CN114383434A - Furnace chamber inflation dust removal system - Google Patents
Furnace chamber inflation dust removal system Download PDFInfo
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- CN114383434A CN114383434A CN202210039985.3A CN202210039985A CN114383434A CN 114383434 A CN114383434 A CN 114383434A CN 202210039985 A CN202210039985 A CN 202210039985A CN 114383434 A CN114383434 A CN 114383434A
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- 239000000428 dust Substances 0.000 title claims abstract description 131
- 238000004140 cleaning Methods 0.000 claims abstract description 97
- 230000008021 deposition Effects 0.000 claims abstract description 31
- 238000011049 filling Methods 0.000 claims abstract description 18
- 238000000605 extraction Methods 0.000 claims description 25
- 238000007789 sealing Methods 0.000 claims description 22
- 239000013013 elastic material Substances 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 abstract description 16
- 238000003786 synthesis reaction Methods 0.000 abstract description 16
- 230000000694 effects Effects 0.000 abstract description 13
- 239000000126 substance Substances 0.000 abstract description 9
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 abstract description 8
- 229910010271 silicon carbide Inorganic materials 0.000 abstract description 8
- 238000000746 purification Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 53
- 238000010521 absorption reaction Methods 0.000 description 14
- 239000007788 liquid Substances 0.000 description 12
- 239000013078 crystal Substances 0.000 description 8
- 238000005452 bending Methods 0.000 description 7
- 238000001914 filtration Methods 0.000 description 7
- 230000033001 locomotion Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 238000001816 cooling Methods 0.000 description 6
- 238000007664 blowing Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 238000005086 pumping Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 230000009471 action Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 235000009537 plain noodles Nutrition 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000005429 filling process Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 239000010865 sewage Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000000740 bleeding effect Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 235000012149 noodles Nutrition 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000443 aerosol Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 239000011863 silicon-based powder Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D17/00—Arrangements for using waste heat; Arrangements for using, or disposing of, waste gases
- F27D17/008—Arrangements for using waste heat; Arrangements for using, or disposing of, waste gases cleaning gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/02—Supplying steam, vapour, gases, or liquids
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
- Cleaning In General (AREA)
Abstract
The invention belongs to the field of silicon carbide synthesis, and particularly relates to a furnace chamber inflation dust removal system which comprises a furnace body, a platform frame and a furnace chamber air exhaust pipeline; the furnace body is fixedly connected with the platform frame; the surface of the furnace top plate of the furnace body is fixedly connected with a first gas filling pipe; the surface of the furnace chassis of the furnace body is fixedly connected with a second gas filling pipe; the surface of the platform frame is fixedly connected with a main exhaust pipe; the main exhaust pipe is fixedly connected with a pipeline deposition bin; the middle part of the furnace body is fixedly connected with a dust hood; an exhaust port of the dust hood is fixedly connected with a furnace chamber exhaust pipeline; the invention effectively realizes the cleaning of volatile matters, dust and other substances in the synthesis furnace, greatly improves the cleaning effect of the volatile matters and the dust and the cleaning efficiency in the furnace through the up-down convection pressurized airflow, and ensures that the cleaned gas can be quickly led out in a negative pressure suction mode before the synthesis furnace is opened, thereby ensuring the quick and sufficient purification of the interior of the synthesis furnace.
Description
Technical Field
The invention belongs to the field of silicon carbide synthesis, and particularly relates to a furnace chamber gas-filling dust removal system.
Background
A CSP-PC-150 type vertical induction synthetic furnace for silicon carbide is prepared through such steps as mixing high-purity carbon powder, high-purity silicon powder and high-purity additive proportionally by mole ratio, loading in high-purity graphite crucible, filling high-purity argon gas, nitrogen gas or other gas in clean environment, heating, holding temp, displacing argon gas, nitrogen gas or other gas, and cooling.
In the ultrahigh vacuum silicon carbide raw material synthesis furnace system disclosed by the invention, a furnace chamber is of a cylindrical vertical double-layer water-cooling structure, a furnace cover is arranged on the furnace chamber and is of a double-layer water-cooling structure, an infrared temperature measurement component is positioned at the top end of the furnace cover, and the furnace cover can be lifted and unscrewed by an electric lifter; the furnace chamber is connected with the molecular pump through a gate valve and a pumping elbow to form a main pumping pipeline of the system, and the furnace chamber is connected with the mechanical pump through an angle valve and a corrugated pipe to form a side pumping pipeline of the system; the sample supporting mechanism is fixed with the furnace chamber chassis, and the induction heating assembly and the measuring assembly are respectively fixed with the furnace chamber side flange.
In the prior art, volatile matters such as carbide and silicide and dust and the like can be generated in a furnace body after a synthesis furnace completes synthesis, the quality of silicon carbide single crystals in the single crystal furnace can be influenced if the substances are not cleaned in time, and meanwhile, the problems that the cleaning is not effectively carried out before the furnace is opened and the surrounding air is polluted are solved.
Therefore, the invention provides an air charging and dust removing system for a furnace chamber.
Disclosure of Invention
To remedy the deficiencies of the prior art, at least one of the technical problems set forth in the background is addressed.
The technical scheme adopted by the invention for solving the technical problems is as follows: the furnace chamber inflation dust removal system comprises a furnace body, a platform frame and a furnace chamber air exhaust pipeline; the furnace body is fixedly connected with the platform frame; the platform frame comprises a bottom layer frame and a top layer frame; the surface of the furnace top plate of the furnace body is fixedly connected with a first gas filling pipe; the surface of a furnace chassis of the furnace body is fixedly connected with a second inflation pipe, and the first inflation pipe and the second inflation pipe are both externally connected with an air compressor; the surface of the platform frame is fixedly connected with a main exhaust pipe, and the main exhaust pipe is externally connected with a negative pressure source; the main exhaust pipe is fixedly connected with a pipeline deposition bin; a pneumatic butterfly valve is connected between the pipeline deposition bin and the main exhaust pipe; the middle part of the furnace body is fixedly connected with a dust hood; an exhaust port of the dust hood is fixedly connected with a furnace chamber exhaust pipeline, one end of the furnace chamber exhaust pipeline is communicated with the inside of the furnace body, and the other end of the furnace chamber exhaust pipeline is communicated with the pipeline deposition bin; when the furnace is in work, the first gas filling pipe and the second gas filling pipe are respectively arranged on the surfaces of the furnace top disc and the furnace bottom disc, volatile matters, dust and the like are taken away by increasing the gas flow velocity through large-pressure and large-flow compressed air, in the gas filling process, the furnace is required to be shut down, after the furnace is cooled, and the gas is quickly blown up and down before the furnace is opened, so that the condition that the furnace is not cooled is avoided, the compressed air is blown in, the air and a medium in the furnace are subjected to chemical reaction to influence the crystal quality, the gas carrying the volatile matters and the dust is sucked into the dust hood, the gas is blown at a large flow velocity, the volatile matters such as the dust and the like in the furnace are blown up in a large range, the dust is blown to the middle part of the furnace chamber from a place with a large flow velocity along the direction of the gas flow, the dust is guided into the pipeline deposition bin through a furnace chamber gas exhaust pipeline on the surface of the dust hood, the volatile matters and the dust in the air are filtered through the pipeline deposition bin, so as to achieve the purpose of removing dust, the filtered gas can be led out through the main exhaust pipe, when dust in the pipeline deposition bin is deposited more, the pipeline deposition bin can be opened at the moment, and the interior of the pipeline deposition bin is cleaned, the volatile matter and dust in the synthesis furnace can be cleaned effectively in an up-down blowing and middle suction mode, the volatile matter and dust can be removed quickly, the cleaning effect on the volatile matter and dust is greatly improved through up-down convection pressurized air flow, the cleaning efficiency in the furnace is improved, the cleaned gas can be led out quickly in a negative pressure suction mode, and the interior of the synthesis furnace can be cleaned quickly and fully before the synthesis furnace is started.
Preferably, the air inlet of the main exhaust pipe is connected with a ground dust suction pipeline; an air inlet of the main exhaust pipe is connected with a platform dust absorption pipeline; the end surfaces of the ground dust collection pipeline and the platform dust collection pipeline are fixedly connected with platform dust collection control valve interfaces; during operation, because synthetic furnace long-time operation back, the bottom layer frame and the top layer frame dust of platform frame are more, through setting up ground dust absorption pipeline and platform dust absorption pipeline, utilize the interior negative pressure of total suction pipe for ground dust absorption pipeline and platform dust absorption pipeline produce great negative pressure, when needing to use, through the external pipeline of platform dust absorption control valve interface, realize adsorbing the dust on each position surface of platform frame.
Preferably, the number of the first inflation tube, the second inflation tube and the furnace chamber air exhaust pipeline is three, and the first inflation tube, the second inflation tube and the furnace chamber air exhaust pipeline are uniformly distributed along the outer ring of the furnace body; the surfaces of the first gas filling pipe and the second gas filling pipe are fixedly connected with vacuum solenoid valves at positions close to the furnace body; when the silicon carbide synthesis furnace works, the inflation system is in a normally closed state during crystal growth, and considering that the first inflation tube and the second inflation tube which are connected with compressed air influence the performance of the whole machine during the operation of the furnace, the first inflation tube and the second inflation tube for the compressed air have too long strokes and influence the vacuum degree and the sealing performance, the positions of connecting pipe orifices of the first inflation tube and the second inflation tube are connected with the vacuum electromagnetic valve by using hard tubes, and the vacuum electromagnetic valve is opened only before the furnace is opened, so that the compressed air is inflated into the furnace, and other times are in the normally closed state.
Preferably, the furnace chamber air exhaust pipelines are all designed into an L-shaped structure; cleaning holes are formed in the corner positions of the furnace chamber air exhaust pipelines; a flange blind plate is arranged at the position of a cleaning hole at the corner of the furnace chamber exhaust pipe; during operation, through setting up the flange blind plate, flange blind plate convenient to detach is convenient for clear up three furnace chamber air exhaust pipeline's inside for the inside volatile substance and the dust of long-term deposit of furnace chamber air exhaust pipeline are effectively clear away, guarantee that furnace chamber air exhaust pipeline is unblocked, avoid furnace chamber air exhaust pipeline seriously narrow down or even block up the problem completely.
Preferably, the surface of the furnace chamber air exhaust pipeline is provided with threads; the surface of the furnace chamber air extraction pipeline is in threaded connection with a sealing plug; a reel is arranged at one end of the furnace chamber air exhaust pipeline far away from the sealing plug; the inside of the reel is provided with an elastic sheet; the inside of the reel is rotatably connected with a rotary column; the surface of the rotary column is wound with a connecting rope; the interior of the furnace chamber air exhaust pipeline is connected with a cleaning disc in a sliding manner, a connecting rope penetrates through the cleaning disc and is connected with the sealing plug, and the connecting rope is fixedly connected with the cleaning disc; during operation, through setting up the reel, through the inside shell fragment effect of reel, make even the surface that tends to the rolling to the rotary column all the time of restricting, through replacing the flange blind plate for the bung, the bung can be unscrewed, and then the clearance maintainer can drag even the rope, even the rope can drive the clearance dish motion, and even the rope can unreel from the inside of reel, the clearance dish motion can be effectively cleared up the volatile matter and the dust of furnace chamber air exhaust pipeline internal surface adhesion, make these materials clear up the oral area position that is close to the clearance hole, the staff of being convenient for carries out quick clearance to dust etc. has greatly improved cleaning efficiency, accomplish the clearance back, only need to release the stay cord, under the inside shell fragment effect of reel, even the automatic inside of being rolled into the reel of restricting, clearance dish automatic re-setting simultaneously, then tighten the bung can.
Preferably, the opening part of the cleaning hole is provided with a guide groove; the surface of the sealing plug is rotatably connected with a connecting block, the connecting block is connected to the inside of the guide groove in a sliding manner, and the connecting rope is fixedly connected with the connecting block; during operation, through setting up even piece, and even piece sliding connection in the inside of guide slot, when the staff revolves soon the shutoff, even piece can not rotate along with it, and then even piece can not drive even rope and rotate, has avoided even the serious distortion problem of rope.
Preferably, an installation groove is formed in the furnace chamber air exhaust pipeline close to the reel; guide rings are fixedly connected inside the mounting grooves; an annular groove is formed in the guide ring; a cleaning ring is fixedly connected inside the annular groove, and a connecting rope penetrates through the cleaning ring; during operation, through setting up the guide ring, the inside of guide ring sets up the clearance ring, and when even rope rolling in-process, in order to avoid even surperficial adhesion volatile matter or the dust of rope, and then these materials influence the normal work of reel along with the inside of even rope leading-in reel, can clear up even surperficial adhesion thing of rope through the clearance ring.
Preferably, the connecting rope is designed to be made of high-temperature-resistant elastic materials; an inlet hole is formed in the connecting rope; an outlet hole is formed in the connecting rope at the bottom of the inlet hole; during operation, through seting up the inlet hole and portal in the inside of even rope, through the leading-in liquid in inlet hole, portal derivation liquid, liquid can be to even the rope cooling, avoids the stove under for the circumstances of abundant cooling, and the gas temperature that inhales furnace chamber exhaust duct is higher, produces the damage to even the rope.
Preferably, the surface of the cleaning disc is provided with an annular cleaning groove; first connecting holes which are uniformly distributed are formed between the annular cleaning groove and the inlet hole; second connecting holes which are uniformly distributed are formed between the annular cleaning groove and the outlet hole; during operation, even hole and second through first, can with entering hole and annular clearance groove intercommunication, can be with holing and annular clearance groove intercommunication simultaneously, the liquid of entering downthehole portion can be through the leading-in annular clearance groove of first even hole, the in-process that the clearance dish removed can clear up furnace chamber exhaust duct's internal surface, and the sewage after the clearance simultaneously can be through the leading-in hole of second even hole to through letting out the outflow.
Preferably, the side surface of one side of the cleaning disc, which is opposite to the furnace chamber air extraction pipeline, is close to the annular cleaning groove, and an elastic cushion is fixedly connected with the cleaning disc; the side surface of the elastic pad, which is opposite to one side of the sealing plug, is designed into a smooth surface structure; the side surface of the elastic cushion, which is opposite to one side of the pipeline deposition bin, is provided with balls which are uniformly distributed; the during operation, through setting up the cushion, when the clearance dish removes, the plain noodles of cushion can be towards furnace chamber air exhaust pipeline's internal surface, the plain noodles through the cushion can be cleared up furnace chamber air exhaust pipeline's internal surface, when letting clearance dish reverse movement, the cushion receives the effect of furnace chamber air exhaust pipeline's internal surface, the cushion has the one side of ball towards furnace chamber air exhaust pipeline's internal surface, can play the effect of reducing friction through the ball, reduce the resistance of clearance dish removal in-process, avoid the middle part position that the card of clearance dish dies at furnace chamber air exhaust pipeline.
The invention has the following beneficial effects:
1. according to the furnace chamber air-charging dust removal system, the furnace body, the platform frame and the furnace chamber air-discharging pipeline are arranged, the first air-charging pipe, the second air-charging pipe and the furnace chamber air-discharging pipeline are arranged on the platform frame, so that the cleaning of substances such as volatile matters and dust in the furnace of the synthetic furnace is effectively realized, the cleaning effect of the volatile matters and the dust is greatly improved through the up-and-down convection pressurized air flow, the cleaning efficiency in the furnace is improved, the cleaned gas can be quickly led out in a negative pressure suction mode, and the inside of the synthetic furnace is quickly and fully purified before the synthetic furnace is started.
2. According to the furnace chamber inflatable dust removal system, the reel, the connecting rope and the cleaning disc are arranged, the furnace chamber air exhaust pipeline is cleaned, the connecting rope can be pulled by a worker, the connecting rope can drive the cleaning disc to move, the connecting rope can be unwound from the inside of the reel, volatile matters, dust and the like adhered to the inner surface of the furnace chamber air exhaust pipeline can be effectively cleaned by the movement of the cleaning disc, the substances are cleaned to the position close to the opening of the cleaning hole, the worker can conveniently and quickly clean the dust and the like, the cleaning efficiency is greatly improved, after cleaning is completed, the pulling rope only needs to be released, the connecting rope is automatically wound into the inner part of the reel under the action of the elastic sheet in the reel, the cleaning disc automatically resets at the same time, and then the sealing plug is screwed up.
Drawings
The invention will be further explained with reference to the drawings.
FIG. 1 is a perspective view of a furnace body and platform of the present invention;
FIG. 2 is a perspective view of the present invention;
FIG. 3 is a cross-sectional view of the oven chamber extraction duct and cleaning plate of the present invention;
FIG. 4 is a cross-sectional view of a tether and clearing ring of the present invention;
FIG. 5 is a cross-sectional view of a cleaning disk of the present invention;
FIG. 6 is an enlarged view of a portion of FIG. 5 at A;
in the figure: the device comprises a furnace body 1, a platform frame 2, a furnace chamber air extraction pipeline 3, a bottom layer frame 4, a top layer frame 5, a first air inflation pipe 6, a second air inflation pipe 7, a total air extraction pipe 8, a pipeline deposition bin 9, a pneumatic butterfly valve 10, a dust hood 11, a ground dust absorption pipeline 12, a platform dust absorption pipeline 13, a platform dust absorption control valve interface 14, a vacuum electromagnetic valve 15, a cleaning hole 16, a flange blind plate 17, a sealing plug 18, a reel 19, an elastic sheet 20, a rotary column 21, a connecting rope 22, a cleaning disc 23, a connecting block 24, a guide ring 25, a cleaning ring 26, an inlet hole 27, an outlet hole 28, an annular cleaning groove 29, a first connecting hole 30, a second connecting hole 31, an elastic pad 32 and a ball 33.
Detailed Description
In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further described with the specific embodiments.
Example one
As shown in fig. 1 and fig. 2, the furnace chamber gas-filling dust-removing system according to the embodiment of the present invention includes a furnace body 1, a platform frame 2 and a furnace chamber gas-extracting duct 3; the furnace body 1 is fixedly connected with the platform frame 2; the platform frame 2 comprises a bottom frame 4 and a top frame 5; the surface of the furnace top plate of the furnace body 1 is fixedly connected with a first gas filling pipe 6; the surface of the furnace chassis of the furnace body 1 is fixedly connected with a second inflation tube 7, and the first inflation tube 6 and the second inflation tube 7 are both externally connected with an air compressor; the surface of the platform frame 2 is fixedly connected with a main exhaust pipe 8, and the main exhaust pipe 8 is externally connected with a negative pressure source; the main exhaust pipe 8 is fixedly connected with a pipeline deposition bin 9; a pneumatic butterfly valve 10 is connected between the pipeline deposition bin 9 and the main exhaust pipe 8; the middle part of the furnace body 1 is fixedly connected with a dust hood 11; an exhaust port of the dust hood 11 is fixedly connected with a furnace chamber air exhaust pipeline 3, one end of the furnace chamber air exhaust pipeline 3 is communicated with the inside of the furnace body 1, and the other end of the furnace chamber air exhaust pipeline is communicated with the pipeline deposition bin 9; when the furnace is in operation, the first gas filling pipe 6 and the second gas filling pipe 7 are respectively arranged on the surfaces of the furnace top disc and the furnace bottom disc, volatile matters, dust and the like are taken away by increasing the gas flow velocity through large-pressure and large-flow compressed air, in addition, in the gas filling process, the furnace is required to be shut down, after the furnace is cooled, and the vertical fast opposite blowing is carried out before the furnace is opened, so that the condition that the furnace is not cooled is avoided, the compressed air is blown in, the air and the medium in the furnace generate chemical reaction to influence the crystal quality, the gas carrying the volatile matters and the dust can be sucked into the dust hood 11, the gas with the volatile matters and the dust is blown at large flow velocity, the volatile matters and the like in the furnace are blown up in a large range, the dust is blown to the middle part of the furnace chamber from the place with large flow velocity along the direction of the gas flow, and is guided into the pipeline deposition bin 9 through the furnace chamber air exhaust pipeline deposition bin 9, the volatile matters and the dust in the air are filtered through the pipeline deposition bin 9, the purpose of dust removal is achieved, then filtered gas can be led out through the main exhaust pipe 8, when dust in the pipeline deposition bin 9 is deposited more, the pipeline deposition bin 9 can be opened at the moment, interior cleaning is conducted, volatile matters can be removed rapidly through the upper-lower blowing and middle-suction mode, the cleaning of the volatile matters, dust and other substances in the synthetic furnace can be achieved effectively, the volatile matters and dust cleaning effect is improved greatly through the upper-lower convection pressurized air flow, the cleaning efficiency in the furnace is improved, the cleaned gas can be led out rapidly through the negative pressure suction mode, and the interior of the synthetic furnace can be cleaned rapidly and fully before the synthetic furnace is started.
The multiphase mixture involved in the dust removal of the dust removal system is called a gas phase suspension system or aerosol, fine particles dispersed in the multiphase mixture are dust particles, the accumulation state of the dust particles is called powder, and a dust removal unit is correctly designed and selected according to the physical and chemical properties of the powder of the equipment.
Air in the pipeline is pumped out through a fan or an air pump, pressure difference is generated inside and outside the unit, namely negative pressure, the higher the negative pressure is, the stronger the suction force is, the gas mixture is easy to suck out, the motor is not directly sucked into the fan or the pump for the purpose of mixing the sucked-out gas, two filtering systems, namely primary filtering and secondary filtering, are added in a pipeline deposition bin 9 when the powder enters the unit, the powder and carbon and silicon mixture with large particles are generally filtered by primary filtering, the dust particles and carbon and silicon mixture with small particles are filtered by secondary filtering, the solid is remained in the filter after the secondary filtering, the gas is discharged through an air outlet of the fan, and the filtering efficiency of the gas reaches more than 98 percent.
The air inlet of the main exhaust pipe 8 is connected with a ground dust suction pipeline 12; an air inlet of the main exhaust pipe 8 is connected with a platform dust suction pipeline 13; the end surfaces of the ground dust collection pipeline 12 and the platform dust collection pipeline 13 are fixedly connected with a platform dust collection control valve interface 14; during operation, because synthetic furnace long-time operation back, the bottom frame 4 and the 5 dust on top layer frame of platform frame 2 are more, through setting up ground dust absorption pipeline 12 and platform dust absorption pipeline 13, utilize negative pressure in the total exhaust tube 8 for ground dust absorption pipeline 12 and platform dust absorption pipeline 13 produce great negative pressure, when needing to use, through the external pipeline of platform dust absorption control valve interface 14, realize adsorbing the dust on each position surface of platform frame 2.
The number of the first gas-filled tubes 6, the number of the second gas-filled tubes 7 and the number of the furnace chamber gas extraction pipelines 3 are all three, and the first gas-filled tubes, the second gas-filled tubes and the furnace chamber gas extraction pipelines are all uniformly distributed along the outer ring of the furnace body 1; the surfaces of the first gas filling pipe 6 and the second gas filling pipe 7 are fixedly connected with vacuum solenoid valves 15 at positions close to the furnace body 1; when the silicon carbide synthesis furnace works, the inflation system is in a normally closed state during crystal growth, and considering that the first inflation tube 6 and the second inflation tube 7 which are connected with compressed air influence the performance of the whole machine during the operation of the furnace, the first inflation tube 6 and the second inflation tube 7 for the compressed air have too long strokes and influence the vacuum degree and the sealing performance, the positions of connecting pipe orifices of the first inflation tube 6 and the second inflation tube 7 are connected with the vacuum electromagnetic valve 15 through hard tubes, the vacuum electromagnetic valve 15 is opened only before the furnace is opened, so that the compressed air is inflated into the furnace, and other times are in the normally closed state.
The furnace chamber air extraction pipelines 3 are all designed into an L-shaped structure; cleaning holes 16 are formed in the corner positions of the furnace chamber air extraction pipelines 3; a flange blind plate 17 is arranged at the position of a cleaning hole 16 at the corner of the furnace chamber exhaust pipe; during operation, through setting up flange blind plate 17, flange blind plate 17 is convenient for dismantle, is convenient for clear up three furnace chamber air exhaust pipeline 3's inside for the inside volatile substance and the dust of long-term deposit of furnace chamber air exhaust pipeline 3 obtain effectively clearing away, guarantee that furnace chamber air exhaust pipeline 3 is unblocked, avoid furnace chamber air exhaust pipeline 3 to narrow down seriously even block up the problem completely.
In order to improve the dust collection efficiency, the size, the position and the air intake amount of an air inlet during air inflation, the pumping speed during dust collection, the outer diameter and the thickness of a pipeline and the pipeline arrangement are all repeatedly calculated by matching a furnace chamber and required working conditions, and the minimum bending radius of the air inlet is obtained by verification design, the minimum bending radius of the air inlet depends on the material characteristics, the bending angle, the thinning allowance of the outer side of the bent pipe wall, the wrinkling size of the inner side and the ovality of a bent part, generally the minimum bending radius is more than or equal to 2-2.5 times of the outer diameter of the pipe, the shortest straight line section is more than or equal to 1.5-2 times of the outer diameter of the pipe, the space of an assembly interface where a ground dust collection pipeline 12 and a platform dust collection pipeline 13 are positioned is narrow, the pipeline trend layout is limited, the requirement cannot be met by one-time bending, the requirement of one-pipe multi-time bending is required by a drawing, and the mould is required to be bent for realizing the multiple-time bending, the mode of welding the elbow with the straight pipe is used for replacing one pipe with multiple bends in the comprehensive consideration of the economic aspect and the like.
The 11 surface opening shapes of suction hood are the tubaeform design, and the horn mouth narrows down along fluidic direction gradually, and area of contact reduces, and the increase velocity of flow improves the smoothness nature and the air-out efficiency of bleeding for better more abundant bleeding.
The horn-shaped opening on the surface of the dust hood 11 is in flexible connection with the furnace chamber air extraction pipeline 3, so that the connection part is completely overlapped, air leakage is avoided, the centering connection is convenient, and the assembly is easy.
The design of flange blind plate 17 is because the pumping speed is too low or the velocity of flow all can lead to the pipeline dust deposit inboard at the pipe wall too slowly, does not clear up for a long time, can form when accumulational dust is more and more serious and block up, opens flange blind plate 17 this moment and can clear up, compares in the convenient maintenance of whole pipeline clearance like this, saves manual work, cost.
Example two
As shown in fig. 3 to 6, a first comparative example, in which another embodiment of the present invention is: the surface of the furnace chamber air exhaust pipeline 3 is provided with threads; the surface of the furnace chamber air extraction pipeline 3 is connected with a sealing plug 18 through threads; a reel 19 is arranged at one end of the furnace chamber air exhaust pipeline 3 far away from the sealing plug 18; an elastic sheet 20 is arranged inside the reel 19; a rotary column 21 is rotatably connected inside the reel 19; a connecting rope 22 is wound on the surface of the rotary column 21; a cleaning disc 23 is connected inside the furnace chamber air extraction pipeline 3 in a sliding manner, a connecting rope 22 penetrates through the cleaning disc 23 and is connected with the sealing plug 18, and the connecting rope 22 is fixedly connected with the cleaning disc 23; during operation, by arranging the reel 19 and acting through the elastic sheet 20 inside the reel 19, the connecting rope 22 tends to be wound on the surface of the rotary column 21 all the time, the blind flange 17 is replaced by the plug 18, the plug 18 can be unscrewed, and then the cleaning maintenance personnel can pull the connecting rope 22, the connecting rope 22 can drive the cleaning disc 23 to move, the connecting rope 22 can be unreeled from the inside of the reel 19, the cleaning disc 23 can effectively clean volatile matters, dust and the like adhered to the inner surface of the furnace chamber air exhaust pipeline 3 by moving, so that the substances are cleaned to the position close to the opening of the cleaning hole 16, the dust and the like can be quickly cleaned by the working personnel, the cleaning efficiency is greatly improved, after cleaning is completed, only the pulling rope needs to be loosened, the connecting rope 22 is automatically wound inside the reel 19 under the action of the elastic sheet 20 inside the reel 19, and the cleaning disc 23 automatically resets, and then the closure 18 is tightened.
The opening part of the cleaning hole 16 is provided with a guide groove; the surface of the sealing plug 18 is rotatably connected with a connecting block 24, the connecting block 24 is connected in the guide groove in a sliding manner, and the connecting rope 22 is fixedly connected with the connecting block 24; during operation, through setting up even piece 24, and even piece 24 sliding connection in the inside of guide slot, when the staff revolves soon the closure 18, even piece 24 can not rotate thereupon, and then even piece 24 can not drive even rope 22 and rotate, has avoided even rope 22 serious distortion problem.
An installation groove is formed in the furnace chamber air exhaust pipeline 3 close to the reel 19; the inner parts of the mounting grooves are fixedly connected with guide rings 25; an annular groove is formed in the guide ring 25; a cleaning ring 26 is fixedly connected inside the annular groove, and the connecting rope 22 penetrates through the cleaning ring 26; during operation, by arranging the guide ring 25 and arranging the cleaning ring 26 inside the guide ring 25, when the connecting rope 22 is wound, in order to prevent volatile matters or dust from adhering to the surface of the connecting rope 22 and further prevent the volatile matters or dust from being introduced into the reel 19 along with the connecting rope 22 to influence the normal operation of the reel 19, the cleaning ring 26 can be used for cleaning the adhered matters on the surface of the connecting rope 22.
The connecting rope 22 is designed to be made of high-temperature resistant elastic material; an inlet hole 27 is formed in the connecting rope 22; an outlet hole 28 is formed in the connecting rope 22 at the bottom of the inlet hole 27; during operation, through seting up inlet 27 and exit 28 in the inside of even rope 22, through the leading-in liquid of inlet 27, exit 28 derives liquid, and liquid can be cooled down even rope 22, avoids the stove under the condition for fully cooling down, and the gas temperature that inhales stove chamber exhaust duct 3 is higher, produces the damage to even rope 22.
The surface of the cleaning disc 23 is provided with an annular cleaning groove 29; first connecting holes 30 which are uniformly distributed are formed between the annular cleaning groove 29 and the inlet hole 27; second connecting holes 31 which are uniformly distributed are formed between the annular cleaning groove 29 and the outlet hole 28; during operation, through first even hole 30 and second even hole 31, can be with inlet 27 and annular clearance groove 29 intercommunication, can be with outlet 28 and annular clearance groove 29 intercommunication simultaneously, inlet 27 inside liquid can be through the leading-in annular clearance groove 29 of first even hole 30, the in-process that clearance dish 23 removed can be cleared up the internal surface of furnace chamber air exhaust pipeline 3, the sewage after the clearance simultaneously can be through the leading-in outlet 28 of second even hole 31 to flow through outlet 28.
An elastic pad 32 is fixedly connected to the side surface of one side of the cleaning disc 23, which is opposite to the furnace chamber air extraction pipeline 3, and is close to the annular cleaning groove 29; the side surface of the elastic pad 32 opposite to one side surface of the sealing plug 18 is designed to be of a smooth structure; the elastic pad 32 is provided with balls 33 which are uniformly distributed on the side surface of one side relative to the pipeline deposition bin 9; the during operation, through setting up cushion 32, when cleaning disc 23 removes, cushion 32's plain noodles can be towards furnace chamber air exhaust pipeline 3's internal surface, smooth noodles through cushion 32 can clear up furnace chamber air exhaust pipeline 3's internal surface, when letting cleaning disc 23 reverse movement, cushion 32 receives the effect of furnace chamber air exhaust pipeline 3's internal surface, cushion 32 has the one side of ball 33 towards furnace chamber air exhaust pipeline 3's internal surface, can play the effect of reducing friction through ball 33, reduce the resistance of cleaning disc 23 removal in-process, avoid cleaning disc 23 to block the middle part position of dying at furnace chamber air exhaust pipeline 3.
When the furnace is in operation, the first gas filling pipe 6 and the second gas filling pipe 7 are respectively arranged on the surfaces of the furnace top disc and the furnace bottom disc, volatile matters, dust and the like are taken away by increasing the gas flow velocity through large-pressure and large-flow compressed air, in addition, in the gas filling process, the furnace is required to be shut down, after the furnace is cooled, and the vertical fast opposite blowing is carried out before the furnace is opened, so that the condition that the furnace is not cooled is avoided, the compressed air is blown in, the air and the medium in the furnace generate chemical reaction to influence the crystal quality, the gas carrying the volatile matters and the dust can be sucked into the dust hood 11, the gas with the volatile matters and the dust is blown at large flow velocity, the volatile matters and the like in the furnace are blown up in a large range, the dust is blown to the middle part of the furnace chamber from the place with large flow velocity along the direction of the gas flow, and is guided into the pipeline deposition bin 9 through the furnace chamber air exhaust pipeline deposition bin 9, the volatile matters and the dust in the air are filtered through the pipeline deposition bin 9, the purpose of dust removal is achieved, then the filtered gas can be led out through the main exhaust pipe 8, when dust in the pipeline deposition bin 9 is deposited more, the pipeline deposition bin 9 can be opened at the moment, the interior of the pipeline deposition bin is cleaned, and volatile matters can be removed quickly through an up-down blowing and middle suction mode; after the synthesis furnace runs for a long time, the bottom layer frame 4 and the top layer frame 5 of the platform frame 2 have more dust, the ground dust suction pipeline 12 and the platform dust suction pipeline 13 are arranged, negative pressure in the main exhaust pipe 8 is utilized, so that the ground dust suction pipeline 12 and the platform dust suction pipeline 13 generate larger negative pressure, and when the synthesis furnace is required to be used, the platform dust suction control valve interface 14 is externally connected with a pipeline to realize the adsorption of the dust on the surface of each part of the platform frame 2; during the crystal growth period of the silicon carbide synthesis furnace, the inflation system is in a normally closed state, and considering that the first inflation tube 6 and the second inflation tube 7 which are connected with compressed air influence the performance of the whole machine during the operation period of the furnace, the first inflation tube 6 and the second inflation tube 7 for the compressed air have too long strokes and influence the vacuum degree and the sealing performance, the positions of connecting pipe orifices of the first inflation tube 6 and the second inflation tube 7 are connected with the vacuum electromagnetic valve 15 by hard tubes, the vacuum electromagnetic valve 15 is opened only before the furnace is opened, so that the compressed air is inflated into the furnace, and the other times are in a normally closed state; by arranging the flange blind plate 17, the flange blind plate 17 is convenient to disassemble and clean the interiors of the three furnace chamber air extraction pipelines 3, so that volatile matters and dust deposited in the furnace chamber air extraction pipelines 3 for a long time are effectively removed, the furnace chamber air extraction pipelines 3 are ensured to be smooth, and the problem that the furnace chamber air extraction pipelines 3 are seriously narrowed or even completely blocked is avoided; by arranging the reel 19, the connecting rope 22 always tends to be wound on the surface of the rotary column 21 through the action of the elastic sheet 20 inside the reel 19, and by replacing the flange blank 17 with the plug 18, the plug 18 can be unscrewed, the cleaning maintenance personnel can pull the connecting rope 22, the connecting rope 22 can drive the cleaning disc 23 to move, and the connecting rope 22 is unwound from the inner part of the reel 19, the movement of the cleaning disc 23 can effectively clean volatile matters, dust and the like adhered to the inner surface of the furnace chamber air exhaust pipeline 3, the materials are cleaned to the position close to the opening part of the cleaning hole 16, so that the dust and the like can be cleaned quickly by workers, the cleaning efficiency is greatly improved, after the cleaning is finished, only the pull rope needs to be released, under the action of the elastic sheet 20 in the reel 19, the connecting rope 22 is automatically wound into the reel 19, the cleaning disc 23 is automatically reset at the same time, and then the sealing plug 18 is screwed down; by arranging the connecting block 24 and connecting the connecting block 24 in the guide groove in a sliding manner, when a worker screws the sealing plug 18, the connecting block 24 cannot rotate along with the sealing plug, and further the connecting block 24 cannot drive the connecting rope 22 to rotate, so that the problem that the connecting rope 22 is seriously twisted is avoided; by arranging the guide ring 25 and arranging the cleaning ring 26 inside the guide ring 25, when the connecting rope 22 is wound, in order to prevent volatile matters or dust from adhering to the surface of the connecting rope 22 and further prevent the volatile matters or the dust from being introduced into the inside of the reel 19 along with the connecting rope 22 to influence the normal operation of the reel 19, the cleaning ring 26 can be used for cleaning the adhered matters on the surface of the connecting rope 22; the inlet hole 27 and the outlet hole 28 are formed in the connecting rope 22, liquid is introduced through the inlet hole 27, and liquid is led out of the outlet hole 28, so that the connecting rope 22 can be cooled by the liquid, and the phenomenon that the connecting rope 22 is damaged due to the fact that the temperature of gas sucked into the furnace chamber air exhaust pipeline 3 is high under the condition that the temperature in the furnace is sufficiently reduced is avoided; through the first connecting hole 30 and the second connecting hole 31, the inlet hole 27 can be communicated with the annular cleaning groove 29, meanwhile, the outlet hole 28 can be communicated with the annular cleaning groove 29, liquid in the inlet hole 27 can be led into the annular cleaning groove 29 through the first connecting hole 30, the inner surface of the furnace chamber air exhaust pipeline 3 can be cleaned in the moving process of the cleaning disc 23, meanwhile, cleaned sewage can be led into the outlet hole 28 through the second connecting hole 31 and flows out through the outlet hole 28; through setting up the cushion 32, when cleaning disc 23 removes, the plain noodles of cushion 32 can be towards furnace chamber air exhaust pipeline 3's internal surface, smooth noodles through cushion 32 can clear up furnace chamber air exhaust pipeline 3's internal surface, when letting cleaning disc 23 reverse movement, cushion 32 receives the effect of furnace chamber air exhaust pipeline 3's internal surface, cushion 32 has the one side of ball 33 towards furnace chamber air exhaust pipeline 3's internal surface, can play friction-reducing's effect through ball 33, reduce the resistance of cleaning disc 23 removal in-process, avoid cleaning disc 23 card to die the middle part position at furnace chamber air exhaust pipeline 3.
The front, the back, the left, the right, the upper and the lower are all based on figure 1 in the attached drawings of the specification, according to the standard of the observation angle of a person, the side of the device facing an observer is defined as the front, the left side of the observer is defined as the left, and the like.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate orientations or positional relationships based on those shown in the drawings, and are used merely for convenience in describing the present invention and for simplifying the description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the scope of the present invention.
The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (10)
1. The furnace chamber inflation dust removal system is characterized in that: comprises a furnace body (1), a platform frame (2) and a furnace chamber air extraction pipeline (3); the furnace body (1) is fixedly connected with the platform frame (2); the platform frame (2) comprises a bottom layer frame (4) and a top layer frame (5); the surface of the furnace top disc of the furnace body (1) is fixedly connected with a first gas filling pipe (6); the surface of a furnace chassis of the furnace body (1) is fixedly connected with a second inflation tube (7), and the first inflation tube (6) and the second inflation tube (7) are externally connected with an air compressor; the surface of the platform frame (2) is fixedly connected with a main exhaust pipe (8), and the main exhaust pipe (8) is externally connected with a negative pressure source; the main exhaust pipe (8) is fixedly connected with a pipeline deposition bin (9); a pneumatic butterfly valve (10) is connected between the pipeline deposition bin (9) and the main exhaust pipe (8); the middle part of the furnace body (1) is fixedly connected with a dust hood (11); an exhaust port of the dust hood (11) is fixedly connected with a furnace chamber air exhaust pipeline (3), one end of the furnace chamber air exhaust pipeline (3) is communicated with the interior of the furnace body (1), and the other end of the furnace chamber air exhaust pipeline is communicated with the pipeline deposition bin (9).
2. The furnace chamber air charging and dust removing system of claim 1, wherein: the air inlet of the main exhaust pipe (8) is connected with a ground dust suction pipeline (12); an air inlet of the main exhaust pipe (8) is connected with a platform dust suction pipeline (13); the end surfaces of the ground dust collection pipeline (12) and the platform dust collection pipeline (13) are fixedly connected with a platform dust collection control valve interface (14).
3. The furnace chamber air charging and dust removing system of claim 1, wherein: the number of the first gas-filled tubes (6), the number of the second gas-filled tubes (7) and the number of the furnace chamber gas extraction pipelines (3) are three, and the first gas-filled tubes, the second gas-filled tubes and the furnace chamber gas extraction pipelines are uniformly distributed along the outer ring of the furnace body (1); the surfaces of the first inflation tube (6) and the second inflation tube (7) are close to the furnace body (1) and are fixedly connected with vacuum solenoid valves (15).
4. The furnace chamber air charging and dust removing system of claim 1, wherein: the furnace chamber air extraction pipelines (3) are all designed into an L-shaped structure; cleaning holes (16) are formed in the corner positions of the furnace chamber air extraction pipelines (3); and a flange blind plate (17) is arranged at the position of a cleaning hole (16) at the corner of the furnace chamber exhaust pipe.
5. The furnace chamber air charging and dust removing system of claim 4, wherein: the surface of the furnace chamber air exhaust pipeline (3) is provided with threads; the surface of the furnace chamber air extraction pipeline (3) is in threaded connection with a sealing plug (18); a reel (19) is arranged at one end of the furnace chamber air extraction pipeline (3) far away from the sealing plug (18); an elastic sheet (20) is arranged inside the reel (19); a rotary column (21) is rotatably connected inside the reel (19); a connecting rope (22) is wound on the surface of the rotating column (21); the inside sliding connection of furnace chamber air exhaust pipeline (3) has clearance dish (23), links rope (22) and passes clearance dish (23) and links to each other with stopper (18), and links rope (22) and clearance dish (23) between fixed connection.
6. The furnace chamber air charging and dust removing system of claim 5, wherein: the opening part of the cleaning hole (16) is provided with a guide groove; the surface of the sealing plug (18) is rotatably connected with a connecting block (24), the connecting block (24) is connected in the guide groove in a sliding manner, and the connecting rope (22) is fixedly connected with the connecting block (24).
7. The furnace chamber air charging and dust removing system of claim 6, wherein: an installation groove is formed in the furnace chamber air exhaust pipeline (3) close to the reel (19); guide rings (25) are fixedly connected inside the mounting grooves; an annular groove is formed in the guide ring (25); the inside of annular groove is linked firmly clearance ring (26), and even rope (22) pass the inside of clearance ring (26).
8. The furnace chamber air charging and dust removing system of claim 7, wherein: the connecting rope (22) is designed to be made of high-temperature resistant elastic material; an inlet hole (27) is formed in the connecting rope (22); an outlet hole (28) is formed in the connecting rope (22) at the bottom of the inlet hole (27).
9. The furnace chamber air charging and dust removing system of claim 8, wherein: an annular cleaning groove (29) is formed in the surface of the cleaning disc (23); first connecting holes (30) which are uniformly distributed are formed between the annular cleaning groove (29) and the inlet hole (27); second connecting holes (31) which are uniformly distributed are formed between the annular cleaning groove (29) and the outlet hole (28).
10. The furnace chamber air charging and dust removing system of claim 9, wherein: an elastic pad (32) is fixedly connected to the side surface of one side of the cleaning disc (23) relative to the furnace chamber air extraction pipeline (3) and close to the annular cleaning groove (29); the side surface of the elastic pad (32) opposite to one side of the sealing plug (18) is designed to be of a smooth structure; the elastic pad (32) is provided with balls (33) which are uniformly distributed on the side surface of one side of the pipeline deposition bin (9).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210039985.3A CN114383434B (en) | 2022-01-14 | 2022-01-14 | Furnace chamber inflating dust removing system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210039985.3A CN114383434B (en) | 2022-01-14 | 2022-01-14 | Furnace chamber inflating dust removing system |
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| CN114383434B CN114383434B (en) | 2024-04-26 |
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| CN114383434B (en) | 2024-04-26 |
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Effective date of registration: 20231129 Address after: No. 15, Jinghong Road, Xibei Town, Xishan District, Wuxi City, Jiangsu Province, 214000 Applicant after: Lianke Semiconductor Co.,Ltd. Address before: No. 15, Jinghong Road, Xibei Town, Xishan District, Wuxi City, Jiangsu Province, 214000 Applicant before: Liancheng keix Technology Co.,Ltd. |
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