CN114396782A

CN114396782A - Processing device for precise semiconductor component

Info

Publication number: CN114396782A
Application number: CN202111642082.6A
Authority: CN
Inventors: 屈辉
Original assignee: Shenzhen Yuhuitai Electronic Technology Co ltd
Current assignee: Shenzhen Yuhuitai Electronic Technology Co ltd
Priority date: 2021-12-29
Filing date: 2021-12-29
Publication date: 2022-04-26
Anticipated expiration: 2041-12-29
Also published as: CN114396782B

Abstract

The invention discloses a processing device for precise semiconductor components, which comprises a conveyor belt, wherein an inclined plate is arranged at one end of the conveyor belt, a workbench is arranged at the end part of the inclined plate, an auxiliary moving part is arranged on the inclined plate, a protective shell is arranged at the bottom of the workbench, a limiting part is arranged at one end of the inclined plate close to the workbench, a plurality of partition plates are arranged on the workbench, a plurality of supporting plates are arranged on the workbench, a driving assembly is arranged at the bottom of the workbench, and a drying assembly is also arranged at the bottom of the workbench, can dry and the stoving effect is better to the bottom of components and parts.

Description

Processing device for precise semiconductor component

Technical Field

The invention relates to the technical field of semiconductor processing, in particular to a processing device for a precise semiconductor component.

Background

With the development of the society, the application of semiconductors is more and more extensive, the conductive capability of semiconductors is between a metal conductor and an insulator, the semiconductors need to be cleaned during processing, and after cleaning, drying treatment is needed for the semiconductors to rapidly enter the working procedure for continuous processing.

Present stoving to semiconductor mainly adopts ordinary stoving case to carry out drying process, but semiconductor substrate size is more and more little, a large amount of semiconductor substrate piles up, if put the base plate and dry at stoving incasement portion, need carry out careful arrangement, scatter the base plate as far as, otherwise lead to drying inhomogeneous easily, and when drying, can not contact each other between the semiconductor substrate, otherwise wind-force can not abundant contact substrate, can influence the effect of drying, therefore, the stoving step, the process is numerous, general drying device is difficult to adjust semiconductor substrate by oneself, semiconductor substrate stoving needs more process to distribute and collect, and semiconductor substrate is integrated complicated, it is uneven to dry, drying efficiency has been influenced to a certain extent. To this end, a processing apparatus for precision semiconductor components is proposed.

Disclosure of Invention

The present invention has been made to solve the above-mentioned problems occurring in the prior art, and an object of the present invention is to provide a processing apparatus for a precision semiconductor device.

In order to achieve the purpose, the invention provides the following technical scheme: a processing device for precision semiconductor components comprises a conveyor belt, wherein an inclined plate is arranged at one end of the conveyor belt, a workbench is arranged at the end part of the inclined plate, the conveyor belt conveys the components to the inclined plate, an auxiliary moving member is arranged on the inclined plate and drives the components to move to the workbench, a protective shell is arranged at the bottom of the workbench, a limiting part is arranged at one end, close to the workbench, of the inclined plate, and the limiting part only allows one component to pass through when the components move from the inclined plate to the workbench;

the utility model discloses a component drying machine, including workstation, drive assembly, workstation, stoving subassembly, the workstation is provided with a plurality of baffles on the workstation, be provided with a plurality of backup pads on the workstation, the workstation bottom is provided with drive assembly, drive assembly orders about the backup pad and to crisscross support to components and parts, the workstation bottom still is provided with the stoving subassembly, and when components and parts were located the workstation, the stoving subassembly blew out hot-blast drying with components and parts.

Preferably, supplementary moving member is including setting up the sealed cowling in the swash plate bottom, a plurality of through-holes have been seted up on the swash plate, the protecting crust lateral wall is provided with air pump one, an air pump output end is provided with gas-supply pipe one, gas-supply pipe one is connected with the sealed cowling, air pump one lets in the air earlier on the sealed cowling through the gas-supply pipe, and the air process the through-hole blowout.

Preferably, the through hole is formed in an inclined manner relative to the inclined plate, and an outlet of the through hole faces the direction of the workbench.

Preferably, the locating part is including setting up the curb plate in the swash plate both sides, the movable groove has been seted up on the curb plate, the swash plate is close to the one end of workstation and is provided with the baffle, the baffle both sides all are provided with the screw rod, the screw rod is located the movable groove, the one end outside that the screw rod is located the curb plate outside is provided with the threaded sleeve, works as when the threaded sleeve is screwed up on the screw rod, threaded sleeve tip butt curb plate surface realizes fixing the baffle.

Preferably, drive assembly is including setting up the driving motor on the protecting crust, it is provided with the drive shaft to rotate on the protecting crust, all be provided with the band pulley in driving motor output and the drive shaft, the band pulley outside is provided with the belt, driving motor drives the drive shaft through the transmission of band pulley and belt and rotates, the drive shaft outside is provided with a plurality of cams, and is a plurality of the protruding end of cam is located different angles, the backup pad bottom is provided with the U template, the cam is located the U template inboard, works as when the drive shaft drives the cam and rotates, the cam orders about the U template and drives the backup pad downstream, the workstation bottom is provided with the fixed plate, be provided with the elastic component on the fixed plate, the elastic component tip is connected bottom the backup pad.

Preferably, the elastic member is a spring.

Preferably, the stoving subassembly is including setting up the air pump two in the protecting crust bottom, two outputs of air pump are provided with air-supply pipe two, air-supply pipe both ends are provided with the connecting pipe, be provided with the standpipe on the connecting pipe, the standpipe tip runs through the workstation and is connected with the baffle, the air outlet groove has been seted up on the baffle for cavity and baffle, be provided with the hose on the connecting pipe, the hose tip is connected with the backup pad, the backup pad is cavity just the air vent has been seted up to the backup pad upper surface.

Preferably, the hose is a bellows.

Compared with the prior art, the invention has the beneficial effects that:

according to the invention, the auxiliary moving piece is arranged on the inclined plate, so that the situation that the components are difficult to move on the inclined plate due to the fact that water exists at the bottoms of the components is prevented, only one component can pass through the baffle plate and the inclined plate through the arrangement of the baffle plate, the components cannot be stacked on the workbench, the components can achieve a better drying effect on the workbench, and the bottoms of the components can be dried and the drying effect is better through the staggered support of the support plates on the components.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic view of a portion of the structure of FIG. 1 according to the present invention;

FIG. 3 is a partial schematic view of the present invention;

FIG. 4 is a schematic view of another embodiment of the present invention;

FIG. 5 is a schematic view of the auxiliary moving member of the present invention;

FIG. 6 is a partial cross-sectional structural schematic of the present invention;

FIG. 7 is a partial cross-sectional structural view of FIG. 6 in accordance with the present invention.

In the figure: 1-a conveyor belt; 2-a sloping plate; 3-a workbench; 4-assisting the moving member; 41-sealing cover; 42-a through hole; 43-air pump I; 44-gas transmission pipe one; 5-a protective shell; 6-a limiting part; 61-side plate; 62-a movable groove; 63-a baffle; 64-screw; 65-a threaded sleeve; 7-a drive assembly; 71-a drive motor; 72-a drive shaft; 73-a pulley; 74-a belt; 75-a cam; 76-U-shaped plates; 77-fixing plate; 78-an elastic member; 8-drying the component; 81-air pump II; 82-gas delivery pipe two; 83-connecting pipe; 84-a standpipe; 85-air outlet groove; 86-a hose; 87-a vent hole; 9-a separator; 10-support plate.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-7, the present invention provides a technical solution: a processing device for precision semiconductor components comprises a conveyor belt 1, wherein an inclined plate 2 is arranged at one end of the conveyor belt 1, a workbench 3 is arranged at the end part of the inclined plate 2, the components are conveyed onto the inclined plate 2 by the conveyor belt 1, an auxiliary moving member 4 is arranged on the inclined plate 2, and the auxiliary moving member 4 drives the components to move onto the workbench 3;

a protective shell 5 is arranged at the bottom of the workbench 3, a limiting piece 6 is arranged at one end of the inclined plate 2 close to the workbench 3, when the components move from the inclined plate 2 to the workbench 3, only one component can be allowed to pass through the limiting piece 6, and the components are prevented from being stacked on the workbench 3, so that the drying effect is influenced;

be provided with a plurality of baffles 9 on workstation 3, baffle 9 falls into a plurality of regions with workstation 3, every region all can dry the operation to components and parts, and the backup pad 10 that is located between two baffles 9 is a set of, be provided with a plurality of backup pads 10 on workstation 3, the activity of backup pad 10 runs through

workstation

3, 3 bottoms of workstation are provided with drive assembly 7, drive assembly 7 orders about backup pad 10 and crisscross the support to components and parts, 3 bottoms of workstation still are provided with stoving subassembly 8, when components and parts are located workstation 3, stoving subassembly 8 blows out hot-blast drying with components and parts.

The auxiliary moving part 4 comprises a sealing cover 41 arranged at the bottom of the inclined plate 2, a plurality of through holes 42 are formed in the inclined plate 2, the through holes 42 are obliquely formed relative to the inclined plate 2, the outlet of each through hole faces the direction of the workbench 3, an air pump I43 is arranged on the side wall of the protective shell 5, an output end of the air pump I43 is provided with an air pipe I44, and the air pipe I44 is connected with the sealing cover 41;

the first air pump 43 is used for introducing air into the sealing cover 41 through the first air conveying pipe 44, the air is sprayed out through the through hole 42, when the component falls on the inclined plate 2, if moisture exists on the lower surface of the component, the component is inconvenient to move on the workbench 3, the air output by the first air pump 43 is sprayed out through the through hole 42, and the through hole 42 is obliquely arranged, so that the component can be slightly jacked up to assist the movement of the component.

The limiting part 6 comprises side plates 61 arranged on two sides of the inclined plate 2, a movable groove 62 is formed in each side plate 61, a baffle 63 is arranged at one end, close to the workbench 3, of the inclined plate 2, screw rods 64 are arranged on two sides of each baffle 63, each screw rod 64 is located in the corresponding movable groove 62, a threaded sleeve 65 is arranged on the outer side of one end, located on the outer side of each side plate 61, of each screw rod 64, and when the threaded sleeves 65 are screwed on the screw rods 64, the end portions of the threaded sleeves 65 abut against the surfaces of the side plates 61 to fix the baffle 63;

the distance between the baffle 63 and the inclined plate 2 only allows one component to pass through, so that the components are prevented from being conveyed to the workbench 3 in a mutual stacking mode, the height of the baffle 63 can be adjusted, the baffle 63 can be freely moved only by loosening the threaded sleeve 65, the threaded sleeve 65 is screwed again after adjustment, the baffle 63 can be correspondingly adjusted according to the thickness of the component to be processed, and the application range of the device is enlarged.

The driving assembly 7 comprises a driving motor 71 arranged on the protective shell 5, a driving shaft 72 is rotatably arranged on the protective shell 5, belt wheels 73 are arranged on the output end of the driving motor 71 and the driving shaft 72, a belt 74 is arranged on the outer side of each belt wheel 73, the driving motor 71 drives the driving shaft 72 to rotate through belt transmission, a plurality of cams 75 are arranged on the outer side of the driving shaft 72, the protruding ends of the plurality of cams 75 are positioned at different angles, a U-shaped plate 76 is arranged at the bottom of the supporting plate 10, the cams 75 are positioned on the inner side of the U-shaped plate 76, and when the driving shaft 72 drives the cams 75 to rotate, the cams 75 drive the U-shaped plate 76 to drive the supporting plate 10 to move downwards;

the bottom of the workbench 3 is provided with a fixing plate 77, the fixing plate 77 is provided with an elastic part 78, the elastic part 78 is a spring, the end part of the elastic part 78 is connected with the bottom of the support plate 10, after the protruding end of the cam 75 is far away from the U-shaped plate 76, under the action of the spring, the support plate 10 can reset to support the component, because the angles of the cams 75 are different, the cam 75 can sequentially pull the support plate 10 matched with the cam downwards, and only one support plate 10 moves downwards at each time, so that the movement of the component on the support plate 10 can not be influenced, and part of the bottom of the component can also be exposed.

The drying assembly 8 comprises a second air pump 81 arranged at the bottom of the protective shell 5, a second air delivery pipe 82 is arranged at the output end of the second air pump 81, a connecting pipe 83 is arranged at the end part of the second air delivery pipe 82, a vertical pipe 84 is arranged on the connecting pipe 83, the end part of the vertical pipe 84 penetrates through the workbench 3 to be connected with the partition plate 9, the partition plate 9 is hollow, an air outlet groove 85 is formed in the partition plate 9, a hose 86 is arranged on the connecting pipe 83, the hose 86 is a corrugated pipe, the end part of the hose 86 is connected with the support plate 10, the support plate 10 is hollow, and an air vent 87 is formed in the upper surface of the support plate 10;

when components and parts move on backup pad 10, two 81 starts and to export the air pump, and the air is through the blowout of air vent 87 on the backup pad 10 and the air-out groove 85 on the baffle 9, dries bottom and the top of components and parts respectively, and the backup pad 10 crisscross support makes the bottom of components and parts can be complete by drying, can not influence the transport of components and parts simultaneously.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A processingequipment for accurate semiconductor components and parts, includes conveyer belt (1), its characterized in that: an inclined plate (2) is arranged at one end of the conveyor belt (1), a workbench (3) is arranged at the end part of the inclined plate (2), components are conveyed to the inclined plate (2) by the conveyor belt (1), auxiliary moving parts (4) are arranged on the inclined plate (2), the components are driven to move to the workbench (3) by the auxiliary moving parts (4), a protective shell (5) is arranged at the bottom of the workbench (3), a limiting part (6) is arranged at one end, close to the workbench (3), of the inclined plate (2), and when the components move to the workbench (3) from the inclined plate (2), the limiting part (6) only allows one component to pass through;

be provided with a plurality of baffles (9) on workstation (3), be provided with a plurality of backup pads (10) on workstation (3), workstation (3) bottom is provided with drive assembly (7), drive assembly (7) orders about backup pad (10) and crisscross support to components and parts, workstation (3) bottom still is provided with stoving subassembly (8), and when components and parts were located workstation (3), stoving subassembly (8) blown out hot-blast and dried components and parts.

2. A processing apparatus for a precision semiconductor component as claimed in claim 1, wherein: supplementary moving member (4) are including setting up sealed cowling (41) in swash plate (2) bottom, a plurality of through-holes (42) have been seted up on swash plate (2), protecting crust (5) lateral wall is provided with air pump (43), air pump (43) output is provided with air supply pipe (44), air supply pipe (44) are connected with sealed cowling (41), air pump (43) let in the air through air supply pipe (44) in to sealed cowling (41), the air process through-hole (42) blowout.

3. A processing apparatus for a precision semiconductor component as claimed in claim 2, wherein: the through hole (42) is obliquely formed relative to the inclined plate (2), and the outlet of the through hole faces the direction of the workbench (3).

4. A processing apparatus for a precision semiconductor component as claimed in claim 3, wherein: locating part (6) is including setting up curb plate (61) in swash plate (2) both sides, movable groove (62) have been seted up on curb plate (61), the one end that swash plate (2) are close to workstation (3) is provided with baffle (63), baffle (63) both sides all are provided with screw rod (64), screw rod (64) are located movable groove (62), the one end outside that screw rod (64) are located the curb plate (61) outside is provided with threaded sleeve (65), works as when threaded sleeve (65) are screwed up on screw rod (64), threaded sleeve (65) tip butt curb plate (61) surface realizes fixing baffle (63).

5. A processing apparatus for a precision semiconductor component as claimed in claim 4, wherein: the driving assembly (7) comprises a driving motor (71) arranged on a protective shell (5), a driving shaft (72) is arranged on the protective shell (5) in a rotating mode, belt wheels (73) are arranged on the output end of the driving motor (71) and the driving shaft (72), a belt (74) is arranged on the outer side of each belt wheel (73), the driving shaft (72) is driven to rotate by the driving motor (71) through the transmission of the belt wheels (73) and the belt (74), a plurality of cams (75) are arranged on the outer side of the driving shaft (72), the protruding ends of the cams (75) are located at different angles, a U-shaped plate (76) is arranged at the bottom of the supporting plate (10), the cams (75) are located on the inner side of the U-shaped plate (76), and when the driving shaft (72) drives the cams (75) to rotate, the cams (75) drive the U-shaped plate (76) to drive the supporting plate (10) to move downwards, the bottom of the workbench (3) is provided with a fixing plate (77), the fixing plate (77) is provided with an elastic piece (78), and the end part of the elastic piece (78) is connected with the bottom of the support plate (10).

6. A processing apparatus for a precision semiconductor component as claimed in claim 5, wherein: the elastic member (78) is a spring.

7. A processing apparatus for a precision semiconductor component as claimed in claim 6, wherein: drying assembly (8) is including setting up two (81) air pumps in protecting crust (5) bottom, two (81) output ends of air pump are provided with two (82) air supply pipe, two (82) tip of air supply pipe are provided with connecting pipe (83), be provided with standpipe (84) on connecting pipe (83), standpipe (84) tip runs through workstation (3) and is connected with baffle (9), air outlet groove (85) have been seted up for cavity and baffle (9) on baffle (9), be provided with hose (86) on connecting pipe (83), hose (86) tip is connected with backup pad (10), backup pad (10) are cavity just air vent (87) have been seted up to backup pad (10) upper surface.

8. A processing apparatus for a precision semiconductor component as claimed in claim 7, wherein: the hose (86) is a corrugated tube.