CN114383434B - Furnace chamber inflating dust removing system - Google Patents
Furnace chamber inflating dust removing system Download PDFInfo
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- CN114383434B CN114383434B CN202210039985.3A CN202210039985A CN114383434B CN 114383434 B CN114383434 B CN 114383434B CN 202210039985 A CN202210039985 A CN 202210039985A CN 114383434 B CN114383434 B CN 114383434B
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- 239000000428 dust Substances 0.000 title claims abstract description 121
- 238000004140 cleaning Methods 0.000 claims abstract description 66
- 230000008021 deposition Effects 0.000 claims abstract description 21
- 238000007789 sealing Methods 0.000 claims description 32
- 238000000605 extraction Methods 0.000 claims description 29
- 238000005273 aeration Methods 0.000 claims description 6
- 239000013013 elastic material Substances 0.000 claims description 3
- 239000011324 bead Substances 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 15
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 abstract description 9
- 229910010271 silicon carbide Inorganic materials 0.000 abstract description 9
- 239000000126 substance Substances 0.000 abstract description 8
- 230000015572 biosynthetic process Effects 0.000 abstract description 6
- 238000003786 synthesis reaction Methods 0.000 abstract description 6
- 238000000746 purification Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 35
- 239000007788 liquid Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 12
- 238000001914 filtration Methods 0.000 description 10
- 239000013078 crystal Substances 0.000 description 9
- 238000005452 bending Methods 0.000 description 8
- 230000033001 locomotion Effects 0.000 description 8
- 230000000740 bleeding effect Effects 0.000 description 6
- 239000012634 fragment Substances 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 235000009537 plain noodles Nutrition 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 238000005096 rolling process Methods 0.000 description 6
- 238000001816 cooling Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 238000005086 pumping Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 3
- 239000010865 sewage Substances 0.000 description 3
- 239000003039 volatile agent Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000443 aerosol Substances 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 239000011863 silicon-based powder Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D17/00—Arrangements for using waste heat; Arrangements for using, or disposing of, waste gases
- F27D17/008—Arrangements for using waste heat; Arrangements for using, or disposing of, waste gases cleaning gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/02—Supplying steam, vapour, gases, or liquids
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
- Cleaning In General (AREA)
Abstract
The invention belongs to the field of silicon carbide synthesis, in particular to a furnace chamber gas-filled dust-removing system, which comprises a furnace body, a platform frame and a furnace chamber air exhaust pipeline; the furnace body is fixedly connected with the platform frame; the surface of a furnace top disc of the furnace body is fixedly connected with a first air charging pipe; the surface of the furnace chassis of the furnace body is fixedly connected with a second air charging pipe; the surface of the platform frame is fixedly connected with a main exhaust pipe; the main exhaust pipe is fixedly connected with a pipeline deposition bin; a dust hood is fixedly connected to the middle part of the furnace body; the exhaust port of the dust hood is fixedly connected with a furnace chamber exhaust pipeline; the invention effectively realizes the cleaning of substances such as volatile matters and dust in the synthetic furnace, greatly improves the cleaning effect on the volatile matters and the dust by the up-down convection pressurized airflow, improves the cleaning efficiency in the furnace, and ensures the rapid and full purification of the inside of the synthetic furnace before the synthetic furnace is opened by the way of negative pressure suction.
Description
Technical Field
The invention belongs to the field of silicon carbide synthesis, and particularly relates to a furnace chamber gas-filling dust-removing system.
Background
The vertical induction CSP-PC-150 silicon carbide synthesizing furnace is prepared through mixing high purity carbon powder, high purity silicon powder and quantitative high purity additive homogeneously in certain molar ratio, filling high purity argon, nitrogen or other gas into a crucible, heating, maintaining temperature, replacing argon, nitrogen or other gas atmosphere, cooling, etc. and features high purity, high heat resistance, and no environmental pollution.
In the ultra-high vacuum silicon carbide raw material synthesis furnace system disclosed by the invention, a furnace chamber is of a cylindrical vertical double-layer water-cooling structure, a furnace cover is arranged on the furnace chamber, the furnace cover is of a double-layer water-cooling structure, an infrared temperature measuring component is positioned at the top end of the furnace cover, and the furnace cover can be lifted and unscrewed by an electric lifter; the furnace chamber is connected with the molecular pump through a gate valve and a pumping elbow to form a main pumping pipeline of the system, and is connected with the mechanical pump through an angle valve and a corrugated pipe to form a side pumping pipeline of the system; the sample supporting mechanism is fixed with the furnace chamber chassis, and the induction heating component and the measuring component are respectively fixed with the furnace chamber side flange.
In the prior art, after the synthesis of the synthesis furnace is completed, volatile matters such as carbide, silicide and the like, dust and the like can be generated in the furnace body, and the substances can influence the quality of silicon carbide single crystals in the single crystal furnace when not cleaned in time, and meanwhile, the problems of surrounding air pollution can be solved when the silicon carbide single crystals are not cleaned effectively before being opened.
To this end, the invention provides a furnace chamber aeration dust removal system.
Disclosure of Invention
In order to overcome the deficiencies of the prior art, at least one technical problem presented in the background art is solved.
The technical scheme adopted for solving the technical problems is as follows: the invention relates to a furnace chamber air-charging dust-removing system, which comprises a furnace body, a platform frame and a furnace chamber air-exhausting pipeline; the furnace body is fixedly connected with the platform frame; the platform frame comprises a bottom layer frame and a top layer frame; the surface of a furnace top disc of the furnace body is fixedly connected with a first air charging pipe; the surface of the furnace chassis of the furnace body is fixedly connected with a second air charging pipe, and the first air charging pipe and the second air charging pipe are externally connected with an air compressor; the surface of the platform frame is fixedly connected with a main exhaust pipe, and the main exhaust pipe is externally connected with a negative pressure source; the main exhaust pipe is fixedly connected with a pipeline deposition bin; a pneumatic butterfly valve is connected between the pipeline deposition bin and the main exhaust pipe; a dust hood is fixedly connected to the middle part of the furnace body; the exhaust port of the dust hood is fixedly connected with a furnace chamber air exhaust pipeline, one end of the furnace chamber air exhaust pipeline is communicated with the inside of the furnace body, and the other end of the furnace chamber air exhaust pipeline is communicated with the pipeline deposition bin; during operation, through set up first gas tube and second gas tube respectively in the surface of stove top tray and stove bottom tray, through with the compressed air of high pressure, high-flow, increase the gas velocity and take away volatile matter, dust etc. and in the inflation process, require the blowing down, wait after the stove cools off, and blow down fast before opening the stove, avoid the stove under uncooled condition, blow into compressed air, air and in-furnace medium take place chemical reaction and influence crystal quality, the gas that carries volatile matter and dust can be inhaled the suction hood, the high velocity blows, the volatile matter such as dust in the stove is blown up by the relatively wide range, the dust is blown to the furnace chamber middle part along the direction of air current from the place that the velocity of flow is big, and through the stove chamber suction pipeline ingress pipeline deposition storehouse on suction hood surface, volatile matter and dust in the air are filtered, reach the purpose of dust removal, then the gas through the filtration can be derived through the main pipe, when the pipeline deposition storehouse is great, can open in the pipeline deposition storehouse, and carry out inside clearance, the inside is favorable to the inside through the quick suction mode of upper and lower intermediate suction, the inside clearance is realized in the invention, the dust is removed through the quick suction mode of the interior clearance of the dust is realized in the dust is fully through the place of the suction hood, and the dust is fully cleaned up through the invention.
Preferably, the air inlet of the main exhaust pipe is connected with a ground dust collection pipeline; the air inlet of the main exhaust pipe is connected with a platform dust collection pipeline; the end surfaces of the ground dust collection pipeline and the platform dust collection pipeline are fixedly connected with a platform dust collection control valve interface; during operation, because the synthetic furnace runs for a long time, the dust on the bottom layer frame and the top layer frame of the platform frame are more, through setting up ground dust collection pipeline and platform dust collection pipeline, the negative pressure in the main exhaust pipe is utilized for ground dust collection pipeline and platform dust collection pipeline produce great negative pressure, when needing to use, through the external pipeline of platform dust collection control valve interface, the realization adsorbs the dust on each position surface of platform frame.
Preferably, the number of the first air charging pipe, the second air charging pipe and the furnace chamber air exhaust pipeline is three, and the first air charging pipe, the second air charging pipe and the furnace chamber air exhaust pipeline are uniformly distributed along the outer ring of the furnace body; the surfaces of the first air charging pipe and the second air charging pipe are fixedly connected with a vacuum electromagnetic valve at the position close to the furnace body; during the crystal growth period of the silicon carbide synthetic furnace, the gas charging system is in a normally closed state, the fact that the first gas charging pipe and the second gas charging pipe which are connected with compressed air influence the performance of the whole furnace during the operation period of the furnace is considered, the travel of the first gas charging pipe and the second gas charging pipe which are used for compressed air is too long, the vacuum degree and the sealing performance are influenced, so that the connecting pipe orifice positions of the first gas charging pipe and the second gas charging pipe are connected with a vacuum electromagnetic valve through hard pipes, the vacuum electromagnetic valve is opened only before the furnace is opened, the compressed air is charged into the furnace, and other times are in the normally closed state.
Preferably, the furnace chamber air exhaust pipelines are all of L-shaped structural design; a cleaning hole is formed in the corner position of the furnace chamber air exhaust pipeline; a flange blind plate is arranged at the cleaning hole position of the corner of the exhaust pipe of the furnace chamber; during operation, through setting up the flange blind plate, flange blind plate convenient to detach is convenient for clear up the inside of three stove chamber exhaust duct for the inside long-term deposited volatile matter and the dust of stove chamber exhaust duct obtains effectively clear away, guarantees that stove chamber exhaust duct is unblocked, avoids the serious narrowing of stove chamber exhaust duct even totally to block up the problem.
Preferably, the surface of the furnace chamber air exhaust pipeline is provided with threads; the surface of the furnace chamber air exhaust pipeline is connected with a sealing plug through threads; a reel is arranged at one end of the furnace chamber air exhaust pipeline, which is far away from the sealing plug; a spring plate is arranged in the reel; a rotating column is rotatably connected inside the reel; the surface of the rotating column is wound with a connecting rope; the cleaning disc is connected in the furnace chamber air exhaust pipeline in a sliding manner, the connecting rope penetrates through the cleaning disc and is connected with the sealing plug, and the connecting rope is fixedly connected with the cleaning disc; during operation, through setting up the reel, through the inside shell fragment effect of reel, make even rope trend rolling to the surface of revolving post all the time, through replacing the flange blind plate for the sealing plug, the sealing plug can be unscrewed, and then the clearance maintainer can pull even rope, even rope can drive the clearance dish motion, and even the rope can unreel out from the inside of reel, the clearance dish motion can be to the volatile matter of oven chamber extraction pipeline internal surface adhesion and dust etc. effectively clear up, make these substances be cleared up the oral area position that is close to the clearance hole, be convenient for the staff to clear up fast to dust etc. greatly improved cleaning efficiency, after the completion clearance, only need to release the stay cord, even the inside of reel is gone into in the inside by the automatic spring plate effect of rolling of reel, clearance dish automatic re-setting simultaneously, then screw up the sealing plug can.
Preferably, a guide groove is formed at the opening part of the cleaning hole; the surface of the sealing plug is rotationally connected with a connecting block, the connecting block is connected in the guide groove in a sliding manner, and the connecting rope is fixedly connected with the connecting block; during operation, through setting up the piece that links, and link piece sliding connection in the inside of guide slot, when the staff revolves and twists the seal stopper, even the piece can not rotate thereupon, and then even the piece also can not drive even rope rotation, has avoided even serious distortion problem of rope.
Preferably, a mounting groove is formed in the position, close to the reel, of the interior of the furnace chamber air exhaust pipeline; guide rings are fixedly connected inside the mounting grooves; an annular groove is formed in the guide ring; the inside of the annular groove is fixedly connected with a cleaning ring, and the connecting rope penetrates through the inside of the cleaning ring; during operation, through setting up the guide ring, the inside of guide ring sets up the clearance ring, and when even rope rolling in-process, in order to avoid even the surperficial adhesion volatile matter or the dust of rope, and then these substances along with even the inside of leading into the reel of rope, influence the normal work of reel, can clear up even the surperficial adhesion thing of rope through the clearance ring.
Preferably, the connecting rope is made of high-temperature resistant elastic materials; a hole is formed in the connecting rope; an outlet hole is formed in the bottom of the inlet hole in the connecting rope; during operation, through set up inlet opening and apopore in the inside of even rope, through inlet opening import liquid, apopore export liquid, liquid can cool down even the rope, avoids in the stove for under the circumstances of fully cooling down, and the gas temperature that inhales the stove chamber pipeline of bleeding is higher, produces the damage to even rope.
Preferably, the surface of the cleaning disc is provided with an annular cleaning groove; first connecting holes which are uniformly distributed are formed between the annular cleaning groove and the inlet holes; second connecting holes which are uniformly distributed are formed between the annular cleaning groove and the outlet holes; during operation, through first connecting hole and second even hole, can be with inlet opening and annular clearance groove intercommunication, can be simultaneously with play hole and annular clearance groove intercommunication, the inside liquid of inlet opening can be through the leading-in annular clearance groove of first connecting hole, the in-process that the clearance dish removed can clear up the internal surface of furnace chamber exhaust duct, and the sewage after the clearance simultaneously can be through leading-in outlet hole of second even hole to flow out through the outlet hole.
Preferably, the cleaning disc is fixedly connected with an elastic pad at a position close to the annular cleaning groove relative to one side surface of the furnace chamber air exhaust pipeline; the side surface of the elastic pad opposite to one side of the sealing plug is of a smooth surface structure design; the side surface of one side of the elastic pad, which is opposite to the pipeline deposition bin, is provided with uniformly arranged ball beads; during operation, through setting up the elastic cushion, when the clearance dish removed, the plain noodles of elastic cushion can be towards the internal surface of stove chamber pipeline of bleeding, can clear up the internal surface of stove chamber pipeline of bleeding through the plain noodles of elastic cushion, and when letting the reverse removal of clearance dish, the elastic cushion receives the effect of stove chamber pipeline of bleeding, and the one side that the elastic cushion had the ball is towards the internal surface of stove chamber pipeline of bleeding, can play the effect of reduction friction through the ball, reduces the resistance of clearance dish removal in-process, avoids the clearance dish card to die in the middle part position of stove chamber pipeline of bleeding.
The beneficial effects of the invention are as follows:
1. According to the furnace chamber air-charging dust-removing system, the furnace body, the platform frame and the furnace chamber air-exhausting pipeline are arranged, and the first air-charging pipe, the second air-charging pipe and the furnace chamber air-exhausting pipeline are arranged on the platform frame, so that the cleaning of substances such as volatile matters and dust in the synthetic furnace is effectively realized, the cleaning effect of the volatile matters and the dust is greatly improved through the up-down convection of the pressurized air flow, the cleaning efficiency of the interior of the furnace is improved, the cleaned gas can be rapidly guided out in a negative pressure suction mode, and the interior of the synthetic furnace is ensured to be rapidly and fully cleaned before the synthetic furnace is opened.
2. According to the furnace chamber inflatable dust removal system, the reel, the connecting rope and the cleaning disc are arranged, the furnace chamber air exhaust pipeline is cleaned, workers can pull the connecting rope, the connecting rope can drive the cleaning disc to move, the connecting rope can unwind from the inside of the reel, the cleaning disc can effectively clean volatile matters, dust and the like adhered to the inner surface of the furnace chamber air exhaust pipeline, the volatile matters and the dust can be cleaned to the opening position close to the cleaning hole, the workers can conveniently and rapidly clean the dust and the like, the cleaning efficiency is greatly improved, after cleaning is finished, the pulling rope is only required to be released, the connecting rope is automatically wound into the reel under the action of the elastic sheet in the reel, meanwhile, the cleaning disc is automatically reset, and then the sealing plug is screwed up.
Drawings
The invention is further described below with reference to the accompanying drawings.
FIG. 1 is a perspective view of a furnace body and platform of the present invention;
FIG. 2 is a perspective view of the present invention;
FIG. 3 is a cross-sectional view of the furnace chamber extraction duct and purge tray of the present invention;
FIG. 4 is a cross-sectional view of the roping and the cleaning ring of the present invention;
FIG. 5 is a cross-sectional view of a cleaning disc of the present invention;
FIG. 6 is an enlarged view of a portion of FIG. 5 at A;
In the figure: furnace body 1, platform frame 2, furnace chamber air extraction pipeline 3, bottom layer frame 4, top layer frame 5, first gas tube 6, second gas tube 7, total exhaust tube 8, pipeline deposit storehouse 9, pneumatic butterfly valve 10, suction hood 11, ground dust absorption pipeline 12, platform dust absorption pipeline 13, platform dust absorption control valve interface 14, vacuum solenoid valve 15, clearance hole 16, flange blind plate 17, seal 18, reel 19, shell fragment 20, swivel 21, even rope 22, clearance dish 23, link piece 24, guide ring 25, clearance ring 26, inlet opening 27, outlet opening 28, annular clearance groove 29, first connecting hole 30, second connecting hole 31, elastic pad 32, ball 33.
Detailed Description
The invention is further described in connection with the following detailed description in order to make the technical means, the creation characteristics, the achievement of the purpose and the effect of the invention easy to understand.
Example 1
As shown in fig. 1 and 2, the furnace chamber air-charging dust-removing system according to the embodiment of the invention comprises a furnace body 1, a platform frame 2 and a furnace chamber air-extracting pipeline 3; the furnace body 1 is fixedly connected with the platform frame 2; the platform frame 2 comprises a bottom layer frame 4 and a top layer frame 5; the surface of a furnace top disc of the furnace body 1 is fixedly connected with a first air charging pipe 6; the surface of the furnace chassis of the furnace body 1 is fixedly connected with a second air charging pipe 7, and the first air charging pipe 6 and the second air charging pipe 7 are externally connected with an air compressor; the surface of the platform frame 2 is fixedly connected with a main exhaust pipe 8, and the main exhaust pipe 8 is externally connected with a negative pressure source; the main exhaust pipe 8 is fixedly connected with a pipeline deposition bin 9; a pneumatic butterfly valve 10 is connected between the pipeline deposition bin 9 and the main exhaust pipe 8; a dust hood 11 is fixedly connected to the middle part of the furnace body 1; the exhaust port of the dust hood 11 is fixedly connected with a furnace chamber air exhaust pipeline 3, one end of the furnace chamber air exhaust pipeline 3 is communicated with the inside of the furnace body 1, and the other end of the furnace chamber air exhaust pipeline is communicated with a pipeline deposition bin 9; during operation, through setting up first gas tube 6 and second gas tube 7 respectively on the surface of stove top tray and stove bottom tray, through taking away volatiles, dust etc. with the compressed air of high pressure, the large-flow, increase gas velocity, and in the inflation process, require the blowing down, after the stove cools off, and under the uncooled condition of stove in, blow into compressed air, air and stove medium take place chemical reaction and influence crystal quality, the gas that carries volatiles and dust can be inhaled the suction hood 11, the large-flow blows, the volatile matter such as dust in the stove is blown up by the relatively wide range, the dust is blown to the furnace chamber middle part along the direction of air current from the place that the velocity of flow is big, and through the stove chamber extraction pipeline 3 on suction hood 11 surface, deposit storehouse 9 through the pipeline and filter the volatile matter and dust in the air, reach the purpose of dust removal, then the gaseous can be derived through total pipe 8 this moment, when deposit more in the pipeline deposit storehouse 9, can open in the pipeline deposit storehouse 9, and advance inside the interior, the air of carrying volatiles and dust can be cleared up by the suction hood 11, the inside is carried down by the fast, the invention is cleared up through the air stream and the interior of the air is cleared up by the air down, the air is cleared up by the air fast in the invention, the inside the invention is cleared up the dust is realized, the inside the dust is cleared up through the air is cleared up fast, and is well cleared up in the inside the dust is cleared up through the air is well down the inside the air has been cleared up.
The multiphase mixture related to the dust removal of the dust removal system is called a gas phase suspension system or aerosol, fine particles dispersed in the multiphase mixture are dust particles, the accumulation state of the dust particles is called powder, and a dust removal unit is properly designed and selected according to the physicochemical properties of the powder of the equipment.
The air in the pipeline is pumped out through the fan or the air pump, so that pressure difference is generated between the inside and the outside of the unit, namely negative pressure is generated, the higher the negative pressure is, the stronger the suction is, the gas mixture is easily sucked out, the sucked gas mixture does not directly enter the fan or the pump to damage the motor, when the powder enters the unit, two filtering systems, namely primary filtering and secondary filtering, are added in the pipeline deposition bin 9, the primary filtering is generally used for filtering large-particle powder, carbon and silicon mixtures, the secondary filtering is used for filtering some small-particle dust particles, carbon and silicon mixtures, solids are left in the filter after the secondary filtering, the gas is discharged through the air outlet of the fan, and the filtering efficiency is more than 98%.
The air inlet of the main exhaust pipe 8 is connected with a ground dust collection pipeline 12; the air inlet of the main exhaust pipe 8 is connected with a platform dust collection pipeline 13; the end surfaces of the ground dust collection pipeline 12 and the platform dust collection pipeline 13 are fixedly connected with a platform dust collection control valve interface 14; when the dust collection device works, after the synthetic furnace runs for a long time, dust on the bottom layer frame 4 and the top layer frame 5 of the platform frame 2 is more, the ground dust collection pipeline 12 and the platform dust collection pipeline 13 are arranged, the negative pressure in the main exhaust pipe 8 is utilized, so that the ground dust collection pipeline 12 and the platform dust collection pipeline 13 generate larger negative pressure, and when the dust collection device needs to be used, the platform dust collection control valve interface 14 is externally connected with a pipeline, so that dust on the surfaces of all parts of the platform frame 2 is adsorbed.
The number of the first air charging pipes 6, the second air charging pipes 7 and the furnace chamber air exhaust pipelines 3 is three, and the first air charging pipes, the second air charging pipes and the furnace chamber air exhaust pipelines are uniformly distributed along the outer ring of the furnace body 1; the surfaces of the first air charging pipe 6 and the second air charging pipe 7 are fixedly connected with a vacuum electromagnetic valve 15 at the position close to the furnace body 1; during the crystal growth period of the silicon carbide synthetic furnace, the gas charging system is in a normally closed state, the fact that the first gas charging pipe 6 and the second gas charging pipe 7 connected with compressed air influence the performance of the whole furnace during the operation period of the furnace is considered, the strokes of the first gas charging pipe 6 and the second gas charging pipe 7 for compressed air are too long, the vacuum degree and the sealing performance are influenced, therefore, the connecting pipe orifice positions of the first gas charging pipe 6 and the second gas charging pipe 7 are connected with the vacuum electromagnetic valve 15 through hard pipes, the vacuum electromagnetic valve 15 is opened only before the furnace is opened, so that the compressed air is charged into the furnace, and other times are in the normally closed state.
The furnace chamber air exhaust pipeline 3 is of an L-shaped structural design; a cleaning hole 16 is formed in the corner position of the furnace chamber air exhaust pipeline 3; a flange blind plate 17 is arranged at the position of a cleaning hole 16 at the corner of the exhaust pipe of the furnace chamber; during operation, through setting up flange blind plate 17, flange blind plate 17 is convenient for dismantle, is convenient for clear up the inside of three stove chamber extraction pipeline 3 for the inside long-term deposited volatile matter and the dust of stove chamber extraction pipeline 3 obtain effectively clear away, guarantee that stove chamber extraction pipeline 3 is unblocked, avoid the serious narrowing of stove chamber extraction pipeline 3 even totally to block up the problem.
In order to improve dust collection efficiency, the size and position of an air inlet, the pumping speed during air charging, the outer diameter, the thickness and the pipeline arrangement of a pipeline are all calculated to be completely matched with a furnace chamber and required working conditions, the minimum bending radius is verified and designed to be determined by material characteristics, bending angles, the thinning allowance of the outer side of a bent pipeline wall, the size of the corrugation on the inner side and the ovality of a bent part, generally the minimum bending radius is more than or equal to 2-2.5 times of the outer diameter of the pipeline, the shortest straight line section is more than or equal to 1.5-2 times of the outer diameter of the pipeline, the space of an assembly interface of the ground dust collection pipeline 12 and the platform dust collection pipeline 13 is narrow, the pipeline trend layout is limited, one-time bending cannot meet the requirement, one-time bending is required to be carried out for realizing multiple bending of the pipeline, the pipeline is required to be re-molded in consideration of bending, and the pipeline is required to be replaced by a straight pipe bending elbow form in economic aspects and the like.
The surface opening shape of the dust hood 11 is in a horn-shaped design, the horn opening is gradually narrowed along the direction of fluid, the contact area is reduced, the flow speed is increased, the air extraction smoothness and the air outlet efficiency are improved, and better and more sufficient air extraction is realized.
The horn-shaped opening on the surface of the dust hood 11 is in soft connection with the furnace chamber air exhaust pipeline 3, so that the joint is ensured to be completely overlapped, no air leakage exists, the centering connection is convenient, and the assembly is easy.
The design of flange blind plate 17 is because the too low or velocity of flow of pumping is too slow can all lead to the pipeline dust to deposit in the pipe wall inboard, does not clear up for a long time, and the dust that piles up can form the jam when more and more seriously, opens flange blind plate 17 at this moment can clear up, compares in whole pipeline clearance convenience maintenance like this, saves cost.
Example two
As shown in fig. 3-6, comparative example one, in which another embodiment of the present invention is: threads are formed on the surface of the furnace chamber air exhaust pipeline 3; the surface of the furnace chamber air extraction pipeline 3 is connected with a sealing plug 18 in a threaded manner; a reel 19 is arranged at one end of the furnace chamber air extraction pipeline 3, which is far away from the sealing plug 18; a spring piece 20 is arranged in the reel 19; a rotary column 21 is rotatably connected to the inside of the reel 19; a rope 22 is wound around the surface of the rotary column 21; the cleaning disc 23 is connected in the furnace chamber air exhaust pipeline 3 in a sliding manner, the connecting rope 22 penetrates through the cleaning disc 23 and is connected with the sealing plug 18, and the connecting rope 22 is fixedly connected with the cleaning disc 23; during operation, through setting up reel 19, through the inside shell fragment 20 effect of reel 19, make even rope 22 tend to roll up all the time to the surface of column 21, through replacing flange blind plate 17 for sealing plug 18, sealing plug 18 can be unscrewed, and then the clearance maintainer can drag even rope 22, even rope 22 can drive the clearance dish 23 motion, and even rope 22 can unreel out from the inside of reel 19, clearance dish 23 motion can be to the volatile matter and the dust etc. of oven chamber extraction duct 3 internal surface adhesion effectively clear up, make these substances be cleared up the oral area position that is close to clearance hole 16, be convenient for the staff to clear up fast such as dust, greatly improved clearance efficiency, after the completion clearance, only need release the stay cord, under the inside shell fragment 20 effect of reel 19, even rope 22 is automatic by rolling up the inside of reel 19, clearance dish 23 automatic reset again then screw up sealing plug 18 can.
A guide groove is formed at the opening part of the cleaning hole 16; the surface of the sealing plug 18 is rotatably connected with a connecting block 24, the connecting block 24 is slidably connected in the guide groove, and the connecting rope 22 is fixedly connected with the connecting block 24; in operation, by arranging the connecting block 24, and the connecting block 24 is in sliding connection with the inside of the guide groove, when a worker screws the sealing plug 18, the connecting block 24 cannot rotate along with the sealing plug, and further the connecting block 24 cannot drive the connecting rope 22 to rotate, so that the problem of serious twisting of the connecting rope 22 is avoided.
A mounting groove is formed in the furnace chamber air extraction pipeline 3 and close to the reel 19; guide rings 25 are fixedly connected to the inside of the mounting grooves; an annular groove is formed in the guide ring 25; the inside of the annular groove is fixedly connected with a cleaning ring 26, and the connecting rope 22 passes through the inside of the cleaning ring 26; during operation, through setting up guide ring 25, the inside of guide ring 25 sets up clearance ring 26, when even rope 22 rolling in-process, in order to avoid even rope 22's surface adhesion volatile matter or dust, and then these substances along with even rope 22 leading-in reel 19's inside, influence reel 19's normal work, can clear up even rope 22's surface adhesion thing through clearance ring 26.
The connecting rope 22 is made of high-temperature resistant elastic materials; an inlet 27 is formed in the connecting rope 22; an outlet hole 28 is formed in the connecting rope 22 at the bottom of the inlet hole 27; during operation, through opening into hole 27 and play hole 28 in the inside of even rope 22, import liquid through the hole 27, the play hole 28 exports liquid, and liquid can cool down even rope 22, avoids in the stove for under the circumstances of fully cooling down, and the gas temperature that inhales to stove chamber air extraction pipeline 3 is higher, produces the damage to even rope 22.
The surface of the cleaning disc 23 is provided with an annular cleaning groove 29; a first connecting hole 30 which is uniformly arranged is arranged between the annular cleaning groove 29 and the inlet hole 27; second connecting holes 31 which are uniformly arranged are formed between the annular cleaning groove 29 and the outlet hole 28; during operation, through the first connecting hole 30 and the second connecting hole 31, the inlet hole 27 and the annular cleaning groove 29 can be communicated, the outlet hole 28 and the annular cleaning groove 29 can be communicated, liquid in the inlet hole 27 can be led into the annular cleaning groove 29 through the first connecting hole 30, the inner surface of the furnace chamber air exhaust pipeline 3 can be cleaned in the moving process of the cleaning disc 23, and meanwhile, cleaned sewage can be led into the outlet hole 28 through the second connecting hole 31 and flows out through the outlet hole 28.
An elastic pad 32 is fixedly connected to the side surface of one side of the cleaning disc 23, which is opposite to the furnace chamber air extraction pipeline 3, and is close to the annular cleaning groove 29; the side surface of the elastic pad 32 opposite to the side surface of the sealing plug 18 is of a smooth surface structure design; the elastic pad 32 is provided with uniformly arranged balls 33 on one side surface of the pipeline deposition bin 9; during operation, through setting up the elastic cushion 32, when clearance dish 23 removes, the plain noodles of elastic cushion 32 can be towards the internal surface of stove chamber air extraction pipeline 3, can clear up the internal surface of stove chamber air extraction pipeline 3 through the plain noodles of elastic cushion 32, let clearance dish 23 reverse movement time, elastic cushion 32 receive the effect of the internal surface of stove chamber air extraction pipeline 3, the one side that elastic cushion 32 had ball 33 is towards the internal surface of stove chamber air extraction pipeline 3, can play the effect that reduces friction through ball 33, reduce the resistance of clearance dish 23 removal in-process, avoid clearance dish 23 card to die at the middle part position of stove chamber air extraction pipeline 3.
During operation, the first air charging pipe 6 and the second air charging pipe 7 are respectively arranged on the surfaces of the furnace top plate and the furnace bottom plate, volatile matters, dust and the like are taken away by using high-pressure and high-flow compressed air, in the air charging process, after the furnace is required to be stopped and cooled, and the compressed air is required to be blown up and down quickly before the furnace is opened, so that the condition that the compressed air and a medium in the furnace are not cooled is avoided, the air and the medium in the furnace react to influence the crystal quality, the air carrying the volatile matters and the dust can be sucked into the dust hood 11, the high-flow air is blown up, the volatile matters such as the dust in the furnace are blown up in a large range, the dust is blown to the middle part of a furnace chamber along the direction of the air flow, the dust is led into the pipeline deposition bin 9 through the furnace chamber air suction pipeline 3 on the surface of the dust hood 11, the volatile matters and the dust in the air are filtered through the pipeline deposition bin 9, the purpose of dust removal is achieved, and then the filtered air can be led out through the total air pipe 8, and when the dust in the pipeline deposition bin 9 is deposited more, the pipeline deposition bin 9 is opened, the inside and the inside is cleaned up and the volatile matters are removed quickly in an up and down mode; after the synthetic furnace runs for a long time, the bottom layer frame 4 and the top layer frame 5 of the platform frame 2 have more dust, the ground dust collection pipeline 12 and the platform dust collection pipeline 13 are arranged, the ground dust collection pipeline 12 and the platform dust collection pipeline 13 generate larger negative pressure by utilizing the negative pressure in the main exhaust pipe 8, and when the synthetic furnace needs to be used, the platform dust collection control valve interface 14 is externally connected with a pipeline, so that the dust on the surfaces of all parts of the platform frame 2 is adsorbed; the silicon carbide synthesis furnace is in a normally closed state during crystal growth, the first air charging pipe 6 and the second air charging pipe 7 connected with compressed air are considered to influence the performance of the whole furnace during the operation of the furnace, and the strokes of the first air charging pipe 6 and the second air charging pipe 7 for compressed air are too long to influence the vacuum degree and the sealing performance, so that the connecting pipe orifice positions of the first air charging pipe 6 and the second air charging pipe 7 are connected with a vacuum electromagnetic valve 15 by a hard pipe, the vacuum electromagnetic valve 15 is opened only before the furnace is opened, so that the compressed air is charged into the furnace, and the other times are in a normally closed state; by arranging the flange blind plates 17, the flange blind plates 17 are convenient to detach and convenient to clean the interiors of the three furnace chamber air exhaust pipelines 3, so that volatile matters and dust deposited in the furnace chamber air exhaust pipelines 3 for a long time are effectively removed, the furnace chamber air exhaust pipelines 3 are ensured to be smooth, and the problems of serious narrowing and even complete blockage of the furnace chamber air exhaust pipelines 3 are avoided; through setting up reel 19, through the inside shell fragment 20 effect of reel 19, make even rope 22 tend to wind up to the surface of column 21 all the time, through replacing flange blind plate 17 with sealing plug 18, sealing plug 18 can be unscrewed, and then the clearance maintainer can pull even rope 22, even rope 22 can drive the clearance dish 23 motion, and even rope 22 can unreel from the inside of reel 19, clearance dish 23 motion can be to the volatile matter and the dust etc. of oven chamber extraction duct 3 internal surface effective clearance, make these substances be cleared up to the oral area position that is close to clearance hole 16, the staff is convenient for clear up fast to dust etc. has greatly improved clearance efficiency, only need to release the stay cord after the clearance is accomplished, under the inside shell fragment 20 effect of reel 19, even rope 22 is automatic by the rolling up into the inside of reel 19, clearance dish 23 automatic reset simultaneously, then screw up sealing plug 18 again can; by arranging the connecting block 24, and the connecting block 24 is connected in the guide groove in a sliding way, when a worker screws the sealing plug 18, the connecting block 24 cannot rotate along with the sealing plug, and further the connecting block 24 cannot drive the connecting rope 22 to rotate, so that the problem of serious twisting of the connecting rope 22 is avoided; through setting up the guide ring 25, the inside of the guide ring 25 sets up the cleaning ring 26, when the winding process of the continuous rope 22, in order to avoid adhering volatile matters or dust on the surface of the continuous rope 22, and then these matters are led into the inside of the reel 19 along with the continuous rope 22, influence the normal work of the reel 19, can clear up the surface adhesion matters of the continuous rope 22 through the cleaning ring 26; through opening the inlet hole 27 and the outlet hole 28 in the connecting rope 22, liquid is led in through the inlet hole 27, and liquid is led out through the outlet hole 28, so that the liquid can cool the connecting rope 22, and the condition that the temperature of gas sucked into the air suction pipeline 3 of the furnace chamber is higher under the condition that the temperature in the furnace is sufficiently lowered is avoided, and the connecting rope 22 is damaged; through the first connecting hole 30 and the second connecting hole 31, the inlet hole 27 can be communicated with the annular cleaning groove 29, the outlet hole 28 can be communicated with the annular cleaning groove 29, liquid in the inlet hole 27 can be led into the annular cleaning groove 29 through the first connecting hole 30, the inner surface of the furnace chamber air exhaust pipeline 3 can be cleaned in the moving process of the cleaning disc 23, and meanwhile, cleaned sewage can be led into the outlet hole 28 through the second connecting hole 31 and flows out through the outlet hole 28; through setting up the elastic cushion 32, when clearance dish 23 removes, the plain noodles of elastic cushion 32 can be towards the internal surface of stove chamber air extraction pipeline 3, can clear up the internal surface of stove chamber air extraction pipeline 3 through the plain noodles of elastic cushion 32, let clearance dish 23 reverse movement time, the elastic cushion 32 receive the effect of the internal surface of stove chamber air extraction pipeline 3, the one side that elastic cushion 32 had ball 33 is towards the internal surface of stove chamber air extraction pipeline 3, can play the effect that reduces friction through ball 33, reduce the resistance of clearance dish 23 removal in-process, avoid clearance dish 23 card to die at the middle part position of stove chamber air extraction pipeline 3.
The front, rear, left, right, up and down are all based on fig. 1 in the drawings of the specification, the face of the device facing the observer is defined as front, the left side of the observer is defined as left, and so on, according to the viewing angle of the person.
In the description of the present invention, it should be understood that the terms "center," "longitudinal," "lateral," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate describing the present invention and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the scope of the present invention.
The foregoing has shown and described the basic principles, principal features and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present invention, and various changes and modifications may be made without departing from the spirit and scope of the invention, which is defined in the appended claims. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (5)
1. The furnace chamber aeration dust removal system is characterized in that: comprises a furnace body (1), a platform frame (2) and a furnace chamber air exhaust pipeline (3); the furnace body (1) is fixedly connected with the platform frame (2); the platform frame (2) comprises a bottom layer frame (4) and a top layer frame (5); the surface of a furnace top disc of the furnace body (1) is fixedly connected with a first air charging pipe (6); the surface of the furnace chassis of the furnace body (1) is fixedly connected with a second air charging pipe (7), and the first air charging pipe (6) and the second air charging pipe (7) are externally connected with an air compressor; the surface of the platform frame (2) is fixedly connected with a main exhaust pipe (8), and the main exhaust pipe (8) is externally connected with a negative pressure source; the main exhaust pipe (8) is fixedly connected with a pipeline deposition bin (9); a pneumatic butterfly valve (10) is connected between the pipeline deposition bin (9) and the main exhaust pipe (8); a dust hood (11) is fixedly connected to the middle part of the furnace body (1); the exhaust port of the dust hood (11) is fixedly connected with a furnace chamber air exhaust pipeline (3), one end of the furnace chamber air exhaust pipeline (3) is communicated with the inside of the furnace body (1), and the other end of the furnace chamber air exhaust pipeline is communicated with the pipeline deposition bin (9);
threads are formed on the surface of the furnace chamber air exhaust pipeline (3); a sealing plug (18) is connected with the surface of the furnace chamber air exhaust pipeline (3) in a threaded manner; a reel (19) is arranged at one end of the furnace chamber air extraction pipeline (3) far away from the sealing plug (18); an elastic sheet (20) is arranged in the reel (19); a rotating column (21) is rotatably connected inside the reel (19); a connecting rope (22) is wound on the surface of the rotating column (21); the inside of the furnace chamber air exhaust pipeline (3) is connected with a cleaning disc (23) in a sliding manner, a connecting rope (22) penetrates through the cleaning disc (23) and is connected with the sealing plug (18), and the connecting rope (22) is fixedly connected with the cleaning disc (23);
The furnace chamber air exhaust pipelines (3) are all of L-shaped structural design; a cleaning hole (16) is formed in the corner position of the furnace chamber air exhaust pipeline (3); a flange blind plate (17) is arranged at the position of a cleaning hole (16) at the corner of the exhaust pipe of the furnace chamber;
A guide groove is formed in the opening part of the cleaning hole (16); the surface of the sealing plug (18) is rotationally connected with a connecting block (24), the connecting block (24) is slidably connected inside the guide groove, and the connecting rope (22) is fixedly connected with the connecting block (24);
The connecting rope (22) is made of high-temperature resistant elastic materials; an inlet (27) is formed in the connecting rope (22); an outlet hole (28) is formed in the bottom of the inlet hole (27) in the connecting rope (22);
an annular cleaning groove (29) is formed in the surface of the cleaning disc (23); first connecting holes (30) which are uniformly distributed are formed between the annular cleaning groove (29) and the inlet holes (27); second connecting holes (31) which are uniformly distributed are formed between the annular cleaning groove (29) and the outlet holes (28).
2. The furnace chamber aeration dust removal system of claim 1, wherein: the air inlet of the main exhaust pipe (8) is connected with a ground dust collection pipeline (12); an air inlet of the main exhaust pipe (8) is connected with a platform dust collection pipeline (13); the end surfaces of the ground dust collection pipeline (12) and the platform dust collection pipeline (13) are fixedly connected with a platform dust collection control valve interface (14).
3. The furnace chamber aeration dust removal system of claim 1, wherein: the number of the first air charging pipes (6), the second air charging pipes (7) and the furnace chamber air exhaust pipelines (3) is three, and the first air charging pipes, the second air charging pipes and the furnace chamber air exhaust pipelines are uniformly distributed along the outer ring of the furnace body (1); the surfaces of the first air charging pipe (6) and the second air charging pipe (7) are fixedly connected with a vacuum electromagnetic valve (15) at the position close to the furnace body (1).
4. The furnace chamber aeration dust removal system of claim 1, wherein: a mounting groove is formed in the inner part of the furnace chamber air extraction pipeline (3) and close to the reel (19); guide rings (25) are fixedly connected to the inside of the mounting groove; an annular groove is formed in the guide ring (25); the inside of ring channel has linked firmly clearance ring (26), and even rope (22) pass clearance ring (26) inside.
5. The furnace chamber aeration dust removal system of claim 1, wherein: an elastic pad (32) is fixedly connected to the side surface of one side of the cleaning disc (23) opposite to the furnace chamber air exhaust pipeline (3) and close to the annular cleaning groove (29); the side surface of the elastic pad (32) opposite to one side of the sealing plug (18) is of a smooth surface structure design; the elastic pad (32) is provided with uniformly arranged ball beads (33) relative to one side surface of the pipeline deposition bin (9).
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| CN202210039985.3A CN114383434B (en) | 2022-01-14 | 2022-01-14 | Furnace chamber inflating dust removing system |
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| CN114383434A (en) | 2022-04-22 |
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