CN114384347A

CN114384347A - Measuring device and measuring method

Info

Publication number: CN114384347A
Application number: CN202111205031.7A
Authority: CN
Inventors: 塩野忠久; 森広宣
Original assignee: Showa Shinku Co Ltd
Current assignee: Showa Shinku Co Ltd
Priority date: 2020-10-16
Filing date: 2021-10-15
Publication date: 2022-04-22
Also published as: JP2022065875A

Abstract

Provided are a measuring device and a measuring method which can effectively inspect the electrical characteristics of an electronic component and have few errors. The measuring device has: a pressure changing unit that changes a pressure in the measurement chamber; a plurality of contact probes simultaneously contacting the external electrodes of the plurality of quartz resonators; a power supply unit for applying a voltage to the quartz resonator; a measuring unit that measures the impedance of the quartz resonator; and a switching unit that switches electrical connection between the quartz resonator and the contact probe for each quartz resonator and transmits an output value to the measurement unit.

Description

Measuring device and measuring method

Technical Field

The present invention relates to a measuring apparatus and a measuring method for measuring electrical characteristics of an electronic component.

Background

As a method of measuring the electrical characteristics of an electronic component, for example, as disclosed in reference 1, there is a method of measuring a change in impedance of a quartz resonator as a piezoelectric element at atmospheric pressure and vacuum, and checking whether or not a leak occurs in a package of the quartz resonator. Specifically, the electrode terminals 5a and 5b of the measuring jig 3 are brought into contact with the

external electrodes

11a and 11b of the package 6 of the quartz resonator, and the impedance of the quartz resonator is measured.

Documents of the prior art

Patent document

Patent document 1: japanese laid-open patent publication No. 11-51802

Since the measurement method disclosed in patent document 1 is to measure the impedance of 1 quartz resonator by 1 airtight inspection apparatus, there is a problem that the measurement of a plurality of quartz resonators needs to be poor in terms of time efficiency. When measuring the impedance of the plurality of piezoelectric elements, for example, a method is applied in which the plurality of piezoelectric elements are arranged in a matrix on a tray, and the impedance of the arranged piezoelectric elements is measured column by a probe. That is, after the impedance of the piezoelectric elements in an arbitrary column is measured, the impedance of the piezoelectric elements in the next column is measured. When measuring the impedance of the next row of piezoelectric elements, the probe is separated from any row, moved to the position of the next row of piezoelectric elements, and brought into contact with the next row of piezoelectric elements to measure the impedance. However, when the probe is brought into contact with the next row of piezoelectric elements, the contact resistance may be changed due to a contact position shift between the electrode of the piezoelectric element and the probe, and the like, and accurate measurement may not be possible.

Further, the environment inside the measurement chamber, such as the pressure and temperature of the measurement chamber, needs to be changed according to the measurement method. In the case of a vacuum apparatus, a method of maintaining a hermetic seal by using a pressure difference between atmospheric pressure and vacuum is often employed. A sealing member is provided between the vacuum chamber and the door or the gate valve, and a pressure difference between the vacuum and the atmospheric pressure is used as a pressing force. In order to transmit power from an external drive source to the inside of the vacuum chamber, a linear introduction terminal and a rotary introduction terminal are used. In a rotation introduction terminal such as a lip seal or a wilson seal, a pressing structure is formed by a pressure difference between atmospheric pressure and vacuum in order to maintain the sealing between a rotation shaft and a seal portion. Thus, the low pressure side and the high pressure side are designated, and the back pressure cannot be applied. Therefore, in such a rotation introduction terminal, the inside of the container cannot be set to two pressure states of a reduced pressure and a pressurized pressure with respect to the atmospheric pressure. Therefore, when the environment inside the measurement chamber, such as the pressure or temperature of the measurement chamber, is changed, the piezoelectric element may be moved to another measurement chamber whose environment is changed. In other measuring chambers, the piezoelectric element and the probe need to be positioned again, the operation is complicated, and the contact resistance may be changed and accurate measurement may not be possible as in the case of measuring the piezoelectric element row by row.

Disclosure of Invention

The present invention has been made in view of the above circumstances, and an object thereof is to provide a measuring apparatus and a measuring method which can effectively inspect electrical characteristics of an electronic component and have a small error.

The surveying instrument according to claim 1 of the present invention includes: a measurement chamber configured with a plurality of electronic components; an environment changing unit that changes an environment inside the measurement chamber; a plurality of contact probes simultaneously contacting the electrodes of the plurality of electronic components; a power supply unit that applies a voltage to the electronic component via the contact probe; a measuring unit that measures an electrical characteristic of the electronic component based on an output transmitted from the electronic component to which a voltage is applied; and a switching unit that switches electrical connection between the plurality of electronic components and the plurality of contact probes for each electronic component and transmits the output to the measurement unit, wherein the measurement unit measures electrical characteristics of each of the electronic components in a state where the plurality of contact probes are brought into contact with the plurality of electronic components before and after the environment inside the measurement chamber is changed by the environment changing unit.

The contact probe has a spring portion and a pin protruding from one end of the spring portion, the pin being contactable with an electrode of the electronic component.

The environment changing means may be pressure changing means for changing a pressure in the measurement chamber.

The method may further include: 1 st pressure maintaining means for maintaining the pressure in the measurement chamber when the pressure in the measurement chamber is increased by the pressure changing means; and a 2 nd pressure maintaining unit that maintains the pressure in the measurement chamber when the pressure in the measurement chamber is depressurized.

The measurement chamber has an opening into which the electronic component mounted on a tray is inserted, the opening is closed by the tray by inserting the electronic component, and the 1 st pressure maintaining unit can maintain the closed state of the measurement chamber and the pressurized state of the inside by pressing the tray from the outside of the measurement chamber when the inside of the measurement chamber is pressurized by the pressure changing unit.

The 2 nd pressure maintaining means may maintain the sealed state of the measurement chamber by pressing the measurement chamber from the inside to the outside and maintain the depressurized state of the inside when the inside of the measurement chamber is depressurized by the pressure changing means.

The 2 nd pressure maintaining unit may maintain a reduced pressure state of the measurement chamber by disposing the measurement chamber in a reduced pressure chamber and reducing the pressure inside the reduced pressure chamber in a state where the measurement chamber is opened.

The pressure changing means may include a pressure reducing means for reducing the pressure of the measurement chamber and a pressurizing means for pressurizing the measurement chamber.

The pressure changing means may change the pressure inside the measurement chamber, and the pressure changing means may change the pressure inside the measurement chamber to change the pressure.

The measurement chamber may further include a contact block on which the contact probe is mounted, and the switching portion may be disposed on the contact block.

The present invention may further include: a tray on which the electronic component is mounted; a conveying unit that conveys the tray; and an elevating unit configured to elevate the tray, wherein the measuring chamber has an opening closed by the tray, and the tray is conveyed by the conveying unit to a position right below the measuring chamber and then elevated by the elevating unit to close the opening.

The lifting unit has a stage on which the tray is placed, and the stage is lifted so that the opening of the measurement chamber can be closed by the tray.

The tray has a through hole for air suction, and the stage is raised so that the opening of the measurement chamber can be closed by the tray and the stage.

The electronic component may have a piezoelectric element sealed therein.

The measurement method according to claim 2 of the present invention includes: a step of loading a plurality of electronic components into the measuring chamber; a step of simultaneously bringing a plurality of contact probes into contact with electrodes of the plurality of electronic components; changing an environment inside the measurement chamber; and switching and measuring electrical characteristics of the plurality of electronic components before and after the change of the environment inside the measurement chamber for each of the plurality of electronic components in a state where the plurality of contact probes are in contact with the electrodes of the plurality of electronic components.

The step of changing the environment may be a step of depressurizing and then pressurizing the inside of the measurement chamber, or a step of pressurizing and then depressurizing the inside of the measurement chamber.

Effects of the invention

According to the present invention, it is possible to provide a measuring apparatus and a measuring method which can effectively inspect electrical characteristics of an electronic component and have a small error.

Drawings

Fig. 1 is a diagram showing a schematic view of a measuring apparatus according to an embodiment of the present invention.

Fig. 2 is a diagram showing a state in which a quartz resonator is mounted on a tray used in a measuring apparatus, and (a) to (c) are diagrams showing a procedure of switching and measuring outputs from the quartz resonator.

Fig. 3 is a diagram showing a circuit diagram of the measurement unit.

Fig. 4 is a diagram showing a basic configuration of the measuring apparatus according to the present embodiment.

Fig. 5 is a diagram showing a structure of a contact probe.

Fig. 6 is a diagram showing the degree of deformation of the measuring device when the internal pressure increases, (a) is a diagram showing the degree of deformation of the measuring device according to the present embodiment, and (b) is a diagram showing the degree of deformation of the measuring device of the comparative example.

Fig. 7 is a diagram showing an external view of the measuring apparatus according to the present embodiment.

Fig. 8 is an exploded perspective view of the measuring device of fig. 7.

Fig. 9 is a view showing a conveying path for conveying a tray and a closed chamber, where (a) is a view showing a state before the tray conveyed on the conveying path is conveyed to the closed chamber, and (b) is a view showing a state where the tray is conveyed to a position right below the closed chamber.

Fig. 10 is a diagram showing a procedure of forming a sealed structure, where (a) is a diagram showing a state where the stage moves to a position directly below the sealed container, (b) is a diagram showing a process of raising the stage, and (c) is a diagram showing a state where the stage is raised to close the bottom of the sealed container.

Detailed Description

Embodiments of a measuring apparatus and a measuring method according to the present invention will be specifically described below with reference to the drawings. The embodiments described below are only for illustrative purposes and are not intended to limit the scope of the present invention. Therefore, those skilled in the art can adopt an embodiment in which these respective elements or all the elements and the equivalent elements are substituted, and these embodiments are also included in the scope of the present invention.

(outline of measuring apparatus)

A measuring apparatus according to an embodiment of the present invention will be described with reference to fig. 1. Although the vertical and horizontal directions are defined on the paper surface of the drawings, these terms are only for describing the present embodiment and are not intended to limit the directions in which the embodiments of the present invention are actually used. The technical scope described in the claims should not be construed as being limited by these terms. The same is true for the other figures.

As shown in fig. 1, the measurement device 1 includes a measurement chamber 10, a pressure changing unit 20, a contact probe 40, a switching unit 50, and a measurement unit 60.

The measurement chamber 10 is a room in which the quartz resonator 30 to be measured is disposed and in which the electrical characteristics of the quartz resonator 30 are measured. The detailed structure of the measuring chamber 10 will be described later.

The pressure changing means 20 is a means for changing the pressure of the internal environment of the measurement chamber 10. As will be described later, the pressure changing means 20 includes a decompression means 21 for decompressing the inside of the measurement chamber 10 and a pressurization means 22 for pressurizing the inside of the measurement chamber 10 (see fig. 4).

The quartz resonator 30 includes a package 30a in which a quartz piece is sealed, and

external electrodes

30b and 30c as metal films formed on the package 30 a. The quartz resonator 30 is arranged in a matrix with the tray 31 in the measurement chamber 10. For example, as shown in fig. 2, the tray 31 is a resin container in which a plurality of holes 31a for accommodating a plurality of quartz resonators 30 are formed in a matrix. The quartz resonator 30 is housed in each of the plurality of holes 31 a. Further, a through hole for air suction may be provided in the tray 31.

As shown in fig. 1, 4 and 5, the contact probe 40 has a pair of

probes

40a, 40b at one end, and a plurality of contact probes 40 are mounted on a contact block 41. The pair of

probes

40a, 40b are in contact with the

external electrodes

30b, 30c of the quartz resonator 30, respectively. A voltage from a power supply unit 61 (see fig. 3) described later is applied to the quartz resonator 30 via the pair of

probes

40a and 40b, and an output from the quartz resonator 30 is transmitted to the measurement unit 60. The contact probes 40 are provided in the same number as the quartz resonators 30 arranged in a matrix on the tray 31. That is, the plurality of contact probes 40 are provided in the number equal to the number of the plurality of holes 31a formed in the tray 31 shown in fig. 2. The plurality of contact probes 40 are disposed at positions in contact with the plurality of quartz resonators 30 accommodated in the plurality of holes 31a, respectively, and are attached to the contact block 41. The signal line 43 extends from the other end of the plurality of contact probes 40 and is connected to the switching unit 50.

The switching unit 50 switches the electrical connection between the plurality of contact probes 40 and the plurality of quartz resonators 30, and transmits the voltage from the measuring unit 60 to each quartz resonator 30 via the signal line 43. The switching unit 50 switches the electrical connection and transmits the output from each quartz resonator 30 to the measuring unit 60 via the signal line 43. As the switching unit 50, a switch such as a coaxial relay or a reed relay is used. The switching unit 50 is configured such that a plurality of relay members are arranged on a plate-like member. As shown in fig. 2(a), for example, a method of switching the output for each quartz resonator 30 by the switching unit 50 switches the electrical connection between the quartz resonator 30 and the contact probe 40 from one end to the other end of the 1 st row of the tray 31 housing the quartz resonator 30 by the switching unit 50. The quartz resonator 30 shown in black in the figure is a quartz resonator that measures impedance as an electrical characteristic. The switching unit 50 switches the electrical connection between the quartz resonator 30 and the contact probe 40 along the arrow, and sends the output of each quartz resonator 30 to the measuring unit 60. After the impedance measurement of the 1 st column quartz resonator 30 is completed as shown in fig. 2(a), the switching unit 50 switches the electrical connection so that the output from the 2 nd column quartz resonator 30 can be transmitted as shown in fig. 2 (b). As shown in fig. 2(c), the switching unit 50 continues the switching process to the nth row, and transmits the outputs from all the quartz resonators 30 stored in the tray 31 to the measuring unit 60.

The measuring unit 60 measures the electrical characteristics of the quartz resonator 30. In the present embodiment, impedance is measured, but frequency may be measured. A network analyzer is used as the measuring section 60. Hereinafter, a circuit diagram of the measurement unit 60 (hereinafter, the network analyzer is also denoted by the same reference numeral 60) when the network analyzer is used will be described as an example of the measurement unit 60 with reference to fig. 3. The network analyzer 60 is a device that measures a reflected signal or a transmitted signal from an object to be measured when a high-frequency signal is input to the object to be measured, and measures a high-frequency characteristic of the object to be measured. The network analyzer 60 includes a power supply unit 61, a power divider 62, an attenuator 63, a mixer 64, a filter 65, a DSP (Digital Signal Processing) 66, a CPU67, a display unit 68, and a pi circuit 69.

The power supply unit 61 is a power supply device that transmits a scanning signal of a predetermined frequency to the quartz resonator 30 via the contact probe 40, the signal line 43, and the switching unit 50.

The power divider 62 branches the output signal transmitted from the power supply unit 61 into 2 output signals, and outputs signals having the same level characteristics and phase characteristics. One signal branched by the power divider 62 is inputted to a pi circuit 69 in which the quartz resonator 30 is incorporated, and the quartz resonator 30 is oscillated. The output signal from the quartz resonator 30 is input to the input section a of the network analyzer 60. The other output signal branched by the power splitter 62 is input to the input section R of the network analyzer 60 as a reference signal.

The attenuator 63 attenuates the received signals from the input unit R and the input unit a by a desired attenuation amount when the level of the received signals is high. The mixer 64 mixes the input frequency with a local signal synchronized with the frequency of the power supply section 61 and outputs a signal of the IF frequency. The signals input from the input unit a and the input unit R are mixed by the mixer 64, and input to the DSP66 via the filter 65. The DSP66 calculates amplitude and phase data of a desired resolution band width from the input signal.

The CPU67 performs control of each block and data storage. The display unit 68 displays characteristics such as amplitude and phase as frequency characteristics on a display based on the obtained data.

(measuring device)

The measuring device 1 is explained in further detail with reference to fig. 4, 5, 7, 8. The measuring device 1 shown in fig. 4 is a schematic view of the measuring device 1, and is different from an actual device in size. As shown in fig. 4 and 8, the measurement device 1 includes a base 11, a stage 12, a movable block 13, a switching unit 50, a measurement unit 60, a pressure changing unit 20, a control unit 70, and a pressure distribution mechanism 80. The movable block 13 includes a contact probe 40, a contact block 41, and a movable plate 42. In fig. 8, the contact probes 40 and the contact blocks 41 are omitted.

The base 11 is made of stainless steel or the like, and has a movable plate 42, a contact block 41, a switching portion 50, and a pressure distribution mechanism 80 placed on an upper surface thereof in this order. As shown in fig. 7 and 8, the base 11 has a plurality of support columns 11a attached to the lower portion thereof, and the measuring apparatus 1 is provided so that the lower ends of the support columns 11a contact the floor or the like. As shown in fig. 8, a plate-like work pressing tool 32 for pressing the quartz resonator 30 may be disposed on the upper surface of the tray 31 so that the quartz resonator 30 does not move in the tray 31.

As shown in fig. 8, an opening 11b is formed in the base 11, and the opening 11b receives the tray 31 that is carried in and out by the stage 12 being raised and lowered. A recess 11c for receiving the movable block 13 is formed in the upper surface of the base 11. The recess 11c is formed to have an outer shape one step larger than the movable block 13, and when the measuring apparatus 1 is assembled, the movable block 13 is positioned by restricting the lateral movement of the movable block 13.

Stage 12 has a mounting surface for mounting tray 31 on the upper surface, and is formed of an aluminum alloy or the like. The stage 12 is lifted and lowered by a lifting device not shown. The stage 12 moves down to carry the quartz resonator 30 out of the measuring apparatus 1 through the opening 11b, and moves up to carry the quartz resonator 30 into the measuring apparatus 1 through the opening 11 b.

The movable plate 42 is made of stainless steel material or the like, and has an opening 13a for inserting the contact block 41. The movable block 13 is disposed in the recess 11c of the base 11, is movable in cooperation with the pressure distribution mechanism 80, and has a function of distributing pressure.

As shown in fig. 4, the contact block 41 is a member to which a plurality of contact probes 40 are attached, and is fixed to the movable plate 42. The tray 31 is lifted and lowered by the lifting and lowering means of the stage 12, and the probe 40 is brought into contact with the quartz resonator 30. In the present embodiment, the stage 12 is raised on the drawing, the quartz resonator 30 comes into contact with the contact probe 40, and the stage 12 is lowered, so that the quartz resonator 30 is separated from the contact probe 40.

The structure of the contact probe 40 and the contact block 41 is shown in fig. 5. Fig. 5 is a cross-sectional view of a part of the contact block 41 with the contact probe 40 inserted therein, cut in the vertical direction.

As shown in fig. 5, the contact probe 40 includes a pair of spring portions 40c, and probes 40a and 40b extending from one end of each spring portion 40 c. The spring portion 40c is a coil spring, and is manufactured by winding a wire made of carbon steel or stainless steel at equal intervals in a spiral shape. The spring portion 40c extends and contracts along the center line of the spring portion 40 c. The tips of the

probes

40a, 40b are in contact with the

external electrodes

30b, 30c of the quartz resonator 30. The stage 12 is raised, the

probes

40a and 40b are expanded and contracted by the elastic force of the spring portion 40c, and the

probes

40a and 40b are brought into contact with the

external electrodes

30b and 30c of the quartz resonator 30 while being pressed. If the stage 12 is lowered, the

probes

40a and 40b are separated from the

external electrodes

30b and 30 c.

A through hole 41a into which the contact probe 40 is inserted is formed in the contact block 41 so as to penetrate in the vertical direction. The through hole 41a is formed to have different inner diameters at a portion where the spring portion 40c is disposed and at a portion where the

probes

40a and 40b are disposed. The through hole 41a has an inner diameter slightly larger than the outer diameter thereof to restrict the movement of the spring portion 40c and the

probes

40a and 40 b. A part of the

probes

40a, 40b is disposed in the through hole 41a, and the tips of the

probes

40a, 40b protrude from the bottom surface of the contact block 41.

When the stage 12 is raised and the

probes

40a and 40b are in contact with the

external electrodes

30b and 30c of the quartz resonator 30, a space is formed by the stage 12, the tray 31, the movable block 13, and the switching unit 50, and this space becomes the measurement chamber 10 as a measurement space.

As shown in fig. 4 and 8, seals 14 and 15 for maintaining airtightness of the measurement chamber 10 are interposed between the stage 12 and the tray 31, and between the tray 31 and the movable block 13. The

seals

14 and 15 are formed of a synthetic resin member or a rubber member. A switching portion 50 is disposed above the contact block 41, and a seal 16 is interposed between the contact block 41 and the switching portion 50 to maintain airtightness.

The measuring unit 60 receives the signals transmitted from the

external electrodes

30b and 30c, and measures the impedance of the quartz resonator 30. The measurement unit 60 transmits the measured impedance value to the control unit 70.

The control unit 70 determines whether or not the quartz resonator 30 leaks, based on the value of the impedance transmitted from the measurement unit 60. The control unit 70 includes a CPU, a storage device, and the like, and the CPU executes a program stored in the storage device, performs various processes based on data stored in the storage device, and controls the overall operation of the measuring apparatus 1. Further, the control portion 70 may be assembled into the measurement portion 60.

As shown in fig. 4, the pressure changing means 20 is composed of a pressure reducing means 21 and a pressurizing means 22. The decompression means 21 is specifically a vacuum pump, and decompresses the inside of the measurement chamber 10 by opening and closing a gate valve (not shown) provided in a flow path of the vacuum pump. The pressurizing unit 22 is a device that sends gas of a predetermined pressure into the measurement chamber 10. In the present embodiment, for example, compressed nitrogen gas is introduced from the pressurizing unit 22 into the measurement chamber 10.

(pressure dispersing mechanism)

In the measuring apparatus 1 of the present embodiment, when the pressure in the measuring chamber 10 is changed, for example, when the pressure in the measuring chamber 10 is pressurized by the pressurizing means 22, the pressure in the measuring chamber 10 becomes high, and a force for deforming the measuring apparatus 1 is generated by the pressure, and it may be difficult to maintain the sealing property of the measuring space. Specifically, the switching portion 50 closing the upper portion of the sealed space is deformed by the pressure from the inside, and a gap may be generated between the switching portion 50 and the seal 16 as shown in fig. 6(b) from the state shown in fig. 6 (a).

In order to reduce this phenomenon, the pressure distribution mechanism 80 shown in fig. 7 and 8 is provided above the switching unit 50. The pressure dispersion mechanism 80 includes a holding member 81, a pressure dispersion member 82, and a pressure dispersion plate 83, and is assembled by stacking the pressure dispersion plate 83, the pressure dispersion member 82, and the holding member 81 in this order upward on the switching section 50.

The holding member 81 is disposed above the pressure dispersion member 82 and the pressure dispersion plate 83, and is a member for restricting the movement of the pressure dispersion member 82 and the pressure dispersion plate 83 on the base 11. As shown in fig. 8, the holding member 81 includes a long 1 st plate portion 81a extending in the left-right direction and a column portion 81b extending to be bent downward from both ends in the longitudinal direction of the 1 st plate portion 81 a. The lower surface of the 1 st plate portion 81a and the upper portion of the column portion 81b are fixed by a fastening member such as a bolt. A plurality of 1 st protrusions 81c protruding downward are formed at the lower end of the pillar portion 81 b. The 1 st projecting portion 81c is in contact with the upper surface of the base 11.

The pressure dispersion member 82 has: a 2 nd plate portion 82a extending in the right-left direction; a plurality of plate-shaped support portions 82b attached below the 2 nd plate portion 82a and extending orthogonal to the extending direction of the 2 nd plate portion 82 a; and a pair of contact portions 82c extending in the same direction as the support portions 82b below the respective support portions 82 b. Each element of the pressure dispersion member 82 is formed of stainless steel material or the like.

A plurality of 2 nd projecting portions 82d projecting downward are formed at lower portions of both end portions of each contact portion 82 c. The 2 nd protrusion 82d is in contact with the pressure dispersion plate 83, and disperses the pressure applied to the switching portion 50 and the movable block 13.

The pressure dispersion plate 83 is disposed between the pressure dispersion member 82 and the switching portion 50, and has a plurality of openings 83a formed at positions corresponding to the plurality of relay members of the switching portion 50. The switching portion 50 is exposed outside the measuring apparatus 1 through the plurality of openings 83 a. The switching unit 50 may have a cooling member such as a heat sink, and may be configured to release heat generated by the switching unit 50 to the outside. When the pressure dispersion member 82 is placed on the pressure dispersion plate 83, a plurality of 3 rd protrusions 83b that contact the plurality of 2 nd protrusions 82d of the pressure dispersion member 82 are provided on the upper surface of the pressure dispersion plate 83.

By using such a pressure distribution mechanism 80, when the pressure in the measurement chamber 10 changes, the plurality of 2 nd protrusions 82d and the plurality of 3 rd protrusions 83b come into contact, and the pressure is distributed. Specifically, the pressure transmitted from the 3 rd projection 83b at 16 points to the 2 nd projection 82d of the same number is transmitted to the pressure dispersion member 82 connected to 8 points at the respective midpoints. This repetition concentrates on 1 point of the holding member 81, and the pressure is uniformly distributed. The movable plate 42, the switching unit 50, and the contact block 41, which are disposed on the upper portion of the base 11, are lifted from the base 11, and can move to follow the upper surface of the stage 12. When such a pressure distribution mechanism 80 is used, even if the inside of the measurement chamber 10 is pressurized, it is possible to prevent gaps from being generated between the sealing

members

14, 15, 16 and other components. For example, when the inside of the measurement chamber 10 is pressurized, as shown in fig. 6(a), no gap is generated between the seal and other components. Therefore, the sealed state of the measurement chamber 10 can be maintained. Further, the

seal members

14, 15, 16 can be prevented from sticking to other members, and the sealed state is difficult to release.

Further, the seal 14 between the tray 31 and the stage 12, the seal 15 between the movable block 13 and the tray 31, or the seal 16 between the switching unit 50 and the movable block 13, which are provided to maintain the airtightness in the measurement chamber 10, may be stuck, and it may be difficult to release the airtight state, or the seal may be broken. In order to release this state, a unit that does not peel off the seal mechanically may be provided.

(pressure maintenance unit)

If the pressure inside the measurement chamber 10 is changed by the pressure changing means 20, it may be difficult to maintain a good sealed state of the measurement chamber 10 depending on the difference between the internal pressure of the measurement chamber 10 and the external pressure of the measurement chamber 10. In the case where the sealed state cannot be maintained, since the pressure cannot be maintained, in the present embodiment, the 1 st pressure maintaining means and the 2 nd pressure maintaining means for maintaining the pressure while maintaining the sealed state of the measurement chamber 10 may be provided.

The 1 st pressure maintaining unit maintains the pressurized state of the measurement chamber 10 when the inside of the measurement chamber 10 is pressurized, and the 2 nd pressure maintaining unit maintains the depressurized state of the measurement chamber 10 when the inside of the measurement chamber 10 is depressurized. The 2 nd pressure maintaining means is applied to different means depending on whether the measuring chamber 10 is disposed under atmospheric pressure or reduced pressure.

When the inside of the measurement chamber 10 is pressurized by the pressurizing means 22, a means for pressing the movable block 13 from the outside of the measurement chamber 10 in the vertical direction is the 1 st pressure maintaining means. In the present embodiment, the tray 31 is pressed from below via the stage 12 by a not-shown lifting device, and the pressure dispersion plate 83 presses the switch 50 from above via the holding member 81 fixed to the base 11. As shown in fig. 4 and 7, the pressure distribution mechanism 80 presses the switch 50 from above with a pressing force G1, and the stage 12 presses the switch 50 from below with a pressing force G1 on the tray 31, thereby maintaining the sealed state of the measurement chamber 10. Specifically, the pressurized state is maintained by reliably sealing between the switching unit 50 and the movable block 13, between the movable block 13 and the tray 31, and between the tray 31 and the stage 12. By configuring to separate the measurement chamber 10 from the base 11 and press the measurement chamber 10 by the pressure distribution mechanism 80 fixed to the base 11, the measurement chamber 10 can be pressed from the up-down direction by 1 lifting device of the stage 12. The 1 st pressure maintenance unit may be used either under atmospheric pressure or under reduced pressure.

When the measurement chamber 10 is disposed at atmospheric pressure and the inside of the measurement chamber 10 is depressurized by the depressurizing means 21, the means for pressing the switch 50 and the tray 31 in the vertical direction from the inside of the measurement chamber 10 is the 2 nd pressure maintaining means. As shown in fig. 4, the biasing force of the spring portion 40c of the contact probe 40 presses the switching portion 50 and the tray 31 against the force pressing the measurement chamber 10 from the outside due to the decompression, and the pressing force G2 presses the switching portion and the tray 31, thereby sealing the measurement chamber 10 and maintaining the decompressed state. The 2 nd pressure maintaining means may be configured to suppress deformation of the switching portion 50 or the tray 31, and may be configured to provide a member extending in the vertical direction inside the measurement chamber 10 and to press the switching portion 50 and the tray 31 from the inside of the measurement chamber 10. Alternatively, a part of the contact block may extend in the vertical direction to prevent the switching unit 50 or the tray 31 from deforming inward.

In this way, when the inside of the measurement chamber 10 is pressurized, the measurement chamber 10 can be reliably sealed by the 1 st pressure maintaining unit against the expansion force of the measurement chamber 10, regardless of the atmospheric pressure or the reduced pressure. When the inside of the measurement chamber 10 is depressurized under atmospheric pressure, the measurement chamber 10 can be reliably sealed by the 2 nd pressure maintaining unit against the contraction force of the measurement chamber 10. Since the pressure difference between the inside and the outside of the measurement chamber 10 in the depressurized state is smaller than the pressure difference between the inside and the outside of the measurement chamber 10 in the pressurized state, the 2 nd pressure maintaining means can maintain the sealed state with a smaller force than the 1 st pressure maintaining means.

When the measurement chamber 10 is placed under reduced pressure and the inside of the measurement chamber 10 is reduced in pressure, the environment in which the measurement chamber 10 is placed is reduced in pressure by, for example, operating a vacuum pump in a state in which the measurement chamber 10 is opened. The inside of the measurement chamber 10 is brought into a reduced pressure state by reducing the pressure of the environment in which the measurement chamber 10 is disposed. When the inside of the measurement chamber 10 is in a reduced pressure state, the measurement chamber 10 maintains the pressure of the measurement chamber 10 in an open state. When the measurement chamber 10 is disposed under reduced pressure, the 2 nd pressure maintaining means is equivalent to depressurizing the inside of the measurement chamber 10 by the depressurizing means 21.

In this way, when the measurement chamber 10 is placed under reduced pressure and the inside of the measurement chamber 10 is pressurized by the pressurizing means 22, the 1 st pressure maintaining means is applied. When the inside of the measurement chamber 10 is depressurized, a 2 nd pressure maintaining unit that depressurizes the atmosphere in which the measurement chamber 10 is disposed by using a vacuum pump is applied.

(method of Forming sealing Structure)

Further, in the present embodiment, the sealing structure of the measuring apparatus 1 can be formed on the conveying line by being separated from the driving mechanism such as the rotary introduction. When the tray 31 housing the quartz resonator 30 needs to be carried into and out of the measurement chamber 10 and a power transmission mechanism for transporting the quartz resonator into the measurement chamber 10 is introduced, it is difficult to form a sealed structure of the measurement chamber 10 in two states of pressure reduction and pressure increase with respect to the atmospheric pressure. In the present embodiment, by using a method capable of forming a sealed structure separately from a line, the sealed structure can be easily formed in two states of pressure reduction and pressure increase with respect to the atmospheric pressure. Hereinafter, a method of forming the sealed structure will be specifically described.

Fig. 9 is a view showing the transfer path 90 and the sealed chamber 100 as viewed from above. Here, the closed chamber 100 is a general term for collectively combining the movable block 13, the switching unit 50, the tray 31, and the stage 12. The closed chamber 100 is separated from the base 11. As shown in fig. 8, an opening 11b is formed in a lower portion of the base 11, and the tray 31 is inserted through the opening 11 b. Further, a stage 12 which is moved up and down by a lift device, not shown, is disposed at a lower portion of the closed chamber 100. The stage 12 raises the tray 31 conveyed to the stage 12, and passes through the opening 11b to contact the movable block 13 of the closed chamber 100. The tray 31 and the movable block 13 are closely attached to each other, thereby forming a sealed chamber 100.

As shown in fig. 9, the conveyance path 90 is formed by arranging the conveyance lines 91 in which the plurality of conveyers ローラ 90a are linearly arranged at 2 intervals. The tray 31 accommodating the quartz resonator is conveyed on the conveying paths 90 formed on the pair of conveying lines 91 by a conveying device not shown.

The following procedure is performed in order to cause the tray 31 and the stage 12 to function as a cover of the closed chamber 100. First, the tray 31 on the conveying path 90 is conveyed by the conveying device in the arrow direction of fig. 9. As shown in fig. 10(a), the tray 31 stops directly below the movable block 13 which is a part of the sealed chamber 100. Then, as shown in fig. 10(b), the stage 12 is raised, and the tray 31 stopped just below the movable block 13 is transferred onto the stage 12. As shown in fig. 10(c), the stage 12 further moves upward, and the tray 31 and the stage 12 become a part of the sealed chamber 100, and the sealed chamber 100 is sealed. The sealing method described here is premised on the case where the through hole for air extraction is formed in the tray 31, and only the tray 31 can function as a lid of the sealed chamber 100 when the through hole for air extraction is not formed in the tray 31.

By configuring to seal the sealed chamber 100 by placing the tray 31 on the stage 12 in this manner, the unit forming the sealed structure and the conveyance unit can be separated. By separating the unit for forming the sealed structure and the transfer unit, since there is no driving unit inside the sealed chamber 100, it is not necessary to use an introduction terminal for power transmission, and the sealed structure can be easily manufactured in two states of pressure reduction and pressurization with respect to the atmospheric pressure.

Further, since the unit forming the sealed structure and the conveyance unit can be separated from each other, the conveyance unit does not need to be provided inside the measuring apparatus 1, and the measuring apparatus 1 can be downsized.

(measurement method)

Referring to fig. 4 and 8, a method for measuring the electrical characteristics of the quartz resonator 30 using the measuring apparatus 1 will be described する. In the present embodiment, an impedance, which is one of the electrical characteristics of the quartz resonator 30, is measured, and an inspection is performed to determine whether the quartz resonator 30 has a leak. Since the impedance of the quartz resonator 30 changes with a change in pressure, a change in pressure inside the package of the quartz resonator 30 is detected by measuring the change in impedance, and the presence or absence of a leak is determined.

As shown in fig. 4 and 8, the movable plate 42, the contact block 41, the switching section 50, and the pressure distribution mechanism 80 are provided on the base 11. A contact probe 40 is mounted on the contact block 41.

A tray 31 containing a plurality of quartz resonators 30 to be measured is placed on the stage 12, and is raised by a not-shown raising and lowering device, and the tray 31 is carried into the measurement chamber 10 through the opening 11b of the base 11. The tray 31, the movable plate 42, the contact block 41, and the switching unit 50 form an inspection space. In this state, the measurement chamber 10 is sealed.

The

external electrodes

30b and 30c of the quartz resonator 30 housed in the tray 31 are brought into contact with the

probes

40a and 40b while the stage 12 is raised and the measurement chamber 10 is sealed. At this time, the number of the quartz resonators 30 and the number of the contact probes 40 accommodated in the tray 31 are the same, and all the quartz resonators 30 are in contact with the pair of

probes

40a and 40b of the contact probes 40.

The inside of the measurement chamber 10 is at atmospheric pressure, and the impedance of the quartz resonator 30 is measured by the network analyzer 60 in this state. A voltage is applied to the quartz resonator 30 from the power supply unit 61 of the network analyzer 60 via the

probes

40a and 40b, and the impedance of the quartz resonator 30 is measured. At the time of measurement, the electrical connection between the quartz resonator 30 and the contact probe 40 is switched for each quartz resonator 30 by the switching unit 50, and an output signal is transmitted from the network analyzer 60. Then, for each quartz resonator 30, an output from the quartz resonator 30 is transmitted to the network analyzer 60. By the switching process by the switching unit 50, the impedance of all the quartz resonators 30 is measured in a state where all the quartz resonators 30 are brought into contact with the contact probe 40. The value of the impedance measured under atmospheric pressure is temporarily stored in a storage unit (not shown) of the control unit 70.

Next, the inside of the measurement chamber 10 is depressurized by the depressurization means 21, the quartz resonator 30 is placed in the inspection space in a depressurized state for a predetermined period, and then a voltage is applied from the power supply 61 of the network analyzer 60 to the quartz resonator 30 through the

probes

40a and 40b, thereby measuring the impedance which is the frequency characteristic of the quartz resonator 30. In the measurement, the electrical connection between the quartz resonator 30 and the contact probe 40 is switched by the switching unit 50, and the impedance is measured for each quartz resonator 30, as in the case of the atmospheric pressure. The impedance at the time of pressure reduction is temporarily stored in the storage unit of the control unit 70.

Then, the control unit 70 compares the value of the impedance at the atmospheric pressure with the value of the impedance at the reduced pressure, and determines that leakage has occurred from the quartz resonator 30 if there is a change in the impedance.

The measurement of the impedance at atmospheric pressure and the measurement of the impedance at decompression are performed in a state where the contact probe 40 and the

external electrodes

30b, 30c of the quartz resonator 30 are in contact, and the contact probe 40 and the quartz resonator 30 do not move relative to each other. Therefore, the spring portion 40c of the contact probe 40 does not move along the center line, and the positions of the

probes

40a, 40b do not change. Therefore, an appropriate value of the impedance can be measured without changing the contact resistance.

(modification example)

In the above-described measurement method, the impedance of the quartz resonator 30 before the change (at the time of atmospheric pressure) and after the change (at the time of depressurization) is measured from the time of atmospheric pressure to the time of pressure change at the time of depressurization, and the leak inspection of the quartz resonator 30 is performed. The present embodiment is not limited to this modification, and can be applied to pressure change from pressure reduction to pressure increase or pressure increase to pressure reduction.

For example, the present invention can also be applied to a leak inspection method in which the quartz resonator 30 is pressurized after being placed under reduced pressure for a predetermined period of time, or the quartz resonator 30 is depressurized after being placed under increased pressure for a predetermined period of time, the internal pressure of the quartz resonator 30 is determined from the difference between the pressure change at the time of depressurization and the pressure change at the time of pressurization, and the amount of leakage is derived from the internal pressure.

When the quartz resonator 30 is pressurized after being left under reduced pressure for a predetermined period of time, the inside of the measurement chamber 10 is first depressurized by the depressurization means 21, the quartz resonator 30 is left in the inspection space for a predetermined period of time in a depressurized state, and then a voltage is applied from the power supply section 61 of the network analyzer 60 to the quartz resonator 30 via the

probes

40a and 40b, thereby measuring the impedance which is the frequency characteristic of the quartz resonator 30. At the time of measurement, the electrical connection between the quartz resonator 30 and the contact probe 40 is switched by the switching unit 50, and the impedance is measured for each quartz resonator 30.

The impedance of all the quartz resonators 30 is measured in a state where all the quartz resonators 30 are in contact with the contact probes 40, and the measured value is transmitted to the control unit 70. Then, the inside of the measurement chamber 10 is pressurized by the pressurizing means 22, the quartz resonator 30 is placed in the measurement chamber 10 in a pressurized state for a predetermined period, and thereafter the impedance of the quartz resonator 30 is measured. At the time of measurement, the electrical connection between the quartz resonator 30 and the contact probe 40 is switched, and the impedance is measured for each quartz resonator, as in the case of pressure reduction.

The control unit 70 calculates whether or not gas leaks from the package of the quartz resonator 30 and the amount of leakage from the change in impedance at the time of pressure reduction and the change in impedance at the time of pressure increase.

In the modification は, the pressure changing means 20 includes two means, i.e., the decompression means 21 and the pressurization means 22, and is capable of measuring the frequency characteristics of the quartz resonator 30 as all the measurement objects while changing the pressure in the measurement chamber 10 and in a state where the contact probe 40 is in contact with the quartz resonator 30.

With the present embodiment, in the measurement chamber 10 in which the pressure changes, the impedance can be measured in a state in which the contact probe 40 is in contact with the quartz resonator 30 that is all the measurement objects. Therefore, the contact resistance of the contact probe 40 and the

external electrodes

30b, 30c of the quartz resonator 30 can be prevented from changing, and the impedance of the quartz resonator 30 can be measured stably.

In the present embodiment, since the frequency characteristics can be measured by bringing the plurality of contact probes 40 into contact with the quartz resonator 30 to be measured, the number of operations can be reduced, and effective measurement can be performed.

Since the impedance can be measured in a state of contact with the quartz resonator 30 in the present embodiment, it is not necessary to provide a driving device for moving the contact probe on the tray 31, and the device can be made compact.

In the present embodiment, even if the contact probe 40 having the spring portion 40c is used, since the contact probe does not move during measurement, the stroke of the spring portion 40c does not change, and the CI value does not fluctuate.

In the present embodiment, since the 1 st pressure maintaining means and the 2 nd pressure maintaining means for maintaining the pressure in the measurement chamber 10 are provided, even when the pressure in the measurement chamber 10 is changed to measure the electrical characteristics, the measurement can be performed accurately.

In the present embodiment, since the decompression unit 21 and the pressurization unit 22 are mounted on the measurement chamber 10, the inspection of the change in the environment inside the measurement chamber 10 can be performed by 1 measurement chamber 10, and therefore, the apparatus can be made compact and the installation space of the apparatus can be reduced.

This embodiment can be used for checking a change in pressure in the measurement chamber 10, and is particularly effective for checking a leak in the package of the quartz resonator 30.

In the present embodiment, since the pressure distribution mechanism 80 is provided, the pressure in the measurement chamber 10 can be prevented from being pressurized, and the sealed state of the measurement chamber 10 can be released by the pressure seal coming off.

In the present embodiment, since the pressure distribution mechanism 80 is provided, it is possible to prevent the pressure in the measurement chamber 10 from being reduced, the seal from being stuck, and the sealed state from being released with difficulty.

In the present embodiment, the conveying unit for conveying the tray 31 and the lifting unit for lifting and lowering the tray are provided, and the unit having the sealed structure and the conveying unit can be separated. Therefore, the driving unit cannot be present inside the measuring chamber 10, and a sealed structure can be easily manufactured in both a reduced pressure state and a pressurized state.

In the present embodiment, the measurement of the electrical characteristics of the quartz resonator 30 is performed by switching the quartz resonator 30 by the switching unit 50, but a plurality of switching may be performed. If the number of ports of the network analyzer is increased, for example, in fig. 2, the quartz resonator 30 mounted on the tray 31 can be collectively measured for each column. If such a measurement is performed, the measurement time can be shortened.

In the present embodiment, the pressure changing means 20 is described as the environment changing means, but other environment changing means may be applied. For example, the environment change of temperature change can be applied. Since the piezoelectric element also changes in impedance when the ambient temperature changes, it can also be used when measuring the change in impedance when the ambient temperature changes. For example, a unit for cooling the quartz resonator disposed in the measurement chamber with nitrogen gas or the like, a unit for heating the quartz resonator with a peltier element or the like, and the like are used as the temperature changing unit.

In the present embodiment, two environment changing means including the pressure reducing means 21 and the pressurizing means 22 are described, but other environment changing means may be provided. For example, a temperature changing means may be attached to the measuring apparatus 1 in addition to the decompression means 21 and the pressurization means 22. In this way, according to the measuring method, a plurality of environment changing means can be installed, and all the quartz resonators 30 to be measured can be collectively inspected in the environment in the measuring chamber 10 changed by the plurality of environment changing means.

In the present embodiment, two environment changing means, i.e., the decompression means 21 and the pressurization means 22, have been described, but one of them may be removed or replaced with another environment changing means, and a measuring apparatus having versatility can be provided.

In the present embodiment, the holding member 81 is described as being formed by the 1 st plate part 81a and the pillar part 81b, but the shape of the pressure dispersion member 82 and the pressure dispersion plate 83 may be any shape as long as the shape can restrict the pressure dispersion member to the base 11, and for example, the shape may be restricted by intersecting a pair of rod members and protruding the pillar member from the lower part of the rod member.

In the present embodiment, the coaxial relay or the reed relay is used as the switching unit 50, but other switching means may be used. For example, a multiplexer may be connected to the contact probe 40 to switch the electrical connection between the quartz resonator 30 and the contact probe 40.

In the present embodiment, the description has been given of the contact probes 40 having the number of contact with all of the plurality of quartz resonators 30 mounted on the tray 31. The number of the quartz resonators 30 and the number of the contact probes 40 to be measured may be the same, and it is not necessary to store the quartz resonators 30 in the holes 31a of all the trays 31. Further, if the tray 31 accommodates the already-measured quartz resonator 30, it is not necessary to bring the contact probe 40 into contact with the measured quartz resonator 30.

In the present embodiment, the seal 14 is used between the tray 31 and the stage 12, but when there is no through hole in the lower surface of the tray 31, the seal 14 may be omitted to seal the measurement chamber 10 only in the tray 31.

In the present embodiment, a piezoelectric element is used, but the present invention can also be used as a resistance value measurement or conduction inspection device for other electronic components such as an IC package and a circuit board.

The present application is based on Japanese patent application No. 2020 and No. 174636, filed on 16/10/2020. The specification, claims and all drawings referred to in Japanese patent application No. 2020 and 174636 are hereby incorporated in this specification.

Industrial applicability

The present invention can be used for a measuring apparatus and a measuring method for measuring electrical characteristics of an electronic component.

Claims

1. A measuring device having:

a measurement chamber configured with a plurality of electronic components;

an environment changing unit that changes an environment inside the measurement chamber;

a plurality of contact probes simultaneously contacting the electrodes of the plurality of electronic components;

a power supply unit that applies a voltage to the electronic component via the contact probe;

a measuring unit that measures an electrical characteristic of the electronic component based on an output transmitted from the electronic component to which a voltage is applied; and

a switching section that switches electrical connections of the plurality of electronic components and the plurality of contact probes for each of the electronic components and sends the output to the measurement section,

before and after the environment inside the measuring chamber is changed by the environment changing means, the electrical characteristics of the electronic components are measured by the measuring unit in a state where the plurality of contact probes are brought into contact with the plurality of electronic components.

2. The measurement device of claim 1,

the contact probe has a spring portion and a pin protruding from one end of the spring portion, the pin being in contact with an electrode of the electronic component.

3. The measurement device of claim 1,

the environment changing means is pressure changing means for changing a pressure in the measurement chamber.

4. The measurement device of claim 3,

the measuring device further has:

1 st pressure maintaining means for maintaining the pressure in the measurement chamber when the pressure in the measurement chamber is increased by the pressure changing means; and

a 2 nd pressure maintaining unit that maintains the pressure in the measurement chamber when the pressure in the measurement chamber is depressurized.

5. The measurement device of claim 4,

the measurement chamber has an opening into which the electronic component mounted on a tray is inserted, the opening being closed by the tray by the electronic component being inserted,

the 1 st pressure maintaining unit maintains the sealed state of the measurement chamber and maintains the pressurized state of the inside by pressing the tray from the outside of the measurement chamber when the inside of the measurement chamber is pressurized by the pressure changing unit.

6. The measurement device of claim 5,

the 2 nd pressure maintaining means maintains the sealed state of the measurement chamber by pressing the measurement chamber from the inside to the outside and maintains the depressurized state of the inside when the inside of the measurement chamber is depressurized by the pressure changing means.

7. The measurement device of claim 5,

in a state where the measurement chamber is opened, the measurement chamber is disposed in a decompression chamber, and the inside of the decompression chamber is decompressed, so that the 2 nd pressure maintaining unit maintains the decompressed state of the measurement chamber.

8. The measurement device of claim 3,

the pressure changing means includes a pressure reducing means for reducing the pressure of the measurement chamber and a pressurizing means for pressurizing the measurement chamber.

9. The measurement device of claim 3,

the measuring apparatus further includes a pressure distribution mechanism for distributing a force for deforming the measuring chamber, which is generated by changing the pressure when the pressure inside the measuring chamber is changed by the pressure changing unit.

10. The measurement device of claim 1,

the measurement chamber further includes a contact block on which the contact probe is mounted, and the switching unit is disposed on the contact block.

11. The measurement device of claim 1,

the measuring device further has:

a tray on which the electronic component is mounted;

a conveying unit that conveys the tray; and

a lifting unit which lifts the tray,

the measuring chamber has an opening closed by the tray,

the tray is conveyed to a position right below the measuring chamber by the conveying unit, and then is lifted by the lifting unit to close the opening.

12. The measurement device of claim 11,

the lifting unit is provided with a carrier for carrying the tray,

the opening of the measurement chamber is closed by the tray by the carrier being raised.

13. The measurement device of claim 12,

the tray has a through hole for air extraction,

by the stage being raised, the opening of the measurement chamber is closed by the tray and the stage.

14. The measurement device of claim 1,

the electronic component is internally sealed with a piezoelectric element.

15. A measurement method, having:

a step of placing a plurality of electronic components in the measuring chamber;

a step of simultaneously bringing a plurality of contact probes into contact with electrodes of the plurality of electronic components;

changing an environment inside the measurement chamber; and

and a step of switching and measuring the electrical characteristics of the plurality of electronic components before and after the change of the environment inside the measurement chamber for each of the plurality of electronic components in a state where the plurality of contact probes are in contact with the electrodes of the plurality of electronic components.

16. The measurement method according to claim 15,

the step of changing the environment is a step of depressurizing and then pressurizing the inside of the measurement chamber, or a step of pressurizing and then depressurizing the inside of the measurement chamber.