranged below the cladding 5. Specifically, the substrate 6 is made of silicon.
During the scattering of the light wave to the cladding, part of the energy of the light wave leaks to the silicon substrate below the cladding, so that the substrate leakage loss is generated. Therefore, the silicon substrate in the embodiment of the present invention is hollowed out at the positions corresponding to the two output waveguides and the parabolic inverted cone structure at the rear end of the output waveguides, and the silicon substrate is not changed at the rest positions, so as to form the substrate-cladding gap 7.
Meanwhile, two sides of the cladding corresponding to the two output waveguides and the parabolic inverted cone structure at the rear end of the output waveguides are hollowed to form a cladding gap 8, so that the light waves are guaranteed to be diffused to the region of the middle cladding as intensively as possible, and the substrate leakage loss of the light waves is reduced. The size of the intermediate cladding region should be similar to the large size of the waveguide to be coupled, so that the converted large mode field matches the coupled waveguide. Specifically, the large-size waveguide is, for example, an optical fiber.
Compared with the traditional single inverted cone coupler, the double-cantilever inverted cone coupler has the advantages that the double-cantilever inverted cone structure is adopted, the alignment tolerance is improved, meanwhile, the cladding where the inverted cone structure is located is suspended, the substrate leakage is avoided, and the loss in optical signal transmission is reduced.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
All the embodiments in the present specification are described in a related manner, and the same and similar parts among the embodiments may be referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, apparatus embodiments, electronic device embodiments, computer-readable storage medium embodiments, and computer program product embodiments are described with relative simplicity as they are substantially similar to method embodiments, where relevant only as described in portions of the method embodiments.
The above-mentioned embodiments are only specific embodiments of the present application, and are used for illustrating the technical solutions of the present application, but not limiting the same, and the scope of the present application is not limited thereto, and although the present application is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: those skilled in the art can still make modifications or easily conceive of changes to the technical solutions described in the foregoing embodiments, or make equivalents to some of them, within the technical scope of the present disclosure; such modifications, changes or substitutions do not depart from the spirit and scope of the present disclosure, which should be construed in light of the above teachings. Are intended to be covered by the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (10)
1. A double-cantilever inverted cone spot conversion structure for waveguide coupling is characterized by comprising an input waveguide, a multimode waveguide interference region, two output waveguides and a parabolic inverted cone structure at the rear end of the output waveguide, wherein light waves enter the multimode waveguide interference region from the input waveguide, a plurality of images are generated on the section of the output waveguide by using a self-imaging effect, the split light waves are transmitted in the output waveguide, the cross section of the output waveguide is gradually reduced through the parabolic inverted cone structure, and the light waves of a plurality of output waveguides are diffused into a cladding so as to be coupled with a large-size waveguide.
2. The structure of claim 1, wherein the input waveguide is a small-sized single-mode waveguide.
3. The double-cantilever inverted-cone spot conversion structure for waveguide coupling according to claim 1, wherein the input waveguide is a silicon waveguide, a silicon nitride waveguide or a doped silica waveguide.
4. The double-cantilever inverted-cone spot conversion structure for waveguide coupling according to claim 1, wherein the cladding material is silica.
5. The double-cantilever inverted-cone spot conversion structure for waveguide coupling according to claim 1, wherein a substrate is disposed below the cladding layer.
6. The double-cantilever inverted-cone spot conversion structure for waveguide coupling according to claim 5, wherein the substrate material is silicon.
7. The double-cantilever inverted-cone spot conversion structure for waveguide coupling according to claim 5, wherein the substrate is hollowed out corresponding to the two output waveguides and the parabolic inverted-cone structures at the rear ends of the output waveguides to form a gap between the substrate and the cladding.
8. The double-cantilever inverted-cone spot-size conversion structure for waveguide coupling according to claim 5, wherein the cladding corresponding to the two output waveguides and the parabolic inverted-cone structure at the rear end of the output waveguides are hollowed out at two sides to form a cladding gap.
9. The structure of claim 1, wherein the large-size waveguide is a single-mode fiber.
10. A waveguide coupler comprising the double-cantilever inverted-cone spot conversion structure for waveguide coupling according to any one of claims 1 to 9.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210093924.5A CN114397730A (en) | 2022-01-26 | 2022-01-26 | Double-cantilever inverted cone spot conversion structure for waveguide coupling |
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| CN202210093924.5A CN114397730A (en) | 2022-01-26 | 2022-01-26 | Double-cantilever inverted cone spot conversion structure for waveguide coupling |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115656975A (en) * | 2022-12-14 | 2023-01-31 | 深圳市速腾聚创科技有限公司 | Waveguide conversion chip, frequency modulation continuous wave laser radar and automatic driving equipment |
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2022
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| CN1839331A (en) * | 2003-08-04 | 2006-09-27 | 皮雷利&C.有限公司 | Integrated optical waveguide structure with low coupling losses to an external optical field |
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| Publication number | Priority date | Publication date | Assignee | Title |
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Application publication date: 20220426 |