CN114360986B - Electron gun for electron beam powder bed additive manufacturing equipment - Google Patents
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Abstract
The invention relates to an electron beam powder bed material-increasing manufacturing equipment electron gun, which solves the technical problems that an astigmatism-eliminating device of the existing Pierce electron gun corrects beam distortion in a static correction working mode, the requirement of the electron beam powder bed material-increasing manufacturing equipment for quick synchronous correction is not met, the astigmatism-eliminating device increases the flying distance of an electron beam for an independent device and is unfavorable for focusing of the electron beam, and the electron gun comprises a cathode, a beam focusing electrode, an anode, a shaft-combining device, a focusing device and a scanning astigmatism-eliminating integrated device which are coaxially and centrally distributed in sequence from top to bottom. The invention is widely used for electron beam powder bed additive manufacturing.
Description
Technical Field
The invention relates to the technical field of electron beam processing equipment, in particular to an electron gun for electron beam powder bed additive manufacturing equipment.
Background
The deflection scanning device of the electron beam powder bed additive manufacturing equipment is a magnetic scanning device and controls the electron beam spots to move in two dimensions on a working plane. The electron gun optical device can cause distortion of the appearance shape and energy density distribution of electron beam spots due to the influence of the manufacturing process, wherein the influence of the magnetic induction intensity nonuniformity of the magnetic scanning device is particularly remarkable, and the distortion is more serious when the scanning angle of the electron beam is larger. The electron beam powder bed additive manufacturing equipment is required to have a large scanning angle capability, and a beam spot correction device is required to be additionally arranged in order to ensure the consistency of electron beam spots.
The invention patent application with the publication number of CN 103474308A and the name of an electron gun with an electromagnetic axis-combining device is referred to, and the Pierce electron gun adopts a descaler device to correct the distortion of beam spots, and conventionally adopts a static correction working mode, so that the requirement of fast synchronous correction of the electron beam powder bed additive manufacturing equipment is not met. In addition, the astigmatism eliminating device increases the flying distance of the electron beam for the independent device, which is unfavorable for focusing the electron beam.
Disclosure of Invention
The invention aims to solve the technical problems that the astigmatic device of the existing Pierce electron gun corrects beam distortion in a static correction working mode, the requirement of quick synchronous correction of electron beam powder bed additive manufacturing equipment cannot be met, the astigmatic device increases the flight path of electron beams for an independent device, and focusing of the electron beams is not facilitated. In addition, the astigmatism eliminating device increases the flying distance of the electron beam for the independent device, which is unfavorable for the focusing of the electron beam, and provides an electron gun for electron beam powder bed additive manufacturing equipment which integrates the scanning device and the astigmatism eliminating bulk device into a whole and synchronously works the scanning and the astigmatism eliminating.
The invention provides an electron gun for electron beam powder bed additive manufacturing equipment, which comprises a cathode, a beam focusing electrode, an anode, a shaft combining device, a focusing device and a scanning astigmatism eliminating integrated device, wherein the cathode, the beam focusing electrode, the anode, the shaft combining device, the focusing device and the scanning astigmatism eliminating integrated device are coaxially arranged in sequence from top to bottom;
the scanning astigmatism elimination integrated device comprises a ferromagnetic frame, a scanning winding and an astigmatism elimination winding; the ferromagnetic frame is in an axisymmetric cylindrical annular structure, the inner wall of the ferromagnetic frame is provided with 4m wire grooves which axially extend and are equally divided according to the circumference, m is an even number not less than 2, and teeth are formed between adjacent wire grooves; the scanning winding and the astigmatic winding jointly occupy all 4m wire slots;
the scanning winding comprises an x-phase winding and a y-phase winding; the astigmatic winding comprises an alpha phase winding and a beta phase winding;
when the scanning winding is electrified, the x-phase winding and the y-phase winding generate a magnetic field perpendicular to the flight reference direction of the electron beam; when the astigmatic winding is energized, the α, β two-phase windings produce two sets of opposing magnetic fields in a direction perpendicular to the electron beam flight reference direction.
Preferably, the x-phase winding and the y-phase winding have different axes
Radian angle; alpha phase winding and beta phase winding axes are different +.>
Radian angle.
Preferably, regarding the scanning winding, the winding turns in the wire slot are quantitatively distributed along the circumference on the longitudinal section of the ferromagnetic frame according to a sine rule, and the x-phase winding is arranged on the nthCoefficient of turns k in the slot xn Then:
in the formula (1), k xn Negative values indicate opposite winding directions, and the number of turns of the x-phase winding in the nth slot is:
Z xn ＝k xn μ x (2)
in the formula (2), μ x For scanning the reference value of the number of turns of the X-phase winding in the winding, by assigning k xn Non-0 minimum value k of (2) xmin The corresponding number of turns is a certain integer value Z xmin Mu is calculated x Values, namely:
the number of turns of the y-phase winding in the nth slot is equal to the number of turns of the x-phase winding in the n+mth slot, namely:
Z yn ＝Z x(n+m) (4)；
regarding the astigmatic winding, the winding turns in the wire slot are quantitatively distributed along the circumference on the cross section of the scanning astigmatic integrated device according to the sine rule, and the alpha-phase winding turns coefficient k in the nth slot α Then:
the number of turns of the alpha phase winding in the nth slot is:
Z αn ＝k αn μ α (6)
in the formula (6), μ α For the reference value of the number of turns of the astigmatic winding, by designating k αn Non-0 minimum value k of (2) αmin The corresponding number of turns is a certain integer value Z αmin Mu is calculated α Values, namely:
the number of turns of the beta-phase winding in the nth slot is equal to the number of turns of the alpha-phase winding in the n+mth slot, namely:
Z βn ＝Z α(n+m) (8)。
preferably, when the value of m is 2, the ferromagnetic frame is provided with 8 wire grooves and 8 teeth, the 8 wire grooves are a wire groove No. 1, a wire groove No. 2, a wire groove No. 3, a wire groove No. 4, a wire groove No. 5, a wire groove No. 6, a wire groove No. 7 and a wire groove No. 8, the 8 teeth are a tooth No. 1, a tooth No. 2, a tooth No. 3, a tooth No. 4, a tooth No. 5, a tooth No. 6, a tooth No. 7 and a tooth No. 8 respectively, the enameled wire is wound on the tooth No. 1, then wound on the tooth No. 5 from the outer edge of the ferromagnetic frame clockwise, so as to form a y-phase winding, and the enameled wire is wound on the tooth No. 3, then wound on the tooth No. 7 clockwise from the outer edge of the ferromagnetic frame, so as to form an x-phase winding;
the enamelled wire is wound on the tooth 2, then clockwise from the outer edge of the ferromagnetic frame and is wound on the tooth 6 to form an alpha phase winding, and the enamelled wire is wound on the tooth 4, then clockwise from the outer edge of the ferromagnetic frame and is wound on the tooth 8 to form a beta phase winding.
Preferably, when the value of m is 4, the ferromagnetic frame has 16 wire slots and 16 teeth, the 16 wire slots are respectively a wire slot No. 1, a wire slot No. 2, a wire slot No. 3, a wire slot No. 4, a wire slot No. 5, a wire slot No. 6, a wire slot No. 7, a wire slot No. 8, a wire slot No. 9, a wire slot No. 10, a wire slot No. 11, a wire slot No. 12, a wire slot No. 13, a wire slot No. 14, a wire slot No. 15, a wire slot No. 16, and the 16 teeth are respectively a tooth No. 1, a tooth No. 2, a tooth No. 3, a tooth No. 4, a tooth No. 5, a tooth No. 6, a tooth No. 7, a tooth No. 8, a tooth No. 9, a tooth No. 10, a tooth No. 11, a tooth No. 12, a tooth No. 13, a tooth No. 14, a tooth No. 15, and a tooth No. 16, and the paint wire is wound on the tooth No. 1, then wound clockwise from the outer edge of the ferromagnetic frame and then wound on the tooth No. 8, then wound clockwise from the tooth No. 9, and then wound on the tooth No. 16, and finally the outer edge of the ferromagnetic frame is wound around the phase winding wire; the enamelled wire is wound on the No. 5 tooth, then clockwise from the outer edge of the ferromagnetic frame, is wound on the No. 12 tooth, then is wound on the No. 13 tooth, then clockwise from the outer edge of the ferromagnetic frame, and finally is wound on the No. 4 tooth, so that an x-phase winding is formed;
the enamelled wire is wound on the No. 3 tooth, then clockwise from the outer edge of the ferromagnetic frame, is wound on the No. 10 tooth, then is wound on the No. 11 tooth, then clockwise from the outer edge of the ferromagnetic frame, and finally is wound on the No. 2 tooth, so that an alpha-phase winding is formed; the enamelled wire is wound on the No. 7 tooth, then clockwise from the outer edge of the ferromagnetic frame, then wound on the No. 14 tooth, then wound on the No. 15 tooth, then clockwise from the outer edge of the ferromagnetic frame, and finally wound on the No. 6 tooth, thereby forming the beta-phase winding.
The invention has the beneficial effects that the scanning astigmatism elimination integrated device is integrated, and the electron beam spot is conveniently and rapidly corrected in the wide scanning process of the electron gun of the electron beam powder bed additive manufacturing equipment by selecting the same parameters of the scanning winding and the astigmatism elimination winding; the scanning astigmatism elimination integrated device shortens the flight path of the electron beam, and is beneficial to focusing the electron beam and reducing the astigmatism degree; the symmetrical distribution of the scanning winding and the astigmatic winding improves the utilization rate of the ferromagnetic frame wire slots.
Further features of the invention will be apparent from the description of the embodiments that follows.
Drawings
FIG. 1 is a schematic diagram of the structure of an electron gun equipped for electron beam powder bed additive manufacturing;
FIG. 2 is a longitudinal cross-sectional view of a scanning astigmatic integrated device;
FIG. 3 is a view in the P direction of FIG. 2;
FIG. 4 is a longitudinal cross-sectional view of the ferromagnetic frame of the structure of FIG. 2 with the winding coil removed;
FIG. 5 is a view in the direction P of FIG. 4;
FIG. 6 is a schematic diagram of a winding pattern of a scan winding and a stigmator winding of a scan stigmator integrated device;
FIG. 7 is a schematic diagram of a Y-phase winding layout of a scan winding with 8 slots and 8 teeth of a ferromagnetic frame of a scan astigmatic integrated device;
FIG. 8 is a schematic diagram of an X-phase winding layout of a scan winding with 8 slots and 8 teeth in a ferromagnetic frame of a scan astigmatic integrated device;
FIG. 9 is a schematic diagram of an alpha phase winding layout of an anti-astigmatism winding with 8 wire slots and 8 teeth of a ferromagnetic frame scanning the anti-astigmatism integrated device;
FIG. 10 is a schematic diagram of a beta-phase winding layout of a stigmator with 8 wire slots and 8 teeth for a ferromagnetic frame of a scanning stigmator integrated device;
FIG. 11 is a schematic diagram of a Y-phase winding layout of a scan winding with 16 slots and 16 teeth of a ferromagnetic frame of a scan astigmatic integrated device;
FIG. 12 is a schematic diagram of an x-phase winding layout of a scan winding with 16 slots and 16 teeth in a ferromagnetic frame of a scan astigmatic integrated device;
FIG. 13 is a schematic diagram of an alpha phase winding layout of an anti-astigmatism winding with 16 slots and 16 teeth in a ferromagnetic frame scanning the anti-astigmatism integrated device;
fig. 14 is a diagram of the beta-phase winding layout of the stigmator with 16 slots and 16 teeth for a ferromagnetic frame of a scanning stigmator integrated device.
The symbols in the drawings illustrate:
1. a cathode, a beam focusing electrode, an anode, a shaft combining device and a focusing device, wherein the beam focusing electrode is arranged on the cathode; 6. scanning an astigmatism elimination integrated device, wherein the astigmatism elimination integrated device comprises an electron beam, a workpiece, a ferromagnetic frame and a winding coil;
indicates a direction into the paper, and ". If indicates a direction out of the paper.
Detailed Description
The invention will be described in further detail with reference to the accompanying drawings.
As shown in fig. 1, an electron gun of electron beam powder bed additive manufacturing equipment comprises a cathode 1, a beam focusing electrode 2, an anode 3, a shaft combining device 4, a focusing device 5 and a scanning astigmatism eliminating integrated device 6 which are coaxially and centrally arranged from top to bottom in sequence; the electron beam 7 generated by the cathode 1 is converged on the workpiece 8 after passing through the beam focusing electrode 2, the anode 3, the shaft combining device 4, the focusing device 5 and the scanning astigmatism eliminating integrated device 6 in sequence under the action of a high-voltage accelerating force field.
The cathode 1, the beam focusing electrode 2, the anode 3, the axis combining device 4 and the focusing device 5 all adopt the conventional structure of the electron gun in the prior art, the electron beam 7 generated by the cathode 1 has the corresponding constraint when passing through the beam focusing electrode 2, the anode 3 and the axis combining device 4 although the initial emission direction is deviated, the direction is concentrated compared with the axis center, and the controllable magnetic field generated by the focusing device 5 can accelerate the electron beam 7 to gather towards the axis center when passing through the electromagnetic lens focusing device 5, so that an ideal spot is gathered and falls on a workpiece 8 with the corresponding height.
The technical improvement of the invention is that a scanning astigmatic integrated device 6 is arranged, as shown in fig. 2 and 3, the scanning astigmatic integrated device 6 adopts a non-salient pole structure form and mainly comprises a ferromagnetic frame 9 and a winding coil 10, and the winding coil 10 comprises a scanning winding and an astigmatic winding; the ferromagnetic frame 9 is made of high-frequency magnetic conductive materials, is in an axisymmetric cylindrical annular structure, and is a structural support and a surrounding body of the whole scanning anti-astigmatism integrated device. As shown in fig. 4 and 5, the inner wall of the ferromagnetic frame 9 is provided with 4m slots (m is an even number not less than 2) extending axially and equally dividing circumferentially, the slot numbers can be marked as 1,2, …,4m in turn, and the cavity enclosed by the inner wall of the ferromagnetic frame 9 forms the effective space of the magnetic field of the scanning astigmatic integrated device 6 (the space is used as the flight passage of the charged particle beam through the deflection scanning device), so as to realize deflection for the electron beam 7 and be accompanied with loading area of deformity correction. Teeth, that is to say 4m teeth, are formed between two adjacent wire grooves.
The scan winding and the astigmatic winding together occupy all 4m slots.
Referring to fig. 2, 3 and 6, the scanning winding comprises an x-phase winding and a y-phase winding, which are wound by enameled wires or multi-strand wire packages, and the axes of the x-phase winding and the y-phase winding are different
Radian angle, x-phase winding occupies a part of wire slot, y-phase winding occupies a part of wire slot, and winding turns in each wire slotThe windings of each phase are intensively arranged in each wire slot, and the turns of each wire slot winding represent +.>
Sum of turns in circular arc, turns coefficient k of x-phase winding in n (n=1, 2, …,4 m) th slot xn Then:
in the formula (1), k xn Negative values indicate opposite winding directions, and the number of turns of the x-phase winding in the nth slot is:
Z xn ＝k xn μ x (2)
in the formula (2), μ x For scanning the reference value of the number of turns of the X-phase winding in the winding, by assigning k xn Non-0 minimum value k of (2) xmin The corresponding number of turns is a certain integer value Z xmin Mu is calculated x Values, namely:
the number of turns of the y-phase winding in the n (n=1, 2, …,4 m) th slot is equal to the number of turns of the x-phase winding in the n+m th slot, namely:
Z yn ＝Z x(n+m) (4)。
the astigmatic winding comprises an alpha phase winding and a beta phase winding which are wound by enameled wires or stranded wire wrapping wires, and the axial line phase difference of the alpha phase winding and the beta phase winding is different
The radian angle, the alpha phase winding occupies a part of the wire slot, the beta phase winding occupies a part of the wire slot, the winding turns in each wire slot are quantitatively distributed along the inner circumference on the section of the scanning astigmatism elimination integrated device according to the sine rule, namely, each phase of winding is intensively placed in each wire slot, and the winding turns in each wire slot represent +>
The sum of turns in the circular arc of circumference, the winding direction of the alpha phase winding in each wire slot is consistent, and the axis difference of the alpha phase winding and the x phase winding is +.>
Radian angle, number of turns k of alpha phase winding in nth (n=1, 2, …,4 m) slot α Then:
the number of turns of the alpha phase winding in the nth slot is:
Z αn ＝k αn μ α (6)
in the formula (6), μ α For the reference value of the number of turns of the astigmatic winding, by designating k αn Non-0 minimum value k of (2) αmin The corresponding number of turns is a certain integer value Z αmin Mu is calculated α Values, namely:
the number of turns of the beta-phase winding in the n (n=1, 2, …,4 m) th slot is equal to the number of turns of the alpha-phase winding in the n+m th slot, namely:
Z βn ＝Z α(n+m) (8)
the power supply device for externally supplying power to the scanning winding and the astigmatic winding is an independent electrodeless controllable bipolar power supply, and 4 groups of currents with controllable magnitudes and polarities are respectively supplied to the 4 groups of windings corresponding to each other. After the scanning windings are electrified, the x-phase winding and the y-phase winding generate magnetic fields perpendicular to the flight reference direction of the electron beam, and the resultant vector of the scanning magnetic fields can be flexibly adjusted by respectively adjusting the magnitude and the polarity of the currents of the x-phase winding and the y-phase winding, so that the offset motion of the spot of the electron beam 7 on the plane of the workpiece 8 is controlled. After the astigmatic winding is electrified, two sets of opposite magnetic fields are generated by the alpha and beta two-phase windings in the direction perpendicular to the electron beam flight reference direction, and the magnitude and polarity of the opposite magnetic fields can be conveniently adjusted by respectively adjusting the magnitude and polarity of the current of the alpha and beta two-phase windings, so that the shape of an envelope curve of the offset displacement of the electron beam 7 in the cavity of the ferromagnetic frame 9 is changed, and the distortion effect of the electron beam 7 under the deflection angle is corrected.
The selection of Z xmin And Z αmin The inductance of each phase of windings of x, y, alpha and beta is similar, and the electrical time parameters are similar.
For example, when m is 2, the ferromagnetic frame 9 has 8 slots and 8 teeth, as shown in fig. 7, the 8 slots are slot 1 slot 9-1, slot 2 slot 9-2, slot 3 slot 9-3, slot 4 slot 9-4, slot 5 9-5, slot 6 slot 9-6, slot 7 slot 9-7, and slot 8 slot 9-8, the 8 teeth are respectively tooth 1, tooth 2, tooth 902, tooth 3, tooth 903, tooth 4, tooth 5, tooth 905, tooth 6, tooth 7, and tooth 8, the enameled wire is wound on tooth 901 and then wound on tooth 5 from the outer edge of the ferromagnetic frame clockwise to form a y-phase winding, the enameled wire is wound on tooth 3 and then wound on tooth 905 from the outer edge of the ferromagnetic frame 9 clockwise to form a y-phase winding, and the phase difference between the two-phase windings (as shown in fig. 8, 907) is shown in fig. 8, and the phase difference between the two-phase windings (x-phase winding and y-phase winding) is shown in fig. 7, and the phase difference between the phase windings shown in fig. 8 and the x-phase difference is shown in fig. 907
Radian angle. As shown in fig. 9, the enameled wire is wound on the tooth 902 No. 2, then wound on the tooth 906 No. 6 clockwise from the outer edge of the ferromagnetic frame, so as to form an alpha phase winding, the enameled wire is wound on the tooth 904 No. 4, then wound on the tooth 908 No. 8 clockwise from the outer edge of the ferromagnetic frame, so as to form a beta phase winding (as shown in fig. 10), and the axes of the alpha phase winding and the beta phase winding are different from each other>
Radian angle. Alpha phase winding axis and x phase winding axis difference +.>
Radian angle, beta phase winding axis and y phase winding axisDifference (S)>
Radian angle.
For example, when m is 4, the ferromagnetic frame 9 has 16 slots and 16 teeth as shown in fig. 11, the 16 slots are slot 1 slot 9-1, slot 2 slot 9-2, slot 3 slot 9-3, slot 4 slot 9-4, slot 5 slot 9-5, slot 6 slot 9-6, slot 7 slot 9-7, slot 8 slot 9-8, slot 9-9, slot 10 slot 9-10, slot 11 slot 9-11, slot 12 slot 9-12, slot 13 slot 9-13, slot 14 slot 9-14, slot 15 slot 9-15, slot 16 slot 9-16, the 16 teeth are respectively tooth 901, tooth 902, tooth 903, tooth 904, tooth 905, tooth 906, tooth 907, tooth 908, tooth 909, tooth 910, tooth 911, tooth 912, tooth 913, tooth 914, tooth 915 and tooth 916, the enamelled wire is wound on tooth 901, clockwise from the outer edge of the ferromagnetic frame, then wound on tooth 908, then wound on tooth 909, clockwise from the outer edge of the ferromagnetic frame, and finally wound on tooth 916, thereby forming a y-phase winding; as shown in fig. 12, the enamelled wire is wound around tooth 5 and then around tooth 12 and then around tooth 13 respectively around tooth 905 and then around tooth 12 and then around tooth 904 respectively around the outside of the ferromagnetic frame, so as to form an x-phase winding, the axes of the x-phase winding and the y-phase winding are different
Radian angle; as shown in fig. 13, the enameled wire is wound around tooth 3 from the outer edge of the ferromagnetic frame clockwise, then wound around tooth 10, then wound around tooth 11, 911, then wound around tooth 2, then wound around tooth 902 clockwise, thereby forming an alpha phase winding; as shown in fig. 14, the enameled wire is wound on tooth 7 from the outer edge of the ferromagnetic frame 907, then wound on tooth 14 from the outer edge of the ferromagnetic frame 914, then wound on tooth 15 from the outer edge of the ferromagnetic frame 915, then wound on tooth 6 from the outer edge of the ferromagnetic frame clockwiseTeeth 906, thereby forming a beta phase winding. Alpha, beta two-phase winding axis phase difference +.>
Radian angle. Alpha phase winding axis and x phase winding axis difference +.>
Radian angle, difference between beta phase winding axis and y phase winding axis +.>
Radian angle.
The scanning astigmatism eliminating integrated device 6 has a simple structure, and the electron gun has the advantages of high coaxiality, high output precision and the like through the arrangement of the scanning astigmatism eliminating integrated device 6.
The invention and its embodiments have been described above by way of illustration and not limitation, and the invention is illustrated in the accompanying drawings and described in the drawings in which the actual structure is not limited thereto. Therefore, if one skilled in the art is informed by this disclosure, other configurations of parts, driving devices and connection modes are adopted without creatively designing similar structures and embodiments without departing from the spirit of the present invention, and the present invention shall not be limited by the scope of the present invention.
Claims (3)
1. An electron gun for electron beam powder bed additive manufacturing equipment is characterized by comprising a cathode, a beam focusing electrode, an anode, a shaft combining device, a focusing device and a scanning astigmatism eliminating integrated device which are coaxially and centrally arranged in sequence from top to bottom;
the scanning astigmatic integrated device comprises a ferromagnetic frame, a scanning winding and an astigmatic winding; the ferromagnetic frame is in an axisymmetric cylindrical annular structure, the inner wall of the ferromagnetic frame is provided with 4m wire grooves which axially extend and are equally divided according to the circumference, m is an even number not less than 2, and teeth are formed between adjacent wire grooves; the scanning winding and the astigmatic winding jointly occupy all 4m wire slots;
the scanning winding comprises an x-phase winding and a y-phase winding;
the astigmatism elimination winding comprises an alpha phase winding and a beta phase winding;
when the scanning winding is electrified, the x-phase winding and the y-phase winding generate a magnetic field perpendicular to the flight reference direction of the electron beam; when the astigmatic winding is electrified, the alpha and beta two-phase windings generate two sets of opposite magnetic fields in the direction perpendicular to the electron beam flight reference direction;
the axial phase difference of the x-phase winding and the y-phase winding
Radian angle;
the axial phase difference of the alpha phase winding and the beta phase winding
Radian angle;
regarding the scanning winding, the winding turns in the wire slot are quantitatively distributed along the circumference on the longitudinal section of the ferromagnetic frame according to the sine rule, and the x-phase winding turns coefficient k in the nth slot xn Then:
in the formula (1), k xn Negative values indicate opposite winding directions, and the number of turns of the x-phase winding in the nth slot is:
Z xn ＝k xn μ x (2)
in the formula (2), μ x For scanning the reference value of the number of turns of the X-phase winding in the winding, by assigning k xn Non-0 minimum value k of (2) xmin The corresponding number of turns is a certain integer value Z xmin Mu is calculated x Values, namely:
the number of turns of the y-phase winding in the nth slot is equal to the number of turns of the x-phase winding in the n+mth slot, namely:
Z yn ＝Z x(n+m) (4)；
regarding the astigmatic winding, the winding turns in the wire slot are quantitatively distributed along the circumference on the cross section of the scanning astigmatic integrated device according to the sine rule, and the alpha-phase winding turns coefficient k in the nth slot α Then:
the number of turns of the alpha phase winding in the nth slot is:
Z αn ＝k αn μ α (6)
in the formula (6), μ α For the reference value of the number of turns of the astigmatic winding, by designating k αn Non-0 minimum value k of (2) αmin The corresponding number of turns is a certain integer value Z αmin Mu is calculated α Values, namely:
the number of turns of the beta-phase winding in the nth slot is equal to the number of turns of the alpha-phase winding in the n+mth slot, namely:
Z βn ＝Z α(n+m) (8)。
2. the electron beam powder bed additive manufacturing equipment electron gun according to claim 1, wherein when the m is 2, the ferromagnetic frame has 8 wire grooves and 8 teeth, the 8 wire grooves are respectively a 1 st wire groove, a 2 nd wire groove, a 3 rd wire groove, a 4 th wire groove, a 5 th wire groove, a 6 th wire groove, a 7 th wire groove, and an 8 th wire groove, the 8 teeth are respectively a 1 st tooth, a 2 nd tooth, a 3 rd tooth, a 4 th tooth, a 5 th tooth, a 6 th tooth, a 7 th tooth, and an 8 th tooth, the enameled wire is wound on the 1 st tooth, then wound on the 5 th tooth from the outer edge of the ferromagnetic frame clockwise to form a y-phase winding, and the enameled wire is wound on the 3 rd tooth, then wound on the 7 th tooth clockwise from the outer edge of the ferromagnetic frame to form an x-phase winding;
the enamelled wire is wound on the tooth 2, then clockwise from the outer edge of the ferromagnetic frame and is wound on the tooth 6 to form an alpha phase winding, and the enamelled wire is wound on the tooth 4, then clockwise from the outer edge of the ferromagnetic frame and is wound on the tooth 8 to form a beta phase winding.
3. The electron beam powder bed additive manufacturing equipment electron gun according to claim 1, wherein when the m is 4, the ferromagnetic frame has 16 slots and 16 teeth, the 16 slots are respectively a 1 st slot, a 2 nd slot, a 3 rd slot, a 4 th slot, a 5 th slot, a 6 th slot, a 7 th slot, a 8 th slot, a 9 th slot, a 10 th slot, a 11 th slot, a 12 th slot, a 13 th slot, a 14 th slot, a 15 th slot, a 16 th slot, and 16 th teeth are respectively a 1 st tooth, a 2 nd tooth, a 3 rd tooth, a 4 th tooth, a 5 th tooth, a 6 th tooth, a 7 th tooth, a 8 th tooth, a 9 th tooth, a 10 th tooth, a 11 th tooth, a 12 th tooth, a 13 th tooth, a 14 th tooth, a 15 th tooth, a 16 th tooth, and a ferromagnetic winding wire is wound around the 1 th tooth clockwise from the outer edge of the frame, and then wound around the ferromagnetic frame clockwise from the 8 th tooth, and then the ferromagnetic winding wire is wound around the outer edge of the ferromagnetic frame; the enamelled wire is wound on the No. 5 tooth, then clockwise from the outer edge of the ferromagnetic frame, is wound on the No. 12 tooth, then is wound on the No. 13 tooth, then clockwise from the outer edge of the ferromagnetic frame, and finally is wound on the No. 4 tooth, so that an x-phase winding is formed;
the enamelled wire is wound on the No. 3 tooth, then clockwise from the outer edge of the ferromagnetic frame, is wound on the No. 10 tooth, then is wound on the No. 11 tooth, then clockwise from the outer edge of the ferromagnetic frame, and finally is wound on the No. 2 tooth, so that an alpha-phase winding is formed; the enamelled wire is wound on the No. 7 tooth, then clockwise from the outer edge of the ferromagnetic frame, then wound on the No. 14 tooth, then wound on the No. 15 tooth, then clockwise from the outer edge of the ferromagnetic frame, and finally wound on the No. 6 tooth, thereby forming the beta-phase winding.
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| CN206122695U (en) * | 2015-11-21 | 2017-04-26 | 天津清研智束科技有限公司 | Realize controlling means and vibration material disk equipment of scanning of electron beam broad width |
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| 多相绕组电子束偏转扫描装置仿真分析;薛展仁;韦寿祺;李曌;;真空科学与技术学报(第05期);全文 * |
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