CN114381695A

CN114381695A - Film production line and film production method

Info

Publication number: CN114381695A
Application number: CN202111671743.8A
Authority: CN
Inventors: 臧世伟
Original assignee: Chongqing Jinmei New Material Technology Co Ltd
Current assignee: Chongqing Jinmei New Material Technology Co Ltd
Priority date: 2021-12-31
Filing date: 2021-12-31
Publication date: 2022-04-22

Abstract

The embodiment of the invention provides a film production line and a film production method, which comprise a plurality of film production devices, wherein each film production device comprises: the film coating device comprises a bonding cavity, a film coating cavity and a stripping cavity which are sequentially arranged, wherein a film to be produced is unreeled and bonded through the bonding cavity, the film coating cavity is used for evaporating the bonded film, and the stripping cavity is used for stripping and reeling the evaporated film. According to the embodiment of the invention, the vacuum chamber does not need to be opened for winding, the interior of the coating chamber is prevented from being exposed in the atmospheric environment for a long time, two rolls of films can be produced simultaneously, the production quality of the films is improved, the production efficiency is also improved, in addition, the number of rollers used in the process of producing the films is small, and the production cost of the films is greatly reduced.

Description

Film production line and film production method

Technical Field

The invention relates to the technical field of battery manufacturing, in particular to a film production line and a film production method.

Background

With the development of optical thin film technology and semiconductor technology, the application of vacuum coating technology in production is becoming more and more extensive and important, and vacuum evaporation coating is the most popular and most widely applied vacuum coating process in the earliest development. The vacuum evaporation coating machine has various types, wherein the development history of the intermittent vacuum evaporation coating machine is the longest, but the application of large-area flexible film coating production is difficult to meet due to the defects of incapability of continuous coating, small coating area, low production efficiency and the like. The flexible film substrate material has various choices, and the market widely uses PC, PI, PVC, PMMA, PET etc. these materials can produce thermal stress by the influence of temperature rise to change its shape, and warp the aggravation with the temperature rise increases, and the thermal stress deformation of thinner base film can be more obvious. Because the heating temperature of material evaporation in vacuum evaporation coating is generally above 1000 ℃, the conventional winding coating machine can only coat the conventional flexible base film with the thickness of 50-200 microns at present.

In recent years, with the rapid development of the demand of new energy power batteries, the demand for preparing a film layer on an ultrathin flexible base film with the thickness of less than 20 microns is increasingly embodied. When the ultrathin flexible base film is subjected to evaporation coating, the base film is easy to deform and wrinkle at a high coating heating environment temperature, and even the base film is broken due to excessive deformation, so that the production efficiency and the product quality are seriously influenced.

On the other hand, the film threading procedure is generally required before the vacuum coating is started in the winding coating process, in the existing winding coating equipment, most vacuum chambers need to be opened, and the film is threaded in a winding system manually or by some mechanisms in the atmospheric environment.

Disclosure of Invention

In view of the above, an embodiment of the present invention provides a method for producing a thin film, so as to solve the technical problems in the prior art that the vacuum chamber needs to be opened for winding, so that the evaporation equipment is exposed in the air for a long time, which affects the evaporation quality of the thin film, and only one roll of thin film can be produced each time, which results in low production efficiency.

To achieve the above object, in a first aspect, the present invention provides a film production line including a plurality of film production apparatuses, the film production apparatus including:

the film coating device comprises a bonding cavity, a film coating cavity and a stripping cavity which are sequentially arranged, wherein the bonding cavity unreels and bonds a film to be produced, the film coating cavity carries out evaporation on the bonded film, and the stripping cavity peels and winds the evaporated film.

In some possible embodiments, the bonding chamber includes an unwinding unit and a first bonding unit sequentially arranged in a horizontal direction, wherein the unwinding unit and the first bonding unit are arranged in a horizontal direction

The unwinding unit comprises: the first unwinding roller and the second unwinding roller are respectively and rotatably arranged on the side wall of the bonding chamber;

the first bonding unit includes: the first bonding roller and the second bonding roller are respectively and rotatably arranged on the side wall of the bonding chamber, and are in rolling contact.

In some possible embodiments, the coating chamber comprises:

the first vacuumizing device is arranged on the side wall of the coating chamber;

the vacuum frame is vertically arranged inside the coating chamber;

the first evaporation source and the second evaporation source are arranged on the vacuum rack from top to bottom;

and the plurality of steering rollers are respectively arranged on two sides of the vacuum frame and are rotationally arranged on the side wall of the coating chamber.

In some possible embodiments, the plurality of turning rolls includes:

the first steering roller is arranged on the first side of the vacuum frame, and the installation height of the first steering roller in the vertical direction is higher than that of the first evaporation source;

and the second steering roller is arranged on the second side of the vacuum frame, and the installation height of the second steering roller in the vertical direction is lower than that of the second evaporation source.

In some possible embodiments, the plurality of turning rolls further comprises:

the third steering roller is arranged on the first side of the vacuum frame, and the installation height of the third steering roller in the vertical direction is lower than that of the first evaporation source and higher than that of the second evaporation source;

and the fourth steering roller is arranged on the second side of the vacuum frame, and the top tangent plane of the fourth steering roller and the bottom tangent plane of the third steering roller are on the same horizontal plane.

In some possible embodiments, the stripping chamber comprises a winding unit and a stripping unit which are arranged in sequence in the horizontal direction, wherein,

the winding unit includes: the first winding roller and the second winding roller are respectively and rotatably arranged on the side wall of the stripping chamber;

the peeling unit includes: the first stripping roller and the second stripping roller are respectively and rotatably arranged on the side wall of the stripping chamber, and the first stripping roller is in rolling contact with the second stripping roller;

and the adhesive take-up roll is positioned at the downstream of the first stripping roll and the second stripping roll and is rotationally arranged on the side wall of the stripping chamber.

In some possible embodiments, the thin film production apparatus further includes a first transition chamber disposed between the bonding chamber and the coating chamber, and a second vacuum device is disposed on the first transition chamber.

In some possible embodiments, the first transition chamber further comprises a second bonding unit comprising:

and the third bonding roller and the fourth bonding roller are respectively and rotatably arranged on the side wall of the first transition chamber and are in rolling contact.

In some possible embodiments, the thin film production apparatus further includes a second transition chamber disposed between the coating chamber and the peeling chamber, the second transition chamber including:

the third vacuumizing device is arranged on the second transition chamber;

and the roller is rotatably arranged on the side wall of the second transition chamber.

In a second aspect, the present invention provides a film production method based on any one of the above film production lines, the film production method comprising the steps of:

unwinding and bonding the film to be produced through a bonding chamber;

evaporating the adhered film through a film coating chamber;

and peeling and rolling the evaporated film through a peeling chamber.

The beneficial effects of the above embodiment are as follows:

the embodiment of the invention provides a film production line and a film production method, which comprise a plurality of film production devices, wherein each film production device comprises: the film coating device comprises a bonding cavity, a coating cavity and a stripping cavity which are sequentially arranged, wherein a film to be produced is unreeled and bonded through the bonding cavity, the bonded film is subjected to evaporation through the coating cavity, and the evaporated film is stripped and rolled through the stripping cavity. According to the embodiment of the invention, the vacuum chamber does not need to be opened for winding, the interior of the coating chamber is prevented from being exposed in the atmospheric environment for a long time, the production quality of the film is improved, two rolls of films can be produced simultaneously, and the production efficiency is improved.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a schematic view of an overall structure of a thin film evaporation production line according to an embodiment of the present invention;

FIG. 2 is a front view of a thin film production apparatus according to an embodiment of the present invention;

FIG. 3 is a front view of a bonding chamber provided by embodiments of the present invention;

FIG. 4 is a front view of a coating chamber according to an embodiment of the present invention;

FIG. 5 is a front view of another coating chamber provided in an embodiment of the present invention;

FIG. 6 is a front view of a stripping chamber provided by embodiments of the present invention;

FIG. 7 is a front view of a first transition chamber provided by embodiments of the present invention;

FIG. 8 is a front view of another first transition chamber provided by embodiments of the present invention;

FIG. 9 is a front view of a second transition chamber provided by embodiments of the present invention;

FIG. 10 is a front view of another thin film production apparatus according to an embodiment of the present invention;

fig. 11 is a flowchart of a thin film manufacturing method according to an embodiment of the present invention.

The reference numbers illustrate:

1. a bonding chamber; 11. a first unwinding roller; 12. a second unwinding roller; 13. a first bonding roller; 14. a second bonding roller;

2. a film coating chamber; 20. a first vacuum extractor; 21. a vacuum frame; 22. a first evaporation source; 23. a second evaporation source; 24. a first steering roller; 25. a second turning roll; 26. a third turning roll; 27. a fourth steering roller;

3. a stripping chamber; 31. a first wind-up roll; 32. a second wind-up roll; 33. a first peeling roller; 34. a second peeling roller; 35. an adhesive wind-up roll;

4. a first transition chamber; 40. a second vacuum extractor; 41. a third bonding roller; 42. a fourth bonding roller;

5. a second transition chamber; 50. a third vacuum extractor; 51. and (4) passing through a roller.

Detailed Description

Features and exemplary embodiments of various aspects of the present invention will be described in detail below. In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without some of these specific details. The following description of the embodiments is merely intended to provide a better understanding of the present invention by illustrating examples of the present invention. In the drawings and the following description, at least some well-known structures and techniques have not been shown in detail in order to avoid unnecessarily obscuring the present invention; also, the dimensions of some of the structures may be exaggerated for clarity. Furthermore, the described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

As shown in fig. 1 to 10, an embodiment of the present invention provides a film production line, which includes a plurality of film production apparatuses, as shown in fig. 1, a first film production apparatus, a second film production apparatus, and … … th film production apparatus, where the plurality of film production apparatuses all have the same structure, specifically, the film production apparatus includes a bonding chamber 1, a coating chamber 2, and a peeling chamber 3, which are sequentially disposed, where the bonding chamber 1 is used to unreel and bond a film to be produced, the coating chamber 2 is used to evaporate the bonded film, and the peeling chamber 3 is used to peel and reel the evaporated film. According to the embodiment of the invention, the vacuum chamber does not need to be opened for winding, the interior of the coating chamber 2 is prevented from being exposed in the atmospheric environment for a long time, and two rolls of films can be produced simultaneously, so that the production quality of the films is improved, and the production efficiency is improved.

In some embodiments, as shown in fig. 3, the bonding chamber 1 includes an unwinding unit and a first bonding unit sequentially arranged in a horizontal direction, wherein the unwinding unit may include: a first unwinding roller 11 and a second unwinding roller 12 which are respectively rotatably arranged on the side wall of the bonding chamber 1; the first bonding unit includes a first bonding roller 13 and a second bonding roller 14 rotatably disposed on the sidewalls of the bonding chamber 1, respectively, and the first bonding roller 13 and the second bonding roller 14 are in rolling contact. Specifically, the first unwinding roller 11 and the second unwinding roller 12 are respectively used for unwinding a first roll of film and a second roll of film, and the first roll of film and the second roll of film are bonded through the first bonding roller 13 and the second bonding roller 14, so that the two rolls of films are bonded together, specifically, the surfaces of the first bonding roller 13 and the second bonding roller 14 are made of rubber materials, firstly, an adhesive is coated on the surface of one opposite surface of the first roll of film and the second roll of film through a coating device, and then, the first roll of film and the second roll of film coated with the adhesive are pressed through the first bonding roller 13 and the second bonding roller 14, wherein the adhesive is a high-viscosity substance formed by dissolving a polymer material such as PET or PI in ethyl acetate, and as an example, the ratio is 10g of the polymer material dissolved in 2ml of ethyl acetate.

In some embodiments, as shown in fig. 4, the coating chamber 2 includes a first vacuum device 20 disposed on a sidewall of the coating chamber 2; the vacuum frame 21 is vertically arranged inside the coating chamber 2; a first vapor deposition source 22 and a second vapor deposition source 23 which are provided on the vacuum frame 21 from top to bottom; and the plurality of steering rollers are respectively arranged at two sides of the vacuum frame 21 and are rotatably arranged on the side wall of the coating chamber 2. The coating chamber 2 is vacuumized by the vacuum pumping device 20, the first and second rolls of film are respectively evaporated by the first and

second evaporation sources

22 and 23, and the adhered first and second rolls of film are turned by the plurality of turning rolls. In the embodiment of the invention, the vacuum frame 21 is vertically arranged in the coating chamber 2, and the first evaporation source 22 and the second evaporation source 23 are respectively arranged on the vacuum frame 21, so that the vacuum space of the coating chamber 2 is greatly saved, and the problems that the vacuum space is large and the vacuumizing is time-consuming and labor-consuming are avoided. In the present embodiment, the number of the vapor deposition sources and the number of the turning rolls may be arbitrarily set according to actual needs, and is not limited here.

In some embodiments, as shown in fig. 4, the plurality of turning rollers includes a first turning roller 24 and a second turning roller 25, the first turning roller 24 is disposed on a first side of the vacuum frame 21, and the installation height in the vertical direction is higher than the first evaporation source 22; the second turning roller 25 is disposed on the second side of the vacuum frame 21, and is installed at a height lower than the second evaporation source 23 in the vertical direction. The embodiment uses fewer rollers, and further saves the production cost of the film.

In some embodiments, as shown in fig. 5, the plurality of turning rollers further includes a third turning roller 26 disposed on the first side of the vacuum frame 21, and the installation height in the vertical direction is lower than the first turning roller 24 and lower than the first evaporation source 22, that is, between the first evaporation source 22 and the second evaporation source 23; and the fourth steering roller 27 is arranged on the second side of the vacuum frame 21, and the top tangent plane of the fourth steering roller 27 and the bottom tangent plane of the third steering roller 26 are in the same horizontal plane. The bonded film is horizontally transported above the first evaporation source 22 and the second evaporation source 23, and the evaporation material is uniformly evaporated on the bonded film.

In some embodiments, as shown in fig. 6, the peeling chamber 3 includes a winding unit and a peeling unit sequentially arranged along a horizontal direction, wherein the winding unit includes a first winding roller 31 and a second winding roller 32, and the first winding roller 31 and the second winding roller 32 are respectively rotatably arranged on a sidewall of the peeling chamber 3; the peeling unit comprises a first peeling roller 33 and a second peeling roller 34, the first peeling roller 33 and the second peeling roller 34 are respectively rotatably arranged on the side wall of the peeling chamber 3, the first peeling roller 33 and the second peeling roller 34 are in rolling contact, and an adhesive winding roller 35 is arranged at the downstream of the first peeling roller 33 and the second peeling roller 34 and is rotatably arranged on the side wall of the peeling chamber 3. The first peeling roller 33 and the second peeling roller 34 peel the first roll of film and the second roll of film after evaporation, the first winding roller 31 and the second winding roller 32 wind the peeled films, the adhesive winding roller 35 winds the peeled adhesive, the double rolls of film processed by one film production device are repeatedly processed by the next film production device, and the two sides of the first roll of film and the second roll of film are coated for multiple times. The film production line provided by the embodiment of the invention can be used for simultaneously producing multiple rolls of films and can also be used for carrying out multiple times of vapor deposition on two sides of the multiple rolls of films.

In some embodiments, as shown in fig. 7, the film production apparatus further includes a first transition chamber 4, the first transition chamber 4 is disposed between the bonding chamber 1 and the coating chamber 2, a second vacuum pumping device 40 is disposed on the first transition chamber 4, and by disposing the first transition chamber 4, the second vacuum pumping device 40 is used to evacuate the first transition chamber 4, so that air in the bonding chamber 1 can be prevented from entering the coating chamber 2, and the film production quality can be prevented from being affected.

In some embodiments, as shown in fig. 8, the first transition chamber 4 further includes a second bonding unit, the second bonding unit includes a third bonding roller 41 and a fourth bonding roller 42, which are respectively rotatably disposed on the sidewalls of the first transition chamber 4, and the third bonding roller 41 and the fourth bonding roller 42 are in rolling contact. The second bonding unit is arranged in the first transition chamber 4 to further bond the first roll of film and the second roll of film, so that the bonding degree of the first roll of film and the second roll of film is improved, and the separation in the film moving process is avoided.

In some embodiments, as shown in fig. 9, the thin film production apparatus further comprises a second transition chamber 5 disposed between the coating chamber 2 and the peeling chamber 3, the second transition chamber 5 comprising a third vacuum pumping device 50 disposed on the second transition chamber 5; and a roller 51 rotatably arranged on the side wall of the second transition chamber 5. The produced film is smoothly guided into the stripping chamber 3 through the roller 51, deformation of the film after bending is avoided, the second transition chamber 5 is vacuumized through the third vacuumizing device 50, air in the stripping chamber 3 is prevented from entering the coating chamber 2, and production quality of the film is improved. It should be noted that the third vacuum pumping device 50 in the present application can be disposed at any position on the second transition chamber 5, and the present invention is not limited in particular.

According to the embodiment of the invention, the vacuum chamber does not need to be opened for winding, the interior of the coating chamber is prevented from being exposed in the atmospheric environment for a long time, and two rolls of films can be produced simultaneously, so that the production quality of the films is improved, and the production efficiency is improved.

The embodiment of the invention has the following beneficial effects:

according to the embodiment of the invention, the vacuum chamber does not need to be opened for winding, so that the interior of the coating chamber 2 is prevented from being exposed to the atmospheric environment for a long time, and two rolls of films can be produced simultaneously, thereby improving the production quality of the films and the production efficiency;

in the embodiment of the invention, the vacuum frame is vertically arranged in the coating cavity, and the first evaporation source and the second evaporation source are respectively arranged on the vacuum frame, so that the vacuum space of the coating cavity is greatly saved, the large vacuum space is avoided, and the time and labor are wasted when the vacuum frame is vacuumized;

the film production line provided by the embodiment of the invention can be used for simultaneously producing multiple rolls of films and evaporating the two sides of the multiple rolls of films for multiple times;

according to the embodiment of the invention, the vacuum chamber does not need to be opened for winding, so that the interior of the coating chamber is prevented from being exposed to the atmospheric environment for a long time, and two rolls of films can be produced simultaneously, thereby improving the production quality of the films and the production efficiency;

the embodiment uses less rollers and the production cost of the film is lower.

According to the embodiment of the invention, the first transition chamber and the second transition chamber are arranged, so that the phenomenon that air enters the film coating chamber to influence the evaporation quality of the film is avoided.

As shown in fig. 11, an embodiment of the present invention provides a film production method based on any one of the above film production lines, the film production method including the steps of:

s1, unwinding and bonding the film to be produced through the bonding chamber 1; specifically, first, in the bonding chamber 1, a first roll of film and a second roll of film are respectively installed on a first unwinding roller 11 and a second unwinding roller 12, the first unwinding roller 11 and the second unwinding roller 12 unwind the first roll of film and the second roll of film, and the first roll of film and the second roll of film are bonded together by a first bonding roller 13 and a second bonding roller 14; and guiding the film bonded in the bonding chamber 1 into the coating chamber 2.

S2, evaporating the adhered film through the film coating chamber 2; specifically, the first surfaces of the first and second rolls of film are coated by guiding the bonded film by a plurality of turning rolls so as to pass through a first evaporation source 21 and a second evaporation source 22 in order, and the coated film is introduced into the peeling chamber 3.

S3, the film after vapor deposition is peeled and wound in the peeling chamber 3. The coated film is peeled by the first peeling roller 33 and the second peeling roller 34, and the coated first roll of film and the coated second roll of film are respectively wound by the first winding roller 31 and the second winding roller 32.

The production methods of the first film production device, the second film production device and the … … nth film production device are the same, the first film production device is used for coating the first surfaces of the first roll of film and the second roll of film, the second film production device is used for coating the second surfaces of the first roll of film and the second roll of film, and so on, the multiple film production devices are used for performing multiple times of evaporation on the two surfaces of the first roll of film and the second roll of film.

In some embodiments, in order to avoid air entering the coating chamber 2 during the film moving process, the first transition chamber 4 and the second transition chamber 5 are arranged on two sides of the coating chamber 2, and the first transition chamber 4 and the second transition chamber 5 are respectively vacuumized by the second vacuum pumping device 40 and the third vacuum pumping device 50, so that air entering the coating chamber 2 is avoided, and the film production quality is not affected. Specifically, in the film production, two rolls of films are bonded by the bonding chamber 1 and then enter the coating chamber 2 through the first transition chamber 4, preferably, in order to bond the first roll of films and the second roll of films better, the first transition chamber 4 may be further provided with a second bonding unit to further bond the two rolls of films, so as to increase the bonding degree; and the film after being coated passes through the second transition chamber 5 and then enters the stripping chamber 3 for film and winding.

The film production method provided by the embodiment of the invention does not need to open the vacuum chamber for winding, avoids the long-time exposure of the interior of the coating chamber in the atmospheric environment, can produce two rolls of films simultaneously, and not only improves the film production quality, but also improves the production efficiency.

It should be noted that the number of the evaporation sources and the number of the turning rolls may be arbitrarily adjusted according to the size of the vacuum space and the evaporation unit, and the present invention is not limited thereto. The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.

In the description of the embodiments of the present invention, it should be noted that the terms "upper, lower, inner and outer" and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and operate, and thus should not be construed as limiting the present invention. Furthermore, the terms first, second, or third are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the embodiments of the present invention, unless otherwise explicitly specified or limited, the terms "mounted, connected" and the like are to be understood broadly, for example: can be fixedly connected, detachably connected or integrally connected; they may be mechanically, electrically, or directly connected, or indirectly connected through intervening media, or may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

While the invention has been described with reference to a preferred embodiment, various modifications may be made and equivalents may be substituted for elements thereof without departing from the scope of the invention. In particular, the technical features mentioned in the embodiments can be combined in any way as long as there is no structural conflict. It is intended that the invention not be limited to the particular embodiments disclosed, but that the invention will include all embodiments falling within the scope of the appended claims.

Claims

1. A film production line comprising a plurality of film production devices, the film production devices comprising:

the film coating device comprises a bonding cavity (1), a coating cavity (2) and a stripping cavity (3) which are sequentially arranged, wherein the bonding cavity (1) unreels and bonds a film to be produced, the coating cavity (2) evaporates the bonded film, and the stripping cavity (3) peels off and rolls the evaporated film.

2. The film production line according to claim 1, wherein said bonding chamber (1) comprises an unwinding unit and a first bonding unit arranged in sequence in a horizontal direction, wherein,

the unwinding unit comprises: the first unwinding roller (11) and the second unwinding roller (12) are respectively and rotatably arranged on the side wall of the bonding chamber (1);

the first bonding unit includes: the first bonding roller (13) and the second bonding roller (14) are respectively and rotatably arranged on the side wall of the bonding chamber (1), and the first bonding roller (13) and the second bonding roller (14) are in rolling contact.

3. A film production line according to claim 1, wherein said coating chamber (2) comprises:

the first vacuum-pumping device (20) is arranged on the side wall of the coating chamber (2);

the vacuum frame (21) is vertically arranged inside the film coating chamber (2);

a first evaporation source (22) and a second evaporation source (23) which are arranged on the vacuum frame (21) from top to bottom;

and the plurality of steering rollers are respectively arranged on two sides of the vacuum frame (21) and are rotatably arranged on the side wall of the film coating chamber (2).

4. A film production line as recited in claim 3, wherein the plurality of turning rolls comprise:

a first steering roller (24) which is arranged on a first side of the vacuum frame (21) and is higher than the first evaporation source (22) in the installation height in the vertical direction;

and a second turning roller (25) which is arranged on the second side of the vacuum frame (21) and is lower than the second evaporation source (23) in the installation height in the vertical direction.

5. The film manufacturing line as recited in claim 4, wherein said plurality of turning rolls further comprises:

a third turning roller (26) which is arranged on the first side of the vacuum frame (21) and is lower than the first evaporation source (22) in the vertical direction and higher than the second evaporation source (23);

the fourth steering roller (27) is arranged on the second side of the vacuum frame (21), and the top tangent plane of the fourth steering roller (27) and the bottom tangent plane of the third steering roller (26) are on the same horizontal plane.

6. A film production line according to claim 1, wherein the peeling chamber (3) comprises a take-up unit and a peeling unit arranged in order in a horizontal direction, wherein,

the winding unit includes: the first winding roller (31) and the second winding roller (32) are respectively and rotatably arranged on the side wall of the stripping chamber (3);

the peeling unit includes: a first stripping roller (33) and a second stripping roller (34) which are respectively arranged on the side wall of the stripping chamber (3) in a rotating way, wherein the first stripping roller (33) is in rolling contact with the second stripping roller (34);

an adhesive take-up roll (35) located downstream of the first and second stripping rolls (33, 34) and rotatably disposed on a sidewall of the stripping chamber (3).

7. A film production line according to any one of claims 1 to 6, characterized in that the film production device further comprises a first transition chamber (4) arranged between the bonding chamber (1) and the coating chamber (2), and a second vacuum device (40) is arranged on the first transition chamber (4).

8. A film production line according to claim 7, characterized in that said first transition chamber (4) further comprises a second gluing unit comprising:

and the third bonding roller (41) and the fourth bonding roller (42) are respectively and rotatably arranged on the side wall of the first transition chamber (4), and the third bonding roller (41) and the fourth bonding roller (42) are in rolling contact.

9. A film production line according to any one of claims 1 to 6, wherein said film production apparatus further comprises a second transition chamber (5) arranged between said coating chamber (2) and said peeling chamber (3), said second transition chamber (5) comprising:

a third vacuum extractor (50) arranged on the second transition chamber (5);

and the roller (51) is rotatably arranged on the side wall of the second transition chamber (5).

10. A film production method, characterized in that it is based on a film production line according to any one of claims 1 to 9, comprising the steps of:

unwinding and bonding the film to be produced through a bonding chamber (1);

evaporating the adhered film through a film coating chamber (2);

and stripping and winding the evaporated film through a stripping chamber (3).