CN114389567A - Graphene surface acoustic wave filter structure and preparation method thereof - Google Patents
Graphene surface acoustic wave filter structure and preparation method thereof Download PDFInfo
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
- H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/09—Elastic or damping supports
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- H—ELECTRICITY
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- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
Abstract
The invention discloses a graphene surface acoustic wave filter structure and a preparation method thereof, relating to the field of graphene surface acoustic wave filter structures, comprising a piezoelectric substrate, wherein a metal electrode layer is fixedly arranged above the piezoelectric substrate, a graphene layer is fixed at the outer ring of the metal electrode layer in a film coating manner, the connection structure between the piezoelectric substrate and the metal electrode layer is firm, the graphene layer is not easy to fall off in a manner of being attached to the surface of the metal electrode layer instead of a manner of being attached to the surface of the metal electrode layer, so that the graphene layer is not easy to fall off due to high temperature when current passes through the metal electrode layer, high-frequency signals are transmitted on the surface of the metal electrode layer according to the characteristic of high thermal conductivity and high electrical conductivity of graphene, the current is concentrated on the graphene layer on the surface of the graphene layer, the high electrical conductivity of the graphene reduces the heat loss brought by the metal electrode layer, thereby the insertion loss brought by the interdigital transducer resistance is reduced, and the heat dissipation capability of the surface acoustic wave filter is also improved due to the high thermal conductivity, and functions to improve power tolerance.
Description
Technical Field
The invention relates to the field of graphene surface acoustic wave filter structures, in particular to a graphene surface acoustic wave filter structure and a preparation method thereof.
Background
The surface acoustic wave filter plays an increasingly important role in modern communication systems, and several or even dozens of types of surface acoustic wave filters are involved in base station construction, satellite communication and personal mobile communication equipment. Communication frequency band is increasing, communication equipment is becoming more and more complicated, and the volume of filter module is also compressing constantly simultaneously, in order to obtain large capacity, high speed simultaneously, requires that communication filter has lower insertion loss and higher power tolerance.
The research on reducing the insertion loss of the surface acoustic wave filter is a popular subject in the field of surface acoustic wave devices, wherein an ultra High Performance (IHP) structure surface acoustic wave filter designed by the village electronics research institute is prepared into a laminated structure by using piezoelectric thin film materials with different sound velocities, the surface acoustic wave is bound on a surface layer piezoelectric crystal by enhancing the reflection of an interface, the leakage of surface acoustic wave energy is effectively reduced, the minimum insertion loss of the device can reach 1.0dB, but the IHP surface acoustic wave substrate material has High requirements on the process and High manufacturing difficulty.
The power tolerance capability is also an important index of the surface acoustic wave filter, with the continuous increase of the frequency of the surface acoustic wave device and the miniaturization of the size of the device, the width of an interdigital electrode, the size of a bus bar and the size of a packaging electrode of the surface acoustic wave device are continuously reduced, the power tolerance characteristic of the conventional surface acoustic wave device is increasingly poor with the increase of the frequency, the power of modern communication signals is increasingly large, higher requirements are made on the power tolerance of the surface acoustic wave device, and therefore the research on the power tolerance of the surface acoustic wave device is also increasingly important.
The patent numbers are: CN202010095465.5, patent name: according to the graphene surface acoustic wave filter structure and the preparation method thereof, graphene is coated around the metal electrode layer, when a high-frequency signal is applied, current is concentrated on the graphene dielectric layer on the surface layer, the high conductivity of the graphene dielectric layer reduces heat loss caused by the metal electrode layer, and meanwhile, the graphene dielectric layer with high heat conductivity improves the heat dissipation capacity of the filter and plays a role in improving the power tolerance of the filter.
However, in the above patent, the graphene dielectric layer directly covers the surface of the metal electrode layer, the adhesion degree between the graphene dielectric layer and the metal electrode layer is poor in practical adhesion, and particularly, in an environment with high electric conductivity and heat, the graphene dielectric layer is easy to expand, so that the gap between the graphene dielectric layer and the surface of the metal electrode layer is increased, the contact area between the graphene dielectric layer and the surface of the metal motor layer is reduced, and the heat dissipation capability of the surface acoustic wave filter is reduced. Therefore, it is necessary to invent a graphene surface acoustic wave filter structure and a preparation method thereof to solve the above problems.
Disclosure of Invention
The invention aims to provide a graphene surface acoustic wave filter structure and a preparation method thereof, so as to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: a graphene surface acoustic wave filter structure comprises a piezoelectric substrate, wherein a metal electrode layer is fixedly arranged above the piezoelectric substrate, a graphene layer is coated on the outer ring of the metal electrode layer, a groove is formed in the outer ring of the metal electrode layer, a protrusion filled in the groove correspondingly is arranged on one surface, attached to the metal electrode layer, of the graphene layer, first deformation assemblies are arranged on the left side and the right side of the upper surface of the metal electrode layer, second deformation assemblies are arranged in the middle positions of the left side and the right side of the metal electrode layer, an internal deformation cavity is arranged inside the metal electrode layer, and an expansion adaptation assembly is arranged in the internal deformation cavity;
the expansion adapting assembly comprises a heat-sensitive metal layer fixedly attached to the inner wall of the internal deformation chamber, the hardness of the heat-sensitive metal layer is smaller than that of the metal electrode layer, the heat-sensitive metal layer is of a rectangular frame structure, and the heat-sensitive metal layer and the inner wall of the metal electrode layer are welded and fixed;
the expansion adaptation assembly further comprises first springs arranged in the internal deformation chamber, the upper ends of the first springs are fixedly welded on the inner wall above the heat-sensitive metal layer, the lower ends of the first springs are fixedly welded on the inner wall below the heat-sensitive metal layer, the first springs are vertically distributed, and multiple groups of the first springs are equidistantly arranged in the internal deformation chamber.
Preferably, the graphene layer is fixed to the outer ring of the metal electrode layer in a coating manner.
It should be noted that, the graphene layer is fixed at the outer ring of the metal electrode layer in a coating manner, the connection structure between the graphene layer and the metal electrode layer is firm, a manner of being attached to the surface of the metal electrode layer is replaced, the graphene layer is not easy to fall off, so that the current is not easy to fall off due to high temperature when passing through the metal electrode layer, the characteristics of high thermal conductivity and high electrical conductivity of the graphene are utilized, according to the principle of skin effect, high-frequency signals are transmitted on the surface of the metal electrode layer, the current is concentrated on the graphene layer on the surface layer, the high electrical conductivity of the graphene layer reduces the heat loss caused by the metal electrode layer, thereby the insertion loss caused by the resistance of the interdigital transducer is reduced, meanwhile, the graphene layer with high thermal conductivity also improves the heat dissipation capability of the surface acoustic wave filter, and the effect of improving the power tolerance is achieved.
Preferably, the cross section of each groove is of a semicircular groove body structure, the grooves are distributed along the length direction of the metal electrode layer, and a plurality of groups of the grooves are distributed on the upper, lower, left and right surfaces of the metal electrode layer at equal intervals.
Further, graphite alkene layer inner circle forms the arch of a body coupling, the arch is fixed in the recess, the area of contact between metal electrode layer and the graphite alkene layer has been increased, further increase connection structure's between the two stability, make graphite alkene layer be difficult for coming off from metal electrode layer, and the recess is at each even multiunit that is provided with in metal electrode layer's each surface, make things convenient for firm fixed between each side on graphite alkene layer all and metal electrode layer's the corresponding face, make between metal electrode layer and the graphite alkene layer difficult to receive the electric current to influence and break away from, it is enough to have guaranteed area of contact, thereby increase graphite alkene layer to metal electrode layer's protecting effect.
Preferably, the first deformation assembly and the second deformation assembly respectively comprise a pair of elastic metal plates, elastic metal plates and a rubber layer, the pair of elastic metal plates are fixedly welded on the surface of the metal electrode layer, each elastic metal plate is of a curved plate-shaped structure, two ends of each elastic metal plate are fixed between the two groups of elastic metal plates, and the outer edges of the pair of elastic metal plates are fixedly connected and sealed through the rubber layer.
Specifically, the setting of first deformation subassembly and second deformation subassembly for metal electrode layer and graphite alkene layer are when heat conduction, and compressible first deformation subassembly or second deformation subassembly under graphite alkene layer expansion deformation for graphite alkene layer inside has sufficient space and supplies its expend with heat and contract with cold, and the phenomenon that graphite alkene layer expansion excessively breaks away from gradually from metal electrode layer appears when having avoided the space that can supply graphite alkene layer to warp, makes graphite alkene layer cover the life on metal electrode layer increase.
Preferably, the resilient metal sheet is in a compressed state.
Wherein, the elastic metal piece is compression state, make graphite alkene layer can further compress a pair of elastic metal board when the dilatational strain, make the elastic metal piece further compressed, and when graphite alkene layer recovered deformation, in order to avoid the phenomenon that the elastic metal board can not reset when elastic metal board and graphite alkene layer contact position are not hard up, be provided with the elastic metal piece between a pair of elastic metal board, at this moment, the elastic metal piece that is compression state can expand and prop between a pair of elastic metal board, make the elastic metal board also along with graphite alkene layer resumes.
Preferably, the first spring is in a stretched state.
In the device, be provided with the inflation adaptation subassembly in the cavity that warp in inside, the electric current is producing heat through metal electrode layer for when the heat drove metal electrode layer and warp, the inflation adaptation subassembly can assist the metal electrode layer inner circle to warp the inside shrink deformation of cavity to inside, and reduces the deformation volume of metal electrode layer outer lane department, has guaranteed the structural stability of metal electrode layer and graphite alkene layer junction, makes to be difficult for droing between metal electrode layer, the graphite alkene layer.
Preferably, the first deformation assembly is provided with a group at two ends of the upper and lower surfaces of the metal electrode layer, the elastic metal plate in the first deformation assembly located on the upper surface of the metal electrode layer is vertically welded on the upper surface of the metal electrode layer, and the elastic metal plate in the first deformation assembly located on the lower surface of the metal electrode layer is fixedly welded on the lower surface of the metal electrode layer.
During operation, the graphene layer expansion deformation of the first deformation assembly adaptable to the upper and lower positions of the metal electrode layer is supplemented.
Preferably, the second deformation assembly is provided with a group in the middle of the left side and the right side of the metal electrode layer, the elastic metal plate in the second deformation assembly positioned on the left side of the metal electrode layer is vertically welded on the left side of the metal electrode layer, and the elastic metal plate in the second deformation assembly positioned on the right side of the metal electrode layer is vertically welded on the right side of the metal electrode layer.
The second deformation component can be used for supplementing expansion deformation of the graphene layer at the left and right positions of the metal electrode layer.
Preferably, the plurality of groups of metal electrode layers are arranged on the upper surface of the piezoelectric substrate at equal intervals.
Further, when metal electrode layer swelling deformation, because the intensity of heat sensitive metal layer is less than metal electrode layer's intensity and the effect of holding of drawing of first spring, can make metal electrode layer tend to the inside elastic deformation of inside deformation cavity to reduce the deformation volume of metal electrode layer department, increased the stability of connecting between metal electrode layer and the graphite alkene layer.
The invention also discloses a preparation method of the graphene surface acoustic wave filter structure, which comprises the graphene surface acoustic wave filter structure and also comprises the following steps:
s1: cleaning a piezoelectric substrate, preparing the piezoelectric substrate and a heating kettle, placing the piezoelectric substrate in the heating kettle, filling water in the heating kettle, arranging an ultrasonic generator at the bottom of the heating kettle, arranging an electric heating plate for heating water in the heating kettle, arranging a water pump for heating the water filled in the heating kettle and a water tank on one side of the water pump above the heating kettle, heating the water in a water bath to 90-100 ℃, setting the pressure to 10-50 MPa, starting the ultrasonic generator, and cleaning the surface of the piezoelectric substrate;
s2: preparing a metal electrode layer, preparing a metal electrode layer base material and a grooving machine, forming grooves in the outer ring of the metal electrode layer by using the grooving machine, wherein the grooves are formed in multiple groups at equal intervals, the grooves are distributed along the length direction of the metal electrode layer, and each surface of the metal electrode layer is provided with multiple groups of grooves;
s3: manufacturing a first deformation assembly and a second deformation assembly, preparing a plurality of elastic metal plates, a plurality of elastic metal sheets, a plurality of rubber layers, a welding machine and a hot press machine, welding the elastic metal sheets between the pair of elastic metal plates in a fixed welding mode by using the welding machine, fixing the rubber layers on three surfaces of the pair of elastic metal plates in a hot pressing mode by using the hot press machine, and then fixedly welding the opening positions of the pair of elastic metal plates on the middle parts of the left side and the right side and the two ends of the upper side and the lower side of the metal electrode layer by using the welding machine;
s4: preparing a graphene layer, preparing an ion coating machine and a graphene target, coating the graphene target on the outer ring of the metal electrode layer in an ion coating mode by using the ion coating machine to form the graphene layer coating the metal electrode layer, the first deformation assembly and the second deformation assembly, wherein the bonding property between the metal electrode layer and the graphene layer is high.
The invention has the technical effects and advantages that:
1. according to the graphene surface acoustic wave filter structure, the graphene layer is fixed on the outer ring of the metal electrode layer in a film coating mode, the connection structure between the graphene layer and the metal electrode layer is firm, the mode of attaching the graphene layer to the surface of the metal electrode layer is replaced, the graphene layer is not easy to fall off, current is not easy to fall off due to high temperature when passing through the metal electrode layer, high-heat conductivity and high-conductivity characteristics of graphene are utilized, according to the principle of skin effect, high-frequency signals are transmitted on the surface of the metal electrode layer, the current is concentrated on the graphene layer on the surface layer, the high conductivity of the graphene layer reduces heat loss caused by the metal electrode layer, so that insertion loss caused by interdigital transducer resistance is reduced, meanwhile, the heat dissipation capacity of the acoustic surface filter is improved due to the graphene layer with high heat conductivity, and the effect of improving power tolerance is achieved;
2. according to the graphene surface acoustic wave filter structure, the inner rings of the graphene layers form the integrally connected bulges, and the bulges are fixed in the grooves, so that the contact area between the metal electrode layer and the graphene layers is increased, the stability of the connection structure between the metal electrode layer and the graphene layers is further improved, the graphene layers are not easy to fall off from the metal electrode layer, and the grooves are uniformly provided with multiple groups on each surface of the metal electrode layer, so that each side surface of each graphene layer is firmly fixed with the corresponding surface of the metal electrode layer, the metal electrode layer and the graphene layers are not easy to be separated from each other due to the influence of current, the contact area is ensured to be enough, and the protection effect of the graphene layers on the metal electrode layer is improved;
3. according to the graphene surface acoustic wave filter structure, the first deformation assembly and the second deformation assembly are arranged, so that when a metal electrode layer and a graphene layer conduct heat, the graphene layer can be compressed by the first deformation assembly or the second deformation assembly under expansion and deformation, enough gaps are formed in the graphene layer for expansion and contraction, the phenomenon that the graphene layer is excessively expanded and gradually separated from the metal electrode layer when no space for deformation of the graphene layer exists is avoided, and the service life of the graphene layer covering the metal electrode layer is prolonged;
4. according to the graphene surface acoustic wave filter structure, the elastic metal sheet is in a compression state, so that the graphene layer can further compress the pair of elastic metal plates when expanding and deforming, the elastic metal sheet is further compressed, when the graphene layer recovers and deforms, in order to avoid the phenomenon that the elastic metal plates cannot reset when the contact positions of the elastic metal plates and the graphene layer are loosened, the elastic metal sheet is arranged between the pair of elastic metal plates, and at the moment, the elastic metal sheet in the compression state can be expanded between the pair of elastic metal plates, so that the elastic metal plates also recover along with the graphene layer;
5. according to the graphene surface acoustic wave filter structure, the expansion adaptive assembly is arranged in the internal deformation chamber, when the current generates heat through the metal electrode layer, and the heat drives the metal electrode layer to deform, the expansion adaptive assembly can assist the inner ring of the metal electrode layer to contract and deform towards the internal deformation chamber, so that the deformation amount of the outer ring of the metal electrode layer is reduced, the structural stability of the joint of the metal electrode layer and the graphene layer is ensured, and the metal electrode layer and the graphene layer are not easy to fall off;
6. according to the graphene surface acoustic wave filter structure, when the metal electrode layer expands and deforms, the strength of the thermosensitive metal layer is lower than that of the metal electrode layer and the tensile action of the first spring, so that the metal electrode layer tends to elastically deform towards the inside of the internal deformation chamber, the deformation amount of the outer ring of the metal electrode layer is reduced, and the connection stability between the metal electrode layer and the graphene layer is improved.
Drawings
FIG. 1 is a schematic view of the structure of the present invention.
Fig. 2 is a schematic diagram of a graphene layer structure according to the present invention.
FIG. 3 is an enlarged view of the structure at A in FIG. 2 according to the present invention.
In the figure: the piezoelectric ceramic piezoelectric element comprises a piezoelectric substrate 1, a metal electrode layer 2, a graphene layer 3, a protrusion 4, a groove 5, a first deformation assembly 6, a second deformation assembly 7, an internal deformation chamber 8, a first spring 9, a thermosensitive metal layer 10, an elastic metal sheet 11, an elastic metal plate 12 and a rubber layer 13.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention provides a graphene surface acoustic wave filter structure as shown in figures 1-3, which comprises a piezoelectric substrate 1, wherein a metal electrode layer 2 is fixedly arranged above the piezoelectric substrate 1, a graphene layer 3 is coated on the outer ring of the metal electrode layer 2, a groove 5 is arranged on the outer ring of the metal electrode layer 2, a protrusion 4 correspondingly filled in the groove 5 is arranged on one surface of the graphene layer 3 attached to the metal electrode layer 2, first deformation assemblies 6 are arranged on the left side and the right side of the upper surface of the metal electrode layer 2, second deformation assemblies 7 are arranged in the middle positions of the left side and the right side of the metal electrode layer 2, an internal deformation chamber 8 is arranged in the metal electrode layer 2, and an expansion adaptive assembly is arranged in the internal deformation chamber 8;
the expansion adapting component comprises a heat-sensitive metal layer 10 fixedly attached to the inner wall of the internal deformation chamber 8, the hardness of the heat-sensitive metal layer 10 is smaller than that of the metal electrode layer 2, the heat-sensitive metal layer 10 is of a rectangular frame structure, and the heat-sensitive metal layer 10 and the inner wall of the metal electrode layer 2 are welded and fixed;
the expansion adaptation assembly further comprises a first spring 9 arranged in the internal deformation chamber 8, the upper end of the first spring 9 is fixedly welded on the inner wall above the heat-sensitive metal layer 10, the lower end of the first spring 9 is fixedly welded on the inner wall below the heat-sensitive metal layer 10, the first spring 9 is vertically distributed, and a plurality of groups of the first springs 9 are equidistantly arranged in the internal deformation chamber 8.
As shown in fig. 1 and 2, the graphene layer 3 is fixed at the outer ring of the metal electrode layer 2 by means of plating.
It should be noted that, the graphene layer 3 is fixed at the outer ring of the metal electrode layer 2 in a coating manner, the connection structure between the two is firm, the mode of attaching to the surface of the metal electrode layer 2 is replaced, the graphene layer is not easy to fall off, so that the current is not easy to fall off due to high temperature when passing through the metal electrode layer 2, the characteristics of high thermal conductivity and high electrical conductivity of graphene are utilized, according to the principle of skin effect, high-frequency signals are transmitted on the surface of the metal electrode layer 2, the current is concentrated on the graphene layer 3 on the surface layer, the high electrical conductivity of the graphene layer reduces the heat loss brought by the metal electrode layer 2, thereby the insertion loss brought by the interdigital transducer resistance is reduced, meanwhile, the graphene layer 3 with high thermal conductivity also improves the heat dissipation capability of the acoustic surface filter, and the effect of improving the power tolerance is achieved.
Referring to fig. 2, the grooves 5 are in a groove structure with a semicircular cross section, the grooves 5 are distributed along the length direction of the metal electrode layer 2, and the grooves 5 are distributed in multiple groups on the upper, lower, left and right surfaces of the metal electrode layer 2 at equal intervals.
Further, 3 inner circles of graphite alkene layer form arch 4 of a body coupling, arch 4 is fixed in recess 5, the area of contact between metal electrode layer 2 and graphite alkene layer 3 has been increased, further increase connection structure's between the two stability, make graphite alkene layer 3 be difficult for following metal electrode layer 2 and drop, and recess 5 is at the even multiunit that is provided with in each surface of metal electrode layer 2, make things convenient for firm fixed between each side of graphite alkene layer 3 all and metal electrode layer 2's the corresponding face, make between metal electrode layer 2 and the graphite alkene layer 3 difficult to receive the electric current influence and break away from, it is enough to have guaranteed area of contact, thereby increase graphite alkene layer 3 to metal electrode layer 2's protection effect.
Referring to fig. 2, each of the first deforming assembly 6 and the second deforming assembly 7 includes a pair of elastic metal plates 11, elastic metal plates 12, and a rubber layer 13, the elastic metal plates 12 are provided in a pair, the pair of elastic metal plates 12 are fixedly welded on the surface of the metal electrode layer 2, the elastic metal plates 11 are in a curved plate structure, two ends of the elastic metal plates 11 are fixed between the two sets of elastic metal plates 12, and the outer edges between the pair of elastic metal plates 12 are fixedly connected and sealed by the rubber layer 13.
Specifically, the setting of first deformation subassembly 6 and second deformation subassembly 7 for metal electrode layer 2 and graphite alkene layer 3 are when heat conduction, and compressible first deformation subassembly 6 or second deformation subassembly 7 can be compressed under the 3 expansion deformation of graphite alkene layer for graphite alkene layer 3 is inside to have sufficient space and supplies its expend with heat and contract with cold, and the phenomenon that the 3 expansion of graphite alkene layer excessively breaks away from metal electrode layer 2 gradually appears when having avoided the space that can supply graphite alkene layer 3 to warp, makes graphite alkene layer 3 cover the life increase on metal electrode layer 2.
Referring to fig. 3, the elastic metal sheet 11 is in a compressed state.
Wherein, elastic metal piece 11 is compression state, make graphite alkene layer 3 can further compress a pair of elastic metal plate 12 when the dilatational deformation, make elastic metal piece 11 further compressed, and when graphite alkene layer 3 resumes deformation, in order to avoid elastic metal plate 12 and graphite alkene layer 3 contact position when not hard up phenomenon that elastic metal plate 12 can not reset, be provided with elastic metal piece 11 between a pair of elastic metal plate 12, at this moment, elastic metal piece 11 that is compression state can expand and prop between a pair of elastic metal plate 12, make elastic metal plate 12 also resume along with graphite alkene layer 3.
Referring to fig. 2, the first spring 9 is in a stretched state.
In the device, be provided with the inflation adaptation subassembly in the cavity 8 that warp in inside, the electric current is in the production of heat through metal electrode layer 2 for when heat drive metal electrode layer 2 warp, the inflation adaptation subassembly can assist 2 inner circles of metal electrode layer to warp 8 inside shrink deformations to inside, and reduces the deformation volume of 2 outer lane departments of metal electrode layer, has guaranteed the structural stability of metal electrode layer 2 and 3 junctions of graphite alkene layer, makes difficult the droing between metal electrode layer 2, graphite alkene layer 3.
The first deformation assembly 6 is provided with a group at two ends of the upper and lower surfaces of the metal electrode layer 2, the elastic metal plate 12 of the first deformation assembly 6 on the upper surface of the metal electrode layer 2 is vertically welded on the upper surface of the metal electrode layer 2, and the elastic metal plate 12 of the first deformation assembly 6 on the lower surface of the metal electrode layer 2 is fixedly welded on the lower surface of the metal electrode layer 2.
During operation, the first deformation assembly 6 can adapt to the expansion deformation of the graphene layer 3 at the upper and lower positions of the metal electrode layer 2 for supplementation.
The second deformation assemblies 7 are respectively provided with a group in the middle of the left side and the right side of the metal electrode layer 2, the elastic metal plate 12 in the second deformation assembly 7 positioned on the left side of the metal electrode layer 2 is vertically welded on the left side of the metal electrode layer 2, and the elastic metal plate 12 in the second deformation assembly 7 positioned on the right side of the metal electrode layer 2 is vertically welded on the right side of the metal electrode layer 2.
The second deformation element 7 can compensate for expansion deformation of the graphene layer 3 at positions on the left and right sides of the metal electrode layer 2.
The metal electrode layers 2 are arranged on the upper surface of the piezoelectric substrate 1 at equal intervals.
Further, when the metal electrode layer 2 is expanded and deformed, because the strength of the thermosensitive metal layer 10 is lower than the strength of the metal electrode layer 2 and the pulling and holding effect of the first spring 9, the metal electrode layer 2 tends to elastically deform towards the inside of the internal deformation chamber 8, so that the deformation amount at the outer ring of the metal electrode layer 2 is reduced, and the connection stability between the metal electrode layer 2 and the graphene layer 3 is improved.
The invention also discloses a preparation method of the graphene surface acoustic wave filter structure, which comprises the graphene surface acoustic wave filter structure and also comprises the following steps:
s1: cleaning a piezoelectric substrate 1, preparing the piezoelectric substrate 1 and a heating kettle, placing the piezoelectric substrate 1 in the heating kettle, filling water into the heating kettle, arranging an ultrasonic generator at the bottom of the heating kettle, arranging an electric heating plate for heating water in the heating kettle, arranging a water pump for heating the water filled in the heating kettle and a water tank supplied to one side of the water pump above the heating kettle, heating the water to 90-100 ℃ in a water bath, setting the pressure to 10-50 MPa, starting the ultrasonic generator, and cleaning the surface of the piezoelectric substrate 1;
s2: preparing a metal electrode layer 2, preparing a metal electrode layer base material and a grooving machine, forming grooves 5 in the outer ring of the metal electrode layer 2 by using the grooving machine, wherein the grooves 5 are equidistantly formed in multiple groups, the grooves 5 are distributed along the length direction of the metal electrode layer 2, and each surface of the metal electrode layer 2 is formed with multiple groups of grooves 5;
s3: manufacturing a first deformation assembly 6 and a second deformation assembly 7, preparing a plurality of elastic metal plates 12, a plurality of elastic metal sheets 11, a plurality of rubber layers 13, a welding machine and a hot press, welding the elastic metal sheets 11 between the pair of elastic metal plates 12 in a fixed welding mode by using the welding machine, fixing the rubber layers 13 on three surfaces of the pair of elastic metal plates 12 in a hot pressing mode by using the hot press, and then fixedly welding the opening positions of the pair of elastic metal plates 12 on the middle parts of the left side and the right side and the two ends of the upper side and the lower side of the metal electrode layer 2 by using the welding machine;
s4: preparing a graphene layer 3, preparing an ion plating machine and a graphene target, coating the graphene target on the outer ring of the metal electrode layer 2 by the ion plating machine in an ion plating manner to form the graphene layer 3 coating the metal electrode layer 2, the first deformation assembly 6 and the second deformation assembly 7, wherein the bonding property between the metal electrode layer 2 and the graphene layer 3 is high.
The working principle is as follows: the graphene layer 3 is fixed on the outer ring of the metal electrode layer 2 in a film coating mode, the connection structure between the graphene layer 3 and the metal electrode layer 2 is firm, a mode of being attached to the surface of the metal electrode layer 2 is replaced, the graphene layer 3 is not prone to falling off, when current passes through the metal electrode layer 2, the graphene layer 3 is not prone to falling off due to high temperature, the characteristics of high thermal conductivity and high electrical conductivity of graphene are utilized, according to the principle of skin effect, high-frequency signals are transmitted on the surface of the metal electrode layer 2, the current is concentrated on the graphene layer 3 on the surface layer, the high electrical conductivity of the graphene layer reduces heat loss brought by the metal electrode layer 2, insertion loss brought by resistance of an interdigital transducer is reduced, meanwhile, the heat dissipation capacity of the acoustic surface filter is improved due to the graphene layer 3 with high thermal conductivity, and the effect of improving power tolerance is achieved;
the inner ring of the graphene layer 3 forms the integrally connected bulge 4, the bulge 4 is fixed in the groove 5, the contact area between the metal electrode layer 2 and the graphene layer 3 is increased, the stability of a connecting structure between the metal electrode layer and the graphene layer is further improved, the graphene layer 3 is not easy to fall off from the metal electrode layer 2, multiple groups of grooves 5 are uniformly arranged on each surface of the metal electrode layer 2, each side surface of the graphene layer 3 is convenient to be firmly fixed with the corresponding surface of the metal electrode layer 2, the metal electrode layer 2 and the graphene layer 3 are not easy to be separated from each other due to the influence of current, the contact area is ensured to be enough, and the protection effect of the graphene layer 3 on the metal electrode layer 2 is improved;
the arrangement of the first deformation assembly 6 and the second deformation assembly 7 enables the metal electrode layer 2 and the graphene layer 3 to be capable of compressing the first deformation assembly 6 or the second deformation assembly 7 under the expansion deformation of the graphene layer 3 when conducting heat, so that enough gaps are formed in the graphene layer 3 for the graphene layer 3 to expand with heat and contract with cold, the phenomenon that the graphene layer 3 is excessively expanded and gradually separated from the metal electrode layer 2 when no space for the graphene layer 3 to deform exists is avoided, and the service life of the graphene layer 3 covering the metal electrode layer 2 is prolonged;
the elastic metal sheet 11 is in a compressed state, so that the graphene layer 3 can further compress the pair of elastic metal plates 12 when expanding and deforming, so that the elastic metal sheet 11 is further compressed, when the graphene layer 3 recovers and deforms, in order to avoid the phenomenon that the elastic metal plates 12 cannot reset when the contact positions of the elastic metal plates 12 and the graphene layer 3 are loosened, the elastic metal sheet 11 is arranged between the pair of elastic metal plates 12, at the moment, the elastic metal sheet 11 in the compressed state can be expanded between the pair of elastic metal plates 12, so that the elastic metal plates 12 also recover along with the graphene layer 3;
the expansion adaptation component is arranged in the internal deformation chamber 8, when the current generates heat through the metal electrode layer 2, so that the heat drives the metal electrode layer 2 to deform, the expansion adaptation component can assist the inner ring of the metal electrode layer 2 to contract and deform towards the inside of the internal deformation chamber 8, so that the deformation quantity of the outer ring of the metal electrode layer 2 is reduced, the structural stability of the joint of the metal electrode layer 2 and the graphene layer 3 is ensured, and the metal electrode layer 2 and the graphene layer 3 are not easy to fall off;
when the metal electrode layer 2 is expanded and deformed, the strength of the thermosensitive metal layer 10 is lower than that of the metal electrode layer 2 and the pulling and holding effect of the first spring 9, so that the metal electrode layer 2 tends to elastically deform towards the inside of the internal deformation chamber 8, the deformation amount of the outer ring of the metal electrode layer 2 is reduced, and the connection stability between the metal electrode layer 2 and the graphene layer 3 is improved.
Claims (10)
1. A graphene surface acoustic wave filter structure comprises a piezoelectric substrate (1), and is characterized in that: a metal electrode layer (2) is fixedly arranged above the piezoelectric substrate (1), a graphene layer (3) is coated on the outer ring of the metal electrode layer (2), a groove (5) is formed in the outer ring of the metal electrode layer (2), a protrusion (4) correspondingly filled in the groove (5) is arranged on one surface, attached to the metal electrode layer (2), of the graphene layer (3), first deformation assemblies (6) are arranged on the left side and the right side of the upper surface of the metal electrode layer (2), second deformation assemblies (7) are arranged in the middle positions of the left side and the right side of the metal electrode layer (2), an internal deformation chamber (8) is arranged inside the metal electrode layer (2), and an expansion adaptive assembly is arranged in the internal deformation chamber (8);
the expansion adapting assembly comprises a heat-sensitive metal layer (10) fixedly attached to the inner wall of the internal deformation chamber (8), the hardness of the heat-sensitive metal layer (10) is smaller than that of the metal electrode layer (2), the heat-sensitive metal layer (10) is of a rectangular frame structure, and the heat-sensitive metal layer (10) and the inner wall of the metal electrode layer (2) are fixedly welded;
the expansion adaptation assembly further comprises a first spring (9) arranged in the internal deformation chamber (8), the upper end of the first spring (9) is fixedly welded on the inner wall above the thermosensitive metal layer (10), the lower end of the first spring (9) is fixedly welded on the inner wall below the thermosensitive metal layer (10), the first spring (9) is vertically distributed, and multiple groups of the first spring (9) are equidistantly arranged in the internal deformation chamber (8).
2. The graphene surface acoustic wave filter structure of claim 1, wherein: the graphene layer (3) is fixed on the outer ring of the metal electrode layer (2) in a film coating mode.
3. The graphene surface acoustic wave filter structure of claim 2, wherein: the groove (5) is of a groove body structure with a semicircular cross section, the groove (5) is distributed along the length direction of the metal electrode layer (2), and multiple groups of the groove (5) are distributed on the upper surface, the lower surface, the left surface and the right surface of the metal electrode layer (2) at equal intervals.
4. The graphene surface acoustic wave filter structure and the preparation method thereof according to claim 3, wherein: the first deformation assembly (6) and the second deformation assembly (7) respectively comprise an elastic metal sheet (11), elastic metal plates (12) and a rubber layer (13), the elastic metal plates (12) are provided with a pair, the pair of elastic metal plates (12) are fixedly welded on the surface of the metal electrode layer (2), the elastic metal sheets (11) are of a curved plate-shaped structure, two ends of each elastic metal sheet (11) are fixed between the two groups of elastic metal plates (12), and the outer edges between the pair of elastic metal plates (12) are fixedly connected and sealed through the rubber layer (13).
5. The graphene surface acoustic wave filter structure of claim 4, wherein: the elastic metal sheet (11) is in a compressed state.
6. The graphene surface acoustic wave filter structure of claim 5, wherein: the first spring (9) is in a stretched state.
7. The graphene surface acoustic wave filter structure of claim 6, wherein: the first deformation assembly (6) is provided with a group at two ends of the upper surface and the lower surface of the metal electrode layer (2), an elastic metal plate (12) in the first deformation assembly (6) positioned on the upper surface of the metal electrode layer (2) is vertically welded on the upper surface of the metal electrode layer (2), and the elastic metal plate (12) in the first deformation assembly (6) positioned on the lower surface of the metal electrode layer (2) is fixedly welded on the lower surface of the metal electrode layer (2).
8. The graphene surface acoustic wave filter structure of claim 7, wherein: the middle parts of the left side and the right side of the metal electrode layer (2) of the second deformation assemblies (7) are respectively provided with a group, an elastic metal plate (12) in the second deformation assemblies (7) positioned on the left side of the metal electrode layer (2) is vertically welded on the left side of the metal electrode layer (2), and the elastic metal plate (12) in the second deformation assemblies (7) positioned on the right side of the metal electrode layer (2) is vertically welded on the right side of the metal electrode layer (2).
9. The graphene surface acoustic wave filter structure of claim 8, wherein: the metal electrode layers (2) are arranged on the upper surface of the piezoelectric substrate (1) at equal intervals.
10. A preparation method of a graphene surface acoustic wave filter structure is characterized by comprising the following steps: a graphene surface acoustic wave filter structure comprising any one of claims 1-9, further comprising the steps of:
s1: cleaning a piezoelectric substrate, preparing the piezoelectric substrate and a heating kettle, placing the piezoelectric substrate in the heating kettle, filling water in the heating kettle, arranging an ultrasonic generator at the bottom of the heating kettle, arranging an electric heating plate for heating water in the heating kettle, arranging a water pump for heating the water filled in the heating kettle and a water tank on one side of the water pump above the heating kettle, heating the water in a water bath to 90-100 ℃, setting the pressure to 10-50 MPa, starting the ultrasonic generator, and cleaning the surface of the piezoelectric substrate;
s2: preparing a metal electrode layer, preparing a metal electrode layer base material and a grooving machine, forming grooves in the outer ring of the metal electrode layer by using the grooving machine, wherein the grooves are formed in multiple groups at equal intervals, the grooves are distributed along the length direction of the metal electrode layer, and each surface of the metal electrode layer is provided with multiple groups of grooves;
s3: manufacturing a first deformation assembly and a second deformation assembly, preparing a plurality of elastic metal plates, a plurality of elastic metal sheets, a plurality of rubber layers, a welding machine and a hot press machine, welding the elastic metal sheets between the pair of elastic metal plates in a fixed welding mode by using the welding machine, fixing the rubber layers on three surfaces of the pair of elastic metal plates in a hot pressing mode by using the hot press machine, and then fixedly welding the opening positions of the pair of elastic metal plates on the middle parts of the left side and the right side and the two ends of the upper side and the lower side of the metal electrode layer by using the welding machine;
s4: preparing a graphene layer, preparing an ion coating machine and a graphene target, coating the graphene target on the outer ring of the metal electrode layer in an ion coating mode by using the ion coating machine to form the graphene layer coating the metal electrode layer, the first deformation assembly and the second deformation assembly, wherein the bonding property between the metal electrode layer and the graphene layer is high.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116070585A (en) * | 2023-03-14 | 2023-05-05 | 深圳飞骧科技股份有限公司 | Thermal simulation method, system and related equipment of filter module |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116070585A (en) * | 2023-03-14 | 2023-05-05 | 深圳飞骧科技股份有限公司 | Thermal simulation method, system and related equipment of filter module |
| CN116070585B (en) * | 2023-03-14 | 2023-06-13 | 深圳飞骧科技股份有限公司 | Thermal simulation method, system and related equipment of filter module |
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